JP6031332B2 - Surface-treated copper foil, laminate using the same, printed wiring board, electronic component, and method for producing surface-treated copper foil - Google Patents

Surface-treated copper foil, laminate using the same, printed wiring board, electronic component, and method for producing surface-treated copper foil Download PDF

Info

Publication number
JP6031332B2
JP6031332B2 JP2012249061A JP2012249061A JP6031332B2 JP 6031332 B2 JP6031332 B2 JP 6031332B2 JP 2012249061 A JP2012249061 A JP 2012249061A JP 2012249061 A JP2012249061 A JP 2012249061A JP 6031332 B2 JP6031332 B2 JP 6031332B2
Authority
JP
Japan
Prior art keywords
copper foil
layer
treated
treated copper
chromate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2012249061A
Other languages
Japanese (ja)
Other versions
JP2014098174A (en
Inventor
賢吾 神永
賢吾 神永
亮 福地
亮 福地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JX Nippon Mining and Metals Corp
Original Assignee
JX Nippon Mining and Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JX Nippon Mining and Metals Corp filed Critical JX Nippon Mining and Metals Corp
Priority to JP2012249061A priority Critical patent/JP6031332B2/en
Publication of JP2014098174A publication Critical patent/JP2014098174A/en
Application granted granted Critical
Publication of JP6031332B2 publication Critical patent/JP6031332B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Description

本発明は、表面処理銅箔、それを用いた積層体、プリント配線板、電子部品及び表面処理銅箔の製造方法に関する。   The present invention relates to a surface-treated copper foil, a laminate using the same, a printed wiring board, an electronic component, and a method for producing the surface-treated copper foil.

スマートフォンやタブレットPCといった小型電子機器には、配線の容易性や軽量性からフレキシブルプリント配線板(以下、FPC)が採用されている。また、FPCには、絶縁体基板上に直接金属や金属酸化物などによる下地層を設けた後、銅の導体層を形成した2層フレキシブル基板を用いてサブトラクティブ法またはアディティブ法によって所望の配線パターンを形成した2層フレキシブルプリント配線板がある。   In a small electronic device such as a smartphone or a tablet PC, a flexible printed wiring board (hereinafter referred to as FPC) is adopted because of easy wiring and light weight. In addition, for FPC, a desired wiring is formed by a subtractive method or an additive method using a two-layer flexible substrate in which a base layer made of metal or metal oxide is directly provided on an insulator substrate and a copper conductor layer is formed. There is a two-layer flexible printed wiring board on which a pattern is formed.

このような2層フレキシブルプリント配線板には、フラットな圧延銅箔が広く用いられている。近年、より屈曲性、ファインエッチング性を高めるために、より厚みの薄い銅箔が好んで用いられている。しかしながら、高屈曲性の圧延銅箔は、結晶サイズが再結晶後に大きくなるため軟らかくなってしまい、10μm以下の薄い箔の場合、見かけのピール強度が低下し、樹脂基板との貼り合わせに問題が生じることがある。   Flat rolled copper foil is widely used for such a two-layer flexible printed wiring board. In recent years, a copper foil having a smaller thickness is preferably used in order to improve flexibility and fine etching. However, the highly flexible rolled copper foil becomes soft because the crystal size becomes large after recrystallization, and in the case of a thin foil of 10 μm or less, the apparent peel strength is lowered, and there is a problem in bonding with a resin substrate. May occur.

そこで、ピール強度を向上させることを目的として、六価クロムを含んだシランカップリング剤で銅箔の樹脂との接着面の表面処理を行う方法が提案されているが、万能ではなく、アミノ系シランは6価クロムと混合すると、沈殿してしまう。
これらの従来技術としては、例えば、特許文献1〜5に開示されている。
Therefore, for the purpose of improving the peel strength, a method of surface treatment of the adhesive surface of the copper foil resin with a silane coupling agent containing hexavalent chromium has been proposed. Silane precipitates when mixed with hexavalent chromium.
For example, Patent Documents 1 to 5 disclose these conventional techniques.

特許第3292774号Japanese Patent No. 3292774 特許第3306404号Japanese Patent No. 3306404 特許第3906347号Japanese Patent No. 3906347 国際公開第2009−81889号International Publication No. 2009-81889 特開平11−158652号Japanese Patent Laid-Open No. 11-158652

しかしながら、六価クロムを含んだシランカップリング剤で銅箔の樹脂との接着面の表面処理を行う場合、2層フレキシブルプリント配線板の作製工程とマッチせず、逆にピール強度が低下したり、シランカップリング剤中のシランの凝集を促進してしまうという問題が生じている。また、特許文献5では、電解銅箔を無水クロム酸のアルカリ溶液(無水クロム酸:6g/l;水酸化ナトリウム:15g/l;pH:12.5;浴温:25℃)に5秒間浸漬し、該銅箔の両面に防錆皮膜を形成させることで表面処理銅箔を作製しているが、ここまでpHが高い処理液を用いると、NaOH、KOHが処理液から持ち出され、乾燥後、塩を形成し、良好なピール強度が得られない。
そこで、本発明は、ピール強度の良好な表面処理銅箔、それを用いた積層体、プリント配線板、電子部品及び表面処理銅箔の製造方法を提供することを目的とする。
However, when surface treatment of the adhesive surface with copper foil resin is performed with a silane coupling agent containing hexavalent chromium, it does not match the manufacturing process of the two-layer flexible printed wiring board, and the peel strength is reduced. There is a problem that silane aggregation in the silane coupling agent is promoted. In Patent Document 5, electrolytic copper foil is immersed in an alkaline solution of chromic anhydride (chromic anhydride: 6 g / l; sodium hydroxide: 15 g / l; pH: 12.5; bath temperature: 25 ° C.) for 5 seconds. However, the surface-treated copper foil is produced by forming a rust preventive film on both sides of the copper foil. When a treatment liquid having a high pH is used, NaOH and KOH are taken out of the treatment liquid and dried. , Salt is formed, and good peel strength cannot be obtained.
Then, an object of this invention is to provide the manufacturing method of surface treatment copper foil with favorable peel strength, a laminated body using the same, a printed wiring board, an electronic component, and surface treatment copper foil.

本発明者は鋭意研究を重ねた結果、銅箔表面の樹脂基板に接着する側に、クロム酸化物の表面処理層を形成し、且つ、当該表面処理層を所定の条件の硝酸浴に浸漬させたときの銅の溶出量を制御することで、表面処理銅箔のピール強度が良好となることを見出した。   As a result of extensive research, the present inventor has formed a chromium oxide surface treatment layer on the side of the copper foil that adheres to the resin substrate, and the surface treatment layer is immersed in a nitric acid bath under predetermined conditions. It was found that the peel strength of the surface-treated copper foil was improved by controlling the amount of copper eluted at the time.

以上の知見を基礎として完成された本発明は一側面において、クロム酸化物で形成された表面処理層を有し、250℃×10分間の熱処理を加えた後、前記表面処理層の表面のみを露出させた状態で濃度20mass%且つ温度25℃の硝酸浴に30秒間浸漬したときに、硝酸浴への銅の溶出量が0.0030g/25cm2以下である表面処理銅箔である。 The present invention completed on the basis of the above knowledge has, in one aspect, a surface treatment layer formed of chromium oxide, and after applying heat treatment at 250 ° C. for 10 minutes, only the surface of the surface treatment layer is applied. When exposed to a nitric acid bath having a concentration of 20 mass% and a temperature of 25 ° C. for 30 seconds, the surface-treated copper foil has an elution amount of copper of 0.0030 g / 25 cm 2 or less.

本発明に係る表面処理銅箔の一実施形態においては、前記表面処理層において、六価クロムの付着量が三価クロムの付着量の0.1%以下である。   In one embodiment of the surface-treated copper foil according to the present invention, the adhesion amount of hexavalent chromium is 0.1% or less of the adhesion amount of trivalent chromium in the surface treatment layer.

本発明に係る表面処理銅箔の別の一実施形態においては、前記表面処理層の厚さが0.1〜2.5nmである。   In another embodiment of the surface-treated copper foil according to the present invention, the surface-treated layer has a thickness of 0.1 to 2.5 nm.

本発明に係る表面処理銅箔の更に別の一実施形態においては、前記銅箔と前記表面処理層との間に下地層が形成されている。   In still another embodiment of the surface-treated copper foil according to the present invention, a base layer is formed between the copper foil and the surface-treated layer.

本発明に係る表面処理銅箔の更に別の一実施形態においては、前記下地層が粗化処理層を含む。   In still another embodiment of the surface-treated copper foil according to the present invention, the foundation layer includes a roughened layer.

本発明に係る表面処理銅箔の更に別の一実施形態においては、前記下地層が加熱変色防止層及び/又は防錆層を含む。   In still another embodiment of the surface-treated copper foil according to the present invention, the foundation layer includes a heat discoloration prevention layer and / or a rust prevention layer.

本発明に係る表面処理銅箔の更に別の一実施形態においては、前記加熱変色防止層と防錆層とは、それぞれZn、Cu又はそれらの合金である。   In still another embodiment of the surface-treated copper foil according to the present invention, the heat discoloration prevention layer and the rust prevention layer are Zn, Cu, or an alloy thereof, respectively.

本発明に係る表面処理銅箔の更に別の一実施形態においては、前記防錆層がクロメート層又は亜鉛クロメート層を含む。   In still another embodiment of the surface-treated copper foil according to the present invention, the rust preventive layer includes a chromate layer or a zinc chromate layer.

本発明に係る表面処理銅箔の更に別の一実施形態においては、前記下地層がシランカップリング層を含む。   In still another embodiment of the surface-treated copper foil according to the present invention, the foundation layer includes a silane coupling layer.

本発明に係る表面処理銅箔の更に別の一実施形態においては、前記表面処理層の上にシランカップリング層が形成されている。   In still another embodiment of the surface-treated copper foil according to the present invention, a silane coupling layer is formed on the surface-treated layer.

本発明は別の一側面において、本発明の銅箔と樹脂基板との積層体である。   In another aspect, the present invention is a laminate of the copper foil of the present invention and a resin substrate.

本発明の積層体の一実施形態においては、前記銅箔と前記樹脂基板とが接着剤を介さず積層されている。   In one Embodiment of the laminated body of this invention, the said copper foil and the said resin substrate are laminated | stacked without the adhesive agent.

本発明は更に別の一側面において、本発明の積層体を材料としたプリント配線板である。   In yet another aspect, the present invention is a printed wiring board made from the laminate of the present invention.

本発明は更に別の一側面において、本発明のプリント配線板を備えた電子部品である。   In still another aspect, the present invention is an electronic component including the printed wiring board of the present invention.

本発明は更に別の一側面において、クロメート液を銅箔の処理対象表面全体に設ける工程、及び、クロメート液を銅箔表面に設けた後、水洗しないで乾燥することでクロム酸化物の表面処理層を形成する工程を備えた表面処理銅箔の製造方法である。   In another aspect of the present invention, the step of providing a chromate solution over the entire surface of the copper foil to be treated, and the surface treatment of the chromium oxide by drying the chromate solution without washing with water after providing the copper foil surface. It is a manufacturing method of the surface treatment copper foil provided with the process of forming a layer.

本発明の表面処理銅箔の製造方法の一実施形態においては、前記クロム酸化物の表面処理層を形成する工程において、クロメート液を銅箔表面に設けた後、液切りを行い、その後水洗しないで乾燥することでクロム酸化物の表面処理層を形成する。   In one embodiment of the method for producing a surface-treated copper foil of the present invention, in the step of forming the surface treatment layer of the chromium oxide, after the chromate solution is provided on the surface of the copper foil, the liquid is drained and then not washed with water. The surface treatment layer of chromium oxide is formed by drying with.

本発明の表面処理銅箔の製造方法の別の一実施形態においては、前記クロメート液を銅箔表面へ設けた量が、前記液切り後、5〜20mg/dm2である。 In another one Embodiment of the manufacturing method of the surface treatment copper foil of this invention, the quantity which provided the said chromate liquid to the copper foil surface is 5-20 mg / dm < 2 > after the said liquid draining.

本発明の表面処理銅箔の製造方法の別の一実施形態においては、前記液切りをロール、ブレード及び/又は気体の吹き付けにより行う。   In another embodiment of the manufacturing method of the surface-treated copper foil of this invention, the said liquid draining is performed by spraying a roll, a braid | blade, and / or gas.

本発明の表面処理銅箔の製造方法の別の一実施形態においては、前記クロメート液を銅箔の処理対象表面全体に設ける工程は、クロメート液を前記銅箔表面にシャワーにより塗布することで行う。   In another embodiment of the method for producing a surface-treated copper foil of the present invention, the step of providing the chromate solution over the entire surface to be treated of the copper foil is performed by applying the chromate solution to the copper foil surface by showering. .

本発明の表面処理銅箔の製造方法の別の一実施形態においては、前記クロメート液を銅箔の処理対象表面全体に設ける工程は、クロメート液を前記銅箔表面にローラーにより塗布することで行う。   In another embodiment of the method for producing a surface-treated copper foil of the present invention, the step of providing the chromate solution over the entire surface to be treated of the copper foil is performed by applying the chromate solution to the surface of the copper foil with a roller. .

本発明の表面処理銅箔の製造方法の別の一実施形態においては、前記クロメート液のpHが1〜10である。   In another one Embodiment of the manufacturing method of the surface treatment copper foil of this invention, pH of the said chromate liquid is 1-10.

本発明の表面処理銅箔の製造方法の別の一実施形態においては、前記クロメート液のpHが4〜10である。   In another one Embodiment of the manufacturing method of the surface treatment copper foil of this invention, pH of the said chromate liquid is 4-10.

本発明によれば、ピール強度の良好な表面処理銅箔、それを用いた積層体、プリント配線板、電子部品及び表面処理銅箔の製造方法を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of surface treatment copper foil with favorable peel strength, a laminated body using the same, a printed wiring board, an electronic component, and surface treatment copper foil can be provided.

〔表面処理銅箔の構成〕
本発明において使用する銅箔は、電解銅箔或いは圧延銅箔のいずれでも良い。本発明の表面処理銅箔は、クロム酸化物で形成された表面処理層を有しており、250℃×10分間の熱処理を加えた後、前記表面処理層の表面のみを露出させた状態で濃度20mass%且つ温度25℃の硝酸浴に30秒間浸漬したときに、硝酸浴への銅の溶出量が0.0030g/25cm2以下である。表面処理としては、スパッタリング等で金属クロム層を銅箔表面に形成するものもあるが、酸に対する耐食性が劣り、フレキシブル基板の回路形成工程でエッチング液に浸食されてしまう可能性がある。これに対し、本発明の表面処理層はクロム酸化物で形成されており、且つ、濃度20mass%且つ温度25℃の硝酸浴に30秒間浸漬したときに、硝酸浴への銅の溶出量が0.0030g/25cm2以下となるように制御されているため、エッチング液に対する耐腐食性が良好である。また、このように酸への銅の溶出量が制御されていることは、クロム酸化物によって表面処理層が緻密に且つ均一に形成されていることを示しているため、樹脂基板との密着性が良好となり、ピール強度が向上する。なお、上記「250℃×10分間の熱処理を加えた後」は、ポリイミド基板との接着の際の一般的な熱処理条件を規定したものである。
[Configuration of surface-treated copper foil]
The copper foil used in the present invention may be either an electrolytic copper foil or a rolled copper foil. The surface-treated copper foil of the present invention has a surface-treated layer formed of chromium oxide, and after heat treatment at 250 ° C. for 10 minutes, only the surface of the surface-treated layer is exposed. When immersed in a nitric acid bath having a concentration of 20 mass% and a temperature of 25 ° C. for 30 seconds, the elution amount of copper into the nitric acid bath is 0.0030 g / 25 cm 2 or less. As the surface treatment, there is a method in which a metal chromium layer is formed on the surface of the copper foil by sputtering or the like. On the other hand, the surface treatment layer of the present invention is formed of chromium oxide, and the amount of copper eluted into the nitric acid bath is 0 when immersed in a nitric acid bath having a concentration of 20 mass% and a temperature of 25 ° C. for 30 seconds. Since it is controlled to be not more than .0030 g / 25 cm 2, the corrosion resistance against the etching solution is good. In addition, the controlled amount of copper eluted into the acid in this way indicates that the surface treatment layer is densely and uniformly formed by the chromium oxide, so that the adhesion to the resin substrate is improved. And the peel strength is improved. The above “after heat treatment at 250 ° C. for 10 minutes” defines general heat treatment conditions for bonding to the polyimide substrate.

本発明の表面処理銅箔は、表面処理層において、六価クロムの付着量が三価クロムの付着量の0.1%以下であるのが好ましい。このような構成によれば、六価クロムの付着量の割合が制御されており、安全面から有利である。   In the surface-treated copper foil of the present invention, the amount of hexavalent chromium attached is preferably 0.1% or less of the amount of trivalent chromium attached in the surface treatment layer. According to such a configuration, the ratio of the amount of hexavalent chromium deposited is controlled, which is advantageous from the viewpoint of safety.

本発明の表面処理銅箔は、表面処理層の厚さが0.1〜2.5nmであるのが好ましい。このように表面処理層の厚さを薄く形成すると、表面処理層のエッチング除去性及び製造コストが良好となる。表面処理層の厚さは、より好ましくは0.3〜1nmである。   In the surface-treated copper foil of the present invention, the surface-treated layer preferably has a thickness of 0.1 to 2.5 nm. Thus, when the thickness of the surface treatment layer is reduced, the etching removal property and the manufacturing cost of the surface treatment layer are improved. The thickness of the surface treatment layer is more preferably 0.3 to 1 nm.

本発明の表面処理銅箔は、種々の目的から、銅箔と表面処理層との間に下地層が形成されていてもよい。下地層は特に限定されず、公知のものを用いることができる。下地層は、例えば絶縁基板との密着性をさらに良好にするために粗化処理層を含んでもよい。粗化処理は、例えば、銅又は銅合金で粗化粒子を形成することにより行うことができる。粗化処理は微細なものであっても良い。粗化処理層は、銅、ニッケル、コバルト及び亜鉛からなる群から選択されたいずれかの単体又はいずれか1種以上を含む合金からなる層であってもよい。また、下地層は、加熱変色防止層及び/又は防錆層を含んでもよい。Cuの拡散防止による加熱変色防止層と防錆層とは、それぞれZn、Cu又はそれらの合金で形成することができる。防錆層は、クロメート層又は亜鉛クロメート層を含んでもよい。また、下地層は、下地層がシランカップリング層を含んでもよい。   In the surface-treated copper foil of the present invention, a base layer may be formed between the copper foil and the surface-treated layer for various purposes. The underlayer is not particularly limited, and a known layer can be used. The underlayer may include a roughening treatment layer, for example, in order to further improve the adhesion with the insulating substrate. The roughening treatment can be performed, for example, by forming roughened particles with copper or a copper alloy. The roughening process may be fine. The roughening treatment layer may be a single layer selected from the group consisting of copper, nickel, cobalt and zinc, or a layer made of an alloy containing one or more of them. Further, the underlayer may include a heat discoloration prevention layer and / or a rust prevention layer. The heat discoloration preventing layer and the rust preventing layer by preventing the diffusion of Cu can be formed of Zn, Cu or an alloy thereof, respectively. The rust preventive layer may include a chromate layer or a zinc chromate layer. The underlayer may include a silane coupling layer.

〔表面処理銅箔の製造方法〕
本発明の表面処理銅箔の製造方法を説明する。まず、圧延銅箔又は電解銅箔を準備する。次に、必要であれば、銅箔表面に下地層として、粗化処理層、加熱変色防止層、防錆層、シランカップリング層等を公知の手段により形成する。次に、クロメート液を銅箔の処理対象表面全体に設ける。次に、銅箔表面を水洗しないで乾燥することで、銅箔表面にクロム酸化物の表面処理層を形成する。従来法では、クロメート液で表面処理を行う場合、クロメート液を銅箔の表面に設けた後、乾燥工程の前に、不純物除去等のために水洗を複数回行う。しかしながら、この水洗により、クロメート層が不均一に形成してしまい、ピール強度に悪影響を与えている。これに対し、本発明では当該水洗工程を行わず、クロメート液を銅箔の処理対象表面全体に設けた後に、銅箔表面を水洗しないで乾燥することで、均一なクロメート層を形成し、表面処理銅箔のピール強度を向上させている。クロメート液を銅箔の処理対象表面全体に設ける工程は、クロメート液を銅箔表面にシャワーにより塗布することで行ってもよく、クロメート液を銅箔表面にローラーにより塗布することで行ってもよい。
[Production method of surface-treated copper foil]
The manufacturing method of the surface treatment copper foil of this invention is demonstrated. First, a rolled copper foil or an electrolytic copper foil is prepared. Next, if necessary, a roughening treatment layer, a heat discoloration prevention layer, a rust prevention layer, a silane coupling layer, and the like are formed on the copper foil surface by a known means as a base layer. Next, the chromate solution is provided on the entire surface of the copper foil to be processed. Next, the surface treatment layer of chromium oxide is formed on the copper foil surface by drying the copper foil surface without washing. In the conventional method, when the surface treatment is performed with the chromate solution, the chromate solution is provided on the surface of the copper foil, and then washed with water a plurality of times for removing impurities before the drying step. However, this washing with water forms a non-uniform chromate layer, which adversely affects the peel strength. On the other hand, in the present invention, the water washing step is not performed, and after the chromate liquid is provided on the entire surface to be treated of the copper foil, the copper foil surface is dried without washing, thereby forming a uniform chromate layer, The peel strength of the treated copper foil is improved. The step of providing the chromate solution over the entire surface to be treated of the copper foil may be performed by applying the chromate solution to the copper foil surface by a shower, or by applying the chromate solution to the copper foil surface with a roller. .

また、本発明の表面処理銅箔の製造方法では、クロム酸化物の表面処理層を形成する工程において、クロメート液を銅箔表面に設けた後、液切りを行い、その後水洗しないで乾燥することでクロム酸化物の表面処理層を形成してもよい。当該液切りは、ロール、ブレード及び/又は気体の吹き付けにより行うことができる。このようにクロメート液を銅箔表面に設けた後、液切りを行い、銅箔表面におけるクロメート液の量を制御することで、六価クロムの製品への付着を抑制し、残渣イオン(K+)がクロメート膜へ取り込まれにくくなるという効果がある。また、クロメート液を銅箔表面へ設けた量が、液切り後、5〜20mg/dm2であることが好ましい。クロメート液を銅箔表面へ設けた量が5mg/dm2未満であれば、所望のピール強度が得られないという問題が生じるおそれがある。また、クロメート液を銅箔表面へ設けた量が20mg/dm2超であると、後述の組成の液にて処理するため、pH調整のために加えるH2SO4とKの塩が析出してしまうという問題が生じるおそれがある。 Further, in the method for producing a surface-treated copper foil of the present invention, in the step of forming the surface treatment layer of chromium oxide, the chromate solution is provided on the surface of the copper foil, then drained, and then dried without washing with water. A chromium oxide surface treatment layer may be formed. The liquid draining can be performed by blowing a roll, a blade and / or a gas. After the chromate solution is provided on the surface of the copper foil in this way, the liquid is drained and the amount of the chromate solution on the copper foil surface is controlled to suppress the attachment of hexavalent chromium to the product, and residual ions (K + ) Is less likely to be taken into the chromate film. Moreover, it is preferable that the quantity which provided the chromate liquid to the copper foil surface is 5-20 mg / dm < 2 > after draining. If the amount of chromate liquid provided on the copper foil surface is less than 5 mg / dm 2 , there is a possibility that a desired peel strength cannot be obtained. Further, if the amount of chromate solution provided on the surface of the copper foil is more than 20 mg / dm 2 , the salt of H 2 SO 4 and K added for pH adjustment is precipitated because the solution is treated with a solution having the composition described later. There is a risk of problems.

表面処理に用いるクロメート液の条件は以下の通りである。
液組成:CrO3:1〜6g/l、Na2Cr27及びK2Cr27:合計で1.5〜9g/l
pH:1〜10、好ましくは4〜10
温度:10〜60℃、好ましくは25〜40℃
上記のようにpH1〜10の処理液を用いた場合、下地処理にNi等を用いてもNiの溶出を良好に抑制することができる。また、pH4〜10の処理液を用いた場合、下地処理にZn−クロメートを用いても、Znの溶出を良好に抑制することができる。
The conditions of the chromate solution used for the surface treatment are as follows.
Liquid composition: CrO 3 : 1 to 6 g / l, Na 2 Cr 2 O 7 and K 2 Cr 2 O 7 : 1.5 to 9 g / l in total
pH: 1-10, preferably 4-10
Temperature: 10-60 ° C, preferably 25-40 ° C
As described above, when a treatment solution having a pH of 1 to 10 is used, the elution of Ni can be satisfactorily suppressed even when Ni or the like is used for the base treatment. Further, when a treatment solution having a pH of 4 to 10 is used, the elution of Zn can be satisfactorily suppressed even if Zn-chromate is used for the base treatment.

本発明の表面処理銅箔を、処理面側から樹脂基板に貼り合わせて積層体を製造することができる。樹脂基板はプリント配線板等に適用可能な特性を有するものであれば特に制限を受けないが、例えば、リジッドPWB用に紙基材フェノール樹脂、紙基材エポキシ樹脂、合成繊維布基材エポキシ樹脂、ガラス布・紙複合基材エポキシ樹脂、ガラス布・ガラス不織布複合基材エポキシ樹脂及びガラス布基材エポキシ樹脂等を使用し、FPC用にポリエステルフィルムやポリイミドフィルム等を使用する事ができる。また、本発明の表面処理銅箔は、表面処理層が樹脂基板との高密着性を有するため、銅箔と樹脂基板とを接着剤を介さず積層して圧着することで、積層体を構成することも可能である。   The surface-treated copper foil of the present invention can be bonded to a resin substrate from the treated surface side to produce a laminate. The resin substrate is not particularly limited as long as it has characteristics applicable to a printed wiring board or the like. For example, a paper base phenol resin, a paper base epoxy resin, a synthetic fiber cloth base epoxy resin for rigid PWB Glass cloth / paper composite base material epoxy resin, glass cloth / glass nonwoven fabric composite base material epoxy resin, glass cloth base material epoxy resin, etc. can be used, and polyester film, polyimide film, etc. can be used for FPC. In addition, the surface-treated copper foil of the present invention has a high adhesion to the resin substrate, so the laminated body is formed by laminating the copper foil and the resin substrate without using an adhesive and pressing them. It is also possible to do.

貼り合わせの方法は、リジッドPWB用の場合、ガラス布などの基材に樹脂を含浸させ、樹脂を半硬化状態まで硬化させたプリプレグを用意する。銅箔を表面処理層の反対側の面からプリプレグに重ねて加熱加圧させることにより行うことができる。   In the case of the rigid PWB, a prepreg is prepared by impregnating a base material such as a glass cloth with a resin and curing the resin to a semi-cured state. It can be carried out by superposing a copper foil on the prepreg from the surface opposite to the surface treatment layer and heating and pressing it.

本発明の積層体は各種のプリント配線板(PWB)に使用可能であり、特に制限されるものではないが、例えば、導体パターンの層数の観点からは片面PWB、両面PWB、多層PWBに適用可能であり、絶縁基板材料の種類の観点からはリジッドPWB、フレキシブルPWB(FPC)、リジッド・フレックスPWBに適用可能である。また、このようにして作製したプリント配線板は、搭載部品の高密度実装が要求される各種電子部品に搭載することができる。   The laminate of the present invention can be used for various printed wiring boards (PWB) and is not particularly limited. For example, from the viewpoint of the number of layers of the conductor pattern, it is applied to single-sided PWB, double-sided PWB, and multilayer PWB. It is possible to apply to rigid PWB, flexible PWB (FPC), and rigid flex PWB from the viewpoint of the type of insulating substrate material. Moreover, the printed wiring board produced in this way can be mounted on various electronic components that require high-density mounting of the mounted components.

実施例1〜6及び比較例1〜5として、表1に記載の厚みの銅箔を準備し、一方の表面に、任意の下地層(粗化処理層、加熱変色防止層、防錆層、シランカップリング層)として、それぞれ表1に記載の条件にてめっき処理を行った。ここで、実施例1〜5、比較例1〜4の銅箔としてJX日鉱日石金属社製タフピッチ銅(JIS H3100 C1100R)の圧延銅箔を用いた。また、実施例6、比較例5の銅箔として、JX日鉱日石金属社製電解銅箔HLPLC箔を用いた。   As Examples 1-6 and Comparative Examples 1-5, the copper foil of the thickness of Table 1 was prepared, and arbitrary underlayers (a roughening process layer, a heat discoloration prevention layer, a rust prevention layer, As the silane coupling layer, plating treatment was performed under the conditions shown in Table 1, respectively. Here, as copper foils of Examples 1 to 5 and Comparative Examples 1 to 4, rolled copper foil of tough pitch copper (JIS H3100 C1100R) manufactured by JX Nippon Mining & Metals was used. Moreover, as copper foil of Example 6 and Comparative Example 5, JX Nippon Mining & Metals electrolytic copper foil HLPLC foil was used.

Figure 0006031332
Figure 0006031332

次に、銅箔又は銅箔上の下地層の上に、表2の条件で表面処理液を銅箔の処理対象表面全体に塗布し、さらに任意の水洗及び液切り後、乾燥することで、表面処理層を形成した。   Next, on the copper foil or the base layer on the copper foil, the surface treatment liquid is applied to the entire surface to be treated of the copper foil under the conditions of Table 2, and further, after arbitrary washing and draining, and drying, A surface treatment layer was formed.

Figure 0006031332
Figure 0006031332

上述のようにして作製した実施例及び比較例の各サンプルについて、各種評価を下記の通り行った。
(1)クロム付着量;
濃度10%の塩酸にて3分間煮沸して処理層を溶解させ、その溶液を原子吸光分析により分析して、三価及び六価クロム付着量を評価した。
Various evaluation was performed as follows about each sample of the Example and comparative example which were produced as mentioned above.
(1) Chromium adhesion amount;
The treatment layer was dissolved by boiling for 3 minutes in hydrochloric acid having a concentration of 10%, and the solution was analyzed by atomic absorption analysis to evaluate the amount of trivalent and hexavalent chromium deposited.

(2)表面処理層の厚さ;
表面処理層の厚さは、三価クロムの付着量から密度を7.2g/cm3として換算した。
(2) thickness of the surface treatment layer;
The thickness of the surface treatment layer was converted from the adhering amount of trivalent chromium as a density of 7.2 g / cm 3 .

(3)硝酸への溶出量;
250℃×10分間の熱処理を加えた後、マスキングテープを用いて表面処理層の表面のみを25cm2露出させた状態で濃度20mass%且つ温度25℃の硝酸浴に30秒間浸漬した。その後、硝酸浴への試料の溶出量(g/25cm2)を測定した。
(3) Elution amount into nitric acid;
After applying heat treatment at 250 ° C. for 10 minutes, it was immersed in a nitric acid bath having a concentration of 20 mass% and a temperature of 25 ° C. for 30 seconds with only the surface of the surface treatment layer exposed by 25 cm 2 using a masking tape. Thereafter, the elution amount (g / 25 cm 2 ) of the sample into the nitric acid bath was measured.

(4)ピール強度;
PC−TM−650に準拠し、引張り試験機オートグラフ100で常態ピール強度を測定し、上記常態ピール強度が0.7kN/mm以上を銅張積層基板用途に使用できるものとした。
(4) peel strength;
In accordance with PC-TM-650, the normal peel strength was measured with a tensile tester Autograph 100, and the normal peel strength of 0.7 kN / mm or more could be used for copper clad laminated substrate applications.

(5)PCT(プレッシャークラッカー試験);
プレッシャークラッカー試験として、121℃2気圧下で48時間処理し、耐久試験後の試験片を使用してJIS−K7054の方法により引張り強度を測定した。
上記各試験の条件及び評価を表3に示す。
(5) PCT (pressure cracker test);
As a pressure cracker test, it was treated at 121 ° C. under 2 atm for 48 hours, and the tensile strength was measured by the method of JIS-K7054 using the test piece after the durability test.
Table 3 shows the conditions and evaluation of each test.

Figure 0006031332
Figure 0006031332

表3によれば、実施例1〜6は、いずれも250℃×10分間の熱処理を加えた後、前記表面処理層の表面のみを露出させた状態で濃度20mass%且つ温度25℃の硝酸浴に30秒間浸漬したときに、硝酸浴への銅の溶出量が0.0030g/25cm2以下であり、ピール強度が良好であった。
一方、比較例1〜5は、いずれも250℃×10分間の熱処理を加えた後、前記表面処理層の表面のみを露出させた状態で濃度20mass%且つ温度25℃の硝酸浴に30秒間浸漬したときに、硝酸浴への銅の溶出量が0.0030g/25cm2を超え、ピール強度が不良であった。
According to Table 3, each of Examples 1 to 6 was subjected to a heat treatment at 250 ° C. for 10 minutes, and then a nitric acid bath having a concentration of 20 mass% and a temperature of 25 ° C. with only the surface of the surface treatment layer exposed. When immersed for 30 seconds, the elution amount of copper into the nitric acid bath was 0.0030 g / 25 cm 2 or less, and the peel strength was good.
On the other hand, Comparative Examples 1 to 5 were all immersed in a nitric acid bath having a concentration of 20 mass% and a temperature of 25 ° C. with only the surface of the surface treatment layer exposed after heat treatment at 250 ° C. for 10 minutes. The amount of copper elution into the nitric acid bath exceeded 0.0030 g / 25 cm 2 , and the peel strength was poor.

Claims (22)

クロム酸化物で形成された表面処理層を有し、
250℃×10分間の熱処理を加えた後、前記表面処理層の表面のみを露出させた状態で濃度20mass%且つ温度25℃の硝酸浴に30秒間浸漬したときに、硝酸浴への銅の溶出量が0.0030g/25cm2以下である表面処理銅箔。
Having a surface treatment layer formed of chromium oxide;
After heat treatment at 250 ° C. for 10 minutes, when immersed in a nitric acid bath having a concentration of 20 mass% and a temperature of 25 ° C. with only the surface of the surface treatment layer exposed, elution of copper into the nitric acid bath A surface-treated copper foil having an amount of 0.0030 g / 25 cm 2 or less.
前記表面処理層において、六価クロムの付着量が三価クロムの付着量の0.1%以下である請求項1に記載の表面処理銅箔。   2. The surface-treated copper foil according to claim 1, wherein in the surface treatment layer, the amount of hexavalent chromium attached is 0.1% or less of the amount of trivalent chromium attached. 前記表面処理層の厚さが0.1〜2.5nmである請求項1又は2に記載の表面処理銅箔。   The surface-treated copper foil according to claim 1 or 2, wherein the surface-treated layer has a thickness of 0.1 to 2.5 nm. 前記銅箔と前記表面処理層との間に下地層が形成された請求項1〜3のいずれかに記載の表面処理銅箔。   The surface-treated copper foil in any one of Claims 1-3 in which the base layer was formed between the said copper foil and the said surface treatment layer. 前記下地層が粗化処理層を含む請求項4に記載の表面処理銅箔。   The surface-treated copper foil of Claim 4 in which the said base layer contains a roughening process layer. 前記下地層が加熱変色防止層及び/又は防錆層を含む請求項4又は5に記載の表面処理銅箔。   The surface-treated copper foil of Claim 4 or 5 in which the said base layer contains a heat discoloration prevention layer and / or a rust prevention layer. 前記加熱変色防止層と防錆層とは、それぞれZn、Cu又はそれらの合金である請求項6に記載の表面処理銅箔。   The surface-treated copper foil according to claim 6, wherein the heat discoloration preventing layer and the rust preventing layer are Zn, Cu, or an alloy thereof, respectively. 前記防錆層がクロメート層又は亜鉛クロメート層を含む請求項6又は7に記載の表面処理銅箔。   The surface-treated copper foil of Claim 6 or 7 in which the said rust prevention layer contains a chromate layer or a zinc chromate layer. 前記下地層がシランカップリング層を含む請求項4〜8のいずれかに記載の表面処理銅箔。   The surface-treated copper foil in any one of Claims 4-8 in which the said foundation | substrate layer contains a silane coupling layer. 前記表面処理層の上にシランカップリング層が形成された請求項1〜9のいずれか一項に記載の表面処理銅箔。   The surface-treated copper foil as described in any one of Claims 1-9 in which the silane coupling layer was formed on the said surface-treated layer. 請求項1〜10のいずれかに記載の銅箔と樹脂基板との積層体。   The laminated body of the copper foil and resin substrate in any one of Claims 1-10. 前記銅箔と前記樹脂基板とが接着剤を介さず積層されている請求項11に記載の積層体。   The laminate according to claim 11, wherein the copper foil and the resin substrate are laminated without using an adhesive. 請求項11又は12に記載の積層体を材料としたプリント配線板。   The printed wiring board which used the laminated body of Claim 11 or 12 as a material. 請求項13に記載のプリント配線板を備えた電子部品。   An electronic component comprising the printed wiring board according to claim 13. クロメート液を銅箔の処理対象表面全体に設ける工程、及び、クロメート液を銅箔表面に設けた後、水洗しないで乾燥することでクロム酸化物の表面処理層を形成する工程を備えた請求項1〜10のいずれかに記載の表面処理銅箔の製造方法。 Step of providing a chromate solution on the entire processed surface of the copper foil, and, after providing the chromate bath on the copper foil surface, claim comprising the step of forming a surface treatment layer of chromium oxide by drying without water washing The manufacturing method of the surface treatment copper foil in any one of 1-10 . 前記クロム酸化物の表面処理層を形成する工程において、クロメート液を銅箔表面に設けた後、液切りを行い、その後水洗しないで乾燥することでクロム酸化物の表面処理層を形成する請求項15に記載の表面処理銅箔の製造方法。   In the step of forming the chromium oxide surface treatment layer, the chromium oxide surface treatment layer is formed by providing a chromate solution on the surface of the copper foil, then draining, and then drying without washing with water. 15. A method for producing a surface-treated copper foil according to 15. 前記クロメート液を銅箔表面へ設けた量が、前記液切り後、5〜20mg/dm2である請求項16に記載の表面処理銅箔の製造方法。 The amount provided the chromate solution to the copper foil surface, after the liquid cutting, a method for producing a surface-treated copper foil according to claim 16 which is 5 to 20 mg / dm 2. 前記液切りをロール、ブレード及び/又は気体の吹き付けにより行う請求項16又は17に記載の表面処理銅箔の製造方法。   The method for producing a surface-treated copper foil according to claim 16 or 17, wherein the liquid draining is performed by spraying a roll, a blade and / or a gas. クロメート液を銅箔の処理対象表面全体に設ける工程、及び、クロメート液を銅箔表面に設けた後、水洗しないで乾燥することでクロム酸化物の表面処理層を形成する工程を備え、
前記クロメート液を銅箔の処理対象表面全体に設ける工程は、クロメート液を前記銅箔表面にシャワーにより塗布することで行う表面処理銅箔の製造方法。
A step of providing a chromate solution over the entire surface of the copper foil to be treated, and a step of forming a chromium oxide surface treatment layer by drying without washing with water after the chromate solution is provided on the surface of the copper foil,
Step of providing the chromate bath on the entire processed surface of the copper foil, a manufacturing method of the row cormorants front surface treated copper foil by applying a shower chromate bath on the copper foil surface.
前記クロメート液を銅箔の処理対象表面全体に設ける工程は、クロメート液を前記銅箔表面にローラーにより塗布することで行う請求項15〜18のいずれかに記載の表面処理銅箔の製造方法。   The method for producing a surface-treated copper foil according to any one of claims 15 to 18, wherein the step of providing the chromate solution over the entire surface to be treated of the copper foil is performed by applying the chromate solution to the surface of the copper foil with a roller. 前記クロメート液のpHが1〜10である請求項15〜20のいずれかに記載の表面処理銅箔の製造方法。   The method for producing a surface-treated copper foil according to any one of claims 15 to 20, wherein the chromate solution has a pH of 1 to 10. 前記クロメート液のpHが4〜10である請求項21に記載の表面処理銅箔の製造方法。   The method for producing a surface-treated copper foil according to claim 21, wherein the chromate solution has a pH of 4 to 10.
JP2012249061A 2012-11-13 2012-11-13 Surface-treated copper foil, laminate using the same, printed wiring board, electronic component, and method for producing surface-treated copper foil Active JP6031332B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012249061A JP6031332B2 (en) 2012-11-13 2012-11-13 Surface-treated copper foil, laminate using the same, printed wiring board, electronic component, and method for producing surface-treated copper foil

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012249061A JP6031332B2 (en) 2012-11-13 2012-11-13 Surface-treated copper foil, laminate using the same, printed wiring board, electronic component, and method for producing surface-treated copper foil

Publications (2)

Publication Number Publication Date
JP2014098174A JP2014098174A (en) 2014-05-29
JP6031332B2 true JP6031332B2 (en) 2016-11-24

Family

ID=50940415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012249061A Active JP6031332B2 (en) 2012-11-13 2012-11-13 Surface-treated copper foil, laminate using the same, printed wiring board, electronic component, and method for producing surface-treated copper foil

Country Status (1)

Country Link
JP (1) JP6031332B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI616122B (en) * 2014-05-28 2018-02-21 Jx Nippon Mining & Metals Corp Surface-treated copper foil, copper foil with carrier, laminated body, printed wiring board, electronic device, method for producing surface-treated copper foil, and method for producing printed wiring board

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0633467B2 (en) * 1989-05-02 1994-05-02 日紘グールド・フォイル株式会社 Surface treatment method of rolled copper foil
JPH0851281A (en) * 1994-08-08 1996-02-20 Nikko Gould Foil Kk Method for manufacture high-temperature large-expansion copper foil for printed circuit
JP3661763B2 (en) * 2000-01-28 2005-06-22 三井金属鉱業株式会社 Method for producing surface-treated copper foil for printed wiring board
JP4107004B2 (en) * 2002-07-30 2008-06-25 日立電線株式会社 Negative electrode current collector for lithium ion secondary battery and method for producing negative electrode current collector for lithium ion secondary battery
JP2005063764A (en) * 2003-08-08 2005-03-10 Hitachi Cable Ltd Copper foil for lithium ion secondary battery, and its manufacturing method
US7495182B2 (en) * 2004-01-30 2009-02-24 Dai Nippon Printing Co., Ltd. Electromagnetic wave shielding sheet and process for producing the same
KR100972321B1 (en) * 2005-06-23 2010-07-26 닛코 킨조쿠 가부시키가이샤 Copper foil for printed wiring board
CN102933746B (en) * 2010-06-30 2017-10-13 三井金属矿业株式会社 The manufacture method of copper foil for negative electrode current collector

Also Published As

Publication number Publication date
JP2014098174A (en) 2014-05-29

Similar Documents

Publication Publication Date Title
JP5373995B2 (en) Copper foil with carrier
WO2019208521A1 (en) Surface-treated copper foil, copper clad laminate, and printed wiring board
JP5919303B2 (en) Surface-treated copper foil and copper-clad laminate using the same
KR102274906B1 (en) Copper foil and copper clad laminate having the same
KR101607381B1 (en) Copper foil for high frequency circuit, copper clad laminate for high frequency circuit, printed wiring board for high frequency circuit, copper foil attached with carrier for high frequency circuit, electronic device, and method for manufacturing printed wiring board
KR101736537B1 (en) Copper foil for high frequency circuit, copper clad laminate for high frequency circuit, printed wiring board for high frequency circuit, copper foil attached with carrier for high frequency circuit, electronic device, and method for manufacturing printed wiring board
WO2018211951A1 (en) Roughened copper foil, carrier-attached copper foil, copper clad laminate, and printed wiring board
JP5156873B1 (en) Copper foil with carrier
TWI523586B (en) A composite metal foil, a method for manufacturing the same, and a printed circuit board
JP2017106068A (en) Surface-treated copper foil for printed-wiring board, copper plated laminate sheet for printed-wiring board, and printed-wiring board
JP5997080B2 (en) Copper foil with carrier, method for producing copper foil with carrier, printed wiring board, printed circuit board, copper-clad laminate, and method for producing printed wiring board
KR20200135303A (en) Harmonized copper foil, copper foil with carrier, copper clad laminate and printed wiring board
TWI583268B (en) Supplied with copper foil, copper laminates and
JP5576514B2 (en) Surface-treated copper foil, laminated board, printed wiring board and printed circuit board
JP2014141061A (en) Copper foil with carrier, and printed wiring board, printed circuit board, and copper-clad laminate with use of the same
KR20090084517A (en) Copper foil for printed circuit improved in thermal resistance and chemical resistance property and fabrication method thereof
JP6031332B2 (en) Surface-treated copper foil, laminate using the same, printed wiring board, electronic component, and method for producing surface-treated copper foil
JP5298252B1 (en) Copper foil with carrier, method for producing copper foil with carrier, printed wiring board, printed circuit board, copper-clad laminate, and method for producing printed wiring board
JP6140481B2 (en) Copper foil with carrier, method for producing copper foil with carrier, printed wiring board, printed circuit board, copper-clad laminate, and method for producing printed wiring board
JP6140480B2 (en) Copper foil with carrier, method for producing copper foil with carrier, printed wiring board, printed circuit board, copper-clad laminate, and method for producing printed wiring board
JP5386652B1 (en) Copper foil with carrier, method for producing copper foil with carrier, printed wiring board, printed circuit board, copper-clad laminate, and method for producing printed wiring board
JP5449596B1 (en) Copper foil with carrier, method for producing copper foil with carrier, printed wiring board, printed circuit board, copper-clad laminate, and method for producing printed wiring board
WO2013118416A1 (en) Copper foil with carrier, manufacturing method for copper foil with carrier, printed wiring board, printed circuit board and copper clad laminate
JP2014208893A (en) Surface-treated copper foil, method of treating surface of the copper foil, copper-clad laminate sheet and method of producing the laminate sheet
JP5854872B2 (en) Copper foil with carrier, method for producing copper foil with carrier, laminate and method for producing printed wiring board

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150930

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160708

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20160712

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20160912

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20161018

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20161024

R150 Certificate of patent or registration of utility model

Ref document number: 6031332

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250