JP6068461B2 - 電子ビーム装置 - Google Patents
電子ビーム装置 Download PDFInfo
- Publication number
- JP6068461B2 JP6068461B2 JP2014517678A JP2014517678A JP6068461B2 JP 6068461 B2 JP6068461 B2 JP 6068461B2 JP 2014517678 A JP2014517678 A JP 2014517678A JP 2014517678 A JP2014517678 A JP 2014517678A JP 6068461 B2 JP6068461 B2 JP 6068461B2
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- JP
- Japan
- Prior art keywords
- cathode housing
- electron beam
- lid
- beam device
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010894 electron beam technology Methods 0.000 title claims description 17
- 238000000313 electron-beam-induced deposition Methods 0.000 description 11
- 239000000725 suspension Substances 0.000 description 9
- 230000005684 electric field Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000001954 sterilising effect Effects 0.000 description 4
- 238000004659 sterilization and disinfection Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/02—Irradiation devices having no beam-forming means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
Description
104 出口窓
106 電気接続部
108 セラミック円板
110 円筒部材
112 カソードハウジング
113 半円環状の外殻
114 制御格子
115 連結点
116 長手自由縁
117 長手自由縁
118 半球形状の蓋
119 開口
120 フィラメント
122 近位蓋
124 接続部
126 膨出部
128 板
130 玉状部
Claims (7)
- 出口窓(104)を備える棒状本体部(102)と、長手方向両端が前記棒状本体部(102)の内部に配置された棒状カソードハウジング(112)と、前記カソードハウジングの内部に配置された1つまたは複数のフィラメント(120)とを備え、前記カソードハウジング(112)は、その一端から他端へと延びると共に前記出口窓の方に開放された半円環状の外殻をさらに備え、前記半円環状の外殻の開放側は、前記出口窓の方を向く1つまたは複数の開口(114)を提供する制御格子で覆われており、前記1つまたは複数の開口(114)が、前記フィラメントによって発生された電子を前記出口窓(104)へと通過させるように構成されており、前記制御格子に電位を印加することで電子の放出を制御することができる、密封された電子ビーム装置であって、
前記カソードハウジング(112)の少なくとも前記一端は、半球形状の蓋(118)の開口(119)に挿入されており、前記カソードハウジング(112)の前記半円環状の外殻及び前記制御格子のうち少なくとも一方の長手両自由縁が、前記カソードハウジング(112)の内側を向くように湾曲されることにより、膨出部が形成されていることを特徴とする密封された電子ビーム装置。 - 前記半球形状の蓋は半球形部と端部とを備え、前記端部は前記開口(119)を定める自由縁を備える、請求項1に記載の密封された電子ビーム装置。
- 前記自由縁は膨出部を備える、請求項2に記載の密封された電子ビーム装置。
- 前記開口(119)の上半分が板によって覆われる、請求項1から3のいずれか一項に記載の密封された電子ビーム装置。
- 前記棒状本体部(102)の長手方向に垂直な断面において、前記半球形状の蓋の最大寸法が、前記棒状カソードハウジングの最大寸法より大きい、請求項1から4のいずれか一項に記載の密封された電子ビーム装置。
- 前記カソードハウジングの前記他端に、開口を定める自由縁を備える端部と円筒部とを含む近位蓋を備える、請求項1から5のいずれか一項に記載の密封された電子ビーム装置。
- 前記カソードハウジングの前記他端は、前記近位蓋の前記開口内へと延び入る、請求項6に記載の密封された電子ビーム装置。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE1100517 | 2011-07-04 | ||
SE1100517-0 | 2011-07-04 | ||
US201161525118P | 2011-08-18 | 2011-08-18 | |
US61/525,118 | 2011-08-18 | ||
PCT/EP2012/062451 WO2013004563A1 (en) | 2011-07-04 | 2012-06-27 | Electron-beam device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014523531A JP2014523531A (ja) | 2014-09-11 |
JP6068461B2 true JP6068461B2 (ja) | 2017-01-25 |
Family
ID=47436539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014517678A Active JP6068461B2 (ja) | 2011-07-04 | 2012-06-27 | 電子ビーム装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9076633B2 (ja) |
EP (1) | EP2729937B1 (ja) |
JP (1) | JP6068461B2 (ja) |
CN (1) | CN103620695B (ja) |
WO (1) | WO2013004563A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103608870B (zh) | 2011-07-04 | 2016-08-17 | 利乐拉瓦尔集团及财务有限公司 | 电子束装置的阴极壳体悬置机构 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3144552A (en) | 1960-08-24 | 1964-08-11 | Varian Associates | Apparatus for the iradiation of materials with a pulsed strip beam of electrons |
US3440466A (en) * | 1965-09-30 | 1969-04-22 | Ford Motor Co | Window support and heat sink for electron-discharge device |
US3702412A (en) * | 1971-06-16 | 1972-11-07 | Energy Sciences Inc | Apparatus for and method of producing an energetic electron curtain |
US3769600A (en) * | 1972-03-24 | 1973-10-30 | Energy Sciences Inc | Method of and apparatus for producing energetic charged particle extended dimension beam curtains and pulse producing structures therefor |
US3863163A (en) | 1973-04-20 | 1975-01-28 | Sherman R Farrell | Broad beam electron gun |
US4008413A (en) * | 1975-03-03 | 1977-02-15 | Hughes Aircraft Company | Compact high voltage feedthrough for gas discharge devices |
US4379977A (en) * | 1979-07-31 | 1983-04-12 | State Of Israel, Rafael Armament Development Authority, Ministry Of Defense | Space-discharge electronic device particularly useful as a flash X-ray tube |
DE3070700D1 (en) * | 1980-08-08 | 1985-07-04 | Battelle Development Corp | Cylindrical magnetron sputtering cathode |
US7466799B2 (en) * | 2003-04-09 | 2008-12-16 | Varian Medical Systems, Inc. | X-ray tube having an internal radiation shield |
US7148613B2 (en) * | 2004-04-13 | 2006-12-12 | Valence Corporation | Source for energetic electrons |
EP1829428A4 (en) * | 2004-12-16 | 2010-09-22 | Telegen Corp | LIGHT EMISSIONING APPARATUS AND ASSOCIATED METHOD OF MANUFACTURING THEREOF |
SE0802101A2 (sv) * | 2008-10-07 | 2010-07-20 | Tetra Laval Holdings & Finance | Omkopplingsbar anordning för elektronstrålesterilisering |
SE0802102A2 (sv) | 2008-10-07 | 2010-07-20 | Tetra Laval Holdings & Finance | Styrmetod för en anordning för elektronstrålesterilisering och en anordning för utförande av nämnda metod |
US9202661B2 (en) * | 2011-07-04 | 2015-12-01 | Tetra Laval Holdings & Finance S.A. | Electron beam device for shaping an electric field and a method of manufacturing said electron beam device the same |
-
2012
- 2012-06-27 JP JP2014517678A patent/JP6068461B2/ja active Active
- 2012-06-27 EP EP12732615.5A patent/EP2729937B1/en active Active
- 2012-06-27 CN CN201280030590.1A patent/CN103620695B/zh active Active
- 2012-06-27 US US14/126,004 patent/US9076633B2/en active Active
- 2012-06-27 WO PCT/EP2012/062451 patent/WO2013004563A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
EP2729937A1 (en) | 2014-05-14 |
EP2729937B1 (en) | 2018-08-22 |
US20140117838A1 (en) | 2014-05-01 |
JP2014523531A (ja) | 2014-09-11 |
US9076633B2 (en) | 2015-07-07 |
CN103620695A (zh) | 2014-03-05 |
CN103620695B (zh) | 2017-08-01 |
WO2013004563A1 (en) | 2013-01-10 |
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