JP6752598B2 - Length gauge and touch probe with optical scale - Google Patents
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- JP6752598B2 JP6752598B2 JP2016053414A JP2016053414A JP6752598B2 JP 6752598 B2 JP6752598 B2 JP 6752598B2 JP 2016053414 A JP2016053414 A JP 2016053414A JP 2016053414 A JP2016053414 A JP 2016053414A JP 6752598 B2 JP6752598 B2 JP 6752598B2
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- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
本発明は、光学スケールを有する測長器およびタッチ・プローブに係り、特に、コンプライアント機構を用いた計測に好適な光学スケールを有する測長器およびタッチ・プローブに関する。 The present invention relates to a length measuring instrument and a touch probe having an optical scale, and more particularly to a length measuring instrument and a touch probe having an optical scale suitable for measurement using a compliant mechanism.
微小穴で代表される微小部の径や深い凹部の深さや傾き等の正確な測長には、プローブを用いた接触及び非接触方式の測定が多く用いられる。例えば、特許文献１では、タッチ・プローブを用いた測長において、測定子を支持する支持部材の着座機構を必要としない、簡単なタッチ・プローブを実現するために、測定子が被測定物に当接すると、測定子を有するレバーが、固定接点台とその上方の第１、第２接点レバーを接続する第１、第２支点部を中心に回動する。そして、回動支点となる支点部に対応して設けた接点部が開いて、測定子が被測定物に接触したことを検出している。 Contact and non-contact methods using a probe are often used for accurate length measurement of the diameter of minute portions represented by minute holes and the depth and inclination of deep recesses. For example, in Patent Document 1, in length measurement using a touch probe, the stylus is attached to an object to be measured in order to realize a simple touch probe that does not require a seating mechanism of a support member that supports the stylus. Upon contact, the lever having the stylus rotates about the first and second fulcrums connecting the fixed contact base and the first and second contact levers above it. Then, the contact portion provided corresponding to the fulcrum portion serving as the rotation fulcrum is opened, and it is detected that the stylus is in contact with the object to be measured.
従来のタッチ・プローブの他の例が、特許文献２に記載されている。この公報に記載のタッチ・プローブは、細穴の奥や突起部を有するような被測定物でも高精度、高速に測定可能なように、タッチ・プローブがプローブ本体と、プローブ本体の先端部に形成され、被測定物に接触する測定子と、変位機構と、変位検出部を有している。変位機構は、プローブ本体の軸方向に垂直でかつ互いに直交する２方向に変位可能であり、変位検出部は、２方向の各変位を検出する変位機構内に設けられている。なお、プローブ本体と変位機構が、一体に形成される場合もある。 Another example of a conventional touch probe is described in Patent Document 2. The touch probe described in this publication has a touch probe on the probe body and the tip of the probe body so that an object to be measured having a small hole or a protrusion can be measured with high accuracy and high speed. It has a stylus that is formed and comes into contact with the object to be measured, a displacement mechanism, and a displacement detection unit. The displacement mechanism can be displaced in two directions perpendicular to the axial direction of the probe body and orthogonal to each other, and the displacement detection unit is provided in the displacement mechanism for detecting each displacement in the two directions. The probe body and the displacement mechanism may be integrally formed.
特許文献３には、タッチ・プローブが、固定部材とフィーラと光源を含む検出システムと、光学画像センサと、光学マスクを有することが開示されている。そして、フィーラは、１個以上の弾性エレメントにより、固定部材に対して静止位置に保持され、変位力に応じて静止位置から移動可能であり、光源は、固定部材に対するフィーラの変位によって駆動される。また、光学画像センサは、光源によって発された光を受像し、光学マスクは、光源と光学画像センサ間の光路上に設けられている。 Patent Document 3 discloses that the touch probe has a detection system including a fixing member, a feeler, and a light source, an optical image sensor, and an optical mask. Then, the feeler is held in a stationary position with respect to the fixed member by one or more elastic elements, and can be moved from the stationary position according to the displacement force, and the light source is driven by the displacement of the feeler with respect to the fixed member. .. Further, the optical image sensor receives the light emitted by the light source, and the optical mask is provided on the optical path between the light source and the optical image sensor.
しかしながら、タッチ・プローブを用いて微細孔や深い穴等を正確に測定する際は、タッチ・プローブを水平方向にして測定する場合には、プローブ（測定子）及びプローブを保持するスタイラスの自重による影響をキャンセルしなければならない。また、深い穴等の計測で多用される、スタイラスを垂直にして測定する場合には、スタイラスが鉛直軸から傾いて取り付けられることを防止する、もしくは傾いて取り付けられた場合にはその傾き量を正確に把握する必要がある。 However, when accurately measuring micropores, deep holes, etc. using a touch probe, when measuring with the touch probe in the horizontal direction, it depends on the weight of the probe (meter) and the stylus holding the probe. The effect must be canceled. In addition, when measuring with the stylus vertical, which is often used for measuring deep holes, etc., prevent the stylus from being installed at an angle from the vertical axis, or when it is installed at an angle, the amount of inclination is used. You need to know exactly.
また、これらの影響を無くしたとしても、タッチ・プローブ内部の各部品の取付け誤差やガタつき、摩擦により、測定対象品との接触圧等が変化し、測定誤差の要因になる。また、タッチ・プローブの構成部品が多い場合、長期にわたる使用では、タッチ・プローブの各構成部品のガタつきや摩擦の増加により、集積誤差が増大し、計測精度が低下する恐れがある。これらの不具合を改善するためには、タッチ・プローブの構成部品をできるだけ減らし、もしくは一体化して、ガタつきや摩擦を低減することが望ましいが、現状はまだ不十分である。 Even if these effects are eliminated, the contact pressure with the measurement target product changes due to mounting error, rattling, and friction of each component inside the touch probe, which causes a measurement error. Further, when there are many components of the touch probe, in long-term use, the integration error may increase due to the increase in rattling and friction of each component of the touch probe, and the measurement accuracy may decrease. In order to improve these problems, it is desirable to reduce or integrate the components of the touch probe as much as possible to reduce rattling and friction, but the current situation is still insufficient.
たとえば上記特許文献１では、垂直下向きにして用いるタッチ・プローブの３次元変位を高精度に測定するため、水平面内の２方向に関する接点が開き、被測定物に接触したことを検出できる。しかしながら、この特許文献１では、接点を開く構造が複雑で多数の部品を接続しているので、接続後のタッチ・プローブの調整に多大な時間を必要とする恐れがある。また、長期の使用における接続部の摩耗の影響等については、考慮されていない。 For example, in Patent Document 1, in order to measure the three-dimensional displacement of the touch probe used vertically downward with high accuracy, it is possible to detect that a contact point in two directions in the horizontal plane is opened and the touch probe is in contact with the object to be measured. However, in Patent Document 1, since the structure for opening the contacts is complicated and a large number of parts are connected, a large amount of time may be required for adjusting the touch probe after the connection. In addition, the effects of wear on the connections during long-term use are not taken into consideration.
特許文献２では、特許文献１に記載のタッチ・プローブと同様の方法で使用されるタッチ・プローブが開示されている。この公報では、水平面内２方向にタッチ・プローブが移動可能であるので、初期設定時に鉛直軸からのタッチ・プローブの軸の傾き調整等を行って、初期値を把握する必要がある。また、軸方向にはバネで押圧しているので、タッチ・プローブに余分な押圧力が発生する恐れがある。また、特許文献３では、フィーラと呼ばれる測定子をバネと磁石で支持しているので、構造が複雑になり、タッチ・プローブを構成する部品点数が増大し、各部品間のガタつきや摩擦による測定誤差を誘引する恐れがある。 Patent Document 2 discloses a touch probe used in the same manner as the touch probe described in Patent Document 1. In this publication, since the touch probe can be moved in two directions in the horizontal plane, it is necessary to adjust the inclination of the touch probe axis from the vertical axis at the time of initial setting to grasp the initial value. Further, since the touch probe is pressed by the spring in the axial direction, an extra pressing force may be generated on the touch probe. Further, in Patent Document 3, since a stylus called a feeler is supported by a spring and a magnet, the structure becomes complicated, the number of parts constituting the touch probe increases, and there is rattling or friction between each part. It may induce measurement error.
本発明は、上記従来技術の不具合に鑑みなされたものであり、その目的は、光学スケールを有する測長器およびタッチ・プローブにおいて、部品点数を減らすことを通じて、タッチ・プローブを構成する各部品間の摩擦やガタつきを減らし、高精度な測定を行うことにある。本発明の他の目的は、上記目的に加えて、光学スケールを有する測長器およびタッチ・プローブにおいて、使用環境が良くない場合やこれまでは測定が困難な条件下でも、より正確な測定を実現することにある。 The present invention has been made in view of the above-mentioned defects of the prior art, and an object of the present invention is to reduce the number of parts in a length measuring instrument having an optical scale and a touch probe to reduce the number of parts between the parts constituting the touch probe. The purpose is to reduce friction and rattling, and to perform highly accurate measurements. In addition to the above objectives, another object of the present invention is to perform more accurate measurement of a length measuring instrument and a touch probe having an optical scale even when the usage environment is not good or under conditions where it has been difficult to measure. It is to be realized.
上記目的を達成するための本発明の特徴は、反射部と透過部が自身の長手方向（Ｘ方向）に規則的に配列された光学スケールと、光学スケールに対向して配置された受光部と、前記光学スケールが取り付けられたバネ機構を有し、前記光学スケールが、前記受光部に対して実質的にＸ方向に相対移動する測長器において、前記バネ機構は実質的に平行な間隔を置いた２枚の板バネを有し、前記バネ機構の板バネ厚さ方向（Ｘ方向）の剛性が、直交する板バネ幅方向（Ｙ方向）の剛性に比べて十分低く形成されており、前記バネ機構が実質的にＸ方向にのみ変位可能としたことにある。 The features of the present invention for achieving the above object are an optical scale in which a reflecting portion and a transmitting portion are regularly arranged in its own longitudinal direction (X direction), and a light receiving portion arranged opposite to the optical scale. In a length measuring device having a spring mechanism to which the optical scale is attached and the optical scale moves substantially in the X direction with respect to the light receiving portion, the spring mechanism has a substantially parallel interval. It has two leaf springs placed on it, and the rigidity of the leaf spring mechanism in the leaf spring thickness direction (X direction) is formed to be sufficiently lower than the rigidity in the orthogonal leaf spring width direction (Y direction). The spring mechanism is substantially displaceable only in the X direction.
そしてこの特徴において、前記バネ機構は、前記２枚の板バネが、一体形成されたコンプライアンス機構であることが望ましく、前記バネ機構は、２枚の板バネの延びる長手方向（Ｚ方向）両端部付近に、Ｘ方向に切り欠いた形状を有して全体が籠型形状であってもよい。また、前記バネ機構に、測定子と、測定子を有するスタイラスとのうちいずれかを取り付け可能な測定子取付け部を有し、前記測定子取付け部に直接、または前記スタイラスを介して取り付けられた測定子の変位と前記測定子の被測定物に対する接触圧とのうち少なくともいずれかを、前記バネ機構の変位で検出可能とするのがよく、前記バネ機構は、丸棒に穴あけ加工した後、放電加工で成形して、加工による残留歪及び残留応力を実質的に無くすことが好ましい。 In this feature, it is desirable that the spring mechanism is a compliance mechanism in which the two leaf springs are integrally formed, and the spring mechanism is both ends in the longitudinal direction (Z direction) in which the two leaf springs extend. It may have a shape notched in the X direction in the vicinity and the whole may have a basket shape. Further, the spring mechanism has a stylus mounting portion to which either a stylus or a stylus having a stylus can be mounted, and is mounted directly on the stylus mounting portion or via the stylus. It is preferable that at least one of the displacement of the stylus and the contact pressure of the stylus with respect to the object to be measured can be detected by the displacement of the spring mechanism, and the spring mechanism is formed after drilling a hole in a round bar. It is preferable to mold by electric discharge processing to substantially eliminate residual strain and residual stress due to processing.
上記目的を達成する本発明の他の特徴は、被測定物と接触する接触子を有する測定子を端部に保持する軸と、前記測定子と連動して移動する光学スケールを固定して保持するスケール側ベース部と、前記光学スケールの変位を検出する受光部を固定して保持する受光部側ベース部と、前記スケール側ベース部と前記受光部側ベース部の間に形成されるバネ機構を備えたタッチ・プローブにおいて、前記バネ機構が、実質的に平行な間隔を置いた２枚の板バネを有する籠型構造であり、前記バネ機構の板バネ厚さ方向（Ｘ方向）の剛性が、直交する板バネ幅方向（Ｙ方向）の剛性に比べて十分低く形成されており、前記バネ機構は実質的にＸ方向にのみ変位可能としたことにある。 Another feature of the present invention that achieves the above object is that a shaft that holds a stylus having a contactor that comes into contact with the object to be measured at the end and an optical scale that moves in conjunction with the stylus are fixed and held. A spring mechanism formed between the scale-side base portion, the light-receiving portion-side base portion that fixes and holds the light-receiving portion that detects the displacement of the optical scale, and the scale-side base portion and the light-receiving portion-side base portion. In the touch probe provided with, the spring mechanism has a cage-shaped structure having two leaf springs spaced substantially parallel to each other, and the rigidity of the spring mechanism in the leaf spring thickness direction (X direction). However, it is formed to be sufficiently lower than the rigidity in the orthogonal leaf spring width direction (Y direction), and the spring mechanism can be substantially displaced only in the X direction.
そしてこの特徴において、前記バネ機構は、前記２枚の板バネが、一体形成されたコンプライアンス機構であり、前記バネ機構に光学スケールを取り付けることが望ましい。 In this feature, the spring mechanism is a compliance mechanism in which the two leaf springs are integrally formed, and it is desirable to attach an optical scale to the spring mechanism.
本発明によれば、光学スケールを有する測長器およびタッチ・プローブにおいて、コンプライアント機構を有する一体型の２枚の平行板バネを変位計測に用いているので、タッチ・プローブの部品点数が減り、それにより、タッチ・プローブを構成する各部品間の摩擦やガタつきが実質的に無くなり、高精度な測定を行える。また、光学スケールを有する測長器およびタッチ・プローブにおいて、上記構成に加え密封式とすることにより、密封にＯリングや防水ブーツを使用しているので防水性とともに防振性も向上し、使用環境が良くない場合やこれまでは測定が困難な条件下でも、より正確な測定を実現できる。 According to the present invention, in a length measuring instrument having an optical scale and a touch probe, since two integrated parallel leaf springs having a compliant mechanism are used for displacement measurement, the number of parts of the touch probe is reduced. As a result, friction and rattling between the parts constituting the touch probe are substantially eliminated, and high-precision measurement can be performed. In addition to the above configuration, the length measuring instrument and touch probe with an optical scale use an O-ring and waterproof boots for sealing, which improves waterproofness and vibration isolation. More accurate measurement can be achieved even in poor environment or under conditions that were previously difficult to measure.
以下、本発明に係る光学スケールを有する測長器およびタッチ・プローブ１００のいくつかの実施例を、図面を用いて説明する。図１は、本発明に係るタッチ・プローブ１００の一実施例の図であり、図１（ａ）はその正面図、図１（ｂ）はその底面図である。図２は、タッチ・プローブ１００が備えるバネ機構５０の斜視図である。なお、図１では主要部のみを示しており、保護及び防水キャップとなる円筒状ケースを取り去って、タッチ・プローブ１００の内部を示している。 Hereinafter, some examples of the length measuring instrument and the touch probe 100 having an optical scale according to the present invention will be described with reference to the drawings. 1A and 1B are views of an embodiment of the touch probe 100 according to the present invention, FIG. 1A is a front view thereof, and FIG. 1B is a bottom view thereof. FIG. 2 is a perspective view of the spring mechanism 50 included in the touch probe 100. Note that FIG. 1 shows only the main part, and the inside of the touch probe 100 is shown by removing the cylindrical case that serves as a protective and waterproof cap.
タッチ・プローブ１００は、詳細を図２に示すバネ機構５０と、測定系を構成する光学スケール２１および受光部２２、それらの制御回路から主として構成される。バネ機構５０は、Ｘ方向に配列された２枚の実質的に平行な板バネ５５、５６を有しており、各板バネ５５，５６は、その長手方向（Ｚ方向）両端部付近に、半円形状の切り欠き部である半円状ノッチ５３、５４を有している。平行に配列された２枚の板バネ５５、５６間には、Ｙ方向に貫通する矩形の開口５２が形成されている。 The touch probe 100 is mainly composed of a spring mechanism 50 whose details are shown in FIG. 2, an optical scale 21 and a light receiving unit 22 constituting a measurement system, and a control circuit thereof. The spring mechanism 50 has two substantially parallel leaf springs 55 and 56 arranged in the X direction, and each leaf spring 55 and 56 is located near both ends in the longitudinal direction (Z direction). It has semicircular notches 53 and 54, which are semicircular notches. A rectangular opening 52 penetrating in the Y direction is formed between the two leaf springs 55 and 56 arranged in parallel.
ここで、ノッチ５３、５４は、半円形状に限るものではなく、楕円形状、角部が丸まった四角形状等であってもよい。いずれの場合にも、角部に応力集中が生じないよう、角部は丸まった形状にすることが望ましい。ノッチ５３、５４の最小厚さはｔであり、板バネ５５、５６に求められるバネ定数に応じて厚さｔは設定される。 Here, the notches 53 and 54 are not limited to a semicircular shape, but may be an elliptical shape, a quadrangular shape with rounded corners, or the like. In either case, it is desirable that the corners have a rounded shape so that stress concentration does not occur at the corners. The minimum thickness of the notches 53 and 54 is t, and the thickness t is set according to the spring constant required for the leaf springs 55 and 56.
板バネ５５、５６では、板バネ５５、５６の配列方向に直交する方向であるＹ方向の幅Ｗが、その長手方向（Ｚ方向）に一定であり、Ｙ方向およびＺ方向中間部には、長手方向に延びる長丸穴状の開口５１が形成されている。開口５１は、板バネ５５、５６が面外に変形するのを防止するために形成されており、板バネ５５、５６の強度を損なわない程度の大きさである。 In the leaf springs 55 and 56, the width W in the Y direction, which is a direction orthogonal to the arrangement direction of the leaf springs 55 and 56, is constant in the longitudinal direction (Z direction), and the intermediate portion in the Y direction and the Z direction has An oblong hole-shaped opening 51 extending in the longitudinal direction is formed. The opening 51 is formed to prevent the leaf springs 55 and 56 from being deformed out of the plane, and is large enough not to impair the strength of the leaf springs 55 and 56.
２枚の平行配置された板バネ５５、５６の両端部には、ベース部１０、４０が形成されている。図１、２で左側に位置するベース部４０は、測定系を構成する受光部２２をバネ機構５０に取り付けるために設けられている。一方、図１、２で右側に位置するベース部１０は、光学スケール２１を取り付けるために設けられている。 Base portions 10 and 40 are formed at both ends of the two parallel leaf springs 55 and 56. The base portion 40 located on the left side in FIGS. 1 and 2 is provided for attaching the light receiving portion 22 constituting the measurement system to the spring mechanism 50. On the other hand, the base portion 10 located on the right side in FIGS. 1 and 2 is provided for attaching the optical scale 21.
図３に、バネ機構５０に取り付ける各取付け部材を示す。図３（ａ）は、受光部側ベース部４０に取り付ける基板支持板２５の斜視図であり、上面視Ｔ字状をしている。Ｔ字の横棒部が固定部２５１であり、この固定部２５１に形成された貫通穴が固定穴２５３である。固定穴２５３に、図示しないネジを挿通し、受光部側ベース部４０に形成したネジ穴４０１にネジ止めすることにより、基板支持板２５はベース部４０に固定される。Ｔ字の縦棒部である延長部２５２の下面側には、基板３０を取り付けるための２個の脚２３、２４が互いに間隔を置いて形成されており、この基板取付け脚２３、２４には、図で下側から基板３０をネジ止めするための取付けネジ穴２５４または貫通穴が形成されている。基板取付け脚２３、２４の下側には、ＣＰＵやメモリ等の回路素子３１〜３３が両面に配置された基板３０が取り付けられており、基板取付け脚２３、２４の長さは、回路素子３１、３２と延長部２５２が干渉するのを防止する高さになっている。基板３０の一方端側には、図４に概略を示す受光部２２が配置されている。これにより、受光部２２は、基板３０を介してベース部４０に固定される。なお、本実施例では、基板支持板２５を受光部側ベース部４０に取り付けるのにネジ止めしているが、より強固に固定するために、ネジと接着剤または接着剤単独、ロー付、溶着等により固定してもよい。 FIG. 3 shows each mounting member to be mounted on the spring mechanism 50. FIG. 3A is a perspective view of the substrate support plate 25 attached to the light receiving portion side base portion 40, and has a T-shape when viewed from above. The T-shaped horizontal bar portion is the fixing portion 251 and the through hole formed in the fixing portion 251 is the fixing hole 253. The substrate support plate 25 is fixed to the base portion 40 by inserting a screw (not shown) into the fixing hole 253 and screwing it into the screw hole 401 formed in the base portion 40 on the light receiving portion side. On the lower surface side of the extension portion 252, which is a T-shaped vertical bar portion, two legs 23, 24 for mounting the substrate 30 are formed at intervals from each other, and the substrate mounting legs 23, 24 are formed. , A mounting screw hole 254 or a through hole for screwing the substrate 30 from the lower side is formed in the figure. A board 30 in which circuit elements 31 to 33 such as a CPU and a memory are arranged on both sides is mounted on the lower side of the board mounting legs 23 and 24, and the length of the board mounting legs 23 and 24 is the circuit element 31. , 32 and the extension portion 252 have a height that prevents them from interfering with each other. A light receiving portion 22 outlined in FIG. 4 is arranged on one end side of the substrate 30. As a result, the light receiving portion 22 is fixed to the base portion 40 via the substrate 30. In this embodiment, the substrate support plate 25 is screwed to be attached to the light receiving portion side base portion 40, but in order to fix it more firmly, the screw and the adhesive or the adhesive alone, brazed, welded. It may be fixed by such as.
図３（ｂ）は、光学スケール２１をスケール側ベース部１０に取り付けるためのスケール支持板２０の斜視図である。スケール支持板２０は、段付きの板であり、長手方向一方端の下面に、図４に概略を示す光学スケール２１が、接着等により取り付けられている。スケール支持板２０の他端部の段付き部２０２には、固定穴２０１が形成されており、ネジを固定穴２０１に挿通し、スケール側ベース部１０の上面に形成したネジ穴１０１にネジ止めすることにより、光学スケール２１はベース部１０に固定される。なお、本実施例では、スケール支持板２０をベース部１０に取り付けるのにネジ止めしているが、より強固に固定するために、ネジと接着剤または接着剤単独、ロー付、溶着等により固定してもよい。 FIG. 3B is a perspective view of the scale support plate 20 for attaching the optical scale 21 to the scale side base portion 10. The scale support plate 20 is a stepped plate, and an optical scale 21 outlined in FIG. 4 is attached to the lower surface of one end in the longitudinal direction by adhesion or the like. A fixing hole 201 is formed in the stepped portion 202 at the other end of the scale support plate 20, and a screw is inserted into the fixing hole 201 and screwed into the screw hole 101 formed on the upper surface of the scale side base portion 10. By doing so, the optical scale 21 is fixed to the base portion 10. In this embodiment, the scale support plate 20 is screwed to be attached to the base portion 10, but in order to fix it more firmly, it is fixed with screws and an adhesive or an adhesive alone, brazed, welded, or the like. You may.
図４に、測定系を模式的に示す。光学スケール２１は、ガラス等の透明な材質からなるスケール基板２１４と、このスケール基板２１４上に形成した反射部２１１と透過部２１２からなるパターン２１３とを有している。通常反射部２１１と透過部２１２は同一幅であり、パターン２１３は光学スケール２１の長手方向に規則的に多数繰り返し配置されている。光学スケール２１の長手方向は、バネ機構５０の板バネ５５、５６の変位方向であるＸ方向に合わせられている。 FIG. 4 schematically shows the measurement system. The optical scale 21 has a scale substrate 214 made of a transparent material such as glass, and a pattern 213 composed of a reflecting portion 211 and a transmitting portion 212 formed on the scale substrate 214. Normally, the reflecting portion 211 and the transmitting portion 212 have the same width, and a large number of patterns 213 are regularly and repeatedly arranged in the longitudinal direction of the optical scale 21. The longitudinal direction of the optical scale 21 is aligned with the X direction, which is the displacement direction of the leaf springs 55 and 56 of the spring mechanism 50.
一方、スケール基板２１４に対向し、基板３０上に配置される受光部２２は、ＬＥＤ等からなる発光素子２２２と、発光素子２２２が発光した反射光を受光するフォトセンサ等の受光素子２２１と、発光素子２２２および受光素子２２１を制御し、パターン２１３を検出する制御基板２２３を有している。受光素子２２１は、多数のフォトダイオードのアレイ等で実現される。 On the other hand, the light receiving unit 22 facing the scale substrate 214 and arranged on the substrate 30 includes a light emitting element 222 made of an LED or the like, and a light receiving element 221 such as a photo sensor that receives the reflected light emitted by the light emitting element 222. It has a control board 223 that controls a light emitting element 222 and a light receiving element 221 and detects a pattern 213. The light receiving element 221 is realized by an array of a large number of photodiodes or the like.
図１に戻り、スケール側ベース部１０のさらに右側の端部には、順に測定子側軸４、Ｏリング溝３、直方体状の測定子取付け部１が設けられている。測定子取付け部１には、Ｘ方向に貫通する測定子取付け穴２が形成されており、用途に応じた形状の測定子や測定子（または後述する接触子）を備えたスタイラス（後述）を取り付け可能となっている。Ｏリング溝３は、この図１では図示しないケース８０を、本タッチ・プローブ１００に取り付ける際にシールするために使用するＯリング用である。なお、ベース部１０と測定子側軸４は、中実な形状である。 Returning to FIG. 1, at the right end of the scale side base portion 10, a stylus side shaft 4, an O-ring groove 3, and a rectangular parallelepiped stylus mounting portion 1 are provided in this order. The stylus mounting portion 1 is formed with a stylus mounting hole 2 penetrating in the X direction, and a stylus (described later) provided with a stylus or stylus (or a contactor described later) having a shape according to the application is provided. It can be attached. The O-ring groove 3 is for an O-ring used to seal the case 80 (not shown in FIG. 1) when it is attached to the touch probe 100. The base portion 10 and the stylus side shaft 4 have a solid shape.
タッチ・プローブ１００の受光部側ベース部４０よりも左側の端部には、順に、Ｏリング溝４１、この図１では図示しない防護用及び防水用のケース８０を取り付けるためのカバー取付け部４２、タッチ・プローブ１００を測長器に取り付けるための取付け用フランジ４３、タッチ・プローブ１００をネジ込んで測長器等に取り付けるのに使用するネジ部４４を有する固定部４５が設けられている。Ｏリング溝４１は、ケース８０との水密を保持するために用いるＯリングを保持する。ベース部４０、カバー取付け部４２、固定部４５を貫通して貫通穴４６が設けられており、受光部２２が搭載される基板３０の端部に形成した端子部３４からの配線等を、挿通できる構成となっている。 At the end on the left side of the light receiving portion side base portion 40 of the touch probe 100, an O-ring groove 41, a cover mounting portion 42 for mounting a protective and waterproof case 80 (not shown in FIG. 1), A fixing flange 43 for attaching the touch probe 100 to the length measuring instrument and a fixing portion 45 having a screw portion 44 used for screwing the touch probe 100 and attaching the touch probe 100 to the length measuring instrument or the like are provided. The O-ring groove 41 holds an O-ring used to maintain watertightness with the case 80. A through hole 46 is provided through the base portion 40, the cover mounting portion 42, and the fixing portion 45, and wiring or the like from the terminal portion 34 formed at the end of the substrate 30 on which the light receiving portion 22 is mounted is inserted. It is a structure that can be done.
本実施例のタッチ・プローブ１００は、例えば微小穴径を測定する測長器に使用される。その際、タッチ・プローブ１００の貫通穴４６に挿通した信号線を、測長器本体側に設けた制御装置に接続し、本体側制御装置とタッチ・プローブ１００間で、測定の開始・停止の指令や測定結果の収集・解析のためのデータを送受信する。 The touch probe 100 of this embodiment is used, for example, as a length measuring device for measuring a minute hole diameter. At that time, the signal line inserted through the through hole 46 of the touch probe 100 is connected to the control device provided on the length measuring instrument main body side, and the measurement is started / stopped between the main body side control device and the touch probe 100. Send and receive data for collecting and analyzing commands and measurement results.
ここで、バネ機構５０の測定子が取り付けられる側の端部をシールする防水ブーツ８１の詳細を、図３（ｃ）に断面で示す。防水ブーツ８１は、折り曲げられた構造で、大径側は円筒状のケース８０に接続している。小径側は、測定子側軸４に当接し、当接部にはシール環８２が配置されている。この防水ブーツ８１と、２個のＯリング溝３、４１に配設したＯリングにより、バネ機構５０の内部は、完全に水密になる。また、これらＯリングと防水ブーツ８１は、その弾性変形性による減衰作用の結果、柔軟に構成した本実施例の板バネ５５、５６で発生する恐れのあるハンチング現象等の不安定挙動を防止する。 Here, the details of the waterproof boot 81 that seals the end portion of the spring mechanism 50 on the side to which the stylus is attached are shown in cross section in FIG. 3 (c). The waterproof boot 81 has a bent structure, and the large diameter side is connected to the cylindrical case 80. The small diameter side is in contact with the stylus side shaft 4, and a seal ring 82 is arranged at the contact portion. The waterproof boot 81 and the O-rings arranged in the two O-ring grooves 3 and 41 make the inside of the spring mechanism 50 completely watertight. Further, these O-rings and the waterproof boot 81 prevent unstable behavior such as a hunting phenomenon that may occur in the leaf springs 55 and 56 of the present embodiment that are flexibly configured as a result of the damping action due to the elastic deformation. ..
次に本実施例に使用するバネ機構５０の製造方法の概略を、図２を用いて説明する。バネ性があり加工性に富む、例えばプリハードン鋼の丸棒を準備し、２つのベース部１０、４０間を除いて、機械加工により、各部を成形する。その際、固定部４５の貫通穴４６や測定子取付け穴２も、所定寸法に仕上げておく。なお、プリハードン鋼を使用することにより、所望のバネ性能を得られることはもちろんのこと、比較的安価にバネ機構５０を形成できる効果もある。次に、２つのベース部１０、４０間を、面落としする。すなわち、断面形状が角部に丸みを帯びた長方形となるように、ベース部１０、４０間を加工し、上面側であって端部のベース部１０、４０位置に、スケール支持板２０を取り付けるためのネジ穴１０１と基板支持板２５を取り付けるためのネジ穴４０１を加工する。 Next, the outline of the manufacturing method of the spring mechanism 50 used in this embodiment will be described with reference to FIG. For example, a round bar made of pre-hardened steel, which has springiness and is rich in workability, is prepared, and each part is formed by machining except between the two base parts 10 and 40. At that time, the through hole 46 of the fixing portion 45 and the stylus mounting hole 2 are also finished to predetermined dimensions. By using the pre-hardened steel, not only the desired spring performance can be obtained, but also the spring mechanism 50 can be formed at a relatively low cost. Next, the space between the two base portions 10 and 40 is surfaced. That is, the base portions 10 and 40 are processed so that the cross-sectional shape becomes a rectangle with rounded corners, and the scale support plate 20 is attached to the base portions 10 and 40 at the ends on the upper surface side. The screw hole 101 for attaching the screw hole 101 and the screw hole 401 for attaching the board support plate 25 are machined.
２つのベース部１０、４０間の長手方向適宜位置に、長手方向に垂直な２方向から、貫通穴を明ける。この貫通穴を開始点としてワイヤ放電加工により、２枚の平行な板バネ５５、５６を形成するための直方体状の開口５２を加工する。次に、この開口５２に直交する方向に、同様にワイヤ放電加工で、開口５２よりは小さな長丸形状の開口５１を加工する。これにより、２枚の板バネ５５、５６がベース部１０、４０と一体品として籠型に成形され、コンプライアント機構（コンプライアンス機構とも称する）を形成する。ここでコンプライアント機構とは、従来の剛体とジョイントで構成される機構とは異なり、構造の適切な場所に柔軟性を付加することにより、構造全体で機構の性能を得るメカニズムのことを言う。これにより、ワイヤ放電加工のため、加工時の残留歪や残留応力が極限まで低減され、バネとして使用する場合の障害がなくなるとともに、疲労破壊への耐性も増す。なお、上記加工において板バネ５５、５６部は、長手方向（Ｚ方向）の両軸端側は必要なバネ定数に応じて、ノッチ５３、５４として形成される。ノッチ５３、５４の形状は、板バネ５５、５６の荷重（応力）、撓み特性を保証するものであって、高精度な計測、特に直線性における精度、繰り返し測定における精度を保持するうえで重要である。そのため、ノッチ５３、５４を、曲線を含む２次元形状として最適化し、曲線や曲面を含む形状であっても容易に加工可能なワイヤ放電加工で、最適形状を実現している。ノッチ５３、５４以外の部分は、バネの変位を拡大させるとともに、板バネ５５、５６の面外へのねじれ変形等の変形の発生を抑止する。 Through holes are drilled at appropriate positions in the longitudinal direction between the two base portions 10 and 40 from two directions perpendicular to the longitudinal direction. Using this through hole as a starting point, a rectangular parallelepiped opening 52 for forming two parallel leaf springs 55 and 56 is machined by wire electric discharge machining. Next, in the direction orthogonal to the opening 52, an oval-shaped opening 51 smaller than the opening 52 is machined by wire electric discharge machining in the same manner. As a result, the two leaf springs 55 and 56 are integrally formed with the base portions 10 and 40 into a basket shape to form a compliant mechanism (also referred to as a compliance mechanism). Here, the compliant mechanism is different from the conventional mechanism composed of a rigid body and a joint, and refers to a mechanism that obtains the performance of the mechanism as a whole by adding flexibility to an appropriate place in the structure. As a result, the wire electric discharge machining reduces the residual strain and the residual stress during machining to the utmost limit, eliminates obstacles when used as a spring, and increases resistance to fatigue failure. In the above processing, the leaf springs 55 and 56 are formed as notches 53 and 54 on both shaft end sides in the longitudinal direction (Z direction) according to the required spring constant. The shapes of the notches 53 and 54 guarantee the load (stress) and bending characteristics of the leaf springs 55 and 56, and are important for maintaining high-precision measurement, especially accuracy in linearity and repeated measurement. Is. Therefore, the notches 53 and 54 are optimized as a two-dimensional shape including a curved surface, and the optimum shape is realized by wire electric discharge machining that can easily process a shape including a curved surface or a curved surface. The portions other than the notches 53 and 54 increase the displacement of the spring and suppress the occurrence of deformation such as twisting deformation of the leaf springs 55 and 56 out of the plane.
以上の放電加工により、２枚の板バネ５５、５６は、一体品として成形されるとともに、板バネ５５、５６の厚さ方向（Ｘ方向）には変位できるが、その直角方向（Ｙ方向）には変位できない１次元の変位のみが可能になる。それは、板バネ５５、５６の厚さ方向（Ｘ方向）の剛性が、板バネの幅方向（Ｙ方向）の剛性に比べて十分低くなるように形成されているからである。したがって、本実施例のタッチ・プローブ１００を垂直方向にして使用する場合の位置決めが容易になるとともに、接触圧の設定および検出が容易になる。 By the above electric discharge machining, the two leaf springs 55 and 56 are molded as an integral product and can be displaced in the thickness direction (X direction) of the leaf springs 55 and 56, but in the direction perpendicular to the thickness direction (Y direction). Only one-dimensional displacements that cannot be displaced are possible. This is because the rigidity of the leaf springs 55 and 56 in the thickness direction (X direction) is formed to be sufficiently lower than the rigidity of the leaf springs in the width direction (Y direction). Therefore, when the touch probe 100 of this embodiment is used in the vertical direction, positioning becomes easy, and contact pressure can be easily set and detected.
図５以下を用いて、上記のように構成した本実施例のタッチ・プローブ１００の動作及び使用例について、説明する。図５は、タッチ・プローブ部１００が備えるバネ機構５０の動作原理を説明する図である。図６は、バネ機構５０の板バネ５５、５６の特性の一例を示すグラフである。図７は、バネ機構５０の動作例を説明する図である。 The operation and usage example of the touch probe 100 of this embodiment configured as described above will be described with reference to FIG. 5 and below. FIG. 5 is a diagram for explaining the operating principle of the spring mechanism 50 included in the touch probe unit 100. FIG. 6 is a graph showing an example of the characteristics of the leaf springs 55 and 56 of the spring mechanism 50. FIG. 7 is a diagram illustrating an operation example of the spring mechanism 50.
２枚の実質的に平行に形成された板バネ５５、５６は、端部に形成されたベース部４０、１０間に長さＬで延びる平行板バネである。この板バネ５５、５６のスケール側ベース部１０に荷重Ｆが加わると、両板バネ５５、５６は、受光部側ベース部４０を固定位置として、回転することなく、ベース部１０側だけがＸ方向にδだけ変位する。すなわち、両板バネ５５、５６は、平行を保ったままＸ方向にだけ変位し、紙面貫通方向であるＹ方向には変位しない。ベース部１０には光学スケール２１が、ベース部４０には受光部２２が取り付けられているので、変位δを光学スケール２１と受光部２２の相対変位として、検出可能になる。なお、変位δは板バネ５５、５６のバネ定数に関係し、バネ定数の大きさは板バネ５５、５６のノッチ５３、５４の板厚ｔに依存する。 The two substantially parallel leaf springs 55 and 56 are parallel leaf springs having a length L extending between the base portions 40 and 10 formed at the ends. When a load F is applied to the scale side base portion 10 of the leaf springs 55 and 56, both leaf springs 55 and 56 do not rotate with the light receiving portion side base portion 40 as a fixed position, and only the base portion 10 side is X. Displace by δ in the direction. That is, both leaf springs 55 and 56 are displaced only in the X direction while maintaining parallelism, and are not displaced in the Y direction, which is the paper penetration direction. Since the optical scale 21 is attached to the base portion 10 and the light receiving portion 22 is attached to the base portion 40, the displacement δ can be detected as a relative displacement between the optical scale 21 and the light receiving portion 22. The displacement δ is related to the spring constants of the leaf springs 55 and 56, and the magnitude of the spring constant depends on the plate thickness t of the notches 53 and 54 of the leaf springs 55 and 56.
図６は、上記方法を用いて作成した、バネ機構５０における板バネ５５、５６の特性を試験した結果の一例である。図７に示すタッチ・プローブ１００において、±Ｘ軸へ測定子８を両振れさせたときの、一方側（＋Ｘ側または−Ｘ側）の変位―荷重特性を示している。他方側でも同じ結果を示していた。横軸のストロークＳ（μｍ）は、振れ範囲を示し、縦軸は荷重Ｆ（Ｎ）である。想定通り、強い線形性を示している。 FIG. 6 is an example of the results of testing the characteristics of the leaf springs 55 and 56 in the spring mechanism 50 created by using the above method. In the touch probe 100 shown in FIG. 7, the displacement-load characteristic of one side (+ X side or −X side) when the stylus 8 is swung to the ± X axis is shown. The same result was shown on the other side. The stroke S (μm) on the horizontal axis indicates the runout range, and the vertical axis is the load F (N). As expected, it shows strong linearity.
図７は、図６の試験結果をタッチ・プローブ１００内の板バネ５５、５６の挙動として示した図である。理解を容易にするため、タッチ・プローブ１００内部に取り付ける測定系を省いている。測定子側軸４の先端部に形成された測定子取付け部１の測定子取付け穴２には、両端部に接触子８ａ、８ｂが形成された測定子８がＸ方向を長手方向として、取り付けられている。接触子８ａ、８ｂは半球状であり、荷重方向に従い、接触子８ａまたは８ｂが被測定物に接触する。 FIG. 7 is a diagram showing the test results of FIG. 6 as the behavior of the leaf springs 55 and 56 in the touch probe 100. For ease of understanding, the measurement system installed inside the touch probe 100 is omitted. The stylus 8 having contacts 8a and 8b formed at both ends is mounted in the stylus mounting hole 2 of the stylus mounting portion 1 formed at the tip of the stylus side shaft 4 with the X direction as the longitudinal direction. Has been done. The contacts 8a and 8b are hemispherical, and the contacts 8a and 8b come into contact with the object to be measured according to the load direction.
図７（ａ）は、上向き（＋Ｘ方向）に荷重Ｆが加わり、最大ストロークδだけ変位した場合である。板バネ５５、５６は互いに平衡を保ったまま、主としてノッチ５３、５４で弾性変形し、接触子８ｂがδだけ変位する。図７（ｂ）は、図７（ａ）と同様の図であり、荷重Ｆが加わらない平衡位置の場合である。加工による残留歪や残留応力がないので、板バネ５５、５６は、タッチ・プローブ１００内で互いに実質的に平行な関係で、平衡位置を保つ。図７（ｃ）は、上記図７（ａ）、（ｂ）と同様の図で、下向き（−Ｘ方向）に荷重Ｆが加わり、最大ストロークδだけ変位した場合である。板バネ５５、５６は、図７（ａ）と対称な変形をして、互いに実質的に平行な関係を保ちながら、弾性変形している。 FIG. 7A shows a case where the load F is applied upward (+ X direction) and the load F is displaced by the maximum stroke δ. The leaf springs 55 and 56 are elastically deformed mainly at the notches 53 and 54 while maintaining equilibrium with each other, and the contact 8b is displaced by δ. FIG. 7B is the same view as that of FIG. 7A, and is the case of the equilibrium position where the load F is not applied. Since there is no residual strain or residual stress due to machining, the leaf springs 55 and 56 maintain an equilibrium position in the touch probe 100 in a substantially parallel relationship with each other. FIG. 7 (c) is the same diagram as in FIGS. 7 (a) and 7 (b), and is a case where the load F is applied downward (in the −X direction) and the load F is displaced by the maximum stroke δ. The leaf springs 55 and 56 are deformed symmetrically with FIG. 7A, and are elastically deformed while maintaining a substantially parallel relationship with each other.
本実施例に示した通り、板バネ５５、５６は平行バネを構成し、その剛性を使用目的や環境に応じた最適値に合致させているので、荷重除去後には、図７（ｂ）で示した平衡点に復帰する。また、板バネ５５、５６で形成される籠型の平行バネは、一体構造のため、強度および剛性を適宜に設定することが可能である。 As shown in this embodiment, the leaf springs 55 and 56 form parallel springs, and their rigidity is matched to the optimum value according to the purpose of use and the environment. Therefore, after the load is removed, FIG. 7 (b) shows. It returns to the indicated equilibrium point. Further, since the basket-shaped parallel springs formed by the leaf springs 55 and 56 have an integral structure, the strength and rigidity can be appropriately set.
図８及び図９に、上記タッチ・プローブ１００を測長器として使用した例を、模式的に示す。図８は、軸受の内径を測定する場合であり、図９は穴径に対して深さが著しく深い深穴における形状計測の例である。図８において、図示しない測長器に固定して取り付けたタッチ・プローブ１００の先端には、スタイラス１１０を介して球状の例えばルビーからなる接触子１１１が取り付けられている。一方、断面図で示した被測定物の軸受１１２は、Ｘ−Ｙ方向に移動可能で移動量を検出できるＸ−Ｙテーブル１１３上に取り付けられている。Ｘ−Ｙテーブル１１３をＹ方向に移動させて中心位置を設定したのち、Ｘ方向に移動させて、接触子１１１を軸受１１２の内面１１４に当接させる。この時の接触子１１１と軸受１１２の当接は、板バネ５５、５６の平衡点からの変位量で把握できる。なお、現実の測定では、板バネ５５、５６が微小変位したところで初期位置とすることもあるので、Ｘ−Ｙテーブル１１３を停止させたときの板バネ５５、５６による変位δ０を初期値として測定する。次に、Ｘ−Ｙテーブル１１３をＸ方向に移動させ、接触子１１１を軸受１１２ａの内面１１４に、反対側で当接させる。その際、バネ機構５０の変位δ１を初期値の値とほぼ同じ値になるように当接させる。Ｘ−Ｙテーブル１１３の移動量ΔＸと接触子の径ｄが既知であれば、軸受の内径Ｄは、Ｄ＝ΔＸ＋ｄ−（δ０−δ１）で求められる。ここで、Ｘ−Ｙテーブル１１３の移動量ΔＸは、本実施例の測長器と同程度の測定精度を有する他の測長器で、測定する。なお、軸受１１２の反対側の内面１１４を測定する際には、δ１が必ずしもδ０とほぼ同じ値にする必要はないが、ほぼ同じ値にすると、スケールからの外れや過大な接触圧の発生を防止できる。 8 and 9 schematically show an example in which the touch probe 100 is used as a length measuring instrument. FIG. 8 shows a case where the inner diameter of the bearing is measured, and FIG. 9 shows an example of shape measurement in a deep hole whose depth is significantly deeper than the hole diameter. In FIG. 8, a contacter 111 made of, for example, a spherical ruby is attached to the tip of a touch probe 100 fixedly attached to a length measuring instrument (not shown) via a stylus 110. On the other hand, the bearing 112 of the object to be measured shown in the cross-sectional view is mounted on the XY table 113 which can move in the XY directions and can detect the movement amount. After moving the XY table 113 in the Y direction to set the center position, the XY table 113 is moved in the X direction to bring the contactor 111 into contact with the inner surface 114 of the bearing 112. The contact between the contactor 111 and the bearing 112 at this time can be grasped by the amount of displacement of the leaf springs 55 and 56 from the equilibrium point. In the actual measurement, the initial position may be set when the leaf springs 55 and 56 are slightly displaced. Therefore, the displacement δ 0 due to the leaf springs 55 and 56 when the XY table 113 is stopped is used as the initial value. taking measurement. Next, the XY table 113 is moved in the X direction, and the contact 111 is brought into contact with the inner surface 114 of the bearing 112a on the opposite side. At that time, the displacement δ 1 of the spring mechanism 50 is brought into contact with the spring mechanism 50 so as to have a value substantially the same as the initial value. If the movement amount ΔX of the XY table 113 and the diameter d of the contact are known, the inner diameter D of the bearing can be obtained by D = ΔX + d− (δ 0 − δ 1 ). Here, the movement amount ΔX of the XY table 113 is measured by another length measuring device having the same measurement accuracy as the length measuring device of this embodiment. When measuring the inner surface 114 on the opposite side of the bearing 112, δ 1 does not necessarily have to be approximately the same value as δ 0 , but if it is set to approximately the same value, deviation from the scale or excessive contact pressure may occur. Occurrence can be prevented.
図９は、測定対象物が深穴１２３を有する場合に、長さＬａのスタイラス１２０をタッチ・プローブ１００の先端に取り付けて、深穴１２３を測定する場合である。スタイラス１２０の先端には、接触子１２１が取り付けられている。例えば特許文献１では、深穴１２３への接触をスタイラスの上端部に形成した接点の動作タイミングで検出していた。そのため、接点の動作が間欠的であり、接点部分の隙間の影響で動作タイミングが実際とは異なる、または、接触を正確に把握できない範囲があった。また、スタイラスの傾きの影響も無視できず、接触位置の高精度な測定には改善が望まれていた。 FIG. 9 shows a case where the stylus 120 having a length of La is attached to the tip of the touch probe 100 to measure the deep hole 123 when the object to be measured has the deep hole 123. A contactor 121 is attached to the tip of the stylus 120. For example, in Patent Document 1, contact with the deep hole 123 is detected at the operation timing of the contact formed at the upper end of the stylus. Therefore, the operation of the contact is intermittent, and the operation timing is different from the actual one due to the influence of the gap in the contact portion, or there is a range in which the contact cannot be accurately grasped. In addition, the influence of the inclination of the stylus cannot be ignored, and improvement has been desired for highly accurate measurement of the contact position.
それに対して本実施例では、バネ機構５０が平行板バネ５５、５６で構成されているので、測定子８のＸ方向移動量を連続的に把握でき、接触子１２１と深穴１２３の内面１２２との接触を、接触した時点及び位置で、正確に測定できる。さらに接触子１２１をＸ方向に移動させれば、接触子１２１の深穴内面１２２への接触圧も測定できる。また、一方向（Ｘ方向）にしか接触子１２１を移動させないので、スタイラス１２０の傾きの影響を低減できる。 On the other hand, in this embodiment, since the spring mechanism 50 is composed of parallel leaf springs 55 and 56, the amount of movement of the stylus 8 in the X direction can be continuously grasped, and the inner surface 122 of the contactor 121 and the deep hole 123 can be continuously grasped. Contact with can be accurately measured at the time and position of contact. Further, if the contactor 121 is moved in the X direction, the contact pressure of the contactor 121 on the inner surface 122 of the deep hole can also be measured. Further, since the contactor 121 is moved only in one direction (X direction), the influence of the inclination of the stylus 120 can be reduced.
以上説明したように本発明の実施例によれば、タッチ・プローブがコンプライアント機構を有しているので、この機構による摺動を用いて、物体形状を小さな接触力で探針できる。そして、小さな接触力であるから、物体への接触力による変形を微小に留めることができる。また、コンプライアント機構による摩擦やガタつきがない摺動により、タッチ・プローブが有する摺動機構が外力源として測定点に作用して、接触へ影響するのを排除できる。これにより、正確な測定を効率よく実行できる。また、タッチ・プローブは２枚の平行な板バネを有するバネ機構に既存のエンコーダを組み込んだだけなので、部品点数が少なく、３次元測定器や他の光学装置に比べて、安価に実現できる。要するに上記実施例によれば、基本的に、コンプライアント機構を有する一体型の２枚の平行板バネを使用するだけで、微小変位を測定することが可能なので、多数の部品を使用する際の部品相互間のガタつきや摩擦の影響を排除できる。 As described above, according to the embodiment of the present invention, since the touch probe has a compliant mechanism, the object shape can be detected with a small contact force by using the sliding by this mechanism. And since the contact force is small, the deformation due to the contact force to the object can be kept minute. Further, due to the sliding without friction or rattling by the compliant mechanism, it is possible to eliminate the sliding mechanism of the touch probe acting as an external force source on the measurement point and affecting the contact. As a result, accurate measurement can be performed efficiently. Further, since the touch probe only incorporates an existing encoder into a spring mechanism having two parallel leaf springs, the number of parts is small and it can be realized at a low cost as compared with a three-dimensional measuring instrument and other optical devices. In short, according to the above embodiment, basically, it is possible to measure minute displacement only by using two integrated parallel leaf springs having a compliant mechanism, so that when a large number of parts are used. The effects of rattling and friction between parts can be eliminated.
１…測定子取付け部、２…測定子取付け穴、３…Ｏリング溝、４…測定子側軸、８…測定子、８ａ、８ｂ…接触子、１０…（スケール側）ベース部、２０…スケール支持板、２１…光学スケール、２２…受光部（光学式エンコーダ）、２３、２４…基板取付け脚、２５…基板支持板、３０…基板、３１、３２、３３…回路素子、３４…端子部、４０…（受光部側）ベース部、４１…Ｏリング溝、４２…カバー取付け部、４３…取付け用フランジ、４４…ネジ部、４５…（タッチ・プローブ）固定部、４６…貫通穴、５０…バネ機構（コンプライアンス機構）、５１、５２…開口、５３、５４…（半円状）ノッチ、５５、５６…板バネ、８０…（円筒状）ケース、８１…防水ブーツ、８２…シール環、１００…タッチ・プローブ、１０１…ネジ穴、１１０…スタイラス、１１１…測定子、１１２、１１２ａ…測定対象（軸受）、１１３…Ｘ−Ｙテーブル、１１４…軸受内面、１２０…スタイラス、１２１…接触子、１２２…深穴内面、１２３…深穴、２０１…固定穴、２０２…段付き部、２１１…反射部、２１２…透過部、２１３…パターン、２１４…スケール基板、２２１…受光素子（フォトセンサ）、２２２…発光素子（ＬＥＤ）、２２３…制御基板、２５１…固定部、２５２…延長部、２５３…固定穴、２５４…取付けネジ穴、４０１…ネジ穴、ｄ…接触子径、Ｄ…軸受内径、Ｆ…荷重、Ｌ…バネ長さ、Ｌａ…スタイラス長さ、Ｓ…ストローク、ｔ…厚さ、Ｘ、Ｙ、Ｚ…方向、δ、δ０、δ１…変位、ΔＸ…移動量 1 ... Stylus mounting part, 2 ... Stylus mounting hole, 3 ... O-ring groove, 4 ... Stylus side shaft, 8 ... Stylus, 8a, 8b ... Contact, 10 ... (Scale side) base part, 20 ... Scale support plate, 21 ... Optical scale, 22 ... Light receiving part (optical encoder), 23, 24 ... Board mounting legs, 25 ... Board support plate, 30 ... Board, 31, 32, 33 ... Circuit elements, 34 ... Terminal part , 40 ... (light receiving part side) base part, 41 ... O ring groove, 42 ... cover mounting part, 43 ... mounting flange, 44 ... screw part, 45 ... (touch probe) fixing part, 46 ... through hole, 50 ... Spring mechanism (compliance mechanism), 51, 52 ... Opening, 53, 54 ... (semi-circular) notch, 55, 56 ... Leaf spring, 80 ... (cylindrical) case, 81 ... Waterproof boots, 82 ... Seal ring, 100 ... touch probe, 101 ... screw hole, 110 ... stylus, 111 ... stylus, 112, 112a ... measurement target (bearing), 113 ... XY table, 114 ... bearing inner surface, 120 ... stylus, 121 ... contactor , 122 ... Deep hole inner surface, 123 ... Deep hole, 201 ... Fixed hole, 202 ... Stepped part, 211 ... Reflection part, 212 ... Transmission part, 213 ... Pattern, 214 ... Scale substrate, 221 ... Light receiving element (photosensor) , 222 ... light emitting element (LED), 223 ... control board, 251 ... fixed part, 252 ... extension part, 253 ... fixing hole, 254 ... mounting screw hole, 401 ... screw hole, d ... contact diameter, D ... bearing inner diameter , F ... load, L ... spring length, La ... stylus length, S ... stroke, t ... thickness, X, Y, Z ... direction, δ, δ 0 , δ 1 ... displacement, ΔX ... movement amount
Claims (6)
前記バネ機構は、２つのベース部の間に実質的に平行な間隔を置いた２枚の板バネを有し、
前記２枚の板バネの延びる長手方向（Ｚ方向）両端部に、Ｘ方向に切り欠いた形状を有し、かつ、前記２つのベース部の間は、長手方向に垂直な断面形状が角部に丸みを帯びた長方形の形状を有する前記バネ機構全体が籠形形状であり、前記バネ機構の板バネ厚さ方向（Ｘ方向）の剛性が、直交する板バネ幅方向（Ｙ方向）の剛性に比べて十分低く形成されて、前記バネ機構が実質的にＸ方向にのみ変位可能であることを特徴とする光学スケールを有する測長器。 It has an optical scale in which a reflecting part and a transmitting part are regularly arranged in its own longitudinal direction (X direction), a light receiving part arranged to face the optical scale, and a spring mechanism to which the optical scale is attached. Then, in the length measuring device in which the optical scale moves substantially in the X direction with respect to the light receiving portion.
The spring mechanism has two leaf springs spaced substantially parallel between the two bases .
Both ends of the two leaf springs extending in the longitudinal direction (Z direction) have a shape notched in the X direction, and a cross-sectional shape perpendicular to the longitudinal direction is a corner portion between the two base portions. The entire spring mechanism having a rounded rectangular shape has a cage shape, and the rigidity of the spring mechanism in the leaf spring thickness direction (X direction) is orthogonal to the rigidity in the leaf spring width direction (Y direction). A length measuring instrument having an optical scale, which is formed sufficiently lower than the above spring mechanism and is characterized in that the spring mechanism can be displaced substantially only in the X direction.
前記バネ機構が、２つのベース部の間に実質的に平行な間隔を置いた２枚の板バネを有し、
前記２枚の板バネの延びる長手方向（Ｚ方向）両端部に、Ｘ方向に切り欠いた形状を有し、かつ、前記２つのベース部の間は、長手方向に垂直な断面形状が角部に丸みを帯びた長方形の形状を有する前記バネ機構全体が籠形形状であり、前記バネ機構の板バネ厚さ方向（Ｘ方向）の剛性が、直交する板バネ幅方向（Ｙ方向）の剛性に比べて十分低く形成されており、前記バネ機構は実質的にＸ方向にのみ変位可能であることを特徴とするタッチ・プローブ。 A shaft that holds a stylus having a contactor that comes into contact with an object to be measured at an end, a scale-side base portion for fixing and holding an optical scale that moves in conjunction with the stylus, and the optical scale. a light receiving portion side base part for holding and fixing a light receiving unit for detecting a displacement, the touch probe equipped with a spring mechanism which is formed between the scale-side base portion and the light receiving portion side base part,
It said spring mechanism, have a two two plate springs placed substantially parallel distance between the base portion,
Both ends of the two leaf springs extending in the longitudinal direction (Z direction) have a shape notched in the X direction, and a cross-sectional shape perpendicular to the longitudinal direction is a corner portion between the two base portions. The entire spring mechanism having a rounded rectangular shape is cage-shaped, and the rigidity of the spring mechanism in the leaf spring thickness direction (X direction) is orthogonal to the rigidity in the leaf spring width direction (Y direction). A touch probe that is formed sufficiently lower than the above spring mechanism and that the spring mechanism can be substantially displaced only in the X direction.
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|---|---|---|---|---|
| JP2021182015A (en) * | 2016-10-31 | 2021-11-25 | 株式会社東京精密 | Whirl stop of optical measuring apparatus |
| JP2022125348A (en) * | 2016-10-31 | 2022-08-26 | 株式会社東京精密 | Whirl stop of optical measuring apparatus |
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| EP0396059B1 (en) * | 1989-05-03 | 1993-11-18 | BSG-Schalttechnik GmbH & Co. KG | Food processor |
| JP2711589B2 (en) * | 1990-09-13 | 1998-02-10 | キヤノン株式会社 | Method of mounting mirror for laser interferometer and stage device using the method |
| JP3019987B2 (en) * | 1994-03-11 | 2000-03-15 | 株式会社東京精密 | Automatic dimension measuring device |
| JP2007315998A (en) * | 2006-05-29 | 2007-12-06 | Murata Mach Ltd | Size measuring head |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021182015A (en) * | 2016-10-31 | 2021-11-25 | 株式会社東京精密 | Whirl stop of optical measuring apparatus |
| JP7106735B2 (en) | 2016-10-31 | 2022-07-26 | 株式会社東京精密 | Whirl-stop for optical measuring instruments |
| JP2022125348A (en) * | 2016-10-31 | 2022-08-26 | 株式会社東京精密 | Whirl stop of optical measuring apparatus |
| JP7214913B2 (en) | 2016-10-31 | 2023-01-30 | 株式会社東京精密 | Whirl-stop for optical measuring instruments |
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