JP2013227640A5 - - Google Patents
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- Publication number
- JP2013227640A5 JP2013227640A5 JP2012140768A JP2012140768A JP2013227640A5 JP 2013227640 A5 JP2013227640 A5 JP 2013227640A5 JP 2012140768 A JP2012140768 A JP 2012140768A JP 2012140768 A JP2012140768 A JP 2012140768A JP 2013227640 A5 JP2013227640 A5 JP 2013227640A5
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- roughness
- less
- smap
- preferable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 4
- 101150112439 SMAP gene Proteins 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004439 roughness measurement Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012140768A JP5988144B2 (ja) | 2012-03-29 | 2012-06-22 | 耐食性に優れた被覆物品およびその製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012075613 | 2012-03-29 | ||
| JP2012075613 | 2012-03-29 | ||
| JP2012140768A JP5988144B2 (ja) | 2012-03-29 | 2012-06-22 | 耐食性に優れた被覆物品およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013227640A JP2013227640A (ja) | 2013-11-07 |
| JP2013227640A5 true JP2013227640A5 (enExample) | 2014-10-30 |
| JP5988144B2 JP5988144B2 (ja) | 2016-09-07 |
Family
ID=49675556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012140768A Active JP5988144B2 (ja) | 2012-03-29 | 2012-06-22 | 耐食性に優れた被覆物品およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5988144B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113539771B (zh) * | 2020-04-16 | 2024-04-12 | 中微半导体设备(上海)股份有限公司 | 零部件、其表面形成涂层的方法和等离子体反应装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004176848A (ja) * | 2002-11-28 | 2004-06-24 | Riken Corp | 非晶質硬質炭素被覆部材と鉄系部材の組み合わせ |
| JP2005082823A (ja) * | 2003-09-05 | 2005-03-31 | Ion Engineering Research Institute Corp | Ｓｉ含有ガスを用いた硬質窒化膜の形成方法 |
| DE102004032403B3 (de) * | 2004-07-03 | 2005-12-22 | Federal-Mogul Burscheid Gmbh | Verfahren zur Erzeugung einer Beschichtung auf einem Kolbenring sowie Kolbenring |
| JP2011127205A (ja) * | 2009-12-21 | 2011-06-30 | Hitachi Tool Engineering Ltd | 潤滑剤付着性および耐久性に優れた被覆金型およびその製造方法 |
-
2012
- 2012-06-22 JP JP2012140768A patent/JP5988144B2/ja active Active
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