JP6235265B2 - X-ray generator and X-ray inspection apparatus - Google Patents

Description

  The present invention relates to an X-ray generator and an X-ray inspection apparatus.

  The X-ray foreign object detection device irradiates X-rays to an inspection object such as food such as meat and processed goods, and whether or not a foreign object such as metal exists in the inspection object from the amount of transmitted X-rays. This is a device that detects this (see, for example, Patent Document 1).

  An X-ray generator for irradiating X-rays is sealed by dipping an X-ray tube provided inside a metal box with insulating oil. Since the X-ray tube itself generates heat by X-ray irradiation, it is necessary to cool the X-ray tube by radiating the heat conducted from the X-ray tube to the insulating oil to the outside.

  As a means for dissipating the heat conducted from the X-ray tube to the insulating oil to the outside, a cooling fin penetrating and holding the X-ray generator peripheral surface is usually used to generate the X-ray by conducting the heat from the insulating oil. The heat is dissipated outside the container. However, Al having good heat transfer characteristics is usually used for the cooling fin, and since Al has a high X-ray transmittance, X-rays leak together with heat radiation.

  In view of this, the X-ray foreign object detection device of Patent Document 1 lengthens the ventilation path that guides heat generated from the X-ray generator to the outside, and repeats absorption and scattering of leaked X-rays on the inner surface. Thereby, the leaked X-ray is attenuated and the problem of X-ray leakage is solved.

JP 2001-318062 A

  However, in the configuration in which the ventilation path (duct) as described above is lengthened, there is a drawback in that the cooling efficiency is lowered because the air transport distance becomes long or a plurality of bent portions are required in the duct. Further, if a long bent duct is provided, it is disadvantageous for downsizing the apparatus. Therefore, it is desired to develop an X-ray generator that can simultaneously solve the problems of cooling efficiency and X-ray shielding.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide an X-ray generation apparatus and an X-ray inspection apparatus that can more reliably shield X-rays without reducing cooling efficiency.

Next, means for solving the above problems will be described with reference to the drawings corresponding to the embodiments.
The X-ray generator 100 according to claim 1 of the present invention has a substrate 12 that contains the X-ray tube 8 and closes the upper surface opening 17 of the container 7 filled with the insulating oil 9, and penetrates the substrate 12. A heat radiator 11 having a heat transfer member 13 in which a heat absorbing end 14 is immersed in the insulating oil 9 and a heat radiating end 15 projects outward from the container 7;
The heat transfer member 13 is attached to the container 7 so as to cover the heat radiating end 15 side, and both sides are formed in a substantially U-shape to be the air supply / exhaust openings 26, 26 to form a shielding space 25. A shielding member 18 formed by laminating a shielding material 22 that shields transmitted X-rays and a support material 23 ;
A chamber 27 covered et al is in the shielding member 18 via the exhaust gap 28 sent to the feed discharge openings 26, 26,
Said By intersecting the extension straight line 29 passing through both feed exhaust openings 26 and 26, in communication with the open end 31 to the feed discharge gap 28 in the direction of the heat dissipation surface is invisible radiation side of the radiator 11, the chamber 27, a pair of ducts 30 and 30 for attenuating X-rays by absorption and scattering between the opening and exhaust openings 26 and 26 and the opening end 31 ;
It is characterized by comprising.

In the X-ray generator 100, when the chamber 27 is connected to the substantially U-shaped shielding member 18, the air supply / exhaust gap 28 is connected to the air supply / exhaust openings 26, 26 on both sides of the shield member 18. The chamber 27 makes it possible to shield X-rays and secure the air supply / exhaust gap 28 in a space-saving manner.
The chamber 27 is connected to a pair of ducts 30, 30 communicating with the air supply / exhaust gaps 28, 28 on both sides. The ducts 30, 30 intersect the extended straight line 29 passing through the air supply / exhaust openings 26, 26 on both sides, so that the heat radiating surface on the heat radiating side of the radiator 11 from the opening end 31, that is, the heat radiating end 15 The substrate 12 communicates with the air supply / exhaust gap 28 in a direction in which the substrate 12 cannot be seen. By changing the direction of the entrance / exit by the chamber 27 and the ducts 30 and 30, X-rays repeatedly absorb and scatter in the chamber 27 and the ducts 30 and 30 and attenuate and decrease.
The air supply / exhaust openings 26 and 26 of the shielding member 18 are connected to a wide air supply / exhaust gap 28 by a chamber 27 connected thereto. Thereby, it is not restrict | squeezed as a ventilation path and air conveyance resistance does not increase. As a result, a decrease in cooling efficiency is suppressed.

The X-ray generator 100 according to claim 2 of the present invention is the X-ray generator 100 according to claim 1,
A blower fan 32 is attached to at least one of the pair of ducts 30, 30.

  In the X-ray generator 100, the blower fan 32 is attached to at least one of the pair of ducts 30 connected to the chamber 27. The chamber 27 is connected to the shielding member 18, thereby defining an air supply / exhaust gap 28 connected to the air supply / exhaust openings 26 on both sides of the shield member 18. By providing the blower fan 32 in the duct 30 connected to one of the air supply / exhaust gaps 28, it is possible to forcibly convey air from one duct 30 to the other duct 30. As a result, heat exchange between the heat transfer member 13 and the passing air inside the shielding member 18 can be promoted, and the cooling effect can be increased.

The X-ray generator 100 according to claim 3 of the present invention is the X-ray generator 100 according to claim 1 or 2,
A plurality of the heat transfer members 13 are provided through the substrate 12,
The distance A between the heat dissipating end 15 of the heat transfer member 13 and the shielding member side wall inner surface 33 and the distance B between the heat transfer member 13 and the shielding member ceiling surface 34 are between the heat dissipating ends 15 of the adjacent heat transfer members 13. It is characterized by being smaller than the interval C.

  In the X-ray generator 100, the air that passes through the inside of the shielding member 18 can easily come into contact with the heat transfer member 13. That is, when the interval A between the heat transfer member 13 and the shielding member side wall inner surface 33 and the interval B between the heat transfer member 13 and the shielding member ceiling surface 34 are wide, the air resistance does not pass between the heat transfer members 13. Pass through the gap A or the gap B with a small diameter. On the other hand, in this configuration, the air passing through the inside of the shielding member 18 preferentially passes between the heat transfer members 13 (gap C).

  An X-ray inspection apparatus 200 according to claim 4 of the present invention is characterized by incorporating the X-ray generation apparatus 100 according to any one of claims 1, 2, and 3.

  In this X-ray inspection apparatus 200, since the X-ray generation apparatus 100 that has been reduced in size by the above configuration is incorporated, the entire X-ray inspection apparatus can be reduced in size. In addition, since the X-ray shielding performance is enhanced by the chamber 27, the X-ray dose for an operator (operator) approaching the apparatus can be reduced. Furthermore, the direction of the duct 30 connected to the chamber 27 can be set to an arbitrary direction. For example, it becomes easy to keep the direction of the opening end 31 in the duct 30 on the exhaust side away from the operator or away from the inspection target.

According to the X-ray generator of the first aspect of the present invention, the chamber is connected to the shielding member, and the heat radiating surface on the heat radiating side of the radiator is invisible from the opening end through the air supply / exhaust gap. Since the duct communicates with each other, the X-ray shielding performance is enhanced, and the effect of reducing the X-ray leakage at the opening end position of the duct can be obtained. By adopting an arrangement structure in which the heat radiating end of the heat transfer member and the surface on the heat radiating side of the substrate are not visible from the opening end, X-rays are attenuated in the duct and the chamber up to the opening end. As described above, the X-ray shielding performance and attenuation effect are enhanced, so that the X-ray shielding structure of the radiator itself can be simplified or omitted. That is, the conventional radiator has an X-ray shielding function in addition to the cooling function. The X-ray leaked from the radiator can be reduced by a shielding member formed by laminating a shielding material and a support material and a chamber covered by the shielding member. It is possible to simplify or omit the configuration for X-ray leakage from inside the container. As a result, the radiator can be easily manufactured and the manufacturing cost can be reduced. In addition, although the heat radiating surface on the heat radiating side of the radiator is invisible from the opening end of the duct, the heat radiating end of the heat transfer member that constitutes the heat radiating surface is projected into the ventilation portion to cool the chamber and Thus, sufficient air can be passed through and heat radiation can be performed without reducing cooling efficiency while reliably blocking X-rays.

  According to the X-ray generator of Claim 2 which concerns on this invention, by attaching a ventilation fan to a duct, the air quantity which passes the thermal radiation side of a radiator can be increased, and cooling efficiency can be improved. Therefore, it is possible to reduce the size of the duct while maintaining the cooling efficiency of the heat radiating side of the radiator by the blower fan, and the entire X-ray generator can be reduced in size.

  According to the X-ray generator of the third aspect of the present invention, the air passing through the inside of the shielding member can be efficiently brought into contact with the heat transfer member, and the cooling efficiency can be increased.

  According to the X-ray inspection apparatus of the fourth aspect of the present invention, the X-ray shielding performance and the attenuation effect are enhanced by the chamber, so that it is possible to reduce the X-ray dose for the worker approaching the apparatus. Further, the opening end of the duct can be configured, for example, in the rear direction of the apparatus so as not to face the conveyance path, and dust can be prevented from being applied to the inspection target.

It is a perspective view of the X-ray inspection apparatus provided with the X-ray generator which concerns on embodiment of this invention. It is a perspective view of the X-ray inspection apparatus provided with the chamber and duct shown in FIG. FIG. 3 is an exploded perspective view of a chamber, a shielding member, a radiator, and a container illustrated in FIG. 2. FIG. 3 is a cross-sectional view of the chamber and the shielding member shown in FIG. 2. It is a disassembled perspective view of the opening end in which the ventilation fan of the duct shown in FIG. 3 is provided. It is a side view showing the positional relationship of the heat transfer member of a radiator, a shielding member side wall inner surface, and a shielding member ceiling surface. It is a perspective view of the chamber which concerns on the modification in which the R part was provided. It is a perspective view of the duct which concerns on the modification with which the ventilation fan was provided in the upper surface. It is a perspective view of the duct which concerns on the modification connected upward with respect to the chamber. It is a top view of the duct which concerns on the modification connected to the chamber so that a Z-shaped ventilation path might be formed.

Embodiments according to the present invention will be described below with reference to the drawings.
1 is a perspective view of an X-ray inspection apparatus provided with an X-ray generator according to an embodiment of the present invention, FIG. 2 is a perspective view of the X-ray inspection apparatus provided with the chamber and duct shown in FIG. Is an exploded perspective view of the chamber, shielding member, radiator, and container shown in FIG. 2, FIG. 4 is a cross-sectional view of the chamber and shielding member shown in FIG. 2, and FIG. 5 is a blower fan of the duct shown in FIG. FIG. 6 is a side view showing the positional relationship between the heat transfer member of the radiator, the shield member side wall inner surface, and the shield member ceiling surface.
The X-ray generator 100 according to the present embodiment is suitably used for the X-ray inspection apparatus 200, for example. The X-ray inspection apparatus 200 includes a conveyor 2 that conveys an inspection object such as raw meat, fish, processed food, and medicine inside the apparatus main body 1 and a foreign object that detects a foreign object in the middle of the conveyance path of the inspection object to be conveyed. And a detection unit 3.

  The conveyor 2 is driven by a drive motor (not shown) so that the inspection object carried in from the carry-in port 4 is carried out to the carry-out port 5. The foreign object detection unit 3 includes an X-ray generator 100 provided above the conveyor 2 and an X-ray detector 6 provided inside the conveyor 2.

  The X-ray generator 100 has a configuration in which a cylindrical X-ray tube 8 provided inside the container 7 is immersed in insulating oil 9 (see FIG. 3). The X-ray generator 100 is a high voltage generator (not shown) and applies a voltage of about 10 kV to 500 kV to the X-ray tube 8. As a result, X-rays are generated by colliding electrons accelerated at a high voltage with a metal serving as an anode target. The X-ray tube 8 is provided so that its longitudinal direction is orthogonal to the conveyance direction of the inspection object. The generated X-rays are irradiated to the lower X-ray detector 6 in a substantially triangular screen shape with a substantially conical detection X-ray 10 through a slit (not shown) along the longitudinal direction. To do.

  The X-ray detector 6 uses a plurality of X-ray detection elements including a photodiode and a scintillator provided on the photodiode. A line sensor (X-ray sensor) is formed by arranging these X-ray detection elements in a direction orthogonal to the conveyance direction of the inspection object, and the X-ray inspection apparatus 200 is transferred from the X-ray generator 100 on the conveyance surface (conveyor 2). The inspection object conveyed above is irradiated with X-rays, and the inspection object is inspected based on the X-ray transmission amount obtained from the X-ray detector 6 that has received the transmission X-rays.

  The radiator 11 has a rectangular substrate 12 shown in FIG. 3 and a plurality of (in the figure, 12) rod-like cooling fins 13 as heat transfer members from the front surface to the back surface, and in this embodiment, from the top surface to the bottom surface. It is penetrated substantially vertically. The substrate 12 of the radiator 11 is supported by the container opening edge 16 and seals the container opening 17 which is an upper surface opening. A heat absorbing end 14, which is the lower end of each cooling fin 13, is housed in the container 7 and immersed in the insulating oil 9. The heat absorbing end 14 is on the heat absorbing side at the lower surface of the substrate 12 and the heat absorbing end 14. A certain heat radiating end 15 protrudes outward from the upper container 7, and the upper surface of the substrate 12 and the heat radiating end 15 serve as a heat radiating side. The cooling fins 13 and the substrate 12 are made of a material having good thermal conductivity such as aluminum. The heat radiator 11 may have other shapes such as a substrate 12 having a plurality of inverted U-shaped cooling fins penetrating from the front surface to the back surface, or a plate shape.

  On the substrate 12, a shielding member 18 is provided for covering the heat radiation ends 15 of the respective cooling fins 13 and shielding X-rays leaking from the heat radiation side heat radiation surface composed of the heat radiation ends 15 and the upper surface of the substrate 12. ing. The shielding member 18 is formed in a substantially U-shape with the left and right side walls 19, 19 and the ceiling portion 20 opening downward. The shielding member 18 is made of a metal that does not transmit X-rays, such as iron, stainless steel, and lead. In the present embodiment, the shielding member 18 is formed by laminating a shielding material 22 and a support material 23 from the inner surface side.

  On the lower edges of the side walls 19, 19 of the shielding member 18, a bowl-shaped protruding piece 24 is formed substantially horizontally outward, and the protruding piece 24 is fixed to the container 7 on the substrate 12. The heat radiating end 15 of each cooling fin 13 protruding from the substrate 12 is housed in a shielding space 25 inside the shielding member 18 formed in a substantially U shape. And both ends of the shielding member 18 are opened in a rectangular shape.

  That is, the radiator 11 has a substrate 12 that contains the X-ray tube 8 and closes the container opening 17 of the container 7 filled with the insulating oil 9. The cooling fin 13 penetrates the substrate 12, and the heat absorption end 14. Protrudes into the insulating oil 9 and the heat radiating end 15 protrudes into the shielding space 25. The shielding member 18 is attached to the container 7 so as to cover the heat radiation end 15 of the cooling fin 13, and both ends serve as the air supply / exhaust openings 26.

  The shielding member 18 is provided with a chamber 27. The chamber 27 is detachably fixed to the substrate 12, for example, and is formed in a box shape so as to cover the shielding member 18. The chamber 27 is located outside both the air supply / exhaust openings 26 of the shielding member 18 and forms an air supply / exhaust gap 28 connected to each air supply / exhaust opening 26 (see FIG. 4).

  Further, a pair of ducts 30 are connected to the chamber 27. In the present embodiment, the duct 30 is integrally formed of the same material as the chamber 27 by sheet metal processing or the like. The duct 30 intersects an extended straight line 29 that passes through both the feed / exhaust openings 26, 26. In this embodiment, the longitudinal direction of the feed / exhaust gap 28 is positioned substantially perpendicular to the extended straight line 29. By being positioned so as to extend in the rear direction of the device, a heat radiating surface composed of the heat radiating end 15 of the cooling fin 13 on the heat radiating side of the radiator 11 and the upper surface of the substrate 12 from the opening end 31 shown in FIG. It communicates with the air supply / exhaust gap 28 in an invisible direction. Even if the chamber 27 and the duct 30 are formed of only a metal plate such as stainless steel, for example, X-rays can be absorbed and scattered, and the leaked X-rays can be attenuated to some extent. However, like the shielding member 18, the chamber 27 and the duct 30 are more preferably formed by laminating the shielding material 22 and the support material 23 from the inner surface side. Thereby, leaky X-rays can be shielded more reliably.

  As shown in FIG. 5, a blower fan 32 is attached to at least one of the ducts 30. When the blower fans 32 are attached to both the ducts 30, one side is an air supply side for taking in outside air, and the other side is an exhaust side for releasing to the outside air.

  In the above configuration, the shielding member 18 is configured separately from the shielding member 18 such that the chamber 27 covers the shielding member 18, but the shielding member 18 and the chamber 27 may be configured integrally. In other words, the shielding member 18, the chamber 27, and the duct 30 may be integrally formed with the container 7 so as to be detachable.

  Further, as shown in FIG. 6, the radiator 11 in which the heat radiation ends 15 of the plurality of cooling fins 13 protrude on the substrate 12 has a heat radiation end 15, a shielding member side wall inner surface 33, and a shielding member ceiling surface 34. They are arranged in a positional relationship. That is, the distance A between the heat radiation end 15 of the cooling fin 13 and the shielding member side wall inner surface 33 and the distance B between the heat radiation end 15 of the cooling fin 13 and the shielding member ceiling surface 34 are smaller than the distance C between adjacent cooling fins 13. Is set.

Next, operations of the X-ray generation apparatus 100 and the X-ray inspection apparatus 200 having the above-described configurations will be described.
In the X-ray generator 100, when the chamber 27 is connected to the substantially U-shaped shielding member 18, the air supply / exhaust gap 28 is connected to the air supply / exhaust openings 26 on both sides of the shield member 18. By attaching the chamber 27, it is possible to shield X-rays and secure the space 28 for air sending and exhausting in a space-saving manner.

  Usually, in order to connect a duct for air supply / exhaust etc. to the shielding member 18 formed by laminating the shielding material 22 and the support material 23 and the like, it is necessary to add a structure such as a connection joint to both sides, and there is a connection space for that Not a little necessary. That is, the apparatus becomes large. In this configuration, by covering the chamber 27, it is possible to simultaneously shield the X-rays and secure the air supply / exhaust gap 28 without using a connection joint or the like.

  The chamber 27 is connected to a pair of ducts 30 communicating with the air supply / exhaust gaps 28 on both sides. The duct 30 crosses an extended straight line 29 passing through the air supply / exhaust openings 26 on both sides, so that the heat radiation end 15 of the cooling fin 13 on the heat radiation side of the radiator 11 and the substrate 12 cannot be seen from the opening end 31. It communicates with the exhaust gap 28. When the direction of the entrance / exit is changed by the chamber 27 and the duct 30, the X-rays repeatedly absorb and scatter in the chamber and the duct, and attenuate and decrease.

The air supply / exhaust opening portion 26 of the shielding member 18 is connected to a wide space air supply / exhaust gap 28 by a chamber 27 which is covered and connected to the outside. Thereby, a ventilation path is not restrict | squeezed and air conveyance resistance does not increase. As a result, a decrease in cooling efficiency is suppressed.
In this manner, the chamber 27 is connected to the shielding member 18 while saving space and increasing the air conveyance resistance while shielding X-rays.

  In the X-ray generator 100, the blower fan 32 is attached to at least one of the pair of ducts 30 connected to the chamber 27. By covering the shielding member 18, air supply / exhaust gaps 28, 28 connected to the air supply / exhaust openings 26, 26 on both sides of the shielding member 18 are defined inside the chamber 27. By providing the blower fan 32 in the duct 30 connected to one of the air supply / exhaust gaps 28, 28, the air can be forcibly conveyed from one duct 30 to the other duct 30. Thereby, heat exchange with the cooling fin 13 and passing air in the inside of the shielding member 18 can be accelerated | stimulated, and a cooling effect can be increased.

The blowing performance of the blower fan 32 is set so that the cooling fin 13 and the passing air have a blown amount of heat exchanged at an optimum heat transfer rate. Note that the blower fan 32 may be either for supply or exhaust. The blower fan 32 is preferably an exhaust fan provided on the downstream side in the air conveyance direction in that no leakage of the conveyance air occurs.
As described above, the X-ray inspection apparatus 200 is provided with the blower fan 32 in the chamber 27, thereby increasing the amount of air passing through the cooling fins 13 on the heat radiation side of the radiator 11 and improving the cooling efficiency. .

Furthermore, in the X-ray generator 100, the interval A between the cooling fin 13 and the shielding member side wall inner surface 33 and the interval B between the cooling fin 13 and the shielding member ceiling surface 34 are set smaller than the interval C between the adjacent cooling fins 13. ing. Air passing through the inside of the shielding member 18 is likely to come into contact with the cooling fins 13. That is, when the space A between the cooling fin 13 and the shielding member side wall inner surface 33 is wide, the air does not pass between the cooling fins 13 and passes through the gap having a small blowing resistance. On the other hand, in this configuration, the air passing through the inside of the shielding member 18 passes between the cooling fins 13 with priority. In addition, reducing the distance A between the cooling fin 13 and the shielding member side wall inner surface 33 and the distance B between the cooling fin 13 and the shielding member ceiling surface 34 are also effective for downsizing the apparatus.
As a result, the passing air can be efficiently brought into contact with the heat radiating ends 15 of the cooling fins 13, and the cooling efficiency can be increased.

  Since the X-ray inspection apparatus 200 is incorporated with the X-ray generation apparatus 100 that has been reduced in size by the above-described configuration, the entire X-ray inspection apparatus 200 can be reduced in size. In addition, since the X-ray shielding performance is enhanced by the chamber 27, the X-ray dose for an operator (operator) approaching the apparatus can be reduced. Furthermore, the direction of the duct 30 connected to the chamber 27 can be set to an arbitrary direction. For example, it becomes easy to keep the direction of the opening end 31 in the duct 30 on the exhaust side away from the operator or away from the inspection target.

Below, the modification of the X-ray generator 100 which concerns on the said embodiment is demonstrated.
FIG. 7 is a perspective view of a chamber 37 according to a modification in which the R portion 35 is provided.
The chamber 37 according to this modification is formed with a curved portion R portion 35 at the corner of the chamber. For example, in FIG. 7, it is a figure seen from the apparatus back side, However, The corner | angular part opposite to the extension direction of the duct 30 is made into the R part.
According to this chamber 37, the vortex of the carrier air generated by the corners can be suppressed by its R shape, and the air carrier can be smoothly flowed to increase the air carrier efficiency and reduce the air carrier resistance. Thereby, the cooling effect of the cooling fin heat radiating end 15 in the shielding member 18 connected to the chamber 37 can be improved. Further, the provision of the R portion 35 can be expected to have an effect of suppressing X-ray diffusion.

FIG. 8 is a perspective view of a duct 40 according to a modification in which a blower fan 32 is provided on the upper surface.
The duct 40 according to this modification is provided with the open end 31 facing upward. Therefore, the ventilation path from the air supply / exhaust gap 28 bends in the horizontal direction 90 degrees with respect to the extended straight line 29 (see FIG. 3) at the air supply / exhaust gap 28 on the left and right side portions, and the downstream end of the opening end 31. It will turn 90 degrees further inward.
According to this duct 40, the number of bent air passages can be increased without increasing the space, more X-rays can be absorbed and scattered, and leakage can be reduced.

FIG. 9 is a perspective view of a duct 50 according to a modification connected upward with respect to the chamber 27.
The duct 50 according to this modified example is formed by bending it directly at 90 degrees above the air supply / exhaust gap 28 without being bent once at 90 degrees in the horizontal direction at the side of the chamber 27 like the duct 40 shown in FIG. .
According to this duct 50, it can be set as the duct 50 which has the opening end 31 equivalent to the ventilation path cross-sectional area of the ventilation opening 26 of the shielding member 18, can reduce ventilation resistance, and can improve a cooling effect. .

FIG. 10 is a plan view of a duct 60 according to a modification connected to the chamber 27 so as to form a Z-shaped ventilation path.
In the duct 60 according to this modification, the pair of ducts 60 are arranged on a pair of parallel straight lines. That is, it is connected to the chamber 27 so as to form a Z-shaped ventilation path.
According to this duct 60, the air conveyance direction can be shifted in the front-rear direction while keeping the same direction.
In addition, the duct 60 may be connected upside down or in an orthogonal direction, and the direction of the opening end 31 may be changed. In this way, the connection direction of the duct 60 can be easily set in the chamber 27 as appropriate. Thereby, it is possible to prevent the interference of the exhaust air with respect to the operator and the interference with the object to be inspected while improving the X-ray shielding effect without reducing the cooling efficiency.

  Therefore, according to the X-ray generator 100 according to the present embodiment, X-rays can be more reliably shielded without lowering the cooling efficiency.

  In addition, according to the X-ray inspection apparatus 200 according to the present embodiment, it is possible to prevent dust from being applied to the inspection target by preventing the opening end 31 of the duct 30 from being directed toward the conveyance path, for example.

7 ... Container 8 ... X-ray tube 9 ... Insulating oil 11 ... Radiator 12 ... Substrate 13 ... Heat transfer member (cooling fin)
14 ... endothermic end 15 ... heat radiating end 17 ... upper surface opening (container opening)
DESCRIPTION OF SYMBOLS 18 ... Shield member 26 ... Supply / exhaust opening part 27, 37 ... Chamber 28 ... Supply / exhaust gap 29 ... Extension straight line 30,40,50,60 ... Duct 31 ... Open end 32 ... Blower fan 33 ... Shield member side wall inner surface 34 ... Shield Member ceiling surface 100 ... X-ray generator 200 ... X-ray inspection device

Claims (4)

An X-ray tube (8) is housed and has a substrate (12) that closes the upper surface opening (17) of the container (7) filled with insulating oil (9), penetrates the substrate, and has an endothermic end (14). A heat radiator (11) provided with a heat transfer member (13) in which the heat radiating end (15) protrudes outward from the container.
Covering the heat radiating end side of the heat transfer member, the heat transfer member is attached to the container, and both sides are formed in a substantially U-shape to be the air supply / exhaust openings (26, 26) to form a shielding space (25), and the heat radiator A shielding member (18) formed by laminating a shielding material (22) that shields transmitted X-rays and a support material (23) ;
A chamber (27) wherein are found over the shield member via the feed discharge gap (28) in the feed discharge opening,
Wherein by intersecting the extension line (29) passing through both feed exhaust opening, and communicates with the feed discharge gap in a direction radiating surface of the heat radiation side of the radiator is not visible from the open end (31), said chamber A pair of ducts (30, 30) connected and for attenuating X-rays by absorption scattering between the opening and exhaust opening and the opening end ;
An X-ray generation apparatus comprising: The X-ray generator according to claim 1,
An X-ray generator, wherein a blower fan (32) is attached to at least one of the pair of ducts. The X-ray generator according to claim 1 or 2,
A plurality of the heat transfer members are provided through the substrate,
The distance (A) between the heat radiating end of the heat transfer member and the shielding member side wall inner surface (33) and the distance (B) between the heat transfer member and the shielding member ceiling surface (34) are the heat radiating ends of the adjacent heat transfer members. X-ray generator characterized by being smaller than the space | interval (C) of each other.   An X-ray inspection apparatus incorporating the X-ray generation apparatus (100) according to any one of claims 1, 2, and 3.

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