JP5741515B2 - Actuator, manufacturing device, and inspection device - Google Patents

Description

The present invention relates to an actuator , a manufacturing apparatus, and an inspection apparatus .

For example, a manufacturing apparatus is provided with a linear guide bearing device for moving a workpiece, and Patent Documents 1 and 2 disclose actuators suitably used for such a linear guide bearing device.
As shown in FIG. 5, an actuator disclosed in Patent Documents 1 and 2 includes a linear guide rail 104 extending in the axial direction, and a movable body 105 attached to the guide rail 104 via a bearing 110 such as an air bearing. A driving pulley (not shown) that is rotationally driven by a driving device such as a motor, a driven pulley (not shown) that is rotatably supported, and an endless belt stretched between the driving pulley and the driven pulley. 103. The movable body 105 can be loaded with a load 111 such as a workpiece.

Since the endless belt 103 is connected to the movable body 105, the power from the driving device is transmitted to the movable body 105 via the endless belt 103 so that the movable body 105 linearly moves along the guide rail 104 in the axial direction. It has become. At this time, the movable body 105 and the endless belt 103 are normally connected at the center of gravity position 120 of the movable body 105 (the center of gravity of the movable body 105 alone not including the mounted object 111).
That is, in a state in which the mounted object 111 is not mounted, the drive point 130 of the movable body 105 to which power by the drive device is applied coincides with the center (point symmetry center) of the movable body 105. For this reason, an unnecessary moment is suppressed from being generated in the movable body 105 by the power of the endless belt 103 during acceleration / deceleration of the linear movement of the movable body 105, so that the movable body 105 is less likely to be vibrated.

JP 2008-101642 A JP 2001-248703 A

  However, when the loaded object 111 is mounted on the movable body 105, the center of gravity 140 of the movable body 105 including the loaded object 111 moves, and the position thereof is closer to the loaded object 111 than the center of gravity 120 of the movable body 105 alone. For example, as shown in FIG. 5, when the load 111 is mounted on the left side when the guide rail 104 is viewed from the axial end, the center of gravity moves from the center of the movable body 105 to the left. As a result, the driving point 130 of the movable body 105 and the center of gravity 140 of the movable body 105 including the load 111 are not matched.

  Then, during acceleration / deceleration of the linear movement of the movable body 105, an unnecessary moment is generated in the movable body 105 due to the power of the endless belt 103, and a slight vibration is generated in the moving movable body 105. It was done. In particular, in the case of an actuator for high-accuracy applications, there is a possibility that fine vibration generated in the movable body 105 may adversely affect the mounted object 111, and thus further improvement of vibration suppression has been demanded.

As a method of withstanding the generated moment and preventing the movable body 105 from vibrating, there is a method of improving the load capacity of the bearing 110 interposed between the movable body 105 and the guide rail 104. There is a problem that the capacity of the driving device increases because the size increases and the mass of the movable body 105 increases.
Therefore, the present invention solves the problems of the prior art as described above, and even when the movable body moves at a high speed and suddenly accelerates or decelerates, the loaded object is mounted on the moving movable body. It is an object of the present invention to provide an actuator that hardly generates vibration.

  In order to solve the above problems, an aspect of the present invention has the following configuration. That is, an actuator according to an aspect of the present invention includes a guide rail extending in the axial direction, a movable body attached to the guide rail so as to be linearly movable along the guide rail in the axial direction, and a center of the movable body or And a drive unit that linearly moves the movable body by applying power to the vicinity of the center, and an actuator that linearly moves the mounted object by mounting a load on the movable body, and adjusts the position of the center of gravity of the movable body And the balance weight which makes the gravity center of the said movable body at the time of mounting the said mounting thing correspond to the drive point to which the said motive power is provided is provided, It is characterized by the above-mentioned.

In such an actuator, the movable body has a mounting portion for mounting the mounted object on one side surface in the width direction, and a balance weight installation portion for installing the balance weight on the other side surface in the width direction. It is preferable.
In addition, the balance weight installation portion includes an arm extending outward in the width direction from the other side surface in the width direction of the movable body, and the balance weight installed at a tip portion of the arm is lighter than the mounted object. preferable.

  The actuator of the present invention includes a balance weight that adjusts the position of the center of gravity of the movable body so that the center of gravity of the movable body when the load is mounted matches the drive point to which power is applied. Even when the vehicle moves at a high speed and is accelerated or decelerated rapidly, it is difficult for microscopic vibrations to occur in the movable body that is mounted with the load.

It is sectional drawing which shows the structure of the actuator which concerns on one Embodiment of this invention. It is a side view of the actuator of FIG. It is a principal part expanded sectional view of the actuator of FIG. It is a principal part expanded sectional view which shows the structure of the actuator of a modification (sectional drawing cut | disconnected by the plane orthogonal to an axial direction). It is a principal part expanded sectional view (sectional drawing cut | disconnected by the plane orthogonal to an axial direction) which shows the structure of the conventional actuator.

Embodiments of an actuator according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing a structure of an actuator according to an embodiment of the present invention, and is a cross-sectional view cut along a horizontal plane along the axial direction. FIG. 2 is a side view of the actuator of FIG. Further, FIG. 3 is an enlarged view of the movable body provided in the actuator of FIG. 1 and its peripheral portion, and is a cross-sectional view cut along a plane orthogonal to the axial direction.
The actuator according to the present embodiment includes a driving pulley 1 that is rotationally driven by a motor 9, a driven pulley 2 that is rotatably supported, and an annular endless belt that is stretched between the driving pulley 1 and the driven pulley 2. 3, a guide rail 4 extending in the axial direction, and a movable body 5 that linearly moves in the axial direction along the guide rail 4 as the endless belt 3 rotates.

  Hereinafter, the structure of the actuator according to the present embodiment will be described in more detail. As shown in FIGS. 1 and 2, pulley housings 13 and 14 are provided at both ends of the guide rail 4 that also functions as a frame. 1 and 2, the pulley housing 13 disposed on the right side accommodates the drive pulley 1 and further has a motor 9 attached thereto. The rotating shaft of the motor 9 extends horizontally and in a direction perpendicular to the axis (axial direction) of the guide rail 4, and a driving pulley 1 is attached to the tip of the rotating shaft via a coupling 9a. On the other hand, in FIGS. 1 and 2, the pulley housing 14 disposed on the left side accommodates the driven pulley 2 and rotatably supports the driven pulley 2.

  An endless belt 3 is stretched between the driving pulley 1 and the driven pulley 2 in a direction (axial direction) along the guide rail 4. Therefore, the pulley housings 13 and 14 have through holes (not shown) through which the endless belt 3 is inserted. A plurality of teeth (not shown) arranged in the circumferential direction are formed on the surface (inner peripheral surface) of the endless belt 3, and teeth formed on the outer peripheral surfaces of the driving pulley 1 and the driven pulley 2 (see FIG. (Not shown). Therefore, the endless belt 3 is rotated by the rotation of the drive pulley 1.

Since the movable body 5 is connected to the endless belt 3 and is engaged with the guide rail 4 so as to be linearly movable, the movable body 5 is guided to the guide rail 4 as the endless belt 3 rotates. A linear movement is possible in the axial direction.
Here, the movable body 5 and the guide rail 4 will be described in more detail. The shape of the guide rail 4 is not particularly limited, but is preferably substantially U-shaped as shown in FIG. That is, the guide rail 4 includes a strip-like bottom wall 21 extending in the axial direction and a pair of side walls 22 and 22 rising vertically from both sides in the width direction of the bottom wall 21, and is a cross section cut along a plane orthogonal to the axial direction. Is substantially U-shaped. In the present invention, a direction perpendicular to the axial direction and perpendicular to the vertical direction is referred to as a width direction.

On the other hand, the shape of the movable body 5 is not particularly limited as long as it is a shape that engages with the guide rail 4, but when the guide rail 4 has a substantially U-shaped cross section as described above, the guide rail 4. It is preferable that it is a square cylinder shape which can enclose. If the movable body 5 has a shape that encloses the guide rail 4, it is possible to prevent the abrasion powder of the endless belt 3 from falling.
That is, the movable body 5 includes a bottom plate 31 that faces the bottom wall 21 of the guide rail 4, side plates 32 and 32 that face the outer surfaces of the side walls 22 and 22 of the guide rail 4, and side walls 22 and 22 of the guide rail 4. And a top plate 33 that faces the upper surface of each of the two. Thus, the movable body 5 is engaged with the guide rail 4 so as to include the guide rail 4.

  Moreover, on each inner surface facing the guide rails 4 of the bottom plate 31, the side plates 32 and 32, and the top plate 33 of the movable body 5, a jet port for jetting gas is installed. That is, a gas bearing is formed between the movable body 5 and the guide rail 4. The type of gas is not particularly limited, but air is preferred. Moreover, you may install the jet nozzle which jets gas on the outer surface of the guide rail 4 contrary to this embodiment. In the present embodiment, as shown in FIG. 3, a plate-like static pressure pad 10 made of, for example, a porous graphite is disposed as a jet port.

  Since the compressed air is supplied to the static pressure pad 10 from an air source (not shown), the movable body 5 moves against the guide rail 4 by the pressure of the air ejected from the static pressure pad 10 toward the outer surface of the guide rail 4. Slightly separated. Therefore, the movable body 5 can move with little friction. Instead of providing the gas bearing, a slide bearing or a rolling bearing may be provided between the movable body 5 and the guide rail 4.

Further, the endless belt 3 and the movable body 5 are connected by a fixing tool 16. That is, a part of the endless belt 3 is fixed to the movable body 5 via the fixing tool 16. More specifically, the fixture 16 is attached to the inner surface of the top plate 33 of the movable body 5 by conventional fixing means, and extends inward from the inner surface of the top plate 33 to the center of the movable body 5 (center of point symmetry). It extends so as to protrude. And the endless belt 3 is being fixed to the part located in the center of the movable body 5 among the fixing tools 16 by usual fixing means, such as a volt | bolt and adhesion | attachment.
Since the center of the movable body 5 is the center of gravity 20 of the movable body 5 (the center of gravity of the movable body 5 alone), the connecting position of the endless belt 3 and the fixture 16, that is, the drive point 30 to which power is applied by the endless belt 3 is That is, it coincides with the center of gravity 20 of the movable body 5.

Furthermore, the movable body 5 includes a mounting portion 6 for mounting a load 11 such as a workpiece or a measuring device. Therefore, by mounting the load 11 on the movable body 5 and moving it linearly, the actuator can move and carry the load 11.
Furthermore, the movable body 5 includes a balance weight 12 that adjusts the position of the center of gravity of the movable body 5 when the loaded object 11 is mounted, and a balance weight installation portion 7 for installing the balance weight 12.
In the present embodiment, as shown in FIG. 3, the mounting portion 6 of the mounting object 11 is provided on the left side in the width direction of the movable body 5 when the guide rail 4 is viewed from the axial end portion side. A balance weight installation portion 7 is provided on the right side surface in the direction. Of course, the installation location of the mounting portion 6 and the balance weight installation portion 7 may be reversed left and right.

The structure of the balance weight installation part 7 is not particularly limited, but can be an arm 7 that extends from the side surface in the width direction of the movable body 5 to the outside in the width direction. In the example of FIG. 3, the arm 7 is configured by attaching an L-shaped member having two plate-like portions that are continuous at a right angle to the right side surface in the width direction of the movable body 5. That is, by attaching the end of one plate-like portion of the L-shaped member to the right side surface in the width direction of the movable body 5, it extends upward from the right side surface in the width direction, and bends at a right angle from the right side surface. The arm 7 extends horizontally. The other plate-like portion of the L-shaped member is horizontal, and the balance weight 12 can be installed at the end thereof.
Here, the adjustment of the position of the center of gravity by the balance weight 12 will be described in detail with reference to FIG.

  In a state in which the mounted object 11 is not mounted, the center of gravity of the movable body 5 is at the center of the movable body 5 and coincides with the driving point 30, but when the mounted object 11 is mounted on the mounting unit 6, the mounted object 11 is mounted. The center of gravity of the entire movable body 5 including the moving body moves, and the position thereof is closer to the mounted object 11 than the center of gravity 20 of the movable body 5 alone. As a result, the driving point 30 of the movable body 5 and the center of gravity of the entire movable body 5 including the mounted object 11 do not coincide with each other. Unnecessary moments are generated in 5, and fine vibration is generated in the moving movable body 5.

  Therefore, a balance weight 12 is placed on the opposite side of the mounting object 11 across the drive point 30 to achieve a balance, and the center of gravity 40 of the entire movable body 5 including the mounting object 11, the balance weight 12, and the arm 7 is obtained. Is positioned at the center of the movable body 5 and coincides with the drive point 30 of the movable body 5. Then, even when the movable body 5 moves at a high speed and is accelerated or decelerated suddenly, an unnecessary moment is suppressed from being generated in the movable body 5 by the power of the endless belt 3. Microvibration is unlikely to occur in the movable body 5 that is mounted and moving. Therefore, there is almost no possibility that the adverse effect of the fine vibration will be exerted on the load 11 mounted on the movable body 5.

In particular, since the gas bearing with low damping has a low ability to absorb vibration, when the movable body 5 is supported on the guide rail 4 by the gas bearing, it is very important to suppress the slight vibration.
Moreover, since generation | occurrence | production of an unnecessary moment is suppressed, in order to suppress the vibration of the movable body 5, it is not necessary to enlarge the load capacity of a gas bearing. As a result, since the gas bearing can be reduced in size, the mass of the movable body 5 can be reduced, and in addition, the capacity of the motor 9 can be reduced.

  The total weight of the balance weight 12 and the arm 7 is the same as the mass of the mounted object 11, and the distance between the center of gravity 41 of the balance weight 12 and the arm 7 and the driving point 30 is the same as that of the center of gravity 42 of the mounted object 11. If the distance to the point 30 is the same, the center of gravity 40 of the entire movable body 5 including the load 11, the balance weight 12, and the arm 7 can be made coincident with the drive point 30 of the movable body 5.

  However, in this case, since the mass of the entire movable body 5 including the load 11, the balance weight 12, and the arm 7 is increased, there is a possibility that the capacity of the motor 9 needs to be increased. Therefore, in order to suppress the mass of the entire movable body 5, it is preferable that the arm 7 is extended outward in the width direction, and the distal end portion of the arm 7 on which the balance weight 12 is installed is positioned farther from the movable body 5.

  In that case, the entire center of gravity 41 of the balance weight 12 and the arm 7 is positioned on the straight extension line connecting the center of gravity 42 of the load 11 and the drive point 30. Furthermore, the mass of the load 11 is M1, the distance between the center of gravity 42 of the load 11 and the driving point 30 is L1, the total mass of the balance weight 12 and the arm 7 is M2, and the balance weight 12 and the entire arm 7 are Balance weight so that the product M1 × L1 of the mass M1 and the distance L1 and the product M2 × L2 of the mass M2 and the distance L2 are the same when the distance between the center of gravity 41 and the driving point 30 is L2. A mass of 12 is set.

  Then, using the balance weight 12 that is lighter than the load 11, the center of gravity 40 of the entire movable body 5 including the load 11, the balance weight 12, and the arm 7 is matched with the drive point 30 of the movable body 5. Thus, the mass of the entire movable body 5 including the load 11, the balance weight 12, and the arm 7 can be suppressed. That is, the mass of the balance weight 12 can be reduced as the distal end portion of the arm 7 on which the balance weight 12 is installed is separated from the movable body 5.

  Next, the operation of the actuator according to this embodiment will be described. First, the movable body 5 is kept slightly separated from the guide rail 4 by compressed air supplied to each static pressure pad 10 from an air source (not shown). Here, when the motor 9 drives the drive pulley 1, the movable body 5 is moved along the guide rail 4 through the endless belt 3 with almost no friction. Then, by controlling the driving of the driving pulley 1, the movable body 5 can be reciprocated linearly between both ends of the guide rail 4.

Such an actuator can be suitably used in a linear guide bearing device provided in a manufacturing apparatus, an inspection apparatus, a conveying apparatus, and the like, and in particular, under the condition that the movable body moves at a high speed and is rapidly accelerated or decelerated. Even if operated, it is suitable for various devices that require highly accurate and stable linear movement of the movable body.
In addition, this embodiment shows an example of this invention and this invention is not limited to this embodiment.
For example, in the present embodiment, the drive unit is configured by the motor 9, the pulleys 1 and 2, and the endless belt 3, but may be configured by, for example, a ball screw, a linear motor, or the like.

Further, in the present embodiment, by installing the balance weight 12, the center of gravity 40 of the entire movable body 5 including the load 11, the balance weight 12, and the arm 7 coincides with the drive point 30 positioned at the center of the movable body 5. If the center of gravity 40 of the entire movable body 5 including the load 11, the balance weight 12, and the arm 7 coincides with the drive point 30 of the movable body 5, the drive point 30 is It does not have to coincide with the center. That is, the drive point 30 may be located in the vicinity of the center slightly away from the center of the movable body 5.
For example, a modification example in which the drive point 30 must be disposed at a position above the center of the movable body 5 due to the dimensions of the endless belt 3 and the position of the arrangement will be described with reference to FIG. In FIG. 4, the same reference numerals as those in FIG. 3 are assigned to the same or corresponding parts as in FIG.

  The second arm 8 extending upward is provided on the central portion of the top plate 33 of the movable body 5, and the second balance weight 17 is installed on the second arm 8. When the second arm 8 and the second balance weight 17 are not used, the center of gravity 40 of the entire movable body 5 including the first and second balance weights 12 and 17 and the first and second arms 7 and 8 is used. It is moved above the center of gravity. As a result, the center of gravity 40 of the entire movable body 5 is matched with the drive point 30 of the movable body 5.

Further, since the second balance weight 17 is installed at a position away from the drive point 30, the mass of the second balance weight 17 can be reduced by that amount. Therefore, the mass of the entire movable body 5 including the load 11, the first and second balance weights 12 and 17, and the first and second arms 7 and 8 can be reduced.
Further, the endless belt 3 may be an endless belt obtained by joining both ends of a belt-like belt.

DESCRIPTION OF SYMBOLS 1 Drive pulley 2 Driven pulley 3 Endless belt 4 Guide rail 5 Movable body 6 Mount part 7,8 Arm 9 Motor 11 Mounted object 12,17 Balance weight 20 Center of gravity of movable body 30 Drive point 40 Center of gravity of entire movable body

Claims (4)

A guide rail extending in the axial direction, a movable body attached to linearly movably the guide rail in the axial direction along the guide rail, the movable body by applying power to the heart near portion within said movable member An actuator that linearly moves by mounting a load on the movable body,
A balance weight that adjusts the position of the center of gravity of the movable body to match the center of gravity of the movable body when the mounted object is mounted with a drive point to which the power is applied ;
The movable body, which has a mounting portion for mounting the mounting object on one widthwise side, have a first balance weight installation portion for installing the first balance weight in the width direction other side, Furthermore, it has a second balance weight installation part for installing the second balance weight above,
An actuator in which the drive point that coincides with the center of gravity of the movable body when the mounted object is mounted does not coincide with the center of the movable body . Said first balance weight installation portion is provided with an arm extending outward in the width direction from the other widthwise side face of the movable body, said first balance weight is installed to the tip portion of the arm is lighter than the payloads The actuator according to claim 1 , wherein A manufacturing apparatus comprising the actuator according to claim 1. An inspection apparatus comprising the actuator according to claim 1.

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