JP6273901B2 - Bonding method, bonded body manufacturing apparatus, bonded body, inkjet head unit, and inkjet recording apparatus - Google Patents

Description

  The present invention relates to a bonding method, an apparatus for manufacturing a bonded body, a bonded body, an inkjet head unit, and an inkjet recording apparatus.

Adhesives are widely used for joining various members, but when joining a member having a fine structure, such as a component of an inkjet head, if the adhesive protrudes from the target site, the joined body This has a major negative impact on the performance of the product.
For the purpose of solving such a problem, a method of transferring an adhesive to a member to be bonded after applying the adhesive to a film is used (for example, see Patent Document 1).
However, the conventional method cannot sufficiently prevent the problems described above.

JP 2009-136762 A

  An object of the present invention is to provide a bonding method capable of efficiently producing a bonded body bonded by selectively applying a bonding material to a target site, and selectively bonding a material to the target site. Providing a bonded body manufacturing apparatus capable of efficiently manufacturing a bonded body bonded by applying a bonding material, and a bonded body bonded by selectively applying a bonding material to a target site. Another object of the present invention is to provide an ink jet head unit and an ink jet recording apparatus including a joined body that is joined by selectively applying a joining material to a target portion.

Such an object is achieved by the present invention described below.
The bonding method of the present invention includes a film forming step of forming a film by applying a bonding material containing a thermosetting resin on a transfer medium,
A first heating step of applying a first heat treatment to the bonding material;
A transfer step of transferring the bonding material subjected to the first heat treatment to a first member;
A second heating step of performing a second heat treatment in a state where the transferred bonding material is sandwiched between the first member and the second member ;
A width of a portion of the first member to which the bonding material is to be applied is 5.0 μm or more and 20 μm or less.
Thereby, the joining method which can manufacture efficiently the joined_body | zygote joined by selectively providing a joining material to the target site | part can be provided.

In the bonding method of the present invention, it is preferable that the bonding material contains an addition type silicone resin.
Thereby, in the finally obtained joined body, the action of relaxing the stress generated between the first member and the second member is strengthened, the peel strength is large, and the joining reliability is particularly high. can do. Further, there is little degassing and curing shrinkage during the curing reaction. Further, the water resistance, solvent resistance, ink resistance and the like of the joint formed using the joint material can be made particularly excellent, and the swelling rate of the joint can be made small. For this reason, it can apply suitably for manufacture of the joined object which contacts a liquid.

In the joining method of the present invention, the joining material preferably contains one or more selected from the group consisting of a methyl-based straight silicone resin, a phenyl-based silicone resin, and a modified silicone resin.
Thereby, in the joined body finally obtained, the action to relieve the stress generated between the first member and the second member is particularly strong, the peel strength is greater, and the joining reliability is further increased. Can be. Further, degassing and curing shrinkage during the curing reaction are particularly small. In addition, the water resistance, solvent resistance, ink resistance, and the like of the joint formed using the joint material can be further improved, and the swelling rate of the joint can be reduced. For this reason, it can apply suitably by manufacture of the conjugate | zygote which contacts a liquid.

In the joining method of the present invention, it is preferable that the portion of the first member to which the joining material is to be applied is adjacent to the portion having a tube structure.
In the case of joining members having such a structure, in the past, problems such as protrusion of the joining material occurred due to the capillary phenomenon (capillary effect). In the present invention, such a structure is used. Even when the members having the above are joined, the occurrence of the above problems can be effectively prevented. That is, the effect of the present invention is more remarkably exhibited when the portion to which the bonding material of the first member is to be applied is adjacent to the portion having the tube structure.

In the bonding method according to the aspect of the invention, it is preferable that a bonded body in which a bonded portion made of the bonding material is formed on the first member is an inkjet head.
The ink-jet head has a fine structure and is particularly susceptible to the influence of protrusion of the bonding material (bonding portion) from the target portion. In particular, if the bonding material (bonding portion) protrudes from the target site in the ink flow path of the ink jet head, the bonding strength of the bonding portion may decrease due to the ink swelling or the like. Due to this deformation, problems such as a decrease in the stability of ink ejection occur. Further, even when the bonding material is a liquid repellent material and there is no problem of swelling due to ink, if the bonding material (bonding portion) protrudes from the target site in the ink flow path of the inkjet head, That part repels ink, and there is still a problem that the stability of ink ejection is lowered. On the other hand, in the present invention, since the joint portion can be selectively provided at the target site, the occurrence of the above problem can be effectively prevented even when applied to an ink jet head. From the above, the effects of the present invention are more remarkably exhibited when applied to an inkjet head.
In the bonding method of the present invention, in the transfer step, a part of the bonding material that has been subjected to the first heat treatment in a shape and pattern corresponding to a portion of the first member to which the bonding material is to be applied. Is preferably transferred to the first member.

The joined body manufacturing apparatus of the present invention is characterized by performing the method of the present invention.
Thereby, the manufacturing apparatus of the conjugate | zygote which can manufacture efficiently the conjugate | zygote joined by selectively providing a joining material to the target site | part can be provided.

The joined body of the present invention is manufactured using the joining method of the present invention.
Thereby, it is possible to provide a bonded body bonded by selectively applying a bonding material to a target portion.

The joined body of the present invention is manufactured using the manufacturing apparatus of the present invention.
Thereby, it is possible to provide a bonded body bonded by selectively applying a bonding material to a target portion.

The joined body of the present invention is preferably an ink jet head.
The ink-jet head has a fine structure and is particularly susceptible to the influence of protrusion of the bonding material (bonding portion) from the target portion. In particular, if the bonding material (bonding portion) protrudes from the target site in the ink flow path of the ink jet head, the bonding strength of the bonding portion may decrease due to the ink swelling or the like. Due to this deformation, problems such as a decrease in the stability of ink ejection occur. Further, even when the bonding material is a liquid repellent material and there is no problem of swelling due to ink, if the bonding material (bonding portion) protrudes from the target site in the ink flow path of the inkjet head, That part repels ink, and there is still a problem that the stability of ink ejection is lowered. On the other hand, in the present invention, since the joint portion can be selectively provided at the target site, the occurrence of the above problem can be effectively prevented even when applied to an ink jet head. From the above, the effects of the present invention are more remarkably exhibited when applied to an inkjet head.

The ink jet head unit of the present invention includes an ink jet head as the joined body of the present invention.
Thereby, an inkjet head unit provided with the joined body (inkjet head) joined by selectively giving a joining material to the target part can be provided.

An ink jet recording apparatus according to the present invention includes the ink jet head unit according to the present invention.
Accordingly, an ink jet recording apparatus including a joined body (ink jet head) joined by selectively applying a joining material to a target portion can be provided.

It is sectional drawing which shows typically suitable embodiment of the manufacturing apparatus of the conjugate | zygote of this invention. It is sectional drawing which shows typically suitable embodiment of the inkjet head to which this invention is applied. It is sectional drawing which shows typically other suitable embodiment of the inkjet head to which this invention is applied. It is a bottom view of the case of the inkjet head shown in FIG. It is a scanning electron microscope (SEM) photograph of what was obtained by applying this invention about the inkjet head of a structure shown in FIG. It is a scanning electron microscope (SEM) photograph of what was manufactured without applying this invention about the inkjet head of the structure shown in FIG. 2 (obtained by the method which abbreviate | omitted 1st heat processing). 1 is a schematic view showing a preferred embodiment of an ink jet recording apparatus of the present invention.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

《Joint manufacturing apparatus and joining method》
First, an apparatus for manufacturing a joined body and a joining method according to the present invention will be described.

The joining method of this invention has the process of providing the member with the joining material containing a thermosetting resin, and the width | variety of the site | part to which the said joining material of the said member should be provided is 5.0 micrometers or more and 20 micrometers or less. Features.
As a method for applying the bonding material, for example, various methods such as stamping and brushing can be employed.
Moreover, as a method for applying the bonding material, a transfer method can be employed.
In the following description, the case where the bonding material is applied by the transfer method will be mainly described.

FIG. 1 is a cross-sectional view schematically showing a preferred embodiment of the joined body manufacturing apparatus of the present invention.
As shown in FIG. 1, the manufacturing apparatus M100 for the joined body P10 is applied to the transfer medium P4 and the film forming unit M1 that forms a film by applying the bonding material P3 including the thermosetting resin onto the transfer medium P4. The first heat treatment unit M2 that performs the first heat treatment on the bonding material P3, the transfer unit M3 that transfers the bonding material P3 subjected to the first heat treatment to the first member P1, and the transferred bonding A second heat treatment unit M4 that performs the second heat treatment in a state where the material P3 is sandwiched between the first member P1 and the second member P2, and a transport unit M5 that transports the first member P1. A roller (feeding roller) M6 that feeds the transfer medium P4 and a roller (winding roller) M7 that winds the transfer medium P4 are provided.

  Then, a film formation process is performed in the film formation part M1, a first heating process is performed in the first heat treatment part M2, a transfer process is performed in the transfer part M3, and a second heating process is performed in the second heat treatment part M4. Perform the process.

The film forming unit M1 is a region where a film forming process is performed.
The film forming unit M1 flattenes the bonding material applying means M11 for applying the bonding material P3 to the transfer medium P4, and the flattening means (squeegee) M12 for flattening the bonding material P3 applied by the bonding material applying means M11. And a support member (support base) M13 that supports the transfer medium P4 from the surface opposite to the surface on which the flattening means (squeegee) M12 is provided.

The flattening means (squeegee) M12 has a function of flattening the bonding material P3 applied by the bonding material applying means M11 to form a film.
The support member (support base) M13 has a function of supporting the transfer medium P4 from the surface opposite to the surface on which the flattening means (squeegee) M12 is provided when flattening.
As a result, unintentional deformation (bending) of the transfer medium P4 in the film forming process can be effectively prevented, and the formed film of the bonding material P3 is more reliably highly uniform in film thickness. can do.

The bonding material P3 includes a thermosetting resin.
Examples of the thermosetting resin constituting the bonding material P3 include silicone rubber, addition type, condensation type silicone resin, epoxy resin, acrylic resin, and the like, and addition type silicone resin is preferable.
Thereby, in the finally obtained joined body P10, the action of relaxing the stress generated between the first member P1 and the second member P2 is strengthened, the peel strength is large, and the joining reliability is particularly enhanced. Can be expensive.

Further, there is little degassing and curing shrinkage during the curing reaction.
Further, the water resistance, solvent resistance, ink resistance, etc. of the joint P5 formed using the joint material P3 can be made particularly excellent, and the swelling rate of the joint P5 can be made small. it can. For this reason, it can apply suitably for manufacture of zygote P10 which contacts a liquid.

Examples of addition-type silicone resins include straight silicone resins such as methyl silicone resins, phenyl silicone resins, and methylphenyl silicone resins; alkyd-modified silicone resins, epoxy-modified silicone resins, acrylic-modified silicone resins, polyester-modified silicone resins, etc. 1 type or 2 or more types selected from the group consisting of a methyl type straight silicone resin, a phenyl type silicone resin and a modified silicone resin are preferable, and a methyl type straight silicone resin is more preferable. .
Thereby, the effect mentioned above is exhibited more notably.

The bonding material P3 may include a component (other components) other than the thermosetting resin. Examples of such components include a solvent, a curing agent, a crosslinking agent, a catalyst, a polymerization initiator, a polymerization inhibitor, a colorant, an antioxidant, an antiseptic, and an antifungal agent.
As the catalyst, for example, a Pt catalyst, an Al complex, an Fe complex, a rhodium complex, or the like can be used.

  By including a polymerization inhibitor, it becomes easy to adjust the degree of cure (degree of polymerization) in the first heat treatment.

The viscosity of the bonding material P3 in the film forming process is preferably 100 Pa · s or less.
Thereby, the fluidity of the bonding material P3 in the film forming process is particularly excellent, and even if the film to be formed is relatively thin, it can be formed with a particularly high thickness uniformity.

  In the present specification, unless otherwise specified, the viscosity is a tool: TA instruments / ARES-2K, measurement mode: time sweep test with a parallel plate φ25 mm, measurement frequency: 1 Hz, applied strain: 1.0% Density value used for measurement: A value obtained by measurement under the condition of 1.00 g / cc.

  The transfer medium P4 is configured to be fed by a roller (feeding roller) M6 and wound by a roller (winding roller) M7. The driving of the roller can be suitably performed by a motor, for example.

  Examples of the constituent material of the transfer medium P4 include polyethylene terephthalate, tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene / hexafluoropropylene copolymer (FEP), and polychlorotrifluoroethylene (PCTFE). ), Cycloolefin polymer (COP), tetrafluoroethylene / ethylene copolymer (ETFE), etc., among which polyethylene terephthalate is preferable.

Polyethylene terephthalate is relatively inexpensive and has moderate flexibility, and is excellent in handleability (ease of handling).
Thereby, the release property of the bonding material P3 is excellent, the processing in the transfer process can be performed more smoothly, and the productivity of the bonded body P10 can be particularly excellent.

  The thickness of the transfer medium P4 is not particularly limited, but is preferably 10 μm or more and 2000 μm or less.

The thickness of the bonding material P3 formed in the film forming step is preferably 0.5 μm or more and 6.0 μm or less.
Thereby, in the joined body P10 finally obtained, the protrusion of the joined portion P5 from the target portion can be more effectively prevented, and the joining strength in the joined body P10 is particularly excellent. Can do.

The 1st heat processing part M2 is an area | region which performs a 1st heating process.
By performing the first heat treatment, a part of the curing reaction of the thermosetting resin proceeds (the thermosetting resin is temporarily cured), the viscosity of the bonding material P3 is increased, and the shape stability is improved. To do. As a result, it is possible to effectively prevent the bonding material P3 from being unintentionally deformed in the subsequent transfer step, and the bonding material P3 can be transferred in a desired shape and pattern. As a result, in the joined body P10 finally obtained, the joint portion P5 can be selectively provided at a target site.

The first heat treatment unit M2 includes a first heating unit (heater, temporary curing unit) M21 that heats the bonding material P3 on the transfer medium P4.
In the configuration shown in the figure, the first heating means M21 is provided on the outer surface side of the bonding material P3 on the transfer medium P4 (the surface side opposite to the surface facing the transfer medium P4), and heating is performed from the surface side. However, the installation site of the first heating means M21 is not particularly limited, and may be the surface side (back side) opposite to the surface to which the bonding material P3 of the transfer medium P4 is applied. A plurality of first heating means M21 may be used. For example, the first heating means M21 may be arranged on both sides of the transfer medium P4 to which the bonding material P3 is applied.

The heating temperature in the first heat treatment is preferably 60 ° C. or higher and 120 ° C. or lower.
Accordingly, the bonding strength with the second member P2 in the second heating step is sufficiently excellent while the stability of the shape of the bonding material P3 after the first heat treatment is particularly excellent. be able to. Moreover, since the processing time of the first heat treatment can be made relatively short, the productivity of the joined body P10 can be made particularly excellent.

The heating time in the first heat treatment is preferably 2 minutes or longer and 10 minutes or shorter.
Accordingly, the bonding strength with the second member P2 in the second heating step is sufficiently excellent while the stability of the shape of the bonding material P3 after the first heat treatment is particularly excellent. be able to. Further, the productivity of the joined body P10 can be made particularly excellent.
Note that the first heat treatment may be performed under certain conditions, or the conditions may be changed during the treatment.

The transfer portion M3 is a region where a transfer process is performed.
The bonding material P3 transferred in the transfer step has a viscosity increased by the first heat treatment described above, and shape stability is improved. Therefore, it is possible to effectively prevent the bonding material P3 from being unintentionally deformed in the transfer step, and the bonding material P3 can be transferred in a desired shape and pattern. As a result, in the joined body P10 finally obtained, the joint portion P5 can be selectively provided at a target site. In addition, since the stability of the shape of the bonding material P3 is improved, even if the bonding material P3 and the first member P1 are brought into close contact with each other with a relatively strong pressure in the transfer process, the bonding material P3 is unintentional. Deformation can be effectively prevented. Therefore, in the state after the bonding material P3 is transferred, the adhesion between the first member P1 and the transferred bonding material P3 can be made particularly excellent, and the first member P1 and the bonding material P3 can be made excellent. It is possible to effectively prevent an unintentional gap or the like from being generated. Therefore, the bonding reliability between the first member P1 and the bonding portion P5 in the bonded body P10 is particularly excellent, and the durability and reliability of the bonded body P10 as a whole are particularly excellent. be able to.

  The transfer unit M3 includes a pressing unit M31 that presses the transfer medium P4 so that the bonding material P3 subjected to the first heat treatment and the first member P1 are in contact with each other, and the bonding material P3 is applied to the first member P1. When transferring, a support member (transfer table) M32 is provided that supports the first member P1 from the side opposite to the side on which the pressing means M31 is provided.

  The pressing by the pressing means M31 is a state in which the bonding material P3 to be transferred on the transfer medium P4 and the target portion (the portion where the bonding portion P5 is to be formed) of the first member P1 are in contact with each other. To do.

The viscosity of the bonding material P3 in the transfer process is preferably 300 Pa · s or more and 10,000 Pa · s or less.
As a result, unintentional deformation of the bonding material P3 in the transfer process can be prevented more reliably, and in the finally obtained bonded body P10, the protrusion of the bonded portion P5 from the target portion can be more effectively performed. Can be prevented.

The thickness of the bonding material P3 to be transferred is preferably 0.5 μm or more and 3.0 μm or less.
Thereby, in the joined body P10 finally obtained, the protrusion of the joined portion P5 from the target portion can be more effectively prevented, and the joining strength in the joined body P10 is particularly excellent. Can do.

The pressure (pressing force) at the time of bringing the bonding material P3 and the first member P1 into close contact is preferably 0.1 Pa or more and 100 Pa or less.
Thus, by making a pressing force comparatively large, the adhesiveness of the joining material P3 and the 1st member P1 can be made especially excellent. In addition, since the first heating process is performed prior to the transfer process, unintentional deformation of the bonding material P3 is reliably prevented even when the pressing force is relatively large. Is done. Therefore, in the finally obtained joined body P10, it is possible to more effectively prevent the joint portion P5 from protruding from the target portion and to make the joint strength in the joined body P10 particularly excellent. it can.

The width of the portion to which the bonding material P3 of the first member P1 is to be applied is preferably 5.0 μm or more and 20 μm or less.
Thus, when the width of the portion to which the bonding material is applied (the portion to be bonded) is small, conventionally, problems such as protrusion of the bonding material have occurred particularly noticeably. As described above, even when the width of the portion to which the bonding material is applied (the portion to be bonded) is sufficiently small, the occurrence of the above-described problem can be effectively prevented. That is, when the width of the portion to which the bonding material P3 of the first member P1 is to be applied is a value within the above range, the effect of the present invention is more remarkably exhibited.

The part to which the bonding material P3 of the first member P1 is to be applied is preferably adjacent to the part having the tube structure.
In the case of joining members having such a structure, conventionally, problems such as protrusion of the joining material have occurred remarkably due to the capillary phenomenon, but in the present invention, members having such a structure are joined. Even in this case, it is possible to effectively prevent the occurrence of the above problems. That is, the effect of the present invention is more remarkably exhibited when the portion to which the bonding material P3 of the first member P1 is to be applied is adjacent to the portion having the tube structure.

The 2nd heat processing part M4 is an area | region which performs a 2nd heating process.
By the second heat treatment, the thermosetting resin constituting the bonding material P3 is fully cured, and the bonding portion P5 is formed. As a result, a joined body P10 in which the first member P1 and the second member P2 are joined via the joint portion P5 is obtained.

  In the bonding material P3 that comes into contact with the second member P2, the thermosetting resin is temporarily cured by the first heat treatment described above, the viscosity is increased, and the shape stability is improved. Therefore, at the time of joining the first member P1 and the second member P2 (second heating step), the fluidity of the joining material P3 increases, and the joining material P3 (joining portion P5) deforms unintentionally. This is effectively prevented, and the joint portion P5 can be selectively provided at the target site. In addition, since the stability of the shape of the bonding material P3 is improved, even if the bonding material P3 and the second member P2 are brought into close contact with each other with a relatively strong pressure, unintentional deformation of the bonding material P3 is effective. Can be prevented. Accordingly, the adhesion between the second member P2 and the joint portion P5 can be made particularly excellent, and it is effective that an unintentional gap or the like is generated between the second member P2 and the joint portion P5. Can be prevented. In addition, even when the adhesion between the first member P1 and the bonding material P3 is insufficient in the above-described process, the second member P2 and the bonding material P3 are bonded with a relatively large pressure in the second heating process. By adhering, the adhesion between the first member P1 and the bonding material P3 is also improved. Therefore, the bonding reliability between the second member P2 and the bonding portion P5 in the bonded body P10 and the bonding reliability between the first member P1 and the bonding portion P5 are particularly excellent. Durability and reliability can be made particularly excellent.

  The second heat treatment unit M4 includes a second heating unit (heater, main curing unit) M41 that heats the bonding material P3 sandwiched between the first member P1 and the second member P2, and a first The pressing member M42 that presses the second member P2 so that the bonding material P3 transferred onto the member P1 and the second member P2 come into contact with each other, and the first member P1 is supported by the pressing means M42. And a supporting member M43.

  In the configuration shown in the figure, the second heating means M41 is provided integrally with the pressing means M42 and is heated from the second member P2 side. However, the installation site of the second heating means M41 is particularly limited. For example, it may be provided independently of the pressing means M42. Further, the second heating means M41 may be provided on the side where the support member M43 is provided, for example.

The pressure (pressing force) at the time of bringing the bonding material P3 and the second member P2 into close contact is preferably 0.01 MPa or more and 10 MPa or less.
By making the pressing force relatively large in this way, the adhesion between the bonding material P3 and the second member P2 and the adhesion between the bonding material P3 and the first member P1 are particularly excellent. Can do. In addition, since the first heating process is performed prior to the second heating process, even if the pressing force is relatively large as described above, the unintentional deformation of the bonding material P3 is not caused. It is surely prevented. Therefore, in the finally obtained joined body P10, it is possible to more effectively prevent the joint portion P5 from protruding from the target portion and to make the joint strength in the joined body P10 particularly excellent. it can.

The heating temperature in the second heat treatment is preferably 60 ° C. or higher and 250 ° C. or lower.
Thereby, the joint strength in the joined body P10 can be made particularly excellent while reliably preventing deterioration of the constituent materials of the first member P1 and the second member P2. Moreover, since the processing time of the second heat treatment can be made relatively short, the productivity of the joined body P10 can be made particularly excellent.

The heating time in the second heat treatment is preferably 3 minutes or more and 60 minutes or less.
Thereby, the joint strength in the joined body P10 can be made particularly excellent while reliably preventing deterioration of the constituent materials of the first member P1 and the second member P2. Further, the productivity of the joined body P10 can be made particularly excellent.

Note that the second heat treatment may be performed under certain conditions, or the conditions may be changed during the treatment. For example, in the second heat treatment, after performing the first step at a temperature: T ₁ [° C.] and a pressure: P ₁ [Pa], a temperature higher than T ₁ : T ₂ [° C.], from P ₁ The second step may be performed at a high pressure P ₂ [Pa].
Thereby, while preventing the unintentional deformation | transformation of joining material P3 (joint part P5) more effectively, the reliability of joining of the 2nd member P2 and joined part P5 in the joined body P10, 1st member P1 And the joint P5 can be made particularly excellent in reliability, and the durability and reliability of the joined body P10 as a whole can be made particularly excellent.
According to the joined body manufacturing apparatus and joining method of the present invention as described above, a joined body can be efficiently manufactured by selectively applying a joining material to a target portion.

《Joint body》
Next, the joined body of the present invention will be described.
The joined body of the present invention is manufactured using the joining method of the present invention as described above and the joined body manufacturing apparatus of the present invention.
Thereby, it is possible to provide a bonded body bonded by selectively applying a bonding material to a target portion.

The joined body of the present invention may be any material, but is preferably an ink jet head.
The ink-jet head has a fine structure and is particularly susceptible to the influence of protrusion of the bonding material (bonding portion) from the target portion.
In particular, if the bonding material (bonding portion) protrudes from the target site in the ink flow path of the ink jet head, the bonding strength of the bonding portion may decrease due to the ink swelling or the like. Due to this deformation, problems such as a decrease in the stability of ink ejection occur.

  Further, even when the bonding material is a liquid repellent material and there is no problem of swelling due to ink, if the bonding material (bonding portion) protrudes from the target site in the ink flow path of the inkjet head, That part repels ink, and there is still a problem that the stability of ink ejection is lowered.

  On the other hand, in the present invention, since the joint portion can be selectively provided at the target site, the occurrence of the above problem can be effectively prevented even when applied to an ink jet head.

  From the above, the effects of the present invention are more remarkably exhibited when applied to an inkjet head.

Hereinafter, a specific example in which the present invention is applied to an ink jet will be described in detail.
2 is a cross-sectional view schematically showing a preferred embodiment of an inkjet head to which the present invention is applied, and FIG. 3 is a cross-sectional view schematically showing another preferred embodiment of the inkjet head to which the present invention is applied. FIG. 4 is a bottom view of the case of the inkjet head shown in FIG.
It is.

2 includes a silicon substrate 81 on which an ink reservoir 87 is formed, a vibration plate 82 formed on the silicon substrate 81, a lower electrode 83 formed at a desired position on the vibration plate 82, A piezoelectric thin film 84 formed on the lower electrode 83 at a position corresponding to the ink reservoir 87, an upper electrode 85 formed on the piezoelectric thin film 84, and a second bonded to the lower surface of the silicon substrate 81. Board 86. The second substrate 86 is provided with an ink discharge nozzle 86 </ b> A communicating with the ink reservoir 87.
In the inkjet head 100, ink is supplied to the ink reservoir 87 via an ink flow path (not shown). Here, when a voltage is applied to the piezoelectric thin film 84 via the lower electrode 83 and the upper electrode 85, the piezoelectric thin film 84 is deformed to create a negative pressure in the ink reservoir 87 and apply pressure to the ink. With this pressure, ink is ejected from the nozzle, and ink jet recording is performed.

  For example, the inkjet head 100 is formed by integrally forming a thin film piezoelectric element including a lower electrode 83, a piezoelectric thin film 84, and an upper electrode 85 by a thin film process using a Si thermal oxide film as a vibration plate 82, and an upper portion thereof. A chip made of a single crystal silicon substrate 81 in which a cavity (ink reservoir) 87 is formed, and a stainless steel nozzle plate (second substrate) 86 provided with an ink discharge nozzle 86A for discharging ink are included in the present invention. According to the joining method, a joined structure can be obtained.

  Here, the piezoelectric thin film 84 is composed of, for example, a three-component PZT in which lead magnesium niobate is added as a third component as a material having a high piezoelectric strain constant d31 so that a larger displacement amount can be obtained. Can be used. The thickness of the piezoelectric thin film 84 can be about 2 μm.

  When the present invention is applied to the joining of the constituent members of the ink jet head having such a structure, a joining material can be selectively applied to a target portion, and the reliability of the obtained ink jet head (joined body) is It will be expensive.

  FIG. 5 shows a scanning electron microscope (SEM) photograph of the ink jet head having the structure shown in FIG. 2 obtained by applying the present invention. FIG. 5 shows the ink jet head manufactured without applying the present invention (the first heat treatment is omitted). A scanning electron microscope (SEM) photograph of the product obtained by the above method is shown in FIG. In the figure, the joint is the part that appears black.

  As apparent from FIGS. 5 and 6, in the case where the present invention was applied (Example), the joint portion was selectively formed at the target portion, whereas the present invention was not applied ( In the comparative example), the bonding agent flows out to the vibration surface, and the bonding portion is formed other than the intended portion.

  Further, when the ink ejection characteristics and the like were examined using these ink jet heads, in the case where the present invention was applied (Example), the vibration characteristics were obtained as designed and the ejection characteristics were stable. In the case where the present invention was not applied (comparative example), the vibration characteristics were deteriorated and the discharge characteristics were largely varied.

  3 and 4 includes a flow path forming substrate 10 having a pressure generation chamber 11, a nozzle plate 20 in which a plurality of nozzles 21 communicating with each pressure generation chamber 11 are perforated, and a flow path. A vibration member 15 joined to a surface of the path forming substrate 10 opposite to the nozzle plate 20 is provided. In addition, the inkjet head 100 according to the present embodiment includes the piezoelectric element unit 30 having a plurality of piezoelectric elements 35 provided in a region corresponding to each pressure generation chamber 11 on the vibration member 15, and the flow path forming substrate 10 via the vibration member 15. And a case 40 joined to one side of the. In this embodiment, a reservoir 13 serving as a common liquid chamber for the pressure generation chambers 11 is formed on the flow path forming substrate 10, and the flow path forming substrate 10 is also a reservoir forming substrate.

  In the flow path forming substrate 10, a plurality of pressure generating chambers 11 are partitioned by a partition wall and arranged in parallel in the width direction on the surface layer portion on one surface side. In the present embodiment, two rows composed of a plurality of pressure generating chambers 11 arranged side by side are formed. Further, outside the row of the pressure generation chambers 11, a reservoir 13 to which ink is supplied through an ink introduction path 41 which is a liquid introduction path of the case 40 penetrates the flow path forming substrate 10 in the thickness direction. Each one is provided.

  The reservoir 13 and each pressure generation chamber 11 communicate with each other via an ink supply path 12, and ink is supplied to each pressure generation chamber 11 via an ink introduction path 41, the reservoir 13, and the ink supply path 12. Supplied. In this embodiment, the ink supply path 12 is formed with a width narrower than that of the pressure generation chamber 11, and plays a role of maintaining a constant flow path resistance of ink flowing from the reservoir 13 into the pressure generation chamber 11.

  Further, a nozzle communication hole 14 penetrating the flow path forming substrate 10 is formed on the end side of the pressure generating chamber 11 opposite to the reservoir 13. That is, in the present embodiment, a reservoir 13, an ink supply path 12, a pressure generation chamber 11, and a nozzle communication hole 14 are provided as liquid channels in the channel forming substrate 10. In this embodiment, the flow path forming substrate 10 is made of a silicon single crystal substrate, and the pressure generating chamber 11 and the reservoir 13 provided on the flow path forming substrate 10 are formed by etching the flow path forming substrate 10. Is formed by.

  A nozzle plate 20 having a plurality of nozzles 21 for ejecting ink is joined to one surface of the flow path forming substrate 10, and each nozzle 21 is connected via a nozzle communication hole 14 provided in the flow path forming substrate 10. The pressure generation chambers 11 communicate with each other.

  A vibrating member 15 is bonded to the other surface of the flow path forming substrate 10, that is, the opening surface of the pressure generating chamber 11 with an adhesive layer 17, and each pressure generating chamber 11 is sealed by the vibrating member 15. Yes. In addition, the vibration member 15 has an area approximately equal to the area of the other surface of the flow path forming substrate 10 as illustrated, and is joined so as to cover the entire other surface of the flow path forming substrate 10.

  The vibration member 15 is formed of a composite plate of, for example, an elastic film 15a made of an elastic member such as a resin film and a support plate 15b made of, for example, a metal material that supports the elastic film 15a. The film 15 a side is bonded to the flow path forming substrate 10. In the present embodiment, the elastic film 15a is made of a polyphenylene sulfide (PPS) film having a thickness of about several μm, and the support plate 15b is made of a stainless steel plate (SUS) having a thickness of about several tens of μm.

  Further, the region of the vibration member 15 that faces the peripheral edge of each pressure generating chamber 11 is a thin portion 15d that is substantially composed only of the elastic film 15a with the support plate 15b removed. This thin portion 15 d defines one surface of the pressure generating chamber 11. Further, inside the thin portion 15d, island portions 15c made of a part of the support plate 15b with which the tips of the respective piezoelectric elements 35 abut are provided. In addition, the region of the vibration member 15 that faces the reservoir 13 is a vibration unit 16 that includes only the elastic film 15a with the support plate 15b removed. When the pressure change in the reservoir 13 occurs, the vibration part 16 absorbs the pressure change by being deformed, and plays a role of constantly maintaining the pressure in the reservoir 13. The case 40 is bonded to the vibrating member 15 with the adhesive layer 18. That is, the case 40 of this embodiment is joined to the flow path forming substrate 10 via the vibration member 15.

As shown in FIG. 3, the case 40 is provided with a space portion 42 formed of a recess at a position facing the vibrating portion 16. The space portion 42 has a height that does not hinder the deformation of the vibration portion 16, and communicates with the external space through a case through hole 44 that is an air opening hole that penetrates the case 40. Thereby, the pressure in the space part 42 is always kept constant with the external space. Further, the case 40 is provided with a piezoelectric element housing portion 43 including a through portion that penetrates the case 40 at a position facing the thin portion 15d. Further, a step 45 is provided on the ink introduction path 41 side of the piezoelectric element housing portion 43, and a fixed substrate 36 of the piezoelectric element unit 30 described later is joined to the step 45.
Further, a wiring board 70 provided with a plurality of conductive pads 71 to which each wiring layer 51 of a flexible printed board 50 to be described later is connected is fixed to the surface of the case 40 opposite to the flow path forming board 10 side. Has been. In the wiring substrate 70, a slit-like opening 72 is formed in a region of the case 40 facing the piezoelectric element housing portion 43, and the piezoelectric element housing portion 43 communicates with the external space through the opening 72. . And in this piezoelectric element accommodating part 43, the piezoelectric element unit 30 provided with the piezoelectric element 35 is accommodated.

The piezoelectric element unit 30 is provided to face each pressure generating chamber 11, and includes a plurality of piezoelectric elements 35 that vary the pressure in the liquid flow path including the pressure generating chamber 11 and the reservoir 13, and the piezoelectric elements 35 are disposed in the case. 40 and a fixed substrate 36 attached to 40.
Each piezoelectric element 35 is integrally formed in one piezoelectric element unit 30 in this embodiment. That is, a piezoelectric element forming member 34 in which the piezoelectric material 31 and the electrode forming materials 32 and 33 are vertically sandwiched and laminated is formed to correspond to each pressure generating chamber 11. Each piezoelectric element 35 is formed by cutting into comb teeth. That is, in the present embodiment, the plurality of piezoelectric elements 35 are integrally formed. The piezoelectric element 35 is bonded to the fixed substrate 36 at the base end side which is an inactive region that does not contribute to vibration while the tip end portion is bonded to the island portion 15c of the vibration member 15 by an adhesive (bonding agent). Has been. The fixed substrate 36 to which the piezoelectric element 35 is fixed in this manner is joined to the case 40 at the step 45 of the piezoelectric element housing portion 43. Accordingly, the piezoelectric element unit 30 is accommodated and fixed in the piezoelectric element accommodating portion 43 of the case 40.

  The fixed substrate 36 is provided integrally with the piezoelectric element 35 as described above, thereby constituting the piezoelectric element unit 30, and the piezoelectric element unit 30 is positioned and fixed to the case 40. At this time, the positioning of the piezoelectric element 35 with respect to the vibration member 15 (island portion 15 c) is performed by the outer peripheral surface of the fixed substrate 36 and the inner surface of the piezoelectric element housing portion 43 of the case 40. Thereby, it is possible to perform alignment easily and with high accuracy compared to directly gripping and aligning the piezoelectric element 35 that is a brittle material.

  Although the material which comprises the fixed board | substrate 36 is not specifically limited, For example, it can comprise suitably with aluminum, copper, iron, stainless steel, etc. In the vicinity of the base end of the piezoelectric element 35 of the piezoelectric element unit 30, a flexible print having a wiring layer 51 for supplying a signal for driving each piezoelectric element 35 on the surface opposite to the fixed substrate 36. A substrate 50 is connected.

  The flexible printed circuit board 50 includes a flexible printing circuit (FPC), a tape carrier package (TCP), or the like. Specifically, the flexible printed circuit board 50 includes, for example, a terminal layer connected to the piezoelectric element 35 of the wiring layer 51 by forming a wiring layer 51 of a predetermined pattern on a surface of a base film 52 such as polyimide with a thin copper film or the like. A region other than a region connected to another wiring is covered with an insulating material such as a resist.

  Such a wiring layer 51 of the flexible printed board 50 is connected to the electrode forming materials 32 and 33 constituting the piezoelectric element 35 by, for example, solder, anisotropic conductive material or the like on the base end side.

On the other hand, on the tip end side, each wiring layer 51 is electrically connected to the conductive pads 71 of the wiring board 70 provided on the case 40. The flexible printed board 50 is pulled out of the opening 72 of the wiring board 70 to the outside of the piezoelectric element housing portion 43, and the drawn area is bent and connected to the conductive pad 71.
In the inkjet head 100 of the present embodiment, as shown in FIG. 4, the piezoelectric element housing portion 43 and the space portion 42 are communicated with each other through a communication path 46.

  The communication passage 46 is a passage that communicates the piezoelectric element housing portion 43 and the space portion 42. In this embodiment, the communication passage 46 removes a part of the surface of the case 40 on the flow path forming substrate 10 side to remove the case 40. It is formed on the bottom.

  Further, the communication path 46 of the present embodiment is provided at a position that does not overlap with the flow path including the pressure generation chamber 11 in the stacking direction of the flow path forming substrate 10, the vibration member 15, and the case 40. Specifically, the communication passage 46 is provided in a region outside the both ends of the space portion 42 and the piezoelectric element housing portion 43 in the juxtaposition direction of the pressure generation chambers 11.

  The communication path 46 includes a first communication part 46a that is continuous with the space part 42 and extends outward from the longitudinal end of the space part 42 along the direction in which the pressure generation chambers 11 are arranged, and the first communication part 46a. A second communication portion 46b extending in the longitudinal direction of the pressure generation chamber 11 and a piezoelectric element housing portion 43 extending inward along the direction in which the pressure generation chambers 11 are arranged in succession to the second communication portion 46b. And a third communication portion 46c that is continuous with the third communication portion 46c. The piezoelectric element housing portion 43 and the space portion 42 are communicated with each other through such a communication path 46. In the present embodiment, the communication path 46 is formed on the surface of the case 40 on the flow path forming substrate 10 side. That is, the communication path 46 is provided as a recess on the surface of the case 40 on the flow path forming substrate 10 side.

  By providing such a communication passage 46, the piezoelectric element housing portion 43 and the space portion 42 constitute a flow path through which air flows, and the volatile gas in the space portion 42 can be relatively easily removed from the external space. To be discharged.

In such an ink jet head 100, ink droplets are ejected from each nozzle 21 by changing the volume of each pressure generating chamber 11 by deformation of the piezoelectric element 35 and the vibration member 15. Specifically, when ink is supplied to the reservoir 13 from the liquid storage means (not shown) via the ink introduction path 41 which is a liquid introduction path, the ink is distributed to each pressure generating chamber 11 via the ink supply path 12. The Then, a voltage is applied to and released from a predetermined piezoelectric element 35 by a drive signal from a drive circuit (not shown), whereby the piezoelectric element 35 is contracted and expanded to cause a pressure change in the pressure generating chamber 11, and the ink is discharged from the nozzle 21. To discharge.
The present invention can be applied to the formation of a joint portion for joining the constituent members of the ink jet head as described above.

<< Inkjet head unit, inkjet recording apparatus >>
Next, the ink jet head unit and the ink jet recording apparatus of the present invention will be described.

FIG. 7 is a schematic view showing a preferred embodiment of the ink jet recording apparatus of the present invention.
As shown in FIG. 7, an ink jet recording apparatus 1000 includes ink jet head units (recording head units) 91A and 91B, cartridges 92A and 92B, a carriage 93, an apparatus main body 94, a carriage shaft 95, and a drive motor 96. And a timing belt 97 and a platen 98.

  The recording head units 91A and 91B including the ink jet heads (recording heads) as the joined bodies of the present invention as described above are provided with the cartridges 92A and 92B constituting the ink supply means in a detachable manner, and the recording head units 91A and 91B. Is mounted on a carriage shaft 95 attached to the apparatus main body 94 so as to be movable in the axial direction. The recording head units 91A and 91B can eject, for example, a black ink composition and a color ink composition, respectively.

  Then, the driving force of the driving motor 96 is transmitted to the carriage 93 via a plurality of gears and a timing belt 97 (not shown), so that the carriage 93 on which the recording head units 91A and 91B are mounted is moved along the carriage shaft 95. The On the other hand, the apparatus main body 94 is provided with a platen 98 along the carriage shaft 95, and a recording sheet S, which is a recording medium such as paper fed by a not-shown paper feed roller, is wound around the platen 98. It is designed to be transported.

  As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to these.

For example, in the above-described embodiment, the configuration in which continuous processing is performed using a transfer medium or the like conveyed by a roller has been described. However, in the present invention, batch processing may be performed.
Further, in the manufacturing apparatus of the present invention, the arrangement of each component is not limited to that described above.

In the above-described embodiment, the first heating unit and the second heating unit have been described as using different members. However, as the first heating unit and the second heating unit, a common heating unit is used. It may be used.
Moreover, the manufacturing apparatus of this invention may have a cleaning means for cleaning the transfer medium after the transfer of the bonding material. Accordingly, the transfer medium can be used repeatedly and advantageously, which is advantageous from the viewpoint of reducing the production cost of the joined body and saving resources.

Moreover, although embodiment mentioned above demonstrated the case where it applied to joining of two members, this invention may be applied to joining of three or more members.
Moreover, in the joining method of this invention, you may perform a pre-processing process, an intermediate processing process, and a post-processing process as needed.
In the above description, the inkjet head is representatively described as a bonded body. However, the bonded body of the present invention may be other than the inkjet head, and is suitably applied to, for example, a MEMS, an optical element, and the like. can do. Since these also have a fine structure, the effect of applying the present invention is remarkably exhibited.

  P10: bonded body P1: first member P2: second member P3: bonding material P4: transfer medium P5: bonding portion M100: manufacturing apparatus M1: film forming portion M11: bonding material applying means M12: flattening means (squeegee) M13: Support member (support base) M2: First heat treatment section M21: First heating means (heater, temporary curing means) M3: Transfer section M31: Press means M32 ... Support member (transfer base) M4: First 2 heat treatment unit M41 ... second heating means (heater, main curing means) M42 ... pressing means M43 ... support member M5 ... conveying means M6 ... roller (feeding roller) M7 ... roller (winding roller) 100 ... inkjet head DESCRIPTION OF SYMBOLS 10 ... Flow path formation board | substrate 11 ... Pressure generating chamber 12 ... Ink supply path 13 ... Reservoir 14 ... Nozzle communication hole 15 ... Vibration member DESCRIPTION OF SYMBOLS 15a ... Elastic film 15b ... Support plate 15c ... Island part 15d ... Thin part 16 ... Vibrating part 17 ... Adhesive layer 18 ... Adhesive layer 20 ... Nozzle plate 21 ... Nozzle 30 ... Piezoelectric element unit 31 ... Piezoelectric material 32 ... Electrode forming material 33 ... Electrode forming material 34 ... Piezoelectric element forming member 35 ... Piezoelectric element 36 ... Fixed substrate 40 ... Case 41 ... Ink introduction path 42 ... Space part 43 ... Piezoelectric element housing part 44 ... Case through hole 45 ... Stepped part 46 ... Communication path 46a ... 1st communication part 46b ... 2nd communication part 46c ... 3rd communication part 50 ... Flexible printed circuit board 51 ... Wiring layer 52 ... Base film 70 ... Wiring board 71 ... Conductive pad 72 ... Opening part 81 ... Silicon substrate 82 ... vibration plate 83 ... lower electrode 84 ... piezoelectric thin film 85 ... upper electrode 86 ... second substrate (nozzle plate) 86 ... Ink discharge nozzle 87 ... Ink reservoir (cavity) 1000 ... Inkjet recording apparatus 91A ... Inkjet head unit (recording head unit) 91B ... Inkjet head unit (recording head unit) 92A ... Cartridge 92B ... Cartridge 93 ... Carriage 94 ... Apparatus Body 95 ... Carriage shaft 96 ... Drive motor 97 ... Timing belt 98 ... Platen S ... Recording sheet

Claims (12)

A film forming step of forming a film by applying a bonding material containing a thermosetting resin on a transfer medium;
A first heating step of applying a first heat treatment to the bonding material;
A transfer step of transferring the bonding material subjected to the first heat treatment to a first member;
A second heating step of performing a second heat treatment in a state where the transferred bonding material is sandwiched between the first member and the second member ;
The bonding method, wherein a width of the portion to which the bonding material of the first member is to be applied is 5.0 μm or more and 20 μm or less.   The joining method according to claim 1, wherein the joining material includes an addition-type silicone resin.   The joining method according to claim 1 or 2, wherein the joining material includes one or more selected from the group consisting of a methyl-based straight silicone resin, a phenyl-based silicone resin, and a modified silicone resin. The joining method according to any one of claims 1 to 3, wherein the part to which the joining material of the first member is to be applied is adjacent to a part having a tube structure. The joining method according to any one of claims 1 to 4 , wherein a joined body in which a joined portion made of the joining material is formed on the first member is an inkjet head.   In the transfer step, a part of the bonding material that has been subjected to the first heat treatment in the shape and pattern corresponding to the portion to which the bonding material of the first member is to be applied is applied to the first member. The joining method according to any one of claims 1 to 5, wherein transfer is performed. An apparatus for manufacturing a joined body, which performs the method according to any one of claims 1 to 6 . Conjugate, characterized in that it is manufactured using a bonding method according to any one of claims 1 to 6. A joined body manufactured using the manufacturing apparatus according to claim 7 . The joined body according to claim 8 or 9 , wherein the joined body is an inkjet head. An inkjet head unit comprising the joined body according to claim 10 . An ink jet recording apparatus comprising the ink jet head unit according to claim 11 .

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