JP6183021B2 - Stage equipment - Google Patents

Description

  The present invention relates to a stage apparatus useful for moving a manufacturing apparatus, an inspection apparatus, a workpiece, an inspection object, and the like.

  There is a stage apparatus that moves a stage on which a manufacturing apparatus, an inspection apparatus, a workpiece, an inspection object, and the like are placed by a pair of linear motors. The stage device includes two linear motion bearings including a rail on the base and a linear block that slides on the rail. The stage moves while being guided by a linear bearing (see, for example, Patent Document 1).

  When the stage moves while being guided by the linear motion bearing, the stage may cause a rotational movement (called yawing) around the vertical axis. Yawing is caused by slight bending of the rail caused by the processing accuracy of the joint surface where the base and the rail are joined, the mounting accuracy of attaching the rail to the base at a fixed position, and the like. In such a case, the yawing of the stage is reduced by controlling the driving force by the pair of linear motors.

JP 2008-23699 A

  However, due to cost, there are limits to the processing accuracy of the joint surface where the base and the rail are joined, the accuracy of mounting the rail to the base, and the like. In addition, in order to reduce the yawing of the stage by controlling the driving force of the linear motor, it is necessary to supply excessive power to the linear motor.

  The present application has been made in view of such circumstances. The object is to provide a stage apparatus that can reduce the yawing of the stage at low cost.

The stage apparatus according to the present application includes a base, two rails extending parallel to each other on the base, a stage supported on the two rails, and the stage on the base. has a movable element provided on the stator and the stage is provided along each of the two rails, the stage device and a linear motor for applying a moving force extending direction of the rail to the stage, the 2 tolerance and a plurality of mobile, and a is a plate-like member bridging over the movement of the plurality of the stages of the rotation of the vertical axis around the upper surface of the plate-like member which moves while being guided by the people present in the rail husband supporting tear by a support member which is, provided with an even number of ejection portions for ejecting air, the jet unit is mounted by half at the position of the stage respectively corresponding to the position of the rail or mobile, the plate-like Air is blown onto the upper surface of the member And a plurality of second ejection portions attached to the stage and configured to eject air to the lower surface of the plate-like member, and the ejection portion from the upper surface to the lower surface When viewed in plan in the direction toward the top, the second ejection part is arranged inside the first ejection part and outside the support member .

  According to the stage apparatus according to the present application, stage yawing can be reduced at low cost.

It is a front view of a stage apparatus. It is a top view of a lower stage part. It is a front view of a stage apparatus. It is a top view of a lower stage part. It is explanatory drawing inside the upper-axis base just above an upper air pad. It is explanatory drawing which exaggerated and showed the longitudinal cross-sectional shape of the upper shaft base.

Hereinafter, embodiments will be specifically described with reference to the drawings.
The stage apparatus according to the present embodiment moves, for example, a stage on which a workpiece, a sample such as an inspection object, a manufacturing apparatus, an inspection apparatus, and the like are mounted in one direction by a driving force of a linear motor.

Embodiment 1
FIG. 1 is a front view of the stage apparatus 10. The stage apparatus 10 includes a lower stage unit 20 and an upper stage unit 30. The lower stage unit 20 corresponds to a stage device that moves the upper stage unit 30 in a certain direction in a substantially horizontal plane. The upper stage unit 30 corresponds to a stage device that moves the stage (second stage) 31 in a direction within a horizontal plane and in a direction substantially orthogonal to the moving direction of the lower stage unit 20. FIG. 1 is a front view of the stage apparatus 10 as seen from the moving direction in which the lower stage unit 20 moves the upper stage unit 30.

The lower stage unit 20 includes a base 21, a linear motion bearing support 22, a linear motion bearing 23, a yawing cancel plate (plate member) 24, a thrust bearing (support member) 25, an upper shaft base (stage) 26, an air pad ( (Ejecting part, second ejecting part) 27 and linear motor 28 are included.
The base 21 is a base in which a plurality of square pipe-shaped steel pipes 211 are welded together and has a flat, substantially rectangular parallelepiped shape. The square pipe-shaped steel pipe 211 is integrated into, for example, a “H” shape in plan view, a “day” shape, an “eye” shape, and a “mouth” shape.
In addition, in order to increase the weight of the square pipe-shaped steel pipe 211, the inside may be filled with, for example, non-fired ceramics. By filling non-fired ceramics, it can be expected to obtain an effective vibration damping action with high rigidity. Moreover, the base 21 may be comprised with a stone surface plate.

  The linear motion bearing support 22 is two square pillars oriented in substantially the same direction on the base 21. The linear bearing support 22 is connected to the base 21 by welding. The two linear motion bearing supports 22 each have a function of supporting the linear motion bearing 23.

The linear motion bearing 23 includes a rail 231 and a linear block (moving body) 232. The linear motion bearing 23 is a machine element component in which the linear block 232 having the rolling element linearly moves when the rolling element rotates while being guided by the rail 231. The linear block 232 has a rectangular parallelepiped shape and is assembled to the rail 231 in advance. In one rail 231, two linear blocks 232 are assembled. Since FIG. 1 depicts the linear block 232 from the axial direction of the rail 231, the linear block 232 on the back side is hidden.
Note that the number of linear blocks 232 assembled to one rail 231 may be one, or may be three or more.
Further, the linear motion bearing 23 may be one in which the linear block 232 is guided to the rail 231 through compressed air.

  The lower stage unit 20 includes a pair of linear motion bearings 23. Each of the rails 231 is fixed to the upper surface of the linear motion bearing support 22 with screws so that the longitudinal directions of the rail 231 and the linear motion bearing support 22 are substantially the same. Thereby, each linear motion bearing 23 is fixed to the base 21 via the linear motion bearing support 22.

  FIG. 2 is a top view of the lower stage unit 20. FIG. 2 shows the lower stage unit 20 in a state where the upper shaft base 26 is removed, but the upper shaft base 26 is drawn by a two-dot chain line in FIG. 2 for reference. Also, four linear blocks 232 are drawn with broken lines.

  The yawing cancel plate 24 has a rectangular plate shape having a side substantially parallel to the moving direction of the yawing cancel plate 24 as a short side. The vicinity of the four corners on the lower surface of the yawing cancel plate 24 is joined to the upper surfaces of the four linear blocks 232. In FIG. 2, the upper left and lower right linear blocks 232 and the lower left and upper right linear blocks 232 are arranged point-symmetrically with respect to the center of the lower surface of the yawing cancel plate 24. Further, the upper left and upper right linear blocks 232 and the lower left and lower right linear blocks 232 pass through the center point of the yawing cancel plate 24 and are perpendicular to the moving plane of the yawing cancel plate 24, respectively. They are arranged in plane symmetry.

  The thrust bearing 25 is a bearing that receives the load of the upper member including the upper shaft base 26. The thrust bearing 25 includes an inner ring 251 and an outer ring 252. The thrust bearing 25 has a structure in which balls roll between the inner ring 251 and the outer ring 252. The outer ring 252 of the thrust bearing 25 is fixed to the approximate center of the upper surface of the yawing cancel plate 24 with, for example, a screw. The inner ring 251 of the thrust bearing 25 is fixed to the approximate center of the lower surface of the upper shaft base 26 having a rectangular plate shape, for example, with a screw.

The thrust bearing 25 may be inverted in the vertical direction, and the inner ring 251 and the outer ring 252 may be fixed to the upper surface of the yawing cancel plate 24 and the lower surface of the upper shaft base 26, respectively.
Further, the thrust bearing 25 may be replaced with a torsion bar spring (torsion bar spring, support member) using a repulsive force when twisting a metal bar.

The upper shaft base 26 is a base on which the upper stage unit 30 is placed. The upper shaft base 26 is a rectangular plate-like body that is thicker than the yawing cancel plate 24. A recess for internally fitting and holding a part of the thrust bearing 25 is provided at the center of the lower surface of the upper shaft base 26 (broken line portion in FIG. 1), and the upper portion of the thrust bearing 25 is fitted in the recess. More specifically, the inner ring 251 of the thrust bearing 25 described above is fixed to the bottom surface of the recess.
When viewed from above, the center position of the upper shaft base 26 and the center position of the yawing cancellation plate 24 substantially coincide with each other, and the sides of the upper shaft base 26 and the yawing cancellation plate 24 are substantially parallel to each other. The shaft base 26 is disposed.

The air pad 27 is also called an air bearing and has a disk shape. The air pad 27 is made of a porous material such as a carbon material or ceramics. The air pad 27 ejects pressurized air supplied from an air supply source (not shown) from one surface via an air pipe (not shown). The air supply source is, for example, an air compressor.
The air pad 27 may have a truncated cone shape or a rectangular plate shape, for example.

  The lower stage unit 20 includes four air pads 27. Each air pad 27 is provided in the vicinity of each corner on the lower surface of the upper shaft base 26. More specifically, each air pad 27 is provided so that its center position substantially coincides with the center position of each of the four linear blocks 232 when viewed from above. Alternatively, in FIG. 2, the upper left and lower left air pads 27 and the upper right and lower right air pads 27 are positioned so as to correspond to the center lines of the rails 231, respectively.

  The air pipes attached to the four air pads 27 are bundled inside or outside the upper shaft base 26 and connected to one air pipe. The one air pipe is connected to an air supply source. The air supply source has a function of controlling the pressure of air. The pressurized air controlled by the air supply source is ejected from each air pad 27 toward the upper surface of the yawing cancel plate 24 through the air pipe.

  The number of air pads 27 is not limited to four. One or more air pads 27 may be provided on the lower surface of the upper shaft base 26 corresponding to the center line of each rail 231. Since the linear motion bearings 23 according to the present embodiment form a pair, the total number of air pads 27 is an even number.

  When the stage apparatus 10 is not operating (when air is not ejected from the air pad 27), the air ejection surface of the air pad 27 and the upper surface of the yawing cancel plate 24 are in contact with each other. The height of the air pad 27 is determined so that a slight gap is generated between the yawing cancel plate 24 and the upper shaft base 26 at an intermediate position between the thrust bearing 25 and the air pad 27. Therefore, the yawing cancel plate 24 and the upper shaft base 26 at an intermediate position between the thrust bearing 25 and the air pad 27 face each other in an isolated state.

  The lower stage unit 20 includes a pair of linear motors 28. The stator 281 of each linear motor 28 having a rod shape is oriented substantially parallel to the rail 231 of the linear motion bearing 23 and is fixed on the base 21 outside the linear motion bearing 23. One stepped leg portion 261 extending to the stator of the linear motor 28 is provided on each side surface of the upper shaft base 26 with respect to the longitudinal direction of the rail 231. A mover 282 that can be loosely fitted to the stator 281 of the linear motor 28 is attached to the tip of each leg 261.

The stage device 10 drives a pair of linear motors 28 based on a detection unit (not shown) that detects the yawing or posture of the upper shaft base 26 and the yawing or posture of the upper shaft base 26 detected by the detection unit. And a control unit (not shown) for controlling each of them. The detection unit may detect the position of the upper shaft base 26 in addition to the yawing or the posture of the upper shaft base 26.
When the detection unit detects yawing of the upper shaft base 26, the control unit controls the driving of the pair of linear motors 28 in a direction in which the yawing of the upper shaft base 26 is reduced. At that time, the control unit changes the current supplied to the pair of linear motors 28.

The detection unit is, for example, an encoder, a gyroscope, an angular velocity sensor, an acceleration sensor, or an electronic compass attached to the upper shaft base 26.
Alternatively, the detection unit includes, for example, a laser device attached to the fixed part of the stage device 10, a reflection mirror attached to the upper shaft base 26, and a reflection angle at which light emitted from the laser device is reflected by the reflection mirror. It is an autocollimator to detect.
The said control part may be comprised with a circuit, and may be comprised with a computer and a program.

  The upper stage unit 30 includes a stage 31, an upper shaft linear motion bearing 32, and an upper linear motor (second linear motor, not shown). The stage 31 has a rectangular plate shape, and is made of, for example, aluminum. A workpiece, an apparatus, and the like are placed on the upper surface of the stage 31.

The upper shaft linear motion bearing 32 includes a rail 321 and a linear block 322. The hardware configuration of the rail 321 and the linear block 322 is the same as that of the rail 231 and the linear block 232 of the linear motion bearing 23 in the lower stage unit 20, respectively.
The upper stage unit 30 includes a pair of upper shaft linear motion bearings 32. The pair of rails 321 are fixed to the upper surface of the upper shaft base 26 with screws so that the longitudinal direction of the pair of rails 321 intersects the longitudinal direction of the rail 231 of the lower stage portion 20 at a substantially right angle.

  The hardware configuration of the upper linear motor is the same as that of the linear motor 28. The stators of the pair of upper linear motors are oriented so that their extending directions are substantially parallel to the longitudinal direction of the rails 321, and are respectively attached to the upper surface of the upper shaft base 26 corresponding to the outside of the rails 321. On both side surfaces of the stage 31 with respect to the longitudinal direction of the rail 321, the mover of the upper linear motor is attached to the stator of the upper linear motor so as to be freely fitted.

Next, the operation of the stage apparatus 10 will be described.
The air supply source is operated, and pressurized air is sent from the air supply source to the air pad 27. The air pressure is adjusted by, for example, a valve (not shown), and the air pressure is gradually increased. Pressurized air is ejected from the air pad 27 attached to the lower surface of the upper shaft base 26 toward the upper surface of the yawing cancel plate 24. The jetted pressurized air forms an extremely thin air layer between the yawing cancel plate 24 and the air pad 27, and causes the upper shaft base 26 to float with respect to the yawing cancel plate 24. By driving the pair of linear motors 28 synchronously, the upper shaft base 26 starts to move. At this time, the upper shaft base 26 is guided by the linear motion bearing 23 and moves in the longitudinal direction of the rail 231.

  Here, it is assumed that the yawing cancel plate 24 fixed to the linear block 232 starts yawing due to the bending of the rail 231. When the yawing cancel plate 24 starts yawing, the force by which the yawing cancel plate 24 twists the thrust bearing 25 about the vertical axis rotates the outer ring 252 of the thrust bearing 25. However, when the ball rolls between the outer ring 252 and the inner ring 251, the force that the yawing cancel plate 24 twists the thrust bearing 25 about the vertical axis is transmitted to the upper shaft base 26 to which the inner ring 251 is fixed. do not do. Therefore, the upper shaft base 26 continues linear motion according to the law of inertia without starting yawing.

The thickness of the air layer extending between the yawing cancel plate 24 and the air pad 27 is extremely thin. Therefore, a special load is not applied to the joint surface between the yawing cancel plate 24 and the upper shaft base 26 to which the thrust bearing 25 is joined.
When the upper shaft base 26 floats due to an air layer, the portion of the upper shaft base 26 to which the air pad 27 is attached may be slightly warped in advance so that the upper shaft base 26 becomes flat.

  In the above description, the stage apparatus 10 includes the upper stage unit 30. However, the stage apparatus 10 may not include the upper stage unit 30. In such a case, the upper shaft base 26 of the stage apparatus 10 corresponds to a stage on which a workpiece, apparatus, and the like are placed.

  In the above description, the air pad 27 is attached to the lower surface of the upper shaft base 26. However, the air pad 27 may be provided on the upper surface of the yawing cancel plate 24. In this case, the position of the air pad 27 is a position that overlaps with the position provided on the lower surface of the upper shaft base 26 in the vertical direction. The air pad 27 provided on the upper surface of the yawing cancel plate 24 ejects pressurized air toward the lower surface of the upper shaft base 26.

  In the above description, the stage apparatus 10 includes the air pad 27. However, the stage apparatus 10 may not include the air pad 27. In such a case, the size of the thrust bearing 25 is made larger than the size shown in FIGS. In FIG. 2, the diameter of the thrust bearing 25 is set to a size of, for example, about 50% to 90% of the short side of the yawing cancel plate 24. The thrust bearing 25 rotatably supports the thrust bearing 25 with respect to the yawing cancel plate 24 without bringing the yawing cancel plate 24 and the upper shaft base 26 outside the thrust bearing 25 into contact with each other.

According to the stage apparatus 10, yawing of the upper shaft base 26 can be reduced at a low cost.
When yawing due to the bending of the rail 231 occurs in the yawing cancel plate 24, the inner ring 251 and the outer ring 252 of the thrust bearing 25 rotate relatively, so that the force that causes yawing to the upper shaft base 26 is not transmitted. Therefore, the upper shaft base 26 maintains a non-rotating state (not yawing) according to the law of inertia.
Further, the air jetted by the air pad 27 between the yawing cancel plate 24 and the upper shaft base 26 forms a very thin air layer, and causes the upper shaft base 26 to float with respect to the yawing cancel plate 24. Therefore, since the upper shaft base 26 is guided to the linear motion bearing 23 only through the thrust bearing 25, it does not receive a force that causes yawing. That is, the yawing force generated by the guide of the linear motion bearing 23 extends to the thrust bearing 25 and does not reach the members disposed above the thrust bearing 25.
Note that when a torsion bar spring is used instead of the thrust bearing 25, the yawing force generated by the guide of the linear motion bearing 23 slightly extends to a member disposed above the torsion bar spring.

  The stage apparatus 10 can reduce yawing by using an inexpensive base 21 with low processing accuracy, compared with a case where yawing is reduced by using an expensive base with high processing accuracy. If an expensive base with high processing accuracy is used, the stage device 10 can further reduce yawing. The cause of yawing also involves the mounting accuracy of the rail 231 at a certain position. Since the stage device 10 can reduce yawing of the upper shaft base 26 even if the mounting accuracy of the rail 231 is low, the mounting operation of the rail 231 to the base 21 becomes easier and the mounting operation time is also shortened. Is done. Since the stage apparatus 10 does not need to reduce the yawing by flowing an excessive current to the linear motor 28, the load applied to the linear motor 28 and the heat generation amount can be reduced. Therefore, the stage apparatus 10 also contributes to the long life of the linear motor 28.

  It is conceivable that the pressure of air jetted from the air pad 27 to the yawing cancel plate 24 deforms the yawing cancel plate 24. When the yawing cancellation plate 24 becomes non-uniform, the mass distribution of the yawing cancellation plate 24 changes and the yawing of the yawing cancellation plate 24 may increase. However, the air pad 27 is disposed immediately above the rail 231 or the linear block 232 of the linear motion bearing 23. Therefore, the force based on the air pressure ejected from the air pad 27 is easily transmitted to the linear motion bearing 23, and it is difficult to deform the yawing cancel plate 24 unevenly. Therefore, the arrangement of the air pad 27 has an effect of reducing the yawing of the yawing cancel plate 24 and, consequently, the yawing of the upper shaft base 26.

Embodiment 2
The second embodiment relates to a mode in which air is ejected from the air pad 27 to the upper and lower surfaces of the yawing cancel plate 24.
In the second embodiment, the same reference numerals are assigned to the same components as those in the first embodiment, and detailed description thereof is omitted.

  FIG. 3 is a front view of the stage apparatus 10. FIG. 4 is a top view of the lower stage unit 20. FIG. 3 is a front view of the stage apparatus 10 as seen from the moving direction in which the lower stage unit 20 moves the upper stage unit 30 as in FIG. 4 shows the lower stage portion 20 in a state in which the upper shaft base 26 is removed, as in FIG. 2, but the upper shaft base 26 is drawn with a two-dot chain line in FIG. 4 for reference. Also, four linear blocks 232 are drawn with broken lines.

  In FIG. 4, the yawing cancel plate 24 of the stage apparatus 10 is provided with one rectangular cutout 241 at approximately the center of two long sides (sides substantially perpendicular to the moving direction of the yawing cancel plate 24). It has been. Each notch 241 extends in a direction substantially orthogonal to the moving direction of the yawing cancel plate 24. Therefore, the yawing cancel plate 24 has an H shape in plan view with respect to the moving direction of the yawing cancel plate 24.

  Four drooping members 29 having an L-shape in an elevational view are formed on the lower surface of the upper shaft base 26 so as to bend in the vicinity of the short side of the notch 241 of the yawing cancel plate 24 and to reach the lower surface of the yawing cancel plate 24. (FIGS. 3 and 4). In addition, the elevation view shape of the hanging member 29 may be a J-shape. The four drooping members 29 are suspended from the lower surface portion of the upper shaft base 26 facing the notch 241 portions near the two short sides constituting each notch 241. In FIG. 4, the upper left and lower right hanging members 29 and the lower left and upper right hanging members 29 are arranged at point-symmetrical positions with respect to the thrust bearing 25, respectively. The upper left and upper right hanging members 29 and the lower left and lower right hanging members 29 are plane-symmetric with respect to a vertical plane that passes through the center point of the upper shaft base 26 and is substantially parallel to the moving direction of the upper shaft base 26. It is arranged in the position.

  One air pad 27 is attached to each tip of the four drooping members 29 so that the air ejection surface faces upward. The air pad 27 attached to the tip of the drooping member 29 ejects pressurized air to the lower surface of the yawing cancel plate 24. When viewed from above, the four air pads 27 that eject pressurized air to the lower surface of the yawing cancel plate 24 are located inside the four air pads 27 that eject pressurized air to the upper surface of the yawing cancel plate 24 and outside the thrust bearing 25. It is arranged. Hereinafter, the air pad 27 that ejects pressurized air onto the upper surface of the yawing cancel plate 24 is referred to as an upper air pad 27 or an outer air pad. The air pad 27 that ejects pressurized air to the lower surface of the yawing cancel plate 24 is referred to as a lower air pad 27 or an inner air pad 27.

FIG. 5 is an explanatory diagram of the inside of the upper shaft base 26 immediately above the upper air pad 27.
The air pad 27 is connected via a ball joint 272 to a bolt 271 whose outer surface is threaded. A screw hole into which the bolt 271 is screwed is provided in the upper shaft base 26. A screw head 273 of a bolt 271 and a lock nut 274 that fixes the position of the bolt 271 with respect to the upper shaft base 26 are disposed on the upper surface of the upper shaft base 26 located immediately above the air pad 27. By rotating the screw head 273 with, for example, a hexagon wrench, the attachment position of the air pad 27 in the vertical direction with respect to the upper shaft base 26 is adjusted and the lock nut 274 is fixed. At this time, the upper shaft base 26 is slightly deformed by the bolt 271 stretching the upper shaft base 26 immediately above the air pad 27. At the same time, the upper shaft base 26 is further slightly deformed by the pressure of the air by ejecting the pressurized air from the air pad 27.

FIG. 6 is an explanatory view exaggeratingly showing the vertical cross-sectional shape of the upper shaft base 26. The downwardly convex curve drawn in the upper shaft base 26 shows the deformation of the upper shaft base 26 caused by the attachment of the upper air pad 27 and the ejection of pressurized air. The portion of the upper shaft base 26 directly above the thrust bearing 25 is hardly deformed, but the peripheral portion of the upper shaft base 26 is deformed so as to warp relatively upward with respect to the center portion.
The shape of the upper shaft base 26 shown in FIG. 6 may cause an uneven mass distribution of the upper shaft base 26 and increase the yawing of the upper shaft base 26.

Next, the operation of the lower stage unit 20 of the stage apparatus 10 will be described.
By operating the air supply source, pressurized air is ejected from the upper air pad 27 and the lower air pad 27 to the upper and lower surfaces of the yawing cancel plate 24, respectively. The compressed air jetted downward forms an extremely thin air layer, and the upper shaft base 26 is levitated with respect to the yawing cancel plate 24.

On the other hand, the pressurized air jetted upward has a force that pulls the upper shaft base 26 downward via the lower air pad 27 and the hanging member 29 in the vicinity of the joint surface between the upper shaft base 26 and the hanging member 29 (the thrust bearing 25 and the upper side). Of the air pad 27). The force pulling the upper shaft base 26 downward is deformed so that the upper shaft base 26 portion at the intermediate position between the thrust bearing 25 and the upper air pad 27 is bent downward with the upper end of the thrust bearing 25 as a fulcrum. . As a result, the outer side of the upper shaft base 26 warped upward by the attachment of the upper air pad 27 and the ejection of pressurized air shown in FIG. 6 is bent downward, and the overall shape of the upper shaft base 26 is deformed in a flatter direction. . Therefore, deformation of the rail 321 placed on the upper shaft base can be suppressed. As a result, it is possible to suppress a decrease in the movement accuracy of the upper stage unit 30.

  According to the lower stage portion 20 of the stage apparatus 10, the lower air pad 27 located on the inner side of the upper air pad 27 that jets pressurized air to the upper surface of the yawing cancel plate 24 is formed on the lower surface of the yawing cancel plate 24. Blow out pressurized air. Thereby, the shape of the upper shaft base 26 deformed by the attachment of the upper air pad 27 and the ejection of pressurized air can be returned to a flatter shape, and yawing in the upper shaft base 26 can be further reduced.

  The disclosed embodiments are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  Further, the technical features (components) described in each embodiment can be combined with each other, and a new technical feature can be formed by combining them.

DESCRIPTION OF SYMBOLS 10 Stage apparatus 20 Lower stage part 21 Base 23 Linear motion bearing 231 Rail 232 Linear block (moving body)
24 Yawing cancel plate (plate-like member)
25 Thrust bearing (support member)
26 Upper shaft base (stage)
27 Air pad (spout part, second spout part)
28 Linear motor 281 Stator 282 Movable element 29 Hanging member 30 Upper stage part 31 Stage (second stage)
32 Upper shaft linear motion bearing 321 Rail 322 Linear block

Claims (4)

The base,
Two rails extending parallel to each other on the base;
A stage supported on the two rails;
A linear motor that has a stator provided along each of the two rails on the base and a mover provided on the stage, and applies a moving force in the extending direction of the rail to the stage. In the stage device,
A plurality of moving bodies that are guided and moved by each of the two rails;
A plate-like member constructed on the plurality of moving bodies,
The stage Ri Thea supported by the support member to permit rotation of the vertical axis around the upper surface of the plate-like member,
Equipped with an even number of ejection parts that eject air,
The jet part is attached to each half of the position of the stage corresponding to the position of the rail or the moving body, and the first jet part is configured to jet air to the upper surface of the plate-like member,
A second ejection part attached to the stage and configured to eject air to the lower surface of the plate-like member;
The stage device , wherein the second ejection portion is disposed inside the first ejection portion and outside the support member when the ejection portion is viewed in a plan view in a direction from the upper surface toward the lower surface . Between the position of the stage corresponding to the intermediate position of the first ejection part and the support member and the position facing the lower surface of the plate-like member, an L-shape or J-shape is formed in an elevational view, and the position of the stage Comprising a plurality of drooping members suspended from
The stage device according to claim 1 , wherein the plurality of second ejection portions are respectively attached to tips of the plurality of drooping members. Wherein the support member stage apparatus according to claim 1 or claim 2, characterized in that a thrust bearing or torsion bar springs attached to each center of the plate-like member and the stage. The stage device according to any one of claims 1 to 3, further comprising a second stage that moves in a direction different from a moving direction of the stage.

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