JP6151138B2 - 荷電粒子顕微鏡内において試料の断層撮像を実行する方法 - Google Patents

荷電粒子顕微鏡内において試料の断層撮像を実行する方法 Download PDF

Info

Publication number
JP6151138B2
JP6151138B2 JP2013188123A JP2013188123A JP6151138B2 JP 6151138 B2 JP6151138 B2 JP 6151138B2 JP 2013188123 A JP2013188123 A JP 2013188123A JP 2013188123 A JP2013188123 A JP 2013188123A JP 6151138 B2 JP6151138 B2 JP 6151138B2
Authority
JP
Japan
Prior art keywords
sample
image
detector
charged particle
spectral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2013188123A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014056820A5 (cg-RX-API-DMAC7.html
JP2014056820A (ja
Inventor
フォード デイビット
フォード デイビット
ショエンマケルス レムコ
ショエンマケルス レムコ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of JP2014056820A publication Critical patent/JP2014056820A/ja
Publication of JP2014056820A5 publication Critical patent/JP2014056820A5/ja
Application granted granted Critical
Publication of JP6151138B2 publication Critical patent/JP6151138B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T11/00—2D [Two Dimensional] image generation
    • G06T11/003—Reconstruction from projections, e.g. tomography
    • G06T11/005—Specific pre-processing for tomographic reconstruction, e.g. calibration, source positioning, rebinning, scatter correction, retrospective gating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/419—Imaging computed tomograph
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/226—Image reconstruction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2611—Stereoscopic measurements and/or imaging
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2803—Scanning microscopes characterised by the imaging method
    • H01J2237/2807—X-rays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pulmonology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2013188123A 2012-09-12 2013-09-11 荷電粒子顕微鏡内において試料の断層撮像を実行する方法 Active JP6151138B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP12184099.5 2012-09-12
EP12184099.5A EP2708874A1 (en) 2012-09-12 2012-09-12 Method of performing tomographic imaging of a sample in a charged-particle microscope

Publications (3)

Publication Number Publication Date
JP2014056820A JP2014056820A (ja) 2014-03-27
JP2014056820A5 JP2014056820A5 (cg-RX-API-DMAC7.html) 2017-02-02
JP6151138B2 true JP6151138B2 (ja) 2017-06-21

Family

ID=46801373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013188123A Active JP6151138B2 (ja) 2012-09-12 2013-09-11 荷電粒子顕微鏡内において試料の断層撮像を実行する方法

Country Status (4)

Country Link
US (1) US9618460B2 (cg-RX-API-DMAC7.html)
EP (2) EP2708874A1 (cg-RX-API-DMAC7.html)
JP (1) JP6151138B2 (cg-RX-API-DMAC7.html)
CN (1) CN103681189B (cg-RX-API-DMAC7.html)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2916342A1 (en) 2014-03-05 2015-09-09 Fei Company Fabrication of a lamella for correlative atomic-resolution tomographic analyses
CZ306268B6 (cs) * 2014-06-02 2016-11-09 Delong Instruments A.S. Způsob měření energiového rozdělení emise elektronů z katod s malým virtuálním zdrojem a energiový spektrometr pro provádění tohoto způsobu
CZ2014852A3 (cs) * 2014-12-03 2016-05-18 Advacam S.R.O. Způsob rentgenové nanoradiografie a nanotomografie a zařízení k provádění tohoto způsobu
TWI573165B (zh) * 2014-12-09 2017-03-01 財團法人工業技術研究院 電子顯微鏡、讀取器以及擷取元素頻譜之方法
WO2016141226A1 (en) * 2015-03-04 2016-09-09 Decision Sciences International Corporation Active charged particle tomography
US9627176B2 (en) 2015-07-23 2017-04-18 Fei Company Fiducial formation for TEM/STEM tomography tilt-series acquisition and alignment
US10078057B2 (en) 2015-09-02 2018-09-18 Fei Company Data processing in a tomographic imaging apparatus
US10103002B1 (en) * 2016-05-20 2018-10-16 Carl Zeiss Microscopy Gmbh Method for generating an image of an object and particle beam device for carrying out the method
JP6640057B2 (ja) * 2016-09-14 2020-02-05 株式会社日立ハイテクノロジーズ 電子顕微鏡装置及びそれを用いた傾斜ホールの測定方法
JP2019533819A (ja) * 2016-11-09 2019-11-21 アイメック・ヴェーゼットウェーＩｍｅｃ Ｖｚｗ 組み合わされたｓｔｅｍとｅｄｓの断層撮影のための装置
JP6876418B2 (ja) * 2016-12-05 2021-05-26 日本電子株式会社 画像取得方法および電子顕微鏡
EP3552223A4 (en) * 2016-12-06 2020-11-11 Brandeis University FREEZING FLUID CELL FOR CRYO-ELECTRONIC MICROSCOPY
GB201711621D0 (en) 2017-07-19 2017-08-30 Oxford Instr Nanotechnology Tools Ltd Improved navigation for electron microscopy
WO2019066802A1 (en) * 2017-09-27 2019-04-04 Intel Corporation ELECTRON BEAM SURFING FOR CHIP DEBUGGING AND DEFAULT ISOLATION
EP3726206B1 (en) * 2019-03-26 2022-11-02 FEI Company Methods and systems for inclusion analysis
KR20220082802A (ko) * 2019-06-07 2022-06-17 칼 짜이스 에스엠테 게엠베하 개선된 3d 체적 이미지 재구성 정확도를 갖는 단면 이미징
EP3751595A1 (en) * 2019-06-14 2020-12-16 FEI Company A method of examining a sample using a charged particle microscope, wherein an electron energy-loss spectroscopy (eels) spectrum is acquired
WO2021018643A1 (en) * 2019-07-26 2021-02-04 Asml Netherlands B.V. Multiple landing energy scanning electron microscopy systems and methods
CN110687138B (zh) * 2019-09-05 2022-08-05 长江存储科技有限责任公司 半导体结构的测量与边界特征提取方法及其装置
US11152189B2 (en) * 2020-03-18 2021-10-19 Fei Company Method and system for plasma assisted low vacuum charged-particle microscopy
DE102021101982A1 (de) * 2021-01-28 2022-07-28 ebm-papst neo GmbH & Co. KG Vorrichtung und Verfahren zur Erfassung einer Konzentration von vorbestimmten Partikeln anhand ihrer morphologischen Eigenschaften in Luft
JP2025504235A (ja) * 2022-02-10 2025-02-06 カール・ツァイス・エスエムティー・ゲーエムベーハー 半導体試料を層ごとに検査するための方法およびそのような方法を実行するための検査装置
US12456600B2 (en) * 2023-05-29 2025-10-28 Applied Materials Israel Ltd. Scanning electron microscopy-based tomography of specimens
EP4471820A1 (en) 2023-06-01 2024-12-04 FEI Company Methods for three-dimensional tomography of elongated samples

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4006165B2 (ja) * 2000-04-21 2007-11-14 株式会社日立製作所 元素分析装置及び走査透過型電子顕微鏡並びに元素分析方法
JP2005538344A (ja) * 2002-07-08 2005-12-15 シデック テクノロジーズ アーベー 画像化装置および方法
JP2005058428A (ja) * 2003-08-11 2005-03-10 Hitachi Ltd 病巣位置特定システム及び放射線検査装置
JP3863873B2 (ja) * 2003-09-30 2006-12-27 株式会社日立製作所 放射線検査装置
JP4299208B2 (ja) 2004-08-20 2009-07-22 日本電子株式会社 ３次元像構築方法
WO2006062132A1 (ja) * 2004-12-07 2006-06-15 The University Of Tokyo 立体画像再構成装置、立体画像再構成方法、及び立体画像再構成プログラム
US7671342B2 (en) * 2005-01-11 2010-03-02 Siemens Medical Solutions Usa, Inc. Multi-layer detector and method for imaging
EP2063450A1 (en) 2007-11-21 2009-05-27 FEI Company Method for obtaining a scanning transmission image of a sample in a particle-optical apparatus
US8080791B2 (en) 2008-12-12 2011-12-20 Fei Company X-ray detector for electron microscope
EP2309459A1 (en) 2009-09-20 2011-04-13 Universiteit Antwerpen Methods and systems for tomographic reconstruction of coherent radiation images
JP5517559B2 (ja) * 2009-10-26 2014-06-11 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法
EP2534667A2 (en) * 2010-02-10 2012-12-19 Mochii, Inc. (d/b/a Voxa) Aberration-correcting dark-field electron microscopy
JP5764380B2 (ja) 2010-04-29 2015-08-19 エフ イー アイ カンパニＦｅｉ Ｃｏｍｐａｎｙ Ｓｅｍ画像化法
EP2388796A1 (en) 2010-05-21 2011-11-23 FEI Company Simultaneous electron detection
CN103477346A (zh) * 2011-03-08 2013-12-25 霍洛吉克公司 用于筛查、诊断和活检的双能和/或造影增强乳房成像的系统和方法
EP2525385A1 (en) 2011-05-16 2012-11-21 Fei Company Charged-particle microscope
US8704176B2 (en) 2011-08-10 2014-04-22 Fei Company Charged particle microscope providing depth-resolved imagery
EP2557584A1 (en) 2011-08-10 2013-02-13 Fei Company Charged-particle microscopy imaging method
MX2014003968A (es) * 2011-10-14 2014-08-27 Ingrain Inc Metodo de imagen doble y sistema para generar una imagen multidimensional de una muestra.
DE102012200715B4 (de) * 2012-01-19 2014-06-05 Siemens Aktiengesellschaft Verfahren zur Aufnahme und Darstellung wenigstens zweier 3-D-Subtraktionsbilddatensätze sowie C-Bogen-Röntgenvorrichtung hierfür
WO2013148632A1 (en) * 2012-03-29 2013-10-03 Ingrain, Inc. A method and system for estimating properties of porous media such as fine pore or tight rocks
US8933401B1 (en) * 2013-10-25 2015-01-13 Lawrence Livermore National Security, Llc System and method for compressive scanning electron microscopy

Also Published As

Publication number Publication date
EP2708874A1 (en) 2014-03-19
US20140070095A1 (en) 2014-03-13
CN103681189B (zh) 2018-05-11
EP2708875A1 (en) 2014-03-19
CN103681189A (zh) 2014-03-26
JP2014056820A (ja) 2014-03-27
US9618460B2 (en) 2017-04-11
EP2708875B1 (en) 2016-08-24

Similar Documents

Publication Publication Date Title
JP6151138B2 (ja) 荷電粒子顕微鏡内において試料の断層撮像を実行する方法
US8912491B2 (en) Method of performing tomographic imaging of a sample in a charged-particle microscope
US8093556B2 (en) Device and method for analyzing a sample
US9991087B2 (en) Spectroscopy in a transmission charged-particle microscope
JP6162187B2 (ja) 透過型荷電粒子顕微鏡内で分光を実行する方法
US9535020B2 (en) Analyzing an object using a particle beam apparatus
US20110278451A1 (en) Simultaneous Electron Detection
US9620331B1 (en) Method for analyzing an object and charged particle beam device for carrying out the method
KR102687322B1 (ko) 전자 현미경의 eels 검출 기술
US10522323B2 (en) Electron energy loss spectroscopy with adjustable energy resolution
CN111627787B (zh) 多射束扫描透射带电粒子显微镜
JP7426192B2 (ja) 調節可能なビームエネルギー広がりを有する透過荷電粒子顕微鏡
JP2019533819A (ja) 組み合わされたｓｔｅｍとｅｄｓの断層撮影のための装置
US10559448B2 (en) Transmission charged particle microscope with improved EELS/EFTEM module
CN111189857B (zh) 带电粒子显微镜中的共焦成像的方法和系统

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20160908

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20161219

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20161219

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20170202

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20170214

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170419

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20170509

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20170524

R150 Certificate of patent or registration of utility model

Ref document number: 6151138

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250