JP6007294B2 - Two-fluid spraying device - Google Patents

Description

  The present embodiment relates to a two-fluid spray device capable of supplying a liquid, for example, a liquid in which water is pressurized with compressed gas, for example, compressed air.

  Conventionally, (1) a vane pump, (2) a turbine pump, and (3) a diaphragm pump have been generally used as a liquid pressurizing means.

JP 2007-139403 A JP 2011-21830 A JP 2007-154733 A JP 2010-247106 A

  However, each pump (1), (2), (3) has the following problems. As a problem of (1), there is an increase in capacity of a pump at a high head.

  In addition, the common problems of (1) and (2) are the necessity of periodic replacement of the pump itself due to the life of the motor bearing (about 15000h), and the necessity of installing an inverter for controlling the motor speed when performing constant pressure control. There is sex.

  On the other hand, in (3), the problem of regular maintenance every 8,000 hours due to pulsation and diaphragm deterioration, the pressure can only be controlled by the relief valve, and accurate pressure control is difficult.

  Also, common to all (1), (2) and (3), there is a strong relationship between the flow rate and the head, and it is necessary to determine whether the target flow rate and pressure can be obtained from the performance curve or to determine the pump performance. There are some problems.

  When (1), (2) and (3) described above are used in a clean room of a semiconductor manufacturing factory, dust generation from the motor is common to all pumps, and vanes are generated in (1). As a problem common to both (1) and (2), there is a risk of contamination of a slight amount of foreign matter from the mechanical seal portion as a result of mixing of wear powder into the liquid by rotating while contacting the casing.

  Patent Document 3 can be cited as a countermeasure to such a problem. Since this uses a drive cylinder consisting of a cylinder and a piston, the control range of the relationship between flow rate and pressure is widened by dimensional accuracy at the time of piston manufacture. There is a problem that it is difficult to increase the capacity.

  This embodiment provides a two-fluid spray device that can widen the control range of the relationship between flow rate and pressure using a general-purpose instrument, can be made maintenance-free with high reliability, and can obtain high accuracy and stable pressure. For the purpose.

  Embodiment 1 supplies simultaneously the compressed gas supply system which supplies the compressed gas of predetermined pressure, the pressurized liquid supply system which supplies a pressurized liquid, the said compressed gas, and the fluid which atomized the said pressurized liquid A fluid pressure control for communicating between the pressurized liquid supply system and the compressed gas supply system, and a two-fluid nozzle means capable of generating the atomized fluid and spraying the atomized fluid to a place where the atomized fluid is required A system is provided, provided in the liquid pressure control system, capable of taking in the replenishment liquid while maintaining the pressure of the pressurized liquid supply system, and applying the pressure of the compressed gas of the compressed gas supply system to the pressurized liquid existing therein A buffer tank capable of supplying the pressurized liquid to the two-fluid nozzle means, a liquid replenishment control system communicating between the liquid replenishment system and the compressed gas supply system, and provided in the liquid replenishment control system, The liquid pressure of the liquid supply source remains A liquid supply tank that is capable of taking in and applies the pressure of the compressed gas of the compressed gas supply system to the liquid existing therein to supply the pressurized liquid to the buffer tank; and the liquid pressure control system A pressure adjusting means provided on the compressed gas supply system side to make the pressure of the compressed gas applied to the pressurized liquid in the buffer tank constant; and provided on the compressed gas supply system side of the liquid replenishment control system. A first valve that is opened so as to apply a pressure of the compressed gas of the compressed gas supply system when transferring the liquid in the tank into the buffer tank; A second valve provided between the tank and the buffer tank, which is linked to the first valve, and is opened when the liquid in the liquid supply tank is transferred into the buffer tank; When the liquid level of the pressurized liquid in the buffer tank falls below a predetermined value, an opening command is given to the first and second valves, and the liquid in the liquid supply tank is transferred into the buffer tank. When the liquid level in the liquid supply tank becomes a predetermined level or less, a closing command is given to the first and second valves, and the liquid in the liquid supply tank is transferred into the buffer tank. And a control means for stopping the operation.

  According to the embodiment described above, a two-fluid spray capable of widening the control range of the relationship between the flow rate and the pressure using a general-purpose instrument, making it highly reliable and maintenance-free, and obtaining a highly accurate and stable pressure. An apparatus can be provided.

1 is a schematic configuration diagram of a system to which a pressurizing pump of the present embodiment or a two-fluid spray device using the pressurizing pump is applied. The schematic block diagram for demonstrating the continuous water supply 2 fluid spraying apparatus by the pressurized air pressurization of Embodiment 1. FIG. The schematic block diagram for demonstrating the continuous water supply 2 fluid spraying apparatus by the pressurized air pressurization of Embodiment 1. FIG. The schematic block diagram for demonstrating the continuous water supply 2 fluid spraying apparatus by the pressurized air pressurization of Embodiment 1. FIG. The schematic block diagram for demonstrating the continuous water supply two-fluid spraying apparatus by the pressurized air pressurization of Embodiment 2. FIG. The schematic block diagram for demonstrating the continuous water supply two-fluid spraying apparatus by the pressurized air pressurization of Embodiment 2. FIG. The schematic block diagram for demonstrating the continuous water supply two-fluid spraying apparatus by the pressurized air pressurization of Embodiment 2. FIG. The schematic block diagram for demonstrating the intermittent water supply two-fluid spraying apparatus by the compressed air pressurization of Embodiment 3. FIG. The schematic block diagram for demonstrating the intermittent water supply two-fluid spraying apparatus by the compressed air pressurization of Embodiment 3. FIG. The schematic block diagram for demonstrating the intermittent water supply two-fluid spraying apparatus by the compressed air pressurization of Embodiment 3. FIG. The schematic block diagram for demonstrating the continuous water supply pump by the compressed air pressurization of Embodiment 4. FIG. The schematic block diagram for demonstrating the continuous water supply pump by the compressed air pressurization of Embodiment 4. FIG. The schematic block diagram for demonstrating the continuous water supply pump by the compressed air pressurization of Embodiment 4. FIG. The schematic block diagram for demonstrating the continuous water supply pump by the pressurized air pressurization of Embodiment 5. FIG. The schematic block diagram for demonstrating the continuous water supply pump by the pressurized air pressurization of Embodiment 5. FIG. The schematic block diagram for demonstrating the continuous water supply pump by the pressurized air pressurization of Embodiment 5. FIG.

  Hereinafter, embodiments will be described with reference to the drawings.

  First, an outline of a system to which a pressurized liquid supply apparatus and a two-fluid spraying apparatus using the pressurized liquid supply apparatus, which are the apparatus 100 of the present invention described below, is applied will be described with reference to FIG. .

  For example, the semiconductor manufacturing apparatus 02 is installed in the clean room 01, and air is supplied to and returned from the air conditioner 03 so that the temperature and humidity inside the clean room 01 become predetermined values. The temperature and humidity in 01 are detected by a detector, and this is taken into the air conditioning control panel 09 and proportional to the chilled water supply system supplied to the cooling coil 04 in the air conditioner 03 according to the difference between these and the target value. The command of the control valve 011 is changed, and further, the command of the proportional control valve 012 of the hot water supply system supplied to the heating coil 05 provided in the air conditioner 03 is changed.

  As a configuration other than this, in the air conditioner 03, the two-fluid spray header unit 06 having a plurality of two-fluid nozzles 9 and the atmosphere sprayed from the two-fluid spray header unit 06 are forced into the clean room 01. And a steam humidifying unit 08 to be described later. The steam humidification unit 08 is supplied with the steam on the secondary side of the proportional control valve 013 provided in the steam system installed outside the air conditioner 03, and the command of the proportional control valve 013 is from a nozzle control panel 010 described later. It has come to be given.

  The two-fluid spray control panel 010 is given an existing steam humidification command from the air-conditioning control panel 09, and based on this is given a command for the proportional control valve 013. The two-fluid spray control panel 010 is supplied with a pure water supply system and a compressed air. (Compressed air) supply system is connected, and piping is provided so that pure water from the pure water supply system and compressed air from the compressed air supply system are supplied to each nozzle 9 of the two-fluid spray header unit 06, respectively. A mechanism using a pressurized liquid supply apparatus such as a pressurized pump or a pressurized liquid supply apparatus such as a pressurized pump according to the embodiment is provided.

  Here, the two-fluid nozzle 9 to be used supplies compressed air from a compressed gas supply system, for example, an air supply system and water from a pressurized liquid supply system, for example, a pure water supply system, as shown in Patent Document 4, for example, It is a plurality of two-fluid nozzles that can atomize and spray water.

  Next, the first embodiment will be described with reference to FIG. 2 to FIG. 4, but the first embodiment is generally a compressed gas and pressurized liquid supply system from a common (same) compressed gas supply system (compressed gas supply system). In a two-fluid spraying device capable of supplying a pressurized fluid from a (pressurized liquid supply system) to a two-fluid nozzle and injecting the atomized fluid obtained thereby to a required place, from the compressed gas supply system A fluid supply system (fluid supply system) is provided so that the pressure of the compressed gas can be supplied to the pressurized liquid supply system, and the pressure of the liquid can be controlled by the compressed gas in the fluid supply system A two-fluid spraying device provided with means.

  Further, the first embodiment generally supplies the pressurized fluid from the pressurized liquid supply system and the compressed gas from the common (same) compressed gas supply system to the two-fluid nozzle, and the atomized fluid obtained by this is supplied. In the two-fluid spray device capable of spraying to a required place, the pressure of the compressed gas from the compressed gas supply system can be applied to the pressurized liquid supply system during the spray operation of the two-fluid nozzle. The pressure of the liquid supplied to the two-fluid nozzle is controlled to a desired value by the compressed gas from the compressed gas supply system, and the remaining amount of the pressurized liquid in the pressurized liquid supply system is insufficient The replenished pressurized liquid from the liquid replenishment system that secures the replenished pressurized liquid is applied as a pressure higher than the pressurized liquid of the pressurized liquid supply system using the compressed gas of the compressed gas supply system. Liquid pressure control supplied to pressurized liquid supply system It means provided, while maintaining the supply pressure of the pressurized liquid of the pressurized liquid supply system constant, a two-fluid spray device capable of spraying continuously.

  This will be specifically described below. The compressed gas supply system (compressed gas supply system) is, for example, a compressed air supply system (compressed air supply system) A, which is an air compressor (not shown) installed outside the nozzle control panel 010 in FIG. , A pipe connecting the air supply port of the two-fluid nozzle 9, an air solenoid valve 11 provided in the middle of the pipe, an air cheese joint 12 branched in three directions, and an air system nozzle side branched in three directions The cheese joint 13 and the electropneumatic regulator 14 are provided.

  Compressed air of 700 kPa, for example, is supplied to the primary side of the air system primary solenoid valve (PA1V) 11, and this compressed air is depressurized and adjusted to 300 kPa, for example, by the electropneumatic regulator 14 through the joints 12, 13, and this pressure is reduced. The air is supplied to the air supply port of the two-fluid nozzle 9.

  The liquid supply system (liquid supply system) is, for example, a pure water supply system (pure water supply system) W, which includes a pure water supply source (not shown) installed outside the nozzle control panel 010 in FIG. A pipe connecting the air supply port of the two-fluid nozzle 9, a pure water primary solenoid valve (PW1V) 1 provided in the middle of the pipe, a check valve 2, a water tank cheese joint 3 branched in three directions, and a water supply A tank lower side solenoid valve (STLV) 4, a check valve 5, a buffer tank cheese joint 6 branched in three directions, a nozzle cheese joint 7, and a buffer tank lower solenoid valve (BTLV) 8 are provided.

  The liquid pressure control means (compressed gas application control means) supplies, for example, the compressed air a from the compressed air system A to, for example, the pure water supply system W, thereby enabling the pressure of the feed water w to be controlled. A water pressure control pipe is provided, and a water pressure control device described below is provided in the middle of the water pressure control pipe.

  That is, the water tank upper side three-way electromagnetic wave provided with a speed controller 21 having a speed controller 21 and having an opening on the atmosphere side between one open end of the cheese joint 12 and one open end of the cheese joint 3. A valve (STHV) 22, a high water level meter (STHL) 26, a water tank cheese joint 23 branched in three directions, a polypropylene ball check valve 24, and a water tank 25 are disposed. A water level gauge (STLL) 27 is attached.

  Between the cheese joint 13 and the cheese joint 6, a liquid-only electropneumatic regulator 31, a water-dedicated cheese joint 32, a polypropylene ball check valve 33, a water supply cheese joint 34 branched in three directions, A buffer tank (BT) 35 and a water supply cheese joint 37 branched in three directions are provided. A high water level gauge (BTHL) 36 is attached to the cheese joint 34, a low water level gauge (BTLL) 38 is attached to the cheese joint 37, and one opening of the cheese joint 32 is used to release the pressure in the buffer tank to the atmosphere. The solenoid valve (BTHV) 28 is connected.

  The electropneumatic regulator 31 reduces the pressure of the compressed air applied to the pure water in the buffer tank 35 to a constant level. The primary pressure of the air supply system is, for example, 700 kPa, for example, 290 kPa (constant). The pressure is reduced.

  The nozzle control panel 010 of FIG. 1 has a detection signal of a low water level meter 38 that is provided in the buffer tank 35 and detects that the internal liquid level has become the lowest, whereby the nozzle control panel 010 receives the water tank. A transfer command for transferring the water in the buffer tank 35 to the buffer tank 35, specifically, a command to open the electromagnetic valve 11, open the electromagnetic valve 22, open the electromagnetic valve 1, and open the electromagnetic valve 4. Is given. In this state, since the pressure (700 kPa) of compressed air in the air supply system is gradually applied to the water in the water supply tank 25 via the speed controller 21, the water in the water supply tank 25 is transferred into the buffer tank 35. Is done. At this time, even if the solenoid valve 1 is in an open state, since there is a check valve 2, water does not flow backward to the primary side of PW-1V. When this transfer state continues, the water in the water supply tank 25 is transferred into the buffer tank 35, and the low water level meter 27 in the water supply tank 25 detects that the water level in the water supply tank 25 has decreased. A signal is given to the nozzle control panel 010, a transfer stop command, specifically, the solenoid valve 22 is closed, the solenoid valve 4 is closed, and the water in the water supply tank 25 is stopped from being transferred into the buffer tank 35. At the same time, pure water is supplied from the water supply source to the water supply tank 25. When this state continues for a predetermined time and the water supply tank 25 becomes full, the ball of the check valve 24 in the water supply tank 25 floats and the flow of water is stopped, thereby stopping the supply of pure water from the water supply source.

  The buffer tank 35 and the water supply tank 25 are respectively provided with high water level meters 36 and 26 for detecting that the water level has become high, and this detection output is input to the nozzle control panel 010. These can be used as a fail-safe function for preventing in advance a fatal problem that occurs when water is filled inside or water leaks from the check valve 24.

  Here, the start water filling control will be described with reference to FIG. At the time of starting, the solenoid valve 11 is closed, the set values of the electropneumatic regulators 14 and 31 are 0, the solenoid valves 1, 4, 22, 8 and 28 are opened to fill the buffer tank 35 with water. Thereafter, when the high water level meter 36 of the buffer tank 35 is operated and a water level is detected, spraying is started. When the high water level meter 36 does not detect the liquid level within 120 seconds, for example, the water filling control time-up time at start-up is started, and the spray start control is started by issuing a time-up water filling control time-up. Next, the solenoid valves 22, 4, 28, and 8 are closed, the solenoid valve 11 is opened, and spray start control is started. In this case, even when the solenoid valve 8 is closed, the direction of water flow is opposite to the direction in which the solenoid valve is installed, so that water is supplied from the buffer tank 35 to the water supply system of the two-fluid nozzle 9. At the same time, water is also supplied into the water supply tank 25, and when the water supply tank 25 is full, the high water level meter 26 operates to stop water supply into the water supply tank 25. In this way, water filling control at start-up is performed.

  Since the solenoid valve 8 uses a pilot type, the following effects are obtained. That is, during normal spraying of the nozzle 9, the solenoid valve 8 is in a closed state, but the arrow of the flow direction displayed on the solenoid valve 8 is the reverse direction in the direction of the header → buffer tank 35. Water can be supplied to the buffer tank 35 of the water supply system W. Here, when a direct acting solenoid valve is used as the solenoid valve 8, the direct acting solenoid valve requires two opening and closing operations for one stop of spraying, and the solenoid valve 28 and two independent solenoid valve command digital outputs are required, so a solenoid valve is used.

  According to Embodiment 1 described above, a drive cylinder can be obtained by using a general-purpose instrument and using two electropneumatic regulators without using a drive cylinder composed of a cylinder and a piston as in Patent Document 1. Thus, it is possible to provide a two-fluid spray device that can improve the problems caused by the use of. Specifically, it is possible to provide a two-fluid spray device that can widen the control range of the relationship between the flow rate and the pressure, can be maintenance-free with high reliability, and can obtain a highly accurate and stable pressure continuously. Further, an electropneumatic regulator 31 dedicated to water supply is provided separately from the electropneumatic regulator 14 included in the air supply system, and the liquid pressure is controlled by the expansion of air, so that the response speed is very fast.

  The second embodiment will be described with reference to FIGS. 5 to 7. The difference from the first embodiment shown in FIGS. 2 to 4 is that the water-only electropneumatic unit provided between the compressed air supply system A and the buffer tank 35 is described. Without the regulator 31, a proportional control valve 41 is provided between the discharge side of the buffer tank 35 and the water supply system of the two-fluid nozzle 9, and a three-way electromagnetic valve is provided between the primary side of the electromagnetic valve 11 of the air supply system and the water supply tank 25. 42, a water supply system branched between the discharge side of the buffer tank 35 and the check valve 5 is provided, and a drainage electromagnetic valve 43 is provided thereon. The other points are the same as those in FIGS. 2 to 4, but FIGS. 5 to 7 are simplified as compared with FIGS. 2 to 4.

  FIG. 5 is a diagram for explaining a state during normal spraying. In this state, the solenoid valve 11 of the compressed air supply system A is open, the solenoid valve 1 of the pure water supply system W is open, the proportional control valve 41 is open at a desired opening degree, and the three-way valve 42 Is open. The pressure on the primary side of the piping of the compressed air supply system A, for example, compressed air is 600 kPa, and the pressure supplied to the buffer tank 35 and the two-fluid nozzle 9 by the electropneumatic regulator 14 is 300 kPa.

  On the other hand, the pressure on the primary side of the pipe of the pure water supply system W is 200 kPa, and the water supply tank 25 is full of water. The pressure of water when supplying the two-fluid nozzle 9, for example, 300 kPa, can be controlled to an arbitrary pressure by the proportional control valve 41.

  In FIG. 6, when the water level in the buffer tank 35 falls below the low water level gauge 38 in the state where the two-fluid nozzle 9 is spraying, the liquid transfer from the water supply tank 25 to the buffer tank 35 is started.

  In FIG. 7, when the water level of the water supply tank 25 further falls from the state of FIG. 6 and becomes the low water level gauge 27 or less, the three-way valve 42 is closed and the liquid is supplied into the water supply tank 25 from the solenoid valve 1 side. When the interior is full, the ball of the check valve 24 in the water supply tank 25 floats and the flow of water is blocked, thereby stopping the supply of pure water from the water supply source.

  Although Embodiment 3 is demonstrated with reference to FIG. 8 thru | or FIG. 10, it is a figure for demonstrating the intermittent water spray apparatus by compressed gas pressurization. The compressed air supply system A includes a solenoid valve 11 and a regulator 14 in a pipe connecting a compressed air supply source and a two-fluid nozzle 9 (not shown). The pressure of the compressed air supply source is 700 kPa, for example, and the output of the regulator 14 is It can be set to 300 kPa or 0 kPa. The water supply system W includes a solenoid valve 1 in a pipe connecting a water supply source (not shown) and the two-fluid nozzle 9.

  Further, a high water level meter that is disposed between a pipe that connects the regulator 14 and the two-fluid nozzle 9 and a pipe that connects the solenoid valve 1 and the two-fluid nozzle 9 and detects that the water inside is full. 36 and a buffer tank 35 having a low water level meter 38 for detecting that the liquid inside has become low.

  FIG. 8 shows a state in which the two-fluid nozzle 9 is spraying. In this case, since the regulator 14 is on, the pressure of the compressed air is 300 kPa. Therefore, this pressure is applied to the water in the buffer tank 35, and the supply of compressed air and the pressurized water are supplied to the two-fluid nozzle 9. Supplied and sprayed.

  FIG. 9 shows a state where the solenoid valve 1 is opened after the spraying of the two-fluid nozzle 9 is stopped and the liquid is supplied to the pipes of the buffer tank 35 and the two-fluid nozzle 9.

  FIG. 10 shows a state in which water enters the buffer tank 35 from the state of FIG. 9 and is full, and this is detected by the high water level meter 36, the electromagnetic valve 1 is closed, and the water supply is stopped.

  Although Embodiment 4 is demonstrated with reference to FIG. 11 thru | or FIG. 13, this is a figure for demonstrating the continuous water supply pump which is an example of the pressurized liquid supply apparatus by compressed air pressurization. This is configured so that the pressure of the compressed air a from the compressed air supply system A can be applied to the water supply system W in the water supply apparatus that supplies the pressurized water from the water supply system W to the required place. In addition, liquid pressure control means for controlling the pressure of water to be constant by the compressed air a from the compressed air supply system A is provided.

  2 to 4, the two-fluid nozzle 9, the electropneumatic regulator 14, the electromagnetic valve 8, and the branch 7 are omitted.

  Specifically, the pure water supply system W includes an electromagnetic valve 1, a ball check valve 2, a water supply tank branch 3, an electromagnetic valve 4, a check valve 5, and a buffer tank branch 6.

  The gas system includes a compressed air solenoid valve 11, a water supply tank branch 12, and a buffer tank branch 13.

  Between the water supply tank branch 12 and the water supply tank branch 3, a speed controller 21, a three-way electromagnetic valve 22, a branch 23, a check valve 24, and a water supply tank 25 are disposed.

A high water level gauge 26 is attached to the branch 23, and a low water level gauge 27 is attached to the water supply tank 25.

  Between the buffer tank branch 13 and the buffer tank branch 6, a water electro-pneumatic regulator 31, a branch 32, a check valve 33, a branch 34, a buffer tank 35, and a branch 37 are disposed. A high water level gauge 36 is attached to the branch 34, and a low water level gauge 38 is attached to the branch 37.

  FIG. 11 is a diagram for explaining a state during normal operation of the continuous liquid pump by compressed air pressurization. The three-way valve 22 is closed and the piping pressure of the compressed air supply system A is, for example, 290 kPa. . By continuous operation in this state, the liquid level in the buffer tank 35 is lowered, the low water level gauge 38 is turned off, and a liquid supply command is issued from a control device (not shown).

  FIG. 12 shows a state in which the liquid is being transferred into the water supply tank 25, the three-way valve 22 is in an open state, and the gas piping pressure is 290 kPa, for example. In response to a liquid supply command from a control device (not shown), the three-way valve 22 is opened, and the water in the water supply tank 25 is transferred into the buffer tank 35 with the gas system primary pressure. Thereafter, the low water level gauge 27 is turned off, and the liquid supply command is stopped from a control device (not shown).

  FIG. 13 is a diagram for explaining a state during the water supply. The three-way valve 22 is closed, and the piping pressure of the compressed air supply system A is, for example, 290 kPa. The three-way valve 22 is closed by a liquid supply command from a control device (not shown), and water is supplied to the water supply tank 25 by the primary pressure of the water supply system W. When the water supply tank 25 is full, the check valve ball floats on the liquid and the liquid supply is stopped. In this case, the liquid supply speed can be adjusted by a speed controller installed on the outlet side of the three-way valve 11 at the top of the water supply tank 25.

  Embodiment 5 will be described with reference to FIG. 14 to FIG. 16, which is a diagram for explaining a continuous water supply pump by compressed air pressurization, and in which at least one of a water supply tank 25 and a buffer tank 35 is compressed. It is a water supply device provided with internal containers 25a and 35a for storing compressed air a from the air supply system A and separating water w from the water supply system W, respectively. The inner containers 25a and 35a used here are rubber diaphragms, for example.

  By comprising in this way, the function of the pump which is a liquid supply apparatus can be acquired, without compressed air and pressurized water contacting.

  Here, it is a figure for demonstrating the continuous water supply pump by a pressurized air pressurization, FIG. 14 is a figure for demonstrating during a normal driving | operation, FIG. 15 is for demonstrating during a water transfer in the water supply tank 25 FIG. 16 is a diagram for explaining water feeding.

  In FIG. 14, the solenoid valves 22 and 4 are closed, and the solenoid valve 1 is in an open state. At this time, the set value of the water-only electropneumatic regulator 31 is set so that the output pressure becomes 290 kPa, and the amount of water in the buffer tank 35 decreases due to continuous operation, and the internal container 35a in the buffer tank 35 is reduced. When the low water level gauge 38 is turned on due to the expansion of the water supply, the water supply command is determined.

  In FIG. 15, the solenoid valves 22 and 4 are open, and the solenoid valve 1 is in a closed state. At this time, the set value of the water-only electropneumatic regulator 31 is set so that the output pressure is 290 kPa, and the solenoid valves 22 and 4 are opened by the water supply command, the solenoid valve 1 is closed, and the compressed air is temporarily discharged. The water in the water supply tank 25 is transferred into the buffer tank 35 by pressure. The pressure in the buffer tank 35 is kept constant by the water-only electropneumatic regulator 31. By a preset timer, the three-way valve is closed after a certain time and the liquid transfer is stopped.

  In FIG. 16, when the water supply is stopped, the electromagnetic valves 22 and 4 are closed, the electromagnetic valve 1 is opened, and water is supplied to the water supply tank 25 by the primary pressure of water. When the water supply tank 25 is full, the water supply is stopped in a state where the internal container 25a is full. The speed of water supply can be adjusted by a speed controller 21 installed at the outlet of the electromagnetic valve 22.

  In the above-described embodiment, the reliability is further improved by combining either a diaphragm pump or a vortex turbine pump as a backup of a pressurizing pump that is an example of a liquid supply apparatus.

  DESCRIPTION OF SYMBOLS 01 ... Clean room, 02 ... Semiconductor manufacturing apparatus, 03 ... Air conditioner, 04 ... Cooling coil, 05 ... Heating coil, 06 ... Nozzle coil unit, 07 ... Fan, 08 ... Steam humidification unit, 09 ... Air conditioning control panel, 010 ... Nozzle Control panel, 011 ... proportional control valve, 012 ... proportional control valve, 013 ... proportional control valve, 1 ... pure water primary solenoid valve, 2 ... check valve, 3 ... water tank cheese joint, 4 ... water tank lower side solenoid valve, DESCRIPTION OF SYMBOLS 5 ... Check valve, 6 ... Buffer tank cheese joint, 7 ... Nozzle cheese joint, 8 ... Solenoid valve, 9 ... Two-fluid nozzle, 11 ... Air system primary solenoid valve, 12 ... Air system cheese joint, 13 ... Cheese joint, 14 ... Electropneumatic regulator, 21 ... Speed controller, 22 ... Water tank upper side three-way solenoid valve, 23 ... Water tank cheese joint, 24 ... Check valve, 25 ... Water tank, 6 ... High water level meter, 27 ... Low water level meter, 28 ... Solenoid valve, 29 ... Fitting, 31 ... Water-pneumatic regulator, 32 ... Cheese fitting, 33 ... Check valve, 34 ... Water supply cheese fitting, 35 ... Buffer tank, 36 ... High water level meter, 37 ... Water supply cheese joint, 38 ... Low water level meter, 41 ... Proportional control valve, 42 ... Two-way solenoid valve, 43 ... Solenoid valve, 100 ... Device of this proposal.

Claims (3)

A compressed gas supply system for supplying a compressed gas of a predetermined pressure;
A pressurized liquid supply system for supplying pressurized liquid;
A two-fluid nozzle means capable of generating an atomized fluid by simultaneously supplying the compressed gas and a fluid obtained by atomizing the pressurized liquid, and jetting the atomized fluid to a place where the atomized fluid is required;
A liquid pressure control system that communicates between the pressurized liquid supply system and the compressed gas supply system is provided, provided in the liquid pressure control system, and replenishment liquid can be taken in with the pressure of the pressurized liquid supply system, A buffer tank capable of supplying the pressurized liquid to the two-fluid nozzle means by applying the pressure of the compressed gas of the compressed gas supply system to the pressurized liquid existing therein;
A liquid replenishment control system communicating between the liquid replenishment system and the compressed gas supply system is provided. The compressed gas supply system is provided in the liquid replenishment control system and can be taken in with the liquid pressure of the liquid supply source. A liquid supply tank capable of supplying the pressurized liquid to the buffer tank by applying the pressure of the compressed gas to the liquid existing therein,
A pressure adjusting means that is provided on the compressed gas supply system side of the liquid pressure control system and makes the pressure of the compressed gas applied to the pressurized liquid in the buffer tank constant;
Provided on the compressed gas supply system side of the liquid replenishment control system, and when the liquid in the liquid supply tank is transferred into the buffer tank, the pressure of the compressed gas in the compressed gas supply system is opened. A first valve and the pressurized liquid supply system, which is provided between the liquid supply tank and the buffer tank, and is interlocked with the first valve, and the buffer supplies the liquid in the liquid supply tank; A second valve that is open when transferred into the tank;
When the liquid level of the pressurized liquid in the buffer tank falls below a predetermined value, an opening command is given to the first and second valves, and the liquid in the liquid supply tank is transferred into the buffer tank. When the liquid level in the liquid supply tank becomes a predetermined level or less, a closing command is given to the first and second valves, and the liquid in the liquid supply tank is transferred into the buffer tank. Control means to stop doing,
A two-fluid spraying device characterized by comprising: A common compressed gas supply system for supplying a compressed gas of a predetermined pressure;
A pressurized liquid supply system for supplying pressurized liquid;
A two-fluid nozzle means capable of generating an atomized fluid by simultaneously supplying the compressed gas and a fluid obtained by atomizing the pressurized liquid, and jetting the atomized fluid to a place where the atomized fluid is required;
A liquid pressure control system that communicates between the pressurized liquid supply system and the compressed gas supply system is provided, provided in the liquid pressure control system, and replenishment liquid can be taken in with the pressure of the pressurized liquid supply system, A buffer tank capable of supplying the pressurized liquid to the two-fluid nozzle means by applying the pressure of the compressed gas of the compressed gas supply system to the pressurized liquid existing therein;
A liquid replenishment control system communicating between the liquid replenishment system and the compressed gas supply system is provided. The compressed gas supply system is provided in the liquid replenishment control system and can be taken in with the liquid pressure of the liquid supply source. A liquid supply tank capable of supplying the pressurized liquid to the buffer tank by applying the pressure of the compressed gas to the liquid existing therein,
Pressure adjusting means provided on the compressed gas supply system side of the liquid pressure control system, and controlling the pressure of the compressed gas applied to the pressurized liquid in the buffer tank to a desired value;
And the buffer tank and the provided in the pressurized liquid supply system between the two-fluid nozzle means, the two-fluid nozzle means can arbitrarily control the pressure of the pressurized liquid supplied to the proportional control valve, before Symbol liquid body Provided on the compressed gas supply system side of the pressure control system, and when the pressurized liquid in the liquid supply tank is transferred into the buffer tank, it is opened so that the pressure of the compressed gas in the compressed gas supply system is applied. A first valve;
When the liquid level of the pressurized liquid in the buffer tank becomes a predetermined value or less, an opening command is given to the first valve, the liquid in the liquid supply tank is transferred into the buffer tank, and Control for giving a closing command to the first valve when the liquid level in the liquid supply tank becomes a predetermined level or less, and stopping transferring the liquid in the liquid supply tank into the buffer tank. Means,
A two-fluid spraying device characterized by comprising: A container for storing compressed gas from the compressed gas supply system and separating pressurized liquid from the liquid supply system is provided inside at least one of the liquid supply tank and the buffer tank. The two-fluid spraying device according to any one of claims 1 and 2 .

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