JP6127501B2 - Conveying device and control method thereof - Google Patents

Description

  The present invention relates to a transport technology for products and members in a manufacturing apparatus, and more particularly to a transport technology using vacuum suction.

  In manufacturing processes such as the electronics industry, it is important to increase the efficiency of production to carry parts and products quickly and accurately. In electronic products such as flat panel displays, semiconductor devices, and batteries manufactured in the electronic industry, precise circuits are often formed. In addition, slight contamination of these products can greatly affect product characteristics. Therefore, a transport device used in such a product manufacturing apparatus has a configuration for preventing a circuit or the like from being destroyed by an impact, static electricity, or the like, or a configuration for preventing the transport device from contacting a specific surface.

  In order to reduce the influence on the product, the conveyance device often has a mechanism that contacts only a part of the object such as the back surface of the object to be conveyed. At that time, the surface on which no circuit is formed, that is, the so-called back surface may be adsorbed by vacuum adsorption to be conveyed. As a technique for carrying by vacuum suction, for example, a technique as disclosed in Patent Document 1 is disclosed.

  Patent Document 1 relates to a substrate for a semiconductor device, that is, a wafer transfer apparatus. The transport apparatus of Patent Document 1 includes a transport hand that holds a wafer by suction and a processing stage that fixes the wafer by vacuum suction. In the transfer device of Patent Document 1, when the wafer is transferred from the transfer hand to the stage, the stage side vacuum suction is started when the transfer hand is lowered to a predetermined position. The completion of the delivery is determined as the completion of the suction on the stage side when the pressure on the stage side satisfies the standard. In Patent Document 1, by appropriately setting the start timing of vacuum suction on the stage side according to the position of the suction hand, it is possible to prevent changes in the atmosphere of the processing chamber due to emptying of the vacuum pump and dropping of the wafer during wafer delivery. I can do it.

  Patent Document 2 relates to an apparatus having a mechanism for delivering a flat object that is a disk for a storage device. Patent Document 2 discloses a technique for delivering a disk from the first suction chuck that sucks the disk to the second suction chuck. The suction force of the second suction chuck is made higher than that of the first suction chuck, the disk is sucked to the second suction chuck, and then the suction on the first suction chuck side is released to deliver the disk. Is called. In Japanese Patent Laid-Open No. 2004-260260, it is assumed that the disc is not displaced when the disc is delivered to the second suction chuck by delivering the disc.

JP-A-9-275129 JP 2006-134511 A

  However, the technique disclosed in Patent Document 1 has the following problems. In the transport apparatus of Patent Document 1, the suction pressure on the stage side is measured, and it is determined that the suction is completed when the pressure satisfies the standard. In the configuration of Patent Document 1, it is necessary to wait until the suction pressure on the stage side reaches a predetermined value, and the standby time may be long due to deterioration of a device that generates a vacuum environment. Also in Cited Document 2, the suction forces of the two suction chucks are managed separately, and the waiting time may become longer due to a decrease in one of the suction forces. Therefore, in both configurations of Patent Document 1 and Patent Document 2, it may occur that the time from the start to the completion of delivery becomes longer.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a transport device that can execute a transfer from the start to the completion in a short time while appropriately determining the completion of the transfer and maintaining the reliability by the reliable transfer.

  In order to solve the above-described problem, the transport apparatus of the present invention includes a first holding unit, a second holding unit, a measuring unit, and a determining unit. The first holding means and the second holding means hold the object by vacuum suction. The measuring means measures the adsorption force of the first holding means and the second holding means. The judging means has means for judging whether the difference in the amount of adsorption between the first holding means and the second holding means satisfies a predetermined standard. The determining means further includes means for determining whether the object has been delivered from one of the first holding means and the second holding means to the other. When the object held by one of the first holding means or the second holding means is transferred to the other, the predetermined means is determined when the determination means determines that the difference in adsorption force satisfies a predetermined standard. Operation is performed.

  In the method for controlling the transport apparatus according to the present invention, the first holding means vacuum-sucks the object, measures the suction force of the first holding means and the second holding means, and the first holding means and the first holding means It is determined whether the difference in the adsorption force of the two holding means satisfies a predetermined standard. A predetermined operation is performed when it is determined that the difference in the suction force satisfies the predetermined criterion.

  In the present invention, the suction force between the holding means holding the object and the delivery destination holding means is measured, and the completion of the delivery of the object is determined based on the difference between the suction forces of the two holding means. Yes. Since it is not necessary to wait until the respective adsorption forces of the two holding means reach a certain level, it is possible to determine the completion of delivery in a minimum time. As a result, the conveyance speed can be improved while the object is reliably conveyed by the determination of the completion of the delivery.

It is a figure which shows the outline | summary of a structure of the 1st Embodiment of this invention. It is the figure which showed the graphs, such as a measured value, in the 1st Embodiment of this invention. It is the figure which showed the graph of the measured value in a conventional apparatus. It is the figure which showed the graphs, such as a measured value, in the 1st Embodiment of this invention. It is the figure which showed the example when there exists a foreign material in the 1st Embodiment of this invention. It is the figure which showed the graphs, such as a measured value, in the 1st Embodiment of this invention. It is the figure which showed the graphs, such as a measured value, in the 1st Embodiment of this invention. It is the figure which showed the graphs, such as a measured value, in the 1st Embodiment of this invention. It is the figure which showed the graphs, such as a measured value, in the 1st Embodiment of this invention. It is a figure which shows the outline | summary of a structure of the 2nd Embodiment of this invention. It is a figure which shows the outline | summary of a structure of the 3rd Embodiment of this invention.

  A first embodiment of the present invention will be described in detail with reference to FIG. FIG. 1 shows an outline of the configuration of the transport apparatus of this embodiment. The transport apparatus of this embodiment includes an adsorption stage 11, a stage pressure sensor 12, a stage three-way valve 13, an adsorption hand 14, a hand pressure sensor 15, a hand three-way valve 16, an operating unit 17, and a vacuum pump 18. And a control unit 19. FIG. 1 illustrates a workpiece 100 that is an object to be transported in the transport apparatus of the present embodiment. The suction stage 11 to the stage three-way valve 13 and the stage three-way valve 13 to the vacuum pump 18 are connected by piping corresponding to the vacuum state. The suction hand 14 to the hand three-way valve 16 and the hand three-way valve 16 to the vacuum pump 18 are connected by piping corresponding to the vacuum state.

  The suction stage 11 has a function of vacuum-sucking a workpiece 100, which is a member or product of an object to be transported by the transport device of this embodiment, at a predetermined position so that the workpiece 100 is not displaced. The stage pressure sensor 12 has a function of measuring the pressure of the pipe connected to the adsorption stage 11 and outputting the measurement result to the control unit 19. In addition, the stage pressure sensor 12 may be provided with a function of displaying a pressure measurement value or the like, or a function of issuing an alarm when it is out of a predetermined set value range. The stage three-way valve 13 has a function of switching the piping path by controlling the valve in accordance with an instruction from the control unit 19. The stage three-way valve 13 switches the route of the piping from the adsorption stage 11 to a route on the vacuum pump 18 side or a route on the atmosphere release side.

  The suction hand 14 has a function of conveying the workpiece 100 by vacuum suction. The suction hand 14 can be moved in the vertical direction by the operating unit 17. Further, the suction hand 14 may be configured to be movable in the horizontal direction. The hand pressure sensor 15 has a function of measuring the pressure of the pipe connected to the suction hand 14 and outputting the measurement result to the control unit 19. In addition, the hand pressure sensor 15 may be provided with a function of displaying a pressure measurement value or the like, or a function of issuing an alarm when it is out of a predetermined set value range. The hand three-way valve 16 has a function of controlling the valve in accordance with an instruction from the control unit 19 and switching the piping path. The hand three-way valve 16 switches the route of the piping from the suction hand 14 to a route on the vacuum pump 18 side and a route on the atmosphere release side.

  The operating unit 17 includes an operating mechanism in the vertical direction, and has a function of moving the suction hand 14 in the vertical direction. Further, the operating unit 17 may be provided with an operating mechanism in the horizontal direction. The vacuum pump 18 has a function of drawing the air in the pipe to make the pipe in a vacuum state. A plurality of vacuum pumps 18 having different appropriate vacuum degrees are provided, and the pump may be switched to a pump suitable for the vacuum degree depending on the vacuum degree. Further, the vacuum pump 18 may be provided separately on the suction stage 11 side and the suction hand 14 side.

  The control unit 19 has a function of determining the suction state of the workpiece 100 based on the pressure measurement results sent from the stage pressure sensor 12 and the hand pressure sensor 15. Further, the control unit 19 has a function of determining whether or not the operation unit 17 needs to be operated based on the suction state of the workpiece 100 and sending an operation instruction to the operation unit 17.

  Next, the operation when the workpiece 100 sucked by the suction stage 11 is delivered to the suction hand 14 in the transport apparatus of this embodiment will be described.

  It is assumed that the workpiece 100 is in a state of being sucked and held by the suction stage 11. At this time, the stage three-way valve 13 is set to a path in which the suction stage 11 and the vacuum pump 18 are connected. The hand three-way valve 16 is a path on the atmosphere opening side, and the suction hand 14 is in a state of holding nothing.

  It is assumed that the processing and processing for the workpiece 100 on the suction stage 11 are finished, and the control unit 19 determines that the workpiece 100 needs to be transferred to the suction hand 14 for transporting the workpiece 100. The control unit 19 sends an instruction to lower the suction hand 14 to the operating unit 17. When the operation unit 17 receives an instruction to lower the suction hand 14, the operation unit 17 lowers the suction hand 14 toward the suction stage 11 and stops in a state where a predetermined load is applied to the workpiece 100 and the suction stage 11. When the lowering of the suction hand 14 is completed, the operating unit 17 sends information indicating that the lowering is completed to the control unit 19. When the control unit 19 receives information indicating that the descent has been completed, the control unit 19 sends an instruction to the hand three-way valve 16 to switch the piping path from the atmosphere release side to the vacuum pump 18 side. Further, the control unit 19 sends an instruction to switch the piping path from the vacuum pump 18 side to the atmosphere release side to the stage three-way valve 13. Further, when receiving a switching instruction from the control unit 19, the stage three-way valve 13 and the hand three-way valve 16 perform path switching according to the instruction. When the path of the hand three-way valve 16 is switched to the vacuum pump 18 side, the degree of vacuum gradually increases in the suction hand 14 and suction of the workpiece 100 is started. The control unit 19 obtains the difference in adsorption force from the pressures sent from the stage pressure sensor 12 and the hand pressure sensor 15. When the difference in the suction force satisfies a predetermined condition, the control unit 19 determines that the suction of the workpiece 100 to the suction hand 14 side is completed.

  When determining that the suction of the workpiece 100 by the suction hand 14 is completed, the control unit 19 sends an instruction to start the conveyance of the workpiece 100 to the operating unit 17. When the operation unit 17 receives an instruction to start conveying the workpiece 100, the operation unit 17 raises the suction hand 14. The workpiece 100 sucked by the suction hand 14 is delivered to another transport device, or is transported to the next step by moving the suction hand 14 in the horizontal direction by the operating unit 17.

  A predetermined condition for determining that the suction of the workpiece 100 to the suction hand 14 side is completed will be described. The pressure of the suction stage 11 measured by the stage pressure sensor 12 is P1, the suction area of the suction stage 11 is A1, the pressure of the suction hand 14 measured by the hand pressure sensor 15 is P2, and the suction area of the suction hand 14 is A2. Suppose there is. P1 and P2 are negative pressures, that is, P1 <0 and P2 <0. At this time, the suction force of the suction stage 11 can be expressed as P1 × A1, and the suction force of the suction hand 14 can be expressed as P2 × A2. Since P1 and P2 are negative pressures, the values of P1 × A1 and P2 × A2 become negative values, and the adsorption force becomes stronger as it becomes smaller. Further, when the mass of the workpiece 100 is m and the gravitational acceleration is g, the gravity applied to the workpiece 100 is m × g.

  The workpiece 100 can be transferred from the suction stage 11 to the suction hand 14 because the difference in suction force between the suction hand 14 and the suction stage 11 is not less than gravity m × g applied to the workpiece 100, and the suction force on the suction hand 14 side. This is when the absolute value of is large. That is, when the expression | P2 × A2 | − | P1 × A1 |> m × g holds. The controller 19 monitors the value of | P2 × A2 | − | P1 × A1 | from P1 sent from the stage pressure sensor 12 and P2 sent from the hand pressure sensor 15, and becomes larger than m × g. It is determined that a predetermined condition is satisfied. In the present embodiment, A1 and A2 are stored in advance in the control unit 19 based on the device design.

  FIG. 2 is a graph showing the difference between the suction force and the suction force of the suction stage 11 and the suction hand 14. The upper part of FIG. 2 is a graph showing the suction force of the suction stage 11 and the suction hand 14 on the vertical axis and the horizontal axis on time. Since the suction stage 11 and the suction hand 14 have negative pressure when the workpiece 100 is being sucked, the lower side of the graph in the upper part of FIG. Further, the lower part of FIG. 2 is a graph in which the vertical axis represents the difference in suction force between the suction stage 11 and the suction hand 14 and the horizontal axis represents time. As shown in FIG. 2, when the delivery is started, the hand suction force that is the suction force on the suction hand 14 side is strengthened, and the stage suction force on the suction stage 15 side is gradually weakened. When the difference in suction force between the suction stage 11 side and the suction hand 14 side becomes m × g, it is determined that the delivery is completed. Further, the period from the start of delivery to the judgment of delivery completion is a delivery waiting time that requires waiting without going to the next step.

  The predetermined condition may be set as | P2 × A2 | − | P1 × A1 |> m × g + Moff by adding gravity Moff corresponding to a predetermined offset in consideration of variation in gravity applied to the workpiece. When the mass of the workpiece 100 or the gravity applied to the workpiece 100 is small enough to be ignored, it can be approximated as m × g = 0.

  In the present embodiment, the completion of the suction is determined from the difference in suction force between the suction stage 11 and the suction hand 14. Here, a description will be given of a case where the conditions such as the suction pressure are set separately for the suction stage 11 and the suction hand 14 and the completion of the suction of the workpiece 100 is determined when both satisfy the conditions. When the suction stage 11 and the suction hand 14 are set separately, it is assumed that the reference at the stage pressure sensor 12 is set to a pressure P10 or higher and the reference at the hand pressure sensor 15 is set to a pressure P20 or lower. At this time, the condition for determining the completion of the suction is set when the pressure at the stage pressure sensor 12 satisfies P10 or more, and the condition of the suction hand 14 is set when the pressure at the hand pressure sensor 15 satisfies both P20 or less. Further, P10 and P20 are set so as to satisfy | P20 × A2 | − | P10 × A1 |> m × g. The time from when the control unit 19 determines the start of delivery and sends a path switching instruction to the stage three-way valve 13 until the pressure of the stage pressure sensor 12 becomes equal to or higher than P10 is defined as t1. Further, the time from when the control unit 19 determines the start of delivery and sends a path switching instruction to the hand three-way valve 16 until the pressure of the hand pressure sensor 15 becomes equal to or lower than P20 is t2. In FIG. 3, when the conditions are set separately for the adsorption stage 11 and the adsorption band 14, the adsorption pressure of the adsorption stage 11 and the adsorption band 14 is the vertical axis, the vertical axis is the pressure value, and the horizontal axis is the time. The graph is shown. At this time, the time until the control unit 19 determines that the suction of the workpiece 100 is completed, that is, the delivery waiting time is the longer of t1 and t2.

  In the present embodiment, the time from when the control unit 19 sends a workpiece transfer instruction to when it is determined that the workpiece has been transferred is tf. When conditions are separately set for the suction stage 11 and the suction hand 14 and the determination is made, it is possible that the conditions of P1 is equal to or greater than P10 and P2 is equal to or less than P20 in the same time as the present embodiment. However, it is difficult to strictly control the air release speed and the pressure reduction speed of the vacuum pump 18. Therefore, even if P1 satisfies the condition of P10 or more or P2 satisfies P20 or less, one of them needs to wait until both times are satisfied and the delivery determination is completed. In addition, in order to make a reliable delivery determination, it may be necessary to allow both P10 and P20. In the state where either one is waiting, the longer one of t1 or t2 is longer than tf. Therefore, it is not shorter than the present embodiment, and the present embodiment can determine the completion of delivery in a shorter time.

  Next, an operation when the workpiece 100 is delivered from the suction hand 14 to the suction stage 11 will be described. Assume that the suction hand 14 holds the workpiece 100. When the control unit 19 determines the start of delivery of the workpiece 100 from the suction hand 14 to the suction stage 11, the control unit 19 sends an instruction to lower the suction hand 14 to the operating unit 17. When the operation unit 17 receives an instruction to lower the suction hand 14, the operation unit 17 lowers the suction hand 14. The operating unit 17 lowers the suction hand 14, the work 100 sucked and held by the suction hand 14 comes into contact with the suction stage 11, and stops the suction hand 14 at a position where a predetermined load is applied. When the lowering of the suction hand 14 is completed, the operating unit 17 sends information indicating the completion of the lowering to the control unit 19. When the control unit 19 receives information that the lowering of the suction hand 14 is completed, the control unit 19 sends an instruction to the stage three-way valve 13 to switch the path from the atmosphere release side to the vacuum pump 18 side. In addition, the control unit 19 sends an instruction to switch the path from the vacuum pump 18 side to the atmosphere release side to the hand three-way valve 16. When the stage three-way valve 13 and the hand three-way valve 16 receive a switching instruction from the control unit 19, respectively, the path is switched according to the instruction.

  When the stage three-way valve 13 is switched to the path from the atmosphere opening side to the vacuum pump 18 side, the suction of the workpiece 100 on the suction stage 11 is started. In the hand three-way valve 16, when the path from the vacuum pump 18 side to the atmosphere release side is switched, the suction pressure of the workpiece 100 of the suction hand 14 gradually decreases. The control unit 19 monitors the difference in suction force obtained from the measured pressure values sent from the stage pressure sensor 12 and the hand pressure sensor 15 and determines whether or not the suction of the workpiece 100 to the suction stage 11 side is completed. . The control unit 19 determines that the suction of the workpiece 100 to the suction stage 11 side is completed when the difference between the absolute values of the suction force of the suction hand 14 and the suction force of the suction stage 11 becomes smaller than m × g. To do. That is, the control unit 19 determines that the suction of the workpiece 100 to the suction stage 11 side is completed when | P2 × A2 | − | P1 × A1 | <m × g is satisfied. When the control unit 19 determines that the suction of the workpiece 100 to the suction stage 11 side is completed, the control unit 19 sends an instruction to raise the suction hand 14 to the operating unit 17. When the operation unit 17 receives an instruction to raise the suction hand 14, the operation unit 17 raises the suction hand 14. When the lifting of the suction hand 14 is completed, the operating unit 17 sends information indicating that the suction hand 14 has been lifted to the control unit 19. When the control unit 19 receives the information that the lifting of the suction hand 14 is completed, the control unit 19 determines that the transfer operation of the workpiece 100 is completed. When the control unit 19 determines that the delivery of the workpiece 100 has been completed, processing or processing on the workpiece 100 on the suction stage 11 is started.

  FIG. 4 shows changes in suction force when the workpiece 100 is transferred from the suction hand 14 to the suction stage 11. The upper part of FIG. 4 is a graph in which the vertical axis represents the stage suction force that is the suction force of the suction stage 11 and the hand suction force that is the suction force of the suction hand 14, and the time is the horizontal axis. The lower part of FIG. 4 is a graph showing the difference in suction force between the suction stage 11 and the suction hand 14. When the stage suction force gradually increases from the start of delivery and the hand suction force gradually decreases, and the difference between the suction forces becomes m × g, a delivery completion determination is made. Also, the time from the start of delivery until the completion of delivery becomes the delivery waiting time for waiting without being able to proceed to the next step.

  In this embodiment, when the suction area A1 of the suction stage 11 and the suction area A2 of the suction hand 14 are equal, it is assumed that A = A1 = A2. At this time, the condition for completing the delivery from the suction stage 11 to the suction hand 14 can be | P2 | − | P1 |> m × g / A. The condition for completing the delivery from the suction hand 14 to the suction stage 11 can be | P2 | − | P1 | <m × g / A. Since m × g / A is a constant when the gravity m × g applied to the workpiece is constant, assuming that Pc = m × g / A, | P2 | − | P1 | <Pc. At this time, since the multiplication is not necessary in the calculation of the transfer determination, the determination becomes faster. Further, the control unit 19 can be configured not to include a multiplier, and the apparatus can be miniaturized.

  In the transport device of the present embodiment, whether or not the delivery of the workpiece 100 has been completed can be determined even when a foreign object is caught between the suction stage 11 or the suction hand 14 and the workpiece 100. FIG. 5 shows an example of a part of the transport device when the foreign object 101 is sandwiched between the workpiece 100 and the suction hand 14 in this embodiment. FIG. 6 shows the suction force and the suction force difference when the workpiece 100 is transferred from the suction stage 11 to the suction hand 14 with and without the foreign matter 101. When the foreign matter 101 is present, the suction force of the suction hand 14, which is the suction force of the suction hand 14, becomes slower compared to the case where there is no foreign matter 101, but the suction is completed when the difference in suction force becomes m × g. Judgment can be made. FIG. 7 shows the suction force and the suction force difference when the workpiece 100 is transferred from the suction hand 14 to the suction stage 11 with and without the foreign matter 101. Even when the workpiece 100 is transferred from the suction hand 14 to the suction stage 11, if there is a foreign object 101, the time until the transfer completion determination becomes longer, but the completion determination is made when the difference in the suction force becomes m × g. It can be carried out.

  In the case where conditions are separately set for the measurement results on the suction stage 11 side and the suction hand 14 side and the completion is determined based on whether each measurement value satisfies the condition, the suction hand 14 is caught when a foreign object is caught. There is a possibility that the waiting time becomes longer without satisfying the conditions of the side. In this embodiment, since the determination is based on the difference in suction pressure between the suction stage 11 and the suction hand 14, even if the change in the suction force of one is slow, the difference in the suction force satisfies a predetermined condition due to the change in the other suction force. If it is satisfied, it can be determined that the adsorption is completed. Therefore, in the present embodiment in which the determination of the completion of delivery is made based on the difference in adsorption force, it is possible to carry out the transport more reliably than in the case where the determination is made based on the measurement value by setting the conditions separately. In the present embodiment, it is also possible to use a configuration that issues an alarm when a condition is not satisfied within a predetermined time. The example in the case where the foreign object 101 is sandwiched between the workpiece 100 and the suction hand 14 has been described above, but even when the foreign object 101 is sandwiched between the workpiece 100 and the suction stage 11, the determination of the completion of the delivery of the workpiece 100 is similarly performed from the difference in the suction force. It can be carried out.

  Not only when the foreign object 101 is caught between the workpiece 100 but also when the capacity of the vacuum pump 18 is reduced, the completion of the delivery of the workpiece 100 can be determined by the same method. FIG. 8 is a graph showing the suction force and the suction force difference when the workpiece 100 is transferred from the suction stage 11 to the suction hand 14 when the vacuum pump 18 is abnormal and when it is normal. FIG. 9 is a graph showing the suction force and the suction force difference when the work 100 is transferred from the suction hand 14 to the suction stage 11 when the vacuum pump 18 is abnormal and when it is normal. In either case, the waiting time is longer when the vacuum pump 18 is abnormal than when the vacuum pump 18 is normal, but the suction is completed when the difference in the absolute value of the suction force is larger or smaller than m × g. It can be judged. The capacity of the vacuum pump 18 gradually decreases with the passage of time of use, and is often used while periodically overhauling to restore performance. By using the method for determining the completion of delivery of the workpiece 100 in the present embodiment, it is possible to determine the completion of delivery of the workpiece 100 in a short time even when overhaul is approaching.

  In the transport device of this embodiment, the completion of the delivery of the object is determined based on the difference in suction force obtained from the pressure measurement indicating the degree of vacuum between the suction hand and the suction stage. Since it is not necessary to wait until the respective suction forces of the suction hand and the suction stage reach a certain level, the completion of delivery can be determined in a minimum time. Moreover, since it can be used also when adsorption | suction capability changes by presence of a foreign material or the capability fall of a vacuum pump, a target object can be conveyed stably.

  A second embodiment of the present invention will be described in detail with reference to FIG. FIG. 10 shows an outline of the configuration of the transport apparatus of this embodiment. In the first embodiment, the controller calculates the difference in suction force from the measured pressure values at the suction stage and the suction hand, and determines whether or not the delivery has been completed. However, in this embodiment, the difference between the suction stage and the suction hand is determined. A determination is made based on the differential pressure.

  The transport apparatus of the present embodiment includes an adsorption stage 31, a stage three-way valve 32, an adsorption hand 33, a hand three-way valve 34, a differential pressure sensor 35, an operating unit 36, a vacuum pump 37, and a control unit 38. It has. The suction stage 31 to the stage three-way valve 32 and the stage three-way valve 32 to the vacuum pump 37 are connected by piping corresponding to the vacuum state. Further, the suction hand 33 to the stage three-way valve 34 and the stage three-way valve 34 to the vacuum pump 37 are connected by piping corresponding to the vacuum state. FIG. 10 illustrates a workpiece 100 that is an object to be conveyed.

  The suction stage 31, the stage three-way valve 32, the suction hand 33, the hand three-way valve 34, the operating unit 36, and the vacuum pump 37 according to the present embodiment have the same configuration and function as the parts having the same names in the first embodiment. Yes. The differential pressure sensor 35 has a function of measuring a pressure difference between the suction stage 31 and the suction hand 33 and outputting a measurement value. As the differential pressure sensor 35, for example, a sensor having two pressure measuring units and outputting a pressure difference obtained by each pressure measuring unit can be used. Further, as the differential pressure sensor 35, a system is used in which two spaces for measuring a pressure difference are partitioned by a single crystal silicon diaphragm or the like, and a pressure difference is obtained from a change in capacitance between the electrode and the single crystal silicon diaphragm or the like that is distorted by the pressure difference. Can also be used. The method for obtaining the differential pressure may be a method in which a pressure sensor is installed in the vicinity of the suction stage 31 and the suction hand 33, and measurement results output from the pressure sensor are collected at other locations to obtain and output the differential pressure. Good. When the pressure of the suction stage 31 is P1 and the pressure of the suction hand 33 is P2, the pressure difference between the suction stage 31 and the suction hand 33, that is, the differential pressure Pd is Pd = | P2 | − | P1 |. The control unit 38 has a function of controlling the entire transport device. Further, the control unit 38 has a function of determining the suction state of the workpiece 100 based on the data of the measured differential pressure value sent from the differential pressure sensor 35.

  Next, an operation when the workpiece 100 sucked by the suction stage 31 is delivered to the suction hand 33 in the transport apparatus of the present embodiment will be described. It is assumed that the workpiece 100 is sucked and held by the suction stage 31. At this time, the stage three-way valve 32 is set to a path in which the suction stage 31 and the vacuum pump 37 are connected. The hand three-way valve 34 is a path on the atmosphere opening side, and the suction hand 33 is in a state of holding nothing.

  It is assumed that the processing and processing on the workpiece 100 on the suction stage 31 are finished, and the control unit 38 determines that the workpiece 100 needs to be transferred to the suction hand 33 in order to transport the workpiece 100. The control unit 38 sends an instruction to lower the suction hand 33 to the operating unit 36. When the operation unit 36 receives an instruction to lower the suction hand 33, the operation unit 36 lowers the suction hand 33 toward the suction stage 31 and stops in a state where a predetermined load is applied to the workpiece 100 and the suction stage 31. When the descent of the suction hand 33 is completed, the operating unit 36 sends information indicating that the descent has been completed to the control unit 38. Upon receiving information indicating that the descent has been completed, the control unit 38 sends an instruction to switch the path from the vacuum pump 37 side to the atmosphere release side to the stage three-way valve 32. Further, the control unit 38 sends an instruction to switch the path from the atmosphere release side to the vacuum pump 37 side to the hand three-way valve 34. When receiving a switching instruction from the control unit 38, the stage three-way valve 32 and the hand three-way valve 34 perform path switching according to the instruction. When the path of the hand three-way valve 34 is switched to the vacuum pump 37 side, the degree of vacuum gradually increases in the suction hand 33 and suction of the workpiece 100 is started. The differential pressure sensor 35 measures the pressure of the suction stage 31 and the suction hand 33 as a differential pressure and outputs it to the control unit 38. When the value of the differential pressure sent from the differential pressure sensor 35 becomes a predetermined value or more, the control unit 38 determines that the delivery has been completed to the suction hand 33 of the workpiece 100.

  When the controller 38 determines that the suction of the workpiece 100 to the suction hand 33 is completed and the delivery is completed, the control unit 38 sends an instruction to raise the suction hand 33 to the operating unit 36. When the operation unit 36 receives an instruction to raise the suction hand 33, the operation unit 36 raises the suction hand 33 to a predetermined height. The workpiece 100 sucked by the suction hand 33 is moved to the next process by the suction hand 33 moving in the horizontal direction by the operating unit 36, or is transferred to another transport device and then transferred to the next process. Be transported.

  Next, an operation when the workpiece 100 sucked by the suction hand 33 is delivered to the suction stage 31 in the transport apparatus of the present embodiment will be described. It is assumed that the workpiece 100 is sucked and held by the suction hand 33. At this time, the hand three-way valve 34 is set to a path in which the suction hand 33 and the vacuum pump 37 are connected. Further, the stage three-way valve 32 is a path on the atmosphere opening side, and the adsorption stage 31 is in a state of holding nothing.

  Assume that the control unit 38 determines that the workpiece 100 needs to be delivered to the suction stage 31. The control unit 38 sends an instruction to lower the suction hand 33 to the operating unit 36. When the operation unit 36 receives an instruction to lower the suction hand 33, the operation unit 36 lowers the suction hand 33 toward the suction stage 31 and stops in a state where a predetermined load is applied to the workpiece 100 and the suction stage 31. When the descent of the suction hand 33 is completed, the operating unit 36 sends information indicating that the descent has been completed to the control unit 38.

  When the control unit 38 receives information indicating that the descent has been completed, the control unit 38 sends an instruction to switch the path from the vacuum pump 37 side to the atmosphere release side to the hand three-way valve 34. Further, the control unit 38 sends an instruction to switch the path from the atmosphere release side to the vacuum pump 37 side to the stage three-way valve 32. When receiving a switching instruction from the control unit 38, the stage three-way valve 32 and the hand three-way valve 34 perform path switching according to the instruction. When the path of the stage three-way valve 32 is switched to the vacuum pump 37 side, the degree of vacuum gradually increases in the suction stage 31, and the suction of the workpiece 100 is started. The differential pressure sensor 35 measures the pressure of the suction stage 31 and the suction hand 33 as a differential pressure and outputs it to the control unit 38. The control unit 38 determines that the delivery of the workpiece 100 to the suction stage 31 is completed when the value of the differential pressure sent from the differential pressure sensor 35 becomes equal to or greater than a predetermined value.

  When the control unit 38 determines that the suction of the workpiece 100 to the suction stage 31 is completed and the delivery is completed, the control unit 38 sends an instruction to raise the suction hand 33 to the operating unit 36. When the operation unit 36 receives an instruction to raise the suction hand 33, the operation unit 36 raises the suction hand 33 to a predetermined height. The transfer operation of the workpiece 100 from the suction hand 33 to the suction stage 31 is thus completed. After the delivery operation, the workpiece 100 fixed to the suction stage 31 is processed or processed. Similarly to the first embodiment, even when foreign matter is present or when the capacity of the vacuum pump 37 is reduced, it is possible to determine the completion of delivery by determining from the differential pressure.

  In the transport apparatus of this embodiment, the difference in the degree of vacuum between the suction hand and the suction stage is measured, and the completion of the delivery of the object is determined based on the measurement result. By determining the difference in the suction force using the difference in the degree of vacuum, an arithmetic element for obtaining the suction force and calculating the difference becomes unnecessary. Therefore, the configuration of the apparatus is compared with the transport device of the first embodiment. It can be simplified. Further, as in the first embodiment, since it is not necessary to wait until the respective suction forces of the suction hand and the suction stage reach a certain level, it is possible to determine the completion of delivery in a minimum time. Since it can be used even when the adsorption capacity is changed due to the presence of foreign matter or a decrease in the capacity of the vacuum pump, the object can be transported stably.

  In the first and second embodiments, the suction stage and the suction hand are shown as being held horizontally by the workpiece that is the object to be transported. However, the workpiece may be installed in a direction that holds the workpiece vertically or obliquely. . For example, the suction stage and the suction hand can be installed in a direction parallel to the vertical direction. In this case, the delivery completion is determined when the suction force on the delivery side is greater than the gravity applied to the workpiece than the suction force on the delivery side. Further, the suction stage and the suction hand may be installed so that the workpiece faces in an oblique direction.

  In the first and second embodiments, a time from the start of delivery to completion can be measured, and a warning can be issued when the delivery is not completed within a predetermined time. In this case, if the time gradually increases, it is determined that the capacity is reduced due to continued use of the vacuum pump. If the time is suddenly increased, the possibility of abnormality such as a vacuum pump or the presence of foreign matter can be predicted. It becomes possible.

  A third embodiment of the present invention will be described in detail with reference to FIG. FIG. 11 shows an outline of the configuration of the transport apparatus of this embodiment. The transport apparatus of the present embodiment includes a first holding unit 41, a second holding unit 42, a measuring unit 43, and a determining unit 44. The first holding means 41 and the second holding means 42 hold the object by vacuum suction. The measuring means 43 measures the adsorption force of the first holding means 41 and the second holding means 42. The determination means 44 has means for determining whether the difference in the amount of adsorption between the first holding means 41 and the second holding means 42 satisfies a predetermined standard. The determination unit 44 further includes a unit that determines whether an object has been delivered from one of the first holding unit 41 and the second holding unit 42 to the other. When the object held by one of the first holding means 41 or the second holding means 42 is transferred to the other, and the determination means 44 determines that the difference in the suction force satisfies a predetermined standard A predetermined operation is performed.

  In the transport device of this embodiment, the suction force between the holding means holding the object and the delivery destination holding means is measured, and the delivery of the object is completed based on the difference in the suction force between the two holding means. Deciding. Since it is not necessary to wait until the respective adsorption forces of the two holding means reach a certain level, it is possible to determine the completion of delivery in a minimum time. As a result, the conveyance speed can be improved while the object is reliably conveyed by the determination of the completion of the delivery.

  A part or all of the above-described embodiment can be described as in the following supplementary notes, but is not limited thereto.

  [Appendix 1] First holding means and second holding means for holding an object by vacuum suction, measuring means for measuring the suction force of the first holding means and the second holding means, and the first A means for judging whether a difference in the attraction force between the first holding means and the second holding means satisfies a predetermined standard, and from the first holding means or the second holding means to the other; A determination means having a means for determining whether or not the object has been delivered, and when the object held by one of the first holding means or the second holding means is delivered to the other The determination unit performs a predetermined operation when it is determined that the difference in the adsorption force satisfies the predetermined criterion.

[Appendix 2]
The first holding means and the second holding means are each provided with the measuring means, and the judging means is the suction force measured by the measuring means of the first holding means and the second holding means. The transfer apparatus according to appendix 1, wherein whether or not the predetermined criterion is satisfied is determined based on a difference from the suction force measured by the measuring unit.

  [Supplementary Note 3] The first holding means has a structure for holding the object downward when the object is delivered, and the second holding means holds the object in the second holding state. 3. The transport apparatus according to either one of appendix 1 or 2, wherein the transport apparatus is configured to be held above the means.

  [Supplementary Note 4] In the case where the object held by the first holding means is transferred to the second holding means, the predetermined reference is determined based on an adsorption force of the first holding means. The transport apparatus according to appendix 3, characterized in that it includes, as a condition, that a difference in absolute value when the suction force of the holding means is pulled is smaller than gravity applied to the object.

  [Supplementary Note 5] In the case where the object held by the second holding unit is delivered to the first holding unit, the predetermined reference is determined based on an adsorption force of the first holding unit. The transport apparatus according to any one of appendix 3 or 4, characterized in that it includes a condition that a difference in absolute value when the suction force of the holding means is pulled is larger than gravity applied to the object.

  [Appendix 6] The conveying apparatus according to any one of appendices 1 to 6, wherein the adsorption force is based on a value obtained by measuring the degree of vacuum as a pressure.

  [Appendix 7] The suction force is measured as a degree of vacuum, and the judging means compares the degree of vacuum of the first holding means with the degree of vacuum of the second holding means in the previous period. The transfer apparatus according to any one of appendices 1 to 3, wherein a determination is made as to whether the difference in pressure satisfies the predetermined criterion.

  [Supplementary Note 8] The measuring means is a means for measuring the difference in vacuum between the first holding means and the second holding means as the adsorption force, and the determination means determines the difference in vacuum degree as the adsorption force. The transfer apparatus according to Supplementary Note 1, wherein the transfer apparatus is used as a difference between the two.

  [Appendix 9] Any one of appendices 1 to 8, further comprising means for issuing an alarm when it is not determined that the standard is satisfied within a predetermined time from the start of delivery of the object. The conveying apparatus as described in.

  [Supplementary Note 10] The first holding means vacuum-sucks the object, measures the suction force of the first holding means and the second holding means, and determines the first holding means and the second holding means of the previous period. It is determined whether the difference in the adsorption force satisfies a predetermined criterion, and when it is determined that the difference in the adsorption force satisfies the predetermined criterion, the target is transferred from the first holding unit to the second holding unit. A method for controlling a conveying apparatus, wherein an object is delivered.

  [Supplementary Note 11] The suction force is measured by the first holding means and the second holding means, respectively, and the suction force of the first holding means and the suction force of the second holding means are measured. 11. The method for controlling a transport apparatus according to appendix 10, wherein it is determined whether or not the predetermined criterion is satisfied based on a difference between the transport apparatus and the apparatus.

  [Supplementary Note 12] The first holding means holds the object below the first holding means, and subtracts the adsorption force of the second holding means from the adsorption force of the first holding means. A determination is made as to whether or not the predetermined criterion is satisfied, including a condition that a difference in time is smaller than gravity applied to the object, and the object is held in the second holding state when it is determined that the predetermined criterion is satisfied. 12. The method for controlling a conveying apparatus according to any one of appendix 10 or 11, wherein the method is held above the means and transferred to the second holding means.

  [Appendix 13] The second holding means holds the object above the second holding means, and subtracts the suction force of the second holding means from the suction force of the first holding means. A determination is made as to whether or not the predetermined criterion is satisfied on condition that the difference in time is greater than the gravity applied to the object, and the object is held in the first holding state when it is determined that the predetermined criterion is satisfied. The method for controlling a transport apparatus according to any one of appendix 10 or 11, wherein the transport apparatus is held below the means and delivered to the first holding means.

  [Supplementary Note 14] An alarm is issued when it is not determined that the predetermined standard is satisfied within a predetermined time from the start of delivery of the object from the first holding unit to the second holding unit. 14. The method for controlling a transport apparatus according to any one of appendices 10 to 13, wherein the control method is performed.

  INDUSTRIAL APPLICABILITY The present invention can be used for a transport mechanism in a transport device, a transport device between transport devices, and the like in the fields of electronic equipment manufacture and machine manufacture.

DESCRIPTION OF SYMBOLS 11 Adsorption stage 12 Stage pressure sensor 13 Stage three-way valve 14 Adsorption hand 15 Hand pressure sensor 16 Hand three-way valve 17 Operating part 18 Vacuum pump 19 Control part 31 Adsorption stage 32 Stage three-way valve 33 Adsorption hand 34 Hand three-way valve 35 Differential pressure sensor 36 Operating section 37 Vacuum pump 38 Control section 41 First holding means 42 Second holding means 43 Measuring means 44 Judging means 100 Workpiece 101 Foreign matter

Claims (10)

First holding means and second holding means for holding an object by vacuum suction;
Measuring means for measuring a first adsorption force for adsorbing the object by the first holding means and a second adsorption force for adsorbing the object by the second holding means;
When the difference between the first suction force and the second suction force is smaller than a predetermined reference, prior SL or the object from one another to one of the first holding means or said second holding means and a judgment means you judged to have been passed,
The transport device according to claim 1, wherein the first holding unit performs a predetermined operation when the determination unit determines that the object has been delivered. The first holding means and the second holding means each include the measuring means,
Wherein said determining means based on a difference between the second suction force which the measuring means measures the first suction force and the second holding means the measuring means measures the first holding means The conveyance device according to claim 1, wherein it is determined whether a predetermined criterion is satisfied. It said first holding means is a structure that holds the lower the object upon the transfer of the object,
3. The transport apparatus according to claim 1, wherein the second holding unit has a structure that holds the object above the second holding unit. 4. When the object held by the first holding means is delivered to the second holding means,
It said predetermined criterion, claim 3, characterized in that it comprises the difference between the absolute value of the time obtained by subtracting the second suction force application from the first adsorption force is smaller than the gravity applied to the object as a condition The conveying apparatus as described in. In the case where the object held by the second holding means is transferred to the first holding means,
It said predetermined criterion, claim 3, characterized in that it comprises that the difference in absolute value when the first suction force minus the second intake force application is greater than the gravitational force exerted on the object on condition The conveying apparatus as described in. The measuring means is a means for measuring a difference in vacuum between the first holding means and the second holding means as a difference between the first suction force and the second suction force ;
The transport apparatus according to claim 1, wherein the determination unit uses the difference in the degree of vacuum as a difference between the first suction force and the second suction force. When transferring the object held by vacuum suction from one of the first holding means or the second holding means to the other,
Said first holding means and said second holding means is a vacuum adsorbing the object,
The first holding means measures the first suction force for sucking the object and the second holding means for measuring the second suction force for sucking the object ;
When the difference between the first suction force and the second suction force satisfies a predetermined standard, the object moves from either the first holding means or the second holding means to the other. A method for controlling a transporting apparatus, wherein it is determined that the delivery has been performed and a predetermined operation is performed. To measure the difference between the second suction force of said first suction force and the second holding means of said first holding means,
The method of conveying apparatus according to claim 7, wherein the measured first suction force application on the basis of the difference between the second suction force application and performs determination of whether to satisfy the predetermined criterion. The first holding means holds the object below the first holding means;
A determination is made as to whether or not the predetermined criterion is satisfied, provided that a difference in absolute value when the second attraction force is subtracted from the first attraction force is smaller than gravity applied to the object;
When it is determined that the predetermined standard is satisfied,
The method of controlling a transfer apparatus according to claim 7 or 8, wherein the object is held above the second holding means and transferred to the second holding means. The second holding means holds the object above the second holding means;
A determination is made as to whether or not the predetermined criterion is satisfied including a condition that a difference in absolute value when the second attractive force is subtracted from the first attractive force is greater than a gravity applied to the object;
When it is determined that the predetermined standard is satisfied,
The method of conveying apparatus according to claim 7 or 8, wherein the object is delivered to the first holding means is held on the lower side of the first holding means.