JP6088153B2 - ブラシローラ - Google Patents
ブラシローラ Download PDFInfo
- Publication number
- JP6088153B2 JP6088153B2 JP2012096113A JP2012096113A JP6088153B2 JP 6088153 B2 JP6088153 B2 JP 6088153B2 JP 2012096113 A JP2012096113 A JP 2012096113A JP 2012096113 A JP2012096113 A JP 2012096113A JP 6088153 B2 JP6088153 B2 JP 6088153B2
- Authority
- JP
- Japan
- Prior art keywords
- roll body
- cleaned
- protrusion
- base end
- brush roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011148 porous material Substances 0.000 claims description 31
- 238000004140 cleaning Methods 0.000 claims description 29
- 230000002093 peripheral effect Effects 0.000 claims description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 206010016807 Fluid retention Diseases 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229920002554 vinyl polymer Polymers 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 150000001241 acetals Chemical class 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 229920002472 Starch Polymers 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000011354 acetal resin Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007127 saponification reaction Methods 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Landscapes
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
Claims (2)
- 湿潤状態で弾性を有する多孔質素材によって構成され、略円筒形状のロール体と複数の突起とを有し、前記突起は、前記ロール体の外周面上の基端部から頂部に向かって一体的に突出し、前記ロール体は、該ロール体の内径部に回転軸を挿通した状態で該回転軸に固定的に支持され、前記回転軸を中心として前記ロール体を回転させ、前記突起を薄肉平板状の被洗浄体の被洗浄面に回転接触させて該被洗浄面を洗浄するブラシローラであって、
前記突起の前記頂部は、前記基端部から離れた側に位置し、前記突起の外壁に囲まれた面であり、
前記ロール体の外周面からの前記複数の突起の各々の前記基端部における突出方向は、前記基端部の中央に位置する基端側基準点と前記頂部の中央に位置する先端側基準点とを結ぶ直線の方向であり、前記基端部に対して前記頂部が前記ロール体の回転方向後側にオフセットするように前記回転軸の中心と前記基端側基準点とを結ぶ基準直線に対して傾斜する
ことを特徴とするブラシローラ。 - 請求項1に記載のブラシローラであって、
前記突起の前記突出方向は、前記基準直線に対して5度〜60度の範囲で傾斜する
ことを特徴とするブラシローラ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012096113A JP6088153B2 (ja) | 2012-04-19 | 2012-04-19 | ブラシローラ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012096113A JP6088153B2 (ja) | 2012-04-19 | 2012-04-19 | ブラシローラ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013223817A JP2013223817A (ja) | 2013-10-31 |
JP6088153B2 true JP6088153B2 (ja) | 2017-03-01 |
Family
ID=49594294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012096113A Active JP6088153B2 (ja) | 2012-04-19 | 2012-04-19 | ブラシローラ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6088153B2 (ja) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5901399A (en) * | 1996-12-30 | 1999-05-11 | Intel Corporation | Flexible-leaf substrate edge cleaning apparatus |
JP2008119621A (ja) * | 2006-11-14 | 2008-05-29 | Matsushita Electric Ind Co Ltd | 洗浄用ローラブラシ |
KR101579572B1 (ko) * | 2008-06-30 | 2015-12-22 | 아이온 가부시키가이샤 | 세정용 스폰지 롤러 |
-
2012
- 2012-04-19 JP JP2012096113A patent/JP6088153B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2013223817A (ja) | 2013-10-31 |
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