JP6273194B2 - 静電膜拡散接合構造およびプロセス - Google Patents
静電膜拡散接合構造およびプロセス Download PDFInfo
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- JP6273194B2 JP6273194B2 JP2014242764A JP2014242764A JP6273194B2 JP 6273194 B2 JP6273194 B2 JP 6273194B2 JP 2014242764 A JP2014242764 A JP 2014242764A JP 2014242764 A JP2014242764 A JP 2014242764A JP 6273194 B2 JP6273194 B2 JP 6273194B2
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- 238000009792 diffusion process Methods 0.000 title claims description 9
- 238000000034 method Methods 0.000 title description 45
- 239000012528 membrane Substances 0.000 title description 28
- 239000000758 substrate Substances 0.000 claims description 22
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000010410 layer Substances 0.000 description 226
- 150000004767 nitrides Chemical class 0.000 description 34
- 239000000463 material Substances 0.000 description 13
- 238000005530 etching Methods 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 238000005137 deposition process Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
Description
Claims (14)
- 複数の静電アクチュエータを含むプリントヘッドであって、各静電アクチュエータが、
半導体基材アセンブリを覆い、第1の部分を含むパターニングされた第1の伝導性層と、
前記パターニングされた第1の伝導性層の第1の部分と物理的および電気的に接触した第1の部分を有するパターニングされた第2の伝導性層であって、前記前記パターニングされた第2の伝導性層の前記第1の部分は、アクチュエータ電極の少なくとも一部である、第2の伝導性層と、
前記半導体基材アセンブリを覆い、側壁を含む第1の誘電体層と、
前記第1の誘電体層を覆う第2の誘電体層であって、前記側壁が、前記第2の誘電体層の下において側方に埋め込まれ、凹部を提供する第2の誘電体層と、
前記第2の誘電体層上の前記第2の伝導性層の第2の部分と、
前記第2の伝導性層の前記第2の部分に拡散接合したアクチュエータ膜と、
を含む、プリントヘッド。 - 前記第2の伝導性層の前記第1の部分が、前記凹部内に縁部を含む、請求項1に記載のプリントヘッド。
- 前記第2の伝導性層が、自己パターニングされた層である、請求項1に記載のプリントヘッド。
- 前記パターニングされた第1の伝導性層の前記第1の部分および前記第2の伝導性層の前記第1の部分の下層となる第3の誘電体層をさらに含み、前記側壁が、前記第2の誘電体層と前記第3の誘電体層との間に埋め込まれる、請求項1に記載のプリントヘッド。
- 前記第1の伝導性層と前記第2の伝導性層の前記第1の部分との間に介在された第3の誘電体層をさらに含み、前記側壁が、前記第2の誘電体層と前記第3の誘電体層との間で埋め込まれる、請求項1に記載のプリントヘッド。
- 前記パターニングされた第1の伝導性層が、前記複数の静電アクチュエータのために複数のトレースを提供する複数の第2の部分をさらに含み、
前記複数のトレースが、前記第2の伝導性層の前記第1の部分と前記半導体基材アセンブリとの間に直接挿入される、請求項1に記載のプリントヘッド。 - 前記パターニングされた第1の伝導性層の前記第1の部分が第1の幅を含み、
前記パターニングされた第2の伝導性層の前記第1の部分が、前記第1の幅よりも広い第2の幅を含む、請求項1に記載のプリントヘッド。 - プリンタであって、
複数の静電アクチュエータを含むプリントヘッドを備え、
各静電アクチュエータが、
半導体基材アセンブリを覆い、第1の部分を含むパターニングされた第1の伝導性層と、
前記パターニングされた第1の伝導性層の第1の部分と物理的および電気的に接触した第1の部分を有するパターニングされた第2の伝導性層であって、前記前記パターニングされた第2の伝導性層の前記第1の部分は、アクチュエータ電極の少なくとも一部である、第2の伝導性層と、
前記半導体基材アセンブリを覆い、側壁を含む第1の誘電体層と、
前記第1の誘電体層を覆う第2の誘電体層であって、前記側壁が、前記第2の誘電体層の下において側方に埋め込まれ、凹部を提供する第2の誘電体層と、
前記第2の誘電体層上の前記第2の伝導性層の第2の部分と、
前記第2の伝導性層の前記第2の部分に拡散接合したアクチュエータ膜と、
を含む、プリンタ。 - 前記第2の伝導性層の前記第1の部分が、前記凹部内に縁部を含む、請求項8に記載のプリンタ。
- 前記第2の伝導性層が、自己パターニングされた層である、請求項8に記載のプリンタ。
- 前記パターニングされた第1の伝導性層の前記第1の部分および前記第2の伝導性層の前記第1の部分の下層となる第3の誘電体層をさらに含み、前記側壁が、前記第2の誘電体層と前記第3の誘電体層との間に埋め込まれる、請求項8に記載のプリンタ。
- 前記第1の伝導性層と前記第2の伝導性層の前記第1の部分との間に介在された第3の誘電体層をさらに含み、前記側壁が、前記第2の誘電体層と前記第3の誘電体層との間で埋め込まれる、請求項8に記載のプリンタ。
- 前記パターニングされた第1の伝導性層が、前記複数の静電アクチュエータのために複数のトレースを提供する複数の第2の部分をさらに含み、
前記複数のトレースが、前記第2の伝導性層の前記第1の部分と前記半導体基材アセンブリとの間に直接挿入される、請求項8に記載のプリンタ。 - 前記パターニングされた第1の伝導性層の前記第1の部分が第1の幅を含み、
前記パターニングされた第2の伝導性層の前記第1の部分が、前記第1の幅よりも広い第2の幅を含む、請求項8に記載のプリンタ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/106,020 US9102148B2 (en) | 2013-12-13 | 2013-12-13 | Electrostatic membrane diffusion bonding structure and process |
US14/106,020 | 2013-12-13 |
Publications (3)
Publication Number | Publication Date |
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JP2015112877A JP2015112877A (ja) | 2015-06-22 |
JP2015112877A5 JP2015112877A5 (ja) | 2018-01-18 |
JP6273194B2 true JP6273194B2 (ja) | 2018-01-31 |
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JP2014242764A Active JP6273194B2 (ja) | 2013-12-13 | 2014-12-01 | 静電膜拡散接合構造およびプロセス |
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US (1) | US9102148B2 (ja) |
JP (1) | JP6273194B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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US10720670B2 (en) | 2018-02-08 | 2020-07-21 | International Business Machines Corporation | Self-aligned 3D solid state thin film battery |
US10679853B2 (en) * | 2018-02-08 | 2020-06-09 | International Business Machines Corporation | Self-aligned, over etched hard mask fabrication method and structure |
US11056722B2 (en) | 2018-02-08 | 2021-07-06 | International Business Machines Corporation | Tool and method of fabricating a self-aligned solid state thin film battery |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6079813A (en) * | 1997-10-27 | 2000-06-27 | Raja Tuli | High speed thin film stressed membrane print head |
JP3775047B2 (ja) * | 1998-04-13 | 2006-05-17 | コニカミノルタホールディングス株式会社 | インクジェットヘッド |
JP2003034035A (ja) * | 2001-07-24 | 2003-02-04 | Ricoh Co Ltd | 液滴吐出ヘッド |
JP2009066908A (ja) * | 2007-09-13 | 2009-04-02 | Seiko Epson Corp | 流体噴射ヘッドの製造方法、流体噴射装置の製造方法、及びシリコン基板のエッチング方法 |
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US9102148B2 (en) | 2015-08-11 |
JP2015112877A (ja) | 2015-06-22 |
US20150165769A1 (en) | 2015-06-18 |
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