JP6288477B2 - 三次元座標測定装置 - Google Patents

三次元座標測定装置 Download PDF

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Publication number
JP6288477B2
JP6288477B2 JP2016015852A JP2016015852A JP6288477B2 JP 6288477 B2 JP6288477 B2 JP 6288477B2 JP 2016015852 A JP2016015852 A JP 2016015852A JP 2016015852 A JP2016015852 A JP 2016015852A JP 6288477 B2 JP6288477 B2 JP 6288477B2
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Prior art keywords
carriage
guide
axis direction
support
surface plate
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JP2016015852A
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English (en)
Japanese (ja)
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JP2016145824A (ja
JP2016145824A5 (enrdf_load_stackoverflow
Inventor
幸男 菅野
幸男 菅野
圭一郎 五味
圭一郎 五味
藤田　隆
隆 藤田
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Tokyo Seimitsu Co Ltd
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Tokyo Seimitsu Co Ltd
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=56686235&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP6288477(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Publication of JP2016145824A publication Critical patent/JP2016145824A/ja
Publication of JP2016145824A5 publication Critical patent/JP2016145824A5/ja
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  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2016015852A 2015-01-30 2016-01-29 三次元座標測定装置 Active JP6288477B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015016243 2015-01-30
JP2015016243 2015-01-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018018410A Division JP6454952B2 (ja) 2015-01-30 2018-02-05 三次元座標測定装置

Publications (3)

Publication Number Publication Date
JP2016145824A JP2016145824A (ja) 2016-08-12
JP2016145824A5 JP2016145824A5 (enrdf_load_stackoverflow) 2017-11-24
JP6288477B2 true JP6288477B2 (ja) 2018-03-07

Family

ID=56686235

Family Applications (5)

Application Number Title Priority Date Filing Date
JP2016015852A Active JP6288477B2 (ja) 2015-01-30 2016-01-29 三次元座標測定装置
JP2018018410A Active JP6454952B2 (ja) 2015-01-30 2018-02-05 三次元座標測定装置
JP2018207342A Pending JP2019035764A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018230748A Pending JP2019035777A (ja) 2015-01-30 2018-12-10 三次元座標測定装置
JP2019081046A Active JP6788208B2 (ja) 2015-01-30 2019-04-22 三次元座標測定装置

Family Applications After (4)

Application Number Title Priority Date Filing Date
JP2018018410A Active JP6454952B2 (ja) 2015-01-30 2018-02-05 三次元座標測定装置
JP2018207342A Pending JP2019035764A (ja) 2015-01-30 2018-11-02 三次元座標測定装置
JP2018230748A Pending JP2019035777A (ja) 2015-01-30 2018-12-10 三次元座標測定装置
JP2019081046A Active JP6788208B2 (ja) 2015-01-30 2019-04-22 三次元座標測定装置

Country Status (1)

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JP (5) JP6288477B2 (enrdf_load_stackoverflow)

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61131612U (enrdf_load_stackoverflow) * 1985-02-04 1986-08-16
JPS62198710A (ja) * 1986-02-26 1987-09-02 Mitsutoyo Mfg Corp 三次元測定機
JPS62235514A (ja) * 1986-04-07 1987-10-15 Amada Co Ltd ３次元測定装置の駆動装置
JPS62167111U (enrdf_load_stackoverflow) * 1986-04-14 1987-10-23
JPS6435310A (en) * 1987-07-31 1989-02-06 Mitutoyo Corp Multidimensional measuring machine
GB8908854D0 (en) * 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US4928396A (en) * 1989-03-07 1990-05-29 The Warner & Swasey Company Coordinate measuring machine with improved carriage drive system
JP2776427B2 (ja) * 1992-05-14 1998-07-16 株式会社東京精密 座標測定機
JPH07139936A (ja) * 1993-11-15 1995-06-02 Tokyo Seimitsu Co Ltd 座標測定機
JPH09145342A (ja) * 1995-11-27 1997-06-06 Nikon Corp 直線案内装置のコードガイド装置
JPH1026203A (ja) * 1996-07-12 1998-01-27 Mitsutoyo Corp 摩擦駆動機構
DE19821372A1 (de) * 1998-05-13 1999-11-18 Zeiss Carl Fa Koordinatenmeßgerät und Verfahren zur Steuerung eines solchen
JP4722400B2 (ja) * 2004-01-26 2011-07-13 株式会社ミツトヨ ガイドレールの支持装置、ガイドレール装置、駆動装置および測定機
DE102005058504B3 (de) * 2005-12-02 2007-05-16 Zeiss Ind Messtechnik Gmbh Vorrichtung zum Bestimmen einer Messgröße an einem Messobjekt
JP2011135751A (ja) * 2009-12-25 2011-07-07 Nikon Corp 駆動装置および測定装置
JP2012127851A (ja) * 2010-12-16 2012-07-05 Nikon Corp ガイド機構および３次元測定機
JP2014056352A (ja) * 2012-09-11 2014-03-27 Canon Inc 位置決め装置及び計測装置
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
JP2014238376A (ja) * 2013-06-10 2014-12-18 キヤノン株式会社 測定装置

Also Published As

Publication number Publication date
JP2016145824A (ja) 2016-08-12
JP2019035777A (ja) 2019-03-07
JP6454952B2 (ja) 2019-01-23
JP2018087822A (ja) 2018-06-07
JP2019035764A (ja) 2019-03-07
JP6788208B2 (ja) 2020-11-25
JP2019124707A (ja) 2019-07-25

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