JP6126442B2 - Component mounting equipment - Google Patents

Description

  The present invention relates to a processing head for processing a substrate and a processing apparatus using the processing head. The present invention relates to a component mounting apparatus that adsorbs an electronic component and mounts the electronic component on a substrate, for example.

  Currently, the work of mounting electronic components on boards of various electrical products is automated, and a component mounting apparatus is used at that time. Electronic components to be mounted on a board are becoming smaller and smaller year by year. Patent Documents 1 to 4 are listed as prior art.

JP 2010-50197 A JP 09-267224 A JP 2010-28032 A JP-T-2004-342710

  The miniaturization of electronic components is expected to continue in the future, and further high-speed and high-precision mounting is required for component mounting apparatuses. In order to realize high-speed and high-precision mounting, high-speed operation is required for the operation axis of the nozzle that holds the component.

  It has been found in the present invention that for high speed operation, it is desirable for the nozzle to change position relative to the substrate and be able to rotate in situ without substantially changing position. The prior art does not give sufficient consideration to this point.

  The present invention includes a nozzle for mounting a component on a substrate, a first gear formed on the nozzle, a first motor unit for changing the position of the nozzle, and a second gear, One feature is that it has a second motor unit for rotating the nozzle and a third gear for propagating the rotation of the second motor unit to the first gear.

  According to the present invention, it is possible to improve at least one of mounting accuracy and mounting speed.

1 is a top view of an entire component mounting apparatus according to a first embodiment. FIG. 2 is an arrow view when the component mounting apparatus in FIG. 1 is observed from an arrow 130 in FIG. 1. FIG. 3 is a diagram illustrating a first configuration of a head actuator 113. The figure explaining the up-and-down operation | movement of the nozzle shaft 311. FIG. The figure explaining the nozzle selection operation | movement of the head actuator 113. FIG. The figure explaining rotation operation of the nozzle shaft 311. Explanatory drawing which looked at the nozzle rotation motor 316 from the lower surface. The figure explaining the movement path | route of the head actuator 113. FIG. The figure explaining the 2nd structure of the head actuator 113. FIG. The figure explaining in detail the nozzle 317 of a 1st structure and the nozzle 908 of a 2nd structure. The figure explaining the up-and-down operation | movement of the nozzle shaft 908 in the 2nd structure of the head actuator 113. FIG. The figure explaining nozzle selection operation in the 2nd composition of head actuator 113. The figure explaining rotation operation of nozzle shaft 908 in the 2nd composition of head actuator 113. The figure explaining nozzle rotation operation | movement of the nozzle shaft 908 in the 2nd structure of the head actuator 113. FIG. Explanatory drawing which looked at the nozzle rotation motor 913 from the lower surface. The figure explaining a movement path | route in the 2nd structure of the head actuator 113. FIG. FIG. 6 is a diagram illustrating a second embodiment. FIG. 6 is a diagram illustrating Example 3;

  Hereinafter, embodiments will be described with reference to the drawings.

  FIG. 1 is a top view of the entire component mounting apparatus according to the first embodiment. The substrate 123 is transported to the electronic component mounting position by the substrate guide 191 from the left side of the drawing.

  A first Y beam 101, a second Y beam 102, and a third Y beam 180 are arranged in a direction orthogonal to the substrate transport direction. In the third Y beam 180, a guide 181 for defining the traveling direction of X beams 103 and 105, which will be described later, and a guide 182 for defining the traveling direction of the X beams 104 and 106 are arranged.

  The X beams 103 and 105 are moved by the first Y beam 101 and the third Y beam 180. The X beams 104 and 06 are moved by the second Y beam 102 and the third Y beam 180. More specifically, the X beams 103, 104, 105, 106 are made to move in the substrate transport direction by actuators 107, 108 such as linear motors arranged in the first Y beam 101 and the second 102, respectively. Therefore, it moves in the substantially orthogonal direction.

  Actuators 109, 110, 111, and 112 such as linear motors are disposed on the X beams 103, 104, 105, and 106, respectively. The actuators 109, 110, 111, and 112 are respectively provided with head actuators 113, 114, 115, and 116 for mounting electronic components on the substrate 123. Here, the actuators 109, 110, 111, and 112 can be configured to be inexpensive and lightweight by using a mechanism such as a ball screw instead of a linear motor.

  The head actuators 113, 114, 115, and 116 are substantially orthogonal to the Y beams 101 and 102 (substantially horizontal to the substrate transport direction) by the actuators 109, 110, 111, and 112, respectively. Driven.

  Component supply devices 151, 152, 153, and 154 that supply electronic components to the head actuators 113, 114, 115, and 116 are disposed at both ends of the first Y beam 101 and the second Y beam 102. The head actuator 113 supplies electronic components from the component supply device 151. The head actuator 114 supplies electronic components from the component supply device 153. The head actuator 115 replenishes electronic components from the component supply device 152. The head actuator 116 replenishes electronic components from the component supply device 154.

  For example, when there is no electronic component to be mounted on the head actuator 113, the X beam 103 is moved to the front (or above) the component supply device 151 by the actuator 107, and the head actuator 113 attracts the electronic component to the nozzle. Become. This replenishment operation is the same for the head actuators 114, 115, and 116. In the component mounting apparatus, cameras 117, 118, 119, and 120 for confirming the postures of the electronic components sucked by the nozzles are disposed between the component supply devices 151, 152, 153, and 154 and the substrate 123. The postures of the supplied electronic components are confirmed by the cameras 117, 118, 119, and 120, respectively.

  If tilt is detected in the posture, the head actuators 113, 114, 115, 116 adjust the tilt of the electronic component.

  At this camera position, each of the head actuators 113, 114, 115, 116 is imaged by the cameras 117, 118, 119, 120 along the route to the substrate 123, so that the efficiency is high. In addition, the control unit 124 performs processing and control of various operations described above, and processing and control of various operations described later.

  2 is an arrow view when the component mounting apparatus of FIG. 1 is observed from the arrow 130 of FIG. Here, the structure around the first Y beam 101 and the head actuator 113 will be described in detail, but the same applies to other head actuators.

  An actuator 107 is disposed on the first Y beam 101. An X beam 103 is connected to the actuator 107. One end of the X beam 103 is connected to the actuator, and the other end of the X beam 103 is connected to the guide 181. The X beam 103 moves in a direction substantially perpendicular to the transport direction of the substrate 123 on the loading platform 201.

  An actuator 109 is disposed on the side surface of the X beam 103. A head actuator 113 is connected to the actuator 109. The head actuator 113 is moved substantially parallel to the substrate transport direction by the actuator 109.

  In the component mounting apparatus of the present embodiment, the head actuators 113, 114, 115, and 116 each move independently. Therefore, a component mounting apparatus that is faster than the conventional one can be configured.

  In addition, although FIG. 1 demonstrated the case where there were four X beams, the number of X beams may not be four. The X beams 103, 104, 105, and 106 may be removable. In that case, for example, different types of head actuators can be connected, and mounting of more various parts can be realized. With the beam configuration described above, each head actuator 113, 114, 115, 116 can be freely driven independently.

  Next, a first configuration of the head actuator 113 will be described. Although the configuration of the head actuator 113 is described here, the configuration of the other head actuators 114, 115, and 116 is the same.

  FIG. 3 is a front view of the head actuator 113. The head frame 301 is connected to the X beam 103 in FIG. The nozzle up / down motor 302 is connected to the frame 301. A ball screw 308 is connected to the nozzle up / down motor 302. Further, the end of the ball screw 308 is supported by a guide 318. An arm 309 is connected to the ball screw 308. The tip of the arm 309 has a structure (concave type) that sandwiches a convex portion 350 (convex portion) formed at least around the nozzle moving portion 310.

  A nozzle shaft 311 having a hollow structure is connected to the nozzle moving unit 310. Further, the nozzle shaft 311 is connected to the rotor 313. The nozzle shaft 311 has an opening at the tip, and a nozzle 317 for adsorbing electronic components is detachably connected. Although not shown, the head actuator 113 also has a pump for generating a suction force for sucking the nozzle 317.

  The nozzle rotation motor 316 is connected to the frame 301, and the nozzle shaft 311 is rotated by the interaction between the nozzle rotation motor 316 and the rotor 313. Next, the configuration of the head actuator 113 will be described in more detail with respect to the nozzle selection operation, the vertical operation, and the rotation operation.

  FIG. 4 is a diagram illustrating details of the center spline 306, the nozzle selection belt 307, the nozzle moving unit 310, and the nozzle shaft 311 of the head actuator 113.

  First, the vertical movement of the nozzle will be described. The nozzle moving unit 310 is connected to the center spline 306. The center spline 306 serves as a guide for defining the moving direction of the nozzle moving unit.

  The nozzle moving part 310 has at least the convex part 350 (convex part) around the aforementioned part, and the convex part is held by the arm 309. Further, an L-shaped arm 351 is connected to the convex portion 350. The tip of this L-shaped arm 351 is disposed in a notch 352 (in other words, a recess) of the nozzle base 320. Further, each nozzle shaft 311 is disposed on the nozzle pedestal 320 via the rotating body 353.

  When the arm 309 is moved up and down by the nozzle up / down motor 302, the nozzle movator 310, the arm 351 connected thereto, the rotating body 353 on the tip of the arm 351, and the rotating body 353 are connected accordingly. The nozzle shaft 311 moves up and down.

  Next, the nozzle selection operation will be described with reference to FIG. In the center spline 306, when the nozzle selection belt 307 is rotated by the nozzle selection motor 303, the center spline 306 is also rotated, and the nozzle moving unit 310 connected to the center spline 306 and the nozzle pedestal 320 are also synchronized in the same angle. Rotate. As the nozzle pedestal 320 rotates, the notch 352 also rotates. Thereby, an arbitrary nozzle shaft 311 on the nozzle pedestal can be selected.

  In addition, since the rotating body 353 such as the roller is in contact with the nozzle pedestal 320, the influence of friction when the nozzle pedestal 320 rotates can be reduced. Here, considering the influence of dust generation, it is desirable that the hardness of the rotating body 353 and the hardness of the nozzle base 320 are the same.

  With such a configuration, it is possible to efficiently perform the nozzle selection operation and the vertical operation within the limited space of the head actuator 113.

  Next, the rotation operation of the head will be described with reference to FIG. The nozzle rotation motor 316 rotates the rotor 313 to rotate the nozzle shaft 311 attached to the rotor 313 with the center of the rotor 313 as the rotation axis. Accordingly, the rotating body 353 such as a roller attached to the nozzle shaft 313 rotates on the nozzle base 320. As a result, an arbitrary nozzle shaft 311 can be moved to an arbitrary angle, and can be moved onto the L-shaped arm 351.

  FIG. 7 is an explanatory view of the nozzle rotation motor 316 as seen from the lower surface. The plurality of nozzles 317 are concentrically arranged at a distance r (reference numeral 701) from the center of the rotor 313. Note that the arrangement may not be concentric, that is, the distance r may be different for each nozzle 317.

  An electronic component 702 is vacuum-adsorbed on the nozzle 317. When mounting a component, change the mounting angle to the electronic component mounting angle. For example, when the electronic component 702 is mounted on the substrate and the longitudinal direction of the electronic component 702 is parallel to the X direction of the head actuator 113, the nozzle 317 is moved from the position 750 to the position 751 by the nozzle rotation motor 316 and the rotor 313. And the angle of the electronic component 702 can be changed by rotating in the directions of the arrow 703 and the arrow 704 to the position 752.

  Further, when the electronic component 702 is mounted on the substrate and the short direction of the electronic component 702 is parallel to the X direction of the head actuator 113, the nozzle 317 is moved from the position 750 by the nozzle rotation motor 316 and the rotor 313. In 753, the angle of the electronic component 702 can be changed by rotating in the directions of the arrow 705 and the arrow 706.

  The moving path of the head actuator 113 is shown in FIG. The mounting range of the head actuator 113 is a range 851. The initial position of the head actuator 113 is a position 801, and the head actuator 113 is positioned at positions 871, 872, 873, and 874 with respect to the positions 871, 872, 873, and 874 formed on the substrate 123. The components are mounted in this order, and the head actuator 113 is moved to the position 801.

  Since the moving path of the head actuator 113 is configured with the shortest distance in order to improve productivity, the head actuator 113 starts moving from the position 801 and first mounts a component at the position 871. Next, the head actuator 113 mounts a component at the position 872. Next, the head actuator 113 mounts a component at the position 873. Next, the head actuator 113 mounts the component at the position 874 and finally moves to the position 801.

  At this time, the head actuator 113 starts moving from the position 801, moves first to the position 802, then moves to the position 803, and then moves to the position 804 in order to mount it while correctly correcting the component angle. Finally, move to position 801. The trajectory of the head actuator 113 can be expressed by arrows 881 to 885. The head actuator 113 is moved by the actuator 107 of the first Y beam 101 and the actuator of the X beam 103.

  At this time, the total moving distance of the head actuator 113 is the sum of the arrow 881, the arrow 882, the arrow 883, the arrow 884, and the arrow 885.

  Next, a second configuration of the head actuator 113 will be described. FIG. 9 is a diagram illustrating a second configuration of the head actuator 113.

  The head frame 901 is connected to the X beam 103 in FIG. The nozzle up / down motor 902 is connected to the frame 901. A ball screw 903 is connected to the nozzle up / down motor 902. Further, the end of the ball screw 903 is supported by a guide 904. An arm 905 is connected to the ball screw 903. The tip of the arm 905 has a structure (concave) that sandwiches a convex portion 907 (convex portion) formed at least around the nozzle moving portion 906.

  The nozzle moving portion 906 is formed with an arm extending from the convex portion 907 toward the nozzle shaft 908 and a rolling mechanism connected to the tip of the arm. An example of a rolling mechanism is a ball 909.

  A plate 910 is formed at the end of each nozzle shaft 908, and the selection operation of the nozzle shaft 908 is performed by the ball 909 rolling on the plate 910. As the nozzle moving unit 906 is lowered, the arm 905 and the ball 909 push the plate 910, and as a result, the nozzle shaft 908 is lowered.

  Although details will be described later, a spring is disposed between the nozzle 912 and the rotor 911, and when the nozzle moving unit 906 moves up after being lowered, it is pushed by the ball 909 by a force for returning to the initial state of the spring. The nozzle shaft 908 returns to the initial position.

  The nozzle shaft 908 is connected to the rotor 911. An opening is provided at the tip of the nozzle shaft 908, and a nozzle 912 for adsorbing the electronic component 603 is detachably connected thereto. A nozzle gear 919 is connected to the nozzle shaft 908. The nozzle gear 919 may be formed directly on the nozzle shaft 908 by performing predetermined processing such as cutting on the nozzle shaft 908.

  The nozzle rotation motor 913 is connected to the head frame 901, and rotates the nozzle 912 as a head center rotation axis by the interaction with the rotor 911, thereby changing the relative positional relationship between the substrate and the nozzle 912.

  The nozzle rotation motor 920 is built in the rotor 911 and has a function of rotating the nozzle 912 around the rotation shaft 950. The rotation of the nozzle 912 by the nozzle rotation motor 920 can be expressed as rotation because there is no substantial change in the relative relationship between the substrate and the nozzle 912.

  The second configuration also has a nozzle selection motor 915 for driving the nozzle selection belt 914.

  The center spline 916 serves as a guide for defining the moving direction of the nozzle moving unit 906.

  The center shaft 917 is a nozzle shaft 908 arranged concentrically, and a hollow casing arranged inside the nozzle 912. The center shaft 917 and the rotary joint 918 serve as a vacuum flow path when the nozzle 912 vacuum-sucks the electronic component and a path that guides the wiring to the control unit 124.

  The propagation gear 922 is for propagating the rotation of the motor gear 921 by the nozzle rotation motor 920 to the nozzle gear 919 and substantially meshes with the motor gear 921 and the nozzle gear 919. The propagation gear 922 will be described in detail. The propagation gear 922 is formed such that the rotation shaft 923 of the rotor 911 passes through the first gear 924, and the rotation shaft 923 passes through the transmission gear 922. Includes a second gear 925 formed at a higher position. The second gear 925 is integrally molded with the first gear 924 or is designed to receive a force substantially due to the rotation of the first gear 924.

  The nozzle rotation motor 920 is outside the rotation shaft 923. The nozzle rotation motor 920 and the propagation gear 922 are disposed inside the position where the plurality of nozzles 912 are disposed (in other words, inside the shape represented by connecting the plurality of nozzles 912).

  When the motor gear 921 is rotated by the rotation motor 920, the propagation gear 922 and the nozzle gear 919 engaged with the propagation gear 922 are also rotated, and as a result, the nozzle 912 rotates. The nozzle shaft 908 is rotatable with respect to the plate 910, and the nozzle shaft 908 being connected to the plate 910 does not affect the rotation of the nozzle 912.

  Next, details of the periphery of the nozzle 317 having the first configuration and the nozzle 912 having the second configuration will be described with reference to FIG. The nozzle 317 of the first configuration is arranged such that its locus 1001 is substantially parallel to the normal line 1002 of the surface on which the substrate 123 is to be mounted. A spring 1003 is disposed on the back surface of the nozzle 317. The spring 1003 is contracted by a predetermined force while the nozzle 317 is in the initial position.

  A spring 1003, which is an example of an elastic body, is disposed on the back surface of the nozzle 912. The spring 1003 is in an initial state (a state in which the nozzle 912 is not expanded or contracted) in a state where the nozzle 912 is in an initial position (a state away from the substrate 123 by a predetermined distance).

  When the nozzle moving unit 906 moves up after being lowered, the spring 1003 attempts to return to the initial state, and as a result, the nozzle 917 generates a force in the direction of the arrow 1004. As a result, the nozzle 917 returns to the initial position. It should be noted that a damping system exemplified by a hydraulic damper may be combined with the spring 1003 so as to promote not only the spring 1003 but also the vibration of the spring 1003 on the back surface of the nozzle 917.

  Next, (1) nozzle up / down operation (2) nozzle selection operation (3) head rotation operation (changing the position of the nozzle 912 relative to the substrate by rotation) (4) nozzle rotation operation in the second configuration will be described.

  First, (1) nozzle up and down operation will be described with reference to FIG. FIG. 11A is a diagram for explaining a state before the nozzle shaft 908 is lowered, and in particular, a center spline 916, a nozzle selection belt 907, a nozzle moving unit 906, and a nozzle in the second configuration of the head actuator 113. It is a figure explaining the detail of the shaft 908 periphery.

  The nozzle moving unit 906 is connected to the center spline 916. The center spline 916 serves as a guide for defining the moving direction of the nozzle moving unit 906.

  The nozzle moving unit 906 has at least a convex portion 907 (convex portion) around the above-described portion, and the convex portion is held by the arm 905. Further, an L-shaped arm 951 is connected to the convex portion 907. For example, a ball 909 having a rolling shape is connected to the tip of the L-shaped arm 951.

  Then, as shown in FIG. 11B, when the arm 905 is moved downward by the nozzle up / down motor 902, the nozzle moving unit 906, the L-shaped arm 951 connected thereto, and the L-shaped The ball 909 on the tip of the arm 951 and the nozzle shaft 908 connected to the plate 910 move downward. At this time, the nozzle gear 919 and the transmission gear 922 slide but are transmitted by the gear, and therefore do not interfere with the operation direction of the nozzle shaft 908.

  The distance that the nozzle shaft 908 moves up and down substantially matches the distance from the predetermined initial position of the nozzle 912 to the position for mounting the component. The nozzle gear 919 may perform a rotation operation described later after the nozzle shaft 908 is lowered. Therefore, it is desirable that the nozzle gear 919 is engaged with the propagation gear 922 even after the nozzle shaft 908 is lowered by a predetermined amount. As one expression, it can also be expressed that the length L of the nozzle gear 919 is preferably longer than the vertical movement distance of the nozzle shaft 908 (which can also be referred to as the nozzle 912).

  The nozzle shaft 908 that has moved downward returns to a predetermined initial position by a spring 1003 shown in FIG.

  Next, (2) nozzle selection operation will be described with reference to FIG. In the center spline 916, when the nozzle selection belt 914 is rotated by the nozzle selection motor 915, the center spline 916 is also rotated. As the nozzle moving unit 906 connected to the center spline 916 also rotates, as a result, the position of the arm 951 changes from the state of FIG. 12A to the state of FIG. 908 can be selected.

  Note that since the plate 910 described above is in contact with the nozzle moving unit 906, the nozzle gear 919 and the transmission gear 922 are not affected by friction due to the nozzle selection operation.

  With such a configuration, the nozzle selection operation and the vertical operation can be performed efficiently in a limited space even in the second configuration.

  Next, (3) the rotation operation of the head will be described with reference to FIG. The nozzle rotation motor 913 rotates the rotor 911 to rotate the nozzle shaft 908 attached to the rotor 911 with the center of the rotor 911 as the rotation axis. The state before and after the rotation can be expressed by changing from FIG. 13 (a) to FIG. 13 (b). Accordingly, an arbitrary nozzle shaft 908 can be moved to an arbitrary position and angle, and can be moved onto the L-shaped arm 951. Further, since the nozzle gear 919, the transmission gear 922, the motor gear 921, and the nozzle rotation motor 920 also rotate simultaneously with the rotor 920, the nozzle shaft 908 does not rotate.

  Next, (4) nozzle rotation operation will be described with reference to FIG. FIG. 14 shows a state before the nozzle shaft 908 rotates, and FIG. 14B shows a state where the nozzle shaft 908 rotates.

  The nozzle rotation motor 920 has a function of rotating the nozzle shaft 908 around the rotation shaft 950 as the center of rotation. The nozzle rotation motor 920 is built in the rotor 911, a motor gear 921 is connected to the shaft of the nozzle rotation motor 920, and a propagation gear 922 is connected to the motor gear 921. The propagation gear 922 is connected to the nozzle gear 919. Therefore, when the nozzle rotation motor 920 rotates, the nozzle rotation gear 919 rotates, and the nozzle shaft 908 and the nozzle 912 rotate.

  Regarding the dimensions of the motor gear 921, the propagation gear 922 (more specifically, the first gear 924 and the second gear 925 described above), and the nozzle gear 919, the propagation gear 922 is more than the motor gear 921 and the nozzle gear 919. In many cases, it becomes larger, but the operator may design it arbitrarily.

  The rotation angle of the nozzle shaft 908 (which can also be expressed as the angle of the nozzle 912) is a motor gear 921, a propagation gear 922 (more specifically, the first gear 924 and the second gear 925 described above), and It is determined by the gear ratio of the nozzle gear 919. Actually, since the propagation gear 922 is substantially in contact with the motor gear 921 and the nozzle gear 919, it can be substantially ignored to obtain the gear ratio, and the gear ratio is obtained as the ratio of the motor gear 921 and the nozzle gear 919. be able to.

  The gear ratio may be arbitrarily determined by the operator. However, if the gear ratio between the motor gear 921 and the nozzle gear 919 is substantially 1: 1, the rotation angle of the nozzle shaft 908 is substantially equal to the rotation angle of the motor gear 921. Can be equated. If the gear ratio is 1: N (1 <N), the rotation angle of the nozzle shaft 908 is larger than the rotation angle of the motor gear 921, which is suitable for high-speed component mounting. On the other hand, if the gear ratio is 1: N (N <1), the rotation angle of the nozzle shaft is smaller than the rotation angle of the motor gear 921, which is suitable for high-precision component mounting.

  The explanatory view which looked at the nozzle rotation motor 913 from the lower surface using FIG. 15 is shown. The plurality of nozzles 912 are concentrically arranged at a distance r (reference numeral 1001) from the center of the rotor 911. The arrangement may not be concentric, that is, the distance r may be different for each nozzle 913.

  The electronic component 1003 is vacuum-sucked by the nozzle 912. The component mounting apparatus changes the electronic component to the mounting angle and mounts the component when mounting the component. For example, when the electronic component 1003 is mounted on the substrate with the long side direction of the electronic component 1003 substantially horizontal with the X direction of the head actuator 113, the nozzle 912 is moved at the position 1050 by the arrow 1061 and the nozzle 912 by the operation of the nozzle rotation motor 920. By rotating in at least one direction of the arrow 1062, the angle of the electronic component 1003 can be changed to a state indicated by reference numeral 1002.

  Whether the electronic component should be rotated in the direction of the arrow 1061 or the arrow 1062 can be arbitrarily determined and changed by the operator, but can be efficiently obtained by using the camera 117 (for the other head actuators). be able to. More specifically, as shown in FIG. 15B, the control unit 124 obtains an image of the electronic component 1003 held by the camera 117, and determines the obtained image of the electronic component 1003 and the position to be mounted. In comparison, the direction in which the nozzle shaft 108 can be rotated at the smaller one of the obtained rotation angles a and b is determined. In FIG. 15A, the nozzle shaft 108 is rotated in the direction 1062 that can be rotated at the rotation angle a.

  The moving path of the head actuator 113 is shown in FIG. The mounting range in the second configuration of the head actuator 113 is a range 1151. For example, assume that the initial position of the second configuration of the head actuator 113 is the position 801.

  In the second configuration, the head actuator 113 moves in the order of the position 871, the position 872, the position 873, and the position 874 arranged on the substrate 123 to mount components.

  The moving distance of the head actuator 113 is obtained as the sum of an arrow 1181, an arrow 883, an arrow 884, and an arrow 885. When the movement distance in the first configuration and the movement distance in the second configuration are compared, there is a difference between the arrow 882 in the first configuration and the arrow 1181 in the second configuration, There is a difference between the arrow 884 in the configuration and the arrow 1182 in the second configuration. More specifically, the arrow 1181 is shorter than the arrow 882, and the arrow 1182 is shorter than the arrow 884. This is because the nozzle shaft 908 can rotate in the second configuration.

According to this embodiment, high-speed component mounting is possible. According to this embodiment, it is possible to mount components with high accuracy. More specifically, the effect of the present embodiment will be described as follows. (1) The difference between the component mounting angle on the substrate 123 and the angle of the component held by the nozzle 912 can be obtained by the camera 117, and the head is obtained by rotating the nozzle 912 by the nozzle rotation motor 920 in consideration of the difference. The moving distance of the actuator 113 can be shortened and productivity can be improved.
(2) By rotating the nozzle 912, it is possible to reduce the influence of errors caused by the rotation of the nozzle rotation motor 913 and to perform component mounting.

  Next, Example 2 will be described. Hereinafter, parts different from the other embodiments will be mainly described. The nozzle rotation motor 913 that rotates the rotor 911 may be very hot. When the nozzle rotation motor 913 reaches a high temperature, at least one of the motor gear 921, the propagation gear 922, and the nozzle gear 919 may expand. When at least one of the motor gear 921, the propagation gear 922, and the nozzle gear 919 expands, it may contact other gears and generate an undesirable force. The present embodiment takes this point into consideration.

FIG. 17 is a diagram for explaining this embodiment. In this embodiment, a space D ₀ is formed in consideration of thermal expansion of the motor gear 921 and the propagation gear 922 between the motor gear 921 and the teeth 1701 of the propagation gear 922 and between the teeth 1702 of the motor gear 921 and the propagation gear 922. To do. When the nozzle rotation motor 913 generates heat, the motor gear 921 and the propagation gear 922 expand, and D ₀ is substantially D ₀ = 0 or D 1 (<D ₀ ), so that an undesirable force is substantially Does not occur. In FIG. 17, the motor gear 921 and the propagation gear 922 have been described, but D ₀ can also be applied to the propagation gear 922 and the nozzle gear 919.

  Next, Example 3 will be described. Hereinafter, parts different from the other embodiments will be mainly described. It is desirable that the motor gear 921, the propagation gear 922, and the nozzle gear 919 rotate smoothly. The present embodiment takes this point into consideration.

  FIG. 18 is a diagram for explaining the present embodiment. As shown in FIG. 18A, in this embodiment, grease 1801 is applied to at least one of the motor gear 921, the propagation gear 922, and the nozzle gear 919. The grease 1801 causes at least one of the motor gear 921, the propagation gear 922, and the nozzle gear 919 to rotate well.

  The grease 1801 may be scattered due to the rotation of the gear. The scattered grease adhering to the substrate is undesirable because it contaminates the substrate. Therefore, in this embodiment, as shown in FIG. 18B, a partition wall 1802 that covers at least one of the motor gear 921, the propagation gear 922, and the nozzle gear 919 may be formed. The partition wall 1802 is preferably configured to cover the motor gear 921, the propagation gear 922, and the nozzle gear 919. The bulkhead is a substantial gearbox.

  As mentioned above, although demonstrated using the Example of this invention, this invention is not limited to an Example. The present invention can be widely applied to a processing apparatus for performing some processing on a sample on a substrate. In addition, the contents described in each embodiment can be mutually replaced and combined.

DESCRIPTION OF SYMBOLS 101 ... 1st Y beam 102 ... 2nd Y beam 103, 104, 105, 106 ... 1st X beam 107, 108, 109, 110, 111, 112 ... Actuator 113, 114, 115, 116 ... Head actuator 117, 118, 119, 120 ... Camera 121, 122 ... Component supply device 123 ... Substrate 124 ... Control unit 302 ... Nozzle up / down motor 303 ... Nozzle selection motor 304 ... Center shaft 305 ... Rotary joint 306 ... Center spline 307 ... For nozzle selection Belt 308 ... Ball screw 351 ... Arm 310 ... Nozzle moving part 311 ... Nozzle shaft 317 ... Nozzle

Claims (19)

A plurality of nozzles for mounting the components on a substrate is connected to the front end of the plurality of nozzles shaft connected to the rotor,
A first gear formed on the nozzle;
A first motor unit for changing the position of the nozzle;
A second motor unit built in the rotor, including a second gear, for rotating the nozzle;
A third gear for propagating the rotation of the second motor unit to the first gear;
A head actuator to have a,
The rotating shaft of the second motor unit passes through the second gear,
The second motor unit is a component mounting apparatus that is disposed inside a position where the plurality of nozzles are disposed . The component mounting apparatus according to claim 1 ,
A camera for obtaining an image of a component held by the nozzle;
A component mounting apparatus in which the direction of rotation of the nozzle is determined using an image obtained by the camera. In the component mounting apparatus according to claim 2 ,
Component mounting apparatus having an elastic body connected to the nozzle In the component mounting apparatus according to claim 3 ,
The elastic body is a component mounting apparatus in an initial state with the nozzle in an initial position. In the component mounting apparatus according to claim 4 ,
A component mounting apparatus having a damping system for focusing vibrations of the nozzle. In the component mounting apparatus according to claim 5 ,
The component mounting apparatus, wherein a gear ratio between the second gear and the first gear is 1: N (1 <N), 1: 1, or 1: N (N <1). In the component mounting apparatus according to claim 6 ,
A component mounting apparatus in which a space in consideration of thermal expansion is formed between at least two of the first gear, the second gear, and the third gear. In the component mounting apparatus according to claim 7 ,
A component mounting apparatus in which grease is applied to at least one of the first gear, the second gear, and the third gear. In the component mounting apparatus according to claim 8 ,
A component mounting apparatus having a partition wall covering a gear to which the grease is applied. The component mounting apparatus according to claim 1,
A camera for obtaining an image of a component held by the nozzle;
A component mounting apparatus in which the direction of rotation of the nozzle is determined using an image obtained by the camera. The component mounting apparatus according to claim 1,
Component mounting apparatus having an elastic body connected to the nozzle The component mounting apparatus according to claim 11 ,
The elastic body is a component mounting apparatus in an initial state with the nozzle in an initial position. In the component mounting apparatus according to claim 12 ,
A component mounting apparatus having a damping system for focusing vibrations of the nozzle. The component mounting apparatus according to claim 1,
The component mounting apparatus, wherein a gear ratio between the second gear and the first gear is 1: N (1 <N). The component mounting apparatus according to claim 1,
A component mounting apparatus in which a gear ratio between the second gear and the first gear is 1: 1. The component mounting apparatus according to claim 1,
The component mounting apparatus, wherein a gear ratio between the second gear and the first gear is 1: N (N <1). The component mounting apparatus according to claim 1,
A component mounting apparatus in which a space in consideration of thermal expansion is formed between at least two of the first gear, the second gear, and the third gear. The component mounting apparatus according to claim 1,
A component mounting apparatus in which grease is applied to at least one of the first gear, the second gear, and the third gear. The component mounting apparatus according to claim 18 ,
A component mounting apparatus having a partition wall covering a gear to which the grease is applied.