JP4965889B2 - X-ray inspection equipment - Google Patents

X-ray inspection equipment Download PDF

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JP4965889B2
JP4965889B2 JP2006118125A JP2006118125A JP4965889B2 JP 4965889 B2 JP4965889 B2 JP 4965889B2 JP 2006118125 A JP2006118125 A JP 2006118125A JP 2006118125 A JP2006118125 A JP 2006118125A JP 4965889 B2 JP4965889 B2 JP 4965889B2
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heat conductor
inspection apparatus
ray inspection
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wall
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JP2007292497A (en
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正幸 宇野
隆司 株本
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Ishida Co Ltd
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Description

本発明は、X線によって物品を検査するX線検査装置に関する。   The present invention relates to an X-ray inspection apparatus that inspects an article with X-rays.

食品等の物品製造工程において、物品への異物混入有無等の検査のため、X線源からのX線を搬送中の物品に照射し、該物品を透過するX線をX線検出器で受けて画像処理することにより、物品を検査するX線検査装置が設置されている。X線検査装置で高精度な検査をするためには、X線源の出力を高めることが必要であるが、X線源は発熱量が大きく相当な高温に加熱されるため、装置内部の冷却が欠かせない。   In the manufacturing process of food and other goods, in order to inspect the presence or absence of foreign matter in the goods, X-rays from the X-ray source are irradiated to the goods being conveyed, and the X-rays transmitted through the goods are received by the X-ray detector. An X-ray inspection apparatus for inspecting an article by performing image processing is installed. In order to perform high-precision inspection with an X-ray inspection apparatus, it is necessary to increase the output of the X-ray source. However, since the X-ray source generates a large amount of heat and is heated to a considerable high temperature, Is indispensable.

X線検査装置における冷却手段としては、外表面に放熱フィンが形成されるX線源を、排気口を有するフードで覆って、フード内の空気をファンで装置外部に排出するもの(特許文献1参照。)や、外表面に放熱フィンが形成されるX線源の蓋体を装置外部に連通する通風路の途中部に露出させるもの(特許文献2参照。)が提案されている。
特開平11−183405号公報 特開2001−318062号公報
As a cooling means in an X-ray inspection apparatus, an X-ray source in which heat radiation fins are formed on the outer surface is covered with a hood having an exhaust port, and air in the hood is exhausted to the outside by a fan (Patent Document 1) And an X-ray source lid having radiation fins formed on the outer surface is exposed in the middle of the ventilation path communicating with the outside of the apparatus (see Patent Document 2).
JP-A-11-183405 JP 2001-318062 A

しかしながら、上記X線検査装置は、いずれもX線源自体に放熱フィンが設けられ、放熱フィンを通り抜ける空気を装置外部に排出して冷却する構造を採用するため、装置外部へのX線の外部漏洩が避けられないという問題がある。   However, since the X-ray inspection apparatus employs a structure in which a radiation fin is provided in the X-ray source itself and the air passing through the radiation fin is discharged to the outside of the apparatus and cooled, the outside of the X-ray to the outside of the apparatus is adopted. There is a problem that leakage is inevitable.

かかる事情に鑑みて、本発明は、X線によって物品を検査するX線検査装置において、X線源から発生するX線の外部漏洩を防止しながら、装置内部を効率的に冷却することができる手段を提供する。   In view of such circumstances, the present invention can efficiently cool the inside of an apparatus while preventing external leakage of X-rays generated from an X-ray source in an X-ray inspection apparatus that inspects an article with X-rays. Provide a means.

請求項1に記載の発明は、X線によって物品を検査するX線検査装置において、X線を発生するX線管を絶縁性の冷却用油を満たしたケースに封入してなるX線源と、該X線源を取り囲んで密封する装置壁と、を備え、前記装置壁の内側に、内部熱伝導体が設けられており、前記装置壁の外側に、前記内部熱伝導体から前記装置壁を介して伝導される熱を放熱する外部熱伝導体が設けられており、さらに前記内部熱伝導体の上部に風を当てる第1ファンと、前記内部熱伝導体で冷却された空気を前記X線源に吹き付けて前記X線源を冷却する第2ファンを備えることにより、前記装置壁の内側で空気循環を繰り返すことを特徴とするX線検査装置を提供する。 The invention described in claim 1 is an X-ray inspection apparatus for inspecting an article with X-rays, and an X-ray source in which an X-ray tube for generating X-rays is enclosed in a case filled with insulating cooling oil ; And an apparatus wall surrounding and sealing the X-ray source, and an internal heat conductor is provided inside the apparatus wall, and the apparatus wall extends from the internal heat conductor to the outside of the apparatus wall. An external heat conductor that dissipates heat conducted through the first heat exchanger, a first fan that blows air on an upper portion of the internal heat conductor, and air cooled by the internal heat conductor Provided is an X-ray inspection apparatus characterized in that air circulation is repeated inside the apparatus wall by providing a second fan that blows on the X-ray source to cool the X-ray source .

請求項2に記載の発明は、請求項1に記載のX線検査装置において、前記X線源は、前記装置壁から間隔をおいて配置されていることを特徴とするX線検査装置を提供する。   According to a second aspect of the present invention, there is provided the X-ray inspection apparatus according to the first aspect, wherein the X-ray source is disposed at a distance from the apparatus wall. To do.

請求項3に記載の発明は、請求項1又は2に記載のX線検査装置において、前記内部熱伝導体及び前記外部熱伝導体が熱伝導フィンを備えることを特徴とするX線検査装置を提供する。   The invention described in claim 3 is the X-ray inspection apparatus according to claim 1 or 2, wherein the internal heat conductor and the external heat conductor include heat conductive fins. provide.

請求項4に記載の発明は、請求項3に記載のX線検査装置において、前記熱伝導フィンは、前記装置壁に沿うように上下方向に延びて、空気の流れを上下方向に整えることを特徴とするX線検査装置を提供する。 According to a fourth aspect of the present invention, in the X-ray inspection apparatus according to the third aspect of the invention, the heat conducting fins extend in the vertical direction along the apparatus wall to adjust the air flow in the vertical direction. A characteristic X-ray inspection apparatus is provided.

請求項5に記載の発明は、請求項1乃至4のいずれかに記載のX線検査装置において、 前記内部熱伝導体及び前記外部熱伝導体の上部に対して風が当てられることを特徴とするX線検査装置を提供する。   The invention according to claim 5 is the X-ray inspection apparatus according to any one of claims 1 to 4, characterized in that wind is applied to the upper portions of the internal heat conductor and the external heat conductor. An X-ray inspection apparatus is provided.

請求項6に記載の発明は、請求項1乃至5のいずれかに記載のX線検査装置において、 前記内部熱伝導体及び前記外部熱伝導体は、熱伝導性シート又は熱伝導性油脂を介して前記装置壁に密着させられていることを特徴とするX線検査装置を提供する。   The invention described in claim 6 is the X-ray inspection apparatus according to any one of claims 1 to 5, wherein the internal heat conductor and the external heat conductor are interposed via a heat conductive sheet or a heat conductive oil. An X-ray inspection apparatus characterized by being closely attached to the apparatus wall.

本発明の請求項1に記載のX線検査装置によれば、以下の優れた効果を奏する。X線を発生するX線管を絶縁性の冷却用油を満たしたケースに封入してなるX線源を、装置壁が取り囲んだ状態で密封しているので、X線が装置の外部に漏洩する心配がなく、また、装置壁の内外に設けられる熱伝導体によって、装置内部で発生した熱を装置外部へ効率的に逃がして、装置内部を冷却することができる。 According to the X-ray inspection apparatus of the first aspect of the present invention, the following excellent effects can be obtained. The X-ray source is sealed in a state in which the X-ray tube that generates X-rays is enclosed in a case filled with insulating cooling oil . The X-ray leaks to the outside of the device. In addition, the heat conductor provided inside and outside the apparatus wall can efficiently release the heat generated inside the apparatus to the outside of the apparatus and cool the inside of the apparatus.

本発明の請求項2に記載のX線検査装置によれば、請求項1に記載のX線検査装置が奏する効果に加えて、以下の優れた効果を奏する。X線源が装置壁から間隔をおいて配置されているので、X線源から装置壁に向かうX線が途中で減衰されることになり、装置壁からのX線漏れを確実に防止することができる。   According to the X-ray inspection apparatus of the second aspect of the present invention, in addition to the effect exhibited by the X-ray inspection apparatus of the first aspect, the following excellent effects are exhibited. Since the X-ray source is arranged at a distance from the apparatus wall, X-rays from the X-ray source toward the apparatus wall are attenuated on the way, and X-ray leakage from the apparatus wall is surely prevented. Can do.

本発明の請求項3に記載のX線検査装置によれば、請求項1又は2に記載のX線検査装置が奏する効果に加えて、以下の優れた効果を奏する。内部熱伝導体及び外部熱伝導体が熱伝導フィンを備えるので、装置内部で発生した熱を装置外部へ一層効率的に逃がすことができる。   According to the X-ray inspection apparatus of the third aspect of the present invention, in addition to the effect exhibited by the X-ray inspection apparatus of the first or second aspect, the following excellent effects are exhibited. Since the internal heat conductor and the external heat conductor include the heat conductive fins, the heat generated inside the apparatus can be released to the outside of the apparatus more efficiently.

本発明の請求項4に記載のX線検査装置によれば、請求項3に記載のX線検査装置が奏する効果に加えて、以下の優れた効果を奏する。熱伝導フィンが装置壁に沿うように上下方向に延びて、フィンに接する空気の流れを上下方向に整えるので、熱伝導フィンとこれに接しながら通過する空気との間の熱伝導が効率的に行われる。 According to the X-ray inspection apparatus of the fourth aspect of the present invention, in addition to the effects exhibited by the X-ray inspection apparatus of the third aspect, the following excellent effects can be obtained. The heat conduction fins extend in the vertical direction along the device wall, and the flow of air in contact with the fins is adjusted in the vertical direction, so that the heat conduction between the heat conduction fins and the air passing through the heat conduction fins is efficient. Done.

本発明の請求項5に記載のX線検査装置によれば、請求項1乃至4のいずれかに記載のX線検査装置が奏する効果に加えて、以下の優れた効果を奏する。内部熱伝導体の上部に熱風を当てる一方、外部熱伝導体の上部にも冷風を当てることで、両熱伝導体の上部間の熱勾配が大きくなり、熱伝導が一層効率的に行われる。   According to the X-ray inspection apparatus of the fifth aspect of the present invention, in addition to the effect exhibited by the X-ray inspection apparatus according to any one of the first to fourth aspects, the following excellent effects are achieved. While hot air is applied to the upper portion of the internal heat conductor, and cold air is also applied to the upper portion of the external heat conductor, the thermal gradient between the upper portions of both heat conductors is increased, and heat conduction is performed more efficiently.

本発明の請求項6に記載のX線検査装置によれば、請求項1乃至5のいずれかに記載のX線検査装置が奏する効果に加えて、以下の優れた効果を奏する。内部熱伝導体及び外部熱伝導体は、熱伝導性シート又は熱伝導性油脂を介して装置壁に密着させられているので、熱伝導がより一層効率的に行われる。   According to the X-ray inspection apparatus of the sixth aspect of the present invention, in addition to the effect exhibited by the X-ray inspection apparatus according to any one of the first to fifth aspects, the following excellent effect is achieved. Since the internal heat conductor and the external heat conductor are in close contact with the apparatus wall via the heat conductive sheet or the heat conductive oil, heat conduction is performed more efficiently.

以下、本発明の実施の形態を、添付図面を参照しながら説明する。図1は、本発明の実施形態となるX線検査装置1の正面図である。図2は、X線検査装置1の上部に備えられるX線源収納部4の側方断面図であって、図1のA−A断面に相当する図である。図3は、図2のB−B断面に相当する図、図4は、図2のC−C断面に相当する図である。   Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a front view of an X-ray inspection apparatus 1 according to an embodiment of the present invention. FIG. 2 is a side cross-sectional view of the X-ray source storage unit 4 provided in the upper portion of the X-ray inspection apparatus 1 and corresponds to a cross section taken along the line AA in FIG. 3 is a view corresponding to the BB cross section of FIG. 2, and FIG. 4 is a view corresponding to the CC cross section of FIG.

(X線検査装置1)
図1に示されるX線検査装置1は、X線源2からのX線を物品に照射し、物品を透過するX線をX線検出器3で受けて画像処理することで、物品への異物混入有無を検査する。X線源2は、X線管21を絶縁性の冷却用油を満たしたケース22に封入してなり、ケース22の下面に設けられる透過窓(不図示)から、下方の搬送経路R上を通過する物品に向けてX線を照射する。X線源2は、装置周辺にX線を漏洩させることがないように、X線検査装置1の上部筐体となるX線源収納部4に収納されている。
(X-ray inspection device 1)
An X-ray inspection apparatus 1 shown in FIG. 1 irradiates an article with X-rays from an X-ray source 2, receives X-rays transmitted through the article with an X-ray detector 3, and performs image processing. Inspect for contamination. The X-ray source 2 includes an X-ray tube 21 sealed in a case 22 filled with insulating cooling oil. From a transmission window (not shown) provided on the lower surface of the case 22, the X-ray source 2 moves on a lower conveyance path R. X-rays are irradiated toward the passing article. The X-ray source 2 is stored in an X-ray source storage unit 4 that is an upper housing of the X-ray inspection apparatus 1 so as not to leak X-rays around the apparatus.

X線源収納部4の下部には、X線検査装置1の下部筐体となるX線検査部5が連設され、X線検出器3とその上方で物品を図1中の左から右へ搬送する搬送手段としてのベルトコンベア6が設けられる。X線検査部5の正面(図1中の手前側)には、支持軸51aを回転中心として水平方向に観音開きする二枚の扉51が設けられて、内部が清掃・点検可能とされている。また、X線検査部5の側方の左面及び右面には、検査する物品を通過させるための入口5a及び出口5bが形成されているが、これらの内側には、複数枚のX線漏洩防止カーテン52・・52が取り付けられており、X線源2から照射されるX線が外部に漏洩することが防止されている。   An X-ray inspection unit 5 serving as a lower housing of the X-ray inspection apparatus 1 is connected to the lower part of the X-ray source storage unit 4 so that articles can be placed on the X-ray detector 3 and above the left to right in FIG. A belt conveyor 6 is provided as a transport means for transporting to. In front of the X-ray inspection unit 5 (on the front side in FIG. 1), two doors 51 that are opened in a horizontal direction around the support shaft 51a are provided, and the inside can be cleaned and inspected. . In addition, an inlet 5a and an outlet 5b for allowing an article to be inspected to pass through are formed on the left and right sides of the X-ray inspection unit 5, and a plurality of X-ray leakage preventions are provided on the inside thereof. Curtains 52 and 52 are attached to prevent the X-rays emitted from the X-ray source 2 from leaking to the outside.

(X線源収納部4)
X線源収納部4は、図2乃至図4に示されるように、X線源2を取り囲んで密封するステンレス製の装置壁41と、装置壁41に形成される開口41aを閉鎖するように取り付けられて、装置壁41の一部をなすアルミニウム製の蓋体42と、を備える。蓋体42は、装置内部の点検のために取り外し可能とされており、その内側面42a及び外側面42bには、それぞれアルミニウム製の内部熱伝導体43及び外部熱伝導体44が取り付けられている。内部熱伝導体43が、X線源2によって装置内部で発生する熱を吸熱し、外部熱伝導体44が、内部熱伝導体43から蓋体42を介して伝導される熱を装置外部に放熱する。なお、X線源2は、X線源収納部4内の前方下部に、装置壁41から間隔をおいて配置されており、X線源2と内部熱伝導体43の間には、X線源2の制御をするための制御盤等、電子部品7(図2)が配置されている。蓋体42と開口41aの外周縁部の間には、断熱材で形成されるガスケットGが介在させられており、X線が外部に漏洩しないようにシールされている。
(X-ray source storage 4)
As shown in FIGS. 2 to 4, the X-ray source storage 4 closes a stainless steel device wall 41 that surrounds and seals the X-ray source 2 and an opening 41 a formed in the device wall 41. And an aluminum lid 42 which is attached and forms a part of the apparatus wall 41. The lid 42 is removable for inspection inside the apparatus, and an inner heat conductor 43 and an outer heat conductor 44 made of aluminum are attached to the inner side surface 42a and the outer side surface 42b, respectively. . The internal heat conductor 43 absorbs heat generated inside the apparatus by the X-ray source 2, and the external heat conductor 44 dissipates heat conducted from the internal heat conductor 43 via the lid 42 to the outside of the apparatus. To do. The X-ray source 2 is disposed at a lower front portion in the X-ray source storage unit 4 with a space from the apparatus wall 41, and between the X-ray source 2 and the internal heat conductor 43, Electronic components 7 (FIG. 2) such as a control panel for controlling the source 2 are arranged. A gasket G formed of a heat insulating material is interposed between the lid 42 and the outer peripheral edge of the opening 41a, and is sealed so that X-rays do not leak to the outside.

(内部熱伝導体43)
内部熱伝導体43は、蓋体42に柔軟性を有するシリコン樹脂製の熱伝導性シート45を介して密着させられる内部熱伝導パネル431と、内部熱伝導パネル431から装置中央側(前側)に向けて突出し、上下方向に延びて、通過する空気の流れを上下方向に整える複数の帯状の内部熱伝導フィン432と、を一体的に設けてなり、蓋体42に着脱可能に取り付けられる箱状のフード46で覆われている。フード46は、内部熱伝導体43の上部に対向する位置に空気導入開口46aが形成されており、内部熱伝導体43の下部に対向する位置に空気導出開口46bが形成されている。空気導入開口46aには、内部熱伝導体43の上部に対して風を当てるようにして、装置内部の加熱空気をフード46内に導入するファン461が設けられ、空気導出開口46bには、内部熱伝導体43により冷却された空気をフード46外に導出するファン462が設けられている。なお、ファン461,462は、内部熱伝導体43の幅方向の広い範囲に亘って加熱空気の上下方向の流れを生じさせるため、幅方向に複数個並べた状態で設置されている。
(Internal heat conductor 43)
The internal heat conductor 43 is brought into close contact with the lid 42 via a flexible silicon resin heat conductive sheet 45, and from the internal heat conductive panel 431 to the center side (front side) of the apparatus. A plurality of strip-shaped internal heat conductive fins 432 that project in the vertical direction and extend in the vertical direction to adjust the flow of the passing air in the vertical direction, and are attached to the lid 42 in a detachable manner. The hood 46 is covered. In the hood 46, an air introduction opening 46 a is formed at a position facing the upper part of the internal heat conductor 43, and an air outlet opening 46 b is formed at a position facing the lower part of the internal heat conductor 43. The air introduction opening 46a is provided with a fan 461 that introduces heated air inside the apparatus into the hood 46 so that air is applied to the upper part of the internal heat conductor 43. A fan 462 for leading the air cooled by the heat conductor 43 out of the hood 46 is provided. The fans 461 and 462 are installed in a state where a plurality of fans 461 and 462 are arranged in the width direction in order to cause the heated air to flow in the vertical direction over a wide range in the width direction of the internal heat conductor 43.

(外部熱伝導体44)
外部熱伝導体44は、蓋体42に柔軟性を有するシリコン樹脂製の熱伝導性シート47を介して密着させられる外部熱伝導パネル441と、外部熱伝導パネル441から装置外側(後側)に向けて突出し、上下方向に延びて、通過する空気の流れを上下方向に整える複数の帯状の外部熱伝導フィン442と、を一体的に形成してなり、X線源収納部4に対して着脱可能に取り付けられる箱状のフード48で蓋体42とともに覆われている。フード48は、外部熱伝導体44の上部に対向する位置に空気導入開口48aが形成されており、外部熱伝導体44の下方において下向きに空気導出開口48bが形成されている。空気導入開口48aには、外部熱伝導体44の上部に対して風を当てるようにして、装置外部の常温空気(冷却空気)をフード48内に導入するファン481が設けられ、空気導出開口48bには、外部熱伝導体44からの放熱で暖められた空気をフード48外に導出するファン482が設けられている。なお、ファン481,482は、外部熱伝導体44の幅方向の広い範囲に亘って冷却空気の上下方向の流れを生じさせるため、幅方向に複数個並べた状態で設置されている。
(External heat conductor 44)
The external heat conductor 44 is attached to the lid body 42 via a flexible silicon resin heat conductive sheet 47, and the external heat conductive panel 441 is disposed on the outside (rear side) of the apparatus from the external heat conductive panel 441. And a plurality of strip-shaped external heat conduction fins 442 that protrude in the vertical direction and extend in the vertical direction to regulate the flow of the passing air in the vertical direction, and are integrally formed with the X-ray source storage unit 4 It is covered with a lid 42 by a box-shaped hood 48 that can be attached. In the hood 48, an air introduction opening 48 a is formed at a position facing the top of the external heat conductor 44, and an air outlet opening 48 b is formed below the external heat conductor 44. The air introduction opening 48a is provided with a fan 481 for introducing normal temperature air (cooling air) outside the apparatus into the hood 48 so as to blow air on the upper portion of the external heat conductor 44, and the air outlet opening 48b. Is provided with a fan 482 that guides the air heated by heat radiation from the external heat conductor 44 to the outside of the hood 48. The fans 481 and 482 are installed in a state where a plurality of fans 481 and 482 are arranged in the width direction in order to generate a vertical flow of the cooling air over a wide range of the external heat conductor 44 in the width direction.

(X線源収納部4の冷却)
X線源収納部4において、密封された装置壁41の内部では、前方下部に配置されるX線源2から上昇する加熱空気が、後方上部に設けられるファン461でフード46内に導入される。フード46内に導入された加熱空気は、下方のファン462でフード46外へ導出される際に、上下方向に延びる内部熱伝導フィン432を通過することにより冷却される。冷却された空気は、ファン462でその前方に配置される電子部品7、及び電子部品7よりも高熱となるX線源2に吹き付けられて、これらを冷却することにより、再び加熱空気となり、上述した空気循環を再び繰り返す。一方、X線源収納部4の外部では、装置外部の冷却空気がファン481でフード48内に導入され、ファン482でフード外に導出される際に、上下方向に延びる外部熱伝導フィン442を通過して、内部熱伝導フィン432からの伝導熱を外部に放出する。
(Cooling of X-ray source storage unit 4)
In the X-ray source storage unit 4, the heated air rising from the X-ray source 2 disposed in the lower front part is introduced into the hood 46 by the fan 461 provided in the upper rear part inside the sealed apparatus wall 41. . When the heated air introduced into the hood 46 is led out of the hood 46 by the lower fan 462, it is cooled by passing through the internal heat conductive fins 432 extending in the vertical direction. The cooled air is blown to the electronic component 7 disposed in front of the fan 462 and the X-ray source 2 having a higher temperature than the electronic component 7, and by cooling them, the air becomes heated air again. Repeat the air circulation. On the other hand, outside the X-ray source storage unit 4, when the cooling air outside the apparatus is introduced into the hood 48 by the fan 481 and led out of the hood by the fan 482, the external heat conducting fins 442 extending in the vertical direction are provided. Passing through, the conduction heat from the internal heat conduction fins 432 is released to the outside.

(上記実施形態の特徴)
上記実施形態に係るX線検査装置1は、下記のような特徴を有する。第一に、X線源2を取り囲んで密封する装置壁41の一部をなす蓋体42の内側に、内部熱伝導体43が設けられている一方、外側に、内部熱伝導体43から蓋体42を介して伝導される熱を放熱する外部熱伝導体44が設けられているという特徴を有している。これによって、X線を装置外部に漏洩させることなく、装置内部で発生した熱を装置外部へ効率的に逃がすことができ、その結果、装置内部のX線源2及び電子部品7を確実に冷却することができる。また、電気クーラー等を設置する場合と比べて製作コストや稼動コストが安価であり、故障の心配がなく、フィルター清掃等の手間のかかるメンテナンスが必要でない等のメリットがある。
(Characteristics of the above embodiment)
The X-ray inspection apparatus 1 according to the above embodiment has the following characteristics. First, an internal heat conductor 43 is provided on the inner side of a lid 42 that forms a part of the device wall 41 that surrounds and seals the X-ray source 2, while a lid from the internal heat conductor 43 is provided on the outer side. An external heat conductor 44 that dissipates heat conducted through the body 42 is provided. As a result, heat generated inside the apparatus can be efficiently released to the outside of the apparatus without leaking X-rays to the outside of the apparatus, and as a result, the X-ray source 2 and the electronic component 7 inside the apparatus are reliably cooled. can do. In addition, the manufacturing cost and the operating cost are lower than the case where an electric cooler or the like is installed, and there is a merit that troublesome maintenance such as filter cleaning is not necessary.

第二に、X線源2が、装置壁41から間隔をおいて配置されているという特徴を有しており、これによって、X線がX線源2から装置壁41に向かう途中で減衰されるため、装置壁41を透過することにより生じるX線の漏れを確実に防止することができる。   Secondly, the X-ray source 2 is characterized by being spaced from the apparatus wall 41, whereby the X-ray is attenuated on the way from the X-ray source 2 to the apparatus wall 41. Therefore, it is possible to reliably prevent X-ray leakage caused by passing through the device wall 41.

第三に、内部熱伝導体43が、空気導入開口46a及び空気導出開口46bを有するフード46で覆われており、ファン461,462によって、空気導入開口46aから空気導出開口46bへ向かう加熱空気の流れが形成される一方、外部熱伝導体44が、空気導入開口48a及び空気導出開口48bを有するフード48で覆われており、ファン481,482によって、空気導入開口48aから空気導出開口48bへ向かう冷却空気の流れが形成されるという特徴を有する。これによって、加熱空気が内部熱伝導体43に沿って一方向に通過させられ、また、冷却空気が外部熱伝導体44に沿って一方向に通過させられるので、熱伝導を効率的に行うことができる。   Thirdly, the internal heat conductor 43 is covered with a hood 46 having an air introduction opening 46a and an air outlet opening 46b, and the fans 461 and 462 allow the heated air flowing from the air introduction opening 46a to the air outlet opening 46b. While a flow is formed, the external heat conductor 44 is covered with a hood 48 having an air introduction opening 48a and an air extraction opening 48b, and is directed from the air introduction opening 48a to the air extraction opening 48b by fans 481 and 482. A feature is that a flow of cooling air is formed. Accordingly, the heating air is allowed to pass in one direction along the internal heat conductor 43, and the cooling air is allowed to pass in one direction along the external heat conductor 44, so that heat conduction is efficiently performed. Can do.

第四に、内部熱伝導体43と外部熱伝導体44が、それぞれ内部熱伝導フィン432及び外部熱伝導フィン442を備えているという特徴を有しており、これによって、装置内部で発生した熱を一層効率的に装置外部に逃がすことができる。   Fourthly, the internal heat conductor 43 and the external heat conductor 44 are characterized by having internal heat conductive fins 432 and external heat conductive fins 442, respectively. Can be released to the outside of the apparatus more efficiently.

第五に、内部熱伝導フィン432及び外部熱伝導フィン442が、上下方向に延びて、空気の流れを上下方向に整えるという特徴を有しており、これによって、内部熱伝導フィン432及び外部熱伝導フィン442とこれらに接しながら通過する空気との間の熱伝導が効率的に行われ、その結果として、装置内部を確実に冷却することができる。   Fifth, the internal heat conductive fins 432 and the external heat conductive fins 442 have a feature that they extend in the vertical direction and regulate the air flow in the vertical direction. The heat conduction between the conductive fins 442 and the air passing through them is efficiently performed, and as a result, the inside of the apparatus can be reliably cooled.

第六に、内部熱伝導体43の上部に対してファン461で熱風が直接当てられる一方、外部熱伝導体44の上部に対してファン481で冷風が直接当てられるという特徴を有しており、これにより、内部熱伝導体43及び外部熱伝導体44の上部同士における熱勾配が大きくなり、熱伝導が一層効率的に行われ、その結果として、装置内部の冷却を促進することができる。   Sixth, the hot air is directly applied to the upper part of the internal heat conductor 43 by the fan 461, while the cool air is directly applied to the upper part of the external heat conductor 44 by the fan 481. Thereby, the thermal gradient in the upper part of the internal heat conductor 43 and the external heat conductor 44 becomes large, heat conduction is performed more efficiently, and as a result, cooling of the inside of the apparatus can be promoted.

第七に、内部熱伝導体43及び外部熱伝導体44が、熱伝導性シート45,47を介して装置壁41の一部をなす蓋体42に密着させられているという特徴を有しており、これにより、熱伝導がより一層効率的に行われる。   Seventh, the internal heat conductor 43 and the external heat conductor 44 are characterized in that they are brought into close contact with the lid 42 forming a part of the device wall 41 via the heat conductive sheets 45 and 47. Thereby, heat conduction is performed more efficiently.

第八に、内部熱伝導体43を収納するフード46の空気導出開口46bとX線源2の間に、電子部品7が配置されているという特徴を有しており、これにより、電子部品7、これより高温のX線源2の順で冷却されることになり、電子部品7の冷却が確実に行われる。   Eighth, the electronic component 7 is arranged between the air outlet opening 46b of the hood 46 that accommodates the internal heat conductor 43 and the X-ray source 2, and thus the electronic component 7 is provided. Thus, the X-ray source 2 having a higher temperature is cooled in this order, and the electronic component 7 is reliably cooled.

(上記実施形態の変形例)
上記実施形態では、内部熱伝導体43及び外部熱伝導体44とこれを通過する空気の間の熱伝導を効率的に行うために、上下方向に延びて空気の流れを上下方向に整える帯状の内部熱伝導フィン432及び外部熱伝導フィン442を採用したが、これに限らず、例えば剣山形状や上下方向に延びる波形形状等、空気の流れを阻害せずに、表面積(空気との接触面積)がより大きくなる熱伝導フィンを採用することも可能である。また、X線源2のケース22の外表面に熱伝導フィンを設けて、ファン462から吹き付けられる空気に対する熱伝導を効率的に行うようにしても良い。
(Modification of the above embodiment)
In the above embodiment, in order to efficiently conduct heat conduction between the internal heat conductor 43 and the external heat conductor 44 and the air passing therethrough, a belt-like shape that extends in the vertical direction and arranges the air flow in the vertical direction. Although the internal heat conductive fins 432 and the external heat conductive fins 442 are adopted, the surface area (contact area with the air) is not limited to this, for example, a sword mountain shape or a corrugated shape extending in the vertical direction, without hindering the air flow. It is also possible to employ heat conducting fins that increase the. Further, heat conduction fins may be provided on the outer surface of the case 22 of the X-ray source 2 so that heat conduction to the air blown from the fan 462 can be efficiently performed.

上記実施形態では、装置の内外にフード46,48をそれぞれ設けることにより、加熱空気を内部熱伝導体43に沿って通過させる一方、冷却空気を外部熱伝導体44に沿って通過させて、熱伝導の効率的に行うようにしたが、装置内部や装置周辺のスペースが十分取れない等の事情がある場合には、フードを設けないこととしても良い。また、上記実施形態では、逆方向に風を送るファンを熱伝導体の上下に対応するように設けて、空気の流れを熱伝導体に沿う上下一方向に整えたが、これに代えて、熱伝導体の全面に風を当てるようにしても良い。   In the above embodiment, by providing the hoods 46 and 48 inside and outside the apparatus, the heating air is allowed to pass along the internal heat conductor 43 while the cooling air is allowed to pass along the external heat conductor 44 so as to generate heat. Although the conduction is performed efficiently, the hood may not be provided if there is a situation such as insufficient space inside the device or around the device. Further, in the above embodiment, the fan that sends the wind in the opposite direction is provided so as to correspond to the top and bottom of the heat conductor, and the air flow is arranged in one direction along the heat conductor, but instead, Wind may be applied to the entire surface of the heat conductor.

上下実施形態では、内部熱伝導体43及び外部熱伝導体44を、柔軟性を有するシリコン樹脂製の熱伝導性シート45,47を介して装置壁41の一部をなす蓋体42に密着させることとしたが、これに代えて、熱伝導性油脂を介して密着させることとしても良い。また、蓋体42の内側面42a及び外側面に42bに内部熱伝導体及び外部熱伝導体となる熱伝導フィンを一体的に形成することも可能である。さらに、内部熱伝導体及び外部熱伝導体は、蓋体を軽量化するために、蓋体以外の装置壁に設けたり、冷却性を高めるために、X線源収納部の上面に形成される装置壁や複数の装置壁に設けたりすることもできる。   In the upper and lower embodiments, the internal heat conductor 43 and the external heat conductor 44 are brought into close contact with the lid 42 forming a part of the device wall 41 via flexible silicon resin heat conductive sheets 45 and 47. However, instead of this, it may be in close contact with the heat conductive oil. It is also possible to integrally form heat conductive fins serving as an internal heat conductor and an external heat conductor on the inner side surface 42 a and the outer side surface 42 b of the lid 42. Further, the internal heat conductor and the external heat conductor are formed on the upper surface of the X-ray source storage unit in order to reduce the weight of the lid and to provide it on the apparatus wall other than the lid and to improve the cooling performance. It can also be provided on a device wall or a plurality of device walls.

その他、本発明のX線検査装置は、上記した実施の形態に限定されるものではなく、本発明の要旨を逸脱しない範囲内において種々変更を加え得ることは勿論である。   In addition, the X-ray inspection apparatus of the present invention is not limited to the above-described embodiment, and various changes can be made without departing from the scope of the present invention.

本発明の実施形態となるX線検査装置の正面図。1 is a front view of an X-ray inspection apparatus according to an embodiment of the present invention. X線検査装置の上部に備えられるX線源収納部の側方断面図であって、図1のA−A断面に相当する図。FIG. 2 is a side cross-sectional view of an X-ray source storage unit provided in the upper part of the X-ray inspection apparatus, corresponding to the AA cross section of FIG. 図2のB−B断面に相当する図。The figure equivalent to the BB cross section of FIG. 図2のC−C断面に相当する図。The figure equivalent to the CC cross section of FIG.

1 X線検査装置
2 X線源
3 X線検出器
4 X線源収納部
5 X線検査部
7 電子部品
41 装置壁
42 蓋体(装置壁)
43 内部熱伝導体
432 内部熱伝導フィン
44 外部熱伝導体
442 外部熱伝導フィン
45 熱伝導性シート
46 フード
46a 空気導入開口
46b 空気導出開口
461,462 ファン
47 熱伝導性シート
48 フード
48a 空気導入開口
48b 空気導出開口
481,482 ファン
DESCRIPTION OF SYMBOLS 1 X-ray inspection apparatus 2 X-ray source 3 X-ray detector 4 X-ray source storage part 5 X-ray inspection part 7 Electronic component 41 Apparatus wall 42 Cover (apparatus wall)
43 internal heat conductor 432 internal heat conductive fin 44 external heat conductor 442 external heat conductive fin 45 heat conductive sheet 46 hood 46a air introduction opening 46b air outlet opening 461, 462 fan 47 heat conductive sheet 48 hood 48a air introduction opening 48b Air outlet opening 481, 482 Fan

Claims (6)

X線によって物品を検査するX線検査装置において、
X線を発生するX線管を絶縁性の冷却用油を満たしたケースに封入してなるX線源と、該X線源を取り囲んで密封する装置壁と、を備え、
前記装置壁の内側に、内部熱伝導体が設けられており、前記装置壁の外側に、前記内部熱伝導体から前記装置壁を介して伝導される熱を放熱する外部熱伝導体が設けられており、
さらに前記内部熱伝導体の上部に風を当てる第1ファンと、前記内部熱伝導体で冷却された空気を前記X線源に吹き付けて前記X線源を冷却する第2ファンを備えることにより、前記装置壁の内側で空気循環を繰り返すことを特徴とするX線検査装置。
In an X-ray inspection apparatus for inspecting an article with X-rays,
An X-ray source in which an X-ray tube for generating X-rays is enclosed in a case filled with insulating cooling oil , and an apparatus wall that surrounds and seals the X-ray source,
An internal heat conductor is provided inside the device wall, and an external heat conductor that radiates heat conducted from the internal heat conductor through the device wall is provided outside the device wall. and,
Furthermore, by providing a first fan that blows air on the upper part of the internal heat conductor, and a second fan that cools the X-ray source by blowing air cooled by the internal heat conductor to the X-ray source, An X-ray inspection apparatus characterized by repeating air circulation inside the apparatus wall .
請求項1に記載のX線検査装置において、
前記X線源は、前記装置壁から間隔をおいて配置されていることを特徴とするX線検査装置。
The X-ray inspection apparatus according to claim 1,
The X-ray inspection apparatus, wherein the X-ray source is disposed at a distance from the apparatus wall.
請求項1又は2に記載のX線検査装置において、
前記内部熱伝導体及び前記外部熱伝導体が熱伝導フィンを備えることを特徴とするX線検査装置。
The X-ray inspection apparatus according to claim 1 or 2,
The X-ray inspection apparatus, wherein the internal heat conductor and the external heat conductor include heat conductive fins.
請求項3に記載のX線検査装置において、
前記熱伝導フィンは、前記装置壁に沿うように上下方向に延びて、空気の流れを上下方向に整えることを特徴とするX線検査装置。
The X-ray inspection apparatus according to claim 3,
The X-ray inspection apparatus according to claim 1, wherein the heat conducting fins extend in a vertical direction along the apparatus wall to adjust an air flow in the vertical direction.
請求項1乃至4のいずれかに記載のX線検査装置において、
前記内部熱伝導体及び前記外部熱伝導体の上部に対して風が当てられることを特徴とするX線検査装置。
In the X-ray inspection apparatus according to any one of claims 1 to 4,
An X-ray inspection apparatus, wherein wind is applied to the upper portions of the internal heat conductor and the external heat conductor.
請求項1乃至5のいずれかに記載のX線検査装置において、
前記内部熱伝導体及び前記外部熱伝導体は、熱伝導性シート又は熱伝導性油脂を介して前記装置壁に密着させられていることを特徴とするX線検査装置。
In the X-ray inspection apparatus according to any one of claims 1 to 5,
The X-ray inspection apparatus, wherein the internal heat conductor and the external heat conductor are in close contact with the apparatus wall via a heat conductive sheet or heat conductive oil.
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Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5288874B2 (en) * 2008-05-02 2013-09-11 株式会社 システムスクエア Foreign matter inspection device
JP2011040239A (en) * 2009-08-10 2011-02-24 Hitachi Medical Corp X-ray tube device
JP5451265B2 (en) * 2009-08-31 2014-03-26 キヤノン株式会社 Radiography equipment
CN102543244A (en) * 2010-12-08 2012-07-04 王全兴 Biological irradiation device of high energy X-rays
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US10292251B2 (en) 2015-12-14 2019-05-14 Anritsu Infivis Co., Ltd. X-ray inspection device
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Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11183405A (en) * 1997-12-18 1999-07-09 Shimadzu Corp X-ray foreign matter inspection device
JP3691338B2 (en) * 2000-05-08 2005-09-07 アンリツ産機システム株式会社 X-ray foreign object detection device
JP3777539B2 (en) * 2000-12-07 2006-05-24 株式会社島津製作所 X-ray generator
JP2002341044A (en) * 2001-05-15 2002-11-27 Toshiba Medical System Co Ltd Radiation detector
JP4080256B2 (en) * 2002-06-19 2008-04-23 アンリツ産機システム株式会社 X-ray generator

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