JP6161501B2 - Linear gauge sensor - Google Patents

Description

  The present invention relates to a linear gauge sensor.

  Conventionally, the structure of a linear gauge sensor that detects various dimensions, displacement, etc., is a structure in which the scale that moves linearly with the contact and the detection function that detects the scale are all contained in the housing. It is. Because of this integrated structure, if the linear motion sensor is damaged due to vibration from the installation location of the linear gauge sensor, vibration during measurement received from the measurement object, dust in the measurement environment, etc., the entire linear gauge sensor I had to repair or replace it. For such a linear gauge sensor, Patent Documents 1 and 2 that disclose techniques for facilitating miniaturization and replacement of parts are known.

  Japanese Patent Application Laid-Open No. H10-260260 discloses a technique that enables a linear gauge having different measurement ranges to be configured in a small and simple manner. The linear gauge is a movable mechanism assembly that supports the shaft with a ball spline and enables direct movement, and the slit plate is fixed to the slit plate holder of the movable mechanism assembly, and the displacement of the linearly moving slit plate is detected without contact. The movable mechanism assembly and the displacement detection assembly are connected using a connecting member and housed in a case. The length of the connecting member and the slit plate is set so that the stroke amount of the slit plate corresponding to the measurement range of the linear gauge to be configured is ensured and the slit plate is positioned within the displacement detection range of the displacement detection block. .

  Patent Document 2 discloses a technique for facilitating replacement of an encoder head in a linear encoder. A linear encoder has a housing for storing a measurement scale, an end block for fixing the housing to an object, and an encoder head to which a sensor unit that scans the scale stored in the housing and obtains position information is connected. In addition, a part or all of the end block is accommodated in the housing, a sealing member is provided between the end block accommodating portion and the scale accommodating portion of the housing, and the housing is attached to the object by the fixture via the end block. Fixed.

JP 2010-25874 A JP 2010-249602 A

  However, in the technique disclosed in Patent Document 1, since the movable mechanism assembly and the displacement detection assembly are coupled using a coupling member, the linear gauge sensor is integrated, for example, only the movable mechanism assembly is repaired and inspected. Even when doing so, it is necessary to disassemble the linear gauge sensor. The technique disclosed in Patent Document 2 is a technique that facilitates exchange of the measurement scale between the measurement scale and the end block for fixing to the measurement target. Neither technique is a technique that makes it possible to easily replace the linear movement part and the detection part of the linear gauge sensor.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a linear gauge sensor that can be easily repaired and replaced with a linear motion part and a detecting part in repair and replacement with a linear gauge sensor.

The present invention provides the following solutions.
(1) A linear gauge sensor that detects a uniaxial displacement of an object to be measured, and includes a linear motion portion that linearly moves in accordance with the uniaxial displacement, and a scale portion that indicates the displacement of the linear motion portion. A movable mechanism unit, a gripping unit that grips the movable mechanism unit, and a displacement detection unit that is incorporated in the gripping unit and detects a displacement of the scale unit and outputs a signal based on the detected displacement. A linear gauge sensor, wherein the gripping unit grips the displacement detecting unit so that the displacement of the scale unit can be detected.

  According to the configuration of (1), the linear gauge sensor according to the present invention includes a movable mechanism portion and a detection mechanism portion, and the movable mechanism portion linearly moves in accordance with a uniaxial displacement, The detection mechanism unit is incorporated in the gripping unit for gripping the movable mechanism unit, detects the displacement of the scale unit, and outputs a signal based on the detected displacement. A displacement detecting unit. The gripping portion of the detection mechanism portion grips the movable mechanism portion so that the displacement detection portion can detect the displacement of the scale portion.

That is, since the linear gauge sensor according to (1) is configured by separating the movable mechanism portion and the detection mechanism portion, repair and replacement can be performed for each mechanism portion in the repair and replacement in the linear gauge sensor. It is. Furthermore, by incorporating a linear motion portion and a detection portion into each of the movable mechanism portion and the detection mechanism portion, it is possible to reduce the size of each of the movable mechanism portion and the detection mechanism portion.
Therefore, the linear gauge sensor according to (1) is a linear gauge sensor that allows easy repair and replacement of the linear motion part and the detection part.

  (2) The movable mechanism section has a scale window for detecting the displacement of the scale section, and the detection mechanism section has a detection window for detecting the displacement of the scale section. And the said holding | grip part is a linear gauge sensor as described in (1) hold | gripped so that the said window for a scale and the said window for a detection may respond | correspond.

  That is, the linear gauge sensor according to (2) is configured by separating the movable mechanism portion and the detection mechanism portion, and reliably detects the displacement of the measurement object via the windows provided in each mechanism portion. be able to. Therefore, the linear gauge sensor according to (1) is a linear gauge sensor that can detect the displacement of the measurement object with certainty and can easily repair and replace the linear motion part and the detection part.

  (3) The linear gauge sensor according to (1) or (2), wherein the detection mechanism unit includes a fixing mechanism that fixes the grip portion.

That is, the linear gauge sensor according to (3) includes a fixing mechanism that can make the installation interval shorter than the conventional one when a plurality of linear gauge sensors are installed.
Therefore, the linear gauge sensor according to (3) can be installed so as to detect the displacement due to the difference in the position of the measurement object at a shorter interval than the conventional one, and the linear motion sensor is installed for each of the plurality of installed linear gauge sensors. The linear gauge sensor can be easily repaired and replaced with each other.

  According to the present invention, the linear gauge sensor can be separated into the linear motion part and the detection part, so that the linear motion sensor or the detection part can be inspected or repaired and the maintainability is improved. Furthermore, according to the present invention, the linear gauge sensor includes a fixing mechanism and can be installed at a shorter installation interval than in the past.

It is a figure which shows the structure of the movable mechanism part in the optical reflection type linear gauge sensor which concerns on one Embodiment of this invention. It is a figure which shows the structure of the detection mechanism part in the optical reflection type linear gauge sensor which concerns on one Embodiment of this invention. It is a figure which shows that the movable mechanism part and the detection mechanism part were combined in the optical reflection type linear gauge sensor which concerns on one Embodiment of this invention. It is a figure which shows the structure of the movable mechanism part in the optical transmission type linear gauge sensor which concerns on one Embodiment of this invention. It is a figure which shows the structure of the detection mechanism part in the optical transmission type linear gauge sensor which concerns on one Embodiment of this invention. It is a figure which shows that the movable mechanism part and the detection mechanism part were combined in the optical transmission type linear gauge sensor which concerns on one Embodiment of this invention. It is a figure which shows the relationship between the moving slit board and the fixed slit board in the optical transmission type linear gauge sensor which concerns on one Embodiment of this invention. It is a figure which shows the example of the measurement using the linear gauge sensor which concerns on one Embodiment of this invention.

[Embodiment 1]
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The displacement detector 40 of the linear gauge sensor 1 according to the first embodiment is an optical reflection type. In the optical reflection type, light projected from a light source (for example, LED (Light Emitting Diode)) is reflected by a moving slit plate, and the light receiving element receives the reflected light. The linear gauge sensor 1 includes a movable mechanism unit 2 and a detection mechanism unit 4. Each will be described with reference to the drawings.

  FIG. 1 is a diagram showing a configuration of a movable mechanism 2 in an optical reflective linear gauge sensor 1 according to an embodiment of the present invention. The movable mechanism unit 2 incorporates a linear motion unit 30 that linearly moves in accordance with a uniaxial displacement, and a scale unit 20 that indicates the displacement of the linear motion unit 30.

  As illustrated in FIG. 1, the linear motion unit 30 includes a frame 31, a probe 32, a shaft 33, and a bearing 34 that inhibits rotation of the shaft 33 around the axis and guides linear motion in the axial direction. A stem 35, a slit plate holder 38, and a spring 39 are included.

The probe 32 is fixed to one end of the shaft 33. The bearing 34 into which the shaft 33 to which the measuring element 32 is fixed is inserted is accommodated in the stem 35, and the stem 35 is opposite to the side where the measuring element 32 is provided in the hole provided in the frame 31. The side end is fixed to the frame 31 in the inserted form.
A slit plate holder 38 is fixed to the end of the shaft 33 opposite to the end to which the probe 32 is fixed by an adhesive or the like, and both ends of the spring 39 are respectively attached to the frame 31 and the slit plate holder 38. As a result, the slit plate holder 38 is biased toward the probe 32.

  According to such a configuration of the movable mechanism section 2, the spring 39 is configured such that the shaft 33 with the probe 32 fixed at one end and the slit plate holder 38 fixed at the other end is applied with a biasing force in the direction of the probe 32. It can be fixed to the frame 31 so that only 33 axial movements are allowed.

The scale unit 20 is covered with a case 201, and the case 201 is provided with a scale window 211 for detecting the displacement of the scale unit 20.
In the scale unit 20, the slit plate 21 is fixed to the slit plate holder 38 and moves along with the axial movement of the shaft 33.

  The length of the slit plate 21 is adjusted according to the measurement range. That is, the longer the measurement range, the longer the slit plate 21 is used so that the slit plate 21 moves linearly with the linear movement of the shaft 33 and the light emitted from the light source unit 41 can be reflected. .

  Here, the slit plate 21 is provided with a plurality of slits. The plurality of slits are made of a material that reflects light such as metal (such as chromium) so as to reflect light. The slit plate 21 may function as an optical diffractor for diffracting light and reflect light. In this case, the light diffracting body for diffracting the light does not need to be a slit, and may be uneven such as a saw blade or a rectangle.

  The light emitted from the light source unit 41 passes through the scale window 211 and enters the scale unit 20. The slit plate 21 reflects incident light. The reflected light is received by the light receiving unit 42 integrated with the light source unit 41. The light source unit 41 and the light receiving unit 42 will be described with reference to FIG.

FIG. 2 is a diagram illustrating a configuration of the detection mechanism unit 4 in the optical reflective linear gauge sensor 1 according to the embodiment of the present invention.
The detection mechanism unit 4 includes a gripping unit 50 that grips the movable mechanism unit 2 and a displacement detection unit 40 that detects the displacement of the scale unit 20 and outputs a signal based on the detected displacement. The grip 50 is provided with a detection window 511 for detecting the displacement of the scale 20, and the grip 50 grips the displacement detector 40 so that the displacement of the scale 20 can be detected.
As shown in FIG. 2, the displacement detection unit 40 includes a light source unit 41 having an LED as a light source, a lens for collimating light, and the like, and a circuit board on which a light receiving element and a signal processing circuit are mounted. And a light receiving unit 42 integrated with the light source unit 41.

The grip part 50 grips the movable mechanism part 2 so that the displacement detection part 40 can measure the displacement of the scale part 20. As shown in FIG. 2, the gripping portion 50 has an installation hole 501 in which the movable mechanism portion 2 is installed, and a clamping gap is provided between the first surface 502 and the second surface 503. . After the movable mechanism unit 2 is installed in the installation hole 501, the first surface 502 and the second surface 503 are tightened. For example, the first surface 502 and the second surface 503 are tightened by screws (not shown) embedded in the gripping portion 50, and the gripping portion 50 grips the movable mechanism portion 2 by tightening.
Such a mechanism alleviates the one-point concentrated tightening with respect to the movable mechanism portion 2 so that the movement of the shaft 33 is not hindered.

  Furthermore, the grip part 50 may have a protrusion (rib) or a recess, and the movable mechanism part 2 may have a recess or protrusion (rib) corresponding to the protrusion (rib) or the recess of the grip part 50. The gripping part 50 can detect the displacement of the scale part 20 by gripping the movable mechanism part 2 so that the protrusions (ribs) or the recesses correspond to each other.

  When the movable mechanism unit 2 is installed in the installation hole 501, the light emitted from the light source unit 41 enters the scale unit 20 from the detection window 511 through the scale window 211 of the movable mechanism unit 2. The light is reflected by the slit plate 21, passes through the detection window 511 from the scale window 211, and enters the light receiving element of the light receiving unit 42.

  The signal processing circuit mounted on the light receiving unit 42 detects a displacement indicating the moving amount and moving direction of the slit plate 21 by the light detected by the light receiving element, and outputs a signal based on the detected displacement to a predetermined standard. 521 to output.

FIG. 3 is a view showing that the movable mechanism 2 and the detection mechanism 4 are combined in the optical reflective linear gauge sensor 1 according to the embodiment of the present invention.
As shown in FIG. 3, the gripping unit 50 of the detection mechanism unit 4 includes a scale window 211 and a detection window 511 so that the displacement detection unit 40 can detect the displacement of the scale unit 20 of the movable mechanism unit 2. The movable mechanism part 2 is gripped so as to correspond. In this way, the entire linear gauge sensor 1 is obtained by gripping the movable mechanism section 2 having the moving slit plate 21 and the detection mechanism section 4 having the light source section 41 and the light receiving section 42 so that the light passes. It is configured as a unit.
The linear gauge sensor 1 is configured such that the gripping part 50, the stem 35, etc. of the detection mechanism part 4 are moved by a stand (not shown) or the like so that the probe 32 of the movable mechanism part 2 contacts the measurement location of the measurement object. By setting the position, it is possible to measure a physical quantity (for example, a moving amount or a thickness of the measurement object) at a location where the probe 32 abuts.

[Embodiment 2]
The displacement detector 40 of the linear gauge sensor 1 according to the second embodiment is an optical transmission type. In the optical transmission type, the light source and the light receiving element face each other across the moving slit plate, and the light emitted from the light source passes through the moving slit plate, and the transmitted light is received by the light receiving element.

FIG. 4 is a diagram showing a configuration of the movable mechanism 2 in the optical transmission type linear gauge sensor 1 according to the embodiment of the present invention.
As shown in FIG. 4, the movable mechanism 2 is the same as that shown in FIG.

  The slit plate 21 is fixed to the slit plate holder 38 and moves along with the axial movement of the shaft 33. The fixed slit plate 22 is fixed to the frame 31 in a state of being close to the moving slit plate 21.

  The length of the slit plate 21 is adjusted according to the measurement range. That is, the longer the measurement range is, the longer the slit plate 21 is so that the slit plate 21 moves linearly between the fixed slit plate 22 and the light source parts 41a and 41b as the shaft 33 moves linearly. Is used.

Here, the slit plate 21 is provided with a plurality of slits, and the role of the gauge is obtained by spatially encoding light transmitted through the slit plate 21 in accordance with the amount of displacement of the slit plate 21. Fulfill. In addition, the fixed slit plate 22 represents light that is spatially encoded by the slit plate 21 and then passes through the fixed slit plate 22. The displacement amount of the slit plate 21 is expressed by intensity, and the moving direction of the slit plate 21 is expressed by phase. A plurality of slits are provided for decoding light.
The light receiving units 42 a and 42 b detect light emitted from the light source units 41 a and 41 b and transmitted through the slit plate 21 and the fixed slit plate 22. The light source units 41a and 41b and the light receiving units 42a and 42b will be described with reference to FIG.

  As shown in FIG. 4, the scale unit 20 is covered with a case 201, and the case 201 has scale windows 211a and 211b.

FIG. 5 is a diagram showing a configuration of the detection mechanism unit 4 in the optical transmission type linear gauge sensor 1 according to an embodiment of the present invention.
As illustrated in FIG. 5, the detection mechanism unit 4 includes light source units 41 a and 41 b having LEDs as light sources, lenses for collimating light, and the like, and a circuit board on which a light receiving element and a signal processing circuit are mounted. The displacement detection part 40 which has light-receiving part 42a, 42b, and the holding part 50 which hold | grips the movable mechanism part 2 are provided. Since the holding part 50 is the same as that of FIG. 2, description is abbreviate | omitted.

  When the movable mechanism unit 2 is installed in the installation hole 501, the light emitted from the light source units 41 a and 41 b passes through the scale window 211 a of the movable mechanism unit 2 from the detection window 511 a to the scale unit 20. Then, the light passes through the slit plate 21 and the fixed slit plate 22 in sequence, passes through the detection window 511b from the scale window 211b, and enters the light receiving elements of the light receiving portions 42a and 42b.

  The signal processing circuits mounted on the light receiving parts 42a and 42b detect the light emitted from the light source parts 41a and 41b and transmitted through the slit plate 21 and the fixed slit plate 22 by the light receiving elements of the light receiving parts 42a and 42b. The detected light detects a displacement indicating the amount and direction of movement of the slit plate 21, and outputs a signal based on the detected displacement from the output unit 521.

FIG. 6 is a diagram showing that the movable mechanism portion 2 and the detection mechanism portion 4 are combined in the optical transmission type linear gauge sensor 1 according to the embodiment of the present invention.
As shown in FIG. 6, the gripping unit 50 of the detection mechanism unit 4 has the scale windows 211 a and 211 b and the detection window 511 a so that the displacement detection unit 40 can detect the displacement of the scale unit 20 of the movable mechanism unit 2. , 511b, the movable mechanism 2 is gripped. As described above, the linear gauge sensor is obtained by gripping the movable mechanism portion 2 having the moving slit plate 21 and the detection mechanism portion 4 having the light source portions 41a and 41b and the light receiving portions 42a and 42b so as to transmit light. 1 as a whole is constructed as a unit.
The linear gauge sensor 1 is configured such that the gripping part 50, the stem 35, etc. of the detection mechanism part 4 are moved by a stand (not shown) or the like so that the probe 32 of the movable mechanism part 2 contacts the measurement location of the measurement object. By setting the position, it is possible to measure a physical quantity (for example, a moving amount or a thickness of the measurement object) at a location where the probe 32 abuts.

FIG. 7 is a diagram showing the relationship between the moving slit plate 21 and the fixed slit plate 22 in the optical transmission type linear gauge sensor 1 according to one embodiment of the present invention.
As shown in FIG. 7, the slit plate 21 that moves integrally with the shaft 33 and the fixed slit plate 22 that is fixed at a fixed position are arranged to face each other. Light and dark scales are printed on the slits at regular intervals. Since it is necessary to determine the moving direction (+, − direction) of the slit plate 21 in order to count, two types of slits A and B are arranged on the fixed slit plate 22. The slit B is disposed at a position shifted by 1/4 P (pitch). The light source portions 41a and 41b and the light receiving portions 42a and 42b face each other across these slits.

  In such a configuration, when the moving slit plate 21 moves relative to the fixed slit plate 22, the light passing through the slit A and the slit B of the fixed slit plate 22 repeats light and dark. Based on this brightness, two square wave signals having a phase difference of 90 degrees in the same cycle are output from the signal processing circuits of the light receiving units 42a and 42b. A data processing device (for example, a counter) that receives the square wave signal determines the direction from the advance or delay of the phase, performs addition or subtraction, and counts to calculate the displacement amount.

FIG. 8 is a diagram illustrating an example of measurement using the linear gauge sensor 1 according to an embodiment of the present invention. As shown in FIG. 8, due to the configuration of the movable mechanism portion 2 and the detection mechanism portion 4 in the linear gauge sensor 1, the interval 601 when the linear gauge sensors 1a and 1b are installed side by side is shorter than the conventional distance.
Furthermore, the linear gauge sensor 1 is provided with a fixing mechanism 700 that can make the installation interval shorter than the conventional one when a plurality of linear gauge sensors 1 are installed. Specifically, as illustrated in FIG. 8, the fixing mechanism 700 includes a fixing hole 701 (for example, fixing holes 701 a and 701 b) and a measurement reference base 702. The detection mechanism 4a of the linear gauge sensor 1a is fixed to the measurement reference base 702 via a fixing hole 701a, for example, with a bolt or the like, and the detection mechanism 4b of the linear gauge sensor 1b is also measured via the fixing hole 701b. It is fixed to the base 702.
That is, the plurality of linear gauge sensors 1a and 1b can be installed at a shorter installation interval than conventional ones.
If such a linear gauge sensor 1 is used, a plurality of linear gauge sensors 1a and 1b are arranged at a distance interval shorter than the conventional one, and a measurement object is measured, for example, a displacement when a constant load is gradually applied to a component. Can be measured with multiple channels having a shorter distance than conventional ones.

According to the present embodiment, the linear gauge sensor 1 includes a movable mechanism unit 2 and a detection mechanism unit 4, and the movable mechanism unit 2 includes a linear motion unit 30 that linearly moves according to a uniaxial displacement, and a linear motion unit. The detection mechanism unit 4 detects the displacement of the scale unit 20 by detecting the displacement of the scale unit 20 and the gripping unit 50 that grips the movable mechanism unit 2. And a displacement detector 40 that outputs a signal based on the above. The gripping unit 50 grips the scale window 211 and the detection window 511 so that the displacement detection unit 40 can detect the displacement of the scale unit 20. Furthermore, the detection mechanism unit 4 includes a fixing mechanism 700 that fixes the gripping unit 50, and allows a plurality of linear gauge sensors 1 to be installed at shorter installation intervals than in the past.
Therefore, the linear gauge sensor 1 is a linear gauge sensor 1 in which the movable mechanism portion 2 and the detection mechanism portion 4 can be easily repaired and replaced. The detection mechanism portion 4 includes the fixing mechanism 700, so that a plurality of linear gauge sensors 1 are provided. The sensor 1 can be installed with a shorter installation interval than before.

  As mentioned above, although embodiment of this invention was described, this invention is not restricted to embodiment mentioned above. The effects described in the embodiments of the present invention are only the most preferable effects resulting from the present invention, and the effects of the present invention are limited to those described in the embodiments of the present invention. is not.

  In the present embodiment, the optical embodiment has been described. However, the present invention is not limited to the optical embodiment. A magnetic type in which the displacement of the moving slit plate is detected by magnetism or a capacitance type in which the displacement of the moving slit plate is detected by electrostatic capacitance may be used. The linear gauge sensor 1 configured to detect the displacement of the linear motion unit 30 incorporated in the movable mechanism unit 2 by the detection mechanism unit 4 separated from the movable mechanism unit 2 allows repair and replacement for each mechanism unit. Is possible.

DESCRIPTION OF SYMBOLS 1, 1a, 1b Linear gauge sensor 2, 2a, 2b Movable mechanism part 20 Scale part 21 Slit board 22 Fixed slit board 30 Direct acting part 31 Frame 32 Measuring element 33 Shaft 34 Bearing 35 Stem 38 Slit board holder 39 Spring 201 Case 211 , 211a, 211b Scale window 4, 4a, 4b Detection mechanism part 40 Displacement detection part 41, 41a, 41b Light source part 42, 42a, 42b Light receiving part 50 Grip part 501, 501a, 501b Installation hole 502 First surface 503 First Two surfaces 511, 511a, 511b Detection window 521 Output unit 700 Fixing mechanism 701, 701a, 701b Fixing hole 702 Measurement reference table

Claims (2)

A linear gauge sensor that detects displacement in one axial direction of a measurement object,
A movable mechanism portion in which a linear motion portion that linearly moves according to the displacement in the uniaxial direction, and a scale portion that indicates the displacement of the linear motion portion;
A detection mechanism unit including a gripping unit that grips the movable mechanism unit, and a displacement detection unit that is incorporated in the gripping unit, detects a displacement of the scale unit, and outputs a signal based on the detected displacement. ,
The movable mechanism has a scale window for detecting the displacement of the scale.
The detection mechanism unit has a detection window for detecting displacement of the scale unit,
The gripping part grips the scale window and the detection window so as to correspond to each other.
Linear gauge sensor. The linear gauge sensor according to claim 1, wherein the detection mechanism unit includes a fixing mechanism that fixes the grip portion.

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