JP6286017B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus for heat-treating an object to be heat-treated.

  As a conventional heat treatment apparatus, there is one in which a heat treatment chamber in which an object to be heat treated is accommodated and an air conditioning chamber in which a heater and a blower fan are provided are defined in a heat insulation furnace (for example, Patent No. 1). No. 4372806). The heat treatment chamber and the air conditioning chamber communicate with each other via a communication passage, and the heat treatment apparatus sends air (hot air) heated in the air conditioning chamber to the heat treatment chamber via the communication passage by a blower fan. It is configured to heat treat the object. In addition to the communication path, an outside air suction path and an exhaust path are provided, and the air in the furnace is ventilated while being exchanged with the outside air during operation of the heat treatment apparatus. As an example of the object to be processed, there is a glass substrate for FPD (flat panel display).

  FIG. 4 is a cross-sectional view showing a main part of a conventional heat treatment apparatus. As shown in FIG. 4, the blower fan 10 includes a fan motor from which the motor shaft 12 protrudes from the motor unit 11 and an impeller 13 attached to the tip of the motor shaft 12. The motor unit 11 is supported on the outer surface of the furnace wall 101 by a cylindrical column 21 installed around the motor shaft 12. The fan motor is fixed to the furnace wall 101 with a bolt 22 and a nut 23 with a flange 111 formed on one outer periphery of the motor unit 11.

Japanese Patent No. 4372806

  In such a heat treatment apparatus, it is required to increase the ventilation amount from the pressure loss of the duct supplying hot air and the influence of the solvent gas coming out of the object to be processed, and in order to cope with this, the motor shaft 12 is rotated at a high speed, It is necessary to obtain high output.

  On the other hand, it is also necessary to take measures against heat to maintain the stable operation of the fan motor. First, the thermal atmosphere sealing plate 30 is installed in the through holes 1011 and 1021 provided in the furnace wall 101 and the heat insulating material 102 for the purpose of heat insulation from the inside of the furnace (high temperature side). Further, a long motor shaft 12 is used in order to suppress the heat effect transmitted to the motor unit 11.

  Such heat countermeasures increase the overhang load applied to the fan motor, making it difficult to achieve the required high output of the fan motor. Moreover, there is a problem that the amount of protrusion of the motor unit 11 to the outside of the furnace (indicated by a symbol T in FIG. 4) is large, and the installation space for the fan motor is increased.

  The present invention has been made in view of the above problems, and in a heat treatment apparatus in which a fan motor having a motor shaft inserted into a through hole penetrating a furnace wall of a heat insulation furnace is installed outside the heat insulation furnace. The purpose is to reduce the load on the motor, to increase the output, and to install in a space-saving manner even if a long motor shaft is used.

  The heat treatment apparatus according to the present invention includes a heat insulation furnace and a fan attached to the heat insulation furnace. The fan includes a fan motor having a motor shaft protruding from one end face of the motor unit, and an impeller attached to the tip of the motor shaft. The motor unit is fixed to the outside of the heat insulation furnace, and the motor shaft Is inserted through a through hole formed in the furnace wall of the heat insulation furnace. A flow rate adjusting member is provided between the one end surface and the outer surface of the furnace wall of the heat insulation furnace and inside the outer peripheral end position of the one end surface in the radial direction of the motor shaft. The flow rate adjusting member guides the air outside the heat insulation furnace into the heat insulation furnace through the through hole.

  According to the heat treatment apparatus, the air outside the furnace is sucked into the furnace through the through hole, the flow rate of which is adjusted by the flow rate adjusting member. For this reason, the motor shaft can be cooled by this air flow while suppressing a temperature drop in the furnace atmosphere. Therefore, heat transfer to the motor unit can be efficiently reduced.

  In the above heat treatment apparatus, the motor unit is fixed to the outer surface of the furnace wall of the heat insulation furnace by a cylindrical column installed around the motor shaft, and a plurality of intake holes are provided in the peripheral wall of the column. preferable. In this configuration, the flow rate adjusting member is constituted by the support column provided with the intake holes. According to this structure, the air outside a furnace can be attracted | sucked from the several inlet hole provided in the surrounding wall of a support | pillar. The flow rate of the sucked air can be controlled by the number and size of the intake holes.

  In the heat treatment apparatus, the flow rate adjusting member is a cylindrical member, and a gap is provided between the member and the one end surface, thereby allowing air outside the heat insulation furnace to pass through the gap and the through hole. It is preferable to guide it into an adiabatic furnace.

  In the heat treatment apparatus, the motor unit includes a flange that forms at least a part of the one end surface around the motor unit, and the fan motor includes a nut fitted into a bolt that penetrates the flange of the motor unit, and the nut Is preferably fixed to the furnace wall of the heat insulation furnace in a state of being interposed between the outer surface of the furnace wall of the heat insulation furnace and the flange. According to this configuration, a gap corresponding to at least the height of the nut is formed between the flange and the furnace wall of the heat insulation furnace. Then, air outside the furnace is sucked using the gap as a suction port. The size of the suction port can be adjusted by the height of the gap, and the flow rate of the sucked air can be controlled.

  The said structure WHEREIN: It is preferable that the flow volume adjustment member is provided inside a nut in the radial direction of a motor shaft. By adjusting the flow rate of the sucked air with the flow rate adjusting member, the temperature decrease in the furnace atmosphere can be suppressed.

  In the heat treatment apparatus, the flow rate adjusting member is preferably provided between the main body of the motor unit and the furnace wall of the heat insulation furnace and inside the side surface position of the main body in the radial direction of the motor shaft. .

  In the heat treatment apparatus, the impeller has a slot from one end surface on the furnace wall side of the heat insulation furnace to the other end surface on the opposite side in the axial direction of the motor shaft. It is preferable to set it to more than half of the dimension in the axial direction.

  Another heat treatment apparatus according to the present invention includes a heat insulation furnace and a fan attached to the heat insulation furnace. The fan includes a fan motor having a motor shaft protruding from one end face of the motor unit, and an impeller attached to the tip of the motor shaft. The motor unit is fixed to the outside of the heat insulation furnace, and the motor shaft Is inserted through a through hole formed in the furnace wall of the heat insulation furnace. The motor unit has a flange that forms at least a part of the one end surface on the periphery, and the fan motor has a nut fitted into a bolt that penetrates the flange, and the nut is an outer surface of the furnace wall of the heat insulation furnace. It is being fixed to the furnace wall of the heat insulation furnace in the state which interposed between the flange. And the flow volume adjustment member is provided between the said one end surface and the outer surface of the furnace wall of a heat insulation furnace.

  According to this configuration, a gap corresponding to at least the height of the nut is formed between the flange and the furnace wall of the heat insulation furnace. Then, air outside the furnace is sucked using the gap as a suction port. The size of the suction port can be adjusted by the height of the gap, and the flow rate of the sucked air can be controlled. Moreover, the flow rate of the sucked air outside the furnace is further adjusted by the flow rate adjusting member, and is sucked into the furnace through the through hole. For this reason, the motor shaft can be cooled by this air flow while suppressing a temperature drop in the furnace atmosphere. Therefore, heat transfer to the motor unit can be efficiently reduced.

  According to the present invention, the load on the fan motor can be reduced, high output can be achieved, and even a long motor shaft can be used in a small space.

It is a schematic block diagram which shows the heat processing apparatus of this invention. It is sectional drawing which shows the principal part of the heat processing apparatus which concerns on 1st Embodiment of this invention. It is sectional drawing which shows the principal part of the heat processing apparatus which concerns on 2nd Embodiment of this invention. It is sectional drawing which shows the principal part of the conventional heat processing apparatus.

  A heat treatment apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

  First, the outline of the heat treatment apparatus of the present invention will be described. FIG. 1 is a schematic configuration diagram showing a heat treatment apparatus of the present invention. In the heat treatment apparatus 1 of the present invention, a heat treatment chamber 103 in which a workpiece W such as a glass substrate for FPD (flat panel display) is accommodated, and an air conditioning chamber 104 in which a heater 40 and a blower fan 10 are provided are adiabatic furnace 100. It is defined within. The heat treatment chamber 103 and the air conditioning chamber 104 communicate with each other via a return passage 105 and a circulation duct 106. Air (hot air) heated by the heater 40 in the air conditioning chamber 104 is sent to the heat treatment chamber 103 by the blower fan 10 and heat-treats the workpiece W, and then again passes through the return passage 105 and the circulation duct 106 to the air conditioning chamber. 104 is configured to return. Apart from such air flow, air outside the furnace is sucked into the furnace via the intake duct 107 connected to the air conditioning chamber 104, and a part of the air inside the furnace branches from the circulation duct 106. By exhausting through the exhaust duct 108, the air in the furnace is ventilated while being replaced with the outside air.

  FIG. 2 is a cross-sectional view showing the main part of the heat treatment apparatus according to the first embodiment of the present invention. The heat insulating furnace 100 has a structure in which a heat insulating material 102 is stuck inside a metal furnace wall 101. The furnace wall 101 and the heat insulating material 102 are provided with through holes 1011 and 1021, respectively.

  The blower fan 10 includes a fan motor and an impeller 13. The fan motor has a motor unit 11 and a motor shaft 12. The impeller 13 is attached to the motor shaft 12.

  The motor unit 11 is a structure in which components necessary for rotationally driving the motor shaft 12 are housed in a housing. A flange 111 extending in the radial direction is formed at one end of the motor unit 11. The motor unit 11 is fixed to the furnace wall 101 with a flange 111 using bolts 22 and nuts 23. A nut 23 is fitted to the bolt 22 between the flange 111 of the motor unit 11 and the furnace wall 101 of the heat insulation furnace 100, so that the nut 23 is interposed between the bottom surface of the motor unit 11 and the furnace wall 101 of the heat insulation furnace 100. A gap (hereinafter referred to as a gap between the motor unit 11 and the heat insulating furnace 100) is formed.

  The motor shaft 12 is supported in the motor unit 11 and protrudes from one end (the lower end in FIG. 2) of the motor unit 11. The motor shaft 12 is inserted into through holes 1011 and 1021 that penetrate the furnace wall 101 and the heat insulating material 102 of the heat insulating furnace 100. A sufficient clearance is provided between the through holes 1011 and 1021 and the motor shaft 12 in order to allow air to flow. Further, the conventional thermal atmosphere sealing plate 30 (see FIG. 4) is not installed. For this reason, the through holes 1011 and 1021 are not sealed.

  The impeller 13 is attached to the tip of the motor shaft 12. The impeller 13 has a substantially cylindrical outer shape, and the tip of the motor shaft 12 is inserted into a slot 131 provided so as to extend from the center of one axial end surface (upper surface in FIG. 2) to the other end surface (lower surface in FIG. 2). The side is inserted. The motor shaft 12 is joined to the bottom surface of the slot 131 using a fixture.

  The present inventors have determined that when the blower fan 10 is operated with the above-described configuration and the motor shaft 12 is rotationally driven, the inside of the through holes 1011 and 1021 becomes a negative pressure from the outside of the heat insulating furnace 100. As a result, as shown by the arrows, air outside the furnace is sucked with the gap between the upper end of the flow rate adjusting member 25 and the motor unit 11 and the heat insulating furnace 100 as a suction port, and passes through the through-holes 1011 and 1021 to enter the furnace. An air flow flowing inward is generated.

  According to the present embodiment, since the motor shaft 12 is cooled by the air flow, heat transfer to the motor unit 11 can be reduced. As a result, it is not necessary to install an atmosphere seal plate in the through holes 1011 and 1021 to cut off heat, and the overhang load on the fan motor is reduced. This makes it possible to set the mounting depth of the motor shaft 12 in the axial direction of the impeller 13 (see reference symbol D in FIG. 2) longer than in the past (see FIG. 4). The load can be reduced. Further, as a synergistic effect, the motor unit 11 can be fixed close to the heat insulating furnace 100, and a long axis fan motor can be installed in a space-saving manner.

  In addition, the flow volume of the air suck | inhaled is controllable by adjusting the height of the clearance gap between the bottom face of the motor part 11, and the heat insulation furnace 100. FIG. Specifically, as shown in FIG. 2, a flow rate adjusting member 25 is disposed between the bottom surface of the motor unit 11 and the furnace wall 101 of the heat insulation furnace 100. The flow rate adjusting member 25 is formed of a cylindrical member, and is provided upright at or near the periphery of the through hole 1011 of the furnace wall 101. The height of the flow rate adjusting member 25 is set to be shorter than the height of the nut 23. As a result, a minute gap (see symbol C in FIG. 2) is formed between the upper end of the flow rate adjusting member 25 and the motor unit 11, and the gap between the motor unit 11 and the heat insulation furnace 100 is reduced at this portion. The flow rate of air sucked into the through holes 1011 and 1021 is limited as indicated by arrows. About the dimension regarding the flow volume adjustment member 25, the outer diameter of the flow volume adjustment member 25 can be 48.6 mm, and a micro clearance gap can be 1.5 mm. By suppressing the flow rate of the sucked air, the temperature drop in the furnace atmosphere can be suppressed.

  FIG. 3 shows a cross-sectional view of a main part of the heat treatment apparatus according to the second embodiment. In this embodiment, a cylindrical support column 21 is installed around the motor shaft 12 and supports the motor unit 11 of the fan motor. An intake hole 211 passes through the peripheral wall of the column 21, and an intake pipe 24 is disposed in the intake hole 211. Note that only the intake hole 211 may be provided without providing the intake pipe 24 in the column 21. The support | pillar 21 is corresponded to the flow volume adjustment member of this invention.

  In this embodiment, air outside the furnace can be sucked from the intake holes 211 provided in the peripheral wall of the support column 21. The flow rate of the sucked air can be controlled by the size of the intake hole 211 (intake pipe 24). When the number of the intake holes 211 and the intake pipe 24 is one, the inner diameter of the intake pipe 24 is set to 16 mm as an example.

  In the above embodiment, the case where the fan having the motor shaft that penetrates the furnace wall of the heat insulation furnace is a blower fan. However, the present invention is not limited to this, and the present invention is also applied to a stirring fan that stirs the furnace atmosphere. Applicable.

  The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above-described embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the claims.

DESCRIPTION OF SYMBOLS 1 Heat processing apparatus W To-be-processed object 10 Blower fan 11 Motor part 12 Motor shaft 13 Impeller 21 Strut 22 Bolt 23 Nut 24 Intake pipe 25 Flow rate adjustment member 30 Thermal atmosphere sealing plate 40 Heater 100 Heat insulation furnace 101 Furnace wall 102 Heat insulation material 103 Heat treatment chamber 104 Air-conditioning chamber 105 Passage 106 Circulation duct 107 Intake duct 108 Exhaust duct 111 Flange 131 Groove hole 211 Intake holes 1011 and 1021 Through-hole

Claims (5)

An insulation furnace;
A fan motor attached to the heat insulation furnace and having a motor shaft protruding from one end face of the motor unit and a fan wheel attached to the tip of the motor shaft;
In a heat treatment apparatus having
The motor unit is fixed to the outside of the heat insulation furnace, and the motor shaft is inserted into a through hole formed in a furnace wall of the heat insulation furnace.
The motor unit has a flange that forms at least a part of the one end surface around the motor unit,
The fan motor is fixed to the furnace wall of the heat insulation furnace with a nut inserted into a bolt that penetrates the flange, and the nut interposed between the outer surface of the furnace wall of the heat insulation furnace and the flange. Has been
A heat treatment apparatus, wherein a flow rate adjusting member is provided between the one end surface and an outer surface of the furnace wall of the heat insulation furnace. The heat treatment apparatus according to claim 1 , wherein the flow rate adjusting member is provided inside the nut in a radial direction of the motor shaft. The flow rate adjusting member is provided between a main body of the motor unit and a furnace wall of the heat insulation furnace, and is provided inside a side surface position of the main body in a radial direction of the motor shaft. The heat treatment apparatus according to 1 or 2 .   A cylindrical column is installed around the motor shaft, and a plurality of intake holes are provided on the peripheral wall of the column,
  The heat processing apparatus in any one of Claims 1-3 with which the said flow volume adjustment member is comprised by the said support | pillar provided with the said inlet hole. The impeller has a slot in the axial direction of the motor shaft from one end surface on the furnace wall side to the other end surface on the opposite side,
The heat treatment apparatus according to any one of claims 1 to 4 , wherein the slot is set to a half or more of a dimension of the impeller in the axial direction.

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