JP6187918B2 - Circuit member connection structure, connection method, and connection material - Google Patents

Circuit member connection structure, connection method, and connection material Download PDF

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Publication number
JP6187918B2
JP6187918B2 JP2015088001A JP2015088001A JP6187918B2 JP 6187918 B2 JP6187918 B2 JP 6187918B2 JP 2015088001 A JP2015088001 A JP 2015088001A JP 2015088001 A JP2015088001 A JP 2015088001A JP 6187918 B2 JP6187918 B2 JP 6187918B2
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circuit member
solder
indium
bismuth
transparent electrode
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JP2016207842A (en
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新 岸
新 岸
前田 憲
憲 前田
境 忠彦
忠彦 境
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Panasonic Intellectual Property Management Co Ltd
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Panasonic Intellectual Property Management Co Ltd
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Priority to JP2015088001A priority Critical patent/JP6187918B2/en
Priority to US15/075,064 priority patent/US9999123B2/en
Priority to CN201610223757.6A priority patent/CN106068059B/en
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • H05K1/111Pads for surface mounting, e.g. lay-out
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0274Optical details, e.g. printed circuits comprising integral optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016Brazing of electronic components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • B23K35/264Bi as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/36Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
    • B23K35/3612Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest with organic compounds as principal constituents
    • B23K35/3613Polymers, e.g. resins
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/36Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
    • B23K35/362Selection of compositions of fluxes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/11Printed elements for providing electric connections to or between printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/14Structural association of two or more printed circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
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    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3436Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70Coupling devices
    • H01R12/71Coupling devices for rigid printing circuits or like structures
    • H01R12/712Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
    • H01R12/714Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092Dispersed materials, e.g. conductive pastes or inks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092Dispersed materials, e.g. conductive pastes or inks
    • H05K1/097Inks comprising nanoparticles and specially adapted for being sintered at low temperature
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0108Transparent
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/01Dielectrics
    • H05K2201/0104Properties and characteristics in general
    • H05K2201/0133Elastomeric or compliant polymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/02Fillers; Particles; Fibers; Reinforcement materials
    • H05K2201/0203Fillers and particles
    • H05K2201/0206Materials
    • H05K2201/0218Composite particles, i.e. first metal coated with second metal
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    • H05K2201/03Conductive materials
    • H05K2201/032Materials
    • H05K2201/0326Inorganic, non-metallic conductor, e.g. indium-tin oxide [ITO]
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    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10128Display
    • H05K2201/10136Liquid Crystal display [LCD]
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    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10742Details of leads
    • H05K2201/10886Other details
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    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10742Details of leads
    • H05K2201/10886Other details
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    • H05K2201/20Details of printed circuits not provided for in H05K2201/01 - H05K2201/10
    • H05K2201/2036Permanent spacer or stand-off in a printed circuit or printed circuit assembly
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    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3457Solder materials or compositions; Methods of application thereof
    • H05K3/3463Solder compositions in relation to features of the printed circuit board or the mounting process
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Combinations Of Printed Boards (AREA)
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Description

本発明は、透明電極を有する回路部材と、金属電極を有する回路部材との、はんだ材料による接続構造に関する。   The present invention relates to a connection structure using a solder material between a circuit member having a transparent electrode and a circuit member having a metal electrode.

通常、ガラス基板のような透明な回路部材は、透明電極を備えている。例えば液晶ディスプレイ基板とフレキシブル基板(FPC)とを電気的に接続する場合、FPCが有する金属電極と液晶ディスプレイ基板が有する透明電極とを接続することが必要である。しかし、透明電極は、溶融はんだ材料に濡れにくいため、良好な接続状態を達成することは困難である。そこで、透明電極を濡れ性の高い金属メッキで被覆した後、はんだ材料により、金属電極と透明電極とを接続する技術が提案されている(特許文献1)。   Usually, a transparent circuit member such as a glass substrate includes a transparent electrode. For example, when a liquid crystal display substrate and a flexible substrate (FPC) are electrically connected, it is necessary to connect a metal electrode included in the FPC and a transparent electrode included in the liquid crystal display substrate. However, since the transparent electrode is difficult to get wet with the molten solder material, it is difficult to achieve a good connection state. Thus, a technique has been proposed in which a transparent electrode is coated with a highly wettable metal plating, and then the metal electrode and the transparent electrode are connected with a solder material (Patent Document 1).

しかし、透明電極を金属メッキで被覆するには、相応のコストアップが必要となる。一方、はんだ材料の代わりに異方導電性フィルム(ACF)を用いるChiponGlass(COG)、FilmonGlass(FOG)と称される電極間の接続方法が提案されている(特許文献2)。   However, in order to cover the transparent electrode with metal plating, a corresponding increase in cost is required. On the other hand, a connection method between electrodes called Chipglass (COG) and Filmglass (FOG) using an anisotropic conductive film (ACF) instead of a solder material has been proposed (Patent Document 2).

特開昭58−182684号公報JP 58-182684 A 特開2012−190804号公報JP 2012-190804 A

しかし、ACFに含まれる導電性粒子は、樹脂粒子とその表面を被覆する導電層とで形成されている。このような導電性粒子は、例えば、200℃近い高温下、50MPa〜150MPaの高圧力で、電極間で圧縮されることにより、電極との電気的な接触を達成している。   However, the conductive particles contained in the ACF are formed of resin particles and a conductive layer covering the surface. Such conductive particles achieve electrical contact with the electrodes by being compressed between the electrodes at a high pressure of 50 MPa to 150 MPa at a high temperature close to 200 ° C., for example.

以上のように、ACFで接続された回路部材には、熱による膨張収縮の応力に加え、圧縮の際の圧力に起因する相当の歪が発生する。一方、透明電極を備えた回路部材では、基板の薄型化が進んでいるため、応力による不具合が顕在化しつつある。   As described above, in the circuit members connected by the ACF, in addition to the expansion and contraction stress due to heat, considerable distortion due to the pressure during compression occurs. On the other hand, in a circuit member provided with a transparent electrode, since the substrate is becoming thinner, defects due to stress are becoming apparent.

また、ACFに含まれる導電性粒子は、高温に曝されると膨張するため、電極との接触面積が減少し、接続抵抗が増大する傾向がある。   In addition, since the conductive particles contained in the ACF expand when exposed to a high temperature, the contact area with the electrode tends to decrease and the connection resistance tends to increase.

上記に鑑み、本発明の一局面は、透明電極を備えた第1主面を有する第1回路部材と、金属電極を備えた第2主面を有する第2回路部材と、前記第1主面と前記第2主面との間に介在する接合部と、を備え、前記接合部は、樹脂部と、はんだ部と、を有し、前記はんだ部は、前記透明電極と前記金属電極とを電気的に接続しており、前記透明電極は、インジウムと、スズと、を含む酸化物を含み、前記はんだ部は、ビスマス−インジウム合金を含み、前記透明電極と前記はんだ部との間に、インジウムとビスマスとを含み、前記はんだ部とは異なる第1合金層を有する、回路部材の接続構造に関する。 In view of the above, one aspect of the present invention provides a first circuit member having a first main surface provided with a transparent electrode, a second circuit member having a second main surface provided with a metal electrode, and the first main surface. And a joint portion interposed between the second main surface, the joint portion includes a resin portion and a solder portion, and the solder portion includes the transparent electrode and the metal electrode. Electrically connected, the transparent electrode includes an oxide including indium and tin, the solder portion includes a bismuth-indium alloy, and between the transparent electrode and the solder portion, The present invention relates to a circuit member connection structure including indium and bismuth and having a first alloy layer different from the solder portion .

本発明の別の局面は、透明電極を備えた第1主面を有する第1回路部材と、金属電極を備えた第2主面を有する第2回路部材と、を接続する、回路部材の接続方法であって、(i)接着剤と、前記接着剤に分散するはんだ材料と、を含む接続材料を準備する工程と、(ii)前記接続材料を介して前記透明電極と前記金属電極とが対向するように、前記第1回路部材と前記第2回路部材とを配置する工程と、(iii)前記第2回路部材を前記第1回路部材に対して押圧しながら加熱して、前記はんだ材料を溶融させた後、前記加熱を停止して、前記溶融したはんだ材料を固化することにより、前記透明電極と前記金属電極とを電気的に接続するはんだ部を形成する工程と、(iv)前記接着剤を硬化させて、前記第1回路部材と前記第2回路部材とを接着する樹脂部を形成する工程と、を有し、前記透明電極は、インジウムと、スズと、を含む酸化物を含み、前記はんだ材料は、ビスマス−インジウム合金を含み、前記工程(iv)は、前記工程(iii)と並行して、あるいは、前記工程(iii)の後に行われ、前記はんだ部の形成とともに、前記透明電極と前記はんだ部との間に、前記透明電極に含まれるインジウムと、前記はんだ部に含まれるビスマスと、を含む第1合金層を形成する、回路部材の接続方法に関する。 Another aspect of the present invention is a circuit member connection for connecting a first circuit member having a first main surface with a transparent electrode and a second circuit member having a second main surface with a metal electrode. A method comprising: (i) preparing a connecting material including an adhesive and a solder material dispersed in the adhesive; and (ii) the transparent electrode and the metal electrode through the connecting material. A step of disposing the first circuit member and the second circuit member so as to face each other; and (iii) heating the second circuit member against the first circuit member while heating the solder material, (Iv) the step of forming a solder part for electrically connecting the transparent electrode and the metal electrode by stopping the heating and solidifying the molten solder material after melting By curing the adhesive, the first circuit member and the second circuit member Includes a step of forming a resin portion for wearing, wherein the transparent electrode comprises an oxide containing indium, and tin, wherein the solder material is bismuth - including indium alloy, wherein step (iv) In parallel with the step (iii) or after the step (iii), the indium contained in the transparent electrode is formed between the transparent electrode and the solder portion together with the formation of the solder portion. The present invention relates to a method for connecting circuit members , wherein a first alloy layer including bismuth contained in the solder portion is formed .

本発明の上記局面によれば、残留応力が小さく、かつ接続信頼性に優れた回路部材の接続構造を提供することができる。   According to the above aspect of the present invention, it is possible to provide a circuit member connection structure having small residual stress and excellent connection reliability.

本実施形態に係る接続構造を有する電子機器の一例である表示パネルの外観を示す斜視図である。It is a perspective view which shows the external appearance of the display panel which is an example of the electronic device which has the connection structure which concerns on this embodiment. 同表示パネルの要部の断面図である。It is sectional drawing of the principal part of the display panel. 図2の破線Xで囲まれた領域の拡大図である。FIG. 3 is an enlarged view of a region surrounded by a broken line X in FIG. 2. 同表示パネルの別の要部の断面の拡大図である。It is an enlarged view of the section of another important section of the display panel. 本実施形態に係る接続構造を製造するための接続方法の一例を示す工程図である。It is process drawing which shows an example of the connection method for manufacturing the connection structure which concerns on this embodiment. 実施例1で作製された回路部材の接続構造における、第1回路部材のガラス部分と、はんだ部と、第2回路部材の金属電極部分とを含む領域の電子顕微鏡写真である。It is an electron micrograph of the area | region containing the glass part of a 1st circuit member, the solder part, and the metal electrode part of a 2nd circuit member in the connection structure of the circuit member produced in Example 1. FIG. 透明電極とはんだ部との界面領域(第1合金層の形成領域)の電子顕微鏡写真である。It is an electron micrograph of the interface area | region (formation area | region of a 1st alloy layer) of a transparent electrode and a solder part. 金属電極とはんだ部との界面領域(第2合金層の形成領域)の電子顕微鏡写真である。It is an electron micrograph of the interface area | region (formation area | region of a 2nd alloy layer) of a metal electrode and a solder part. 透明電極とはんだ部と金属電極との接続構造の要部の模式図である。It is a schematic diagram of the principal part of the connection structure of a transparent electrode, a solder part, and a metal electrode.

以下、図面を参照しながら本発明の実施形態について説明する。ただし、以下の図面は、例示に過ぎず、本発明を限定するものではない。
本発明の実施形態に係る回路部材の接続構造は、透明電極を備えた第1主面を有する第1回路部材と、金属電極を備えた第2主面を有する第2回路部材と、第1主面と第2主面との間に介在する接合部とを備える。接合部は、樹脂部と、はんだ部とを有する。はんだ部は、透明電極と金属電極とを電気的に接続している。ここで、透明電極は、インジウム(In)と、スズ(Sn)とを含む酸化物を含む。一方、はんだ部は、ビスマス(Bi)と、インジウムとを含む。
Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the following drawings are only examples and do not limit the present invention.
A circuit member connection structure according to an embodiment of the present invention includes: a first circuit member having a first main surface provided with a transparent electrode; a second circuit member having a second main surface provided with a metal electrode; A joining portion interposed between the main surface and the second main surface. The joining portion has a resin portion and a solder portion. The solder part electrically connects the transparent electrode and the metal electrode. Here, the transparent electrode includes an oxide containing indium (In) and tin (Sn). On the other hand, the solder portion contains bismuth (Bi) and indium.

第1回路部材は、特に限定されないが、例えば、テレビ、タブレット、スマートフォン、ウェアラブルデバイスなどが具備する表示パネルに用いられる透明基板であり得る。透明基板は、半透明であってもよい。透明基板としては、ガラス基板およびフィルム状基板が挙げられる。フィルム状基板は、透明性を有する樹脂フィルムで形成されている。透明性を有する樹脂フィルムとしては、ポリエチレンテレフタレート(PET)、ポリカーボネート(PC)、ポリエチレンナフタレート(PEN)などのフィルムであり得る。第1主面は、第1回路部材の任意の主面であり得る。   Although a 1st circuit member is not specifically limited, For example, it may be a transparent substrate used for the display panel with which a television, a tablet, a smart phone, a wearable device, etc. are equipped. The transparent substrate may be translucent. Examples of the transparent substrate include a glass substrate and a film-like substrate. The film substrate is formed of a transparent resin film. The resin film having transparency may be a film of polyethylene terephthalate (PET), polycarbonate (PC), polyethylene naphthalate (PEN), or the like. The first main surface may be any main surface of the first circuit member.

第2回路部材は、特に限定されないが、例えば半導体チップ、電子部品パッケージ、フィルム基板、コネクタなどであり得る。第2主面は、第2回路部材の任意の主面であり得る。   The second circuit member is not particularly limited, and may be, for example, a semiconductor chip, an electronic component package, a film substrate, a connector, or the like. The second main surface can be any main surface of the second circuit member.

第1主面に備えられた透明電極は、インジウムとスズとを含む酸化物であればよく、インジウムおよびスズ以外の微量の第三の金属元素を含んでもよい。透明電極の代表例は、いわゆる酸化インジウムスズもしくはスズドープ酸化インジウム(IndiumTinOxide(ITO))電極である。   The transparent electrode provided on the first main surface may be an oxide containing indium and tin, and may contain a trace amount of a third metal element other than indium and tin. A typical example of the transparent electrode is a so-called indium tin oxide or tin-doped indium oxide (Indium Tin Oxide (ITO)) electrode.

第2主面に備えられた金属電極は、特に限定されないが、例えば、金、白金、銅、ニッケル、パラジウム、各種はんだなどを含む電極であり得る。金属電極を形成するはんだは、例えば、スズ、銀、ビスマス、インジウム、ニッケル、銅などを含むはんだであり得る。   Although the metal electrode provided in the 2nd main surface is not specifically limited, For example, it may be an electrode containing gold | metal | money, platinum, copper, nickel, palladium, various solders, etc. The solder forming the metal electrode can be, for example, a solder containing tin, silver, bismuth, indium, nickel, copper, and the like.

はんだ部は、ビスマスとインジウムとを含む。ビスマスとインジウムとは、合金(ビスマス−インジウム合金)を形成していることが望ましい。はんだ部は、ビスマス−インジウム合金以外の成分、例えばビスマス−インジウム合金を形成していない第三元素を含んでもよく、ビスマス単体の領域および/またはインジウム単体の領域を含んでもよい。ただし、均質で、強度に優れた信頼性の高いはんだ部を形成する観点から、はんだ部に含まれるビスマス−インジウム合金の量は97質量%以上が好ましく、99質量%以上がより好ましく、はんだ部全体がビスマス−インジウム合金で形成されていることが特に好ましい。   The solder portion contains bismuth and indium. It is desirable that bismuth and indium form an alloy (bismuth-indium alloy). The solder portion may include a component other than the bismuth-indium alloy, for example, a third element that does not form the bismuth-indium alloy, and may include a region of bismuth alone and / or a region of simple indium. However, the amount of the bismuth-indium alloy contained in the solder part is preferably 97% by mass or more, more preferably 99% by mass or more, from the viewpoint of forming a homogeneous and highly reliable solder part having high strength. It is particularly preferable that the whole is formed of a bismuth-indium alloy.

ビスマス−インジウム合金は、ビスマスおよびインジウム以外の微量の第三元素を、合金成分として含んでもよい。ただし、ビスマス−インジウム合金に含まれる第三元素の量は、1質量%以下であることが望ましい。すなわち、はんだ部は、合計99質量%以上のビスマスとインジウムを含むビスマス−インジウム合金(はんだ材料)の溶融と、その後の固化により形成されることが望ましい。   The bismuth-indium alloy may contain a trace amount of a third element other than bismuth and indium as an alloy component. However, the amount of the third element contained in the bismuth-indium alloy is desirably 1% by mass or less. That is, the solder portion is desirably formed by melting a bismuth-indium alloy (solder material) containing a total of 99% by mass or more of bismuth and indium and subsequent solidification.

なお、回路部材の接続構造を形成しているビスマス−インジウム合金を含む部分をはんだ部と称し、回路部材の接続構造を形成する前、すなわち電極間で溶融させる前のビスマス−インジウム合金を含む材料をはんだ材料と称する。   The portion containing the bismuth-indium alloy forming the circuit member connection structure is referred to as a solder portion, and the material containing the bismuth-indium alloy before forming the circuit member connection structure, that is, before melting between the electrodes. Is referred to as a solder material.

透明電極とはんだ部との間には、インジウムとビスマスとを含む第1合金層が形成されている。第1合金層は、概ね、透明電極に含まれていたインジウムと、はんだ部を形成するはんだ材料に含まれていたビスマスとで形成されている。第1合金層は、はんだ材料に含まれていたインジウムを含んでもよい。ただし、第1合金層は、はんだ部とは異なる合金により形成されている。通常、第1合金層の組成および/または組織は、はんだ部の組成および/または組織と異なっているため、第1合金層の存在は、各種分析方法、例えば走査型電子顕微鏡、透過型電子顕微鏡などにより確認することができる。 Between the transparent electrode and the solder section, that is formed first alloy layer comprising indium and bismuth. The first alloy layer is generally formed of indium contained in the transparent electrode and bismuth contained in the solder material forming the solder portion. The first alloy layer may include indium contained in the solder material. However, the first alloy layer is formed of an alloy different from the solder portion. Usually, since the composition and / or structure of the first alloy layer is different from the composition and / or structure of the solder part, the presence of the first alloy layer is determined by various analysis methods such as a scanning electron microscope and a transmission electron microscope. Etc. can be confirmed.

一方、金属電極とはんだ部との間には、金属電極に含まれていた金属成分と、はんだ部を形成するはんだ材料に含まれていたビスマスおよび/またはインジウムとを含む第2合金層が形成されていることが好ましい。すなわち、第2合金層には、金属電極に含まれる金属成分と共通の金属成分が含まれている。例えば、金属電極が、銅、ニッケルおよび金の3種の元素を含む場合、第2合金層には、銅、ニッケルおよび金よりなる群から選択される少なくとも1種が含まれる。   On the other hand, a second alloy layer containing a metal component contained in the metal electrode and bismuth and / or indium contained in the solder material forming the solder portion is formed between the metal electrode and the solder portion. It is preferable that That is, the second alloy layer includes a metal component common to the metal component included in the metal electrode. For example, when the metal electrode contains three elements of copper, nickel and gold, the second alloy layer contains at least one selected from the group consisting of copper, nickel and gold.

はんだ材料に含まれるインジウムは、展性に優れるため、はんだ材料と透明電極および金属電極との濡れ面積を大きくすることができる。一方、ビスマスは、溶融状態から固化するときに体積が膨張する異常液体である。はんだ材料がビスマスを含むことで、はんだ材料の固化の際に、透明電極との界面および金属電極との界面における圧力が高まるため、第1合金層および第2合金層を形成する反応が進行しやすくなる。   Since indium contained in the solder material is excellent in malleability, the wetted area between the solder material and the transparent electrode and the metal electrode can be increased. On the other hand, bismuth is an abnormal liquid whose volume expands when solidified from a molten state. Since the solder material contains bismuth, the pressure at the interface with the transparent electrode and the interface with the metal electrode is increased when the solder material is solidified, so that the reaction for forming the first alloy layer and the second alloy layer proceeds. It becomes easy.

はんだ材料を用いる場合、ACFを用いる場合に比べ、低い圧力で、電極間の電気的接続を達成することができる。例えば、電極間の接続に必要な圧力は、0.5〜4MPaであればよい。また、ビスマスおよびインジウムは、いずれも低融点金属であり、これらを含む合金は更に低融点である。そのため、電極間の接続に必要な温度も低温(例えば、はんだ材料の融点+10℃以下)でよい。よって、接続の際に、回路部材に印加される圧力と熱による応力を小さくすることができる。これにより、薄く、強度の低い回路部材を接続する場合でも、不具合が発生しにくく、高い信頼性を確保することができる。また、第1合金層と第2合金層が形成されることにより、はんだ部と各電極との接触面積は、高温下であっても、ほとんど減少しない。   When using a solder material, an electrical connection between electrodes can be achieved at a lower pressure than when using an ACF. For example, the pressure required for connection between the electrodes may be 0.5 to 4 MPa. Bismuth and indium are both low melting point metals, and alloys containing these have lower melting points. Therefore, the temperature necessary for the connection between the electrodes may be low (for example, the melting point of the solder material + 10 ° C. or less). Therefore, the stress caused by the pressure and heat applied to the circuit member at the time of connection can be reduced. Thereby, even when a thin and low-strength circuit member is connected, a malfunction is unlikely to occur, and high reliability can be ensured. Further, by forming the first alloy layer and the second alloy layer, the contact area between the solder portion and each electrode hardly decreases even at high temperatures.

樹脂部は、第1主面と第2主面とを接着するとともに、はんだ部の少なくとも一部を覆っている。これにより、はんだ部が補強され、接続構造の強度が向上する。また、電極間のピッチが狭い場合でも、隣接する電極間の絶縁を確保しやすくなる。例えば、樹脂部は、複数の透明電極と、複数の金属電極と、を接続する複数のはんだ部の隙間を埋めるように形成されることが望ましい。   The resin portion bonds the first main surface and the second main surface and covers at least a part of the solder portion. Thereby, a solder part is reinforced and the intensity | strength of a connection structure improves. In addition, even when the pitch between the electrodes is narrow, it is easy to ensure insulation between adjacent electrodes. For example, the resin part is desirably formed so as to fill in the gaps between the plurality of solder parts that connect the plurality of transparent electrodes and the plurality of metal electrodes.

樹脂部は、種々の添加剤を含んでもよい。添加剤としては、加熱により、はんだ材料や電極表面の酸化被膜を除去する活性剤、フィラー、樹脂成分の硬化剤などが挙げられる。樹脂成分は、特に限定されず、熱硬化性樹脂、光硬化性樹脂、熱可塑性樹脂などを用いることができる。中でも熱硬化性樹脂が好ましく、特にエポキシ樹脂やアクリル樹脂が好ましい。   The resin part may contain various additives. Examples of the additive include an activator for removing a solder material and an oxide film on the electrode surface by heating, a filler, a curing agent for a resin component, and the like. The resin component is not particularly limited, and a thermosetting resin, a photocurable resin, a thermoplastic resin, or the like can be used. Of these, thermosetting resins are preferable, and epoxy resins and acrylic resins are particularly preferable.

はんだ部に含まれるビスマス−インジウム合金に含まれるビスマスの量は、27質量%〜68質量%であることが好ましい。ビスマス−インジウム合金の残部は、ほとんど(残部の99質量%以上)がインジウムであることが好ましい。このようなビスマス−インジウム合金は、透明電極との濡れ性および接続信頼性が高く、かつ低融点である。はんだ部に含まれるビスマス−インジウム合金は、例えば、BiIn、BiInおよびBiInよりなる群から選択される少なくとも1種を含む。 The amount of bismuth contained in the bismuth-indium alloy contained in the solder portion is preferably 27% by mass to 68% by mass. Most of the balance of the bismuth-indium alloy (99% by mass or more of the balance) is preferably indium. Such a bismuth-indium alloy has high wettability and connection reliability with a transparent electrode, and has a low melting point. The bismuth-indium alloy contained in the solder portion includes, for example, at least one selected from the group consisting of BiIn 2 , Bi 3 In 5 and BiIn.

図1は、表示パネルの一例の外観を示す斜視図である。図示例の表示パネル100は、ガラス基板200と、ガラス基板300と、ガラス基板200とガラス基板300とで挟まれた画像形成部と、画像形成部を駆動する駆動ドライバ400と、表示パネル100を他の部品と接続するコネクタ500と、を具備する。駆動ドライバ400は、第1回路部材であるガラス基板200の一端に設けられた縁部200Tの一表面である第1主面200Sに搭載されている。コネクタ500は、第1主面200Sの別の位置に接続されている。図示例の表示パネル100の場合、駆動ドライバ400およびコネクタ500は、いずれも第2回路部材に相当する。   FIG. 1 is a perspective view showing an appearance of an example of a display panel. The display panel 100 in the illustrated example includes a glass substrate 200, a glass substrate 300, an image forming unit sandwiched between the glass substrate 200 and the glass substrate 300, a drive driver 400 that drives the image forming unit, and the display panel 100. And a connector 500 connected to other components. The drive driver 400 is mounted on the first main surface 200S that is one surface of the edge portion 200T provided at one end of the glass substrate 200 that is the first circuit member. Connector 500 is connected to another position on first main surface 200S. In the case of the display panel 100 in the illustrated example, both the drive driver 400 and the connector 500 correspond to the second circuit member.

図2は、表示パネル100の要部、すなわち第1回路部材であるガラス基板200と、第2回路部材である駆動ドライバ400と、これらの間に介在する接合部600Aと、を備える接続構造の縦断面図である。図3には、図2の破線Xで囲まれた領域の拡大図を示す。図2に示すように、ガラス基板200の第1主面200Sには、透明電極である複数の接続端子20aが形成されている。一方、駆動ドライバ400のガラス基板200との対向面は、第2主面400Sに相当する。   FIG. 2 shows a connection structure including a main part of the display panel 100, that is, a glass substrate 200 as a first circuit member, a drive driver 400 as a second circuit member, and a joint portion 600A interposed therebetween. It is a longitudinal cross-sectional view. FIG. 3 shows an enlarged view of a region surrounded by a broken line X in FIG. As shown in FIG. 2, a plurality of connection terminals 20 a that are transparent electrodes are formed on the first main surface 200 </ b> S of the glass substrate 200. On the other hand, the surface of the drive driver 400 facing the glass substrate 200 corresponds to the second main surface 400S.

複数の接続端子20aは、所定のピッチで第1主面200S上に配列している。一方、第2主面400Sには、金属電極である複数のバンプ40が、同様のピッチで配列している。駆動ドライバ400の複数のバンプ40は、複数の接続端子20aと対向するように位置合わせされている。第1主面200Sと第2主面400Sとの間には、接合部600Aが介在している。図3に示すように、接合部600Aは、通常、樹脂部61a、はんだ部62aおよび粒子状のはんだ材料63aを含む。   The plurality of connection terminals 20a are arranged on the first main surface 200S at a predetermined pitch. On the other hand, a plurality of bumps 40, which are metal electrodes, are arranged at the same pitch on the second main surface 400S. The plurality of bumps 40 of the drive driver 400 are aligned so as to face the plurality of connection terminals 20a. A joint 600A is interposed between the first main surface 200S and the second main surface 400S. As shown in FIG. 3, the joining portion 600A usually includes a resin portion 61a, a solder portion 62a, and a particulate solder material 63a.

はんだ部62aは、接続端子20aとバンプ40との電気的接続に貢献する部分であり、接続端子20aとバンプ40に濡れた状態で固化している。これにより、接続端子20aとはんだ部62aとの間には、図示されないが、接続端子20aに含まれていたインジウムとはんだ材料63aに含まれていたビスマスとを含む第1合金層が形成されている。また、バンプ40とはんだ部62aとの間には、バンプ40に含まれていた金属成分と、はんだ材料63aに含まれていたビスマスおよび/またはインジウムとを含む第2合金層が形成されている。一方、粒子状のはんだ材料63aは、接続端子20aとバンプ40との電気的接続には無関係である。   The solder part 62a is a part that contributes to the electrical connection between the connection terminal 20a and the bump 40, and is solidified in a wet state with the connection terminal 20a and the bump 40. As a result, a first alloy layer containing indium contained in the connection terminal 20a and bismuth contained in the solder material 63a is formed between the connection terminal 20a and the solder portion 62a. Yes. Further, a second alloy layer including a metal component contained in the bump 40 and bismuth and / or indium contained in the solder material 63a is formed between the bump 40 and the solder portion 62a. . On the other hand, the particulate solder material 63 a is irrelevant to the electrical connection between the connection terminal 20 a and the bump 40.

樹脂部61aは、第1主面200Sと第2主面400Sとを接着するとともに、はんだ部62aを覆って、はんだ部62aを保護する役割を果たしている。図示例では、両電極とはんだ部62aとの隙間を埋めるように樹脂部61aが形成されている。   The resin portion 61a serves to protect the solder portion 62a by bonding the first main surface 200S and the second main surface 400S and covering the solder portion 62a. In the illustrated example, a resin portion 61a is formed so as to fill a gap between both electrodes and the solder portion 62a.

図4は、表示パネル100の別の要部、すなわち第1回路部材であるガラス基板200と、第2回路部材であるコネクタ500と、これらの間に介在する接合部600Bと、を備える接続構造の縦断面の拡大図である。コネクタ500は、例えば、ポリイミド樹脂などで形成されたフレキシブルな基板と、その基板上に銅合金などで形成された配線パターンとを有する。   FIG. 4 shows a connection structure including another main part of the display panel 100, that is, a glass substrate 200 as a first circuit member, a connector 500 as a second circuit member, and a joint portion 600B interposed therebetween. It is an enlarged view of a longitudinal section. The connector 500 includes, for example, a flexible board formed of polyimide resin or the like, and a wiring pattern formed of copper alloy or the like on the board.

ガラス基板200の第1主面200Sには、所定のピッチで透明電極である複数の接続端子20bが配列している。一方、コネクタ500の第2主面500S(ガラス基板200との対向面)には、金属電極である複数のリード50が、同様のピッチで配列している。複数のリード50は、複数の接続端子20bと対向するように位置合わせされている。ガラス基板200の第1主面200Sと、コネクタ500の第2主面500Sとの間には、接合部600Bが介在している。   On the first main surface 200S of the glass substrate 200, a plurality of connection terminals 20b, which are transparent electrodes, are arranged at a predetermined pitch. On the other hand, on the second main surface 500S of the connector 500 (the surface facing the glass substrate 200), a plurality of leads 50, which are metal electrodes, are arranged at the same pitch. The plurality of leads 50 are aligned so as to face the plurality of connection terminals 20b. A joint 600B is interposed between the first main surface 200S of the glass substrate 200 and the second main surface 500S of the connector 500.

接合部600Bは、樹脂部61b、はんだ部62bおよび粒子状のはんだ材料63bを含み、各部は、接合部600Aと同様の構造を有する。よって、接続端子20bとはんだ部62bとの間には、図示されないが、接続端子20bに含まれていたインジウムとはんだ材料63bに含まれていたビスマスとを含む第1合金層が形成されている。また、リード50とはんだ部62bとの間には、リード50に含まれていた金属成分と、はんだ材料63bに含まれていたビスマスおよび/またはインジウムとを含む第2合金層が形成されている。   The joint portion 600B includes a resin portion 61b, a solder portion 62b, and a particulate solder material 63b, and each portion has the same structure as the joint portion 600A. Therefore, although not shown, a first alloy layer containing indium contained in the connection terminal 20b and bismuth contained in the solder material 63b is formed between the connection terminal 20b and the solder portion 62b. . Further, a second alloy layer including a metal component contained in the lead 50 and bismuth and / or indium contained in the solder material 63b is formed between the lead 50 and the solder portion 62b. .

次に、本発明の実施形態に係る回路部材の接続方法について説明する。
上記接続方法は、透明電極を備えた第1主面を有する第1回路部材と、金属電極を備えた第2主面を有する第2回路部材とを接続する方法である。
上記接続方法は、(i)接着剤と、接着剤に分散するはんだ材料とを含み、はんだ材料がビスマス−インジウム合金を含む接続材料を準備する工程を有する。
Next, the connection method of the circuit member which concerns on embodiment of this invention is demonstrated.
The connection method is a method of connecting a first circuit member having a first main surface with a transparent electrode and a second circuit member having a second main surface with a metal electrode.
The connection method includes (i) a step of preparing a connection material including an adhesive and a solder material dispersed in the adhesive, and the solder material includes a bismuth-indium alloy.

接着剤は、樹脂部の原料であり、例えば、熱硬化性樹脂、光硬化性樹脂または熱可塑性樹脂を含む樹脂組成物である。樹脂組成物は、既述のように、活性剤、フィラー、樹脂成分の硬化剤などを含むことができる。熱硬化性樹脂を用いる場合、その硬化温度は、特に限定されないが、はんだ材料の融点より高いことが望ましい。熱硬化性樹脂の硬化は、はんだ材料が溶融し、はんだ材料により透明電極および金属電極が濡れた後で完了することが望ましい。接続材料は、ペースト状でもよく、フィルム状でもよい。   The adhesive is a raw material for the resin part, and is, for example, a resin composition containing a thermosetting resin, a photocurable resin, or a thermoplastic resin. As described above, the resin composition can contain an activator, a filler, a curing agent for the resin component, and the like. When a thermosetting resin is used, the curing temperature is not particularly limited, but is preferably higher than the melting point of the solder material. The curing of the thermosetting resin is desirably completed after the solder material is melted and the transparent electrode and the metal electrode are wetted by the solder material. The connection material may be a paste or a film.

加熱により透明電極等の表面を還元する活性剤としては、有機酸、アミンの有機酸塩、アミンのハロゲン塩などを用いることができる。これらの中では、適度な活性を有することから有機酸が好ましい。有機酸としては、アジピン酸、アビエチン酸、セバシン酸、グルタル酸、4−フェニル酪酸、レブリン酸などを用いることができる。これらは1種を単独で用いてもよく、2種以上を任意に選択し、組み合わせて用いてもよい。   As an activator that reduces the surface of a transparent electrode or the like by heating, an organic acid, an organic acid salt of an amine, a halogen salt of an amine, or the like can be used. In these, since it has moderate activity, an organic acid is preferable. As the organic acid, adipic acid, abietic acid, sebacic acid, glutaric acid, 4-phenylbutyric acid, levulinic acid and the like can be used. One of these may be used alone, or two or more may be arbitrarily selected and used in combination.

はんだ材料に含まれるビスマス−インジウム合金は、例えば粒子状である。ビスマス−インジウム合金の粒子(以下、合金粒子)の大きさは、対応する透明電極と金属電極との導通を確保し、隣接する電極間の絶縁を確保する観点から選択する。一例を挙げると、合金粒子の大きさ(最大径)は、電極幅の1/5以下であることが望ましく、1/10以下であることがより望ましい。なお、はんだ材料は、ビスマス−インジウム合金以外の成分を含んでもよいが、95質量%以上がビスマス−インジウム合金であることが好ましく、98質量%以上がビスマス−インジウム合金であることが更に好ましい。   The bismuth-indium alloy contained in the solder material is, for example, in the form of particles. The size of the bismuth-indium alloy particles (hereinafter referred to as alloy particles) is selected from the viewpoint of ensuring electrical continuity between the corresponding transparent electrode and metal electrode and ensuring insulation between adjacent electrodes. As an example, the size (maximum diameter) of the alloy particles is desirably 1/5 or less of the electrode width, and more desirably 1/10 or less. The solder material may contain components other than the bismuth-indium alloy, but 95% by mass or more is preferably a bismuth-indium alloy, and 98% by mass or more is more preferably a bismuth-indium alloy.

はんだ材料に含まれるビスマス−インジウム合金は、融点(mp)72℃〜109℃であることが好ましく、融点85℃〜109℃であることが更に好ましく、融点88℃〜90℃であることが特に好ましい。これにより、電極間の接続を、例えば110℃以下、望ましくは100℃以下の低温で行うことができる。よって、回路部材に残留する熱による応力を顕著に低減することができる。   The bismuth-indium alloy contained in the solder material preferably has a melting point (mp) of 72 ° C. to 109 ° C., more preferably 85 ° C. to 109 ° C., and particularly preferably 88 ° C. to 90 ° C. preferable. Thereby, the connection between electrodes can be performed at a low temperature of, for example, 110 ° C. or less, desirably 100 ° C. or less. Therefore, the stress due to heat remaining on the circuit member can be remarkably reduced.

融点72℃〜109℃のビスマス−インジウム合金としては、例えば35Bi−65In(mp:72℃)、51Bi−49In(mp:85℃)、55Bi−45In(mp:89℃)、27Bi−73In(mp:100℃)、68Bi−32In(mp:109℃)などが挙げられる。ただし、XBi−YInは、X質量%のビスマスとY質量%のインジウムとを含む合金を意味する。   Examples of bismuth-indium alloys having a melting point of 72 ° C. to 109 ° C. include, for example, 35Bi-65In (mp: 72 ° C.), 51Bi-49In (mp: 85 ° C.), 55Bi-45In (mp: 89 ° C.), 27Bi-73In (mp : 100 ° C), 68Bi-32In (mp: 109 ° C), and the like. However, XBi-YIn means an alloy containing X mass% bismuth and Y mass% indium.

また、電気的接続の信頼性を高める観点から、はんだ材料に含まれるビスマス−インジウム合金において、ビスマス−インジウム合金に含まれるインジウムの量は、32質量%〜73質量%が好ましく、32質量%〜49質量%が更に好ましく、43質量%〜47質量%が特に好ましい。   Further, from the viewpoint of improving the reliability of electrical connection, in the bismuth-indium alloy contained in the solder material, the amount of indium contained in the bismuth-indium alloy is preferably 32% by mass to 73% by mass, and 32% by mass to 49 mass% is still more preferable and 43 mass%-47 mass% are especially preferable.

接着剤とはんだ材料とを含む接続材料において、はんだ材料の量は、例えば5質量%〜80質量%であればよい。はんだ材料の量を上記範囲に設定することで、透明電極と金属電極との高い接続信頼性と、隣接する電極間の絶縁の確実な確保とを両立することが容易となる。   In the connection material including the adhesive and the solder material, the amount of the solder material may be, for example, 5% by mass to 80% by mass. By setting the amount of the solder material in the above range, it becomes easy to achieve both high connection reliability between the transparent electrode and the metal electrode and reliable securing of insulation between adjacent electrodes.

次に、上記接続方法は、(ii)接続材料を介して透明電極と金属電極とが対向するように、第1回路部材と第2回路部材とを配置する工程を有する。ただし、透明電極は、インジウムとスズとを含む酸化物を含む。   Next, the connection method includes (ii) a step of arranging the first circuit member and the second circuit member so that the transparent electrode and the metal electrode face each other with the connection material interposed therebetween. However, the transparent electrode includes an oxide containing indium and tin.

例えば、第1回路部材の第1主面の透明電極の少なくとも一部を覆う領域(以下、第1接続領域)に、接続材料を配置する。接続材料が未硬化または半硬化状態の熱硬化性樹脂や未硬化の光硬化性樹脂を含むペースト状であれば、印刷装置、ディスペンサ、インクジェットノズルなどを用い、第1接続領域に接続材料を塗布すればよい。接続材料がフィルム状もしくはテープ状であれば、基材から所定形状に切り出された当該フィルムを剥がし、第1接続領域に圧着すればよい。このような操作は、例えば公知のテープ貼り付け装置により行われる。なお、第2回路部材の第2主面の金属電極の少なくとも一部を覆う領域(第2接続領域)に、接続材料を配置してもよく、第1および第2接続領域の両方に配置してもよい。これにより、第1回路部材と第2回路部材とが対向配置された積層構造が得られる。   For example, the connection material is disposed in a region (hereinafter referred to as a first connection region) that covers at least a part of the transparent electrode on the first main surface of the first circuit member. If the connection material is a paste containing an uncured or semi-cured thermosetting resin or an uncured photo-curing resin, the connection material is applied to the first connection region using a printing device, a dispenser, an inkjet nozzle, or the like. do it. If the connection material is in the form of a film or tape, the film cut into a predetermined shape from the substrate may be peeled off and crimped to the first connection region. Such an operation is performed by, for example, a known tape attaching device. Note that the connection material may be disposed in a region (second connection region) covering at least a part of the metal electrode on the second main surface of the second circuit member, and disposed in both the first and second connection regions. May be. Thereby, a laminated structure in which the first circuit member and the second circuit member are arranged to face each other is obtained.

図5(a)〜図5(b)に、透明電極20を備えた第1回路部材200の第1接続領域に接続材料600Pを配置する様子の一例を示す。また、図5(c)に、接続材料600Pを介して第2回路部材400(500)を第1回路部材200に配置する様子の一例を示す。図示例では、吸着ツール700により保持された第2回路部材400(500)が第1回路部材200に搭載されている。このとき、透明電極20と金属電極40(50)とが対向するように位置合わせが行われる。   FIG. 5A to FIG. 5B show an example of a state in which the connection material 600 </ b> P is disposed in the first connection region of the first circuit member 200 provided with the transparent electrode 20. FIG. 5C shows an example of a state in which the second circuit member 400 (500) is arranged on the first circuit member 200 through the connection material 600P. In the illustrated example, the second circuit member 400 (500) held by the suction tool 700 is mounted on the first circuit member 200. At this time, alignment is performed so that the transparent electrode 20 and the metal electrode 40 (50) face each other.

接着剤が熱硬化性樹脂を含む場合には、第1回路部材と第2回路部材とを対向配置する際に、接続材料600Pを短時間だけ加熱する仮圧着を行ってもよい。これにより、第1回路部材と第2回路部材との位置ずれを防止することができる。仮圧着は、例えばヒーターなどの加熱手段を具備する吸着ツール700により、第2回路部材(または第1回路部材)を介して、はんだ材料が溶融せず、かつ接着剤が僅かに硬化する程度の加熱を接続材料600Pに対して行えばよい。   When the adhesive contains a thermosetting resin, temporary bonding may be performed by heating the connection material 600P for a short time when the first circuit member and the second circuit member are arranged to face each other. Thereby, position shift with the 1st circuit member and the 2nd circuit member can be prevented. Temporary crimping is such that the solder material is not melted and the adhesive is slightly cured through the second circuit member (or the first circuit member) by the suction tool 700 having heating means such as a heater, for example. Heating may be performed on the connection material 600P.

仮圧着の際、第1回路部材および/または第2回路部材を押圧する圧力は、例えば0.5〜1.0MPaであればよい。仮圧着の時間は、例えば0.1〜1秒間程度であればよい。仮圧着の温度は、例えばはんだ材料の融点より10℃低い温度以下であればよい。   The pressure which presses the 1st circuit member and / or the 2nd circuit member in the case of temporary pressure bonding should just be 0.5-1.0 MPa, for example. Temporary press-bonding time may be about 0.1 to 1 second, for example. The temperature of temporary press-bonding may be, for example, 10 ° C. or lower than the melting point of the solder material.

次に、上記接続方法では、(iii)第2回路部材を第1回路部材に対して押圧しながら加熱して、はんだ材料を溶融させる工程が行われる。その後、加熱が停止され、溶融したはんだ材料は固化する。これにより、透明電極と金属電極とを電気的に接続するはんだ部が形成される。なお、第2回路部材を第1回路部材に対して押圧すると、第1回路部材も第2回路部材に対して押圧されることになる。つまり、どちらの回路部材に押圧のためのツールを押し当ててもよい。   Next, in the above connection method, (iii) a step of heating the second circuit member against the first circuit member while heating it to melt the solder material is performed. Thereafter, heating is stopped and the molten solder material is solidified. Thereby, the solder part which electrically connects a transparent electrode and a metal electrode is formed. When the second circuit member is pressed against the first circuit member, the first circuit member is also pressed against the second circuit member. In other words, a pressing tool may be pressed against either circuit member.

上記工程(iii)は、いわゆる熱圧着の工程である。熱圧着の際、第1回路部材および/または第2回路部材を加熱する温度は、接続材料に含まれるはんだ材料の融点以上であればよく、融点以上かつ融点+10℃以下の温度であればよい。例えば、はんだ材料に含まれるビスマス−インジウム合金の融点88℃〜90℃であれば、加熱温度は90℃以上、100℃以下であればよい。これにより、ACFを用いる場合に比べ、飛躍的に加熱温度を低減することができる。   The step (iii) is a so-called thermocompression bonding step. The temperature for heating the first circuit member and / or the second circuit member at the time of thermocompression bonding may be not less than the melting point of the solder material included in the connection material, and may be a temperature not less than the melting point and not more than the melting point + 10 ° C. . For example, if the melting point of the bismuth-indium alloy contained in the solder material is 88 ° C to 90 ° C, the heating temperature may be 90 ° C or higher and 100 ° C or lower. Thereby, compared with the case where ACF is used, heating temperature can be reduced drastically.

熱圧着の際、第1回路部材および/または第2回路部材を押圧する圧力は、0.5〜4MPaであればよく、1〜2MPa程度が望ましい。はんだ材料が溶融しているため、あまり高い圧力を回路部材に印加しなくても、電極とはんだ材料との濡れにより、電気的接続を容易に確保できるからである。これにより、ACFを用いる場合に比べ、回路部材に印加される圧力を飛躍的に低減することができる。   During thermocompression bonding, the pressure for pressing the first circuit member and / or the second circuit member may be 0.5 to 4 MPa, and preferably about 1 to 2 MPa. This is because, since the solder material is melted, electrical connection can be easily ensured by wetting between the electrode and the solder material without applying a very high pressure to the circuit member. Thereby, compared with the case where ACF is used, the pressure applied to a circuit member can be reduced dramatically.

なお、熱圧着の時間は、特に限定されないが、0.5〜10秒間程度、更には1〜5秒間程度であることが、製造コストの面で望ましい。   The time for thermocompression bonding is not particularly limited, but is preferably about 0.5 to 10 seconds, and more preferably about 1 to 5 seconds from the viewpoint of manufacturing cost.

図5(d)に、第1回路部材200と第2回路部材400(500)とを熱圧着する様子の一例を示す。ここでは、ステージ900上で、熱圧着ツール800により、熱圧着が行われる場合を示す。その後、熱圧着ツール800を第2回路部材400(500)から離すことで、加熱が停止され、はんだが固化し、透明電極40と金属電極50とを電気的に接続するはんだ部が形成される。   FIG. 5D shows an example of a state in which the first circuit member 200 and the second circuit member 400 (500) are thermocompression bonded. Here, the case where thermocompression bonding is performed on the stage 900 by the thermocompression bonding tool 800 is shown. Then, heating is stopped by separating the thermocompression bonding tool 800 from the second circuit member 400 (500), the solder is solidified, and a solder portion that electrically connects the transparent electrode 40 and the metal electrode 50 is formed. .

熱圧着の進行中に、透明電極とはんだ材料との界面では、透明電極に含まれていたインジウムと、はんだ材料に含まれていたビスマスとの反応が進行し、第1合金層が形成される。第1合金層は、ビスマスとインジウムとを含む点では、はんだ部と共通する。一方、第1合金層は、はんだ部とは異なる合金を含み、この合金は、例えば組成および/または組織がはんだ部とは異なる。通常、透明電極とはんだ材料との反応は、進行しにくいと考えられている。ところが、上記のように融点の低いビスマス−インジウム合金をはんだ材料として用いる場合には、第1合金層が形成される。第1合金層の存在は、はんだ部と透明電極との界面の断面を拡大すれば、目視でも確認することができる。   During the thermocompression bonding, the reaction between indium contained in the transparent electrode and bismuth contained in the solder material proceeds at the interface between the transparent electrode and the solder material, and a first alloy layer is formed. . The first alloy layer is common to the solder portion in that it contains bismuth and indium. On the other hand, the first alloy layer includes an alloy different from the solder part, and this alloy has a composition and / or structure different from that of the solder part, for example. Usually, it is considered that the reaction between the transparent electrode and the solder material hardly proceeds. However, when a bismuth-indium alloy having a low melting point is used as a solder material as described above, a first alloy layer is formed. The presence of the first alloy layer can be confirmed visually by enlarging the cross section of the interface between the solder portion and the transparent electrode.

同様に、金属電極とはんだ材料との界面では、金属電極に含まれていた金属成分と、はんだ材料に含まれていたビスマスおよび/またはインジウムとの反応が進行し、第2合金層が形成される。第2合金層の存在についても、はんだ部と金属電極との界面の断面を拡大すれば、目視で確認することができる。   Similarly, at the interface between the metal electrode and the solder material, the reaction between the metal component contained in the metal electrode and bismuth and / or indium contained in the solder material proceeds to form a second alloy layer. The The presence of the second alloy layer can also be confirmed visually by enlarging the cross section of the interface between the solder part and the metal electrode.

上記接続方法では、(iv)接着剤を硬化させて、第1回路部材と第2回路部材とを接着する樹脂部を形成する工程が行われる。工程(iv)は、工程(iii)の熱圧着と並行して行うこともできる。例えば、接着剤が熱硬化性樹脂を含む場合には、熱圧着の際に、熱硬化性樹脂の硬化反応を進行させて、接着剤を硬化させることができる。このとき、硬化が不十分であれば、その後、アフターキュアを行ってもよい。また、接着剤が熱可塑性樹脂を含む場合には、熱圧着の際に、熱可塑性樹脂を溶融させ、第1回路部材の第1主面と第2回路部材の第2主面に溶着させ、その後、固化(硬化)させてもよい。更に、接着剤が光硬化性樹脂を含む場合には、例えば透明性を有する第1回路部材側から接着剤に電磁波や光を照射すればよい。ただし、電磁波や光の照射は、はんだ材料が溶融した後で行うことが望ましい。以上の場合、熱圧着の終了により、樹脂部とはんだ部とを有する接合部が形成される。   In the above connection method, (iv) a step of curing the adhesive to form a resin portion that bonds the first circuit member and the second circuit member is performed. Step (iv) can also be performed in parallel with the thermocompression bonding in step (iii). For example, when the adhesive contains a thermosetting resin, the thermosetting resin can be allowed to cure by proceeding with the curing reaction of the thermosetting resin during thermocompression bonding. At this time, after curing, after-curing may be performed. When the adhesive contains a thermoplastic resin, the thermoplastic resin is melted during thermocompression bonding and welded to the first main surface of the first circuit member and the second main surface of the second circuit member. Thereafter, it may be solidified (cured). Further, when the adhesive contains a photocurable resin, for example, the adhesive may be irradiated with electromagnetic waves or light from the transparent first circuit member side. However, it is desirable that the irradiation with electromagnetic waves or light be performed after the solder material is melted. In the above case, a joint portion having a resin portion and a solder portion is formed by the end of thermocompression bonding.

第1回路部材と第2回路部材との接着が、工程(iii)の熱圧着と並行して進行しない場合には、工程(iii)の後、第1回路部材および第2回路部材とともに接着剤を加熱したり、接着剤に第1回路部材側から電磁波や光を照射したりして、第1回路部材と第2回路部材との接着を完了させればよい。   If the bonding between the first circuit member and the second circuit member does not proceed in parallel with the thermocompression bonding in the step (iii), the adhesive together with the first circuit member and the second circuit member after the step (iii). May be heated, or the adhesive may be irradiated with electromagnetic waves or light from the first circuit member side to complete the adhesion between the first circuit member and the second circuit member.

次に、本発明を実施例に基づいて、更に具体的に説明する。ただし、本発明は以下の実施例に限定されるものではない。
《実施例1》
(接続材料)
はんだ材料として、ビスマス−インジウム合金(55Bi−45In(mp:89℃))の合金粒子を準備した。合金粒子の平均粒径は3μm、最大粒径は5μmであった。一方、ビスフェノールA型エポキシ樹脂150質量部と、硬化剤であるイミダゾール25質量部と、活性剤であるアジピン酸20質量部とを含む熱硬化性樹脂組成物を、接着剤として調製した。熱硬化性樹脂組成物の組成は、80℃以上に加熱されたときに、迅速に硬化するように配合した。次に、熱硬化性樹脂組成物100質量部に、合金粒子20質量部を分散させて、ペースト状の接続材料を調製した。
Next, the present invention will be described more specifically based on examples. However, the present invention is not limited to the following examples.
Example 1
(Connection material)
As a solder material, alloy particles of a bismuth-indium alloy (55Bi-45In (mp: 89 ° C.)) were prepared. The average particle size of the alloy particles was 3 μm, and the maximum particle size was 5 μm. On the other hand, a thermosetting resin composition containing 150 parts by mass of a bisphenol A type epoxy resin, 25 parts by mass of imidazole as a curing agent, and 20 parts by mass of adipic acid as an activator was prepared as an adhesive. The composition of the thermosetting resin composition was blended so as to be rapidly cured when heated to 80 ° C. or higher. Next, 20 parts by mass of alloy particles were dispersed in 100 parts by mass of the thermosetting resin composition to prepare a paste-like connection material.

(第1回路部材)
厚さ0.3mmで矩形(30mm×30mmサイズ)のガラス基板の一方の表面(第1主面)に、透明電極として、幅50μmの複数のITO電極(厚さ1500Å)をストライプ状に形成した。ITO電極のピッチは0.1mmとした。
(First circuit member)
A plurality of ITO electrodes (thickness: 1500 mm) having a width of 50 μm were formed as stripes on one surface (first main surface) of a glass substrate having a thickness of 0.3 mm and a rectangle (30 mm × 30 mm size). . The pitch of the ITO electrodes was 0.1 mm.

(第2回路部材)
厚さ32μmで矩形(16mm×35mmサイズ)のポリイミド樹脂製のフィルム基板(FPC)を準備した。FPCの一方の表面(第2主面)には、透明電極と対応する幅50μmの複数の金属電極(高さ15μm)を形成した。金属電極は、銅(Cu)製ベース電極の表面に、リンを含むニッケル(Ni)メッキと金(Au)メッキとを順次に施したものである。
(Second circuit member)
A film substrate (FPC) made of polyimide resin having a thickness of 32 μm and a rectangle (16 mm × 35 mm size) was prepared. On one surface (second main surface) of the FPC, a plurality of metal electrodes (height 15 μm) having a width of 50 μm corresponding to the transparent electrodes were formed. The metal electrode is obtained by sequentially performing nickel (Ni) plating containing phosphorus and gold (Au) plating on the surface of a copper (Cu) base electrode.

(回路部材の熱圧着による接続)
第1回路部材の第1主面のITO電極が形成されている第1接続領域に、印刷装置を用いて、接続材料を厚さ30μmになるように印刷した。その後、第2回路部材の金属電極が形成されている第2接続領域を、接続材料の塗膜を介して、ITO電極を備えた第1接続領域と対向させ、第1回路部材と第2回路部材との積層構造を得た。
(Connection of circuit members by thermocompression bonding)
A connection material was printed to a thickness of 30 μm using a printing device on the first connection region where the ITO electrode on the first main surface of the first circuit member was formed. Thereafter, the second connection region in which the metal electrode of the second circuit member is formed is opposed to the first connection region having the ITO electrode through the coating film of the connection material, and the first circuit member and the second circuit A laminated structure with the member was obtained.

次に、平坦面を有する熱圧着ツールを用いて、第2回路部材を第1回路部材に対して1.0MPaの圧力で押圧しながら、100℃で10秒間加熱し、はんだ材料を溶融させると同時に接着剤(熱硬化性樹脂組成物)を硬化させた。その後、加熱を停止して、はんだ材料を固化させ、透明電極と金属電極とを電気的に接続するはんだ部を形成した。こうして、第1回路部材と第2回路部材との接続構造(サンプル構造体)を完成させた。   Next, using a thermocompression bonding tool having a flat surface, while pressing the second circuit member against the first circuit member at a pressure of 1.0 MPa, heating at 100 ° C. for 10 seconds to melt the solder material At the same time, the adhesive (thermosetting resin composition) was cured. Then, heating was stopped, the solder material was solidified, and the solder part which electrically connects a transparent electrode and a metal electrode was formed. Thus, a connection structure (sample structure) between the first circuit member and the second circuit member was completed.

[評価]
サンプル構造体を、その積層方向と平行に、透明電極と、はんだ部と、金属電極とを含む断面で切断し、断面を走査型電子顕微鏡(SEM:日立ハイテクノロジーズ株式会社製、品番SU−70)で観察した。図6に、第1回路部材のガラス基板と、はんだ部と、第2回路部材の金属電極とを含む領域の電子顕微鏡写真を示す。また、図7に、透明電極とはんだ部との界面領域(第1合金層の形成領域)の拡大写真を示す。図8には、金属電極とはんだ部との界面領域(第2合金層の形成領域)の拡大写真を示す。一方、図9には、透明電極とはんだ部と金属電極との接続構造の要部を模式図で示す。
[Evaluation]
The sample structure was cut in a cross section including a transparent electrode, a solder portion, and a metal electrode in parallel with the stacking direction, and the cross section was scanned with an electron microscope (SEM: manufactured by Hitachi High-Technologies Corporation, product number SU-70). ). In FIG. 6, the electron micrograph of the area | region containing the glass substrate of a 1st circuit member, a solder part, and the metal electrode of a 2nd circuit member is shown. FIG. 7 shows an enlarged photograph of the interface region between the transparent electrode and the solder portion (region where the first alloy layer is formed). In FIG. 8, the enlarged photograph of the interface area | region (formation area | region of a 2nd alloy layer) of a metal electrode and a solder part is shown. On the other hand, in FIG. 9, the principal part of the connection structure of a transparent electrode, a solder part, and a metal electrode is shown with a schematic diagram.

図6では、薄い透明電極を明瞭に認識することは困難である。ただし、はんだ部が、第1回路部材のガラス基板と第2回路部材の金属電極との間に介在して、両者を接続している様子が明確に把握できる。   In FIG. 6, it is difficult to clearly recognize the thin transparent electrode. However, it can be clearly understood that the solder portion is interposed between the glass substrate of the first circuit member and the metal electrode of the second circuit member to connect them.

図7は、図6よりも高倍率な透明電極(ITO電極)とはんだ部との界面領域の画像であり、ITO電極の存在が確認できる。また、ITO電極とはんだ部との界面にBiとInとを含む第1合金層が形成されていることが認識できる。   FIG. 7 is an image of the interface region between the transparent electrode (ITO electrode) and the solder portion with a higher magnification than that in FIG. 6, and the presence of the ITO electrode can be confirmed. In addition, it can be recognized that the first alloy layer containing Bi and In is formed at the interface between the ITO electrode and the solder portion.

図8は、図6よりも高倍率な金属電極とはんだ部との界面領域の画像であり、金属電極とはんだ部との界面にBiとInとAuとを含む第2合金層が形成されていることが認識できる。   FIG. 8 is an image of the interface region between the metal electrode and the solder part at a higher magnification than that in FIG. 6, and the second alloy layer containing Bi, In, and Au is formed at the interface between the metal electrode and the solder part. It can be recognized that

以上より、接続構造の断面は、図9に示すような複層構造を有することが確認された。すなわち、ITO電極とはんだ部との間には、第1合金層が形成され、金属電極とはんだ部との間には、第2合金層が形成されている。これにより、高温下でも、ITO電極とはんだ部との接触面積および/または金属電極とはんだ部との接触面積が減少することはないと考えられる。また、1.0MPaの圧力で、100℃で10秒間の熱圧着が行われていることから、接続構造が有する残留応力は小さくなっている。よって、薄いガラス基板を用いる場合でも、ACFを用いる場合のような不具合は生じにくいものと考えられる。   From the above, it was confirmed that the cross section of the connection structure had a multilayer structure as shown in FIG. That is, a first alloy layer is formed between the ITO electrode and the solder part, and a second alloy layer is formed between the metal electrode and the solder part. Thereby, even under high temperature, it is considered that the contact area between the ITO electrode and the solder part and / or the contact area between the metal electrode and the solder part does not decrease. Further, since thermocompression bonding is performed at 100 ° C. for 10 seconds at a pressure of 1.0 MPa, the residual stress of the connection structure is small. Therefore, even when a thin glass substrate is used, it is considered that problems such as when using ACF are unlikely to occur.

本発明の回路部材の接続構造、接続方法および接続材料は、ACFを用いる技術の代替技術として有用であり、より低い圧力と低温で、接続構造を達成することが可能である。よって、薄いガラス基板のように、機械的強度の小さい回路部材を含む接続構造を形成する場合、例えばタブレット、スマートフォンなどが具備する小型の液晶を製造する場合に、特に有用である。   The circuit member connection structure, connection method, and connection material of the present invention are useful as an alternative technique of the technique using ACF, and can achieve the connection structure at lower pressure and lower temperature. Therefore, it is particularly useful when forming a connection structure including a circuit member with low mechanical strength, such as a thin glass substrate, for example, when manufacturing a small liquid crystal included in a tablet, a smartphone, or the like.

20:透明電極(接続端子)、40:金属電極(バンプ)、50:金属電極(リード)、61a,61b:樹脂部、62a,62b:はんだ部、63a,63b:はんだ材料、100:表示パネル、200:第1回路部材(ガラス基板)、200T:縁部、200S:第1主面、300:表示制御部、400:第2回路部材(駆動デバイス)、400S:第2主面、500:第2回路部材(コネクタ)、500S:第2主面、600A,600B:接合部、600P:接続材料、700:吸着ツール、800:熱圧着ツール、900:ステージ

20: Transparent electrode (connection terminal), 40: Metal electrode (bump), 50: Metal electrode (lead), 61a, 61b: Resin part, 62a, 62b: Solder part, 63a, 63b: Solder material, 100: Display panel , 200: first circuit member (glass substrate), 200T: edge, 200S: first main surface, 300: display control unit, 400: second circuit member (driving device), 400S: second main surface, 500: Second circuit member (connector), 500S: second main surface, 600A, 600B: joint, 600P: connection material, 700: adsorption tool, 800: thermocompression tool, 900: stage

Claims (22)

透明電極を備えた第1主面を有する第1回路部材と、
金属電極を備えた第2主面を有する第2回路部材と、
前記第1主面と前記第2主面との間に介在する接合部と、を備え、
前記接合部は、樹脂部と、はんだ部と、を有し、
前記はんだ部は、前記透明電極と前記金属電極とを電気的に接続しており、
前記透明電極は、インジウムと、スズと、を含む酸化物を含み、
前記はんだ部は、ビスマス−インジウム合金を含み、
前記透明電極と前記はんだ部との間に、インジウムとビスマスとを含み、前記はんだ部とは異なる第1合金層を有する、回路部材の接続構造。
A first circuit member having a first major surface with a transparent electrode;
A second circuit member having a second major surface with a metal electrode;
A joint portion interposed between the first main surface and the second main surface,
The joint has a resin part and a solder part,
The solder part electrically connects the transparent electrode and the metal electrode,
The transparent electrode includes an oxide containing indium and tin,
The solder portion includes a bismuth-indium alloy,
A circuit member connection structure including indium and bismuth between the transparent electrode and the solder portion, and having a first alloy layer different from the solder portion .
前記樹脂部は、前記第1主面と前記第2主面とを接着するとともに、前記はんだ部の少なくとも一部を覆っている、請求項1に記載の回路部材の接続構造。 The circuit member connection structure according to claim 1 , wherein the resin portion adheres the first main surface and the second main surface and covers at least a part of the solder portion. 前記はんだ部に含まれるビスマスおよびインジウムの合計量が、97質量%以上である、請求項1または2に記載の回路部材の接続構造。  The circuit member connection structure according to claim 1 or 2, wherein a total amount of bismuth and indium contained in the solder portion is 97 mass% or more. 前記ビスマス−インジウム合金に含まれるインジウムの量が、32質量%〜73質量%である、請求項1〜3のいずれか一項に記載の回路部材の接続構造。The circuit member connection structure according to any one of claims 1 to 3, wherein an amount of indium contained in the bismuth-indium alloy is 32 mass% to 73 mass%. 前記ビスマス−インジウム合金が、BiIn、BiInおよびBiInよりなる群から選択される少なくとも1種を含む、請求項1〜のいずれか一項に記載の回路部材の接続構造。 The bismuth - indium alloy, BiIn 2, Bi 3 In 5 and BiIn comprises at least one member selected from the group consisting of, a circuit member connection structure according to any one of claims 1-4. 前記はんだ部は、融点72℃〜109℃のビスマス−インジウム合金を含むはんだ材料により形成されたものである、請求項1〜のいずれか一項に記載の回路部材の接続構造。 The solder portion has a melting point 72 ° C. to 109 ° C. bismuth - is one formed by a solder material containing indium alloy, a circuit member connection structure according to any one of claims 1-5. 前記はんだ部は、融点85℃〜109℃のビスマス−インジウム合金を含むはんだ材料により形成されたものである、請求項1〜のいずれか一項に記載の回路部材の接続構造。 The circuit member connection structure according to any one of claims 1 to 5 , wherein the solder portion is formed of a solder material containing a bismuth-indium alloy having a melting point of 85C to 109C. 前記はんだ部は、融点88℃〜90℃のビスマス−インジウム合金を含むはんだ材料により形成されたものである、請求項1〜のいずれか一項に記載の回路部材の接続構造。 The circuit member connection structure according to any one of claims 1 to 5 , wherein the solder portion is formed of a solder material containing a bismuth-indium alloy having a melting point of 88C to 90C. 透明電極を備えた第1主面を有する第1回路部材と、
金属電極を備えた第2主面を有する第2回路部材と、
前記第1主面と前記第2主面との間に介在する接合部と、を備え、
前記接合部は、樹脂部と、はんだ部と、を有し、
前記はんだ部は、前記透明電極と前記金属電極とを電気的に接続しており、
前記透明電極は、インジウムと、スズと、を含む酸化物を含み、
前記はんだ部は、ビスマス−インジウム合金を含み、
前記透明電極と前記はんだ部との間に、インジウムとビスマスとを含み、前記はんだ部とは異なる第1合金層を有し、
前記金属電極と前記はんだ部との間に、前記金属電極に含まれる金属成分と共通の金属成分と、ビスマスおよび/またはインジウムとを含む第2合金層を有する、回路部材の接続構造。
A first circuit member having a first major surface with a transparent electrode;
A second circuit member having a second major surface with a metal electrode;
A joint portion interposed between the first main surface and the second main surface,
The joint has a resin part and a solder part,
The solder part electrically connects the transparent electrode and the metal electrode,
The transparent electrode includes an oxide containing indium and tin,
The solder portion includes a bismuth-indium alloy,
Between the transparent electrode and the solder part, including indium and bismuth, having a first alloy layer different from the solder part,
The connection structure of a circuit member which has the 2nd alloy layer containing the metal component and common metal component which are contained in the said metal electrode, and bismuth and / or indium between the said metal electrode and the said solder part .
前記金属電極が金を含み、  The metal electrode comprises gold;
前記第2合金層は、ビスマスとインジウムと金とを含み、  The second alloy layer includes bismuth, indium, and gold,
前記第2合金層は、前記はんだ部との界面に凹凸を備える、請求項9に記載の回路部材の接続構造。  The circuit member connection structure according to claim 9, wherein the second alloy layer includes unevenness at an interface with the solder portion.
透明電極を備えた第1主面を有する第1回路部材と、
金属電極を備えた第2主面を有する第2回路部材と、を接続する、回路部材の接続方法であって、
(i)接着剤と、前記接着剤に分散するはんだ材料と、を含む接続材料を準備する工程と、
(ii)前記接続材料を介して前記透明電極と前記金属電極とが対向するように、前記第1回路部材と前記第2回路部材とを配置する工程と、
(iii)前記第2回路部材を前記第1回路部材に対して押圧しながら加熱して、前記はんだ材料を溶融させた後、前記加熱を停止して、前記溶融したはんだ材料を固化することにより、前記透明電極と前記金属電極とを電気的に接続するはんだ部を形成する工程と、
(iv)前記接着剤を硬化させて、前記第1回路部材と前記第2回路部材とを接着する樹脂部を形成する工程と、を有し、
前記透明電極は、インジウムと、スズと、を含む酸化物を含み、前記はんだ材料は、ビスマス−インジウム合金を含み、
前記工程(iv)は、前記工程(iii)と並行して、あるいは、前記工程(iii)の後に行われ、
前記はんだ部の形成とともに、
前記透明電極と前記はんだ部との間に、前記透明電極に含まれるインジウムと、前記はんだ部に含まれるビスマスと、を含む第1合金層を形成する、回路部材の接続方法。
A first circuit member having a first major surface with a transparent electrode;
A circuit member connection method for connecting a second circuit member having a second main surface with a metal electrode,
(I) preparing a connection material including an adhesive and a solder material dispersed in the adhesive;
(Ii) disposing the first circuit member and the second circuit member so that the transparent electrode and the metal electrode face each other with the connection material interposed therebetween;
(Iii) by heating the second circuit member while pressing against the first circuit member to melt the solder material, and then stopping the heating to solidify the molten solder material Forming a solder portion for electrically connecting the transparent electrode and the metal electrode;
(Iv) curing the adhesive to form a resin portion that adheres the first circuit member and the second circuit member;
The transparent electrode includes an oxide including indium and tin, and the solder material includes a bismuth-indium alloy,
The step (iv) is performed in parallel with the step (iii) or after the step (iii).
Along with the formation of the solder part,
A method for connecting circuit members , wherein a first alloy layer including indium contained in the transparent electrode and bismuth contained in the solder portion is formed between the transparent electrode and the solder portion .
前記はんだ材料に含まれるビスマスおよびインジウムの合計量が、95質量%以上である、請求項11に記載の回路部材の接続方法。  The circuit member connection method according to claim 11, wherein the total amount of bismuth and indium contained in the solder material is 95% by mass or more. 前記はんだ材料が、融点72℃〜109℃のビスマス−インジウム合金を含む、請求項11または12に記載の回路部材の接続方法。 The method for connecting circuit members according to claim 11 or 12 , wherein the solder material contains a bismuth-indium alloy having a melting point of 72C to 109C. 前記はんだ材料が、融点85℃〜109℃のビスマス−インジウム合金を含む、請求項11または12に記載の回路部材の接続方法。 The method for connecting circuit members according to claim 11 or 12 , wherein the solder material contains a bismuth-indium alloy having a melting point of 85C to 109C. 前記はんだ材料が、融点88℃〜90℃のビスマス−インジウム合金を含む、請求項11または12に記載の回路部材の接続方法。 The method for connecting circuit members according to claim 11 or 12 , wherein the solder material contains a bismuth-indium alloy having a melting point of 88C to 90C. 前記ビスマス−インジウム合金に含まれるインジウムの量が、32質量%〜73質量%である、請求項11または12に記載の回路部材の接続方法。  The method for connecting circuit members according to claim 11 or 12, wherein the amount of indium contained in the bismuth-indium alloy is 32 mass% to 73 mass%. 記ビスマス−インジウム合金に含まれるインジウムの量が、32質量%〜49質量%である、請求項11または12に記載の回路部材の接続方法。 Before SL Bismuth - amount of indium included in the indium alloy, 32% by mass to 49% by weight, the connection method of the circuit member according to claim 11 or 12. 記ビスマス−インジウム合金に含まれるインジウムの量が、43質量%〜47質量%である、請求項11または12に記載の回路部材の接続方法。 Before SL Bismuth - amount of indium included in the indium alloy, 43% by mass to 47% by weight, the connection method of the circuit member according to claim 11 or 12. 前記接着剤が、活性剤を含み、
前記活性剤が、加熱により前記透明電極の表面を還元する、請求項11〜18のいずれか一項に記載の回路部材の接続方法。
The adhesive comprises an active agent;
The circuit member connection method according to any one of claims 11 to 18, wherein the activator reduces the surface of the transparent electrode by heating.
前記活性剤が、アジピン酸、アビエチン酸、セバシン酸、グルタル酸、4−フェニル酪酸およびレブリン酸よりなる群から選択される少なくとも1種を含む、請求項19に記載の回路部材の接続方法。 The circuit member connection method according to claim 19 , wherein the activator includes at least one selected from the group consisting of adipic acid, abietic acid, sebacic acid, glutaric acid, 4-phenylbutyric acid, and levulinic acid. 透明電極を備えた第1主面を有する第1回路部材と、A first circuit member having a first major surface with a transparent electrode;
金属電極を備えた第2主面を有する第2回路部材と、を接続する、回路部材の接続方法であって、  A circuit member connection method for connecting a second circuit member having a second main surface with a metal electrode,
(i)接着剤と、前記接着剤に分散するはんだ材料と、を含む接続材料を準備する工程と、  (I) preparing a connection material including an adhesive and a solder material dispersed in the adhesive;
(ii)前記接続材料を介して前記透明電極と前記金属電極とが対向するように、前記第1回路部材と前記第2回路部材とを配置する工程と、  (Ii) disposing the first circuit member and the second circuit member so that the transparent electrode and the metal electrode face each other with the connection material interposed therebetween;
(iii)前記第2回路部材を前記第1回路部材に対して押圧しながら加熱して、前記はんだ材料を溶融させた後、前記加熱を停止して、前記溶融したはんだ材料を固化することにより、前記透明電極と前記金属電極とを電気的に接続するはんだ部を形成する工程と、  (Iii) by heating the second circuit member while pressing against the first circuit member to melt the solder material, and then stopping the heating to solidify the molten solder material Forming a solder portion for electrically connecting the transparent electrode and the metal electrode;
(iv)前記接着剤を硬化させて、前記第1回路部材と前記第2回路部材とを接着する樹脂部を形成する工程と、を有し、  (Iv) curing the adhesive to form a resin portion that adheres the first circuit member and the second circuit member;
前記透明電極は、インジウムと、スズと、を含む酸化物を含み、前記はんだ材料は、ビスマス−インジウム合金を含み、  The transparent electrode includes an oxide including indium and tin, and the solder material includes a bismuth-indium alloy,
前記工程(iv)は、前記工程(iii)と並行して、あるいは、前記工程(iii)の後に行われ、  The step (iv) is performed in parallel with the step (iii) or after the step (iii).
前記はんだ部の形成とともに、  Along with the formation of the solder part,
前記透明電極と前記はんだ部との間に、前記透明電極に含まれるインジウムと、前記はんだ部に含まれるビスマスと、を含む第1合金層を形成し、  Forming a first alloy layer containing indium contained in the transparent electrode and bismuth contained in the solder portion between the transparent electrode and the solder portion;
前記金属電極と前記はんだ部との間に、前記金属電極に含まれる金属成分と、前記はんだ部に含まれるビスマスおよび/またはインジウムと、を含む第2合金層を形成する、回路部材の接続方法。  A method for connecting circuit members, wherein a second alloy layer including a metal component contained in the metal electrode and bismuth and / or indium contained in the solder portion is formed between the metal electrode and the solder portion. .
前記金属電極が金を含み、  The metal electrode comprises gold;
前記第2合金層は、ビスマスとインジウムと金とを含み、  The second alloy layer includes bismuth, indium, and gold,
前記第2合金層は、前記はんだ部との界面に凹凸を備える、請求項21に記載の回路部材の接続方法。  The circuit member connection method according to claim 21, wherein the second alloy layer includes irregularities at an interface with the solder portion.
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