JP6146575B2 - Solar cell and method for manufacturing solar cell - Google Patents

Description

  The present invention relates to a solar cell and a method for manufacturing a solar cell.

  The solar cell includes an electrode on the main surface of the photoelectric conversion unit in order to collect carriers generated by light reception. Such an electrode usually includes a metal and does not transmit light, so that a light receiving loss occurs. Therefore, it is required to reduce the light receiving loss by reducing the electrode area as much as possible. For example, Patent Document 1 discloses a photoelectric conversion device in which the height and width of the sub electrode are minimum at a portion farthest from the main electrode.

JP-A-6-53531

  According to the above prior art, it is possible to reduce the light receiving loss due to the electrodes. However, in the current situation where the spread of solar cells is rapidly progressing, further improvement in photoelectric conversion efficiency is required.

  A solar cell according to one embodiment of the present invention includes a photoelectric conversion unit and an electrode provided on a main surface of the photoelectric conversion unit, and the electrode includes a portion in which an electrode width varies along a longitudinal direction thereof, The said part has the convex part which the electrode height became higher than the at least one part of the other part at least in the location where the electrode width becomes the narrowest.

  The manufacturing method of the solar cell which concerns on 1 aspect of this invention is equipped with an electrode on the main surface of a photoelectric conversion part, and an electrode is a manufacturing method of the solar cell from which an electrode width changes along the longitudinal direction, Comprising: A plate making having an opening corresponding to the shape of the electrode, and a step of printing the electrode constituent material on the main surface using a squeegee that fills the opening with the electrode constituent material. The opening width of the opening corresponding to the narrowed portion is wider on the squeegee side than on the main surface side.

  ADVANTAGE OF THE INVENTION According to this invention, the solar cell which has a favorable photoelectric conversion characteristic can be provided.

It is the top view which looked at the solar cell which is embodiment of this invention from the light-receiving surface side. It is a figure which shows typically the AA line cross section of FIG. It is the B section enlarged view of FIG. It is a figure which shows typically the B1-B1 line cross section of FIG. It is a figure which shows typically the B2-B2 line cross section of FIG. It is a figure which shows the principle of the screen printing method in embodiment of this invention. It is a top view which expands and shows the edge part vicinity of the upper surface of the platemaking in embodiment of this invention. It is a top view which expands and shows the central part vicinity of the upper surface of the platemaking in embodiment of this invention. It is the C section enlarged view of FIG. It is a figure which shows typically the DD sectional view (a) of FIG. 7, and the EE sectional view (b) of FIG. It is a figure which shows a mode that an electrode is formed using the platemaking in embodiment of this invention compared with the case where general platemaking is used. It is sectional drawing which shows the modification of the platemaking in embodiment of this invention. It is a top view which shows the modification of the platemaking in embodiment of this invention.

Embodiments of the present invention will be described in detail with reference to the drawings.
The present invention is not limited to the following embodiments. The drawings referred to in the embodiments are schematically described, and the dimensional ratios of the components drawn in the drawings may be different from the actual products. Specific dimensional ratios and the like should be determined in consideration of the following description.

  FIG. 1 is a plan view of the solar cell 10 as seen from the light receiving surface side. 2 is a cross-sectional view taken along the line AA of FIG. 1 and shows a cross section of the solar cell 10 cut in the thickness direction along the direction in which the fingers 21 extend.

  The solar cell 10 includes a photoelectric conversion unit 11 that generates carriers (electrons and holes) by receiving light, a light receiving surface electrode 20 formed on the light receiving surface of the photoelectric conversion unit 11, and a photoelectric conversion unit 11. And a back electrode (not shown) formed on the back surface. In addition, the back electrode can be configured to include a finger and a bus bar, which will be described later, like the light receiving surface electrode 20. In this case, the following description about the light receiving surface electrode 20 can be applied to the back surface electrode.

  Here, the “light receiving surface” means a main surface on which sunlight mainly enters from the outside of the solar cell 10. For example, more than 50% to 100% of sunlight incident on the solar cell 10 enters from the light receiving surface side. Further, the “back surface” means a main surface opposite to the light receiving surface. On the back surface, the influence of the light-shielding loss on the photoelectric conversion characteristics is less than that of the light receiving surface, so that the back electrode can be formed in a larger area than the light receiving surface electrode 20. In other words, the surface having the large electrode area among the main surfaces becomes the back surface. Note that a surface along the thickness direction of the solar cell 10 and perpendicular to the main surface is a side surface.

  The photoelectric conversion unit 11 includes a substrate made of a semiconductor material such as crystalline silicon, gallium arsenide (GaAs), or indium phosphorus (InP). The photoelectric conversion unit 11 is made of, for example, an i-type amorphous silicon layer, a p-type amorphous silicon layer, and a translucent conductive oxide such as indium oxide on the light-receiving surface of an n-type single crystal silicon substrate. A transparent conductive layer in order. In addition, an i-type amorphous silicon layer, an n-type amorphous silicon layer, and a transparent conductive layer are sequentially provided on the back surface of the n-type single crystal silicon substrate. The photoelectric conversion unit 11 is not limited to this configuration, and various configurations can be adopted.

  The light-receiving surface electrode 20 (hereinafter referred to as the electrode 20) includes, for example, a plurality (for example, 50) of fingers 21 and a plurality (for example, two) of bus bars 22. The finger 21 is a thin wire electrode formed over a wide range on the light receiving surface in order to collect carriers generated by the photoelectric conversion unit 11. The bus bar 22 is an electrode that collects carriers from the fingers 21, and is electrically connected to all the fingers 21. For example, when the solar cell 10 is modularized, the wiring material is connected to the bus bar 22.

  In the solar cell 10, two bus bars 22 are arranged in parallel with each other at a predetermined interval, and a plurality of fingers 21 are arranged so as to cross this. The finger 21 includes a first finger 21 a that extends from each of the bus bars 22 toward the edge of the light receiving surface, and a second finger 21 b that connects the two bus bars 22. The plurality of fingers 21a have the same length except for the fingers 21a arranged at the corners of the photoelectric conversion unit 11 cut obliquely, and are arranged at the same interval. The plurality of fingers 21b all have the same length and are arranged at the same intervals as the fingers 21a.

  The fingers 21a and 21b vary in electrode width (hereinafter simply referred to as width) along the longitudinal direction thereof. On the other hand, the width of the bus bar 22 is constant along its longitudinal direction. In the fingers 21a and 21b, in order to reduce the light receiving loss by reducing the electrode area while suppressing the increase in resistance, the width is narrowed at the portion where the flowing current is small.

  In the present embodiment, the finger 21a has a tapered shape in which the width becomes narrower from one end portion in the longitudinal direction toward the tip portion Pe that is the other end portion in the longitudinal direction. And in each adjacent finger | toe 21a, the clearance gap between each front-end | tip part Pe is wider than the clearance gap between each one end part. The one end is an end connected to the bus bar 22 (hereinafter referred to as a connection end), and the tip Pe is an end located at the edge of the light receiving surface. The tip Pe is a portion where the width of the finger 21a is the narrowest (hereinafter referred to as the finest), and is present at a position about 1.5 mm to 3 mm away from the end of the light receiving surface.

  The fingers 21b are narrower in width from both longitudinal ends connected to the bus bar 22 toward the longitudinal central portion Pc. And in each adjacent finger | toe 21b, the clearance gap between each center part Pc is wider than the clearance gap between each connection edge part.

  The width of the fingers 21a and 21b is not particularly limited, but is preferably about 50 μm to 150 μm at the connection end with the bus bar 22 that becomes the thickest, and about 30 μm to 80 μm at the tip Pe and the center Pc that are the most detailed. Is preferred.

  The fingers 21a and 21b have convex portions 23a and 23b having an electrode height (hereinafter simply referred to as a height) higher than at least a part of the other portions, at least in the most detail. In other words, the convex portions 23a and 23b are respectively provided in portions where the electrode width is narrowed and the gap between adjacent electrodes is widened. The “height” of the electrode can also be said to be the “thickness” of the electrode.

  In the solar cell 10, the finger 21a has the convex part 23a in the predetermined range including the front-end | tip part Pe. The finger 21a gradually decreases in height from the connection end with the bus bar 22 toward the tip end Pe, and increases again in the vicinity of the tip Pe. In addition, the predetermined range in which the convex portion 23a is provided is preferably a range of about 1 mm from the tip portion Pe from the viewpoint of the increase in the amount of incident light utilizing reflection by the electrode and the material cost, productivity, and the like. A range of about 0.5 mm from the tip portion Pe is particularly preferable.

  The finger 21b has a convex portion 23b in a predetermined range including the central portion Pc. The height of the finger 21b gradually decreases from the connecting end with the bus bar 22 toward the central portion Pc, and increases again in the vicinity of the central portion Pc. The predetermined range in which the convex portion 23b is provided is preferably in the range of about 1 mm from the central portion Pc, and particularly preferably in the range of about 0.5 mm from the central portion Pc, for the same reason as in the case of the convex portion 23a.

  The heights of the convex portions 23a and 23b are not particularly limited. However, in order to increase the amount of light incident on the photoelectric conversion portion 11 using reflection by the electrodes, there are no problems such as an increase in material cost and electrode peeling. A higher range is preferred. Specifically, a height of about 20 μm to 100 μm is suitable, and a height of about 30 μm to 80 μm is particularly suitable. The height of the connection end portion of the bus bar 22 and the finger 21 is, for example, about 30 μm to 120 μm, and the height of the convex portions 23 a and 23 b is approximately the same or slightly higher.

  In addition, the form which has only one of the convex-shaped parts 23a and 23b may be sufficient as the finger 21. FIG. However, in order to increase the amount of incident light at the edge of the light receiving surface, it is preferable to have a convex portion 23a at least at the tip portion Pe.

FIG. 3 is an enlarged view of a portion B in FIG. 2, and shows the tip portion Pe of the finger 21 a in an enlarged manner. The arrow shown in the figure indicates the light L irradiated to the light receiving surface.
In the solar cell 10, a part of the incident light L is reflected on the side surface of the convex portion 23 a provided in a predetermined range including the tip portion Pe of the finger 21 a and enters the photoelectric conversion unit 11. The amount of incident light due to such reflection increases, for example, as the height of the convex portion 23a increases. In addition, the edge of the light-receiving surface where the tip part Pe of the finger 21a is located is far away from the electrode as compared with other parts. For this reason, the edge of the light receiving surface is a portion where it is difficult to expect an increase in the amount of incident light due to such reflection, but according to the solar cell 10, the amount of incident light at the edge of the light receiving surface is increased by the convex portion 23a. be able to. Thereby, the photoelectric conversion characteristic of the solar cell 10 is improved.

FIG. 4 is a cross-sectional view taken along line B1-B1 of FIG. 1 and shows a cross section of the solar cell 10 cut in the thickness direction along the direction in which the tip portion Pe of the finger 21a is adjacent. FIG. 5 is a cross-sectional view taken along line B2-B2 of FIG. 1 and shows a cross section in which the solar cell 10 is cut in the thickness direction along a direction in which portions other than the tip portion Pe of the finger 21a are adjacent to each other.
A gap D1 between adjacent tip portions Pe is larger than a gap D2 between portions other than the adjacent tip portions Pe. In the solar cell 10, the convex part 23a is provided in the predetermined range including the front-end | tip part Pe. A part of the incident light L is reflected by the side surface of the convex portion 23 a and enters the photoelectric conversion unit 11. When the height of the convex portion 23a is increased, the reachable range of the reflected light is expanded. For this reason, between the adjacent fingers 21a, the uniformity of the amount of light incident on the photoelectric conversion unit 11 is improved, and the photoelectric conversion unit 11 can be effectively used. Thereby, the photoelectric conversion characteristic of the solar cell 10 is improved.
In addition, the gap between the adjacent fingers 21b is wide at the central portion Pc, which is a thin line portion of the finger 21b, but the convex portion 23b improves the uniformity of light incident on the photoelectric conversion unit 11. be able to.

  Moreover, in the solar cell 10, since it has provided the convex-shaped parts 23a and 23b limited to the predetermined range containing the thin wire | line part of the fingers 21a and 21b, it can improve a photoelectric conversion characteristic efficiently, suppressing material cost. .

Next, the manufacturing method of the solar cell 10 provided with the said structure is explained in full detail.
FIG. 6 is a diagram for explaining the principle of the screen printing method. 7 and 8 are enlarged plan views showing a part of the upper surface 36 of the screen plate 30 (FIG. 7 shows the opening 34a and FIG. 6 shows the opening 34b). 7 is an enlarged view of a portion C in FIG. 7, FIG. 10A is a cross-sectional view taken along the line DD in FIG. 7, and FIG. 10B is a cross-sectional view taken along the line EE in FIG. In FIGS. 7 and 8, the mesh 31 is not shown for the sake of clarity.

  In the manufacturing process of the solar cell 10, the photoelectric conversion unit 11 is manufactured by a known method (a detailed description of the manufacturing process of the photoelectric conversion unit 11 is omitted). When the photoelectric conversion unit 11 is prepared, the electrode 20 is formed on the light receiving surface. Note that a back electrode can be formed on the back surface of the photoelectric conversion unit 11 by the same method as that for the electrode 20, for example.

  In this embodiment, the electrode 20 is formed using a screen printing method. The screen printing method is a kind of stencil printing. In the screen printing method, plate making and a squeegee 40 are used. As the plate making, a screen plate 30 (see FIG. 6 or the like) or a metal mask plate (see FIG. 12 described later) can be used.

As shown in FIG. 6, the ink 50 is transferred onto the light receiving surface of the photoelectric conversion unit 11 using the screen plate 30 having the opening 34 corresponding to the shape of the electrode 20 and the squeegee 40. More specifically, the ink 50 containing a conductive material is placed on the screen plate 30 in which the opening 34 is formed only in the portion to be transferred, and the ink 50 is filled into the opening 34 by sliding the squeegee 40. Subsequently, when the portion of the screen plate 30 through which the squeegee 40 passes is separated from the light receiving surface, the ink 50 is ejected from the opening 34 and transferred onto the light receiving surface. Then, the transferred ink 50 is solidified by heating or the like to form the electrode 20. In addition, although this embodiment demonstrates off-contact printing, you may apply on-contact printing.
Hereinafter, for convenience of explanation, a surface facing the squeegee 40 side of the screen plate 30 is an upper surface 36, and a surface facing the light receiving surface side of the photoelectric conversion unit 11 is a lower surface 37.

  The screen plate 30 has a mesh 31 and a frame 32. The mesh 31 is a woven fabric or the like that transmits the ink 50, and is stretched on the frame 32. A region of the mesh 31 where the ink 50 is not desired to be applied is masked with the mask material 33 so that the ink 50 can be transmitted only through the openings 34 that are not masked. The screen plate 30 forms an opening pattern corresponding to the shape of the electrode 20 to be formed, and has openings 34a, 34b, 34c corresponding to the fingers 21a, 21b and the bus bar 22, respectively.

  The material, wire diameter, number of meshes, opening, opening rate, etc. of the mesh 31 are selected according to the width, height, etc. of the electrode 20 to be formed. The material of the mesh 31 is, for example, a resin fiber such as polyester or a metal wire such as stainless steel. The wire diameter of the mesh 31 is selected according to the height of the electrode 20 to be formed, and it is preferable to increase the wire diameter as the electrode 20 becomes higher. The number of meshes is selected according to the strength of the mesh 31 and the definition of the electrode 20 to be formed. The opening is selected according to the particle size of the conductive particles contained in the ink 50, and is generally preferably at least twice the particle size. The opening rate is selected according to the thickness and the width of the electrode to be formed. In addition, the material of the mesh 31, the wire diameter, the number of meshes, the opening, the opening rate, and the like are selected depending on the composition of the ink 50, application conditions, and the like.

  A photosensitive emulsion is generally used for the mask material 33. The emulsion is selected according to the resolution and exposure sensitivity. For the emulsion, for example, a diazo or stilbazolium material is used. In addition to the emulsion, a metal foil can be used.

  The squeegee 40 is made of a material suitable for spreading the ink 50 on the screen plate 30. The squeegee 40 is preferably composed of an elastic body having solvent resistance. For example, urethane rubber or the like is suitable.

  The ink 50 is a fluid fluid in the form of a paste. When the electrode 20 is formed by the screen printing method, an ink 50 in which a binder resin and conductive particles are mixed in a solvent can be used. Examples of the ink 50 include a heat curing type that is solidified by heating at 200 ° C. or less, an ultraviolet curing type that is solidified by ultraviolet irradiation, and a baking type that is solidified by heating at about 400 ° C. to 1000 ° C. As the solvent, for example, an organic solvent such as alcohol, glycol ether, or hydrocarbon is used. As the binder resin, for example, a cellulose resin, an epoxy resin, an acrylic resin, a urethane resin, a silicone resin, or the like is used. For the conductive particles, for example, a material containing silver (Ag), copper (Cu), nickel (Ni), or the like is used.

  The mask material 33 of the screen plate 30 is processed into an opening pattern corresponding to the shape of the electrode 20 as shown in FIGS. In the present embodiment, the opening 34c having a constant opening width and the openings 34a and 34b intersecting the opening 34c are formed. The opening width of the opening 34a on the lower surface 37 side becomes narrower from the opening 34c side toward the tip portion Xe side corresponding to the tip portion Pe. Thereby, the taper-shaped finger 21a can be formed. The opening 34b has an opening width on the lower surface 37 side that narrows from the opening 34c side toward the center portion Xc side corresponding to the center portion Pc. Thereby, the finger 21b which became gradually thin toward the center part Pc can be formed.

  In the screen plate 30, at least the opening widths of the openings 34a and 34b corresponding to the thin line portions of the fingers 21a and 21b are wider on the upper surface 36 side than on the lower surface 37 side. In the present embodiment, the opening width on the upper surface 36 side is wider than the opening width on the lower surface 37 side in a predetermined range including the tip portion Xe of the opening 34a. Further, in a predetermined range including the central portion Xc of the opening 34b, the opening width on the upper surface 36 side is wider than the opening width on the lower surface 37 side. As will be described in detail later, this provides a convex portion 23a at the tip portion Pe and a convex portion 23b at the central portion Pc. The predetermined range is preferably a range of about 1 mm from the tip portion Xe and the central portion Xc from the viewpoint of improving the printability and increasing the amount of incident light using reflection by the electrode and the material cost. A range of about 0.5 mm from the tip portion Xe and the center portion Xc is particularly preferable.

  Within a predetermined range including the tip portion Xe of the opening 34a, the opening width W1 on the lower surface 37 side is substantially equal to the target value of the width of the finger 21a to be formed, as shown in FIGS. 9 and 10A. Set to dimension. For the opening width W2 on the upper surface 36 side, for example, by increasing the difference from W1, the height of the convex portion 23a can be increased and the ratio of the height to the width can be increased. W2 varies depending on the shape of the tapered portion 35a described later, but is preferably about 1.1 to 3.0 times W1 and particularly preferably about 1.5 to 2.0 times W1. . Furthermore, it is preferable that the length on the upper surface 36 side is made longer than the length on the lower surface 37 side of the opening 34a so that only the upper surface 36 side of the opening 34a extends to the end side of the light receiving surface. In addition, the opening width in the center part Xc of the opening part 34b can also be set similarly to the front-end | tip part Xe of the opening part 34a.

  As shown in FIG. 10A, at least a part of the wall portion (that is, the mask material 33) constituting the opening 34a within a predetermined range including the distal end portion Xe, from the lower surface 37 side of the opening 34a. It is preferable to provide a tapered portion 35a that is inclined so that the opening width gradually increases toward the upper surface 36 side. The taper portion 35a particularly enables smooth filling of the ink 50 into the opening 34a. The tapered portion 35a is formed, for example, from the upper surface 36 side of the opening 34a to the intermediate portion in the thickness direction of the mask material 33. The wall portion of the opening 34 a located on the lower surface 37 side with respect to the intermediate portion is, for example, substantially parallel along the thickness direction of the mask material 33. In addition, it is suitable to provide the same taper part 35b also in the center part Xc of the opening part 34b.

  In the present embodiment, as shown in FIG. 10B, the tapered portion 35a does not exist in the middle portion in the longitudinal direction of the opening 34a. In the intermediate portion, the opening width on the upper surface 36 side and the opening width on the lower surface 37 side are substantially equal.

  The opening pattern having the tapered portions 35a and 35b can be formed, for example, by performing a photosensitive process twice using a negative photosensitive emulsion. In each photosensitive process, two types of light shielding plates having different light shielding portions are used. In the first photosensitive process, a first light-shielding plate having a first light-shielding portion is disposed on the lower surface 37 side of the screen plate 30 to emit light having a sufficient amount of light (for example, to cure the entire photosensitive emulsion (for example, UV). In the second exposure step, a second light shielding plate having a second light shielding portion smaller than the first light shielding plate is used. The center of the second light-shielding part is aligned with the position where the center of the first light-shielding part is located, and, for example, UV light having a light amount of about 50% of the first photosensitive process is irradiated. As a result, UV is irradiated to the unexposed portion in the first photosensitive step, but the amount of light is 50% of that in the first photosensitive step, so that the emulsion is closer to the upper surface 36 side away from the lower surface 37 near the second light-shielding portion. Becomes difficult to cure. That is, the emulsion removed in the subsequent uncured portion removing step increases toward the upper surface 36 side, and the tapered portions 35a and 35b are formed. Note that the shapes of the tapered portions 35a and 35b can be changed by adjusting the size of the light shielding portion and the UV light amount.

  FIG. 11 shows a state in which the tip portion Pe of the finger 21a is formed using the screen plate 30 in comparison with the case where the screen plate 100 having the opening 101 having a constant opening width is used. Specifically, in the same figure, after the ink 50 is filled in the openings 34 a and 101 of the screen plates 30 and 100 by sliding the squeegee 40, the screen plates 30 and 100 are separated from the light receiving surface of the photoelectric conversion unit 11. Thus, the ink 50 is transferred onto the light receiving surface.

  In screen printing using the screen plate 30, the tip portion Pe of the narrow finger 21a can be formed by narrowing the opening width on the lower surface 37 side of the opening 34a. Even when the screen plate 100 is used, by making the opening width of the opening portion 101 equal to the opening width on the lower surface 37 side of the opening portion 34a, the thin tip portion Pe can be formed as in the case where the screen plate 30 is used. .

  The portion of the screen plate 30, 100 where the squeegee 40 passes is separated from the light receiving surface of the photoelectric conversion unit 11 by the tension of each mesh 31. At this time, the ink 50 is ejected from the openings 34a and 101 and transferred onto the light receiving surface. However, due to the adhesive force between the walls of the openings 34a and 101 and the ink 50, a part of the ink 50 is opened. , 101 remains. In particular, when the opening widths of the openings 34a and 101 are narrowed, the influence of the adhesive force is increased, resulting in poor ejection performance and poor filling of the ink 50. Print defects are likely to occur.

  However, printing characteristics differ greatly between the case where the screen plate 30 is used and the case where the screen plate 100 is used. According to the screen plate 30, the opening width on the upper surface 36 side of the opening 34a is wider than the opening width on the lower surface 37 side, and in particular, the taper portion where the opening width gradually increases from the intermediate portion of the opening 34a toward the upper surface 36 side. Since it has 35a, the filling property of the ink 50 with respect to the opening part 34a becomes favorable. Furthermore, since only the opening width on the upper surface 36 side is wide, the interaction between the wall portion of the opening 34a and the ink 50 can be reduced while enabling the formation of the narrow tip portion Pe. In addition, since the length (length in the thickness direction) of the narrow opening 34a is small, the adhesion between the wall of the opening 34a and the ink 50 is small. Thereby, as compared with the screen plate 100, more ink 50 can be filled in the opening 34a, and the discharge performance of the ink 50 can be improved.

Therefore, by using the screen plate 30, the amount of ink 50 ejected on the light receiving surface of the photoelectric conversion unit 11 is larger than when the screen plate 100 is used, and printability is achieved even in a portion where the electrode width is narrow. And the occurrence of printing defects can be suppressed. And the convex-shaped part 23a is formed in the predetermined range containing the front-end | tip part Pe of the finger 21. FIG.
Moreover, since the discharge amount of the ink 50 increases at the tip portion Pe, the pressure applied to the light receiving surface of the photoelectric conversion unit 11 during printing increases. Thereby, for example, the contact resistance between the tip portion Pe and the photoelectric conversion unit 11 is reduced, and the fill factor FF can be improved.

  The design of this embodiment can be changed without departing from the object of the invention. Hereinafter, design changes (modifications) will be described with reference to the drawings as appropriate.

For example, as shown in the cross-sectional view of FIG. 12A, the entire wall portion of the opening 34a may be a tapered portion 35a. That is, in the form shown in the figure, the wall portion of the opening 34a is inclined so that the opening width gradually increases from the lower surface 37 side toward the upper surface 36 side. In this case, for example, the filling and discharging of the ink 50 become smoother.
Further, instead of the screen plate 30, a metal mask plate 70 in which a plurality of metal plates 71 and 72 are laminated as shown in the sectional view of FIG. In the metal mask plate 70, an opening 75 is formed by overlapping an opening 73 of the metal plate 71 on the lower surface 37 side and an opening 74 of the metal plate 72 on the upper surface 36 side. The opening width W4 of the opening portion 74 is wider than the opening width W3 of the opening portion 73, and the opening portion 75 has a step portion in which the opening width changes at an intermediate portion thereof.

Further, as shown in the plan view of FIG. 13A, the opening width on the upper surface 36 side may be made constant over the entire length of the openings 34a and 34b. On the other hand, the opening width on the lower surface 37 side of the opening 34a is gradually narrowed from the joint end toward the tip Xe, and the opening width on the lower surface 37 side of the opening 34b is from the joint end toward the center Xc. It is getting narrower.
In the form shown in FIG. 13B, the opening width on the upper surface 36 side of the openings 34a and 34b is increased as the opening width on the lower surface 37 side becomes narrower. That is, the opening width on the upper surface 36 side is widest at the tip portion Xe and the center portion Xc corresponding to the thin line portion.
If the screen plate of the form shown in FIG. 13 is used, the widths of the fingers 21a and 21b can be further reduced.

The electrode 20 can also be formed by a manufacturing method other than screen printing. For example, the electrode 20 may be formed by electrolytic plating or sputtering.
Moreover, the electrode may be comprised only from the finger not including a bus bar.
Moreover, as a back surface electrode, metal thin films, such as silver (Ag) formed in the substantially whole region on the back surface of the photoelectric conversion part 11, can also be provided instead of a finger.

  DESCRIPTION OF SYMBOLS 10 Solar cell, 11 Photoelectric conversion part, 20 Light-receiving surface electrode, 21, 21a, 21b Finger, 22 Bus bar, 23a, 23b Convex part, 30 Screen version, 31 mesh, 32 frames, 33 Mask material, 34, 34a, 34b , 34c Opening, 35a, 35b Taper, 36 Top, 37 Bottom, 40 Squeegee, 50 Ink, Pe, Xe Tip, Pc, Xc Center.

Claims (7)

A photoelectric conversion unit;
Finger electrodes provided on the main surface of the photoelectric conversion unit;
With
The finger electrodes can have a tapered width toward the longitudinal both end portions are tapered located edge side of said main surface, a convex portion electrode height on the both longitudinal end portions becomes higher A solar cell. The solar cell according to claim 1 ,
Comprising at least two arranged bus bar electrodes spaced each other physician,
The finger electrodes provided between the bus bar electrodes have a width that narrows from both longitudinal ends connected to the bus bar electrodes toward the central portion in the longitudinal direction. A method for producing a solar cell comprising an electrode on a main surface of a photoelectric conversion unit,
Using a plate making having an opening corresponding to the shape of the electrode, and using a squeegee that fills the opening with the constituent material of the electrode, the step of printing the constituent material on the main surface,
The said opening part is a manufacturing method of a solar cell with which the opening width | variety of the front-end | tip part corresponding to the longitudinal direction edge part of the said electrode located in the edge side of the said main surface is wider on the said squeegee side than the said main surface side. It is a manufacturing method of the solar cell of Claim 3, Comprising:
In the portion where the opening width is wider on the squeegee side than the main surface side, at least part of the wall portion constituting the opening portion is directed from the main surface side of the opening portion toward the squeegee side. A tapered portion is provided so as to gradually widen the opening width. It is a manufacturing method of the solar cell of Claim 3 or 4,
The electrode includes a bus bar and a plurality of fingers,
In the opening corresponding to the finger, the opening width on the main surface side becomes narrower toward a tip end side corresponding to a longitudinal end portion of the finger located on the edge side of the main surface. It is a manufacturing method of the solar cell of Claim 5, Comprising:
At least two bus bars are spaced apart from each other,
In the opening corresponding to the finger provided between the bus bars, the opening width of the opening corresponding to the central portion in the longitudinal direction of the finger is wider on the squeegee side than on the main surface side. It is a manufacturing method of the solar cell according to claim 6,
The opening width corresponding to the fingers provided between the bus bars has a narrower opening width on the main surface side toward a partial side corresponding to a central portion in the longitudinal direction of the fingers.

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