JP5988144B2 - 耐食性に優れた被覆物品およびその製造方法 - Google Patents

耐食性に優れた被覆物品およびその製造方法 Download PDF

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JP5988144B2
JP5988144B2 JP2012140768A JP2012140768A JP5988144B2 JP 5988144 B2 JP5988144 B2 JP 5988144B2 JP 2012140768 A JP2012140768 A JP 2012140768A JP 2012140768 A JP2012140768 A JP 2012140768A JP 5988144 B2 JP5988144 B2 JP 5988144B2
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layer
corrosion resistance
coated article
coated
film
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JP2013227640A5 (enExample
JP2013227640A (ja
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サーレ アブスアイリキ
サーレ アブスアイリキ
石川　剛史
剛史 石川
謙一 井上
謙一 井上
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Proterial Ltd
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Hitachi Metals Ltd
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JP2012140768A 2012-03-29 2012-06-22 耐食性に優れた被覆物品およびその製造方法 Active JP5988144B2 (ja)

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JP2013227640A5 JP2013227640A5 (enExample) 2014-10-30
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CN113539771B (zh) * 2020-04-16 2024-04-12 中微半导体设备(上海)股份有限公司 零部件、其表面形成涂层的方法和等离子体反应装置

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JP2004176848A (ja) * 2002-11-28 2004-06-24 Riken Corp 非晶質硬質炭素被覆部材と鉄系部材の組み合わせ
JP2005082823A (ja) * 2003-09-05 2005-03-31 Ion Engineering Research Institute Corp Ｓｉ含有ガスを用いた硬質窒化膜の形成方法
DE102004032403B3 (de) * 2004-07-03 2005-12-22 Federal-Mogul Burscheid Gmbh Verfahren zur Erzeugung einer Beschichtung auf einem Kolbenring sowie Kolbenring
JP2011127205A (ja) * 2009-12-21 2011-06-30 Hitachi Tool Engineering Ltd 潤滑剤付着性および耐久性に優れた被覆金型およびその製造方法

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