JP6251165B2 - 洗浄装置 - Google Patents
洗浄装置 Download PDFInfo
- Publication number
- JP6251165B2 JP6251165B2 JP2014509455A JP2014509455A JP6251165B2 JP 6251165 B2 JP6251165 B2 JP 6251165B2 JP 2014509455 A JP2014509455 A JP 2014509455A JP 2014509455 A JP2014509455 A JP 2014509455A JP 6251165 B2 JP6251165 B2 JP 6251165B2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- face panel
- wall
- air blanket
- blanket reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D90/00—Component parts, details or accessories for large containers
- B65D90/02—Wall construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/28—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring the variations of parameters of electromagnetic or acoustic waves applied directly to the liquid or fluent solid material
- G01F23/296—Acoustic waves
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/20—Reflecting arrangements
- G10K11/205—Reflecting arrangements for underwater use
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Soundproofing, Sound Blocking, And Sound Damping (AREA)
Description
本出願は、J. Michael Goodsonにより発明され、2011年5月3日に出願された、「超音波空気ブランケット反射器」と題する米国仮特許出願61/482,093の利益を主張する。この仮出願の開示内容は、参照により本出願に組み込まれるものである。
Claims (7)
- 洗浄装置であって、
少なくとも1つの壁を有するタンクであって、前記タンクは、液体を含む内部を画定し、前記壁は前記液体と接触している、タンクと、
超音波エネルギーを前記タンクの前記内部に提供する1つ以上の超音波振動子と、
前記タンクの壁と実質的に平行で前記タンクの前記内部を向いた第1の面パネルであって、前記第1の面パネルは、前記タンクの前記壁に隣接して位置する、第1の面パネルと、前記第1の面パネルと間隔を空けた第2の面パネルとを有し、前記第1の面パネル及び前記第2の面パネルは前記液体と接触し、そして、前記第1の面パネルと前記第2の面パネルとで、空気で満たされ、前記タンク内側の前記液体が入らないよう密封された空洞を形成し、超音波を反射する空気ブランケット反射器と、
を備え、
前記空気ブランケット反射器は、前記タンク内に含まれる液体の表面レベルの上方に延在し、前記空洞の上端にガス抜きを有する、
洗浄装置。 - 前記空気ブランケット反射器は、前記タンクの前記壁に取り付けられた前記第1の面パネルの外周に複数のフランジを含む、請求項1に記載の洗浄装置。
- 前記複数のフランジは、前記タンクの前記壁に溶接されている、請求項2に記載の洗浄装置。
- 前記空気ブランケット反射器は、前記第1の面パネルの外周および前記第2の面パネルの外周の壁を含み、前記外周壁は、前記第1の面パネルおよび前記第2の面パネルに溶接されている、請求項1に記載の洗浄装置。
- 前記空気ブランケット反射器は、ブラケットにより前記タンクに取り付けられている、請求項1に記載の洗浄装置。
- 前記第1の面パネルは、14ゲージステンレス鋼からなる、請求項1に記載の洗浄装置。
- 前記第1の面パネルの厚さは、前記タンクの前記壁の厚さよりも小さい、請求項1に記載の洗浄装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161482093P | 2011-05-03 | 2011-05-03 | |
US61/482,093 | 2011-05-03 | ||
PCT/US2012/036389 WO2012151439A1 (en) | 2011-05-03 | 2012-05-03 | Ultrasonic air blanket reflector |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014519402A JP2014519402A (ja) | 2014-08-14 |
JP6251165B2 true JP6251165B2 (ja) | 2017-12-20 |
Family
ID=47089401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014509455A Expired - Fee Related JP6251165B2 (ja) | 2011-05-03 | 2012-05-03 | 洗浄装置 |
Country Status (15)
Country | Link |
---|---|
US (1) | US8936032B2 (ja) |
EP (1) | EP2705337B1 (ja) |
JP (1) | JP6251165B2 (ja) |
KR (2) | KR20140018372A (ja) |
CN (1) | CN103782139A (ja) |
AU (1) | AU2012250676B2 (ja) |
BR (1) | BR112013028416A2 (ja) |
CA (1) | CA2835064C (ja) |
CL (1) | CL2013003156A1 (ja) |
ES (1) | ES2677848T3 (ja) |
MX (1) | MX2013012792A (ja) |
PE (1) | PE20141783A1 (ja) |
SG (1) | SG194773A1 (ja) |
UA (1) | UA113514C2 (ja) |
WO (1) | WO2012151439A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013076581A2 (en) | 2011-11-24 | 2013-05-30 | Indian Institute Of Technology | Multilayer organic-templated-boehmite-nanoarchitecture for water purification |
JP2015112586A (ja) * | 2013-12-16 | 2015-06-22 | 株式会社シンオーサービス | 組立式超音波洗浄装置 |
US11141762B2 (en) | 2015-05-15 | 2021-10-12 | Acm Research (Shanghai), Inc. | System for cleaning semiconductor wafers |
KR102359795B1 (ko) | 2015-05-20 | 2022-02-08 | 에이씨엠 리서치 (상하이) 인코포레이티드 | 반도체 웨이퍼를 세정하는 방법 및 장치 |
JP6770757B2 (ja) | 2016-04-06 | 2020-10-21 | エーシーエム リサーチ (シャンハイ) インコーポレーテッド | 半導体ウエハの洗浄方法及び洗浄装置 |
JP6931877B2 (ja) * | 2016-05-19 | 2021-09-08 | 山下 洋八 | 超音波照射装置とシステム及び超音波照射方法 |
EP3515611A4 (en) | 2016-09-19 | 2020-05-13 | ACM Research (Shanghai) Inc. | METHODS AND APPARATUS FOR CLEANING SUBSTRATES |
JP7032815B2 (ja) | 2016-09-20 | 2022-03-09 | エーシーエム リサーチ (シャンハイ) インコーポレーテッド | 基板の洗浄方法及び洗浄装置 |
JP2018202367A (ja) * | 2017-06-09 | 2018-12-27 | サクラ精機株式会社 | 超音波洗浄装置 |
US11581205B2 (en) | 2017-11-20 | 2023-02-14 | Acm Research, Inc. | Methods and system for cleaning semiconductor wafers |
KR102113529B1 (ko) * | 2018-06-18 | 2020-05-21 | 금오공과대학교 산학협력단 | 녹조 제거 초음파 장치 |
KR102271059B1 (ko) * | 2019-12-12 | 2021-07-01 | 주식회사 에스제이푸드 | 초음파 어묵 튀김장치 |
KR20210121871A (ko) | 2020-03-31 | 2021-10-08 | 주식회사 비자림 | 카메라 렌즈 자동 세척 장치 |
KR102453369B1 (ko) | 2020-06-04 | 2022-10-07 | 주식회사 비자림 | 카메라 렌즈 자동 세척 장치 |
JP2022069247A (ja) | 2020-10-23 | 2022-05-11 | 三星電子株式会社 | 磁気トンネル接合素子及び磁気抵抗メモリ装置 |
Family Cites Families (20)
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US1382104A (en) * | 1918-01-21 | 1921-06-21 | Vacuum Machinery Co | Combined feed-water heater and aspirator |
US2381386A (en) * | 1940-10-04 | 1945-08-07 | Firestone Tire & Rubber Co | Method of making containers |
US3001532A (en) * | 1959-02-27 | 1961-09-26 | Phillips Mfg Company | Ultrasonic degreasing apparatus |
US3564775A (en) * | 1969-02-10 | 1971-02-23 | Albert G Bodine | Resonant sonic cleaning utilizing particulate material in conjunction with a sonic reflective baffle member |
US4224110A (en) * | 1977-12-05 | 1980-09-23 | Mccord James W | Cleaning device |
US4194510A (en) * | 1978-06-15 | 1980-03-25 | Second Foundation, Inc. | Ultrasonic focusing system |
JPS58114782A (ja) * | 1981-12-28 | 1983-07-08 | 株式会社日立製作所 | 超音波洗浄機 |
US4618263A (en) * | 1982-09-22 | 1986-10-21 | Mccord James W | Sound suppressor in a liquid medium |
US5090430A (en) | 1990-02-02 | 1992-02-25 | Agape Enterprises, Inc. | Ultrasonic cleaning system for fluorescent light diffuser lens |
JPH04256473A (ja) * | 1991-02-05 | 1992-09-11 | Canon Inc | 超音波洗浄装置 |
US5119676A (en) * | 1991-09-03 | 1992-06-09 | The Babcock & Wilcox Company | Ultrasonic method and apparatus for determining water level in a closed vessel |
JPH06343933A (ja) * | 1993-06-08 | 1994-12-20 | Hitachi Zosen Corp | 超音波反射板を用いた超音波洗浄法 |
JP2000107710A (ja) * | 1998-09-30 | 2000-04-18 | Dainippon Screen Mfg Co Ltd | 超音波基板処理装置 |
JP2001162236A (ja) * | 1999-12-06 | 2001-06-19 | Shimada Phys & Chem Ind Co Ltd | 超音波洗浄装置 |
KR100430747B1 (ko) * | 2001-12-28 | 2004-05-10 | 재단법인 충남대학교 산학연교육연구재단 | 초음파 세탁기 |
US9174176B2 (en) * | 2003-01-09 | 2015-11-03 | Disperse Systems, Inc. | Ultrasonic dispersion apparatus, system, and method |
JP4248257B2 (ja) * | 2003-01-15 | 2009-04-02 | 東京エレクトロン株式会社 | 超音波洗浄装置 |
JP2006007104A (ja) | 2004-06-25 | 2006-01-12 | Shimada Phys & Chem Ind Co Ltd | 超音波洗浄装置 |
WO2008101339A1 (en) * | 2007-02-21 | 2008-08-28 | Sensotech Inc. | Fluid level measuring method and system therefor |
GB0817921D0 (en) * | 2008-10-01 | 2008-11-05 | Airbus Uk Ltd | Aircraft skin panel with ultrasonic gauge |
-
2012
- 2012-05-03 UA UAA201314010A patent/UA113514C2/uk unknown
- 2012-05-03 AU AU2012250676A patent/AU2012250676B2/en not_active Ceased
- 2012-05-03 BR BR112013028416A patent/BR112013028416A2/pt not_active IP Right Cessation
- 2012-05-03 ES ES12779583.9T patent/ES2677848T3/es active Active
- 2012-05-03 US US13/463,770 patent/US8936032B2/en not_active Expired - Fee Related
- 2012-05-03 PE PE2013002439A patent/PE20141783A1/es active IP Right Grant
- 2012-05-03 WO PCT/US2012/036389 patent/WO2012151439A1/en active Application Filing
- 2012-05-03 KR KR1020137032110A patent/KR20140018372A/ko active Application Filing
- 2012-05-03 EP EP12779583.9A patent/EP2705337B1/en not_active Not-in-force
- 2012-05-03 MX MX2013012792A patent/MX2013012792A/es active IP Right Grant
- 2012-05-03 CA CA2835064A patent/CA2835064C/en not_active Expired - Fee Related
- 2012-05-03 KR KR1020167020827A patent/KR101833948B1/ko active IP Right Grant
- 2012-05-03 JP JP2014509455A patent/JP6251165B2/ja not_active Expired - Fee Related
- 2012-05-03 SG SG2013081609A patent/SG194773A1/en unknown
- 2012-05-03 CN CN201280021821.2A patent/CN103782139A/zh active Pending
-
2013
- 2013-11-04 CL CL2013003156A patent/CL2013003156A1/es unknown
Also Published As
Publication number | Publication date |
---|---|
ES2677848T3 (es) | 2018-08-07 |
PE20141783A1 (es) | 2014-11-27 |
KR20160092066A (ko) | 2016-08-03 |
UA113514C2 (xx) | 2017-02-10 |
KR20140018372A (ko) | 2014-02-12 |
US8936032B2 (en) | 2015-01-20 |
EP2705337B1 (en) | 2018-04-11 |
EP2705337A4 (en) | 2015-10-21 |
US20120279531A1 (en) | 2012-11-08 |
AU2012250676A1 (en) | 2013-12-12 |
CL2013003156A1 (es) | 2014-05-16 |
JP2014519402A (ja) | 2014-08-14 |
EP2705337A1 (en) | 2014-03-12 |
SG194773A1 (en) | 2013-12-30 |
KR101833948B1 (ko) | 2018-03-02 |
BR112013028416A2 (pt) | 2017-08-01 |
MX2013012792A (es) | 2014-05-27 |
WO2012151439A1 (en) | 2012-11-08 |
CN103782139A (zh) | 2014-05-07 |
CA2835064C (en) | 2018-09-18 |
AU2012250676B2 (en) | 2015-06-11 |
CA2835064A1 (en) | 2012-11-08 |
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