JP6270345B2 - Optical element manufacturing method - Google Patents

Description

  The present invention relates to a method for manufacturing a component such as a spherical lens and a processing apparatus.

  Conventionally, as a polishing method for an optical element such as a spherical lens, a polishing slurry containing abrasive grains is supplied to an elastic tool such as polyurethane foam, the abrasive grains are temporarily held by a tool, and the abrasive is applied to a workpiece. The grains are brought into contact with a constant load. A loose abrasive polishing method is generally used in which removal is performed while destroying the workpiece by relatively rotating and swinging the tool and the workpiece. By this processing operation, the workpiece is processed into a desired shape and a smoothed surface is obtained. The amount of polishing in this loose abrasive polishing method is known to be proportional to the contact pressure between the tool and the workpiece, the relative speed between the tool and the workpiece, and the contact time (residence time) between the tool and the workpiece. . However, in the loose abrasive polishing method in which the tool and the workpiece are relatively rotated and oscillated, the relative speed with respect to the workpiece in the central portion and the peripheral portion of the tool is different. Therefore, it is difficult to keep the relative speed between the tool and the workpiece and the contact time between the tool and the workpiece always constant over the entire surface to be processed. Further, in order to obtain a desired shape, the contact pressure must be controlled over the entire work surface of the work piece, but the loose abrasive polishing method applies a certain load to the work piece against the tool. This is a processing method to be performed. Moreover, the amount of polishing of the entire surface to be processed is not constant, and the tool is also worn by the abrasive grains, and the shape of the tool changes every moment, so it is impossible to control the contact pressure. . In order to obtain a workpiece having a desired shape, it is necessary to properly reset the conditions of contact pressure, relative speed, and residence time one by one. Setting of such processing conditions requires skilled skills. There were many things to do. Therefore, an apparatus and a method for obtaining a desired shape by setting conditions of relative speed and residence time have been proposed. For example, a polishing apparatus disclosed in Patent Document 1 is an apparatus that can control a swing width of a workpiece with respect to a tool within a preset range. According to this apparatus, since the rocking width of the workpiece and the tool can be continuously changed within a preset range, unevenness in the polishing amount can be averaged. The method disclosed in Patent Document 2 is a method of continuously changing the swing center position while keeping the swing width of the workpiece and the tool constant. According to this method, unevenness in the polishing amount of the workpiece can be suppressed by dispersing unevenness in the contact pressure due to the tool position.

JP 09-300191 A JP 2006-116678 A

  However, since the loose abrasive polishing method using the polishing slurry is a method of removing while destroying the workpiece, surface defects such as scratches may occur on the surface of the workpiece. As long as abrasive grains are used, it is difficult to prevent the occurrence of surface defects under all processing conditions. Moreover, since the tool is also worn by the abrasive grains, the shape always changes. Therefore, an operation of resetting appropriate conditions one by one from the processing result is necessary.

  Furthermore, in the conventional examples described in Patent Documents 1 and 2, the appropriate swing width and swing position range also vary depending on the contact pressure distribution between the tool used and the workpiece. For this reason, in order to set the appropriate swing width and swing range, it is necessary to perform trial machining under arbitrary conditions and set appropriate conditions based on the machining results. In addition, since the appropriate swing width and swing range are different depending on the target shape, it is necessary to set an appropriate condition from the result of the trial machining as described above. That is, in the conventional polishing method, there is a problem that much labor is required for setting conditions for obtaining a desired shape.

  The problems to be solved by the present invention are a part manufacturing method and a part processing method for processing a workpiece into a target shape without causing surface defects, in which processing conditions can be easily set in the part manufacturing method. Is to provide a device.

Method of manufacturing an optical element of the present invention, by relatively moving the tool and the workpiece, method of manufacturing an optical element for producing an optical element by processing the workpiece into a spherical shape with the target The tool includes a support portion, a catalyst portion including a transition metal formed on a surface facing the workpiece, and an elastic body disposed between the support portion and the catalyst portion. The catalyst portion has a spherical shape, and a processing liquid containing water molecules is supplied between the catalyst portion and the workpiece, and the elastic body is contracted, whereby the catalyst portion and the workpiece are contracted. The workpiece is brought into contact with the processing liquid interposed, and the processing is performed until the contraction amount of the contracted elastic body becomes a predetermined value or less.

Method of manufacturing an optical element of the present invention, by relatively moving the tool and the workpiece, method of manufacturing an optical element for producing an optical element by processing the workpiece into a spherical shape with the target The tool includes a support portion, a catalyst portion including a transition metal formed on a surface facing the workpiece, and an elastic body disposed between the support portion and the catalyst portion. The tool is cylindrical, and the surface of the catalyst portion facing the workpiece has a circular shape, and the tool is rotated around the rotation axis of the tool to process the workpiece. Rotating around the rotation axis of the object, supplying a working fluid containing water molecules between the catalyst part and the workpiece, and contracting the elastic body, the catalyst part and the workpiece The amount of contraction of the elastic body that has been contracted is less than or equal to a predetermined value. And performing processing until.

  The processing apparatus of the present invention includes a holding unit that holds a workpiece, a tool for processing the workpiece, a means for rotating the workpiece around a rotation axis, and a tool that rotates the tool. Means for rotating around an axis, wherein the tool is cylindrical, a support part, and a catalyst part including a transition metal formed on a surface facing the workpiece. An elastic body disposed between the support portion and the catalyst portion, and a surface of the catalyst portion facing the workpiece has a circular shape, and the workpiece and the catalyst portion have a circular shape. The apparatus further includes means for supplying a processing liquid containing water molecules to a surface facing the workpiece.

  ADVANTAGE OF THE INVENTION According to this invention, a workpiece can be processed into the target shape, without using an abrasive grain, and the workpiece without a surface defect is obtained. Moreover, since wear of the tool can be suppressed, the machining conditions can be set easily, and the productivity of machining is improved.

It is a figure which shows the manufacturing method which concerns on this embodiment. It is a figure which shows the example of the tool used with the manufacturing method which concerns on this embodiment. It is a figure which shows the manufacturing method which concerns on this embodiment in detail. It is a figure which shows the manufacturing method which concerns on this embodiment.

FIG. 1 shows an embodiment for carrying out the present invention. In FIG. 1A, the tool 1 is a rotary drive body 2, the rotary drive body 2 is a turning drive body 3, the turning drive body 3 is a stage 4 movable to the X axis and the Y axis, and the stage 4 is a processing device. Each is attached to a main body (not shown). The workpiece 5 is in the holding unit 6, the holding unit 6 is in the rotary drive 7, the rotary drive 7 is in the stage 8 movable to the X axis and Y axis, and the stage 8 is in the processing machine main body (not shown). It is attached. Further, a supply means 10 for supplying the processing liquid 9 containing H ₂ O is attached to the processing apparatus. The processing apparatus has an origin O at an arbitrary position. FIG.1 (b) shows the detail of the tool 1 in Fig.1 (a). In FIG. 1B, the tool 1 has a support portion 11 and a catalyst portion 12 formed on a surface facing the surface of the workpiece 5, and an elastic body 13 is provided between the support portion 11 and the catalyst portion 12. Yes. The elastic body 13 may be composed of only a single elastic material, or may be composed of a plurality of elastic materials. In this embodiment, the stage 4, the stage 8, the turning drive body 3, the rotation drive body 2, and the rotation drive body 7 are driven with the origin O set at an arbitrary position of the processing apparatus as a reference, and the tool 1 and the workpiece Control the relative position of the object 5. Then, the catalyst unit 12 and the workpiece are brought close to each other with the machining liquid 9 containing water molecules (H ₂ O) interposed between the surface of the catalyst unit 12 and the surface of the workpiece 5 (working surface). The processing surface of the workpiece 5 is processed by moving the workpiece 5 in a moving manner. When the catalyst part 12 and the workpiece 5 are brought into contact with the processing liquid 9 containing water molecules (H 2 O) interposed, the liquid containing extremely thin water molecules between the catalyst part 12 and the workpiece 5 Including the state in which the membrane is interposed. Hereinafter, in this specification, including this state, the catalyst unit 12 and the workpiece 5 are referred to as being brought into contact with each other. The film thickness of the liquid film containing extremely thin water molecules is preferably 3 mm or more and 10 mm or less.

The catalyst unit 12 according to the present embodiment promotes dissociation of OH ⁻ and H ⁺ from water molecules (H ₂ O). The dissociated OH ⁻ and H ⁺ act on the oxygen element constituting the workpiece, cut back bonds between the oxygen element and other elements, and dissolve the oxygen element from the workpiece surface into the machining liquid by hydrolysis. As well as letting out other elements from which back bonds have been cut. The workpiece is processed by this hydrolysis action. At this time, since the catalyst part 12 only promotes dissociation of water molecules, there is little wear and the change in shape can be sufficiently suppressed. The material of the catalyst part 12 contains at least one or more transition metal elements as a catalyst substance that promotes the generation of decomposition products by hydrolysis. Examples of the transition metal element include Pt, Au, Ag, Cu, Ni, Cr, and Mo. These metal elements may be a single element or an alloy composed of a plurality of metal elements including a transition metal element. . In addition, the means for joining the catalyst portion 12 to the elastic body 14 is not particularly limited, but a method of thin-film coating the catalyst material on the elastic body surface is desirable. The method for coating the catalyst portion with a thin film may be a general coating method such as a sputtering method, a CVD method, a plating method, or a coating and drying method, and is not limited to this method. In order to increase the adhesion between the catalyst portion and the elastic body, it is more desirable to provide an intermediate layer such as carbon between the catalyst portion and the elastic body. The film thickness of the catalyst portion is not particularly limited, but it is preferably greater than the atomic size if the catalyst is a single element, or greater than the size of the aggregate if the catalyst is composed of a plurality of elements. Further, when the workpiece is an optical element, generally a shape accuracy of 500 nm or less is required. At this time, since the difference in the film thickness of the catalyst portion affects the shape accuracy of the workpiece, it is desirable that the film thickness be uniform within the tool machining surface. In the case of allowing a film thickness error on the tool processing surface, the thickness is desirably 500 nm or less from the viewpoint of not deteriorating the shape accuracy of the workpiece.

  The material of the elastic body 13 according to the present embodiment is not particularly limited, but a local pressure increase is obtained by increasing the contact area between the workpiece 5 and the solid catalyst 12 by deformation of the elastic body 13. It is desirable to have a function that does not cause the problem. It is desirable that the elastic body 13 is not plastically deformed when the elastic body 13 is strained by contact. That is, it is desirable that the ratio between the elastic modulus and the yield stress is sufficiently larger than the assumed strain amount. Generally, in an optical element, the maximum error amount between the shape of a workpiece before processing and the target shape is often 10 μm or less. For example, when the thickness of the elastic body 13 is 1 mm and the deformation amount due to the shape error is 10 μm, the strain amount is 1%. In such a case, it is desirable that the ratio of the elastic modulus of the elastic body 13 to the yield stress is 1% or more. Examples of the material include synthetic resins such as an epoxy resin having a compressive modulus of 2000 MPa to 3000 MPa and a yield stress of 1 MPa to 100 MPa, and a polyurethane resin having a compressive modulus of 70 MPa to 700 MPa and a yield stress of 20 MPa to 30 MPa. Materials. From the viewpoint of further reducing the risk of occurrence of surface defects on the workpiece, a material having a smaller compression modulus is desirable. Examples of the material include foamed resin materials such as a foamed polyurethane resin having a compressive modulus of 1 MPa to 10 MPa and a yield stress of about 1 MPa. Further, from the viewpoint of reducing the shear deformation of the elastic body 13 generated by the relative motion of the workpiece 5 and the solid catalyst 12 and the deformation due to the centrifugal force, it is desirable that the compression elastic modulus is 0.1 MPa or more.

  The material of the workpiece according to the present embodiment is not particularly limited. Glass is mainly used as a material when the workpiece is an optical element, and the composition thereof includes borate glass containing boric acid, phosphate glass containing phosphoric acid, Includes glass containing barium oxide, titanium oxide, lanthanum oxide and the like. Examples of phosphate glass include fluorophosphate glass containing fluorides such as calcium fluoride and barium fluoride. Add the material of the workpiece other than glass.

The working fluid according to the present invention must contain water molecules (H ₂ O), but the composition is not limited. For example, components such as HNO ₃ and KOH may be included for pH adjustment. Moreover, components, such as an acetate buffer solution and a phosphate buffer solution, may be contained as a pH buffer solution. The pH of the working fluid is preferably in the range of 2 to 12 from the viewpoint of processing speed, and more preferably in the range of 3 to 10 from the viewpoint of deterioration of the apparatus and reduction of environmental load. In addition, it is preferable that the working fluid contains water molecules (H ₂ O) so that the weight of water molecules with respect to the total weight of the working fluid is 99% by weight or more. The content of the substance is more preferably 1 ppm or less. When the pH buffer solution is included in the processing liquid, it is preferable that the processing liquid contains water molecules (H ₂ O) so that the weight of water molecules is 95% by weight or more based on the total weight of the processing liquid. . And it is more preferable that content of substances other than a water molecule and pH buffer solution is 1 ppm or less with respect to the weight of the whole processing liquid. Further, in the present invention, since the removal action of the workpiece by the solid particles is not required, it is desirable that the processing liquid does not contain solid particles.

  Next, the shape of the tool will be described with reference to FIG.

  The shape of the tool 1 according to the present invention is not particularly limited. However, the cylindrical tool or the surface of the catalyst unit 12 that faces the processing surface is a target shape of the workpiece (target For example, a tool having a spherical shape is desirable. It is desirable that the target shape of the workpiece is also a spherical shape. 2A and 2B show examples of cylindrical tools. In FIG. 2A, the catalyst portion 12 has a circular shape in a state where no pressure is applied to the elastic body 13, and the diameter of the circle that contacts the target shape surface (the processed shape) of the workpiece 5 ( Hereinafter, the effective diameter is described as Dt. Further, the outer diameter of the workpiece 5 is Dw, the width of the cylindrical tool is W, and the radius of curvature of the tip of the catalyst unit 12 is R3. Here, Dt is desirably Dw / 2 or more. The magnitude of R3 may be greater than or equal to W, and is more preferably close to W. Further, from the viewpoint of increasing the contact area between the catalyst portion 12 and the workpiece 5 and increasing the processing speed, the curvature radius of the catalyst portion 12 as shown in FIG. 2B is the target curvature radius R0 of the workpiece. Some tools are also desirable. Further, from the viewpoint of further increasing the processing speed, the surface of the catalyst portion 12 facing the processing surface as shown in FIG. 2C transfers the target shape (target shape) of the processing object. A tool having a shape to be used may be used. In FIG.2 (c), the curvature radius of the surface which opposes the to-be-processed surface of the catalyst part 12 is set to the curvature radius R0 of the target shape of a to-be-processed object.

  Next, an embodiment of a method for manufacturing a component according to the present invention will be described with reference to FIG.

  As shown in FIG. 1A, the tool 1 is rotated by a rotary drive body 2. The workpiece 5 is rotated by the rotary drive body 7. In this embodiment, an example in which both the tool 1 and the workpiece 5 are rotated is shown, but either the tool 1 or the workpiece 5 may be rotated. The tool 1 is moved by the rotary drive 2 and the stage 4, and the workpiece 5 is moved by the rotary drive 7 and the stage 8, so that the tool and the workpiece are relatively moved. Further, the tool 1 may be swung (reciprocated in the circumferential direction) with respect to the workpiece 5 by the swing drive body 3 and the stage 4. The tool 1 and the work piece in a state where the movement trajectory of the tip of the catalyst part 12 in a state where no pressure is applied to the elastic body 13 is made to coincide with the surface of the target shape of the work piece 5 determined based on the origin O. It is preferable to move 5 relatively. It is desirable to obtain the target shape of the workpiece in advance.

  In FIG. 1 (c), the movement locus of the tip of the catalyst unit 12 in a state where the elastic body 13 is not contracted (a state where no pressure is applied to the elastic body 13) is set as a target after processing the workpiece 6. A state in which the tool 1 and the workpiece 5 are relatively moved so as to coincide with the surface of the shape is shown. Here, a state in which the workpiece 5 before processing has a curvature radius R1 different from the target curvature radius R0 is shown. As shown in FIG. 1 (c), when the workpiece before and during processing has a shape error (a portion that must be processed) with respect to a target shape, the elastic body 13 contracts (elasticity). The amount of error is absorbed. Therefore, the contact state through the water molecules between the catalyst portion 12 and the surface to be processed can be maintained without causing a local pressure increase in the workpiece 5, and the surface of the workpiece 5 without causing surface defects. (Surface to be processed) can be processed. Then, by performing processing until the amount of contraction of the elastic body 13 reaches a predetermined value (ideally, until no deformation occurs), a workpiece having a target shape as shown in FIG. A thing is obtained.

More specifically, an example of a method for manufacturing a workpiece using a known curve generator will be described below. FIG. 3 shows an example of processing a concave spherical lens with a cylindrical tool. 3A, the radius of curvature of the target shape of the workpiece 5 (the radius of curvature after machining) is R0, the radius of curvature of the workpiece 5 before machining is R1, and the effective diameter of the tip of the catalyst unit 12 is Is Dt, the rotation axis of the workpiece is AA ′, the rotation axis of the tool is BB ′, and the angle between AA ′ and BB ′ is θ. Further, the point at the tip of the catalyst portion 12 at the effective diameter Dt is Pt 1 and Pt 2, and the point on the rotation axis AA ′ in the target shape of the workpiece (the shape after processing) is P 0. At this time, R1> R0 and AA ′ and BB ′ are on the same plane. First, AA ′ is turned so that θ = sin−1 (Dt / 2R0), and the tool is moved in the X-axis direction so that Pt 1 coincides with AA ′. FIG. 3B shows the positional relationship between the tool and the workpiece at this time. In this state, the catalyst unit 12 is brought into contact with the workpiece 5 by moving the tool 1 in the Y-axis direction in the direction in which P0 and Pt1 coincide. The workpiece is processed by rotating the workpiece and the tool while supplying a machining fluid containing water molecules (H ₂ O) between the catalyst portion and the workpiece surface of the workpiece. To do.

  Further, when Pt 2 coincides with the surface having the curvature radius R0, the movement of the tool 1 in the Y-axis direction is stopped. When Pt 2 coincides with the surface having the radius of curvature R0, that is, the movement locus of the tip of the catalyst portion 12 in a state where no pressure is applied to the elastic body 13 (a state where the elastic body 13 is not contracted) This is when the target shape of the workpiece 5 (the shape after processing) matches the R0 plane. The positional relationship between the tool 1 and the workpiece 5 at this time is shown in FIG. In the initial stage of processing, since the surface of the catalyst part comes into contact with the work piece via the water molecule on the curvature radius R1, the elastic body absorbs the shape error part (the part that must be processed) of R1 and R0. 13 contracts. By processing the workpiece 5 until the amount of contraction of the elastic body 13 becomes a predetermined value or less, as shown in FIG. 3 (d), a workpiece having a curvature radius R0 of a target shape is obtained. . Thus, a target shape can be obtained only by setting very simple processing conditions.

  It is desirable to continue the processing (contact) until the elastic body is completely contracted (until the amount of contraction of the elastic body 13 becomes 0). However, if the amount of contraction of the elastic body is equal to or less than the maximum value (predetermined value) of the shape error in the specification allowed for the workpiece 9, the processing may be terminated in a state where the contraction of the elastic body remains. Of course it is possible.

  If the distance between the catalyst portion and the workpiece is a certain distance (for example, greater than 10 mm), the workpiece is not processed. Therefore, when the elastic body is no longer contracted and the distance between the workpiece and the elastic body is a certain distance (for example, greater than 10 mm), the processing further proceeds even if the contact between the catalyst unit 12 and the workpiece is continued. Absent. If the contact time is made sufficiently long, the amount of shrinkage will eventually become zero, and the distance between the catalyst part and the workpiece will be a certain distance (for example, greater than 10 mm), and the processing will end. However, the end of processing can be detected by monitoring the amount of contraction of the elastic body 13 with at least one physical quantity generated by contact of the catalyst portion and the workpiece with water molecules. Thereby, the processing time can be shortened. The physical quantity may monitor a force applied to the tool and the workpiece by a load sensor, or may monitor a torque value applied to the rotary driving body of the tool or the workpiece. In particular, from the viewpoint of simplifying the monitoring means, the physical quantity is more preferably a torque value added to the rotary drive body of the tool or workpiece. When the physical quantity falls below a predetermined value, the processing is finished. Thereby, since a process can be complete | finished when a to-be-processed object corresponds with the target shape, processing time can be shortened. Further, the elastic body 13 is contracted, and the tool is moved while contracting the elastic body 13 so that the movement locus of the tip of the catalyst unit 12 coincides with the target shape R0 surface of the workpiece 5. The force applied to the tool and workpiece at that time is measured in advance by a load sensor. When the value measured in advance is reached, the movement of the tool 1 in the Y-axis direction may be stopped. Alternatively, it is added to the rotational drive body when the tool is moved while the elastic body 13 is contracted so that the movement locus of the tip of the catalyst portion 12 of the tool coincides with the target shape R0 surface of the workpiece 5. Measure the torque value. When the torque value measured in advance is reached, the movement of the tool 1 in the Y-axis direction may be stopped.

  Further, the error amount can be absorbed by the elastic body 13 contracting (elastically deforming), but it is desirable to preliminarily define the thickness of the elastic body so that the elastic body 13 is not plastically deformed. In FIG. 4, the maximum shape error amount in the direction of the rotation axis BB ′ of the workpiece in the shape of the workpiece before machining and the target shape after machining is tw. Further, the thickness of the elastic body 13 in the BB ′ direction is te, and the deformation amount when it becomes the yield point when the elastic body is displaced in the BB ′ direction is Δte. It is desirable to set the thickness te in advance so that Δte is larger than tw. As a result, even when the tool is moved to a position where Pt and P0 coincide with each other at the initial stage of machining, the elastic body 13 is not plastically deformed, so that a workpiece having a target shape can be obtained.

  In addition, it is desirable to set a moving speed from at least the tip of the catalyst portion to the workpiece to a position coinciding with the target shape surface in accordance with the processing speed of the workpiece measured in advance. . For example, assuming that the processing speed measured when the catalyst portion is brought into contact with the workpiece at a constant pressure in FIG. 4 is Vr, the moving speed Vt of the tool in the BB ′ direction is Vr or less. Is set. Thereby, even when the deformation amount when the elastic body 13 becomes the yield point is small, the elastic body 13 is more preferably not plastically deformed.

  With the method for manufacturing a workpiece as described above, the processing conditions can be easily set, so that the productivity of processing is improved and an optical element having a target shape without surface defects can be obtained. .

DESCRIPTION OF SYMBOLS 1 Tool 2 Rotation drive body 3 Rotation drive body 4 Stage 5 Work piece 6 Holding part 7 Rotation drive body 8 Stage 9 Work fluid 10 Supply means 11 Support part 12 Catalyst part 13 Elastic body

Claims (19)

By relatively moving the tool and the workpiece, a method of manufacturing an optical element for producing an optical element by processing the workpiece into a spherical shape with the target,
The tool includes a support part, a catalyst part including a transition metal formed on a surface facing the workpiece, and an elastic body disposed between the support part and the catalyst part,
The catalyst portion has a spherical shape,
A working fluid containing water molecules is supplied between the catalyst portion and the workpiece, and the elastic body is contracted so that the catalyst portion and the workpiece are brought into contact with each other via the working fluid. Let
A method of manufacturing an optical element , wherein the processing is performed until a contraction amount of the contracted elastic body becomes a predetermined value or less. The method of manufacturing an optical element according to claim 1, wherein the workpiece includes an oxygen element. The method of manufacturing an optical element according to claim 1, wherein the workpiece is glass. The elastic body, the manufacturing method of claims 1 to 3 optical element according to any one claim, characterized in that a polyurethane resin or a polyurethane foam resin. Said catalyst unit, the production method of claims 1 to 4 optical element according to any one claim, characterized in that it is formed by a thin film coating. The catalyst portion may be a single metal element of Pt, Au, Ag, Cu, Ni, Cr, or Mo, a metal containing Pt, Au, Ag, Cu, Ni, Cr, or Mo, or Pt, Au, Ag, Cu , Ni, Cr, method for manufacturing an optical element according to claim 1 to 5 any one claim, characterized in that an alloy composed of a plurality of metal elements including Mo. Wherein one of the tool and the workpiece, the manufacturing method of the optical element according to claim 1 to 6 any one claim, characterized in that at least one is rotated. The amount of shrinkage of the elastic body, the manufacturing method of claims 1 to 7 or an optical element of one of claims, characterized in that determined by measuring the load applied to the tool. The method of manufacturing an optical element according to claim 7 , wherein the contraction amount of the elastic body is obtained from a torque value in rotation of at least one of the tool and the workpiece. The catalyst portion and the workpiece are brought into contact with each other with water molecules interposed between the catalyst portion and the workpiece, thereby promoting dissociation of the water molecules by the catalyst portion, and the workpiece the method according to claim 2 or 9 or the optical element of one of claims, characterized in that eluting said oxygen element by cutting hydrolyze back bonds of oxygen element and the other elements constituting an object. By relatively moving the tool and the workpiece, a method of manufacturing an optical element for producing an optical element by processing the workpiece into a spherical shape with the target,
The tool includes a support part, a catalyst part including a transition metal formed on a surface facing the workpiece, and an elastic body disposed between the support part and the catalyst part,
The tool is cylindrical, the surface of the catalyst portion facing the workpiece has a circular shape, the tool is rotated about the rotation axis of the tool, and the workpiece is moved to the workpiece. Rotate around the rotation axis,
A working fluid containing water molecules is supplied between the catalyst portion and the workpiece, and the elastic body is contracted so that the catalyst portion and the workpiece are brought into contact with each other via the working fluid. Let
A method of manufacturing an optical element , wherein the processing is performed until a contraction amount of the contracted elastic body becomes a predetermined value or less. The method of manufacturing an optical element according to claim 11, wherein the workpiece includes an oxygen element. The method for manufacturing an optical element according to claim 11 or 12, wherein the workpiece is characterized in that it is a glass. The elastic body, method for manufacturing an optical element according to claim 11 or 13 to any one claim, characterized in that a polyurethane resin or a polyurethane foam resin. The method of manufacturing an optical element according to claim 11, wherein the catalyst portion is formed by thin film coating. The catalyst portion may be a single metal element of Pt, Au, Ag, Cu, Ni, Cr, or Mo, a metal containing Pt, Au, Ag, Cu, Ni, Cr, or Mo, or Pt, Au, Ag, Cu , Ni, Cr, manufacturing method for an optical element according to claim 11 or 15 to any one claim, characterized in that an alloy composed of a plurality of metal elements including Mo. Contraction amount of the elastic body, method for manufacturing an optical element according to claim 11 or 16 to any one claim, characterized in that determined by measuring the load applied to the tool. The amount of shrinkage of the elastic body, the manufacturing method of the tool and the workpiece at least one optical element of any one of claims 11 to 17, wherein the obtaining the torque value in the rotation. The catalyst portion and the workpiece are brought into contact with each other with water molecules interposed between the catalyst portion and the workpiece, thereby promoting dissociation of the water molecules by the catalyst portion, and the workpiece the process according to claim 12 or 18 optical element according to any one claim, characterized in that eluting said oxygen element by cutting hydrolyze back bonds of oxygen element and the other elements constituting an object.

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