CN105322050B - Method for manufacturing solar cell, screen for manufacturing solar cell, and screen set - Google Patents

Method for manufacturing solar cell, screen for manufacturing solar cell, and screen set Download PDF

Info

Publication number
CN105322050B
CN105322050B CN201410428232.7A CN201410428232A CN105322050B CN 105322050 B CN105322050 B CN 105322050B CN 201410428232 A CN201410428232 A CN 201410428232A CN 105322050 B CN105322050 B CN 105322050B
Authority
CN
China
Prior art keywords
groove
electrode
half tone
barrier layer
clathrum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201410428232.7A
Other languages
Chinese (zh)
Other versions
CN105322050A (en
Inventor
郭盈成
郑元钦
许名宏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motech Industries Inc
Original Assignee
Motech Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motech Industries Inc filed Critical Motech Industries Inc
Publication of CN105322050A publication Critical patent/CN105322050A/en
Application granted granted Critical
Publication of CN105322050B publication Critical patent/CN105322050B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

A method for manufacturing a solar cell, a screen plate and a screen plate set for manufacturing the solar cell. The screen printing plate comprises a grid layer and a barrier layer. The barrier layer is formed on the grid layer and comprises ink falling holes and grooves. The groove is communicated with the ink falling hole, and the extending direction of the groove is different from that of the ink falling hole. The invention also provides a screen plate group consisting of the screen plates and a manufacturing method of the solar cell by utilizing the screen plates and the screen plate group, and furthermore, the invention can prevent the electrode formed in advance from being extruded by the subsequent screen plates.

Description

The manufacture method of solar cell and the half tone and half tone group for manufacturing it
Technical field
The present invention relates to a kind of manufacture method of solar cell and the half tone and half tone group that manufacture it, and more particularly to one Kind using many half tones solar cell manufacture method and manufacture its half tone and half tone group.
Background technology
Traditional solar cell includes solar cell substrate, fine wire electrode and bus electrode (Bus bar), wherein carefully Line electrode (Finger) is mainly used in collecting the electric current of photoproduction carrier and collected electric current is transferred at bus electrode.Typically For, to increase the light income of battery surface, the area of increase smooth surface is the direct practice, therefore the width of fine wire electrode is become It is narrow, then it can increase overall light-receiving area, increase the light quantity received;Meanwhile, when reducing fine wire electrode width, need synchronization Increase the thickness of fine wire electrode, the impedance to ensure fine wire electrode is not rise.In addition, bus electrode is mainly because of its function Weld to export collected electric current with welding (Ribbon), thus thickness be not required to it is too high, and if extra increase thickness can cause material Expect the increase of (elargol) cost.Therefore the thickness of fine wire electrode and bus electrode is to have difference on making, therefore usually using two Secondary screen painting to print out fine wire electrode and bus electrode respectively.
If however, during first printing fine line electrode, fine wire electrode can be deformed, Yi Jixian by the interference of follow-up screen painting The structure of the fine wire electrode of printing can be destroyed, or produce be used for after the half tone emulsion of itself that prints have easy stripping Fall and the problem of half tone twine is broken.
The content of the invention
, can it is an object of the invention to provide a kind of manufacture method of solar cell and the half tone and half tone group that manufacture it The electrode being initially formed is avoided to be extruded by follow-up half tone.
According to one embodiment of the invention, a kind of manufacture method of solar cell is proposed.Manufacture method includes following step Suddenly.One substrate is provided;One first half tone is provided, the first half tone includes one first clathrum and one first barrier layer, and first stops Layer is formed on the first clathrum and put pen to paper hole with one first;Using the first half tone, put pen to paper by first on Kong Yuyi substrates Form a first electrode;One second half tone is provided, the second half tone includes one second clathrum and one second barrier layer, and second stops Layer is formed on the second clathrum and put pen to paper hole and one first groove including one second, wherein the first groove is formed at the second stop On a lower surface of layer, and the first groove extends along lower surface and communicated with the second hole of putting pen to paper, wherein the extension side of the first groove To with second put pen to paper hole bearing of trend it is different;And, using the second half tone, first electrode is accommodated and by the with the first groove Two holes of putting pen to paper are in contact with second electrode in forming a second electrode, wherein first electrode on substrate.
According to another embodiment of the present invention, a kind of half tone is proposed.Half tone includes a clathrum and a barrier layer.Barrier layer It is formed on clathrum, barrier layer has a lower surface and put pen to paper hole and one first groove including one.First groove is located at following table Face simultaneously extends along lower surface and communicated with hole of putting pen to paper, and the bearing of trend of the first groove and the bearing of trend in hole of putting pen to paper are different, should First groove does not extend through the barrier layer.
According to another embodiment of the present invention, a kind of half tone group is proposed.Half tone group includes one first half tone and one second net Version.First half tone includes one first clathrum and one first barrier layer.First barrier layer is formed on the first clathrum and had One first puts pen to paper hole.Second half tone includes one second clathrum and one second barrier layer.Second barrier layer is formed at the second grid On layer and with a lower surface, the second barrier layer is put pen to paper hole and one first groove including one second, wherein under the first groove is located at Surface simultaneously extends along lower surface and communicated with the second hole of putting pen to paper, and the bearing of trend of the first groove and the second extension for putting pen to paper hole Direction is different, wherein the position of the first groove corresponds to each other with the first position for putting pen to paper hole, first groove do not extend through this Two barrier layers.
Below in conjunction with the drawings and specific embodiments, the present invention will be described in detail, but not as a limitation of the invention.
Brief description of the drawings
Figure 1A illustrates the top view of the first half tone according to one embodiment of the invention;
Figure 1B illustrates sectional view of Figure 1A the first half tone along direction 1B-1B ';
Fig. 2 illustrates Figure 1B sectional view of first half tone located at solar cell substrate;
The solar cell substrate that Fig. 3 A illustrate Fig. 2 is formed with the top view of first electrode;
Fig. 3 B illustrate sectional view of Fig. 3 A solar cell substrate along direction 3B-3B ';
Fig. 4 A illustrate the top view of the second half tone according to one embodiment of the invention;
Fig. 4 B illustrate sectional view of Fig. 4 A the second half tone along direction 4B-4B ';
Fig. 4 C illustrate sectional view of Fig. 4 A the second half tone along direction 4C-4C ';
Fig. 4 D illustrate sectional view of Fig. 4 A the second half tone along direction 4D-4D ';
Fig. 5 A illustrate the sectional view of the groove receiving first electrode of Fig. 4 B the second half tone;
Sectional view when Fig. 5 B illustrate Fig. 4 C the second half tone on solar cell substrate;
Sectional view when Fig. 5 C illustrate Fig. 4 D the second half tone on solar cell substrate;
Fig. 6 A illustrate the schematic diagram that scraper acts on Fig. 5 A the second half tone;
Fig. 6 B illustrate the schematic diagram that scraper acts on Fig. 5 B the second half tone;
Fig. 6 C illustrate the schematic diagram that scraper acts on Fig. 5 C the second half tone;
Fig. 7 illustrates the top view of the solar cell substrate after the second half tone for removing Fig. 6 A;
Fig. 8 illustrates the sectional view of another embodiment of Fig. 4 C the second half tone.
Wherein, reference
100:Solar cell
110:First half tone
111:First clathrum
111a、131a:Mesh
111b、131b:Lower wire side
112:First barrier layer
112a:First puts pen to paper hole
120:Solar cell substrate
120u、122u:Upper surface
121:First electrode
121’:First electrode material
1211:One end
122:Second electrode
122’:Second electrode material
130:Second half tone
131:Second clathrum
131u:Upper wire side
132:Second barrier layer
1321:Thin barrier layer
1321b、1322b:Lower surface
1322:Thick barrier layer
132a:Second puts pen to paper hole
132r:Groove
132r1:First groove
132r2:Second groove
140:Scraper
P1、P2、P3:Overhang
R1:Depth
T1、T2:Thickness
W1、W2、W3:Width
Embodiment
The structural principle and operation principle of the present invention are described in detail below in conjunction with the accompanying drawings:
Fig. 1 to Fig. 8 illustrates the procedure chart of the manufacture method of the solar cell according to one embodiment of the invention.
First, as illustrated in figures 1A and ib, Figure 1A illustrates the top view of the first half tone according to one embodiment of the invention, and Figure 1B illustrates sectional view of Figure 1A the first half tone along direction 1B-1B '.
There is provided one first half tone 110 in this step, stop wherein the first half tone 110 includes the first clathrum 111 and first Layer 112.First clathrum 111 is a network structure, and it has the mesh 111a of multiple hollow outs.In the formation of follow-up first electrode In step, the electrode slurry for forming first electrode can be formed at solar energy by the mesh 111a of the first clathrum 111 On cell substrates 120 (being illustrated in Fig. 2), wherein this solar cell substrate 120 has been formed with emitter layer (not shown) in it In.First barrier layer 112 is in being, for example, negative photoresistance emulsion in implementation, and it is formed at the first clathrum 111 and the first grid of cladding The mesh 111a of layer 111, wherein the mesh 111a for being not affected by the first barrier layer 112 cladding forms multiple first and put pen to paper hole 112a. Because the first hole 112a that puts pen to paper exposes in the mesh 111a of the first clathrum 111, the forming step for making follow-up first electrode, first Electrode material can put pen to paper hole 112a by first and be formed on solar cell substrate 120 (being illustrated in Fig. 2), to form first Electrode 121 (is illustrated in Fig. 2).In addition, the first shape for putting pen to paper hole 112a can be long strip type but not limited to this in the present embodiment, It is, for example, extend along X-direction, and multiple first put pen to paper hole 112a be arranged in along Y direction it is thin-line-shaped.
As shown in Figure 1B, the first barrier layer 112 protrudes past the lower wire side 111b of the first clathrum 111 overhang P1 Jie Between 5 microns to 25 microns, and the thickness T1 (being illustrated in Fig. 2) for the first electrode 121 being subsequently formed can preferably be more than or Equal to overhang P1, such as 5 microns to 30 microns, but this is not used to limit the embodiment of the present invention.In addition, the first barrier layer 112 First put pen to paper hole 112a width W1 between 20 microns to 60 microns, and the width for the first electrode 121 being subsequently formed W2 (is illustrated in Fig. 2), because electrode slurry would generally expand the reason of line after printing so that the width W2 of first electrode 121 can be more than The first width W1 for putting pen to paper hole 112a, but in being not limited in implementation.
Then, Fig. 2 is refer to, it illustrates sectional view of Figure 1B the first half tone on solar cell substrate.This step In rapid, using the first half tone 110, first electrode material 121 ' squeezed into first with scraper 140 and put pen to paper in the 112a of hole, make the first electricity Pole material 121 ' is formed on solar cell substrate 120 by the first hole 112a that puts pen to paper.Afterwards, it can first be heat-treated and carry out appropriateness Solidify first electrode material 121 ' and form first electrode 121.In addition, first electrode material is, for example, silver paste or other conduction materials Material.In in implementation, the direction that scraper 140 prints can in X direction or Y-direction is printed, and for purposes of illustration only, Fig. 2's scrapes Knife 140 is printed with Y-direction.
Then, Fig. 3 A and Fig. 3 B, Fig. 3 A be refer to illustrate Fig. 2 solar cell substrate and be formed with the vertical view of first electrode Figure, and Fig. 3 B illustrate sectional view of Fig. 3 A solar cell substrate along direction 3B-3B '.
In this step, Fig. 2 the first half tone 110 is removed, to expose first electrode 121.From Fig. 3 A, each first electrode 121 extend along X-direction, and along Y direction to be spaced into finger thin-line-shaped for several first electrodes 121.In another embodiment, First electrode 121 is not limited to extend along X-direction, and its bearing of trend can also press from both sides an any angle more than 0 with X-axis or be wave The patterns such as shape.As shown in Figure 3A, although several first electrodes 121 are isolated from each other and can not be electrically connected with, and so pass through subsequent step The second electrode 122 (second electrode 122 is illustrated in Fig. 6 C) of formation, can be electrically connected with this little first electrode 121, be retouched after this appearance State.
Then, the top view that Fig. 4 A to Fig. 4 D, Fig. 4 A illustrate the second half tone according to one embodiment of the invention is refer to, is schemed 4B illustrates sectional view of Fig. 4 A the second half tone along direction 4B-4B ', and Fig. 4 C illustrate Fig. 4 A the second half tone along direction 4C-4C's ' Sectional view, and Fig. 4 D illustrate sectional view of Fig. 4 A the second half tone along direction 4D-4D '.
In this step, there is provided one second half tone 130 as shown in Fig. 4 B and Fig. 4 C, the second half tone 130 and above-mentioned first half tone 110 constitute a half tone group.Second half tone 130 includes the second clathrum 131 and the second barrier layer 132.The material on the second barrier layer 132 Material can hold this and repeat no more similar in appearance to the first barrier layer 112.Second clathrum 131 is a network structure, and it has multiple hollow outs Mesh 131a.Second barrier layer 132 is formed at the second clathrum 131 and coats some meshes 131a of the second clathrum 131 (as shown in Figure 4 B), wherein the mesh 131a formation at least 1 second for being not affected by the second barrier layer 132 cladding puts pen to paper hole 132a (such as Shown in Fig. 4 A and Fig. 4 C).The second electrode 122 (being illustrated in Fig. 6 B and Fig. 6 C) of subsequent step can put pen to paper hole 132a shapes by second Into on solar cell substrate 120.As shown in Figure 4 A, second put pen to paper hole 132a be shaped as strip, it is generally along Y-axis Extension.In another embodiment, the second hole 132a that puts pen to paper is not limited to extend along Y direction, and its bearing of trend also can be big with Y-axis folder one In 0 any angle.
As shown in Figure 4 A, the second barrier layer 132 has several the first groove 132r1 and the second groove 132r2.Wherein, The region of Fig. 3 A first electrode 121 is generally covered in one groove 132r1 region, with the formation of follow-up second electrode 122 First electrode 121 (as shown in Figure 5A) is accommodated in step, it is to avoid extruding of the first electrode 121 by the second half tone 130.
In this implementation, each first groove 132r1 along X-direction extend into thin-line-shaped and several first grooves 132r1 that It is spaced between this along Y direction, wherein the first groove 132r1 bearing of trend and the second groove 132r2 bearing of trend Different, (generally) e.g. perpendicular to one another or rough is vertical.In addition, as shown in Figure 4 B, the first groove 132r1 is formed at second On the lower surface 1322b on barrier layer 132, and the first groove 132r1 extends in lower surface 1322b indents and along X-direction.
As shown in Figure 4 A, the second groove 132r2 is surrounded on around the hole 132a that puts pen to paper, and is connected with the first groove 132r1, The second groove 132r2 region is set to cover the whole second region for putting pen to paper hole 132a.Certainly, in the upper second groove 132r2 of implementation Also it can only be formed to put pen to paper and both sides relative hole 132a and be connected with the first groove 132r1.In addition, the second groove 132r2's prolongs Stretch direction generally put pen to paper with second hole 132a bearing of trend it is parallel.In another embodiment, the second groove 132r2 is not limited to edge Y direction extends, and its bearing of trend can also press from both sides an any angle for being more than 0 with Y-axis.Wherein the second groove 132r2 can be linear Or wavy extension.In addition, as shown in Fig. 4 A and Fig. 4 D, the second groove 132r2 is connected with the first groove 132r1, make second recessed Groove 132r2 and the first groove 132r1 constitutes a continuous groove 132r.
As shown in Figure 4 C, the second groove 132r2 is formed at the lower surface 1322b on the second barrier layer 132, i.e. the second groove 132r2 up indent and extends from lower surface 1322b along Y-direction, but its indent and not through the second barrier layer 132.
As shown in Figure 4 C, the second barrier layer 132 includes thin barrier layer 1321 and thick barrier layer 1322, wherein thin barrier layer 1321 thickness is thinner than thick barrier layer 1322.In addition, partial thin barrier layer 1321 is put pen to paper around the 132a of hole around second, And thick barrier layer 1322 surrounds thin barrier layer 1321.Above-mentioned groove 132r is extended to from the lower surface 1322b of thick barrier layer 1322 The lower surface 1321b of thin barrier layer 1321, and then communicated with the second hole 132a that puts pen to paper.Due to the thickness and thickness of thin barrier layer 1321 The thickness on barrier layer 1322 is different, the second groove 132r2 is collectively forming a cascade groove with opening with the second hole 132a that puts pen to paper Mouthful.
For thickness, thin barrier layer 1321 protrudes the overhang P2 of the lower surface of the second clathrum 131 between 0 to 15 Micron between, its be 0 when as shown in figure 8, and thick barrier layer 1322 protrude the lower surface of the second clathrum 131 overhang P3 between Between 5 microns to 40 microns.In one embodiment, as shown in Fig. 5 B, Fig. 6 C, because the overhang P3 of thick barrier layer 1322 is more than Or equal to the thickness T1 of first electrode 121, therefore thick barrier layer 1322 can be resisted against the upper surface 120u of solar cell substrate 120 On, and first electrode 121 is accommodated by the first groove 132r1, even avoid the second barrier layer 132 and first electrode to reduce 121 contacts and the problem of derivative damage, i.e. the service life of the second half tone 130 can be increased.
As shown in Figure 4 C, by making the second design for putting pen to paper the lower thickness that thin barrier layer 1321 is formed around the 132a of hole, The amount out of ink of second electrode material when can limit printing, as shown in Figure 6B, and then makes the thickness of second electrode 122 being subsequently formed Will not be blocked up;That is, the design of the thinner thickness by thin barrier layer 1321, can reduce second and put pen to paper hole 132a in printing When space out of ink and amount out of ink so that the formation thickness of controllable second electrode 122.
Then, Fig. 5 A to Fig. 5 C are refer to, the groove that wherein Fig. 5 A illustrate Fig. 4 B the second half tone accommodates first electrode Sectional view, sectional view when Fig. 5 B illustrate Fig. 4 C the second half tone on solar cell substrate, and Fig. 5 C illustrate Fig. 4 D's Second half tone is located at sectional view when on solar cell substrate.
In this step, as shown in Figure 5A, when the second half tone 130 is located on solar cell substrate 120, first electrode 121 are contained in the first groove 132r1;In this way, between the entity part of the half tone 130 of first electrode 121 and second can be avoided Interference.In the present embodiment, the first groove 132r1 has depth R1 and width W3, wherein the first groove 132r1 depth R1 is more than Or equal to the thickness T1 of first electrode 121, and the first groove 132r1 width W3 is more than or equal to the width of first electrode 121 W2, makes in the typography for being subsequently formed second electrode 122, it is to avoid the situation that the second half tone 130 is pushed is expressed to the first electricity Pole 121 (Fig. 6 A), and then the destruction of first electrode 121 and the damage on the second barrier layer 132 are avoided, therefore can ensure that the second half tone 130 service life is complete with first electrode 121.
In one embodiment, the thickness T1 of first electrode 121 is between about 5 microns to 30 microns, and first electrode 121 Width W2 is between about 30 microns to 80 microns;Accordingly, the first groove 132r1 width W3 can be between about 100 microns extremely Between 400 microns, the first groove 132r1 depth R1 can be between about 5 microns to 40 microns, and size relationship so makes In printing process, the amount of interference of the second half tone 130 and first electrode 121 is preferably minimized or will not even interfered.
As shown in Figure 5 B, when the second half tone 130 is located on solar cell substrate 120, put pen to paper hole 132a due to second Around be relatively thin thin barrier layer 1321 design, can making the second electrode 122 that is subsequently formed, (second electrode 122 is illustrated in figure Thickness 6B) is effectively limited.
As shown in Figure 5 C, because one end 1211 of first electrode 121 is corresponding with the second hole 132a that puts pen to paper, make in follow-up In the forming step of two electrodes 122 (second electrode 122 is illustrated in Fig. 6 C), second electrode material 122 ' (being illustrated in Fig. 6 C) can lead to Cross and enter in the second groove 132r2 and fall within substrate 120 from the second mesh 131a that hole 132a exposes that puts pen to paper, and with first One end 1211 of electrode 121 is connected.
Then, Fig. 6 A to Fig. 6 C are refer to, wherein Fig. 6 A illustrate the schematic diagram that scraper acts on Fig. 5 A the second half tone, schemed 6B illustrates the schematic diagram that scraper acts on Fig. 5 B the second half tone, and Fig. 6 C illustrate scraper acts on Fig. 5 C the second half tone and show It is intended to.
As shown in Figure 6A, due to having interval between the groove 132r1 of first electrode 121 and first, make when the second half tone 130 After extruding by scraper 140, the second half tone 130 is difficult to interfere with first electrode 121, thus avoid first electrode 121 by Destruction.
As shown in Figure 6B, in printing process, after the second half tone 130 is in the extruding by scraper 140, thin barrier layer 1321 lower surface 1321b may touch the upper surface 120u of solar cell substrate 120.Due to thin barrier layer 1321 The design of lower thickness, can make the thickness T2 of second electrode 122 will not be blocked up by the limitation of thin barrier layer 1321;Such one Come, the material consumption amount of second electrode 122 can be saved.In the present embodiment, the thickness T2 of second electrode 122 is thinner than first electrode 121 thickness T1, i.e., less than 5 microns to 30 microns.Specifically, the thickness T2 of second electrode 122 can be micro- between 2 microns to 15 Between rice, signified thickness T2 is the thickness of any section of second electrode 122, such as sectional median plane or two side sections herein.This Outside, thickness T2 refers to the height started at from the upper surface 120u of solar cell substrate 120.Second electrode material 122 ' can phase First electrode material is similar to, holds this and repeats no more.In addition, after printing, the upper surface 122u of second electrode 122 can be between second Between the upper wire side 131u of clathrum 131 and the lower wire side 131b of the second clathrum 1321, so also it can be less than or generally flush In the lower wire side 131b of the second clathrum 1321.
As shown in Figure 6 C, first electrode 121 is contained in the first groove 132r1 and a part of of first electrode 121 extends Expose to from the second hole 132a that puts pen to paper.Due to first electrode 121 one end 1211 with second put pen to paper hole 132a region it is corresponding (that is, in overlapped on projecting direction), makes the phase mutual connection of one end 1211 of the second electrode 122 to be formed and first electrode 121 Touch, and then second electrode 122 is contacted all first electrodes 121, to be electrically connected with this little first electrode 121.So far, formed Solar cell 100 comprising first electrode 121 and second electrode 122.
Because the thickness T2 (thickness T2 is illustrated in Fig. 6 B) of second electrode 122 is relatively thin, make second electrode 122 and first electrode The more existing design of thickness of 121 overlapping comes relatively thin;Consequently, it is possible to when multiple solar cells 100 are stacked, second Electrode 122 and the overlapping of first electrode 121 are difficult by crushing.In addition, on the implementation, the solar cell in the present invention is in print Also the technique of electrode sintering is had after brush electrode slurry so that electrode slurry through the anti-reflecting layer on substrate surface and and base Plate produces Ohmic contact.
Then, Fig. 7 is refer to, it illustrates the top view of the solar cell substrate after the second half tone for removing Fig. 6 A.This In step, remove after the second half tone 130, expose the first electrode 121 and second electrode 122 of solar cell 100.
It is then possible to which welding (not illustrating) concatenates multiple solar cells 100, wherein welding is welded in a wherein solar energy The second electrode 122 of battery 100 and the backplate (not illustrating) of another solar cell 100.Due to using present invention implementation The thickness T2 systems for the second electrode 122 that the manufacture method of example is formed are thin, therefore can save the electrode material of second electrode 122 Usage amount is to reduce cost.
It is so of the invention although above-described embodiment is illustrated exemplified by being initially formed first electrode 121 and re-forming second electrode 122 Embodiment not limited to this.In another embodiment, second electrode 122 can be also initially formed, first electrode 121 is re-formed.
Fig. 8 illustrates the sectional view of another embodiment of Fig. 4 C the second half tone.The second half tone 230 in the present embodiment includes Thin barrier layer 1321 and thick barrier layer 1322, wherein thin barrier layer 1321 are put pen to paper hole 132a around second, and thick barrier layer 1322 Around thin barrier layer 1321.Unlike the embodiments above, the thin barrier layer 1321 of the present embodiment does not protrude the second clathrum 131 lower wire side 131b.Although the thin barrier layer 1321 of the embodiment of the present invention does not protrude the lower wire side of the second clathrum 131 131b, so compared to for omitting whole thin barrier layer 1321, second formed using the second half tone 230 in the present embodiment The thickness of electrode 122 (not illustrating) is still relatively thin.
In the present embodiment, the lower surface 1321b of thin barrier layer 1321 is generally aligned in the lower wire side of the second clathrum 131 131b, right this is not used to limit the embodiment of the present invention.In another embodiment, the lower surface 1321b of thin barrier layer 1321 can be located at Between the upper wire side 131u of second clathrum 131 and the lower wire side 131b of the second clathrum 1321.
In in implementation, the first clathrum and/or the second clathrum of the embodiment of the present invention can use screen cloth and/or metal foil Plate (thin slice) is implemented, and wherein screen cloth can be Metal screen cloth or plastic cement screen cloth.
Certainly, the present invention can also have other various embodiments, ripe in the case of without departing substantially from spirit of the invention and its essence Various corresponding changes and deformation, but these corresponding changes and change ought can be made according to the present invention by knowing those skilled in the art Shape should all belong to the protection domain of appended claims of the invention.

Claims (10)

1. a kind of manufacture method of solar cell, it is characterised in that including:
One substrate is provided;
One first half tone is provided, first half tone includes one first clathrum and one first barrier layer, and first barrier layer is formed Put pen to paper hole on first clathrum and with one first;
Using first half tone, hole first is put pen to paper in forming a first electrode on the substrate by this;
One second half tone is provided, second half tone includes one second clathrum and one second barrier layer, and second barrier layer is formed Put pen to paper hole and one first groove on second clathrum and including one second, wherein first groove is formed at this and second stopped On a lower surface of layer, and first groove extends along the lower surface and communicated with second hole of putting pen to paper, wherein first groove Bearing of trend with this second put pen to paper hole bearing of trend it is different;
Using second half tone, the first electrode is accommodated with first groove and hole second is put pen to paper in being formed on the substrate by this One second electrode, the wherein first electrode contact with each other with the second electrode.
2. the manufacture method of solar cell according to claim 1, it is characterised in that second barrier layer also includes one Second groove, second groove is formed at the lower surface and is surrounded on this and second puts pen to paper around hole.
3. the manufacture method of solar cell according to claim 1, it is characterised in that the width of first groove is more than Or equal to the width of the first electrode, the depth of first groove is more than or equal to the thickness of the first electrode.
4. the manufacture method of solar cell according to claim 1, it is characterised in that first clathrum and/or should Second clathrum is screen cloth and/or sheet metal.
5. a kind of half tone, it is characterised in that including:
One clathrum;
One barrier layer, is formed on the clathrum, the barrier layer have a lower surface and including:
One puts pen to paper hole;And
One first groove, first groove is located at the lower surface and extends along the lower surface and communicated with the hole of putting pen to paper, and this The bearing of trend of one groove and the bearing of trend in the hole of putting pen to paper are different, and first groove does not extend through the barrier layer.
6. half tone according to claim 5, it is characterised in that the barrier layer also includes one second groove, second groove It is formed at the lower surface and is surrounded on around the hole of putting pen to paper.
7. half tone according to claim 5, it is characterised in that the clathrum is screen cloth or sheet metal.
8. a kind of half tone group, it is characterised in that including:
One first half tone, including:
One first clathrum;And
One first barrier layer, is formed on first clathrum and is put pen to paper hole with one first;And
One second half tone, including:
One second clathrum;And
One second barrier layer, is formed on second clathrum and with a lower surface, second barrier layer falls including one second Ink hole and one first groove, wherein first groove are located at the lower surface and extend along the lower surface and second put pen to paper hole with this Communicate, and the bearing of trend of first groove with this second put pen to paper hole bearing of trend it is different, the wherein position of first groove Corresponded to each other with first position for putting pen to paper hole, first groove does not extend through second barrier layer.
9. half tone group according to claim 8, it is characterised in that second barrier layer also includes one second groove, this Two grooves are formed at the lower surface and are surrounded on this and second put pen to paper around hole.
10. half tone group according to claim 8, it is characterised in that first clathrum and/or second clathrum are net Cloth and/or sheet metal.
CN201410428232.7A 2014-07-28 2014-08-27 Method for manufacturing solar cell, screen for manufacturing solar cell, and screen set Expired - Fee Related CN105322050B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW103125717A TWI523254B (en) 2014-07-28 2014-07-28 Manufacturing method of solar cell, screen for manufacturing thereof and screen set for manufacturing thereof
TW103125717 2014-07-28

Publications (2)

Publication Number Publication Date
CN105322050A CN105322050A (en) 2016-02-10
CN105322050B true CN105322050B (en) 2017-09-05

Family

ID=55249051

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410428232.7A Expired - Fee Related CN105322050B (en) 2014-07-28 2014-08-27 Method for manufacturing solar cell, screen for manufacturing solar cell, and screen set

Country Status (2)

Country Link
CN (1) CN105322050B (en)
TW (1) TWI523254B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI665095B (en) * 2017-11-13 2019-07-11 茂迪股份有限公司 Screen stencil and screen printing method
TWI739353B (en) * 2020-03-23 2021-09-11 倉和股份有限公司 Secondary printing screen structure for printing solar cells, manufacturing method and printing method
CN113442566A (en) * 2020-03-26 2021-09-28 仓和精密制造(苏州)有限公司 Secondary printing screen structure and method for printing solar cell

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7749883B2 (en) * 2007-09-20 2010-07-06 Fry's Metals, Inc. Electroformed stencils for solar cell front side metallization
CN202428770U (en) * 2011-12-23 2012-09-12 昆山允升吉光电科技有限公司 Matched screen plate for solar energy battery electrode
TWI503995B (en) * 2013-06-14 2015-10-11 Neo Solar Power Corp Electrode structure for solar cells and method for manufacturing the same
CN203713223U (en) * 2014-02-14 2014-07-16 正中科技股份有限公司 Screen printing plate structure for printing solar cell

Also Published As

Publication number Publication date
CN105322050A (en) 2016-02-10
TW201605067A (en) 2016-02-01
TWI523254B (en) 2016-02-21

Similar Documents

Publication Publication Date Title
CN102029776B (en) Screen for printing silicon solar battery electrodes
CN201856441U (en) Screen plate used for printing silicon solar battery electrode
CN105322050B (en) Method for manufacturing solar cell, screen for manufacturing solar cell, and screen set
CN202712198U (en) Solar cell element
JP7199041B2 (en) BATTERY, BATTERY MANUFACTURING METHOD, AND BATTERY MANUFACTURING APPARATUS
US20160343896A1 (en) Solar Cell Structure and Method for Manufacturing the Same
WO2007083606A1 (en) Printing mask and solar cell manufacturing method using same
US20140076231A1 (en) Printing stencils for applying a printing pattern to a substrate and method for producing a printing stencil
CN103192619B (en) A kind of printing process of solar battery sheet
CN206293270U (en) Two-side film membrane inductor
JP5256543B2 (en) Ceramic substrate for chip component and method for manufacturing chip component
TWI542022B (en) Solar Cell and Manufacturing Method of Back Contacts thereof
CN106847939B (en) Solar cell and screen printing plate for forming same
TW201935704A (en) Method for manufacturing a solar cell
CN213546327U (en) Screen printing plate for photovoltaic cell and photovoltaic cell
CN113442566A (en) Secondary printing screen structure and method for printing solar cell
WO2018061646A1 (en) Solar battery cell, solar battery module, and method for manufacturing solar battery cell
CN219903740U (en) Screen printing plate structure and printing equipment
CN216120315U (en) Back electrode structure and crystalline silicon solar cell
CN210429843U (en) Photovoltaic module
CN218069863U (en) Multi-main-gate electrode and solar cell
CN115132861B (en) Solar cell grid line structure, manufacturing method thereof and solar cell
CN203472267U (en) Screen plate structure
CN103192597A (en) Solar energy screen
KR101244787B1 (en) Process for Preparation of Solar Cell

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170905

Termination date: 20200827

CF01 Termination of patent right due to non-payment of annual fee