JP6104578B2 - Inspection apparatus and inspection method - Google Patents

Inspection apparatus and inspection method Download PDF

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JP6104578B2
JP6104578B2 JP2012262091A JP2012262091A JP6104578B2 JP 6104578 B2 JP6104578 B2 JP 6104578B2 JP 2012262091 A JP2012262091 A JP 2012262091A JP 2012262091 A JP2012262091 A JP 2012262091A JP 6104578 B2 JP6104578 B2 JP 6104578B2
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悟朗 竹内
悟朗 竹内
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日置電機株式会社
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  The present invention relates to an inspection apparatus and an inspection method for performing a functional inspection on an inspection object while operating power is being supplied to the inspection object.

  As this type of inspection apparatus, a function test system disclosed in Japanese Patent Laid-Open No. 7-318614 is known. This function test system is equipped with a PC, system control, measurement control module group, fixture, function tester bus, measurement bus, and measuring instrument. It is configured to be able to perform a function inspection on a component-mounted board capable of executing processing. In this case, in this type of inspection apparatus, various functional inspections are performed in a state in which operating power (for example, voltage) is supplied to the inspection target substrate and the substrate is operated.

Japanese Patent Laid-Open No. 7-318614 (page 3-4, FIG. 1)

  However, the conventional inspection apparatus capable of executing the function inspection including the above-described function test system has the following problems to be solved. That is, in this type of conventional inspection apparatus, various functional inspections are performed by supplying a voltage as operating power to a substrate to be inspected to operate the substrate. In this case, when the substrate starts electrical processing (for example, arithmetic processing), a rapid voltage drop may occur. In such a case, the electrical processing is interrupted by the reset function provided in the substrate and the electrical processing is started again, and the electrical processing is interrupted again by the start of the electrical processing. As described above, due to the rapid voltage drop, there may be a disadvantage that the electrical process is repeatedly started and interrupted. In order to avoid such inconvenience, when a functional test is performed using this type of test device, a sudden voltage is generated by connecting a capacitor between the output portion of the operating power and the signal supply terminal. It is possible to alleviate the descent. However, when an inspection (static function inspection) is performed to check whether the current consumption in the standby state (standby state) is in accordance with the specified value with the capacitor connected, it is used until the capacitor is charged. Electric power is supplied to the capacitor, and the current value fluctuates during that time. For this reason, the measurement cannot be started until the fluctuation is reduced, and there is a problem that the inspection efficiency is lowered due to this. In addition, when measuring the current consumption with the capacitor connected, it is difficult to accurately measure the current consumption of the board because the leakage current of the capacitor is added even after the capacitor is charged. There is also a risk that the function test will be inaccurate.

  This invention is made | formed in view of this subject, and it aims at providing the inspection apparatus and inspection method which can perform the functional test | inspection with respect to a test object correctly and efficiently.

In order to achieve the above object, the inspection apparatus according to claim 1 is obtained from the inspection object in a state where the operation power is supplied to the inspection object, and a first power supply unit that supplies the operation power to the inspection object. An inspection apparatus comprising: an inspection unit that performs a function inspection on the inspection object based on an electrical parameter that is provided; a connection terminal for supplying the operation power to the inspection object; and the first power supply unit A capacitor connected between and a reference potential, a connection state between the connection terminal and the first power supply unit, and a connection state where the capacitor is connected between the reference potential and a non-connection state where the capacitor is not connected before a switching unit, a control unit for controlling the switching unit, and a second power supply unit for supplying the charging power to the capacitor, wherein the control unit includes a static function tests as the function test of switching When the inspection unit executes, the switching unit is controlled to maintain the capacitor in the disconnected state, and when the inspection unit executes a dynamic function inspection as the function inspection, the switching unit is controlled. The capacitor is maintained in the connected state, and the second power supply unit is turned on while the dynamic function test is performed after the static function test is performed. The charging power is supplied to the capacitor that is not connected to charge the capacitor .

The inspection apparatus according to claim 2 is the inspection apparatus according to claim 1 , wherein the inspection unit is measured when the operation power is supplied and the inspection object is in a standby state. A quality inspection of the inspection object based on a measured value of a physical quantity as a parameter is executed as the static function inspection.

According to a third aspect of the present invention, in the inspection apparatus according to the first or second aspect , the inspection unit instructs execution of an electrical process defined in advance in a state where the operating power is supplied. In accordance with the instruction signal, the inspection target is inspected as the dynamic function inspection based on the processing result as the electrical parameter when the inspection target executes the electrical processing.

The inspection method according to claim 4 is an inspection method for performing a functional inspection on the inspection object based on an electrical parameter obtained from the inspection object in a state in which operating power is supplied to the inspection object. When performing a static function test as the function test, a reference potential is provided between the connection terminal for supplying the operating power to the test target and the first power supply unit for supplying the operating power. When a dynamic function test is performed as the function test, a capacitor is not connected between the connection terminal and the first power supply unit, and the reference potential is The second power supply unit is maintained while the static function test is performed when the dynamic function test is performed after the static function test is performed. Control before To supply the charging power to the capacitor of the non-connected state to charge the capacitor.

In the inspection apparatus according to claim 1, and the inspection method according to claim 4 , when performing the static function inspection, no capacitor is connected between the connection terminal and the first power supply unit and the reference potential. When the dynamic function test is performed, the connection state is maintained with the capacitor connected between the connection terminal and the first power supply unit and the reference potential. For this reason, when the static function test is executed, it is possible to avoid a situation in which the electric parameters used for the static function test fluctuate as the capacitor is charged as a result of the operation power not being supplied to the capacitor. Therefore, according to the inspection apparatus and the inspection method, the static function inspection can be performed immediately after the start of the supply of the operating power. As a result, the capacitor is always maintained in the connected state, and the electrical parameter associated with the charging of the capacitor Compared with the configuration and method in which the static function inspection cannot be executed until the fluctuation of the inspection becomes small, the inspection efficiency can be sufficiently improved. In addition, according to the inspection apparatus and the inspection method, since the static function inspection is performed after the capacitor is disconnected, the capacitor and the method are different from the configuration and method in which the static function inspection is performed with the capacitor connected. It is possible to avoid a situation in which the current obtained by adding the leakage currents is measured as an electrical parameter used for the static function inspection. For this reason, according to this inspection apparatus and inspection method, it is possible to accurately measure the electrical parameters used for the static function inspection. As a result, it is possible to accurately execute the function inspection for the inspection object. Further, according to the inspection apparatus and the inspection method, when the dynamic function inspection is performed, the capacitor is maintained in a connected state, so that the operation target when the inspection target starts electrical processing in the dynamic function inspection is performed. The power voltage drop can be compensated by the power supply function of the capacitor. For this reason, according to this test | inspection apparatus and test | inspection method, the electrical process by a test object becomes difficult by the voltage drop of operating electric power, and the situation where execution of a dynamic function test becomes difficult can be prevented reliably.

Further, in this inspection apparatus and inspection method , charging power is supplied to the unconnected capacitor while the static function inspection is performed after the static function inspection is performed. Charge the capacitor. In this case, in the configuration and method in which the capacitor is not charged during the static function test, the capacitor is not charged at the end of the static function test, and the dynamic function test is started immediately in that state. (When the electrical processing is started on the inspection target), the voltage cannot be leveled by compensating for the voltage drop accompanying the start of the processing of the inspection target. In the meantime, the dynamic function test cannot be started, so that it is difficult to further improve the test efficiency. On the other hand, according to this inspection device, as a result of charging the capacitor during the execution of the static function inspection, it is possible to complete the charging of the capacitor at the start of the electrical processing by the inspection object. It is possible to immediately execute the electrical processing on the inspection object after the functional inspection is completed. For this reason, according to this test | inspection apparatus, test | inspection efficiency can further be improved compared with the structure and method which do not charge a capacitor | condenser during execution of a static function test | inspection.

In addition, according to the inspection apparatus of claim 2 , the pass / fail inspection of the inspection object based on the measured value of the physical quantity measured when the operation power is supplied and the inspection object is in the standby state is set as the static function inspection. By doing so, this type of static function test, which is typically performed as part of the function test, can be performed accurately and efficiently.

In addition, according to the inspection device of claim 3, the inspection object pass / fail inspection based on a processing result when the inspection object performs an electrical process in accordance with an instruction signal in a state where the operating power is supplied. By executing as a dynamic function test, this type of dynamic function test, which is generally performed as part of the function test, can be executed accurately and efficiently.

1 is a configuration diagram showing a configuration of an inspection apparatus 1. FIG. It is explanatory drawing explaining the change of the voltage value of the operating voltage Vo supplied to the board | substrate 100. FIG.

  Hereinafter, embodiments of an inspection apparatus and an inspection method will be described with reference to the accompanying drawings.

  First, the configuration of the inspection apparatus 1 shown in FIG. 1 will be described. The inspection apparatus 1 shown in FIG. 1 is an example of an inspection apparatus, and includes a first power supply unit 11, a second power supply unit 12, an inspection unit 13, a moving mechanism 14, a scanner 15, a capacitor 16, a switching unit 17, and a storage unit 18. In accordance with an inspection method to be described later, a functional inspection (function test: inspection performed by operating an inspection target) for the substrate 100 (an example of the inspection target) shown in FIG. Configured to be executable.

  The first power supply unit 11 outputs an operating voltage Vo supplied to the substrate 100 under the control of the control unit 20. In this case, the operating voltage Vo corresponds to operating power for operating the substrate 100 by supplying it to the substrate 100 during the execution of the function test. The first power supply unit 11 includes a switch (not shown), and operates the switch according to the control of the control unit 20 to supply and stop supplying the operating voltage Vo to the substrate 100.

  The second power supply unit 12 supplies a charging voltage Vc as an example of charging power to the capacitor 16. The second power supply unit 12 includes a switch (not shown), and operates the switch according to the control of the control unit 20 to supply and stop supplying the charging voltage Vc to the capacitor 16. In this case, in the inspection apparatus 1, the second power supply unit 12 supplies the charging voltage Vc having the same voltage value as the operation voltage Vo output from the first power supply unit 11.

  The inspection unit 13 performs various functional inspections. In this case, the inspection unit 13 measures a current consumption in a standby state, which will be described later, and performs a static function inspection based on the measured value, or a dynamic function based on a processing result of arithmetic processing by the substrate 100, which will be described later. It is configured to include various inspection units such as a calculation result determination unit that executes inspection, and performs static function inspection and dynamic function inspection as function inspection. In this case, the static function is a function performed in accordance with the supply of the operating voltage Vo without the substrate 100 performing an electrical process. Specifically, the static voltage is supplied to the substrate 100 by supplying the operating voltage Vo. The function of consuming current consumption (electrical parameters) and maintaining the standby state when is in the standby state (standby state) corresponds to this static function. Further, such a function test for testing a static function corresponds to a static function test. On the other hand, the dynamic function is a function in which the substrate 100 performs an electrical process, and specifically, an electrical process (for example, predetermined) with respect to the substrate 100 in a state where the operating voltage Vo is supplied. , An instruction signal Sc instructing execution of arithmetic processing, communication processing, display processing for the display, etc.) is output, and in response to the instruction signal Sc, the substrate 100 executes the electric processing and the processing result (electrical parameter) ) Is equivalent to this dynamic function. Further, such a function test for testing a dynamic function corresponds to a dynamic function test.

  The moving mechanism 14 causes the substrate unit 100 to probe the probe unit 21 under the control of the control unit 20. In this case, for example, as shown in FIG. 1, the probe unit 21 includes a plurality of probes 22 (corresponding to connection terminals) and is configured in a jig shape.

  The scanner 15 includes a plurality of switches (not shown). By switching each switch according to the control of the control unit 20, the connection and disconnection (connection) between the probes 22 of the probe unit 21 and the first power supply unit 11 are performed. And cutting), and connection between each probe 22 and the inspection unit 13 is performed.

  The capacitor 16 functions as a voltage supply and bypass capacitor, and is supplied to the substrate 100 when the substrate 100 starts electrical processing when performing a dynamic function test on the substrate 100. It has a function of compensating the voltage drop of the operating voltage Vo and leveling the voltage. In this case, the capacitor 16 is operated between the probe 22 and the first power supply unit 11 (a connection point between the probe 22 and the first power supply unit 11) and a reference potential (ground potential) by the operation of the switching unit 17 (this example). Then, since the scanner 15 exists between the first power supply unit 11 and the probe 22, it is connected between the scanner 15 and the first power supply unit 11 (connection point) and the reference potential) ( (Hereinafter also referred to as “connected state”) and not connected state (hereinafter also referred to as “non-connected state”).

  The switching unit 17 operates according to the control of the control unit 20 and switches the connection state and the non-connection state of the capacitor 16. The storage unit 18 stores an operation program of the inspection apparatus 1, sequence data describing a function inspection procedure, and the like. Further, the storage unit 18 stores the result of the function test executed by the test unit 13 according to the control of the control unit 20. The operation unit 19 includes an operation key for performing an instruction operation for instructing the start of inspection and various setting operations, and outputs an operation signal when these are operated.

  The control unit 20 controls each component constituting the inspection apparatus 1 according to the operation signal output from the operation unit 19 and the operation program stored in the storage unit 18. Specifically, the control unit 20 controls the moving mechanism 14 to execute probing. Further, the control unit 20 controls the output of the operating voltage Vo by the first power supply unit 11. In addition, the control unit 20 causes the inspection unit 13 to perform a function test (static function test and dynamic function test) according to the procedure described in the sequence data stored in the storage unit 18 and switch A process of controlling the unit 17 to switch between a connection state in which the capacitor 16 is connected between the probe 22 and the first power supply unit 11 and the reference potential and a non-connection state in which the capacitor 16 is not connected (hereinafter referred to as “switching process”) (Also called). In this case, when the control unit 20 causes the inspection unit 13 to perform a static function test, the control unit 20 causes the capacitor 16 to be disconnected and causes the test unit 13 to perform a dynamic function test. The capacitor 16 is connected.

  In addition, when the control unit 20 causes the inspection unit 13 to execute the dynamic function inspection, the control unit 20 outputs an instruction signal Sc instructing the substrate 100 to perform electrical processing. Further, the control unit 20 controls the second power supply unit 12 to execute the static function test when the test unit 13 continuously performs the static function test and the dynamic function test in this order. The charging voltage Vc is supplied to the capacitor 16, and the supply of the charging voltage Vc to the capacitor 16 is stopped when the dynamic function test is executed. In the inspection apparatus 1, as described above, the second power supply unit 12 supplies the charging voltage Vc having the same voltage value as the operation voltage Vo output from the first power supply unit 11. Alternatively, a configuration and method in which the charging voltage Vc is constantly supplied to the capacitor 16 (the second power supply unit 12 and the capacitor 16 are always connected) can be employed. Even when the operating voltage Vo and the charging voltage Vc are different from each other, the charging voltage Vc is always applied to the capacitor 16 from the second power supply unit 12 by providing a backflow prevention circuit (for example, a diode). Can be supplied.

  Next, the operation of the inspection apparatus 1 and the inspection method using the inspection apparatus 1 will be described with reference to the drawings. It is assumed that sequence data including a procedure for executing the dynamic function inspection after executing the static function inspection on the substrate 100 is stored in the storage unit 18.

  In this inspection apparatus 1, when the power is turned on, the control unit 20 reads the operation program from the storage unit 18 and starts control of each component. Next, when an instruction operation for instructing the operation unit 19 to start the inspection is performed, the operation unit 19 outputs an operation signal indicating that.

  Subsequently, the control unit 20 controls the moving mechanism 14 according to the operation signal output from the operation unit 19 to execute probing. Thereby, each probe 22 of the probe unit 21 is brought into contact with each point provided on the substrate 100. Next, the control unit 20 controls the first power supply unit 11 to start outputting the operating voltage Vo.

  Subsequently, the control unit 20 reads the sequence data from the storage unit 18. Next, in accordance with the procedure described in the sequence data, the control unit 20 causes the inspection unit 13 to perform a function test, and executes a switching process for controlling the switching unit 17, and according to the content of the function test, The capacitor 16 is switched between the connected state and the disconnected state.

  Specifically, the control unit 20 first controls the switching unit 17 to disconnect the capacitor 16 (a state in which the capacitor 16 is not connected between the probe 22 and the first power supply unit 11 and the reference potential). Let me. Subsequently, the control unit 20 operates a switch (not shown) of the first power supply unit 11 to supply the operating voltage Vo via the probe 22. Thereby, supply of the operating voltage Vo to the substrate 100 is started. In this case, since the instruction signal Sc instructing the start of electrical processing (electrical processing executed by the substrate 100) is not output at this time, the substrate 100 enters a standby state (waiting for the instruction signal Sc). maintain.

  Next, the control unit 20 controls the inspection unit 13 to measure a current (consumption current in the standby state) flowing through the substrate 100 in accordance with the supply of the operating voltage Vo in the standby state, and the measured value (current value). Is compared with a reference value defined in advance, and an inspection (an example of a static function inspection) is performed to determine whether the substrate 100 is good (static function is good or bad).

  In this case, since the capacitor 16 is not connected at this time, the operating voltage Vo is not supplied to the capacitor 16, and as a result, fluctuations in voltage and current consumption associated with charging of the capacitor 16, as shown in FIG. Is avoided. Therefore, in the inspection apparatus 1 and the inspection method, the measurement of the current consumption can be started immediately (in a short time) after the supply of the operating voltage Vo is started. As a result, the capacitor 16 is always maintained in the connected state. A configuration and method in which measurement of current consumption cannot be started until fluctuations in current consumption due to charging of the capacitor 16 become small (as shown by the broken line in the figure, until the operating voltage Vo reaches a steady state). In comparison, the inspection efficiency can be sufficiently improved.

  Moreover, in this inspection apparatus 1 and the inspection method, the static function test is performed (the current consumption is measured) after the capacitor 16 is disconnected. Therefore, the static function test is performed with the capacitor 16 connected. Unlike the configuration and method, the situation in which the current obtained by adding the leakage current of the capacitor 16 is measured as the consumption current can be avoided. For this reason, in the inspection apparatus 1 and the inspection method, the current consumption of the substrate 100 in the standby state can be accurately measured, and the quality of the substrate 100 is determined based on the accurately measured current consumption. Can be sufficiently improved.

  On the other hand, the control unit 20 controls the second power supply unit 12 to supply the charging voltage Vc to the capacitor 16 while the static function test is being performed by the test unit 13. For this reason, in this inspection apparatus 1 and the inspection method, it is possible to charge the capacitor 16 during the execution of the static function inspection (until the end of the static function inspection).

  Subsequently, the control unit 20 stores the inspection result in the storage unit 18 when the static function inspection by the inspection unit 13 is completed. Further, the control unit 20 controls the second power supply unit 12 to stop the supply of the charging voltage Vc to the capacitor 16.

  Next, the control unit 20 controls the switching unit 17 to bring the capacitor 16 into a connected state (a state in which the capacitor 16 is connected between the probe 22 and the first power supply unit 11 and the reference potential). Subsequently, the control unit 20 outputs an instruction signal Sc for instructing the substrate 100 to execute an electrical process (for example, an arithmetic process). At this time, the arithmetic element mounted on the substrate 100 starts electrical processing according to the instruction signal Sc and outputs the processing result.

  Here, when the capacitor 16 is not connected, an instantaneous voltage drop occurs with the start of electrical processing by the arithmetic element of the substrate 100 as shown by a broken line in FIG. In this case, in many cases of this type of substrate 100, when a sudden voltage drop occurs, the electrical processing is interrupted by the reset function provided in the substrate 100 and the electrical processing is started again. There is a possibility that the electrical process is repeatedly started and interrupted, such that the electrical process is not executed (not completed). On the other hand, in the inspection apparatus 1 and the inspection method, the capacitor 16 is in a connected state at this point (at the start of electrical processing by the substrate 100). Therefore, as shown by the solid line in FIG. The power supply function compensates for a rapid voltage drop and equalizes the voltage. For this reason, it is possible to prevent the occurrence of inconvenience due to a rapid voltage drop.

  In the inspection apparatus 1 and the inspection method, the charging voltage Vc is supplied to the capacitor 16 to charge the capacitor 16 during execution of the static function inspection. As a result of completing the charging of the capacitor 16, it is possible to cause the substrate 100 to perform an electrical process immediately after the static function test is completed. For this reason, in this inspection apparatus 1 and the inspection method, it is possible to improve the inspection efficiency as compared with the conventional configuration and method in which the capacitor 16 is not charged during the execution of the static function inspection.

  Next, the control unit 20 controls the inspection unit 13 to determine whether the processing result output from the substrate 100 matches a predetermined value, and based on the determination result, the control unit 20 A test for determining pass / fail (an example of a dynamic function test) is executed.

  In this case, as described above, since the capacitor 16 is in the connected state at the time of starting the electrical processing by the substrate 100, the voltage is leveled, and thereby the electrical processing by the substrate 100 is reliably executed. Thus, it is possible to reliably execute the dynamic function inspection.

  As described above, in the inspection apparatus 1 and the inspection method, when the static function inspection is executed, the capacitor 16 is not connected between the probe 22 and the first power supply unit 11 and the reference potential. When the dynamic function test is performed, the connection state is maintained in which the capacitor 16 is connected between the probe 22 and the first power supply unit 11 and the reference potential. Therefore, when the static function test is executed, the operating voltage Vo is not supplied to the capacitor 16, and as a result, the physical quantity (electrical parameter used for the static function test) measured in the static function test is charged to the capacitor 16. It is possible to avoid the situation that fluctuates along with this. Therefore, according to the inspection device 1 and the inspection method, the static function inspection can be performed immediately after the start of the supply of the operating voltage Vo. As a result, the capacitor 16 is always maintained in the connected state and the capacitor 16 is charged. The inspection efficiency can be sufficiently improved as compared with the configuration and method in which the static function inspection cannot be executed until the fluctuation of the accompanying physical quantity becomes small. In addition, according to the inspection apparatus 1 and the inspection method, since the static function inspection is performed after the capacitor 16 is disconnected, the configuration and method for performing the static function inspection with the capacitor 16 connected are described. In contrast, it is possible to avoid a situation in which the current obtained by adding the leakage current of the capacitor 16 is measured as a physical quantity used for the static function test. Therefore, according to the inspection apparatus 1 and the inspection method, the physical quantity used for the static function inspection can be accurately measured. As a result, the function inspection for the substrate 100 can be performed accurately. Further, according to the inspection apparatus 1 and the inspection method, when the dynamic function inspection is performed, the capacitor 16 is maintained in the connected state, so that the substrate 100 can start the electrical process in the dynamic function inspection. The voltage drop of the operating voltage Vo can be compensated by the power supply function of the capacitor 16. Therefore, according to the inspection apparatus 1 and the inspection method, it is possible to reliably prevent a situation in which it is difficult to perform the dynamic function inspection due to difficulty in electrical processing by the substrate 100 due to the voltage drop of the operating voltage Vo. it can.

  In the inspection apparatus 1 and the inspection method, when the dynamic function inspection is performed after the static function inspection is performed, the capacitor 16 is supplied with the charging voltage Vc when the static function inspection is performed. Let it charge. In this case, in the configuration and method in which the capacitor 16 is not charged during the execution of the static function test, the capacitor 16 is not charged at the end of the static function test, and the dynamic function test is immediately performed in that state. When started (electrical processing is started on the substrate 100), the voltage cannot be leveled by compensating for the voltage drop accompanying the processing start of the substrate 100, so that the capacitor 16 is charged after the capacitor 16 is connected. Until completion, the dynamic function test cannot be started, and as a result, it is difficult to further improve the test efficiency. On the other hand, according to the inspection apparatus 1 and the inspection method, the capacitor 16 is charged during the execution of the static function inspection, so that the charging of the capacitor 16 is completed at the start of the electrical processing by the substrate 100. As a result, electrical processing can be immediately performed on the substrate 100 after the static function inspection is completed. Therefore, according to the inspection apparatus 1 and the inspection method, the inspection efficiency can be further improved as compared with the configuration and method in which the capacitor 16 is not charged during the execution of the static function inspection.

  Further, according to the inspection apparatus 1 and the inspection method, the pass / fail inspection of the substrate 100 based on the measured value of the physical quantity measured when the operation voltage Vo is supplied and the substrate 100 is in the standby state is performed by the static function inspection. This kind of static function test, which is generally performed as part of the function test, can be performed accurately and efficiently.

  In addition, according to the inspection apparatus 1 and the inspection method, the substrate 100 is inspected based on a processing result when the substrate 100 performs an electrical process according to the instruction signal Sc in a state where the operating voltage Vo is supplied. By executing as a dynamic function test, this type of dynamic function test, which is generally performed as part of the function test, can be executed accurately and efficiently.

  The configuration of the inspection apparatus and the inspection method is not limited to the above configuration and method. For example, the configuration and method for executing the dynamic function test after executing the static function test have been described above. On the contrary, the configuration and the method for executing the static function test after executing the dynamic function test are described. It can also be adopted.

  In addition, the configuration and method for charging the capacitor 16 by supplying the charging voltage Vc from the second power supply unit 12 while the static function test is being performed are described above, but the second power supply unit 12 is not provided ( In other words, a configuration and a method in which the charging voltage Vc is not supplied may be employed.

  Further, the static function test described above is an example, and various other static function tests can be executed. For example, a configuration and method for measuring a potential (physical quantity) at each point on the substrate 100 in a state in which operating power is supplied and performing a pass / fail inspection of the substrate 100 based on the measured value as a static function test. It can also be adopted.

  The dynamic function test described above is also an example, and various other dynamic function tests can be executed. For example, a substrate based on an output signal output by temporarily storing data in a memory in the substrate 100 during an electrical process performed by the substrate 100 and executing another electrical process using the data. It is also possible to adopt a configuration and method for executing 100 pass / fail tests as dynamic function tests.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 11 1st power supply part 12 2nd power supply part 13 Inspection part 16 Capacitor 17 Switching part 20 Control part 21 Probe unit 22 Probe 100 Substrate Sc Instruction signal Vc Charging voltage Vo Operation voltage

Claims (4)

  1. A first power supply unit that supplies operating power to the inspection target, and a function test on the inspection target based on an electrical parameter obtained from the inspection target while supplying the operating power to the inspection target An inspection device including an inspection unit to be executed,
    A capacitor connected between a connection terminal for supplying the operating power to the inspection object and the first power supply unit and a reference potential, a connection between the connection terminal and the first power supply unit, and the reference A switching unit that switches between a connected state in which the capacitor is connected to a potential and a non-connected state that is not connected, a control unit that controls the switching unit, and a second power supply unit that supplies charging power to the capacitor With
    The control unit controls the switching unit to maintain the capacitor in the non-connected state when the inspection unit executes a static function inspection as the function inspection, and a dynamic function as the function inspection. When the inspection unit executes the inspection, the switching unit is controlled to maintain the capacitor in the connected state, and the static function inspection when the dynamic function inspection is executed after the static function inspection is executed. An inspection device that controls the second power supply unit to supply the charging power to the unconnected capacitor to charge the capacitor while a functional function test is being performed .
  2. The inspection unit performs pass / fail inspection of the inspection object based on a measured value of a physical quantity as the electrical parameter measured when the operation power is supplied and the inspection object is in a standby state. inspection apparatus according to claim 1 Symbol placement run as a test.
  3. The inspection unit includes the electrical parameter when the inspection target performs the electrical process in response to an instruction signal instructing execution of the electrical process defined in advance in a state where the operating power is supplied. as processing inspection apparatus according to claim 1 or 2, wherein the execution result of the quality inspection of the inspection object based on a said dynamic functional test.
  4. An inspection method for performing a functional inspection on the inspection object based on an electrical parameter obtained from the inspection object in a state where operating power is supplied to the inspection object,
    When performing the static function test as the function test, a connection between the connection terminal for supplying the operating power to the test target and the first power supply unit for supplying the operating power and a reference potential When performing a dynamic function test as the function test while maintaining a non-connected state in which no capacitor is connected, between the connection terminal and the first power supply unit and the reference potential The second power supply unit is controlled while the static function test is performed when the dynamic function test is performed after the static function test is performed, while maintaining the connected state where the capacitor is connected. An inspection method of charging the capacitor by supplying charging power to the capacitor in the disconnected state .
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