JP6110439B2 - 走査型透過荷電粒子顕微鏡の校正方法 - Google Patents
走査型透過荷電粒子顕微鏡の校正方法 Download PDFInfo
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- JP6110439B2 JP6110439B2 JP2015137413A JP2015137413A JP6110439B2 JP 6110439 B2 JP6110439 B2 JP 6110439B2 JP 2015137413 A JP2015137413 A JP 2015137413A JP 2015137413 A JP2015137413 A JP 2015137413A JP 6110439 B2 JP6110439 B2 JP 6110439B2
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Classifications
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2802—Transmission microscopes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2813—Scanning microscopes characterised by the application
- H01J2237/2817—Pattern inspection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/282—Determination of microscope properties
- H01J2237/2826—Calibration
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14176529.7 | 2014-07-10 | ||
| EP14176529.7A EP2966668B1 (en) | 2014-07-10 | 2014-07-10 | Method of calibrating a scanning transmission charged-particle microscope |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016017966A JP2016017966A (ja) | 2016-02-01 |
| JP2016017966A5 JP2016017966A5 (enExample) | 2016-12-08 |
| JP6110439B2 true JP6110439B2 (ja) | 2017-04-05 |
Family
ID=51162576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015137413A Active JP6110439B2 (ja) | 2014-07-10 | 2015-07-09 | 走査型透過荷電粒子顕微鏡の校正方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9396907B2 (enExample) |
| EP (1) | EP2966668B1 (enExample) |
| JP (1) | JP6110439B2 (enExample) |
| CN (1) | CN105261544B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201715902D0 (en) * | 2017-09-29 | 2017-11-15 | Oxford Instr Plc | Improved system for electron diffraction analysis |
| EP3531439B1 (en) * | 2018-02-22 | 2020-06-24 | FEI Company | Intelligent pre-scan in scanning transmission charged particle microscopy |
| JP7138066B2 (ja) * | 2018-03-20 | 2022-09-15 | テスカン ブルノ エスアールオー | 歳差電子回折データマッピングのために走査型透過電子顕微鏡を自動的にアライメントする方法 |
| US12236603B2 (en) | 2020-02-12 | 2025-02-25 | Samantree Medical Sa | Systems and methods for imaging samples with reduced sample motion artifacts |
| US11263510B2 (en) * | 2020-07-15 | 2022-03-01 | GM Global Technology Operations LLC | Method for performing measurements of dendritic structures for all magnifications and camera resolutions of microscopes |
| JP2024531132A (ja) * | 2021-08-04 | 2024-08-29 | サマンツリー メディカル エスアー | 並列撮像システムでライブ試料モニタリング情報を提供するシステム及び方法 |
| EP4345447A1 (en) | 2022-09-30 | 2024-04-03 | Fei Company | A method of automated data acquisition for a transmission electron microscope |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6807314B1 (en) * | 1999-07-02 | 2004-10-19 | General Phosphorix, Llc | Method of precision calibration of a microscope and the like |
| JP4434446B2 (ja) * | 2000-07-21 | 2010-03-17 | Ｏｋｉセミコンダクタ株式会社 | 走査型電子顕微鏡の校正方法 |
| US6770867B2 (en) | 2001-06-29 | 2004-08-03 | Fei Company | Method and apparatus for scanned instrument calibration |
| JP2005520281A (ja) | 2001-07-13 | 2005-07-07 | ナノファクトリー インストルメンツ アーベー | 顕微鏡のひずみの影響を低減するためのデバイス |
| US7164128B2 (en) * | 2003-11-25 | 2007-01-16 | Hitachi High-Technologies Corporation | Method and apparatus for observing a specimen |
| JP4587742B2 (ja) * | 2004-08-23 | 2010-11-24 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微方法及び荷電粒子線応用装置 |
| CN101461026B (zh) * | 2006-06-07 | 2012-01-18 | Fei公司 | 与包含真空室的装置一起使用的滑动轴承 |
| JP4801518B2 (ja) * | 2006-07-07 | 2011-10-26 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微方法および荷電粒子線装置 |
| JP5151277B2 (ja) * | 2007-07-04 | 2013-02-27 | 富士通株式会社 | 試料観察装置とその補正方法 |
| EP2166557A1 (en) | 2008-09-22 | 2010-03-24 | FEI Company | Method for correcting distortions in a particle-optical apparatus |
| EP2197018A1 (en) | 2008-12-12 | 2010-06-16 | FEI Company | Method for determining distortions in a particle-optical apparatus |
| EP2511936B1 (en) | 2011-04-13 | 2013-10-02 | Fei Company | Distortion free stigmation of a TEM |
| EP2584584A1 (en) * | 2011-10-19 | 2013-04-24 | FEI Company | Method for adjusting a STEM equipped with an aberration corrector |
| US8598527B2 (en) * | 2011-11-22 | 2013-12-03 | Mochii, Inc. | Scanning transmission electron microscopy |
| US9188555B2 (en) | 2012-07-30 | 2015-11-17 | Fei Company | Automated EDS standards calibration |
-
2014
- 2014-07-10 EP EP14176529.7A patent/EP2966668B1/en active Active
-
2015
- 2015-07-09 JP JP2015137413A patent/JP6110439B2/ja active Active
- 2015-07-09 US US14/795,704 patent/US9396907B2/en active Active
- 2015-07-10 CN CN201510403896.2A patent/CN105261544B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| EP2966668B1 (en) | 2016-10-12 |
| US20160013016A1 (en) | 2016-01-14 |
| JP2016017966A (ja) | 2016-02-01 |
| CN105261544B (zh) | 2017-08-18 |
| US9396907B2 (en) | 2016-07-19 |
| CN105261544A (zh) | 2016-01-20 |
| EP2966668A1 (en) | 2016-01-13 |
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