JP6031857B2 - Radiation measurement method - Google Patents
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- JP6031857B2 JP6031857B2 JP2012155671A JP2012155671A JP6031857B2 JP 6031857 B2 JP6031857 B2 JP 6031857B2 JP 2012155671 A JP2012155671 A JP 2012155671A JP 2012155671 A JP2012155671 A JP 2012155671A JP 6031857 B2 JP6031857 B2 JP 6031857B2
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- 230000005855 radiation Effects 0.000 title claims description 51
- 238000000691 measurement method Methods 0.000 title claims description 6
- 238000005259 measurement Methods 0.000 claims description 62
- 230000035945 sensitivity Effects 0.000 claims description 48
- 238000012937 correction Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 8
- 230000005250 beta ray Effects 0.000 claims 1
- 230000005251 gamma ray Effects 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 229910013290 LiNiO 2 Inorganic materials 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000011088 calibration curve Methods 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910014689 LiMnO Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910015643 LiMn 2 O 4 Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000284 extract Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical group [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- QHGJSLXSVXVKHZ-UHFFFAOYSA-N dilithium;dioxido(dioxo)manganese Chemical compound [Li+].[Li+].[O-][Mn]([O-])(=O)=O QHGJSLXSVXVKHZ-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000001932 seasonal effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Description
本発明は放射線（例えばＸ線、ベータ線、ガンマ線、赤外線等）を用いた放射線測定方法に関し、特に放射線源と放射線測定器の間に介在する大気の影響による被測定物（以下、試料という）の坪量の測定精度の改善を図った放射線測定方法に関するものである。 The present invention relates to a radiation measurement method using radiation (for example, X-rays, beta rays, gamma rays, infrared rays, etc.), and in particular, an object to be measured (hereinafter referred to as a sample) due to the influence of the atmosphere interposed between the radiation source and the radiation measurement device. It is related with the radiation measuring method which aimed at the improvement of the measurement accuracy of the basic weight.
放射線が物質層を通過すると，電離作用や励起作用等によって次第にエネルギ―を失って減衰し，更にこの様な非弾性散乱を多数回受けて進行方向が変化する。従って試料の物理量（例えば坪量）が増すに伴い透過する放射線の数は減少する。この様な原理を応用し，シ―ト状の種々の試料の物理量を測定する装置が知られている。 When radiation passes through the material layer, it gradually loses energy and attenuates due to ionization and excitation, and the traveling direction is changed by receiving such inelastic scattering many times. Accordingly, as the physical quantity (for example, basis weight) of the sample increases, the number of transmitted radiation decreases. Devices that measure the physical quantities of various sheet-like samples by applying such principles are known.
放射線を用いた例えば坪量測定では、放射線源と検出器の間にシート状の試料を置き、その透過率から例えば放射線の強度を検出して信号分布を得るのが一般的である。このため、放射線源と検出器の間に存在する大気の変化は検出画像（検出精度）に直接影響する。即ち、気温や気圧が変化して密度変化が起きるとそれがそのまま測定誤差につながることになる。 In the basis weight measurement using radiation, for example, it is common to place a sheet-like sample between a radiation source and a detector and detect the intensity of the radiation from the transmittance to obtain a signal distribution. For this reason, a change in the atmosphere existing between the radiation source and the detector directly affects the detected image (detection accuracy). That is, if a change in density occurs due to changes in temperature or pressure, this will directly lead to measurement errors.
放射線源を安定駆動するフィードバック制御や温度制御による放射線量のモニタが行われている。温度や気圧などの変動を監視して測定系にフィードバックし測定対象物を精度良く測定する先行技術として、特開平４−１５８２０９や特開２００１−２２７９１８に開示されたものがある。 The radiation dose is monitored by feedback control and temperature control for stably driving the radiation source. As prior art for monitoring fluctuations in temperature, pressure, etc., and feeding back to a measurement system to measure a measurement object with high accuracy, there are those disclosed in Japanese Patent Laid-Open Nos. 4-158209 and 2001-227918.
図３はＸ線、β線、γ線、赤外線などの放射線を用いた透過特性によりシート状の試料の坪量（厚さ）や塗工量測定を行うインライン測定器の一例を示す斜視図である。
シート状の試料１は右から左方向へ一定速度で流れており、この試料を略直行するように放射線源ヘッド（下側・・・以下線源という）２と電離箱等の検出器ヘッド（上側・・・以下検出器という）３が一対となって試料１を走査する形態で測定を行っている。
FIG. 3 is a perspective view showing an example of an in-line measuring instrument that measures the basis weight (thickness) and coating amount of a sheet-like sample by transmission characteristics using radiation such as X-rays, β-rays, γ-rays, and infrared rays. is there.
The sheet-like sample 1 flows at a constant speed from the right to the left, and a radiation source head (lower side: hereinafter referred to as a radiation source) 2 and a detector head such as an ionization chamber (to be referred to as an ionization chamber) Measurement is performed in a form in which the sample 1 is scanned as a pair.
夫々のヘッドは門型と呼ばれるＯ型フレーム４に支持され、対向する上下ヘッドの位置関係を保持して上下夫々駆動される。夫々のヘッド２，３は、試料の端部付近で折り返しを繰り返してジグザグに測定を繰り返す。更に夫々のヘッドはＯ型フレーム４の右側に待避位置Ａが設けられている。 Each head is supported by an O-type frame 4 called a gate type, and is driven up and down while maintaining the positional relationship of the opposing upper and lower heads. Each of the heads 2 and 3 repeats the measurement in a zigzag manner by repeatedly folding around the end of the sample. Further, each head is provided with a retracting position A on the right side of the O-shaped frame 4.
これは、試料をセットする場合や放射線源ヘッド２や検出器ヘッド３のメンテナンス、校正などの際に試料の無い位置に移動する必要があるためである。厚さ測定においては、予め厚さ（坪量）と材質が既知の複数の標準サンプルを測定しておき、その坪量に対する透過特性として検量線を求めている。 This is because it is necessary to move to a position where there is no sample when the sample is set or when the radiation source head 2 or the detector head 3 is maintained or calibrated. In the thickness measurement, a plurality of standard samples whose thickness (basis weight) and material are known are measured in advance, and a calibration curve is obtained as a transmission characteristic with respect to the basis weight.
その検量線と試料の透過出力値から逆引きして坪量（厚さ）を換算する。塗工量については図３に示す厚さ測定装置５を２本乃至３本生産ライン内に設置し、塗工工程前後にその透過特性を測定し、夫々の差分を求めることで塗工量を知ることが出来る。 The basis weight (thickness) is converted by reversely drawing from the calibration curve and the transmission output value of the sample. About the coating amount, the thickness measuring device 5 shown in FIG. 3 is installed in two to three production lines, the transmission characteristics are measured before and after the coating process, and the difference is obtained by determining the difference between the coating amounts. I can know.
図３に示すような方式では高速に流れる試料１に対してヘッド２、３が幅方向に走査するため、ジグザグのライン上を部分的にしか測定出来ない。このため近年では全面測定の要望もある。 In the method as shown in FIG. 3, since the heads 2 and 3 scan in the width direction with respect to the sample 1 flowing at high speed, it is possible to measure only partly on the zigzag line. For this reason, there is also a demand for full-scale measurement in recent years.
図４は複数の検出素子（図示省略）が狭ピッチで列状に隙間無く並んだライン型検出器３ａを設置し、所定の距離はなれた放射線源から放射状に放射線を出射させて全面を測定している状態を示す斜視図である。２ａは放射線源、３ａは放射線測定器（ラインカメラ）である。
ここで、図３に示す走査型測定器であっても、図４に示す全面測定型測定器であっても校正の際には試料１を一旦取り除いて行わなければならない。
FIG. 4 shows a line-type detector 3a in which a plurality of detection elements (not shown) are arranged in a line at a narrow pitch without gaps, and radiation is emitted radially from a radiation source separated by a predetermined distance to measure the entire surface. FIG. 2a is a radiation source, and 3a is a radiation measuring device (line camera).
Here, even if it is a scanning type measuring device shown in FIG. 3 or the whole surface measuring type measuring device shown in FIG. 4, the sample 1 must be once removed at the time of calibration.
即ち、経時変化による線源の劣化、検出器の感度変化、大気の温度・湿度変化（生産ライン内の空調が悪く季節的または朝晩などの周期的な変動）に対して校正を行う場合は、試料１が無い状態（＝大気）を測定して校正を行う。 In other words, when calibrating against radiation source deterioration, detector sensitivity change, atmospheric temperature / humidity change (periodic fluctuations such as seasonal or morning / night due to poor air conditioning in the production line), Measure and calibrate in the absence of sample 1 (= atmosphere).
また、ある程度長期的には標準サンプルを測定して検量線を求め直すことも行われる。図３に示す走査形測定器では、従来リアルタイムにセンサヘッド間の温度を測定して大気温度の補償を行なうと共に、数十分乃至数時間単位程度の間隔で大気の測定を行ない、この値を用いて測定値の補償演算を行っている。 In addition, it is also possible to re-determine a calibration curve by measuring a standard sample for a certain long term. In the conventional scanning type measuring device shown in FIG. 3, the temperature between the sensor heads is measured in real time to compensate for the atmospheric temperature, and the atmosphere is measured at intervals of several tens of minutes to several hours. To compensate the measured values.
ところで、短期−中期にかけての測定精度に一番影響を与える大気の変化に対して、数時間おきに退避・校正動作を行う事で、通常測定では、大きな問題は無い。但し、工場のコールドスタート時や台風通過等による短時間での大気変動が生じる場合には、数時間単位での校正動作では精度維持が難しい場合がある。 By the way, in the normal measurement, there is no major problem by performing the evacuation / calibration operation every several hours with respect to the atmospheric change that most affects the measurement accuracy from the short-term to the medium-term. However, when a short-term atmospheric change occurs due to a cold start of a factory or a typhoon passing, it may be difficult to maintain accuracy with a calibration operation in units of several hours.
校正動作の間隔を短くする事は解決策の一つであるが、退避位置での校正動作中は試料の測定ができなくなるというデメリットが存在する。また図４に示すような全面測定型の場合には、試料から外れるまで装置を引き出す必要があるため、装置自体の幅（Ｗ）に対して２．５倍程度の幅が必要となり、また、退避動作そのものが行い難いと言う状況がある。また、大気の変動が測定値に与える影響は、試料の材質や坪量の変化に伴って変化する性質のものである事と合わせ、このような測定系では試料の坪量に対する大気坪量の割合が大きく、大気変動による坪量変動を単純な係数で補償しても誤差を少なくすることが難しい。 Shortening the interval of the calibration operation is one of the solutions, but has a demerit that the sample cannot be measured during the calibration operation at the retracted position. In the case of a full-surface measurement type as shown in FIG. 4, it is necessary to pull out the device until it is detached from the sample. There is a situation where the evacuation operation itself is difficult to perform. In addition, the effect of atmospheric fluctuations on the measured value is combined with the nature of the sample that changes with changes in the material and basis weight of the sample. The ratio is large, and it is difficult to reduce the error even if the basis weight variation due to atmospheric variation is compensated with a simple coefficient.
比較的測定値に影響を与え易い温度変化を小さくするために測定ギャップの大気に恒温化した空気を吹き付ける等の対策も行なわれているが、空気消費が多く恒温化のためのヒータ電力が掛かる等の問題がある。 Measures such as blowing constant temperature air to the measurement gap atmosphere to reduce the temperature change that is relatively easy to affect the measured values are taken, but air consumption is high and heater power for constant temperature is applied. There are problems such as.
したがって本発明の目的は、温度、湿度、気圧などの大気変動を由来として生じる測定信号の変動をリアルタイムに補償することにより、坪量（厚さ）測定の精度安定性を向上させることを目的とする。 Accordingly, an object of the present invention is to improve the accuracy and stability of the basis weight (thickness) measurement by compensating in real time for the fluctuation of the measurement signal caused by atmospheric fluctuations such as temperature, humidity, and atmospheric pressure. To do.
このような課題を達成するために、本発明のうち請求項１記載の放射線測定方法の発明は、
放射線源から放射され、試料を透過してくる放射線を放射線測定器により検出し、大気変動による検出感度の補償を行って坪量の測定を行う放射線測定方法において、大気変動による検出感度の補償を行うに際しては、測定試料の種類と坪量に合わせた感度補正を行うようにしたことを特徴とする。
In order to achieve such a problem, the invention of the radiation measuring method according to claim 1 of the present invention is:
In a radiation measurement method that measures the basis weight by detecting the radiation emitted from the radiation source and passing through the sample with a radiation measuring instrument and compensating the detection sensitivity due to atmospheric fluctuations, the detection sensitivity due to atmospheric fluctuations is compensated. When performing, sensitivity correction according to the kind and basis weight of the measurement sample is performed.
請求項２においては、請求項１に記載の放射線測定方法において、
前記大気変動による検出感度の補償を行うに際しては、大気変動に対する測定試料の補償感度を既知の他の試料に対する感度を介在させることにより、大気変動に対して感度補正された坪量補正を行うことを特徴とする。
In Claim 2, in the radiation measuring method of Claim 1,
When compensating the detection sensitivity due to atmospheric fluctuation, the basis weight corrected for sensitivity to atmospheric fluctuation is corrected by interposing the sensitivity of the measurement sample against atmospheric fluctuation with the sensitivity to other known samples. It is characterized by.
請求項３においては、請求項２に記載の放射線測定方法において、
既知の他の試料を用いた感度補正には、下記の式を用いることを特徴とする。
感度補正値＝測定試料／大気＝（測定試料／既知の他の試料）×（既知の他の試料）／大気）
In Claim 3, In the radiation measuring method of Claim 2,
The sensitivity correction using another known sample is characterized by using the following equation.
Sensitivity correction value = measurement sample / atmosphere = (measurement sample / known other sample) × (known other sample) / air)
請求項４においては、請求項１〜３のいずれかに記載の放射線測定方法において、
前記大気変動の検出は、同一線源による大気層の測定信号または、大気の密度、重さを測定または推定できる他の検出器からの測定値を用いて行うことを特徴とする。
In Claim 4, In the radiation measuring method in any one of Claims 1-3,
The detection of the atmospheric variation is performed using a measurement signal of the atmospheric layer from the same radiation source or a measurement value from another detector capable of measuring or estimating the density and weight of the atmosphere.
請求項５においては、請求項１〜４のいずれかに記載の放射線測定方法において、
放射線測定器は、複数の素子が列状に形成されていることを特徴とする。
In Claim 5, in the radiation measuring method in any one of Claims 1-4,
The radiation measuring instrument is characterized in that a plurality of elements are formed in a row.
請求項６においては、請求項１〜５のいずれかに記載の放射線測定方法において、
前記放射線源は、Ｘ線、β線、γ線、赤外線、マイクロ波、可視光線、紫外線、超音波のいずれかを用いることを特徴とする。
In Claim 6, in the radiation measuring method in any one of Claims 1-5,
As the radiation source, any one of X-rays, β-rays, γ-rays, infrared rays, microwaves, visible rays, ultraviolet rays, and ultrasonic waves is used.
本発明によれば以下のような効果がある。
未知な測定試料であっても、大気の坪量変化による感度補正を適切に行うことができるので、坪量測定値の測定精度を向上させることができる。
また、測定試料の坪量が変化した場合にも感度補正を行うことで適切な補正値を与えることができるので、坪量測定値の測定精度を向上させることができる。
The present invention has the following effects.
Even an unknown measurement sample can appropriately perform sensitivity correction due to a change in the basis weight of the atmosphere, so that the measurement accuracy of the basis weight measurement value can be improved.
Further, even when the basis weight of the measurement sample changes, an appropriate correction value can be given by performing sensitivity correction, so that the measurement accuracy of the basis weight measurement value can be improved.
以下本発明を、図面を用いて詳細に説明する。
一般に、大気の坪量変動に対して、測定対象の試料の種類と坪量によって補償感度が異なる。各測定試料と坪量による感度比について図１（ａ，ｂ）を用いて簡単に説明する。
Hereinafter, the present invention will be described in detail with reference to the drawings.
In general, the compensation sensitivity varies depending on the type of the sample to be measured and the basis weight with respect to the basis weight variation of the atmosphere. The sensitivity ratio according to each measurement sample and basis weight will be briefly described with reference to FIGS.
図１（ａ）は発明者らがシミュレーションにより作成した、測定試料の坪量の違いによる大気に対する感度変化を示すもので、縦軸は大気に対する感度比、横軸は試料の坪量（ｇ／ｍ3）であり、イで示す曲線はアルミ （Ａｌ）、ロで示す曲線はニッケル酸リチウム（ＬｉＮｉＯ2）、ハで示す曲線はマンガン酸リチウム（ＬｉＭｎＯ4）である。
図において、例えば４００ｇ／ｍ3の坪量を持つＬｉＭｎ2Ｏ4では大気の変動に対する測定試料の感度比は１．２程度であるのに対し、ＬｉＮｉＯ2では０．１５程度の感度の感度比になっている。
FIG. 1A shows changes in sensitivity to the atmosphere due to the difference in basis weight of the measurement sample created by the inventors. The vertical axis represents the sensitivity ratio to the atmosphere, and the horizontal axis represents the basis weight of the sample (g / g). m 3 ), the curve indicated by a is aluminum (Al), the curve indicated by b is lithium nickelate (LiNiO 2 ), and the curve indicated by c is lithium manganate (LiMnO 4 ).
In the figure, for example, LiMn 2 O 4 having a basis weight of 400 g / m 3 has a sensitivity ratio of the measurement sample with respect to atmospheric fluctuations of about 1.2, whereas LiNiO 2 has a sensitivity ratio of about 0.15. It has become.
図１（ｂ）は既知の１次試料（アルミ）に対する他の試料（ＬｉＭｎ2Ｏ4及びＬｉＮｉＯ2）の測定試料感度比を現すものであり、この関係は図１（ａ）に示すＡｌを基準として計算することによって求めている。
この補償感度を下記１式の様に組み合わせることで、組成が未知である測定試料であっても、大気変動に対する測定試料の補償感度を求める事ができる。
測定試料の補償感度値＝測定試料／大気＝
（測定試料／既知の他の試料）×（既知の他の試料）／大気）・・・式１
上記式１の右辺は各々の測定値または推定値である。
FIG. 1B shows the measured sample sensitivity ratio of other samples (LiMn 2 O 4 and LiNiO 2 ) to the known primary sample (aluminum), and this relationship is the same as the Al shown in FIG. It is obtained by calculating as a standard.
By combining these compensation sensitivities as shown in the following equation 1, the compensation sensitivity of the measurement sample against atmospheric fluctuations can be obtained even for a measurement sample whose composition is unknown.
Compensation sensitivity value of measurement sample = measurement sample / atmosphere =
(Measurement sample / other known sample) × (known other sample) / air) Equation 1
The right side of the above formula 1 is each measured value or estimated value.
図２（ａ〜ｃ）は大気による坪量変化と測定された測定試料の坪量測定値に対して上記
の補償感度を用いて大気坪量感度による変化分を減算するためのフローチャートである。 図２（ａ）は試料の坪量を測定した信号処理の流れ、
図２（ａ〜ｃ）は大気による坪量変化と測定された測定試料の坪量測定値に対して上記
の補償感度を用いて大気坪量感度による変化分を減算するためのフローチャートである。 図２（ａ）は試料の坪量を測定した信号処理の流れ、
図２（ｂ）は坪量の大気変動による感度補正を行うための信号処理の流れ、
図２（ｃ）は大気と測定試料の感度比を演算するための流れを示している。
FIGS. 2A to 2C are flowcharts for subtracting the change due to the atmospheric basis weight sensitivity using the above compensation sensitivity to the basis weight change due to the atmosphere and the measured basis weight measurement value of the measurement sample. FIG. 2A shows a signal processing flow in which the basis weight of the sample is measured.
FIGS. 2A to 2C are flowcharts for subtracting the change due to the atmospheric basis weight sensitivity using the above compensation sensitivity to the basis weight change due to the atmosphere and the measured basis weight measurement value of the measurement sample. FIG. 2A shows a signal processing flow in which the basis weight of the sample is measured.
FIG. 2 (b) is a signal processing flow for performing sensitivity correction due to atmospheric variations in basis weight.
FIG. 2C shows a flow for calculating the sensitivity ratio between the atmosphere and the measurement sample.
図２（ａ、ｂ）は坪量測定を開始した時点で同時に進行する。（ｃ）については、予め大気と測定試料の感度比を求めておき、試料種類と試料坪量に対応する感度比を適宜用いる様にすれば使い易い。
図２（ａ）において、
Ｓｔｅｐ１：試料を透過した放射線の信号を測定する。
Ｓｔｅｐ２：検量線を用い、
Ｓｔｅｐ３：厚さ（坪量）を求める。
2A and 2B proceed simultaneously at the time when the basis weight measurement is started. About (c), it is easy to use if the sensitivity ratio between the atmosphere and the measurement sample is obtained in advance, and the sensitivity ratio corresponding to the sample type and sample basis weight is appropriately used.
In FIG. 2 (a),
Step 1: A signal of radiation transmitted through the sample is measured.
Using calibration curve,: Step 2
Step 3: Determine thickness (basis weight).
図２（ｂ）において、
Ｓｔｅｐ１’：大気変動を測定し、
Ｓｔｅｐ２’：大気変動を坪量化する。
In FIG. 2B,
Step 1 ': Measure atmospheric fluctuation,
Step 2 ′: The atmospheric fluctuation is made basis weight.
図２（ｃ）において、
Ｓｔｅｐ１”：既知他の試料（（イ）アルミ、（ロ）ＬｉＮｉＯ2、（ハ）ＬｉＭｎＯ4を例として）と大気の感度比を抽出する（図１ａ参照）。ここで、「既知」とは坪量と材質を含んだ表現である。
Ｓｔｅｐ２”：既知他の試料（アルミ）と測定試料の感度比を抽出する（図１ｂ参照）。
Ｓｔｅｐ３”：大気と測定試料の感度比を上記１式により演算する。
In FIG. 2C,
Step 1 ″: Extracts the sensitivity ratio of other known samples ((a) aluminum, (b) LiNiO 2 , (c) LiMnO 4 as an example) and the atmosphere (see FIG. 1a). This expression includes the basis weight and material.
Step 2 ″: Extracts the sensitivity ratio between the other known sample (aluminum) and the measurement sample (see FIG. 1b).
Step 3 ″: The sensitivity ratio between the atmosphere and the measurement sample is calculated according to the above formula 1.
図２（ｂ）に戻り、
Ｓｔｅｐ３’：図２（ａ）のステップ３で計算した坪量と図２（ｃ）のＳｔｅｐ３”で
演算した大気と測定試料の感度比を入力し、測定試料の補償量を演算する。
次に、図２（ａ）に戻り、
Ｓｔｅｐ４：Ｓｔｅｐ３で計算した試料の坪量から図２（ｂ）のステップ３’で計算し
た測定試料の変動量を入力し大気坪量感度減算を行う。
Ｓｔｅｐ５：補正後の坪量を求め、
Ｓｔｅｐ６：補正された坪量を測定値として出力する。
Returning to FIG.
Step 3 ′: The basis weight calculated in Step 3 of FIG. 2A and the sensitivity ratio between the atmosphere and the measurement sample calculated in Step 3 ″ of FIG. 2C are input, and the compensation amount of the measurement sample is calculated.
Next, returning to FIG.
Step 4: The variation amount of the measurement sample calculated in Step 3 ′ of FIG. 2B is input from the basis weight of the sample calculated in Step 3, and the atmospheric basis weight sensitivity is subtracted.
Step 5: Obtain the basis weight after correction,
Step 6: The corrected basis weight is output as a measured value.
上記の測定／演算を行う際、大気の坪量測定は、被測定物を放射線の照射経路に含まない素子での変動を採取しても良いし、温湿度・気圧の測定値から導出する等、適宜に求めたものでも良い。 When performing the above measurement / calculation, the basis weight measurement of the atmosphere may be performed by collecting fluctuations in elements that do not include the object to be measured in the radiation irradiation path, or derived from measured values of temperature, humidity, and atmospheric pressure. It may be obtained appropriately.
本発明によれば、未知な測定試料であっても、大気の坪量変化による感度補正を適切に行うことができるので、坪量測定値の測定精度を向上させることができる。
また、測定試料の坪量が変化した場合にも感度補正を行うことで適切な補正値を与えることができるので、坪量測定値の測定精度を向上する。
According to the present invention, even if it is an unknown measurement sample, sensitivity correction due to a change in the basis weight of the atmosphere can be appropriately performed, so that the measurement accuracy of the basis weight measurement value can be improved.
Moreover, even when the basis weight of the measurement sample changes, an appropriate correction value can be given by performing sensitivity correction, so that the measurement accuracy of the basis weight measurement value is improved.
なお、以上の説明は、本発明の説明および例示を目的として特定の好適な実施例を示したに過ぎない。例えば図１で示したアルミ、ＬｉＮｉＯ2、ＬｉＭｎＯ4以外のものであってもよい。
従って本発明は、上記実施例に限定されることなく、その本質から逸脱しない範囲で更に多くの変更、変形を含むものである。
The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention. For example, it may be other than aluminum, LiNiO 2 and LiMnO 4 shown in FIG.
Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.
１ 試料
２、２ａ 放射線源
３ 検出器ヘッド（電離箱）
３ａ 放射線測定器（ラインカメラ）
４ Ｏ型フレーム
５ 厚さ（坪量）測定装置
1 Sample 2, 2a Radiation source 3 Detector head (ionization chamber)
3a Radiation measuring instrument (line camera)
4 O-type frame 5 Thickness (basis weight) measuring device
Claims (4)
変動による検出感度の補償を行って坪量の測定を行う放射線測定方法において、大気変動
による検出感度の補償を行うに際しては、大気変動に対する測定試料の補償感度を既知の他の試料に対する感度を介在させることにより、大気変動に対して感度補正された坪量補正を行って測定試料の種類と坪量に合わせた感度補正を行うようにし、前記既知の他の試料を用いた感度補正には、下記の式を用いることを特徴とする放射線測定方法。
感度補正値＝測定試料／大気＝
（測定試料／既知の他の試料）×（既知の他の試料）／大気） In a radiation measurement method that measures the basis weight by detecting the radiation emitted from the radiation source and passing through the sample with a radiation measuring instrument and compensating the detection sensitivity due to atmospheric fluctuations, the detection sensitivity due to atmospheric fluctuations is compensated. When performing the calibration, the compensation sensitivity of the measurement sample against atmospheric variations is interspersed with the sensitivity of other known samples, and the basis weight corrected for sensitivity to atmospheric variations is corrected to match the type and basis weight of the measurement sample. The radiation measurement method is characterized in that the following equation is used for sensitivity correction using the other known sample.
Sensitivity correction value = measured sample / atmosphere =
(Measurement sample / other known sample) × (known other sample) / air)
測定または推定できる他の検出器からの測定値を用いて行うことを特徴とする請求項１に記載の放射線測定方法。 The atmospheric fluctuation is detected by measuring the atmospheric layer measurement signal from the same radiation source or the density and weight of the atmosphere.
The radiation measurement method according to claim 1, wherein the measurement is performed using a measurement value from another detector that can be measured or estimated .
のいずれかを用いることを特徴とする請求項１に記載の放射線測定方法。 The radiation source is X-ray, β-ray, γ-ray, infrared ray, microwave, visible ray, ultraviolet ray, ultrasonic wave
Any one of these is used , The radiation measuring method of Claim 1 characterized by the above-mentioned.
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