JP6263536B2 - 半導体縮合チオフェンポリマーインク配合物 - Google Patents
半導体縮合チオフェンポリマーインク配合物 Download PDFInfo
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- JP6263536B2 JP6263536B2 JP2015529857A JP2015529857A JP6263536B2 JP 6263536 B2 JP6263536 B2 JP 6263536B2 JP 2015529857 A JP2015529857 A JP 2015529857A JP 2015529857 A JP2015529857 A JP 2015529857A JP 6263536 B2 JP6263536 B2 JP 6263536B2
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- Prior art keywords
- solvent
- cyclooctane
- xylene
- formulation
- decalin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/12—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances organic substances
- H01B1/124—Intrinsically conductive polymers
- H01B1/127—Intrinsically conductive polymers comprising five-membered aromatic rings in the main chain, e.g. polypyrroles, polythiophenes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/12—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule
- C08G61/122—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule derived from five- or six-membered heterocyclic compounds, other than imides
- C08G61/123—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule derived from five- or six-membered heterocyclic compounds, other than imides derived from five-membered heterocyclic compounds
- C08G61/126—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule derived from five- or six-membered heterocyclic compounds, other than imides derived from five-membered heterocyclic compounds with a five-membered ring containing one sulfur atom in the ring
-
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Description
mは1から2の整数であり、
nは4から80の整数であり、
R1、R2、R3、およびR4の各々は、飽和または不飽和環状(C3-10)ヒドロカルビレンにより置換された、飽和または不飽和、分岐鎖または未分岐、置換または未置換の(C10-20)ヒドロカルビレンを有する群から独立して選択されたヒドロカルビレン置換基である。
「FTx」などの略語は、縮合チオフェン化合物、その重合性モノマー、およびそのポリマーを称することがあり、ここで、xは、単一のコア単位に縮合された縮合チオフェン環または環単位の数を表す整数であり、例えば、FT2はコア単位に2つの縮合環を有し、FT3はコア単位に3つの縮合環を有し、FT4はコア単位に4つの縮合環を有し、FT5はコア単位に5つの縮合環を有し、そして同様にコア単位の表記が大きくなっていく。
配合物の総質量に基づいて0.1から5質量%の量の、式(I)、(II)、またはそれらの組合せ、もしくその塩の、ジケトピロロピロール(DPP)および縮合チオフェンのコポリマー構造から選択される有機半導体ポリマー:
mは1から2の整数であり、
nは4から80の整数であり、
XおよびYは、独立して、チオフェンまたは置換チオフェンなどの二価ヘテロアリールから選択され、
R1、R2、R3、およびR4の各々は、飽和または不飽和環状または非環状(C3-10)ヒドロカルビレンにより置換された、飽和または不飽和、分岐鎖または未分岐、置換または未置換のヒドロカルビレンの群から独立して選択された一価の(C20-50)ヒドロカルビレン置換基である;
配合物の総質量に基づいて2から98質量%の量の、環式脂肪族化合物から選択される第1の溶媒;および
配合物の総質量に基づいて98から2質量%の量の、芳香族化合物から選択される第2の溶媒;
を含む配合物を提供する。
式中、
式(II)のR1およびR2の各々が−C16H33ヒドロカルビレンであり、
式(II)のR3およびR4の各々が−C17H35ヒドロカルビレンであり、
mが1であり、
nが、中間値と中間範囲を含む、4から60、10から30、10から20、および10から15の整数である。
単独または組合せの、開示された配合物のいずれかを適切な基板上に堆積させる工程、
を有してなる方法を提供する。
実施例1
溶液調製 式(III)のPTDC16DPPTDC17FT4ポリマーの溶液を、このポリマーをバイアル中に秤量し、次いで、混合溶媒を加えることによって調製した。その混合物を、完全に溶解するまで、撹拌しながら、溶媒混合物の沸点、または溶媒の対の低い方の沸点近くまで加熱した。ポリマーと溶媒の比は、約1mg/mLから5mg/mLであった。ポリマーが、加熱された溶液が室温まで冷める前に溶媒中に完全に溶解していることが好ましい。表1は、5mg/mLまたは約0.5質量%でのPTDC16DPPTDC17FT4の溶液におけるゲル化耐性について試験した溶媒の組合せのリストを提供する。図1は、表1に列挙された実験結果のグラフ表示を提供する。第1と第2の溶媒の対の全ての体積比は1:1であった。
溶液調製 式(III)のPTDC16DPPTDC17FT4ポリマーの溶液を、このポリマーをバイアル中に秤量し、次いで、混合溶媒を加えることによって調製した。その混合物を、完全に溶解するまで、撹拌しながら、溶媒混合物の沸点、または溶媒の対の低い方の沸点近くまで加熱した。ポリマー対溶媒の比は、約5mg/mLであった。ポリマーが、加熱された溶液が室温まで冷める前に溶媒中に完全に溶解していることが好ましい。表4は、5mg/mLまたは約0.5質量%でのPTDC16DPPTDC17FT4の溶液におけるゲル化耐性について試験した溶媒の組合せおよびその溶媒の比のリストを提供する。図4は、表4に列挙された実験結果のグラフ表示を提供する。
溶液調製 式(III)のPTDC16DPPTDC17FT4ポリマーの溶液を、このポリマーをバイアル中に秤量し、次いで、混合溶媒を加えることによって調製した。その混合物を、完全に溶解するまで、撹拌しながら、溶媒混合物の沸点、または溶媒の対の低い方の沸点近くまで加熱した。ポリマーと溶媒の比は、約5mg/mLから約25mg/mLまで変えた。ポリマーが、加熱された溶液が室温まで冷める前に溶媒中に完全に溶解していることが好ましい。表5は、PTDC16DPPTDC17FT4の溶液におけるゲル化耐性について試験した溶媒の組合せおよびその溶媒中のポリマーの濃度のリストを提供する。図5は、表5に列挙された実験結果のグラフ表示を提供する。
スピンコーティング スピンコーティング塗布のために、表面張力が著しい懸念ではない場合、実施例1の配合物を選択した。
実施例4
薄膜トランジスタ製造 有機半導体チャネルとして、例えば、縮合チオフェンコポリマーのPTDC16DPPTDC17FT4を使用した、トップコンタクト・ボトムゲート構造のトランジスタを製造した。ゲート誘電体としての300nmの熱成長二酸化ケイ素と共に、ゲート電極として、高濃度にドープされたSi<100>ウェハーを使用した。基板を、各溶媒中に10分間ずつ、半導体グレードのアセトンとイソプロパノール中での超音波処理により洗浄し、次いで、15分間の空気プラズマ処理を行った。洗浄したSi/SiO2サンプルを窒素雰囲気において15分間に亘り約200℃で焼成して、脱水を行った。ヘキサメチルジシラザン(HMDS)を、ゲート誘電体層の表面改質に使用した。次いで、ポリマー膜を、60秒間に亘る1000rpmでのスピンコーティングにより堆積させた。異なる溶媒比のインクとして、純粋なテトラリン、3:1のテトラリン:p−キシレンおよび純粋なp−キシレンを使用して、3組の異なるサンプルを製造した。トップコンタクト電極の熱蒸発の前に、膜を窒素雰囲気において190℃のホットプレート上で焼き鈍して、溶媒を除去し、ポリマーの配列を促進した。ソース電極とドレイン電極のための40nmの金接点を、50マイクロメートルのチャネル長さ(L)および1mmのチャネル幅を有する一連のトランジスタ素子を画成する金属製シャドウマスクを通じて、2.5Å/sの速度で真空蒸着した。表6は、このようにして製造した素子に関する素子移動度および閾値電圧のデータを示している。そのデータは、溶媒比を変えることにより、そのインクから製造された素子の性能に悪影響がないことを示している。それゆえ、トランジスタの性能を犠牲にせずに、インクの安定性をよりよくするために、インクを調節することが可能である。
Claims (2)
- (1)式(I)、(II)、またはそれらの組合せ、もしくはその塩の、ジケトピロロピロール(DPP)および縮合チオフェンのコポリマー構造から選択される有機半導体ポリマー:
mは1から2の整数であり、
nは4から80の整数であり、
XおよびYは、独立して、二価ヘテロアリールから選択され、
R1、R2、R3、およびR4の各々は、一価または二価の飽和または不飽和環状または非環状(C3-10)ヒドロカルビレンにより置換された、飽和または不飽和、分岐鎖または未分岐、置換または未置換のヒドロカルビレンの群から独立して選択された一価の(C20-50)ヒドロカルビレン置換基である;
(2)環式脂肪族化合物から選択される第1の溶媒;および
(3)芳香族化合物から選択される第2の溶媒;
を含む配合物であって、
前記第1の溶剤と前記第2の溶剤との体積比が40:60から95:5の範囲にあり、かつ、
(イ)前記有機半導体ポリマーの、前記第1の溶媒と前記第2の溶媒の組合せ中における濃度が5mg/mL以下であって、前記第1の溶媒と前記第2の溶媒の組合せがシクロオクタンとトルエン、シクロオクタンとテトラリン、デカリンとトルエン、またはデカリンとp−キシレンである、
(ロ)前記有機半導体ポリマーの、前記第1の溶媒と前記第2の溶媒の組合せ中における濃度が3mg/mL以下であって、前記第1の溶媒と前記第2の溶媒の組合せが、メチルシクロヘキサンとテトラリン、シクロオクタンとm−キシレン、シクロオクタンとp−キシレン、シクロオクタンとトルエン、シクロオクタンとテトラリン、シクロオクタンとメシチレン、デカリンとm−キシレン、デカリンとp−キシレン、デカリンとトルエン、デカリンとテトラリンである、
(ハ)前記有機半導体ポリマーの、前記第1の溶媒と前記第2の溶媒の組合せ中における濃度が1mg/mL以下であって、前記第1の溶媒と前記第2の溶媒の組合せが、メチルシクロヘキサンとテトラリン、メチルシクロヘキサンとp−キシレン、メチルシクロヘキサンとメシチレン、ビシクロへキシルとテトラリン、ビシクロへキシルとp−キシレン、ビシクロへキシルとメシチレン、シクロオクタンとテトラリン、シクロオクタンとp−キシレン、シクロオクタンとm−キシレン、シクロオクタンとメシチレンである、または、
(二) 前記有機半導体ポリマーの、前記第1の溶媒と前記第2の溶媒の組合せ中における濃度が10mg/mL以下であって、前記第1の溶媒と前記第2の溶媒の組合せがデカリンとトルエンである、
配合物。
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2013
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- 2013-08-20 WO PCT/US2013/055674 patent/WO2014035716A1/en active Application Filing
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- 2013-08-20 CN CN201380044580.8A patent/CN104703685B/zh active Active
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KR20150048815A (ko) | 2015-05-07 |
WO2014035716A1 (en) | 2014-03-06 |
EP2888034A1 (en) | 2015-07-01 |
CN104703685A (zh) | 2015-06-10 |
US20150206616A1 (en) | 2015-07-23 |
JP2015532788A (ja) | 2015-11-12 |
CN104703685B (zh) | 2017-03-15 |
EP2888034B1 (en) | 2017-02-01 |
KR102154260B1 (ko) | 2020-09-10 |
US9312044B2 (en) | 2016-04-12 |
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