JP6273194B2 - 静電膜拡散接合構造およびプロセス - Google Patents

静電膜拡散接合構造およびプロセス Download PDF

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Publication number
JP6273194B2
JP6273194B2 JP2014242764A JP2014242764A JP6273194B2 JP 6273194 B2 JP6273194 B2 JP 6273194B2 JP 2014242764 A JP2014242764 A JP 2014242764A JP 2014242764 A JP2014242764 A JP 2014242764A JP 6273194 B2 JP6273194 B2 JP 6273194B2
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Japan
Prior art keywords
conductive layer
layer
patterned
dielectric layer
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2014242764A
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English (en)
Japanese (ja)
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JP2015112877A (ja
JP2015112877A5 (enExample
Inventor
ピーター・ジェイ・ニストロム
デイヴィッド・エル・クニーリム
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Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of JP2015112877A publication Critical patent/JP2015112877A/ja
Publication of JP2015112877A5 publication Critical patent/JP2015112877A5/ja
Application granted granted Critical
Publication of JP6273194B2 publication Critical patent/JP6273194B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2014242764A 2013-12-13 2014-12-01 静電膜拡散接合構造およびプロセス Expired - Fee Related JP6273194B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/106,020 US9102148B2 (en) 2013-12-13 2013-12-13 Electrostatic membrane diffusion bonding structure and process
US14/106,020 2013-12-13

Publications (3)

Publication Number Publication Date
JP2015112877A JP2015112877A (ja) 2015-06-22
JP2015112877A5 JP2015112877A5 (enExample) 2018-01-18
JP6273194B2 true JP6273194B2 (ja) 2018-01-31

Family

ID=53367364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014242764A Expired - Fee Related JP6273194B2 (ja) 2013-12-13 2014-12-01 静電膜拡散接合構造およびプロセス

Country Status (2)

Country Link
US (1) US9102148B2 (enExample)
JP (1) JP6273194B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10679853B2 (en) * 2018-02-08 2020-06-09 International Business Machines Corporation Self-aligned, over etched hard mask fabrication method and structure
US10720670B2 (en) 2018-02-08 2020-07-21 International Business Machines Corporation Self-aligned 3D solid state thin film battery
US11056722B2 (en) 2018-02-08 2021-07-06 International Business Machines Corporation Tool and method of fabricating a self-aligned solid state thin film battery
US12053818B2 (en) * 2021-09-27 2024-08-06 Xerox Corporation Method of jetting print material using ejector devices and methods of making the ejector devices

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6079813A (en) * 1997-10-27 2000-06-27 Raja Tuli High speed thin film stressed membrane print head
JP3775047B2 (ja) * 1998-04-13 2006-05-17 コニカミノルタホールディングス株式会社 インクジェットヘッド
JP2003034035A (ja) * 2001-07-24 2003-02-04 Ricoh Co Ltd 液滴吐出ヘッド
JP2009066908A (ja) * 2007-09-13 2009-04-02 Seiko Epson Corp 流体噴射ヘッドの製造方法、流体噴射装置の製造方法、及びシリコン基板のエッチング方法

Also Published As

Publication number Publication date
US20150165769A1 (en) 2015-06-18
JP2015112877A (ja) 2015-06-22
US9102148B2 (en) 2015-08-11

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