JP2015020220A5 - - Google Patents

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Publication number
JP2015020220A5
JP2015020220A5 JP2013147765A JP2013147765A JP2015020220A5 JP 2015020220 A5 JP2015020220 A5 JP 2015020220A5 JP 2013147765 A JP2013147765 A JP 2013147765A JP 2013147765 A JP2013147765 A JP 2013147765A JP 2015020220 A5 JP2015020220 A5 JP 2015020220A5
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JP
Japan
Prior art keywords
rail
linear
shaft base
upper shaft
linear block
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JP2013147765A
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Japanese (ja)
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JP2015020220A (en
JP6183021B2 (en
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Priority to JP2013147765A priority Critical patent/JP6183021B2/en
Priority claimed from JP2013147765A external-priority patent/JP6183021B2/en
Publication of JP2015020220A publication Critical patent/JP2015020220A/en
Publication of JP2015020220A5 publication Critical patent/JP2015020220A5/ja
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Description

直動軸受23は、レール231及びリニアブロック(移動体)232を含む。直動軸受23は、レール231に案内されて転動体が回転することにより、当該転動体を有するリニアブロック232が直線運動をする機械要素部品である。リニアブロック232は、直方体状をなし、予めレール231に組み付けられている。本のレール231に、2つのリニアブロック232が組み付けられている。図1は、レール231の軸方向からリニアブロック232を描いているため、奥側のリニアブロック232は隠れている。
なお、1本のレール231に組み付けられるリニアブロック232の数は、1つでもよいし、3つ以上でもよい。
また、直動軸受23は、圧縮空気を介してリニアブロック232がレール231に案内されるものでもよい。
The linear motion bearing 23 includes a rail 231 and a linear block (moving body) 232. The linear motion bearing 23 is a machine element component in which the linear block 232 having the rolling element linearly moves when the rolling element rotates while being guided by the rail 231. The linear block 232 has a rectangular parallelepiped shape and is assembled to the rail 231 in advance. In one rail 231, two linear blocks 232 are assembled. Since FIG. 1 depicts the linear block 232 from the axial direction of the rail 231, the linear block 232 on the back side is hidden.
Note that the number of linear blocks 232 assembled to one rail 231 may be one, or may be three or more.
Further, the linear motion bearing 23 may be one in which the linear block 232 is guided to the rail 231 through compressed air.

他方、上方に噴出した加圧空気は下側のエアパッド27及び垂下部材29を介して上軸ベース26を下方へ引っ張る力を上軸ベース26及び垂下部材29の接合面付近(スラスト軸受25と上側のエアパッド27との中間位置)に発生させる。上軸ベース26を下方へ引っ張る当該力は、スラスト軸受25の上面端部を支点にして、スラスト軸受25と上側のエアパッド27との中間位置における上軸ベース26部分を下方へ曲げるように変形させる。その結果、図6に示す上側のエアパッド27の取り付け及び加圧空気の噴出により上方へ反った上軸ベース26の外側は下方へ撓み、上軸ベース26の全体形状はより平坦な方向へ変形する。よって、上軸ベース上に載置したレール321の変形を抑えることができる。結果として、上部ステージ部30の移動精度の低下を抑えることができる。 On the other hand, the pressurized air jetted upward has a force that pulls the upper shaft base 26 downward via the lower air pad 27 and the hanging member 29 in the vicinity of the joint surface between the upper shaft base 26 and the hanging member 29 (the thrust bearing 25 and the upper side). Of the air pad 27). The force pulling the upper shaft base 26 downward is deformed so that the upper shaft base 26 portion at the intermediate position between the thrust bearing 25 and the upper air pad 27 is bent downward with the upper end of the thrust bearing 25 as a fulcrum. . As a result, the outer side of the upper shaft base 26 warped upward by the attachment of the upper air pad 27 and the ejection of pressurized air shown in FIG. . Therefore, deformation of the rail 321 placed on the upper shaft base can be suppressed. As a result, it is possible to suppress a decrease in the movement accuracy of the upper stage unit 30.

JP2013147765A 2013-07-16 2013-07-16 Stage equipment Active JP6183021B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013147765A JP6183021B2 (en) 2013-07-16 2013-07-16 Stage equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013147765A JP6183021B2 (en) 2013-07-16 2013-07-16 Stage equipment

Publications (3)

Publication Number Publication Date
JP2015020220A JP2015020220A (en) 2015-02-02
JP2015020220A5 true JP2015020220A5 (en) 2016-07-07
JP6183021B2 JP6183021B2 (en) 2017-08-23

Family

ID=52485154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013147765A Active JP6183021B2 (en) 2013-07-16 2013-07-16 Stage equipment

Country Status (1)

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JP (1) JP6183021B2 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62168089A (en) * 1986-01-21 1987-07-24 キヤノン株式会社 Movement guide apparatus
JP2007232648A (en) * 2006-03-02 2007-09-13 Sumitomo Heavy Ind Ltd Stage device
JP4782710B2 (en) * 2006-03-02 2011-09-28 住友重機械工業株式会社 Stage equipment
US8104752B2 (en) * 2006-03-20 2012-01-31 Boaz Eidelberg Integrated large XY rotary positioning table with virtual center of rotation
JP5137218B1 (en) * 2011-08-30 2013-02-06 株式会社ソディック Machine Tools

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