JP2005241487A - Environmental test installation - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an environmental test installation capable of obtaining a prescribed temperature state without unevenness in temperature of an article to be tested in the laboratory. <P>SOLUTION: The environment test installation comprises: the laboratory 18 to be placed with the article; the UV light sources 31 for irradiating the article; and the temperature conditioning air supply room 19 for air circulation by blowing the cool wind into the laboratory 18 and ventilating the same and the wind tunnel part 20. The wind tunnel 20 is so constituted that the cool wind blows into the laboratory 18 in a direction against the direction of the irradiation of the UV light source 31 irradiating the article with the light. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an environmental test apparatus for performing an environmental test on a device under test such as a solar cell component or an electronic component.

2. Description of the Related Art Conventionally, an environmental test apparatus has been used to perform various environmental tests in a state where an electrical or electronic component such as a semiconductor element or a device under test is held at a desired temperature. As this type of environmental test apparatus, an air temperature control system is known as a temperature control mechanism for causing a device under test to reach a predetermined test temperature. This air temperature control system is a system in which air under temperature control is circulated in a test chamber to heat or cool the product under test placed in the test chamber to a predetermined test temperature and maintain that temperature state. (For example, refer to Patent Document 1).
Japanese Patent Publication No. 8-1419

  However, in the above prior art, as the temperature-controlled air is circulated in the test chamber, there is a problem in that temperature unevenness occurs in the product under test and the reliability of the environmental test is lowered.

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide an environmental test apparatus that eliminates temperature unevenness of a product under test placed in a test chamber and obtains a predetermined temperature state.

  In order to achieve the above object, the present invention provides a test chamber in which a device under test is placed, a light source that irradiates light to the device under test, a blow of cooling air into the test chamber, and from the test chamber. A cooling air supply mechanism that sucks in air and circulates the air, and the cooling air supply mechanism is configured to test the cooling air from a direction opposite to a direction in which the light source irradiates light to the device under test. Provided is an environmental test apparatus characterized by being blown into a room.

  Further, the present invention is the above invention, wherein the cooling air supply mechanism includes a wind tunnel portion that blows cooling air into the test chamber, and the wind tunnel portion receives the cooling air blown by the fan and receives the cooling air into the test chamber. A plurality of wind receivers for blowing are arranged from the upstream side to the downstream side of the cooling air, and each of the wind receivers has a shape in which the wind receiving area increases from the upstream side to the downstream side of the cooling air. It is characterized by being formed.

  Moreover, the present invention is characterized in that, in the above invention, the apparatus further comprises a workpiece mounting table on which the product to be tested is mounted, and the workpiece mounting table is provided in the test chamber so as to be able to be pulled out.

  Also, in the present invention according to the above invention, a plurality of the light sources are arranged on the ceiling surface or one side surface of the test chamber so that the arrangement interval is gradually narrowed from the ceiling surface or the center of the side surface to the end. It is characterized by.

  The present invention further includes a filter support portion for supporting a filter plate for adjusting the illuminance of light from the light source disposed on the ceiling surface, wherein the filter support portion has one end at the ceiling in the test chamber. It is attached to the surface by a hinge mechanism, and the other end is hooked to the ceiling surface by a hooking portion, and only the other end can be pulled down from the ceiling surface.

  In the invention described above, the present invention provides the light measurement mechanism for measuring the light intensity at a plurality of locations in the irradiation surface of the light source, the light source is dimmed based on the measurement result of the light measurement mechanism, and the light source is irradiated. And a controller unit for controlling the in-plane light intensity distribution to a predetermined value or less.

  Further, the present invention is the above invention, wherein the light measurement mechanism includes one light detector that measures light intensity, and the controller unit converts the output of the light detector into intensity in a predetermined wavelength band. A calibration coefficient is stored in advance for each predetermined wavelength band, and the light intensity in the predetermined wavelength band is calculated according to the output of the photodetector.

  Moreover, the present invention is characterized in that, in the above-mentioned invention, the control unit adjusts an output of the light source based on aged deterioration of the light source.

  According to the present invention, it is possible to eliminate the uneven temperature of the product under test placed in the test chamber and obtain a predetermined temperature state.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing an external configuration of an environmental test apparatus 1 according to the present embodiment, FIG. 2 is a perspective view of the environmental test apparatus 1 viewed from the front, and FIG. 3 is an internal view of the environmental test apparatus 1. FIG. 4 is a plan view of the environmental test apparatus 1 as viewed from above, and FIG. 5 is a perspective view of the environmental test apparatus 1 as viewed from the side.

  As shown in these drawings, the environmental test apparatus 1 includes a casing 10 formed of a heat insulating material, and a double-opening-type opening / closing door 12 is hinged to an opening 11 formed on the front surface of the casing 10. ing. The opening / closing door 12 is formed of a heat insulating material as in the casing 10, and as shown in FIG. 2, the opening / closing door 12 has a pivotable handle 13 and the opening / closing door 12 is locked according to the rotation of the handle 13. For example, a solenoid-type lock mechanism 14 is provided. Further, the opening / closing door 12 is provided with an observation window portion 15 for observing the inside of the casing 10.

  The interior covered with the casing 10 and the door 12 is used as an environmental test tank. As shown in FIG. 3, the inside of the environmental test tank is a cooling air supply mechanism for blowing cooling air into the test chamber 18 and the test chamber 18 by a partition plate 16 that partitions the space left and right and a bottom plate 17 that partitions the space up and down. It is partitioned into a temperature-controlled air supply chamber 19 and a wind tunnel portion 20. Support rails 22 extending in the depth direction of the test chamber 18 are attached below the inner side walls on both sides of the test chamber 18 to place a device under test (for example, an electronic component such as a solar cell component having a relatively large area). A workpiece mounting table 21 is supported by the support rail 22 so that it can be pulled out from the opening 11. That is, since the work mounting table 21 can be pulled out, the operator can place the product under test with the work mounting table 21 pulled out, and the product under test is large and heavy. However, it is possible to easily perform the placement work of the device under test.

  Here, in the present embodiment, a UV light source unit 30 (see FIG. 3) is provided on the ceiling surface of the test chamber 18, and cooling air (for example, about 70 ° C. or less) from the wind tunnel 20 into the test chamber 18. Air) is blown into the test chamber 18 so that the temperature inside the test chamber 18 is controlled, and an ultraviolet-proof environment test can be performed on the product to be tested on the work table 21 under a certain ambient temperature.

  The temperature control air supply chamber 19 in the test chamber 18 will be described in detail. The temperature control air supply chamber 19 includes a temperature control chamber 19a in which a cooler 23 is provided by a partition plate 27, and the wind tunnel portion 20 described above. And a wind tunnel connection portion 19b connected to the wind tunnel. A suction port 16a (see FIG. 5) is formed above the partition plate 16 that partitions the test chamber 18 and the temperature control air supply chamber 19, and a partition plate 27 that partitions the temperature control chamber 19a and the wind tunnel connection portion 19b. An exhaust port 27a is formed below the exhaust port 27a, and a suction port of a centrifugal fan 25 that is rotationally driven by the fan motor 24 is connected to the exhaust port 27a.

  That is, the air in the test chamber 18 whose temperature has been raised by the UV light irradiation of the UV light source unit 30 is guided to the temperature control chamber 19a through the suction port 16a by the rotation of the centrifugal fan 25, and the test is performed by the cooler 23. After being cooled to a temperature necessary for maintaining the temperature in the chamber 18 at a constant temperature, the air is sucked into the centrifugal fan 25. The cooling air sucked into the centrifugal fan 25 is exhausted to the wind tunnel connecting portion 19b in the direction directly below, and flows into the wind tunnel portion 20. Here, a drain pan 28 to which a drainage port 29 is connected is provided at the bottom of the wind tunnel connecting portion 19 b, and water drops dripping from the centrifugal fan 25 are collected in the drain pan 28 and drained from the drainage port 29.

  A louver 40 is interposed at the connection portion between the wind tunnel connection portion 19b and the wind tunnel portion 20, and the wind direction when cooling air flows from the wind tunnel connection portion 19b into the wind tunnel portion 20 is changed slightly downward by the louver 40. The bottom plate 17 that partitions the test chamber 18 and the wind tunnel portion 20 is provided with a restriction plate 41 extending toward the wind tunnel portion 20 and a lower end of the restriction plate 41, and guides cooling air flowing through the wind tunnel portion 20 to the restriction plate 41. Wind guides 43 each having a guide plate 42 are disposed at substantially equal intervals in the lateral direction. In addition, slits (not shown) are formed in the bottom plate 17 between each of the wind vanes 43, and the cooling air that has flowed into the wind tunnel portion 20 becomes an upward wind by the wind vane 43 and passes through the slits. The temperature in the test chamber 18 is maintained constant by blowing into the chamber 18.

  The cooling air blown out into the test chamber 18 passes through a work mounting table 21 (see FIG. 1) formed in a mesh shape, heads toward the ceiling surface of the test chamber 18, and is again sucked from the suction port 16a to control the temperature. Guided to the air supply chamber 19. As a result, the cooling air circulates in the temperature-controlled air supply chamber 19, the wind tunnel portion 20, and the test chamber 18 in this order, and is used as temperature-controlled air that maintains the atmospheric temperature in the test chamber 18 at a preset temperature. Will function. The cooler 23 is subjected to feedback control based on the ambient temperature in the test chamber 18 by a temperature control device (not shown), and its cooling (temperature control) performance is controlled.

  Here, in the present embodiment, the restriction plate 41 of the wind receiver 43 disposed on the downstream side of the cooling air is formed slightly longer than the restriction plate 41 disposed on the upstream side, and as a whole The length of the regulation plate 41 is sequentially increased from the most upstream cooling air to the downstream. That is, the wind receiving area of the wind receiver 43 disposed on the downstream side of the cooling air is configured to be larger than the wind receiving area of the wind receiver 43 disposed on the upstream side. The flow rate of the cooling air received by the wind receiver 43 disposed on the downstream side and the flow rate of the cooling air received by the wind receiver 43 disposed on the downstream side are substantially equal, and as a result, the cooling air having a substantially equal flow rate from the entire surface of the bottom plate 17. Will flow into the test chamber 18.

  Further, in the present embodiment, a configuration in which UV light is irradiated from above on the product to be tested placed on the workpiece mounting table 21 and cooling air is blown from below the product to be tested, that is, light It is set as the structure which opposes the irradiation direction and the direction which sprays cooling air. According to this configuration, since the cooling air is not directly blown onto the light irradiation surface of the product under test, the temperature distribution on the light irradiation surface can be made substantially uniform.

  Next, the configuration for irradiating the DUT with UV light will be described in detail. As described above, the UV light source unit 30 that irradiates ultraviolet light (UV) light to the device under test is provided on the ceiling surface of the casing 10. As shown in FIGS. 1 and 4, the UV light source unit 30 includes a plurality of UV light source 31 columns arranged in series in the depth direction of the casing 10. 6 rows) are arranged. For example, a metal halide light source or the like can be used as the UV light source 31.

  As shown in FIG. 3, a light amount adjustment filter 48 is disposed immediately below each UV light source 31 in the vicinity of the light emission surface. The light quantity adjusting filter 48 uses a plate-like member provided with a large number of small holes or a plate-like member provided with a mesh, and as shown in FIGS. 6 to 9, the number of small holes, By using a plurality of types of light amount adjusting filters 48 having different sizes or mesh roughnesses, it is possible to roughly adjust the UV light amount irradiated to the workpiece mounting table 21. For example, if the irradiation intensity of the UV light source 31 is set in advance to five times that of ultraviolet rays contained in natural light, the light quantity adjusting filter 48 shown in FIGS. It is possible to irradiate the product under test with ultraviolet light having a strength of 3 times, 3 times and 4 times, or 5 times without attaching the filter 48 for adjusting the light amount. Further, by adjusting the UV light source 31, The irradiation intensity of UV light can be adjusted more accurately.

  The light quantity adjustment filter 48 is supported by a filter support frame 49 extending toward the back side of the test chamber 18. The filter support frame 49 is provided with a hinge mechanism (not shown) at one end portion on the back side of the test chamber 18 and a hook portion (not shown) that is hooked on the ceiling surface at one end portion on the near side of the test chamber 18. In addition, by releasing the hooking portion, it is possible to pull down the front end portion of the filter support frame 49 as shown in FIG. This configuration facilitates replacement of the light quantity adjustment filter 48 by an operator.

  Here, in the present embodiment, as shown in FIG. 3, the arrangement intervals L of the UV light sources 31 in the lateral width direction of the test chamber 18 are not equal to each other, and as the distance from the center of the test chamber 18 increases, The arrangement interval L is reduced. More specifically, each UV light source 31 has a light distribution characteristic that spreads at a predetermined angle in the lateral width direction. For this reason, when the UV light sources 31 are arranged at equal intervals in the width direction of the test chamber 18, the irradiation intensity from the respective UV light sources 31 is increased in the vicinity of the center of the test chamber 18, and the irradiation intensity is increased. In the vicinity of the inner wall of the test chamber 18, the number of UV light sources 31 to be superimposed is reduced, so that the irradiation intensity is relatively low. As a result, on the surface of the workpiece mounting table 21, irradiation unevenness occurs such that the UV light irradiation intensity is high near the center of the test chamber 18 and the UV light irradiation intensity decreases toward the inner wall.

  Therefore, in the present embodiment, as the distance from the center of the test chamber 18 is increased, the arrangement interval L of the UV light sources 31 is reduced, and the number of UV light sources 31 superimposed in the center of the test chamber 18 is reduced and the test chamber is decreased. By increasing the number of lamps of the UV light source 31 to be superposed in the vicinity of the inner wall 18, the entire irradiation intensity of the work mounting table 21 is made substantially uniform. Further, in the present embodiment, these UV light sources 31 are configured to be turned off in conjunction with the opening and closing door 12 being opened, so that workers or the like are inadvertent while the UV light source 31 is lit. It is possible to prevent accidents when the door 12 is opened.

  Next, a configuration for dimming the UV light source 31 will be described. In the present embodiment, in-plane distribution measurement of UV light intensity is performed such that the UV light intensity is detected at a plurality of locations within the surface of the work mounting table 21, and the UV light source 31 is dimmed based on the detection result. The UV light intensity distribution on the mounting table 21 is further uniformed. Such in-plane distribution measurement is performed before an environmental test is performed on the product under test. That is, in the present embodiment, after the in-plane distribution of the UV light intensity on the workpiece mounting table 21 is made uniform based on this in-plane distribution measurement, the environmental test is performed on the product to be tested, so that the reliability of the environmental test is improved. Increases sex.

  First, a configuration for performing in-plane distribution measurement of UV light intensity will be described. 10 is a top view showing the configuration of the UV light measurement mechanism 50 for measuring the UV light intensity in the plane of the workpiece mounting table 21, and FIG. 11 is a side view of the UV light measurement mechanism 50 as viewed from the lower side of FIG. 12 is a side view of the UV light measurement mechanism 50 as viewed from the left side of FIG.

  This UV light measurement mechanism 50 moves the UV light detector 70 in the X-axis direction corresponding to the depth direction of the test chamber 18 and in the Y-axis direction corresponding to the lateral width direction of the test chamber 18. Specifically, as shown in FIGS. 10 to 12, the UV light measurement mechanism 50 includes one UV light detector 70 and an X-axis drive motor 60 for moving the UV light detector 70 in the X-axis direction. And a Y-axis drive motor 61 for moving the UV light detector 70 in the Y-axis direction. As the X-axis and Y-axis drive motors 60 and 61, servo motors equipped with a speed reducer are used.

  In this configuration, when the Y-axis drive motor 61 is driven, the shaft 62 connected to the Y-axis drive motor 61 rotates. Driving wires 63a and 63b are wound around both ends of the shaft 62. As the shaft 62 rotates, the driving wires 63a and 63b move in the Y-axis direction while being guided by the slide packs 64a and 64b. In addition, an X-axis drive wire 67 and a slide pack 68 for guiding the drive wire 67 are bridged over the drive wires 63a and 63b, and the drive wires 63a and 63b are arranged in the Y-axis direction. Along with the movement, the driving wire 67 and the slide pack 68 also move in the Y-axis direction. The drive wire 67 is connected to the X-axis drive motor 61. When the X-axis drive motor 60 is driven, the drive wire 67 moves in the X-axis direction while being guided by the slide pack 68. As a result, the UV light detector 70 attached to the drive wire 67 moves in the X-axis direction and the Y-axis direction as the X-axis and Y-axis drive motors 60 and 61 are driven. In the present embodiment, the UV light detector 70 is moved intermittently (for example, every second) at a pitch P1 (for example, 100 mm) from one end to the other end along the X-axis direction, and the light intensity at each measurement point is measured. After the measurement, it is moved by a pitch P2 (for example, 100 mm) in the Y-axis direction, and is again intermittently moved from one end to the other end along the X-axis direction at the pitch P1, and light at each measurement point. Let the intensity be measured. As a result, as shown in FIG. 13, the light intensity is measured at each lattice point when the in-plane of the workpiece mounting table 21 is partitioned into a lattice shape with the pitch P1 in the X-axis direction and the pitch P2 in the Y-axis direction. Based on the measurement result, light control of the UV light source 31 is performed.

  Specifically, as shown in FIG. 2, the environmental test apparatus 1 is provided with a control unit 100 for dimming each of the UV light sources 31. As shown in FIG. 14, the control unit 100 includes a control unit 110, a storage unit 120, an input device 130, a display device 140, and an interface unit 150. The control unit 110 includes an MPU (Micro Processing Unit) and executes various controls. The storage unit 120 functions as a storage unit that stores various data, a program executed by the control unit 110, and the input device 130 functions as an operation input unit such as an operation panel including a plurality of operators. To do. The display device 140 functions as a display unit that displays various information such as an LCD, and the interface unit 150 functions as a connection interface that connects the control unit 100 and an external device. The interface unit 150 is connected to the UV light detector 70 described above and the X-axis and Y-axis drive motors 60 and 61 for moving the UV light detector 70, and is driven and controlled by the control unit 110. .

  FIG. 15 is a flowchart showing the light control processing of the UV light source 31 executed by the control unit 110. As shown in this figure, the control unit 110 first turns on the UV light source 31 with the irradiation intensity set by the operator or the like (step S1). Next, the control unit 110 controls the X-axis and Y-axis drive motors 60 and 61 to move the UV light detector 70 to the measurement point (step S2), and the measurement result of the UV light detector 70 at the measurement point. The output current is obtained (step S3). And the control part 110 displays the information regarding UV light irradiation on the said display apparatus 140 based on the output electric current obtained from the UV light detector 70 (step S4).

  FIG. 16 is a diagram showing an aspect of the display screen 141 displayed on the display device 140. As shown in this figure, the display screen 141 is provided with a mode display unit 160, a UV light detector output display unit 161, and a wavelength band display unit 162. The mode display unit 160 indicates the irradiation mode of the UV light source 31 in the environmental test apparatus 1. Specifically, in this embodiment, the wavelength band of UV light applied to the product under test is made variable, and two irradiation modes are preset according to the UV wavelength band. That is, there are a first irradiation mode in which UV light having a wavelength of 280 nm to 385 nm is irradiated on the product to be tested and a second irradiation mode in which UV light having a wavelength of 280 to 400 nm is applied to the product to be tested. When the operator inputs the irradiation mode from the input device 130, the irradiation mode is displayed on the mode display unit 160.

The UV light detector output display unit 161 displays the output current Im (unit: mA) from the UV light detector 70. The wavelength band display unit 162 displays a radiation intensity (energy) W (unit: mW / m ² ) and an integrated radiation amount (integrated irradiation amount) Y (unit: kWh / m ² ) for each predetermined wavelength band. . In the present embodiment, as the wavelength band displayed on the wavelength band display unit 162, the first wavelength band display unit 162a that displays the wavelength 280 nm to 385 nm, the second wavelength band display unit 162b that displays the wavelength 280 nm to 400 nm, the wavelength There are provided a third wavelength band display unit 162c for displaying about 280 nm to 320 nm and a fourth wavelength band display unit 162d for displaying about wavelengths of 320 nm to 400 nm.

  Further, the converted irradiation intensity (energy) X (unit: SUN) is further displayed on the first and second wavelength band display units 162a and 162b, and the first, third and fourth wavelength band display units 162a, 162c, In 162d, the irradiation condition Z is further displayed. Here, when the first irradiation mode (wavelength 280 nm to 385 nm) is set, various information is displayed on the first wavelength band display unit 162a, and the second irradiation mode (wavelength 280 nm to 400 nm) is set. If it is, various types of information are displayed on the second to fourth wavelength band display sections 162b to 162d.

When the calibration value of the UV detector 70 is Ik and Ai is a calibration coefficient for each wavelength band, the radiation intensity W is calculated by the control unit 110 based on the output current Im from the UV photodetector 70.
Wi = (Ik / Ai) × Im
(However, A1: Wavelength 280 nm to 385 nm, A2: Wavelength 280 nm to 320 nm, A3: Wavelength 320 nm to 400 nm)
Is calculated as The radiation intensity W1 calculated as Ai = A1 is displayed on the first wavelength band display unit 162a, the radiation intensity W2 calculated as Ai = A2 is displayed on the third wavelength band display unit 162c, and Ai = A3. The calculated radiation intensity W3 is displayed on the fourth wavelength band display unit. The second wavelength band display unit 162b displays a value calculated as radiation intensity W4 = W2 + W3.

  Here, the calibration coefficient Ai and the calibration value Ik will be described. In the present embodiment, the irradiation intensity in each wavelength band is calculated using one UV light detector 70. The UV light detector 70 detects light intensity in a relatively wide band including the UV wavelength band. That is, since the output current Im from the UV light detector 70 indicates the light intensity of the entire UV wavelength band, in order to calculate the light intensity of each wavelength band based on this output current Im, FIG. As shown, based on the spectral distribution in the UV wavelength band, it is necessary to multiply the output current Im as the calibration coefficient Ai by the ratio of the light quantity occupied by the specific wavelength band out of the total light quantity in the measurement wavelength band.

  Therefore, in the present embodiment, in addition to the UV light detector 70, a calibration coefficient Ai is obtained in advance using a spectroradiometer (not shown). As this spectroradiometer, a spectroradiometer using a spectroscopic optical system of a double monochromator type is used so as not to be disturbed from the visible wavelength region. And after installing a spectroradiometer in the predetermined location on the workpiece | work mounting base 21, the energy intensity of the said UV light source 31 is set to the predetermined intensity | strength used for an environmental test, and UV light is irradiated, This spectroradiometer is used. The calibration coefficient Ai is obtained by measuring the spectral distribution using this.

  In the present embodiment, the calibration value Ik is used to improve the reliability of UV light intensity measurement. More specifically, the output value of the UV light detector 70 when a reference light source with a spectral irradiance value set by a public institution is set to a predetermined radiation intensity is used as the calibration value Ik. And ask. The calibration coefficient Ai and the calibration value Ik are measured prior to the in-plane distribution measurement of the light intensity on the workpiece mounting table 21, and the measured values are stored in the storage unit 120. At the time of measuring the in-plane distribution of light intensity, the control unit 110 reads the calibration coefficient Ai and the calibration value Ik from the storage unit 120, and uses these values to calculate the radiation intensity Wi. Note that when the distribution measurement of the UV light intensity within the surface of the work table 21 is performed, the spectroradiometer and the reference light source are removed.

  Next, the integrated radiation amount Y quantitatively indicates how much UV light has been irradiated so far, and is calculated by multiplying the radiation intensity Wi by the elapsed time T (that is, Yi = Wi × T). However, the integrated radiation amount Y2 for the wavelengths 280 nm to 400 nm is obtained as a sum of the integrated radiation amount Y3 calculated for the wavelengths 280 nm to 320 nm and the integrated radiation amount Y4 calculated for the wavelengths 320 nm to 400 nm.

Moreover, the said conversion irradiation intensity | strength X shows the conversion value of how many times irradiation intensity | strength corresponds to the ultraviolet-ray contained in sunlight, Bi is made into a predetermined conversion coefficient,
Xi = W / Bi
(However, B1: Wavelength 280nm to 385nm, B2: Wavelength 280nm to 400nm)
Is calculated by This conversion coefficient Bi is stored in the storage unit 120 in advance.

The irradiation condition Z displays a test end condition at the time of the UV light irradiation test in each irradiation mode described above, and is used when a UV light irradiation test is performed on the product to be tested. As the irradiation end condition, information input by the operator or the like using the input device 130 is displayed. In the present embodiment, the integrated radiation amount Y is set as the irradiation condition Z. For example, in the first irradiation mode, the integrated radiation amount Y1 of light with a wavelength of 280 nm to 385 nm is 15 kWh / m ² or more, and the integrated radiation amount Y3 of light with a wavelength of 280 nm to 320 nm is 5 kWh / m ² or more. For example, in the second irradiation mode, the integrated radiation amount Y3 of light with a wavelength of 280 nm to 320 nm is 7.5 kWh / m ² or more, and the integrated radiation amount Y4 of light with a wavelength of 320 nm to 400 nm is It is set to 15 kWh / m ² or more. Moreover, the area | region which displays this irradiation condition Z is made blinkable, and the effect is notified to an operator by blinking the location where the irradiation condition Z was satisfied.

  Returning to FIG. 15 again, when the control unit 110 finishes the display at one measurement point (step S4), if the measurement at all the measurement points is not completed (step S5: NO), the X axis Then, the Y-axis drive motors 60 and 61 are driven to move the UV detector 70 to the next measurement point (step S6), the procedure returns to step S2, and the UV light intensity at the measurement point is measured.

  On the other hand, if the measurement at all the measurement points has been completed (step S5: YES), the control unit 110 performs UV in the plane of the workpiece mounting table 21 based on the measured UV light intensity at each measurement point. A light intensity distribution is calculated (step S7), and it is determined whether the distribution is within a predetermined range (for example, ± 15%) (step S8). As a result of this determination, if the UV light intensity distribution is outside the predetermined range (step S8: NO), the control unit 110 can detect light at a location where the UV light intensity is relatively high or low in order to eliminate irradiation unevenness. In order to adjust the intensity, dimming is performed by adjusting the output of the UV light source 31 having the highest illuminance to that location (step S9). And the control part 110 returns a process sequence to step S2, and measures UV light intensity distribution again. In this way, light control of the UV light source 31 is appropriately performed based on the result of the UV light intensity distribution, and as a result, the UV light intensity distribution is within a predetermined range (step S9: YES), and the surface of the work table 21 The uneven illuminance in the interior will be eliminated.

  As described above, according to the present embodiment, the following effects can be obtained. That is, since the cooling air is blown into the test chamber 18 from the direction opposite to the direction in which the UV light source 31 irradiates light to the product under test, the cooling air may be blown directly onto the light irradiation surface of the product under test. As a result, the temperature unevenness on the light irradiation surface can be eliminated and the temperature can be maintained at a predetermined temperature.

  Further, according to the present embodiment, each of the plurality of wind receivers 43 arranged in the wind tunnel portion 20 has a shape in which the wind receiving area increases from the upstream side to the downstream side of the cooling air flowing into the wind tunnel portion 20. Since the formed configuration is adopted, the flow rate of the cooling air received by the wind receiver 43 disposed on the upstream side of the cooling air is substantially equal to the flow rate of cooling air received by the wind receiver 43 disposed on the downstream side. Cooling air flows into the test chamber 18 from the entire surface of the bottom plate 17 at a substantially equal flow rate, so that the temperature distribution in the test chamber 18 can be made more uniform.

  In addition, according to the present embodiment, a plurality of UV light sources 31 are arranged in the ceiling surface of the test chamber 18 from the center to the end of the ceiling surface so that the arrangement interval is sequentially reduced. The number of lamps of the UV light source 31 superimposed in the center of the chamber 18 is reduced, and the number of lamps of the UV light source 31 superimposed in the vicinity of the inner wall of the test chamber 18 is increased, so that the overall irradiation intensity of the workpiece mounting table 21 is substantially uniform. Can be realized.

  In addition, according to the present embodiment, since the workpiece mounting table 21 on which the product to be tested is mounted is provided in the test chamber 18 so that it can be pulled out, the operator can test the workpiece mounting table 21 with the workpiece mounting table 21 pulled out. The product can be placed, and the placement of the product under test can be easily performed.

  Furthermore, according to the present embodiment, the UV light measurement mechanism 50 that measures the UV light intensity at a plurality of locations within the surface of the workpiece mounting table 21 of the UV light source 31 (that is, within the irradiation surface), and the UV light measurement. Since each of the UV light sources 31 is dimmed based on the measurement result of the mechanism 50 and the controller unit 100 is configured to control the light intensity distribution in the surface of the workpiece mounting table 21 to a predetermined value or less, the workpiece mounting table 21 is provided. It is possible to suppress unevenness of illuminance in the surface, thereby improving the reliability of the environmental test.

  The above-described embodiments merely show one aspect of the present invention, and can be arbitrarily modified and applied within the scope of the present invention. For example, in the above-described embodiment, the UV light source 31 that irradiates ultraviolet light is exemplified as the light source. However, the present invention is not limited to this, and a light source that irradiates light in other wavelength bands according to the contents of the environmental test is used. Also good.

  In the above-described embodiment, the UV light source 31 is arranged on the ceiling surface of the test chamber 18 and the cooling air is blown into the test chamber 18 from the bottom surface of the test chamber 18. The UV light source 31 may be disposed on one side surface of the test chamber 18 and the cooling air may be blown into the test chamber 18 from the other side surface.

  In the embodiment described above, when the in-plane distribution of the light intensity of the workpiece mounting table 21 is made constant, the control unit 110 adjusts the output in consideration of the aging degradation of the UV light source 31. May be. Specifically, the storage unit 120 of the controller unit 100 stores the lighting time of each UV light source 31 and the relationship between the lighting time and the deterioration characteristic in advance, and the control unit 110 adjusts each UV light source 31. When performing light, the output is adjusted based on the lighting time and deterioration characteristics.

It is a perspective view which shows the external appearance structure of the environmental test apparatus concerning embodiment of this invention. It is the perspective view which looked at the above-mentioned environmental testing device from the front. It is a view sectional view showing the internal configuration of the environmental test apparatus. It is the top view which looked at the above-mentioned environmental test device from the upper part. It is the perspective view which looked at the environmental test device from the side. It is a figure which shows the structure of the filter for light quantity adjustment. It is a figure which shows the structure of the filter for light quantity adjustment. It is a figure which shows the structure of the filter for light quantity adjustment. It is a figure which shows the structure of the filter for light quantity adjustment. It is a top view which shows the structure of UV light measurement mechanism. It is the side view which looked at the said UV light measurement mechanism from the lower side of FIG. It is the side view which looked at the said UV light measurement mechanism from the left side of FIG. It is a figure for demonstrating the UV light intensity measurement by the said UV light measurement mechanism. It is a block diagram which shows the functional structure of a control unit. It is a flowchart which shows the light control control process of UV light source. It is a figure for demonstrating calculation of UV light intensity. It is a figure which shows an example of the screen display of a display apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Environmental test apparatus 10 Casing 16a Suction port 17 Bottom plate 18 Test room 19 Temperature control air supply room 20 Wind tunnel part 21 Workpiece mounting table 23 Cooler 31 UV light source 43 Wind receiver 49 Filter support frame 50 UV light measurement mechanism 70 UV light detector 100 Control unit 110 Control unit 120 Storage unit A, Ai Calibration coefficient

Claims (8)

A test room where the product under test is placed;
A light source for irradiating the product under test with light;
A cooling air supply mechanism that circulates air by blowing cooling air into the test chamber and sucking air from the test chamber;
The environmental test apparatus, wherein the cooling air supply mechanism blows the cooling air into the test chamber from a direction opposite to a direction in which the light source irradiates light to the device under test. The cooling air supply mechanism is
A wind tunnel portion for blowing cooling air into the test chamber;
In the wind tunnel,
A plurality of wind receivers for receiving cooling air blown by the fan and blowing into the test chamber are arranged from the upstream side to the downstream side of the cooling air,
Each of the said wind receivers is formed in the shape where a wind receiving area becomes large from the upstream of the said cooling air to the downstream. The environmental test apparatus of Claim 1 characterized by the above-mentioned. A workpiece mounting table on which the product to be tested is mounted;
The environmental testing apparatus according to claim 1, wherein the work mounting table is provided in the test chamber so as to be capable of being pulled out. A plurality of the light sources are arranged on the ceiling surface or one side surface of the test room so that the arrangement interval is gradually narrowed from the ceiling surface or the center of the side surface to the end portion. The environmental test apparatus in any one of. A filter support for supporting a filter plate for adjusting the illuminance of light from the light source disposed on the ceiling surface;
The filter support portion is configured such that one end is attached to the ceiling surface in the test chamber by a hinge mechanism, the other end is hooked to the ceiling surface by a hooking portion, and only the other end can be pulled down from the ceiling surface. The environmental test apparatus according to any one of claims 1 to 4, wherein the environmental test apparatus is provided. A light measurement mechanism for measuring the light intensity at a plurality of locations in the irradiation surface of the light source;
The controller unit further comprising: a controller unit that adjusts the light source based on a measurement result of the light measurement mechanism and controls a light intensity distribution in an irradiation surface of the light source to a predetermined value or less. The environmental test apparatus according to any one of 5. The light measurement mechanism includes one light detector for measuring light intensity,
The controller unit stores in advance a calibration coefficient for converting the output of the photodetector into the intensity of a predetermined wavelength band for each predetermined wavelength band, and the light of the predetermined wavelength band according to the output of the photodetector. The environmental test apparatus according to claim 6, wherein the strength is calculated.   The environmental test apparatus according to claim 6, wherein the control unit adjusts an output of the light source based on aged deterioration of the light source.

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