JP2014034027A - Two-fluid sprayer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a two-fluid sprayer capable of easily preventing liquid sagging.SOLUTION: There is provided a two-fluid sprayer which comprises: a pressurized gas supply system for supplying a desired pressurized gas; a pressurized liquid supply system for supplying a desired pressurized liquid; a plurality of two-fluid nozzles for spraying an atomized gas obtained by mixing the pressurized gas and the pressurized liquid to a desired place; and means which releases pressure of the pressurized liquid in a liquid header pipe constituting the two-fluid nozzles when a spraying operation of the two-fluid nozzles is stopped and prevents liquid sagging from the two-fluid nozzles by drawing out the liquid in the liquid header pipe.

Description

  The present embodiment relates to a two-fluid spraying device including a plurality of two-fluid nozzles that spray an atomized fluid obtained by mixing a compressed gas such as compressed air and a pressurized liquid such as water onto a desired location.

  Conventionally, there is a two-fluid spraying device including a plurality of pressurized two-fluid nozzles. In this case, the pressurized two-fluid nozzle sprays the atomized fluid obtained by mixing compressed air and pure water inside a desired location, but does not pressurize the pure water of the pure water supply system. And the pressure of the compressed air affects the pure water supply system, and the compressed air flows back to the pure water supply system.

  In addition to the examples described above as the two-fluid spray device, there are those disclosed in Patent Document 1 and Patent Document 2 described below. Of these, in Patent Document 1, the liquid remaining in the pipe is blown by blowing air from another flow path to prevent dripping.

  However, in the method of Patent Document 1, (1) when the amount to be ejected is reduced, there is a risk that the liquid will be ejected after stopping due to the residual pressure of the pipe, or that the liquid in the pipe will start dripping down. is there.

(2) When the amount to be sprayed is increased, it takes a considerable time to blow, and thus cannot be used for a control device that requires finely controlling the spray amount. (3) When used in a large-scale spray system (for example, when 20 nozzles are linearly arranged at a length of 20 m, etc.), dripping of all nozzles can be effectively performed at low cost. It was difficult to prevent dripping.

  Further, in Patent Document 2, there are up to four nozzles that can be attached to one unit, and the nozzles can be arranged only in a concentrated manner, resulting in problems such as cost of the unit and difficulty in installation. .

JP 2007-154733 A JP-A-8-278047 JP 2010-63960 A

  In the above-described two-fluid spray device, there is a possibility of dripping, and it is necessary to fill and drain the system when the system is suspended or restarted. In addition, there are problems such as bacterial growth due to deterioration of residual water.

  This embodiment has been made to solve such a problem, and can easily prevent dripping. Also, when the system operation is suspended or restarted, the system is automatically filled and drained. Providing a two-fluid spraying device that can spray without worrying about troubles throughout the year without worrying about problems such as damage to parts due to freezing of residual water and bacterial growth due to deterioration of residual water The purpose is to do.

  Embodiment 1 is a compressed gas supply system that supplies a desired compressed gas, a pressurized liquid supply system that supplies a desired pressurized liquid, and an atomized fluid obtained by mixing the compressed gas and the pressurized liquid. A plurality of two-fluid nozzles for spraying to a desired location, and when stopping the spraying operation of the two-fluid nozzle, the pressure of the pressurized liquid in the liquid header pipe constituting the two-fluid nozzle is set to the outside. And a means for preventing dripping from the two-fluid nozzle by pulling out the liquid in the liquid header pipe while opening the two-fluid spraying device.

  According to the first embodiment described above, it is possible to easily prevent dripping.

  In the first embodiment, after the spraying operation is completed, the liquid in the apparatus is discharged by automatic control in the first embodiment, and when the spraying is resumed, it is necessary to perform the spray control in the apparatus by automatic control. By having the function of introducing a quantity of liquid, the piping member can be expanded by freezing and expanding, whether it is a sanitary problem due to decay of the liquid remaining in the device, a functional problem due to deterioration, or the like. It is a two-fluid spray device that makes it possible to avoid damage.

  According to the seventh embodiment described above, when the system operation is suspended or resumed, the system is automatically filled with water and drained, parts are damaged due to freezing of residual water, and bacteria are propagated due to deterioration of residual water. Without worrying about the problem, you can spray without worrying throughout the year.

The schematic block diagram of the system with which the two-fluid spraying apparatus of this embodiment is applied. The schematic block diagram for demonstrating the dripping prevention means in the two fluid spraying apparatus of Embodiment 1. FIG. The time chart for demonstrating the operation | movement of FIG. The schematic block diagram of the two-fluid spraying apparatus of Embodiment 2. FIG. The schematic block diagram for demonstrating the water filling control state at the time of starting in the two-fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the water filling control state at the time of starting in the two-fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the spray start state in the two fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the water system piping full detection state in the two-fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the state in the normal spraying in the two fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the state before the spray stop in the two fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the state in the inside of a buffer tank just before the spray stop in the two fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the state in the waste_water | drain in the two fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the state in the waste_water | drain in the water header unit of the two-fluid nozzle in the two-fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the spray start control state in the two fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the spray stop control state in the two fluid spraying apparatus of FIG. The schematic block diagram for demonstrating the header unit in the two-fluid spraying apparatus of FIG. The timing chart for demonstrating the dripping prevention control in the two fluid spraying apparatus of FIG.

  Hereinafter, embodiments will be described with reference to the drawings.

  First, referring to FIG. 1, an outline of a system to which a two-fluid spray device, which is the device 100 of the present invention described below, is applied will be described.

For example, a semiconductor manufacturing apparatus 02 is installed in the clean room 01, and air supply and return air are performed with the air conditioner 03 so that the temperature and humidity inside the clean room 01 become predetermined values.
The temperature and humidity in the clean room 01 are detected by a detector, and this is taken into the air conditioning control panel 09, and the chilled water supply system that supplies the cooling coil 04 in the air conditioner 03 according to the difference between them and the target value. The command of the proportional control valve 011 is changed, and further, the command of the proportional control valve 012 of the hot water supply system supplied to the heating coil 05 provided in the air conditioner 03 is changed.

  As a configuration other than this, in the air conditioner 03, the two-fluid spray header unit 06 having a plurality of two-fluid nozzles 9 and the atmosphere sprayed from the two-fluid spray header unit 06 are forced into the clean room 01. And a steam humidifying unit 08 to be described later. The steam humidification unit 08 is supplied with the steam on the secondary side of the proportional control valve 013 provided in the steam system installed outside the air conditioner 03, and the command of the proportional control valve 013 is from a nozzle control panel 010 described later. It has come to be given.

The nozzle control panel 010 is given an existing steam humidification command from the air conditioning control panel 09, and based on this, a command is given to the proportional control valve 013. The nozzle control panel 010 is connected to a nozzle unit 06 described later. A pressurized liquid supply system such as a pressurized pure water supply system W and a compressed gas supply system such as a compressed air (compressed air) supply system A are connected, and the two-fluid spray of this embodiment is placed in the middle of these systems W and A. An apparatus 100 is provided. Pipes are provided so that the pure water w from the pressurized pure water supply system W and the compressed air a from the compressed air supply system A are supplied to the plurality of two-fluid nozzles 9 via the nozzle unit 06, respectively. Yes.

  The plurality of two-fluid nozzles 9 spray the atomized fluid obtained by mixing the compressed air a and the pure water w onto a desired location. For example, the pressure of the compressed air a is applied to the pure water supply system W. If there is an influence and the pure water w of the pure water supply system W is not pressurized, the compressed air a has a characteristic of flowing backward to the pure water supply system W.

  FIG. 2 is a schematic configuration diagram for explaining the dripping prevention means of the two-fluid spray device 100. This is a first valve that supplies a desired compressed gas, for example, compressed air a made by the compressor CP, and allows the compressed air a to flow in the middle or blocks the flow of the compressed air a. For example, a compressed air supply system A including an electromagnetic valve 021 is provided.

  Further, the pressurized pure water w is supplied to a desired pressurized liquid, for example, the pump PP. The pressurized pure water w can be circulated in the middle, or the pressurized pure water w can be prevented from flowing. A pressurized water supply system W including two valves, for example, an electromagnetic valve 022 is provided.

  Furthermore, it is provided at the connecting portion between the two-fluid nozzle 9 and the pressurized water supply system W and is opened when the pressurized pure water w is discharged from the pressurized water supply system W to the outside. An open system (drainage system) D including 023 is provided.

  When the spraying of the two-fluid nozzle 9 is stopped, the pressurized pure water w and the compression from the pressurized water supply system W with the first electromagnetic valve 021 and the second electromagnetic valve 022 closed as shown in FIG. The supply of the compressed air a from the air supply system A is stopped, the third electromagnetic valve 023 is opened, and the pressurized pure water w in the pipe of the pressurized water supply system W is drawn by the principle of siphon. Control means for preventing dripping from the nozzle 9, for example, a nozzle control panel 010 is provided.

  According to the first embodiment described above, since the control means for preventing dripping of the pressurized pure water w in the pipe of the pressurized water supply system W is provided by the siphon principle, dripping can be easily prevented.

  As a modified example of the first embodiment, when stopping the spraying operation of the two-fluid nozzle 9 as a means for preventing liquid dripping indicated by a broken line in FIG. 2, that is, in the liquid header pipe constituting the two-fluid nozzle 9 While releasing the pressure of the pressurized pure water to the outside, the water in the liquid header pipe may be drawn out.

  Further, as a modified example of the first embodiment different from this, the compressed air supply system A and the pressurized pure water supply system W in FIG. A pressure application system for applying the pressure of the compressed air a is newly provided, and when the spraying of the two-fluid nozzle 9 is stopped, the flow of the pressurized pure water w from the pressurized pure water supply system W is prevented, In addition, by making the compressed air a of the pressure application system at atmospheric pressure, the pressurized pure water w from the pressurized pure water supply system W is sucked into the pressure application system by the siphon principle, Control means for stopping the supply of the compressed air a from the compressed air supply system A to the two-fluid nozzle 9 when the compressed air a of the application system becomes atmospheric pressure may be provided.

  Here, the two-fluid nozzle 9 to be used, for example, as shown in Patent Document 3, supplies compressed air from a compressed gas supply system such as an air supply system and water from a pressurized liquid supply system such as a pure water supply system, A plurality of two-fluid nozzles that can make the atomized fluid obtained by mixing water and fine particles into a desired location, and each nozzle affects the pressurized water supply system, If the pressurized water of the pressurized water supply system is not pressurized, this is a so-called internal mixing type nozzle that has a characteristic that the compressed air flows back to the pressurized water supply system.

  Next, Embodiment 2 will be described with reference to FIG. 4 to FIG. 14, which are a compressed air supply system (compressed air supply system) A, a pure water supply system (pure water supply system) W, and a pure water heater. A pressure supply control system (pure water pressure supply control system) C, a pure water pressure control system (pure water pressure control system) P, and a drainage system D are provided.

  This will be described below with reference to FIG. The compressed air supply system (compressed air supply system) A includes an air compressor (not shown) installed outside the nozzle control panel 010 in FIG. 1 and a pipe connecting the air supply port of the two-fluid nozzle 9. The air system primary solenoid valve 11 provided in the middle of the pipe, the air system cheese joint 12 branched in three directions, the cheese joint 13 on the nozzle side of the air system branched in three directions, and the electropneumatic regulator 14 are provided. Yes.

  In this case, 700 kPa of compressed air, for example, is supplied to the primary side of the solenoid valve (PA1V) 11, and this compressed air is depressurized and adjusted to, for example, 300 kPa by the electropneumatic regulator 14 through the joints 12 and 13 to reduce the pressure. The air is supplied to the air supply port of the two-fluid nozzle 9.

  The pure water supply system (pure water supply system) W includes a liquid supply source (not shown) installed outside the nozzle control panel 010 in FIG. 1, a pipe connecting the air supply port of the two-fluid nozzle 9, and this A pure water primary solenoid valve (PW1V) 1, a check valve 2, a water tank cheese joint 3 branched in three directions, a water tank lower side solenoid valve (STLV) 4, and a check valve 5 provided in the middle of the pipe The buffer tank cheese joint 6 branched in three directions, the cheese joint 7, and the solenoid valve 8 are included.

  The pure water pressurization and replenishment control system (pure water pressurization and replenishment control system) C supplies the compressed air from the compressed air supply system A to the pure water supply system W, so that the water supply speed can be controlled. A pressure control pipe is provided, and a water pressure control device described below is provided in the middle of the water pressure control pipe.

  That is, the water tank upper side three-way electromagnetic wave provided with a speed controller 21 having a speed controller 21 and having an opening on the atmosphere side between one open end of the cheese joint 12 and one open end of the cheese joint 3. A valve (STHV) 22, a high water level meter (STHL) 26, a water tank cheese joint 23 branched in three directions, a polypropylene ball check valve 24, and a water tank 25 are disposed. A water level gauge (STLL) 27 is attached.

  A pure water pressure control system (pure water pressure control system) P is a liquid-only, for example, water-dedicated electropneumatic regulator 31, a cheese joint 32 branched in three directions, and a polypropylene ball between the cheese joint 13 and the cheese joint 6. A check valve 33, a water supply cheese joint 34 branched in three directions, a buffer tank (BT) 35, and a water supply cheese joint 37 branched in three directions are arranged. A high water level gauge (BTHL) 36 is attached to the cheese joint 34, a low water level gauge (BTLL) 38 is attached to the cheese joint 37, and one opening of the cheese joint 32 is used to release the pressure in the buffer tank to the atmosphere. The solenoid valve (BTHV) 28 is connected.

  The electropneumatic regulator 31 reduces the pressure of the compressed air applied to the pure water in the buffer tank 35 to a constant level. The primary pressure of the air supply system is, for example, 700 kPa, for example, 290 kPa (constant). The pressure is reduced.

  A detection signal of a low water level meter 38 that is provided in the buffer tank 35 and detects that the internal liquid level has become the lowest is input to the nozzle control panel 010 of FIG. Command to transfer water to the buffer tank 35, specifically, a command to open the solenoid valve 11, open the solenoid valve 22, open the solenoid valve 1, and open the solenoid valve 4 It is done. In this state, the pressure (700 kPa) of compressed air in the supply system is gradually applied to the water in the supply tank 25 via the speed controller 21, so that the water in the supply tank 25 is transferred into the buffer tank 35. Is done. At this time, even if the solenoid valve 1 is in the open state, there is no check valve, so that water does not flow back to the primary side of the solenoid valve 1. When this transfer state continues, the water in the water supply tank 25 is transferred into the buffer tank 35, and the low water level meter 27 in the water supply tank 25 detects that the water level in the water supply tank 25 has decreased. A signal is given to the nozzle control panel 010, a transfer stop command, specifically, the solenoid valve 22 is closed, the solenoid valve 4 is closed, and the water in the water supply tank 25 is stopped from being transferred into the buffer tank 35. At the same time, pure water is supplied from the water supply source to the water supply tank 25. When this state continues for a predetermined time and the water supply tank 25 becomes full, the ball of the check valve 24 in the water supply tank 25 floats and the flow of water is stopped, thereby stopping the supply of pure water from the water supply source.

  The buffer tank 35 and the water supply tank 25 are respectively provided with high water level meters 36 and 26 for detecting that the water level has become high, and this detection output is input to the nozzle control panel 010. These can be used as a fail-safe function to prevent a fatal problem that occurs when the buffer tank 35 and the water supply tank 25 are filled with water or when water leaks from the check valve 24 in advance. Yes.

  The drainage system D is connected to a cheese joint 7, which is a connection between the pure water supply system W and the water header pipe of the two-fluid nozzle 9, and an electromagnetic valve 10 is provided at the open end of the drainage system D.

  The above-described opening / closing operation commands for the solenoid valves 1, 4, 8, 10, 11, 22, and 28 are given by the nozzle control panel 010, and the setting values for the electropneumatic regulators 14 and 31 are set by the nozzle control panel 010. In addition, the setting values of the speed controllers 21 and 29 are set by the nozzle control panel 010. The nozzle control panel 010 includes a current pressure value measured by the electropneumatic regulators 14 and 31 and a high water level gauge 26 and 36. The operation signals of the water level gauges 28 and 38 are input.

  The nozzle control panel 010 turns on a breaker which is a power switch, thereby starting liquid filling control such as starting water filling control, spray starting control, liquid supply control such as water supply control, spray stop control, drainage All controls such as drainage control are performed automatically.

  Hereinafter, the control operation as described above will be described with reference to FIGS.

  First, the start water filling control will be described with reference to FIGS. 5 and 6. As shown in FIG. 5, since the set values of the electropneumatic regulators 14 and 31 are both set to 0 kPa and the solenoid valves 1, 4, 8, 22, and 28 are opened, the water from the pump of the pressurized water supply system W w is supplied into the buffer tank 35 and water filling is started. When the water filling is continued for a predetermined time, the inside of the buffer tank 35 becomes full.

  The fullness in the buffer tank 35 is detected by the operation of a high water level meter 36 provided in the buffer tank 35. Thereafter, as shown in FIG. 6, the set value of the electropneumatic regulator 14 is set to 222 kPa, and The set value of the regulator 31 is set to 246 kPa, the solenoid valves 4, 8, 22, and 28 are closed, and the solenoid valve 11 is opened. At this time, air and water are supplied to the nozzle 9 to start the spraying operation of the nozzle 9 and the electromagnetic valve 1 is in an open state, so that the water w from the pump of the pressurized water supply system W is supplied to the water supply tank 25. Supplied. In this case, even when the solenoid valve 8 is closed, the flow is opposite to the direction in which the solenoid valve 8 is attached, so the pressurized water is supplied to the header piping of the pressurized water supply system W of each nozzle 9 without stopping the flow.

  If this state continues for a predetermined time, when the water supply tank 25 becomes full, the ball of the check valve 24 provided in the water supply tank 25 floats, and the flow of water is blocked, thereby stopping the supply of pure water from the water supply source. In addition, when the water supply tank 25 is full and water is leaked from the check valve 24 and cannot be stopped, the high water level gauge 26 provided in the water supply tank 25 operates to A full state is detected, the solenoid valve 1 is closed, and the supply of water w from the pump of the pressurized water supply system W is stopped. Such an operation is continued until the low water level meter 38 provided in the buffer tank 35 is operated, and when the low water level meter 38 is operated, the electromagnetic valve 4 is opened and the water tank 25 is opened. Water is supplied to the buffer tank 35, and this operation is continued until the low water level indicator 27 provided in the water supply tank 25 is operated. Thereafter, the solenoid valves 1, 4, 8, 22, and 28 are opened. When the water w from the pump of the pressurized water supply system W is supplied to the buffer tank 35 and the buffer tank 35 becomes full, the water w from the pump of the pressurized water supply system W is supplied to the water supply tank 25 and the water supply tank 25 becomes full. Then, the supply of water w from the pump of the pressurized water supply system W is stopped.

  In the unlikely event that the high water level sensor 36 is out of order and the liquid level is not detected, a function for measuring the water filling control time at start-up is provided so that the spraying operation of the nozzle 9 is performed reliably. If the water filling control time-up time is within 120 seconds, for example, and the high water level sensor 36 does not detect the liquid level, the start-up water filling control time-up is issued and the spray start control is started.

  Next, spray start control will be described with reference to FIGS.

  FIG. 7 is a view for explaining the spray start state. The solenoid valves 22 and 4 are all closed, the solenoid valves 28 and 8 are both closed, the solenoid valve 11 is open, and the electropneumatic regulator 14 The set value is set to 300 kPa, and the set value of the electropneumatic regulator 31 is set to about 290 + 50 kPa. In this state, when the spraying of the nozzle 9 is started, in order to quickly fill the piping of the pressurized water supply system W with water, water is pressurized at a pressure suitable for two-fluid spraying +50 kPa.

  FIG. 8 is a diagram illustrating a full water detection state of the piping of the pressurized water supply system W. The electromagnetic valves 22 and 4 are all closed, the electromagnetic valves 28 and 8 are both closed, and the electromagnetic valve 11 is open. Therefore, the set value of the electropneumatic regulator 14 is set to 300 kPa, and the set value of the electropneumatic regulator 31 is set to 290 + 50 kPa. In this state, when the pipe of the pressurized water supply system W is filled with water, the current value of the pressure in the pipe of the pressurized water supply system W matches the set value. This is detected, the current value of the pressure in the piping of the pressurized water supply system W is returned to the original set value, and normal spraying is started.

  FIG. 9 shows a state during normal spraying. The electromagnetic valves 22 and 4 are all in a closed state, the electromagnetic valves 28 and 8 are both in a closed state, the electromagnetic valve 11 is in an open state, and the electropneumatic regulator 14. Is set to 300 kPa, and the setting value of the electropneumatic regulator 31 is set to about 290 kPa. In this state, spraying is performed by the nozzle 9 at normal pressure. Since no bubbles remain in the pipe of the pressurized water supply system W, even if spraying of the nozzle 9 is stopped in this state, dripping due to expansion of the bubbles is unlikely to occur.

  FIG. 10 shows a state in which the pressure in the buffer tank 35 is released before the nozzle 9 stops spraying, the electromagnetic valves 22 and 4 are all closed, and the electromagnetic valves 28 and 8 are both closed. 11 is an open state, the set value of the electropneumatic regulator 14 is set to 300 kPa, for example, and the set value of the electropneumatic regulator 31 is set to 0 kPa. In order to stop the spraying of the nozzle 9 in this state, the set value of the electropneumatic regulator 31 is set to 0 and the pressure in the buffer tank 35 is released. In this case, the header pipe is in a state where a pressure of about 200 kPa is applied due to the reverse pressure by the compressed air.

  FIG. 11 shows a state in which the pressure in the buffer tank 35 is being released immediately before the nozzle 9 stops spraying. The electromagnetic valves 22 and 4 are all closed, the electromagnetic valves 28 and 8 are both open, The valve 11 is in an open state, the installation value of the electropneumatic regulator 31 is set to 0 kPa, and the pressure drop in the buffer tank 35 is confirmed. The installation value of the electropneumatic regulator 14 is set to 0 kPa, and the electropneumatic regulator 14 When it is confirmed that the measured pressure is 100 kPa or less, both the solenoid valves 28 and 8 are opened, and the supply of compressed air is finally stopped. In this case, since there is no accumulation of compressed air in the piping of the water supply system, when the solenoid valves 28 and 8 are opened, negative pressure is generated, and the water in the piping connected to each nozzle 9 flows to the buffer tank 35 side. Pulled in by gravity.

  Finally, drainage control will be described with reference to FIGS. FIG. 13 shows that in response to a drain operation start command from the nozzle control panel 010, spraying of the nozzle 9 is stopped, the solenoid valve 1 is closed, the solenoid valve 10 and the solenoid valves 28 and 8 are all open, and the solenoid valve 1 is At the same time, the set value of the electropneumatic regulator 14 is set to 0 kPa, and the set value of the electropneumatic regulator 31 is set to 0 kPa. By doing in this way, the water header of the nozzle 9 and the water in the buffer tank 35 are drained to the outside by dropping due to gravity.

  Thereafter, when the low water level gauge 38 of the buffer tank 35 is turned off, as shown in FIG. 12, both the electromagnetic valves 28 and 8 are closed, the electromagnetic valves 22 and 4 are both opened, and the electropneumatic regulator The set value of 14 is set to about 350 kPa, the set value of the electropneumatic regulator 31 is set to 0 kPa, the water in the feed water tank 25 is discharged by the pressure of the compressed air a, and the low water level gauge 27 of the feed water tank 25 is turned off. For example after 5 seconds. In this case, the set value of the electropneumatic regulator 14 is set to about 350 kPa in order to prevent water inflow from the electromagnetic valve 8.

  5 seconds after the low level meter 27 of the water supply tank 25 is operated, when the set value of the electropneumatic regulator 31 is set to 100 kPa and the solenoid valves 22 and 4 are closed, the water in the buffer tank 35 is compressed by the pressure of the compressed air a. Is discharged. This operation is continued for approximately 10 seconds after the low water level gauge 38 of the buffer tank 35 is turned off.

  In FIG. 13, drainage control is completed, the set values of the electropneumatic regulators 14 and 31 are both set to 0 kPa, and the electromagnetic valves 10, 28, and 8 are opened for about one week for drying, for example.

  Next, spray start control will be described with reference to FIG. 14, and spray stop control will be described with reference to FIG. At the start of spraying, as shown in FIG. 14, the water pressure target value is controlled as a pressure of “air pressure target value, eg 360 kPa” + “spray start offset, eg 40 kPa”. The target value is changed to the original water pressure target value at a timing when the set value of the water pressure becomes higher than the value obtained by subtracting the value of the “spray start control completion determination pressure range, eg, 10 kPa” from the target value, eg, 300 kPa. Control. With this control, water quickly reaches the nozzle 9 at the start of spraying, and spraying can be started quickly.

  When spraying is stopped, as shown in FIG. 15, with the solenoid valves 28 and 8 kept closed, the water pressure is first reduced to indicate that the water pressure has fallen below the air stop permission pressure. The air regulator 31 confirms that the air pressure starts to drop, the solenoid valves 28 and 8 are opened at a timing when the air pressure falls below the opening permission pressure of the buffer tank 35, and the pressure in the header pipe of water is made negative. Thus, dripping can be prevented. Thereafter, in order to prevent the water in the header pipe from flowing into the buffer tank 35 more than necessary, the electromagnetic valves 28 and 8 are closed after the opening time of the buffer tank 35 has elapsed.

  FIG. 16 is a diagram for explaining the configuration of the nozzle 9 described above, which includes a water header unit Wu and an air header unit Au disposed on the terminal end side of the pressurized water supply system W. The water header unit Wu includes a water pipe 9a on the nozzle side, a plurality of cheese joints 9b (four in this case) disposed in the middle of the water pipe 9a, and a water manifold 9c connected to each cheese joint 9b. Each water manifold 9c is provided with a plurality (six in this case) of water pipe connection ports 9i.

  The water pipe 9a on the nozzle side is inclined such that the end side where the solenoid valve 10 on the drain port side is disposed with respect to the reference plane in FIG. 16 is lower than the end on the opposite side. Is formed.

Thereby, the water inside the water piping 9a is discharged | emitted by gravity.

  The air header unit Au includes a nozzle side air pipe 9e, a plurality (four in this case) of air manifolds 9f in the middle of the air pipe 9e, and a plurality of (here, six) of air manifolds 9f. A pipe connection opening 9k is provided. One end of each of the air pipe 9h and the water pipe 9g is connected to each of the air pipe connection ports 9k and each of the water pipe connection ports 9i, and the other end of each of the air pipe 9h and the water pipe 9g is connected to the tip. The nozzle body 9d is formed with an orifice (not shown).

  In this way, since the end of the nozzle-side water pipe 9a, that is, the end on which the electromagnetic valve 10 on the drain outlet side is disposed has a lower gradient, spraying of the nozzle 9 is stopped. At this time, the water in the water pipe in the system can be discharged, and this is particularly effective when the spraying of the nozzle 9 is stopped for a long time.

  FIG. 17 is a timing chart for explaining the above-described dripping prevention control. In the figure, (1) Pa represents the air pressure of the compressed air supply system P in FIG. 4, and (2) Pw represents the feed water supply in FIG. The water pressure of the system W is indicated. (3) Ph indicates the water pressure of the nozzle head H of the nozzle 9 of FIG.

  FIG. 17A shows the time when the spray stop operation of the nozzle 9 is started, and the setting value of the electropneumatic regulator 31 is changed from 290 kPa to 0 kPa, so that (2) Pw decreases.

  FIG. 17b confirms (2) Pw pressure drop. (2) After confirming whether the set value of Pw is smaller than 10 kPa, (1) the current value of Pa is changed from 300 kPa to 0 kPa, and the compressed air Pa drops.

  FIG. 17c is a curve for confirming (1) Pa pressure drop. (1) After confirming whether the set value of Pa is smaller than 150 kPa, the solenoid valves 28 and 8 are opened to set the atmospheric pressure.

  In FIG. 17 d, when 2 seconds have elapsed after the electromagnetic valves 28 and 8 are opened, the electromagnetic valves 28 and 8 are closed, and the flow of water into the buffer tank 35 is stopped.

  In FIG. 17e, (2) the pressure supply of water to the header by Pw is cut off, and (3) Ph gradually decreases. When the residual pressure in the pipe disappears, (1) only the back pressure due to Pa remains and becomes a constant pressure.

  FIG. 17 f shows the resumption of spraying of the nozzle 9.

  In addition, since the pilot type solenoid valve is used as the solenoid valve 8, the following effects are obtained. That is, during normal spraying of the nozzle 9, the solenoid valve 8 is in a closed state, but since the → displayed on the solenoid valve 8 is the direction of the header → the buffer tank 35, the buffer tank of the water supply system W Water can be supplied to 35. Here, when a direct acting type solenoid valve is used as the solenoid valve 8, two opening / closing operations are required for one stop of spraying, the solenoid valve 28, and two independent solenoid valves. Since the valve command digital output is required, the pilot type solenoid valve 8 is used.

  According to the embodiment described above, it is possible to easily prevent dripping as described above. In addition, when the system operation is suspended or restarted, the system is automatically filled and drained without worrying about problems such as damage to parts due to freezing of residual water and bacterial growth due to deterioration of residual water. Spraying can be performed with peace of mind throughout the year. Moreover, since the number of the nozzles 9 is adjusted according to the required spraying amount, it is possible to suppress wasteful consumption of compressed gas.

  In the embodiment described above, a configuration in which air bubbles do not remain in the compressed gas supply system, for example, the compressed air supply system during spraying, for example, a configuration in which a convex part is not formed vertically upward in the entire header unit. Is desirable.

  In the above-described embodiment, as the two-fluid nozzle 9, a reverse pressure type nozzle is taken as an example. However, a nozzle that is not a reverse pressure type, specifically, the pressure of the compressed gas does not affect the pressurized liquid supply system and is Even if the pressurized liquid of the pressurized liquid supply system is not pressurized, a two-fluid nozzle having a characteristic that the compressed gas does not flow back into the pressurized liquid supply system may be used.

DESCRIPTION OF SYMBOLS 01 ... Clean room, 02 ... Semiconductor manufacturing apparatus, 03 ... Air conditioner, 04 ... Cooling coil, 05 ... Heating coil, 06 ... Nozzle coil unit, 07 ... Fan, 08 ... Steam humidification unit, 09 ... Air conditioning control panel, 010 ... Nozzle Control panel, 011 ... proportional control valve, 012 ... proportional control valve, 013 ... proportional control valve, 1 ... pure water primary solenoid valve, 2 ... check valve, 3 ... water tank cheese joint, 4 ... water tank lower side solenoid valve, DESCRIPTION OF SYMBOLS 5 ... Check valve, 6 ... Buffer tank cheese joint, 7 ... Nozzle cheese joint, 8 ... Solenoid valve, 9 ... Two-fluid nozzle, 11 ... Air system primary solenoid valve, 12 ... Air system cheese joint, 13 ... Cheese joint, 14 ... Electropneumatic regulator, 21 ... Speed controller, 22 ... Water tank upper side three-way solenoid valve, 23 ... Water tank cheese joint, 24 ... Check valve, 25 ... Water tank, 7 ... Low liquid level sensor, 28 ... Solenoid valve, 29 ... Joint, 31 ... Electro-pneumatic regulator for water only, 32 ... Cheese joint, 33 ... Check valve, 34 ... Water supply cheese joint, 35 ... Buffer tank, 36 ... Full sensor 37 ... Feed water cheese joint, 38 ... Liquid low level sensor, 41 ... Proportional control valve, 42 ... Two-way solenoid valve, 43 ... Solenoid valve, 100 ... Device of this proposal.

Claims (9)

A compressed gas supply system for supplying a desired compressed gas;
A pressurized liquid supply system for supplying a desired pressurized liquid;
A plurality of two-fluid nozzles that spray the atomized fluid obtained by mixing the compressed gas and the pressurized liquid onto a desired location;
When stopping the spraying operation of the two-fluid nozzle, by releasing the pressure of the pressurized liquid in the liquid header pipe constituting the two-fluid nozzle to the outside and drawing out the liquid in the liquid header pipe Means for preventing dripping from the two-fluid nozzle;
A two-fluid spraying device comprising: A compressed gas supply system for supplying a desired compressed gas;
A pressurized liquid supply system for supplying a desired pressurized liquid;
A plurality of two-fluid nozzles that spray the atomized fluid obtained by mixing the compressed gas and the pressurized liquid onto a desired location;
When the spraying operation of the two-fluid nozzle is stopped, the pressure of the pressurized liquid in the liquid header pipe constituting the two-fluid nozzle is released to the outside, and the liquid in the liquid header pipe is siphon principle Means for preventing dripping from the two-fluid nozzle by drawing in with,
A two-fluid spraying device comprising: A compressed gas supply system that supplies a desired compressed gas, and includes a first valve that allows the compressed gas to flow in the middle, or disables the flow of the compressed gas;
A pressurized liquid supply system that supplies a desired pressurized liquid, and includes a second valve that enables the pressurized liquid to flow in the middle or disables the pressurized liquid to flow.
A plurality of two-fluid nozzles that spray the atomized fluid obtained by mixing the compressed gas and the pressurized liquid onto a desired location;
An open system including a third valve provided in the pipe of the pressurized liquid supply system and capable of discharging the pressurized liquid in the pipe of the pressurized liquid supply system to the outside by gravity of the pressurized liquid;
When stopping the spraying of the two-fluid nozzle, with the first and second valves closed, the pressurized liquid from the previous pressurized liquid supply system and the compressed gas from the compressed gas supply system are Control means for preventing dripping from the two-fluid nozzle by stopping the supply, opening the third valve, and drawing the pressurized liquid in the pipe of the pressurized liquid supply system by the principle of siphon When,
A two-fluid spraying device comprising: A two-fluid spray device capable of supplying a pressurized fluid from a pressurized liquid supply system and a compressed gas from a compressed gas supply system to a two-fluid nozzle and injecting the atomized fluid obtained thereby to a required place In
During the spraying operation of the two-fluid nozzle, the pressure of the compressed gas from the compressed gas supply system can be applied to the pressurized liquid supply system, and the two-fluid nozzle by the compressed gas from the compressed gas supply system The pressure of the liquid supplied to the liquid is controlled to a desired value, and replenishment from a liquid replenishment system that secures replenishment liquid when the remaining amount of pressurized liquid in the pressurized liquid supply system is insufficient Liquid pressure control means is provided for supplying liquid to the pressurized liquid supply system by using the compressed gas of the compressed gas supply system as a pressure higher than the pressurized liquid of the pressurized liquid supply system, and the pressurized liquid supply In a two-fluid spraying device capable of continuous spraying while keeping the supply pressure of the pressurized liquid of the system constant,
When the spraying operation of the two-fluid nozzle is stopped, the pressure of the pressurized liquid in the liquid header pipe constituting the two-fluid nozzle is released to the outside, and the liquid in the liquid header pipe is siphon principle Means for preventing dripping from the two-fluid nozzle by drawing in with,
A two-fluid spraying device comprising:   As the two-fluid nozzle, the pressure of the compressed gas affects the pressurized liquid supply system, and if the pressurized liquid of the pressurized liquid supply system is not pressurized, the compressed gas flows back into the pressurized liquid supply system. The two-fluid spray device according to any one of claims 1 to 4, wherein a two-fluid nozzle is used.   As the two-fluid nozzle, the pressure of the compressed gas affects the pressurized liquid supply system, and if the pressurized liquid of the pressurized liquid supply system is not pressurized, the compressed gas flows back into the pressurized liquid supply system. In a two-fluid spraying device using a two-fluid nozzle, at the start of spraying, the target pressure of the liquid supplied to the two-fluid nozzle is set to a pressure higher than a pressure suitable for two-fluid spraying, whereby the pressurized liquid After confirming that the pressure in the pressurized liquid supply system pipe has actually increased, the gas remaining in the supply system pipe has been pushed out and the pressurized liquid supply system pipe has been filled with liquid. The two-fluid spraying device according to any one of claims 1 to 4, further comprising control means for setting a target pressure of the liquid supplied to the two-fluid nozzle to a pressure suitable for two-fluid spraying.   After the spraying operation is finished, the liquid in the apparatus is discharged by automatic control, and when spraying is resumed, the apparatus has a function of introducing a necessary amount of liquid into the apparatus by automatic control. As a result, it is possible to avoid sanitary problems caused by decay of the liquid remaining in the equipment, functional problems caused by deterioration, and damage to piping members due to freezing and expansion. The two-fluid spraying device according to any one of claims 1 to 5, wherein   A drain outlet is formed on one end side of the liquid header pipe constituting the two-fluid nozzle connected to the pressurized liquid supply system, and a gradient is formed such that the drain outlet is lowered. The two-fluid spraying device according to any one of claims 1 to 5, wherein when the spraying is stopped, the pressurized liquid in the pipe can be drained by gravity.   When the spraying of the two-fluid nozzle is stopped in the liquid header pipe constituting the two-fluid nozzle connected to the pressurized liquid supply system, the pressure of the compressed gas of the compressed gas supply system is applied. The two-fluid spray device according to any one of claims 1 to 5, wherein the pressurized liquid is discharged in addition to the pressurized liquid of the pressurized liquid supply system.

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