JP6073491B2 - エアフローメータ - Google Patents
エアフローメータ Download PDFInfo
- Publication number
- JP6073491B2 JP6073491B2 JP2015540134A JP2015540134A JP6073491B2 JP 6073491 B2 JP6073491 B2 JP 6073491B2 JP 2015540134 A JP2015540134 A JP 2015540134A JP 2015540134 A JP2015540134 A JP 2015540134A JP 6073491 B2 JP6073491 B2 JP 6073491B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor element
- temperature sensor
- flow meter
- air flow
- thermocouples
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000002184 metal Substances 0.000 claims description 39
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000004020 conductor Substances 0.000 claims description 36
- 238000010438 heat treatment Methods 0.000 claims description 22
- 150000002739 metals Chemical class 0.000 claims description 5
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 17
- 239000000356 contaminant Substances 0.000 description 11
- 238000011156 evaluation Methods 0.000 description 8
- 239000003921 oil Substances 0.000 description 8
- 238000002485 combustion reaction Methods 0.000 description 7
- 238000011109 contamination Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 239000000446 fuel Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/6888—Thermoelectric elements, e.g. thermocouples, thermopiles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
Description
Claims (3)
- エアフローメータ(2)であって、微小電気機械式の構造で形成されたセンサエレメント(15)を備え、該センサエレメント(15)が、加熱エレメント(12)と少なくとも1つの温度センサエレメント(7,8)とを有し、該温度センサエレメント(7,8)が、サーモエレメント(23)として形成されており、該サーモエレメント(23)が、電流(I)により順次に通電される、直列に接続された複数の熱電対(29,31,32,33)から成り、該熱電対(29,31,32,33)が、それぞれ第1の金属製の導体(24)と、第2の金属製の導体(25)とから成り、両金属製の導体(24,25)が、それぞれ一方の端部で接続個所(28)によって互いに接続されており、前記第1の金属製の導体(24)と、前記第2の金属製の導体(25)とが、互いに異なる金属から形成されているエアフローメータ(2)において、
前記サーモエレメント(23)の一番目の熱電対(31)と最後の熱電対(32)の極性を、前記一番目の熱電対(31)と前記最後の熱電対(32)との間に配置されたその他の熱電対(33)の極性と反転させるように、前記複数の熱電対(29,31,32,33)が配置されている
ことを特徴とするエアフローメータ(2)。 - 前記センサエレメント(15)が、第1の温度センサエレメント(7)と第2の温度センサエレメント(8)とを有する、請求項1記載のエアフローメータ(2)。
- 前記第1の温度センサエレメント(7)は、前記加熱エレメント(12)に関して上流側に配置されており、前記第2の温度センサエレメント(8)は、前記加熱エレメント(12)に関して下流側に配置されている、請求項2記載のエアフローメータ(2)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012220019.3 | 2012-11-02 | ||
DE102012220019.3A DE102012220019B3 (de) | 2012-11-02 | 2012-11-02 | Luftmassenmesser |
PCT/EP2013/072852 WO2014068078A1 (de) | 2012-11-02 | 2013-11-01 | Luftmassenmesser |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015533421A JP2015533421A (ja) | 2015-11-24 |
JP6073491B2 true JP6073491B2 (ja) | 2017-02-01 |
Family
ID=49515377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015540134A Active JP6073491B2 (ja) | 2012-11-02 | 2013-11-01 | エアフローメータ |
Country Status (7)
Country | Link |
---|---|
US (1) | US9581481B2 (ja) |
EP (1) | EP2914938B1 (ja) |
JP (1) | JP6073491B2 (ja) |
KR (1) | KR102021643B1 (ja) |
CN (1) | CN104755886B (ja) |
DE (1) | DE102012220019B3 (ja) |
WO (1) | WO2014068078A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20160370809A1 (en) * | 2015-06-19 | 2016-12-22 | Hni Technologies Inc. | Fluid flow system |
US10757973B2 (en) | 2016-07-25 | 2020-09-01 | Fontem Holdings 1 B.V. | Electronic cigarette with mass air flow sensor |
CN108106680B (zh) * | 2017-12-07 | 2020-02-07 | 北京空间技术研制试验中心 | 一种用于确定压气装置的抽气流率的方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58139481A (ja) * | 1982-02-13 | 1983-08-18 | Showa Denko Kk | サ−モパイル |
US5393351A (en) * | 1993-01-13 | 1995-02-28 | The United States Of America As Represented By The Secretary Of Commerce | Multilayer film multijunction thermal converters |
DE4407209C2 (de) * | 1994-03-04 | 1996-10-17 | Bosch Gmbh Robert | Vorrichtung zur Messung der Masse eines in einer Leitung strömenden Mediums |
JP3226715B2 (ja) * | 1994-04-28 | 2001-11-05 | 株式会社半導体エネルギー研究所 | 計測装置 |
CN1077283C (zh) | 1996-08-23 | 2002-01-02 | 李韫言 | 一种微细加工的热式流量传感器及其制造方法 |
CN2329946Y (zh) * | 1998-06-12 | 1999-07-21 | 清华同方股份有限公司 | 变风量末端装置流量传感器 |
JP3589083B2 (ja) * | 1999-04-06 | 2004-11-17 | オムロン株式会社 | 感熱式フロ−センサ |
JP3399425B2 (ja) * | 1999-11-19 | 2003-04-21 | 株式会社村田製作所 | サーモパイル型熱電センサ |
JP4089152B2 (ja) | 2000-06-23 | 2008-05-28 | オムロン株式会社 | センサ用発熱装置、センサ及び加速度センサ |
DE10217884B4 (de) | 2002-04-22 | 2004-08-05 | Siemens Ag | Vorrichtung zur Messung der in einer Leitung strömenden Luftmasse |
CN101738230B (zh) * | 2010-01-06 | 2011-04-20 | 哈尔滨工程大学 | 低速热流体流量计 |
GB2480881B (en) * | 2010-06-04 | 2012-10-24 | Servomex Group Ltd | Thermal fluid flow apparatus |
-
2012
- 2012-11-02 DE DE102012220019.3A patent/DE102012220019B3/de not_active Expired - Fee Related
-
2013
- 2013-11-01 WO PCT/EP2013/072852 patent/WO2014068078A1/de active Application Filing
- 2013-11-01 JP JP2015540134A patent/JP6073491B2/ja active Active
- 2013-11-01 KR KR1020157014081A patent/KR102021643B1/ko active IP Right Grant
- 2013-11-01 US US14/440,302 patent/US9581481B2/en active Active
- 2013-11-01 CN CN201380057067.2A patent/CN104755886B/zh active Active
- 2013-11-01 EP EP13785470.9A patent/EP2914938B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
JP2015533421A (ja) | 2015-11-24 |
US9581481B2 (en) | 2017-02-28 |
EP2914938A1 (de) | 2015-09-09 |
KR102021643B1 (ko) | 2019-09-16 |
CN104755886B (zh) | 2017-10-13 |
DE102012220019B3 (de) | 2014-02-13 |
EP2914938B1 (de) | 2017-09-13 |
US20150285665A1 (en) | 2015-10-08 |
KR20150080584A (ko) | 2015-07-09 |
WO2014068078A1 (de) | 2014-05-08 |
CN104755886A (zh) | 2015-07-01 |
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