JP6244897B2 - X-ray analyzer - Google Patents

Description

  The present invention relates to an X-ray generator and an X-ray analyzer that generate X-rays using an X-ray tube.

  An X-ray tube used in an X-ray generator includes, for example, a filament and a target that are spaced apart from each other. And by applying a high voltage between these filaments and the target, the thermoelectrons emitted from the filament can collide with the target and X-rays can be generated from the target.

  In such an X-ray generator, the target generates heat as X-rays are generated, and thus a mechanism that can cool the target using a cooling medium may be employed (for example, the following patent document). 1). As the cooling medium, a gas such as air is used in addition to a liquid such as cooling water. For example, in an X-ray generator that generates X-rays with a power of several kW, a water-cooling type that uses cooling water to cool a target is adopted, and X-rays that generate X-rays with a power of up to several hundred W In the generator, an air cooling method in which air is used to cool the target may be employed.

  FIG. 5 is a schematic diagram showing a configuration example of an X-ray analyzer equipped with a conventional X-ray generator 101. The X-ray generator 101 includes an X-ray tube 111, a high voltage power source 112, a cooling water circulation device 113, and the like.

  Electric power is supplied to the X-ray tube 111 from a high voltage power source 112, and a high voltage is applied between a filament and a target (not shown). Thereby, the thermoelectrons emitted from the filament collide with the target, and X-rays are generated from the target. The target that generates heat as X-rays are generated is cooled by the cooling water circulating device 113 using the cooling water circulated in the pipe 114.

  This X-ray analyzer is a fluorescent X-ray analyzer (XRF), and the detector 102 detects fluorescent X-rays generated by irradiating the sample S with X-rays from the X-ray generator 101, and the detection result. Based on the above, the sample S can be analyzed. The fluorescent X-rays generated from the sample S are dispersed by a spectroscope 103 made of a spectral crystal, and the intensity of a specific wavelength is measured by the detector 102.

  The spectral characteristics of the spectroscope 103 depend on the spacing between the spectroscopic crystals and the positional relationship of the spectroscope 103 with respect to the sample S and the detector 102. For this reason, when the spectroscope 103 expands or contracts based on a change in ambient temperature, there is a possibility that spectral characteristics change and analysis cannot be performed with high accuracy. Therefore, in the example of FIG. 5, the spectroscope 103 can be heated by the heater 104.

  Specifically, the heater 104 and the temperature sensor 105 are disposed in the spectroscopic chamber 106 together with the spectroscope 103, and the temperature controller 107 controls the heater 104 based on the temperature in the spectroscopic chamber 106 detected by the temperature sensor 105. By controlling the driving, the temperature in the spectroscopic chamber 106 is kept constant. Thereby, it is possible to prevent the spectroscope 103 from expanding or contracting based on a change in ambient temperature, and to perform analysis with high accuracy.

JP-A-8-148293

  In the conventional configuration as described above, the heat from the X-ray tube 111 is exhausted in the cooling water circulation device 113, while the spectroscopic chamber 106 is heated in the heater 104. That is, most of the electric power supplied from the high-voltage power source 112 to the X-ray tube 111 is converted into heat at the target when X-rays are generated, and is discharged to the heater 104 through the cooling water circulation device 113. Therefore, there is a problem that power consumption increases.

  This invention is made | formed in view of the said situation, and it aims at providing the X-ray generator and X-ray analyzer which can reduce power consumption.

  An X-ray generator according to the present invention is an X-ray generator that generates X-rays using an X-ray tube, wherein a heat pump is used to cool the X-ray tube, and exhaust heat from the heat pump is separated into another part. It is used for heating.

  According to such a configuration, the X-ray tube can be cooled using the heat pump, and the exhaust heat from the heat pump accompanying the cooling can be used for heating another part. Thus, by heating another part using the exhaust heat from a heat pump, the heat which generate | occur | produces from an X-ray tube can be used effectively, and power consumption can be reduced.

  The heat pump may include an evaporator that cools the X-ray tube and a radiator that heats the other portion by exhaust heat. In this case, the radiator may be provided in the compartment in which the other portion is disposed, and the air in the compartment may be heated by the radiator. The X-ray generator may include a temperature sensor that detects the temperature of the other portion and a temperature control unit that adjusts the temperature of the other portion based on a detection signal from the temperature sensor. Good.

  The X-ray generator may include a heater for heating the other part. In this case, the temperature control unit may adjust the temperature of the other portion by controlling the driving of the heater.

  According to such a configuration, the temperature of the other part can be adjusted by only slightly heating the heater while using the exhaust heat from the heat pump for heating the other part. It can be effectively reduced.

  The X-ray generator may include an opening mechanism for adjusting the air flow between the inside and the outside of the compartment. In this case, the temperature control unit may adjust the temperature of the other portion by controlling the driving of the opening mechanism.

  According to such a configuration, it is possible to adjust the temperature of the other portion by using the exhaust heat from the heat pump to heat the other portion and by cooling a little with air from the opening mechanism. , Power consumption can be effectively reduced.

  The X-ray generator may include an air conditioner (air conditioner) that can heat and cool the another portion. In this case, the temperature control unit may adjust the temperature of the other portion by controlling the driving of the air conditioner.

  According to such a structure, the temperature of the said another part can be favorably adjusted by heating or cooling with an air conditioner, utilizing the exhaust heat from a heat pump for the heating of said another part.

  The heat pump may include a first radiator and a second radiator, and heat the other portion by exhaust heat from the first radiator. In this case, the first radiator may be provided in the compartment and the second radiator may be provided outside the compartment. Further, the heat pump includes a flow rate adjusting unit for adjusting a ratio of a flow rate of the refrigerant to the first radiator and the second radiator, and the temperature control unit controls driving of the flow rate adjusting unit. Thus, the temperature of the other part may be adjusted.

  According to such a configuration, the ratio of the flow rate of the refrigerant to the first radiator and the second radiator is adjusted by the flow rate adjustment unit while using the exhaust heat from the first radiator for heating the other portion. Thereby, the temperature of the said another part can be adjusted favorably.

  The X-ray generator includes a high-voltage power source that supplies power to the X-ray tube, and a heat pump control unit that controls driving of the heat pump based on the amount of power supplied from the high-voltage power source to the X-ray tube And may be provided.

  According to such a configuration, based on the amount of power supplied from the high-voltage power supply to the X-ray tube, the drive amount of the heat pump necessary for cooling the X-ray tube is grasped, and the drive of the heat pump is controlled. Therefore, the configuration can be simplified as compared with a configuration in which the temperature of the X-ray tube is detected and the drive of the heat pump is controlled.

  The X-ray analyzer according to the present invention is characterized in that a sample is analyzed using X-rays generated by the X-ray generator.

  According to such a configuration, when the sample is analyzed using the X-rays generated by the X-ray generator, the X-ray tube can be cooled using the heat pump, and the heat pump associated with the cooling is used. The waste heat from can be used to heat another part. Thus, by heating another part using the exhaust heat from a heat pump, the heat which generate | occur | produces from an X-ray tube can be used effectively, and power consumption can be reduced.

  The X-ray analyzer may include a spectroscope that separates light from the sample. In this case, it is preferable that the X-ray analyzer uses exhaust heat from the heat pump for heating the spectrometer.

  According to such a configuration, the spectroscope can be heated using exhaust heat from the heat pump. At this time, if the spectroscope temperature is adjusted to be constant, it is possible to prevent the spectroscope from expanding or contracting due to heat and changing the spectroscopic characteristics, so that the analysis can be performed with high accuracy.

  According to the present invention, by heating another portion using the exhaust heat from the heat pump, the heat generated from the X-ray tube can be effectively used and the power consumption can be reduced.

It is the schematic which shows the structural example of the X-ray analyzer provided with the X-ray generator which concerns on 1st Embodiment of this invention. It is the schematic which shows the structural example of the X-ray analyzer provided with the X-ray generator which concerns on 2nd Embodiment of this invention. It is the schematic which shows the structural example of the X-ray analyzer provided with the X-ray generator which concerns on 3rd Embodiment of this invention. It is the schematic which shows the structural example of the X-ray analyzer provided with the X-ray generator which concerns on 4th Embodiment of this invention. It is the schematic which shows the structural example of the X-ray analyzer provided with the conventional X-ray generator.

  FIG. 1 is a schematic view showing a configuration example of an X-ray analyzer equipped with an X-ray generator 1 according to the first embodiment of the present invention. The X-ray generator 1 includes an X-ray tube 11, a high voltage power source 12, a cooling water circulation device 13, and the like.

  The X-ray tube 11 is provided with, for example, a filament and a target (both not shown) that are spaced apart from each other. The target can be formed of, for example, Cu, Cr, Mo, Al, Ag, or Au. Electric power is supplied to the X-ray tube 11 from the high-voltage power supply 12, and a high voltage of about 50 kV, for example, is applied as a tube voltage between the filament and the target. Thereby, thermoelectrons are emitted from the filament toward the target, and X-rays are generated when the thermoelectrons collide with the target.

  Since the target generates heat when X-rays are generated, the target (X-ray tube 11) is cooled using the cooling water circulation device 13. Specifically, the X-ray tube 11 and the cooling water circulation device 13 are connected via a pipe 14, and the cooling water circulation device 13 is driven to drive cooling water (for example, pure water) into the X-ray tube 11. Can be circulated to cool the target.

  The X-ray generator 1 in this embodiment is provided with a heat pump 15 for cooling the cooling water warmed by the heat of the target. By cooling the cooling water circulated by the cooling water circulation device 13 with the heat pump 15, the heat pump 15 can be used for cooling the X-ray tube 11.

  The heat pump 15 includes a compressor 151, a radiator 152, an expansion valve 153, and an evaporator 154, and these are connected in a ring shape using a pipe 155 to circulate the refrigerant through the pipe 155. Can be done. The refrigerant is compressed by the compressor 151 to become a high-temperature and high-pressure gas, and is radiated by the radiator 152 to become a high-temperature and high-pressure liquid. Then, the refrigerant expands at the expansion valve 153 to become a low-temperature and low-pressure liquid. The heat exchange at the evaporator 154 turns the refrigerant into a low-temperature and low-pressure gas, which is sent to the compressor 151 again.

  The evaporator 154 cools the X-ray tube 11 through the cooling water by absorbing heat from the cooling water circulated by the cooling water circulation device 13 and performing heat exchange. In this case, for example, a configuration in which the evaporator 154 is brought into contact with cooling water circulated by the cooling water circulation device 13 can be employed. However, the present invention is not limited to this configuration, and various other configurations can be adopted as long as the X-ray tube 11 can be cooled by the evaporator 154.

  X-rays generated by the X-ray generator 1 are used for analysis of the sample S. The X-ray analyzer in the present embodiment is, for example, a fluorescent X-ray analyzer (XRF) that detects and analyzes fluorescent X-rays generated by irradiating the sample S with X-rays from the X-ray generator 1. A detector 2, a spectroscope 3, a heater 4, a temperature sensor 5 and the like are provided.

  This X-ray analyzer is a so-called wavelength dispersion type fluorescent X-ray analyzer, and the fluorescent X-rays generated from the sample S are dispersed by a spectroscope 3 made of a spectral crystal. And the intensity | strength of a specific wavelength can be measured by detecting the fluorescence X-ray | X_line which carried out the spectroscopy with the detector 2. FIG. The detector 2 and the spectroscope 3 are disposed in the spectroscopic chamber 6 in which the sample S is accommodated. The spectroscopic chamber 6 is a compartment partitioned by a wall surface, and air flow is restricted between the inside and the outside of the spectroscopic chamber 6.

  The spectral characteristics of the spectroscope 3 depend on the spacing between the spectroscopic crystals and the positional relationship of the spectroscope 3 with respect to the sample S and the detector 2. For this reason, when the spectroscope 3 expands or contracts based on a change in ambient temperature, there is a possibility that the spectral characteristics change and analysis cannot be performed with high accuracy. Therefore, in the present embodiment, the spectroscope 3 is heated by the heater 4 and the temperature of the spectroscope 3 can be detected by the temperature sensor 5.

  The heater 4 and the temperature sensor 5 are disposed in the spectroscopic chamber 6. The spectroscope 3 is heated by heating the air in the spectroscopic chamber 6 with the heater 4, and the temperature of the air in the spectroscopic chamber 6 is measured by the temperature sensor 5. By detecting at, the temperature of the spectroscope 3 can be detected. However, the configuration is not limited to such a configuration, and at least one of the heater 4 and the temperature sensor 5 may be directly connected to the spectrometer 3 or may be connected via a heat conductor.

  In the present embodiment, the radiator 152 of the heat pump 15 is disposed in the spectroscopic chamber 6. Thereby, the air in the spectroscopic chamber 6 can be heated by the exhaust heat from the radiator 152, and the spectroscope 3 can be heated. That is, the exhaust heat from the heat pump 15 can be used for heating the spectrometer 3. The radiator 152 is preferably disposed in the vicinity of the heater 4, and may be configured to be directly connected to the spectrometer 3 or connected via a heat conductor.

  As described above, in the present embodiment, the X-ray tube 11 can be cooled using the heat pump 15, and exhaust heat from the heat pump 15 (heat radiator 152) accompanying the cooling is used to heat the spectrometer 3. Can be used. Thus, by heating the spectroscope 3 using the exhaust heat from the heat pump 15, the heat generated from the X-ray tube 11 can be used effectively and the power consumption can be reduced.

  The operation of this X-ray analyzer is controlled by the control unit 7. The control unit 7 includes a CPU (Central Processing Unit), for example, and functions as an X-ray tube control unit 71, a heat pump control unit 72, a temperature control unit 73, and the like when the CPU executes a program.

  The X-ray tube control unit 71 controls the amount of power supplied from the high-voltage power supply 12 to the X-ray tube 11 so that the tube voltage determined by the analysis conditions is applied to the X-ray tube 11. Therefore, the amount of heat generated in the X-ray tube 11 varies according to the analysis conditions, and accordingly, the temperature of the cooling water in the cooling water circulation device 13 also varies.

  The heat pump control unit 72 controls the driving of the heat pump 15 by controlling the operation of the compressor 151 of the heat pump 15. In the present embodiment, the X-ray tube control unit 71 grasps the amount of power supplied to the X-ray tube 11, and the heat pump control unit 72 controls the driving of the heat pump 15 based on this power amount. Yes. That is, based on the amount of power supplied to the X-ray tube 11, the drive amount of the heat pump 15 necessary for cooling the X-ray tube 11 can be grasped, and the drive of the heat pump 15 can be controlled. Compared with a configuration in which the temperature of the X-ray tube 11 is detected and the drive of the heat pump 15 is controlled, the configuration can be simplified.

  The temperature control unit 73 adjusts the temperature of the spectrometer 3 by controlling the driving of the heater 4 based on the detection signal from the temperature sensor 5. Specifically, only the exhaust heat from the heat pump 15 is set so that the temperature of the spectrometer 3 is slightly lower than the target value, and the temperature control unit 73 adjusts the amount of heating by the heater 4, The temperature of the spectroscope 3 can be brought close to the target value.

  Thereby, the temperature of the spectroscope 3 can be adjusted by merely heating the spectroscope 3 by using the exhaust heat from the heat pump 15 and heating the spectroscope 3 a little, thereby effectively reducing power consumption. be able to. At this time, if the temperature of the spectroscope 3 is adjusted to be constant, it is possible to prevent the spectroscope 3 from expanding or contracting due to heat to change the spectral characteristics. it can.

  However, the control unit 7 grasps the driving amount of the heat pump 15 necessary for cooling the X-ray tube 11 based on the amount of power supplied to the X-ray tube 11, and determines the driving amount of the heat pump 15. Based on this, it is possible to estimate the amount of heat exhausted from the radiator 152. In this case, the temperature sensor 5 can be omitted if the temperature control unit 73 controls the driving of the heater 4 based on the estimated amount of heat exhausted from the radiator 152.

  FIG. 2 is a schematic diagram illustrating a configuration example of an X-ray analysis apparatus including the X-ray generation apparatus 1 according to the second embodiment of the present invention. The X-ray analyzer according to the present embodiment is different from the first embodiment in that the heater 4 is not provided but the opening mechanism 8 is provided. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  Also in the present embodiment, as in the first embodiment, the X-ray tube 11 can be cooled using the heat pump 15, and the exhaust heat from the heat pump 15 (heat radiator 152) accompanying the cooling is spectrally separated. It can be used to heat the vessel 3. Thus, by heating the spectroscope 3 using the exhaust heat from the heat pump 15, the heat generated from the X-ray tube 11 can be used effectively and the power consumption can be reduced.

  The opening mechanism 8 can adjust the air flow between the inside and the outside of the spectroscopic chamber 6 by opening and closing an opening (not shown) provided in a part of the wall surface of the spectroscopic chamber 6, for example. . The temperature control unit 73 adjusts the temperature of the spectroscope 3 by controlling the driving of the opening mechanism 8 based on the detection signal from the temperature sensor 5. Specifically, the temperature of the spectroscope 3 is set to be slightly higher than the target value only with the exhaust heat from the heat pump 15, and the temperature control unit 73 adjusts the inflow amount of air from the opening mechanism 8. By doing so, the temperature of the spectroscope 3 can be brought close to the target value.

  Thereby, the temperature of the spectroscope 3 can be adjusted by using the exhaust heat from the heat pump 15 for heating the spectroscope 3 and by slightly cooling with the air from the opening mechanism 8. Can be reduced. At this time, if the temperature of the spectroscope 3 is adjusted to be constant, it is possible to prevent the spectroscope 3 from expanding or contracting due to heat to change the spectral characteristics. it can.

  FIG. 3 is a schematic diagram illustrating a configuration example of an X-ray analysis apparatus including the X-ray generation apparatus 1 according to the third embodiment of the present invention. The X-ray analysis apparatus according to the present embodiment is different from the first embodiment in that it does not include the heater 4 but includes an air conditioner 9. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  Also in the present embodiment, as in the first embodiment, the X-ray tube 11 can be cooled using the heat pump 15, and the exhaust heat from the heat pump 15 (heat radiator 152) accompanying the cooling is spectrally separated. It can be used to heat the vessel 3. Thus, by heating the spectroscope 3 using the exhaust heat from the heat pump 15, the heat generated from the X-ray tube 11 can be used effectively and the power consumption can be reduced.

  The air conditioner 9 can heat and cool the spectroscope 3 by heating and cooling the air in the spectroscopic chamber 6. The temperature control unit 73 adjusts the temperature of the spectrometer 3 by controlling the driving of the air conditioner 9 based on the detection signal from the temperature sensor 5. Specifically, when the temperature of the spectroscope 3 is lower than the target value, heating is performed by the air conditioner 9, and when the temperature of the spectroscope 3 is higher than the target value, cooling is performed by the air conditioner 9. The temperature controller 73 controls the driving of the air conditioner 9.

  Thereby, the temperature of the spectroscope 3 can be satisfactorily adjusted by slightly heating or cooling the air conditioner 9 while utilizing the exhaust heat from the heat pump 15 for heating the spectroscope 3. At this time, if the temperature of the spectroscope 3 is adjusted to be constant, it is possible to prevent the spectroscope 3 from expanding or contracting due to heat to change the spectral characteristics. it can.

  FIG. 4 is a schematic diagram illustrating a configuration example of an X-ray analysis apparatus including the X-ray generation apparatus 1 according to the fourth embodiment of the present invention. The X-ray analysis apparatus in the present embodiment is different from the first embodiment in that the heat pump 15 includes a second radiator 156 while the heater 4 is not included. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  In the heat pump 15 according to the present embodiment, a flow rate adjusting unit 157 made of, for example, a three-way valve is provided in the middle of the pipe 155 so that part or all of the refrigerant in the pipe 155 can be guided to the branch pipe 158. It has become. The radiator 156 is provided in the middle of the branch pipe 158, and by adjusting the flow rate to the branch pipe 158 by the flow rate adjustment unit 157, the radiator 152 (first radiator) and the radiator 156 (second radiator). ) Can be adjusted. The radiator 152 is provided in the spectroscopic chamber 6, whereas the radiator 156 is provided outside the spectroscopic chamber 6.

  Also in the present embodiment, as in the first embodiment, the X-ray tube 11 can be cooled using the heat pump 15, and the exhaust heat from the heat pump 15 (heat radiator 152) accompanying the cooling is spectrally separated. It can be used to heat the vessel 3. Thus, by heating the spectroscope 3 using the exhaust heat from the heat pump 15, the heat generated from the X-ray tube 11 can be used effectively and the power consumption can be reduced.

  The temperature control unit 73 adjusts the temperature of the spectrometer 3 by controlling the driving of the flow rate adjustment unit 157 based on the detection signal from the temperature sensor 5. Specifically, when the temperature of the spectrometer 3 is lower than the target value, the amount of heat exhausted from the radiator 152 is increased by increasing the ratio of the flow rate of the refrigerant to the radiator 152, and the spectrometer 3 When the temperature is higher than the target value, the temperature control unit 73 drives the flow rate adjustment unit 157 so as to reduce the amount of exhaust heat from the radiator 152 by reducing the ratio of the flow rate of the refrigerant to the radiator 152. To control.

  Accordingly, the flow rate adjusting unit 157 adjusts the ratio of the flow rate of the refrigerant to the radiator 152 and the radiator 156 by using the exhaust heat from the heat pump 15 (the radiator 152) for heating the spectrometer 3, thereby allowing the spectroscopy. The temperature of the vessel 3 can be adjusted well. At this time, if the temperature of the spectroscope 3 is adjusted to be constant, it is possible to prevent the spectroscope 3 from expanding or contracting due to heat to change the spectral characteristics. it can.

  The configurations exemplified in the above first to fourth embodiments can be arbitrarily combined. For example, if the X-ray analyzer is configured to include the heater 4 and the opening mechanism 8 by combining the first embodiment and the second embodiment, the same effects as those of the third embodiment can be achieved. That is, when the temperature of the spectroscope 3 is lower than the target value, heating is performed by the heater 4, and when the temperature of the spectroscope 3 is higher than the target value, cooling can be performed by the opening mechanism 8.

  In the above embodiment, the configuration in which the X-ray tube 11 is cooled using the cooling water by the cooling water circulation device 13 has been described. However, the cooling water is not limited to the cooling water, and liquids other than water and gases such as air are used. The configuration may be such that the X-ray tube 11 is cooled by being used as a cooling medium. Further, the configuration is not limited to the configuration including the cooling water circulation device 13, and the X-ray tube 11 may be directly cooled by the heat pump 15 (evaporator 154).

  The detector 2, the spectrometer 3, the X-ray tube 11, the radiator 152, and the like are not limited to the configuration provided in the spectrometer chamber 6 in which the sample S is disposed, but the detector 2, the spectrometer 3, and the X-ray tube. The configuration may be such that at least one of the sphere 11 and the radiator 152 is provided in another compartment, or the compartment such as the spectroscopic chamber 6 may be omitted.

  Not only one spectrometer 3 but also a plurality of spectrometers 3 may be provided. In this case, it is preferable that the configuration is such that all the spectroscopes 3 can be uniformly heated by the exhaust heat from the heat pump 15. Further, the spectroscope 3 is not limited to X-rays, and may be one that separates other light such as visible light or infrared light.

  However, the heat pump 15 is configured to heat a portion other than the spectroscope 3, that is, a portion other than the X-ray tube 11 provided in the X-ray analyzer, or another portion such as the sample S, by the exhaust heat from the heat pump 15. There may be.

  The X-ray generator according to the present invention is not limited to the wavelength dispersion type X-ray fluorescence analyzer, but is applied to other X-ray analyzers such as an energy dispersion type X-ray fluorescence analyzer and an X-ray diffractometer (XRD). Can also be applied. The X-ray generator according to the present invention is not limited to the X-ray analyzer, and can be applied to other various devices such as a medical device such as an X-ray device.

DESCRIPTION OF SYMBOLS 1 X-ray generator 2 Detector 3 Spectrometer 4 Heater 5 Temperature sensor 6 Spectroscopic chamber 7 Control part 8 Opening mechanism 9 Air conditioner 11 X-ray tube 12 High voltage power supply 13 Cooling water circulation device 14 Piping 15 Heat pump 71 X-ray tube control part 72 Heat Pump Control Unit 73 Temperature Control Unit 151 Compressor 152 Radiator 153 Expansion Valve 154 Evaporator 155 Piping 156 Radiator 157 Flow Control Unit 158 Branch Pipe S Sample

Claims (2)

An X-ray analyzer that analyzes a sample using X-rays generated from an X-ray generator that generates X-rays using an X-ray tube,
The X-ray generator uses a heat pump to cool the X-ray tube, and uses exhaust heat from the heat pump to heat a portion other than the X-ray tube provided in the X-ray analyzer. X-ray analyzer . A spectroscope that separates the light from the sample
The X-ray analyzer according to claim 1 , wherein exhaust heat from the heat pump is used for heating the spectrometer.

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