JP5973306B2 - Heat treatment equipment - Google Patents

Description

  The present invention relates to a heat treatment apparatus for carburizing and quenching a workpiece.

  In general, in order to improve the wear resistance of a low alloy steel or the like (hereinafter referred to as “object to be processed”), carburizing treatment and quenching treatment in which carbon penetrates and dissolves in the surface layer of the object to be processed are performed.

  Examples of conventional carburizing and quenching processing apparatuses include carburizing and quenching processing apparatuses as described in Patent Documents 1 to 4. The carburizing and quenching processing apparatuses described in Patent Documents 1 to 3 place the object to be processed on the conveying fork when the object to be processed is conveyed. In the carburizing and quenching process of the on-line machining manufacturing system of Patent Document 1, one or two or more objects to be processed are collectively processed and processed by each processing unit as necessary. Patent Documents 2 to 4 are vacuum carburizing and quenching apparatuses, and a plurality of objects to be processed are loaded on a tray and processed. Moreover, the carburizing quenching processing apparatus described in Patent Document 4 conveys the target object to a desired processing chamber by pushing the target object with a pusher.

Japanese Patent Laid-Open No. 10-53809 JP 2010-266176 A JP 2003-183728 A JP-A-8-285462

  However, in the conventional carburizing and quenching processing apparatus, when the object to be processed is mounted on the mounting table, the mounting position of the object to be processed may deviate from the assumed position. In this case, in the heating process with the object to be processed, the distance between the periphery of the object to be processed and the heat source (for example, induction heating coil) is not uniform, and the object to be processed cannot be heated uniformly. Further, even in the cooling of the object to be processed in the quenching process, it becomes impossible to cool uniformly due to the displacement. As a result, the object to be processed may not be uniformly carburized and quenched, and if the temperature change of the object to be processed is not uniform, heat treatment distortion exceeding the dimensional accuracy characteristics required for the object to be processed will occur. I came.

  Such heat treatment distortion is also affected by the state of conveyance of the workpiece. When transporting or placing the workpiece, if the contact area between the carrier mechanism or the mounting table and the workpiece is large, the temperature change at the contact area differs from the rest of the workpiece, which is required for the workpiece. There is a risk of heat treatment strain exceeding the dimensional accuracy characteristics.

  For example, in the carburizing and quenching processing apparatus of the on-line machining manufacturing system described in Patent Document 1, the mounting position of the object to be processed may be shifted from an appropriate position due to the inclination or vibration of the transport fork. Furthermore, since the object to be processed is processed without being placed in the tray jig, the position of the object to be processed may be shifted from an appropriate position when the object to be processed having a different diameter is transported. Further, since the contact area between the object to be processed and the transfer fork and the contact area between the object to be processed and the mounting table are large and local, the temperature change (temperature distribution) in one object to be processed is not uniform. . Therefore, the magnitude of thermal expansion and contraction differs in one object to be processed, heat treatment distortion occurs, the object to be processed is deformed, and dimensional accuracy after carburizing and quenching cannot be maintained within a predetermined range. There is a fear. In addition, when the objects to be processed are transported one by one with a fork as in Patent Document 1 (or even when they are transported with a pusher as described later), there is a risk that a scratch may occur on the object to be processed on the fork or the like. is there.

  Further, in the carburizing and quenching processing apparatuses described in Patent Documents 2 and 3, the tray jig is transported by the transport fork, but there is a possibility that the placement position of the object to be processed is shifted from the proper position due to the tilt of the transport fork or the like. is there. Moreover, in the carburizing and quenching processing apparatus described in Patent Document 4, the tray jig is transported by the pusher, but there is a possibility that the tray jig may deviate from an appropriate position due to variations in the distance pushed by the pusher.

  In addition, as described in Patent Documents 2 to 4, a method of putting a plurality of objects to be processed into a tray and performing a carburizing and quenching process is common, but naturally the temperature depends on the position of each object to be processed in the tray. Are controlled within a predetermined temperature distribution range. However, in recent years, there are also objects to be processed that have particularly strict requirements for dimensional accuracy after carburizing and quenching, and for such objects to be processed, the required characteristics are cleared by a method of carburizing and quenching a plurality of objects to be processed in a tray. Has proved difficult.

  The object of the present invention is to solve the above-mentioned problems, by placing the object to be processed at an appropriate position of the mounting table, and reducing the contact area between the object to be processed and other parts in the processing process. An object of the present invention is to provide a heat treatment apparatus for performing a carburizing and quenching process with high dimensional accuracy of an object to be processed after carburizing and quenching.

In order to solve the above problems, according to the present invention, there is provided a heat treatment apparatus for carburizing and / or quenching a circular object to be processed, the processing chamber for performing a predetermined process on the object to be processed, and the processing chamber And a transport mechanism that transports the object to be processed to the outside of the processing chamber, and a mounting table that is provided in the processing chamber and places the object to be processed that is transported into the processing chamber. And at least three transfer support pins for supporting the object to be processed when the object to be processed is transferred, and the object to be processed is provided on the mounting table. At least three mounting table support pins are provided, and the object to be processed has a circular upper surface portion and a cylindrical side surface portion, and the side surface portion of the object to be processed is provided on the mounting table . On the circumference of the same diameter as the inner diameter, Heat treatment apparatus mounting table supporting pins, characterized in that it is arranged is provided.

  The mounting table is composed of at least three supporting blades each provided with the mounting table support pins, and each supporting blade is provided so as to protrude radially from the center of the mounting table in plan view. Also good. Further, at least three protrusions are provided at the tip of the transfer arm so as to protrude toward the center of the mounting table and support the object to be processed between the support blades in plan view. Each of the transport support pins may be provided, and each transport support pin may be arranged so as to support the object to be processed between the support blades in plan view.

  Moreover, you may provide the raising / lowering mechanism which raises / lowers the mounting table mentioned above.

Also, before SL on the circumference of inner diameter substantially the same diameter of the side surface portion of the該被processed on the transport arm, the carrying support pins may be disposed.

  Further, a rotation mechanism for rotating the mounting table may be provided.

  Moreover, when mounting a to-be-processed object on the mounting base mentioned above, the mounting base support pin and the said support pin for conveyance may be arrange | positioned on the same periphery in planar view.

The transfer arm may include an auxiliary pin provided around each transfer support pin, and the auxiliary pin may be disposed so as to contact a side surface of the object to be processed . Further, at least a part of the side of the auxiliary pin facing the side surface of the object to be processed may be formed in a tapered shape so as to become thinner toward the upper end of the auxiliary pin.

Further, the tray jig supporting the object to be processed is provided, and the tray jig on which the object to be processed is supported is supported by the support pin for transport, and transported by the transport arm to the mounting table support pin. It may be provided and provided with at least three tray support pins for supporting the object to be processed on the upper surface of the tray jig.

  In addition, the tray jig has a circular upper surface portion and a cylindrical side surface portion, and the front surface of the tray jig has a front surface substantially the same diameter as the inner diameter of the side surface portion of the tray jig. A mounting table support pin may be arranged. Further, the tray jig has a shape composed of a circular upper surface portion and a cylindrical side surface portion, and on the circumference having the same diameter as the inner diameter of the side surface portion of the tray jig on the transfer arm, Support pins for conveyance may be arranged. Further, when the object to be processed has a shape composed of a circular upper surface part and a cylindrical side surface part, on the circumference having the same diameter as the inner diameter of the side surface part of the object to be processed on the tray jig. The tray support pins may be arranged.

  According to the present invention, when the object to be processed is carburized and / or quenched, the object to be processed can be placed at an appropriate position on the mounting table. In addition, the contact area between the object to be processed and other components can be reduced. Thereby, the temperature change of a to-be-processed object can be made uniform, a to-be-processed object can be uniformly carburized and / or quenched, and the heat-treatment distortion which arises to a to-be-processed object can be suppressed.

It is a schematic longitudinal cross-sectional view of the heat | fever (carburizing) processing apparatus which concerns on embodiment of this invention. It is AA sectional drawing in FIG. 1 (The figure which concerns on the mounting base and conveyance arm when it sees from the top when it cut | disconnects by AA). It is a figure which shows the support aspect of the to-be-processed object which consists of a circular-shaped upper surface part and a cylindrical side part. It is a longitudinal cross-sectional view in the position of BB in FIG. It is a figure which shows the heat | fever (carburizing) process process which concerns on embodiment of this invention. FIG. 6 is an enlarged view of FIG.

  Hereinafter, an embodiment of the present invention will be described based on a heat treatment apparatus 1 for vacuum carburizing and quenching a circular workpiece W. In addition, the circular object to be processed is an object to be processed having a columnar shape or an annular shape, or an object to be processed having a circular upper surface portion and a cylindrical side surface portion, that is, a circular lid, a tray or a bowl. The object to be processed is, specifically, a gear of a machine part or the like. In the present specification and drawings, elements having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 1, a heat treatment apparatus 1 includes a processing chamber 2 that can perform vacuum sealing on a target object, a transfer mechanism 3 that transfers the target object W to and from the processing chamber, and a processing chamber. A mounting table 4 is provided on which the object W to be processed is placed. The predetermined process is a process required in a general vacuum carburizing process such as preheating, carburizing, diffusion, cooling, quenching (including gas quenching).

  A driving device 5 is disposed below the processing chamber 2, and the driving device 5 is provided with a driving arm 6 extending upward from the driving device 5. The front end of the drive arm 6 penetrates the lower surface of the processing chamber 2 and is connected to the mounting table 4, and the driving arm 6 plays a role as a column of the mounting table 4. Since the drive device 5 is configured to move the drive arm 6 up and down, the mounting table 4 can move up and down together with the drive arm 6.

  As shown in FIG. 2, the mounting table 4 is provided so as to protrude radially from the central portion 7 (the front end portion of the drive arm 6 shown in FIG. 1) of the mounting table 4 in plan view (when viewed from above). It is composed of three projecting portions 8 (hereinafter referred to as “supporting blades 8”). The angles formed by the support blades 8 are equal to each other, and a mounting table support pin 9 that supports the workpiece W is provided at the tip of each support blade 8. The workpiece W is supported at three points on the mounting table 4 when the workpiece W is transferred from the transfer arm 10 described later to the mounting table support pins 9. In addition, SUS304 etc. are applied to the material of each support blade | wing 8 and the mounting base support pin 9. FIG. Moreover, in FIG. 2, only the outer edge shape of the to-be-processed object W is shown with the broken line.

  As shown in FIGS. 3 and 4, the object W to be processed has a shape composed of, for example, a circular upper surface portion W1 and a cylindrical side surface portion W2, that is, a downwardly concave groove that has a circular tray laid down. In the case of an object to be processed such as a gear, for example, three mounting table support pins 9 are arranged on the mounting table 4 so as to be in contact with the upper surface W1 of the object W inside the recess of the object W to be processed. By doing so, the to-be-processed object W can also be supported. At this time, the mounting table support pin 9 has substantially the same diameter when the inner diameter of the side surface portion W2 of the workpiece W is drawn (assumed) and a circle passing through the tips of the three mounting table support pins 9 is drawn. Preferably there is. With such a relationship between the object to be processed W and the mounting table support pins 9, the mounting table support pins 9 can also serve to position the object to be processed W.

  As shown in FIG. 1, the transport mechanism 3 includes a transport arm 10 that places and moves the workpiece W and a transport device (not shown) that moves the transport arm 10 in the horizontal direction. As shown in FIG. 2, the tip of the transfer arm 10 has a three-pronged shape, and the tip of the transfer arm 10 is provided so as to protrude toward the center portion 7 of the mounting table 4 (protrusion 11). The protrusions 11 are arranged so as to support the workpiece W between the support blades 8 in a plan view, and the angles formed by the protrusions 11 are equal to each other. Near the tip of each protruding portion 11, a transport support pin 12 that supports the target object W when the target object W is transported is provided. Supported.

  As shown in FIGS. 3 and 4, the object W to be processed has a shape composed of, for example, a circular upper surface portion W1 and a cylindrical side surface portion W2, that is, a downwardly concave groove that has a circular tray laid down. In the case of an object to be processed such as a gear, for example, three transfer support pins 12 are arranged on the transfer arm 10 so as to contact the upper surface portion W1 of the object W to be processed inside the recess of the object W to be processed. By doing so, the to-be-processed object W can also be supported. At this time, the conveyance support pin 12 has substantially the same diameter as the inner diameter of the side surface W2 of the workpiece W and a circle passing through the tips of the three conveyance support pins 12 (assumed). Preferably there is. With such a relationship between the object to be processed W and the support pins 12 for conveyance, the upper surface portion W1 of the object to be processed W can be contacted and supported by the support pins 12 for conveyance inside the recesses of the object to be processed W. The workpiece W can be positioned by moving the transfer arm 10. That is, the conveyance support pins 12 can also play a role of positioning.

  Further, in the present embodiment, as shown in FIGS. 1 and 2, the object to be processed W is placed around each conveyance support pin 12 when the object W to be processed is placed on the conveyance support pin 12. Auxiliary pins 13 are provided to prevent the falling of the components and to determine the mounting position with respect to the support pins 12 for conveyance. Each auxiliary pin 13 is disposed at a position facing the side surface of the object to be processed W when the object to be processed W is placed on the support pins 12 for conveyance. Further, a part of each auxiliary pin 13 on the side facing the side surface of the object to be processed W is formed in a tapered shape that becomes thinner toward the upper end of the auxiliary pin 13 (tapered portion 13a).

  For example, in the case where the object to be processed W is not a circular shape having a concave portion as described above, when the object to be processed W is displaced from the proper placement position when the object W is placed on the support pins 12 for conveyance, By moving the body W along the tapered portion 13a of each auxiliary pin 13, the body W can be placed in the correct position. Thus, when the workpiece W is transferred between the mounting table 4 and the transfer arm 10, the placement position of the workpiece W with respect to the transfer support pin 12 is always the same. Further, when the object to be processed W is placed on the conveyance support pins 12, the auxiliary pins 13 facing (or in contact with) the side surfaces of the object to be processed W cause the positional displacement or dropping of the object to be processed W. Be regulated. For this reason, the mounting position of the object to be processed relative to the transfer support pin 12 is not shifted or dropped during the transfer of the object to be processed W. In addition, SUS304 etc. are applied for the material of the support pin 12 for conveyance, and the auxiliary pin 13.

  Further, each mounting table support pin 9 and each transport support pin 12 are provided so as to be arranged on the same circumference in plan view when the workpiece W is mounted on the mounting table 4. Is preferred. Thereby, the inclination etc. of the to-be-processed object at the time of delivering the to-be-processed object W from the conveyance arm 10 to the mounting base 4 can be reduced, and it can suppress that a to-be-processed object slip | deviates from an appropriate mounting position. it can.

  Further, as shown in FIG. 1, the processing chamber 2 is provided with an opening 14 through which the workpiece W can be carried in and out. In addition, an opening / closing door 15 that seals the processing chamber 2 by closing the opening 14 is provided adjacent to the processing chamber 2. The opening / closing door 15 can be moved up and down by an opening / closing mechanism (not shown). An induction heating coil 16 is provided above the mounting table 4 in the processing chamber to heat the object to be processed during the carburizing process. Although not shown, the heat treatment apparatus 1 according to the present embodiment includes other configurations necessary for performing a general vacuum carburizing process such as an exhaust mechanism and a carburizing gas introduction mechanism.

  A carburizing method using the heat treatment apparatus 1 configured as described above will be described.

  First, as shown in FIG. 5A, the workpiece W that has been subjected to the pre-heat treatment related to the preceding process of the carburizing treatment process is transferred to the evacuated processing chamber 2 while being placed on the transfer arm 10. Is done.

  At this time, the object to be processed W placed on the transfer support pin 12 is transferred to the transfer support pin 12 of the transfer arm 10 from the mounting table (not shown) of the processing chamber in the previous process. Further, since each auxiliary pin 13 faces the side surface of the object to be processed W, the mounting position of the object to be processed W with respect to the transfer support pin 12 is shifted or dropped during the transfer of the object to be processed W. There is no. Furthermore, the transfer arm 10 extending into the processing chamber extends to a position where the distance between the peripheral edge of the workpiece W mounted on the mounting table 4 and the induction heating coil 16 becomes uniform when the mounting table 4 described later rises. Is controlled. That is, the workpiece W transferred into the processing chamber is held at a position where the distance between the periphery of the workpiece W and the induction heating coil 16 is uniform in plan view.

  As shown in FIGS. 3 and 4, in the case where the object to be processed W is an object to be processed such as a gear having a downwardly concave shape, such as a circular tray, for example, three transfer support pins 12 are used. Is positioned on the transfer arm 10 so as to be in contact with the upper surface portion W1 and in contact with (or very close to) the side surface portion W2 inside the concave portion, thereby positioning the workpiece W. be able to. In other words, the workpiece W has a circular upper surface portion W1 and a cylindrical side surface portion W2, and has a diameter substantially the same as the inner diameter of the side surface portion W2 of the workpiece W on the transport support pin 12. If the conveyance support pins 12 are arranged on the circumference, the conveyance support pins 12 can also play a role of positioning.

  Next, as shown in FIG. 5B, the drive arm 6 is raised by the drive device 5 to raise the mounting table 4. Then, the object to be processed W supported by the transport support pins 12 is transferred to the mounting table support pins 9 provided on the mounting table 4. At this time, since the mounting table 4 simply moves up and down, the mounting position of the workpiece W does not deviate from the appropriate position. Thereafter, the mounting table 4 is raised to a position where the induction heating coil 16 is located.

  At this time, as shown in FIG. 3 and FIG. 4, in the case where the object to be processed W is an object to be processed such as a gear having a downward concave shape such as a circular tray, for example, three mounting table support pins 9 is disposed on the mounting table 4 so as to be in contact with the upper surface W1 inside the recess and in contact with (or very close to) the side surface W2, thereby positioning the workpiece W. can do. That is, the object to be processed W has a circular upper surface part W1 and a cylindrical side part W2, and the circumference of the mounting table 4 is approximately the same diameter as the inner diameter of the side part W2 of the object to be processed W. If the mounting table support pins 9 are arranged on the top, the mounting table support pins 9 can also play a role of positioning.

  Next, as shown in FIG. 5C, the transfer arm 10 is moved out of the processing chamber and the open / close door 15 is closed, thereby sealing the processing chamber 2. Thereafter, a carburizing gas is introduced into the processing chamber by a carburizing gas introduction mechanism (not shown). Then, a high frequency current is passed through the induction heating coil 16 to heat the workpiece W to the carburizing temperature. At this time, since the object to be processed W is supported by the mounting table support pins 9 at three points, the contact area between the object to be processed W and the mounting table support pins 9 is reduced. The tip of the mounting table support pin 9 is provided with, for example, R1 to R2 that do not damage the workpiece W, but can be regarded as almost point contact. Thereby, the influence of the mounting table support pins 9 can be ignored, and the workpiece W can be heated uniformly. Moreover, since the to-be-processed object W is mounted in the position where the distance of the periphery of the to-be-processed object W and the induction heating coil 16 becomes uniform, the to-be-processed object W can be heated uniformly. In addition, the temperature of the carburizing process is approximately 850 ° C. to 1100 ° C. In addition, in the induction heating, the substantially circular object W such as a gear has a temperature distribution concentrically from the center of the circle toward the outer part, but at the same distance from the center of the circle. It is preferable that the temperature is uniform, and this can be achieved in the present invention, and good dimensional accuracy can be obtained.

  When the carburizing process is completed, the carburizing gas is exhausted by an exhaust mechanism (not shown), and the processing chamber is evacuated.

  Next, the opening / closing door 15 is raised to move the transfer arm 10 into the processing chamber. Then, as shown in FIG. 5 (d), the mounting table 4 is lowered, and the object to be processed W placed on the mounting table support pins 9 of the mounting table 4 is transferred to the transfer support pins 12 of the transfer arm 10. Deliver. At this time, if the position of the object to be processed W is deviated from the proper placement position, the object to be processed W is moved along the tapered portion 13a of the auxiliary pin 13 in FIG. It moves in the direction of the arrow and is placed on the conveyance support pin 12. For this reason, even after the carburizing process, the mounting position of the object to be processed W with respect to the transport support pin 12 can always be the same. As a result, the workpiece W can be placed at an appropriate position even when the workpiece W is placed on the stage (not shown) of the processing chamber in the cooling process, which is a subsequent process. The processing body W can be cooled uniformly.

  In addition, when the to-be-processed object W is the shape which consists of circular upper surface part W1 and cylindrical side part W2, it is substantially the internal diameter of the side part W2 of this to-be-processed object W on the mounting base 4 and the conveyance arm 10. If the mounting table support pin 9 and the transfer support pin 12 are arranged on the circumference of the same diameter, the role of positioning the workpiece W or preventing the drop of the workpiece W also in the processing steps such as carburizing and quenching. This is preferable because it can be achieved.

  Finally, as shown in FIG. 5E, the transfer arm 10 on which the workpiece W is placed is moved out of the processing chamber, and the carburizing process ends.

  As described above, according to the present invention, the object to be processed is supported at the three points by the mounting table support pins and the transport support pins, so that the contact area between the mounting table and the transport arm and the target object can be reduced. In addition, the mounting table support pins and the transport support pins can also serve to position the object to be processed, so that the object to be processed can be uniformly heated and cooled while preventing the object to be processed from falling. A to-be-processed object can be mounted in a mounting position. Thereby, the temperature change of a to-be-processed object can be made uniform at the time of a heating or cooling of a to-be-processed object. As a result, it is possible to uniformly carburize while suppressing the occurrence of heat treatment distortion of the object to be processed.

  In addition, as described in the embodiment of the present invention, when the auxiliary pin having the tapered portion is provided on the transport arm, proper placement is performed when the workpiece is placed on the transport support pin. When it deviates from the position, the object to be processed can move along the tapered portion of each auxiliary pin, and the object to be processed can be placed at an appropriate position. Thereby, the temperature change of the object to be processed can be made uniform when the object to be processed is heated or cooled, and the occurrence of heat treatment distortion of the object to be processed can be suppressed and the carburizing process can be uniformly performed.

  As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to this example. It is obvious for those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims. It is understood that it belongs to.

  For example, in the embodiment of the present invention, the auxiliary pin is provided on the transfer arm, but the auxiliary pin may be provided on the mounting table instead of the transfer arm. In this case, when the object to be processed is transferred from the transfer arm to the mounting table, the object to be processed moves along the tapered portion of the mounting table auxiliary pin provided on the mounting table, and is mounted on the mounting table support pin. The Thereby, the effect similar to the effect demonstrated by this Embodiment can be enjoyed. Moreover, if an auxiliary pin is provided on both the mounting table and the transfer arm, the effect of preventing the displacement of the mounting position of the object to be processed can be further enhanced.

  Further, in the embodiment of the present invention, a part of the side of the auxiliary pin facing the side surface of the object to be processed is formed in a tapered shape, but the whole may be formed in a tapered shape. Moreover, the number and arrangement of the mounting table support pins and the transport support pins are appropriately changed according to the shape and size of the object to be processed. That is, the number and the arrangement may be any as long as the object to be processed can be supported without being inclined when the object to be processed is placed on each support pin. Similarly, the number of support blades of the mounting table and the angle formed between the support blades, and the number of protrusions of the transfer arm and the angle formed between the protrusions are appropriately changed.

  In the embodiment of the present invention, the object is transferred between the mounting table and the transfer arm by moving the mounting table up and down. However, the transfer mechanism is provided with a lifting mechanism to move the transfer arm up and down. It is also possible to make it. In this case, the object to be processed can be mounted on the mounting table without raising or lowering the mounting table. In addition, a rotation mechanism may be provided in a driving device that raises and lowers the mounting table. In this case, the mounting table can be rotated during heating / cooling of the object to be processed, and the object to be processed can be heated / cooled more uniformly.

  In the embodiment of the present invention, the vacuum carburizing apparatus is described as an example of the heat treatment apparatus. However, the present invention is not limited to this, and other treatment apparatuses may be used. In addition, the heat treatment apparatus of the present invention can be similarly used in the preheating step, the diffusion step, and the cooling (soaking) step in other carburizing treatments.

  The heat treatment apparatus according to the present invention can also be applied to a quenching process. For example, when performing a quenching process by gas cooling, it is uniform in a plan view from the outer periphery of the circular workpiece W instead of an induction heating coil. It is preferable to perform quenching (cooling) using a cooling device having a structure in which a cooling gas is sprayed on while keeping the temperature uniformity during cooling.

  Further, in the present invention, it is preferable to process the objects to be processed one by one in order to obtain an object to be processed having excellent dimensional accuracy. However, it is geometrical to the heat source or the cooling source when the temperature of the objects to be processed is controlled. If the objectivity is maintained, two or more objects to be processed may be processed simultaneously.

  Further, depending on the form of the object to be processed, the object to be processed may be placed on the tray jig and heat-treated. In this case, the tray jig on which the object to be processed is supported is supported by the transfer support pin of the transfer arm, and is transferred into the processing chamber by the transfer arm. The tray jig transported into the processing chamber is transferred from the transport support pin to the mounting table support pin, for example, when the mounting table moves up and down. At this time, it is preferable that at least three tray support pins for supporting the object to be processed are provided on the upper surface of the tray jig.

  Further, for example, when a tray jig composed of a circular upper surface portion and a cylindrical side surface portion is used, a mounting table support pin is provided on the mounting table on a circumference having substantially the same diameter as the inner diameter of the side surface portion of the tray jig. Is preferably arranged. Even a heat treatment apparatus including such a tray jig can enjoy the operational effects described in the embodiment of the present invention. In addition, when using a tray jig consisting of a circular top surface and a cylindrical side surface, support pins for transportation are arranged on the circumference of the transport arm on the circumference that is approximately the same diameter as the inner diameter of the side surface of the tray jig. You may do it. Even a heat treatment apparatus including such a tray jig can enjoy the operational effects described in the embodiment of the present invention.

  Furthermore, for example, when a workpiece having a circular upper surface portion and a cylindrical side surface portion is supported by a tray jig, a circle having a diameter substantially the same as the inner diameter of the side surface portion of the workpiece on the tray jig. It is preferable that the tray support pins are arranged on the circumference. According to the heat treatment apparatus including such a tray jig, the tray jig can also play a role of positioning, and the contact area with the object to be processed is also minimized, so that temperature variation of the object to be processed is suppressed. Therefore, it is preferable.

  The present invention can be applied to a heat treatment apparatus for carburizing and / or quenching a workpiece.

DESCRIPTION OF SYMBOLS 1 Heat processing apparatus 2 Processing chamber 3 Conveying mechanism 4 Mounting base 5 Driving apparatus 6 Driving arm 7 Mounting base central part 8 Supporting blade 9 Mounting base support pin 10 Transport arm 11 Protrusion part 12 Supporting pin 13 Auxiliary pin 13a Taper part 14 Opening Part 15 Opening / closing door 16 Induction heating coil W To-be-processed object W1 To-be-processed object upper surface part W2 To-be-processed object side part

Claims (18)

A heat treatment apparatus for carburizing and / or quenching a circular workpiece.
A processing chamber for performing a predetermined process on the workpiece;
A transport mechanism for transporting an object to be processed inside and outside the processing chamber;
A mounting table provided in the processing chamber, on which the object to be processed transported into the processing chamber is mounted;
The transport mechanism includes a transport arm for placing and moving a target object, and the transport arm is provided with at least three transport support pins that support the target object when transporting the target object.
The mounting table is provided with at least three mounting table support pins for supporting the object to be processed,
The object to be processed has a shape composed of a circular upper surface part and a cylindrical side surface part, and on the mounting table, the mounting table has a diameter substantially the same as the inner diameter of the side surface part of the processing object. A heat treatment apparatus in which a support pin is arranged . 2. The heat treatment apparatus according to claim 1, wherein the transfer support pins are arranged on a circumference having substantially the same diameter as the inner diameter of the side surface of the object to be processed on the transfer arm. A heat treatment apparatus for carburizing and / or quenching a circular workpiece.
A processing chamber for performing a predetermined process on the workpiece;
A transport mechanism for transporting an object to be processed inside and outside the processing chamber;
A mounting table provided in the processing chamber, on which the object to be processed transported into the processing chamber is mounted;
The transport mechanism includes a transport arm for placing and moving a target object, and the transport arm is provided with at least three transport support pins that support the target object when transporting the target object.
The mounting table is provided with at least three mounting table support pins for supporting the object to be processed,
The object to be processed has a shape composed of a circular upper surface part and a cylindrical side surface part, and has a shape substantially equal to the inner diameter of the side surface part of the object to be processed on the transfer arm. A heat treatment apparatus in which a support pin is arranged. The transfer arm includes auxiliary pins provided around the transfer support pins,
The heat treatment apparatus according to any one of claims 1 to 3, wherein the auxiliary pin is disposed in contact with a side surface of the object to be processed. A heat treatment apparatus for carburizing and / or quenching a circular workpiece.
A processing chamber for performing a predetermined process on the workpiece;
A transport mechanism for transporting an object to be processed inside and outside the processing chamber;
A mounting table provided in the processing chamber, on which the object to be processed transported into the processing chamber is mounted;
The transport mechanism includes a transport arm that places and moves a workpiece.
The transfer arm is provided with at least three transfer support pins for supporting the object to be processed when the object to be processed is transferred,
The mounting table is provided with at least three mounting table support pins for supporting the object to be processed,
The transfer arm includes auxiliary pins provided around the transfer support pins,
The auxiliary pin is disposed so as to contact a side surface of the object to be processed. The at least part of the side of the auxiliary pin that faces the side surface of the object to be processed is formed in a tapered shape that becomes thinner toward the upper end of the auxiliary pin. The heat processing apparatus as described in. The mounting table is composed of at least three supporting blades each provided with the mounting table support pins, and each supporting blade is provided so as to protrude radially from the center of the mounting table in plan view. The heat treatment apparatus according to claim 1, wherein the heat treatment apparatus is a heat treatment apparatus. At the tip of the transfer arm, there are provided at least three protrusions that protrude toward the center of the mounting table and can support the object to be processed between the support blades in plan view. provided carrying support pins respectively, each carrying support pin according to claim 7, characterized in that it is arranged so as to support the object to be processed between said respective support blade in a plan view Heat treatment equipment.
When mounted with the object to the mounting table, any one of claims 1-8 in which said mounting base supporting pins and the carrying support pin, characterized in that it is arranged on the same circumference in a plan view The heat treatment apparatus according to one item. A heat treatment apparatus for carburizing and / or quenching a circular workpiece.
A processing chamber for performing a predetermined process on the workpiece;
A tray jig for supporting the object to be processed;
A transport mechanism for transporting the tray jig to the outside of the processing chamber and the processing chamber;
A mounting table provided in the processing chamber for mounting the tray jig transported into the processing chamber;
The transport mechanism includes a transport arm that mounts and moves the tray jig, and the transport arm is provided with at least three transport support pins that support the tray jig when transporting the tray jig. And
The mounting table is provided with at least three mounting table support pins for supporting the tray jig,
Comprising at least three tray support pins for supporting the object to be processed on the upper surface of the tray jig;
The tray jig has a shape composed of a circular upper surface portion and a cylindrical side surface portion, and the mounting table is arranged on a circumference having a diameter substantially the same as the inner diameter of the side surface portion of the tray jig on the mounting table. A heat treatment apparatus in which a support pin is arranged. 11. The heat treatment apparatus according to claim 10, wherein the transfer support pins are arranged on a circumference having substantially the same diameter as the inner diameter of the side surface portion of the tray jig on the transfer arm. A heat treatment apparatus for carburizing and / or quenching a circular workpiece.
A processing chamber for performing a predetermined process on the workpiece;
A tray jig for supporting the object to be processed;
A transport mechanism for transporting the tray jig to the outside of the processing chamber and the processing chamber;
A mounting table provided in the processing chamber for mounting the tray jig transported into the processing chamber;
The transport mechanism includes a transport arm that mounts and moves the tray jig, and the transport arm is provided with at least three transport support pins that support the tray jig when transporting the tray jig. And
The mounting table is provided with at least three mounting table support pins for supporting the tray jig,
Comprising at least three tray support pins for supporting the object to be processed on the upper surface of the tray jig;
The tray jig has a shape composed of a circular upper surface portion and a cylindrical side surface portion, and on the circumference of the conveyance arm on the circumference having substantially the same diameter as the inner diameter of the side surface portion of the tray jig. A heat treatment apparatus in which a support pin is arranged. The object to be processed has a shape composed of a circular upper surface part and a cylindrical side surface part, and the tray is disposed on a circumference having a diameter substantially the same as the inner diameter of the side surface part of the object to be processed on the tray jig. The support pin is arrange | positioned , The heat processing apparatus as described in any one of Claims 10-12 characterized by the above-mentioned. The mounting table is composed of at least three supporting blades each provided with the mounting table support pins, and each supporting blade is provided so as to protrude radially from the center of the mounting table in plan view. The heat treatment apparatus according to claim 10, wherein the heat treatment apparatus is characterized. At the tip of the transfer arm, there are provided at least three protrusions that protrude toward the center of the mounting table and can support the tray jig between the support blades in plan view. The transport support pins are respectively provided, and the transport support pins are arranged so as to support the tray jig between the support blades in a plan view. The heat processing apparatus as described in. 16. When mounting the tray jig on the mounting table, the mounting table support pins and the transport support pins are arranged on the same circumference in a plan view. A heat treatment apparatus according to claim 1. The heat treatment apparatus according to any one of claims 1 to 16, further comprising an elevating mechanism for elevating the mounting table. The heat treatment apparatus according to any one of claims 1 to 17, further comprising a rotation mechanism that rotates the mounting table.

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