JP6195773B2 - Carburizing and quenching equipment - Google Patents

Carburizing and quenching equipment Download PDF

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JP6195773B2
JP6195773B2 JP2013213329A JP2013213329A JP6195773B2 JP 6195773 B2 JP6195773 B2 JP 6195773B2 JP 2013213329 A JP2013213329 A JP 2013213329A JP 2013213329 A JP2013213329 A JP 2013213329A JP 6195773 B2 JP6195773 B2 JP 6195773B2
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carburizing
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quenching
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北斗 畠中
北斗 畠中
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Dowa Thermotech Co Ltd
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Description

本発明は、被処理体の浸炭焼入れ処理を行う浸炭焼入れ設備に関する。   The present invention relates to a carburizing and quenching facility for performing a carburizing and quenching process on an object to be processed.

低合金鋼等(以下、「被処理体」という)の耐摩耗性を向上させるためには、被処理体の表面層に炭素を侵入固溶させる浸炭処理を行うことが一般的となっている。通常、浸炭処理を行う際には予熱処理や焼入れ処理等も行われる。本明細書においては、このような予熱処理や焼入れ処理等を含め、被処理体の浸炭処理を行う際に一般的に行われる一連の処理のことを「浸炭焼入れ処理」という。   In order to improve the wear resistance of a low alloy steel or the like (hereinafter referred to as “object to be treated”), it is common to perform a carburizing process in which carbon enters the surface layer of the object to be treated and dissolves. . Usually, when performing a carburizing process, a pre-heat treatment, a quenching process, etc. are also performed. In the present specification, a series of processes generally performed when performing a carburizing process on an object to be processed including such pre-heat treatment and quenching process is referred to as “carburizing and quenching process”.

近年、浸炭焼入れ処理を被処理体の機械加工工程の一工程として組み入れ、被処理体の機械加工と浸炭焼入れ処理をオンラインで行うことが求められている。このようなオンライン機械加工製造システムの構築を可能にする浸炭焼入れ設備としては、例えば特許文献1や特許文献2に記載されたものがある。   In recent years, it has been required to incorporate carburizing and quenching as a process of machining the object to be processed, and to perform machining and carburizing and quenching of the object to be processed online. Examples of carburizing and quenching equipment that enables the construction of such an online machining manufacturing system include those described in Patent Document 1 and Patent Document 2, for example.

特許文献1及び特許文献2に記載された浸炭焼入れ設備では、浸炭処理や焼入れ処理等の熱処理をそれぞれ独立した処理室で行ういわゆるバッチ式の処理方法を採用している。これらの浸炭焼入れ設備では、浸炭焼入れ処理の工程の中で最も長い処理時間を要する浸炭処理を複数の浸炭室で分担して行うことにより、機械加工工程のラインスピードに合わせた浸炭焼入れ処理を行っている。   The carburizing and quenching facilities described in Patent Document 1 and Patent Document 2 employ a so-called batch-type processing method in which heat treatment such as carburizing and quenching is performed in independent processing chambers. In these carburizing and quenching facilities, carburizing and quenching is performed according to the line speed of the machining process by sharing the carburizing that requires the longest processing time among the carburizing and quenching processes in multiple carburizing chambers. ing.

特開平10−53809号公報Japanese Patent Laid-Open No. 10-53809 特開2002−294429号公報JP 2002-294429 A

生産性向上のためには、オンライン機械加工製造システムに組み込まれる浸炭焼入れ処理時間を更に短縮することが必要となるが、従来の浸炭焼入れ設備では、各処理室への被処理体の搬送の連携性については考慮されていなかった。このため、浸炭焼入れ処理時間を短縮することが困難な状況となっていた。   In order to improve productivity, it is necessary to further shorten the carburizing and quenching processing time incorporated in the on-line machining manufacturing system. With conventional carburizing and quenching equipment, however, the transport of the workpieces to each processing chamber is coordinated. Sex was not considered. For this reason, it has been difficult to shorten the carburizing and quenching processing time.

例えば、特許文献1や特許文献2に記載された浸炭焼入れ設備においては、浸炭処理後の被処理体を浸炭室から搬出する際、及び、これから浸炭処理を行う次の被処理体を浸炭室に搬入する際に、浸炭室に設けられた被処理体が通過する開口の開閉を行う搬送口扉を開けることとしている。このような場合、被処理体の搬送にかかる時間分、浸炭焼入れ処理時間が長くなるのはもちろんのこと、搬送口扉を開ける都度、浸炭室の温度が低下することになる。   For example, in the carburizing and quenching facilities described in Patent Document 1 and Patent Document 2, when the object to be processed after the carburizing process is carried out from the carburizing chamber, and the next object to be carburized from now on to the carburizing chamber. When carrying in, it is supposed that the conveyance opening door which opens and closes the opening which the to-be-processed object provided in the carburizing chamber passes will be opened. In such a case, the carburizing and quenching processing time is increased by the time required for transporting the object to be processed, and the temperature of the carburizing chamber is lowered every time the transport port door is opened.

このとき、浸炭室内の温度が適切な浸炭温度(850℃〜1100℃程度)を下回るような場合には、被処理体への浸炭効率が落ちることとなり、被処理体の十分な浸炭処理を行うためには浸炭処理時間をある程度確保しておかなければならない。特に、浸炭室の容積が小さい場合には搬送口扉を開けた際の、浸炭室の温度低下も大きくなるため、より長く浸炭処理時間を確保しておかなければならない。   At this time, when the temperature in the carburizing chamber is lower than an appropriate carburizing temperature (approximately 850 ° C. to 1100 ° C.), the carburizing efficiency of the object to be processed is reduced, and the carburizing process is sufficiently performed on the object to be processed. In order to achieve this, carburizing time must be secured to some extent. In particular, when the volume of the carburizing chamber is small, the temperature decrease of the carburizing chamber when the transfer port door is opened increases, so the carburizing time must be secured longer.

更に、浸炭室からの被処理体の搬出後から次の被処理体の搬入までの間隔が短い場合には、次の被処理体を搬入するまでの間に浸炭室の温度が上がりきらないまま、次の被処理体が浸炭室に搬入されることになる。即ち、次の被処理体の搬入のための搬送口扉の開扉により、浸炭室の温度が再度低下することになり、その結果、浸炭効率が更に低下してしまう。このため、浸炭処理時間をより長く確保しておくことが必要となってしまう。   Furthermore, when the interval from the removal of the object to be processed from the carburizing chamber to the next object to be transferred is short, the temperature of the carburizing chamber remains high until the next object to be processed is transferred. The next object to be processed is carried into the carburizing chamber. That is, the temperature of the carburizing chamber is lowered again by opening the transfer port door for carrying in the next object to be processed, and as a result, the carburizing efficiency is further lowered. For this reason, it is necessary to ensure a longer carburizing time.

また、浸炭焼入れ処理にかかる時間を短縮するためには、従来よりも多くの浸炭室を設けることも考えられるが、浸炭室の設置コストや設置スペースの問題から浸炭室の増設が困難な場合もある。   In order to shorten the time required for the carburizing and quenching process, it may be possible to provide more carburizing chambers than before. However, it may be difficult to increase the number of carburizing chambers due to the cost of the carburizing chamber and installation space. is there.

また、以上の説明では、浸炭室における被処理体の搬入出時の問題点について説明したが、他の処理室(昇温室、焼入れ室、焼き戻し室等)における搬入出時にも同様の問題が起きる。即ち、従来の浸炭焼入れ設備においては、各処理室における処理時間をある程度確保しておく必要があるため、浸炭焼入れ処理全体にかかる時間を短縮させることは困難であった。   Further, in the above description, the problem at the time of loading / unloading of the object to be processed in the carburizing chamber has been described, but the same problem also occurs at the time of loading / unloading in other processing chambers (temperature raising chamber, quenching chamber, tempering chamber, etc.). Get up. That is, in the conventional carburizing and quenching equipment, it is necessary to secure a certain amount of processing time in each processing chamber, so it is difficult to reduce the time required for the entire carburizing and quenching process.

本発明は、上記事情に鑑みてなされたものであり、被処理体の浸炭焼入れ処理にかかる時間を短縮することを目的とする。   This invention is made | formed in view of the said situation, and it aims at shortening the time concerning the carburizing quenching process of a to-be-processed object.

上記課題を解決する本発明は、被処理体に浸炭焼入れ処理に係る少なくとも1つの処理を施す処理室と、被処理体を搬送する搬送装置と、前記処理室内に設けられ、前記処理室内に搬送された被処理体が載置される載置台とを備え、前記搬送装置に被処理体を前記処理室内及び前記処理室外に搬送する搬送アームが設けられた、被処理体の浸炭焼入れ処理を行う浸炭焼入れ設備であって、前記搬送アームには、既に処理が施された被処理体を支持する第1の支持部と、次に処理が施される被処理体を支持する第2の支持部とが設けられ、前記搬送アームに、前記載置台の平面視における外形よりも大きな空間部が設けられていることを特徴とする。
本発明によれば、処理室からの被処理体の搬出と処理室への次の被処理体の搬入を搬送口扉の開扉時に同時に行うことができる。
The present invention for solving the above-mentioned problems is provided in a processing chamber for performing at least one processing related to carburizing and quenching processing on a target object, a transfer device for transferring the target object, and being transferred to the processing chamber. And a carburizing and quenching process for the target object, wherein the transfer device is provided with a transfer arm for transferring the target object to the processing chamber and the processing chamber. In the carburizing and quenching facility, the transfer arm includes a first support part that supports a target object that has already been processed, and a second support part that supports a target object to be processed next. And a space larger than the outer shape of the mounting table in plan view is provided on the transfer arm .
According to the present invention, it is possible to simultaneously carry out the object to be processed from the processing chamber and carry in the next object to be processed into the processing chamber when the transfer door is opened.

前記第1の支持部と前記第2の支持部とが前記搬送アームの伸縮方向に沿って設けられていても良い。前記空間部は、前記第1の支持部と前記第2の支持部との間に設けられていても良い。前記第1の支持部の前部に、前記搬送アームの移動時において当該第1の支持部と前記載置台が接触しないように設けられた第1の開口が形成され、前記第2の支持部の前部に、前記搬送アームの移動時において当該第2の支持部と前記載置台が接触しないように設けられた第2の開口が形成されていても良い。前記第1の支持部と前記第2の支持部の高さが同一であっても良い。 The first support part and the second support part may be provided along the extension / contraction direction of the transfer arm . Before Symbol space may be provided between the first supporting portion and the second supporting portion. A first opening is formed at a front portion of the first support portion so that the first support portion and the mounting table do not come into contact with each other when the transfer arm moves, and the second support portion A second opening provided so that the second support portion and the mounting table do not come into contact with each other when the transport arm is moved may be formed in the front portion. The heights of the first support part and the second support part may be the same.

前記載置台を昇降させる昇降装置を備えていても良い。   You may provide the raising / lowering apparatus which raises / lowers the mounting table mentioned above.

前記第1の支持部及び前記第2の支持部の少なくともいずれかには、前記被処理体を支持する少なくとも3つの搬送用支持ピンが設けられていても良い。前記載置台には、前記被処理体を支持する少なくとも3つの載置台支持ピンが設けられていても良い。   At least one of the first support part and the second support part may be provided with at least three transport support pins that support the object to be processed. The mounting table may be provided with at least three mounting table support pins for supporting the object to be processed.

被処理体は、上面部と側面部から成る形状であって、前記搬送アームで前記被処理体を支持した際に前記被処理体の側面部の内壁に接して又は近接して前記被処理体の位置規制を行うように前記搬送用支持ピンが設けられていても良い。また、前記載置台で前記被処理体を支持した際に前記被処理体の側面部の内壁に接して又は近接して前記被処理体の位置規制を行うように前記載置台支持ピンが設けられていても良い。   The object to be processed has a shape including an upper surface part and a side part, and the object to be processed is in contact with or close to an inner wall of the side part of the object to be processed when the object to be processed is supported by the transfer arm. The conveyance support pins may be provided so as to regulate the position. Further, when the object to be processed is supported by the mounting table, the mounting table support pin is provided so as to regulate the position of the object to be processed in contact with or close to the inner wall of the side surface of the object to be processed. May be.

本発明によれば、処理室からの被処理体の搬出と処理室への次の被処理体の搬入を搬送口扉の開扉時に同時に行うことができる。これにより、被処理体の搬入出にかかる時間を短縮することができる。また、搬送口扉の開閉頻度を少なくすることができるため、処理室内の温度低下を抑制することができる。これにより、処理室内が適正温度に達するまでの時間を短縮することができるため、結果として処理室における処理時間を短縮することができる。   According to the present invention, it is possible to simultaneously carry out the object to be processed from the processing chamber and carry in the next object to be processed into the processing chamber when the transfer door is opened. Thereby, the time taken to carry in / out the object to be processed can be shortened. In addition, since the frequency of opening and closing the transfer port door can be reduced, a temperature drop in the processing chamber can be suppressed. As a result, the time required for the processing chamber to reach an appropriate temperature can be shortened, and as a result, the processing time in the processing chamber can be shortened.

本発明の実施形態に係る浸炭焼入れ設備における各処理室等の概略配置図である。It is a schematic layout drawing of each processing chamber etc. in carburizing hardening equipment concerning an embodiment of the present invention. 第1浸炭室の内部を示す概略図である。It is the schematic which shows the inside of a 1st carburizing chamber. 図1中のA−A断面図である。It is AA sectional drawing in FIG. 搬送アームの補助ピンについての説明図である。It is explanatory drawing about the auxiliary pin of a conveyance arm. 本発明の実施形態に係る浸炭処理工程における被処理体の搬送動作を示す図である。It is a figure which shows the conveyance operation of the to-be-processed object in the carburizing process which concerns on embodiment of this invention. 本発明の実施形態に係る浸炭処理工程における被処理体の搬送動作を示す図である。It is a figure which shows the conveyance operation of the to-be-processed object in the carburizing process which concerns on embodiment of this invention. 本発明の実施形態に係る浸炭処理工程における被処理体の搬送動作を示す図である。It is a figure which shows the conveyance operation of the to-be-processed object in the carburizing process which concerns on embodiment of this invention. 円形状の上面部と円筒状の側面部から成る被処理体の支持態様を示す図である。It is a figure which shows the support aspect of the to-be-processed object which consists of a circular-shaped upper surface part and a cylindrical side part. 図8中のB−O−B縦断面図である。FIG. 9 is a vertical cross-sectional view of BOB in FIG. 8. 本発明の別の実施形態に係る浸炭処理工程における被処理体の搬送動作を示す図である。It is a figure which shows the conveyance operation of the to-be-processed object in the carburizing process process which concerns on another embodiment of this invention. 本発明の別の実施形態に係る浸炭処理工程における被処理体の搬送動作を示す図である。It is a figure which shows the conveyance operation of the to-be-processed object in the carburizing process process which concerns on another embodiment of this invention. 本発明の別の実施形態に係る浸炭処理工程における被処理体の搬送動作を示す図である。It is a figure which shows the conveyance operation of the to-be-processed object in the carburizing process process which concerns on another embodiment of this invention. 本発明の別の実施形態に係る搬送アーム先端部の形状を示す図である。It is a figure which shows the shape of the conveyance arm front-end | tip part which concerns on another embodiment of this invention. 本発明の別の実施形態に係る搬送アーム先端部の形状を示す図である。It is a figure which shows the shape of the conveyance arm front-end | tip part which concerns on another embodiment of this invention. 本発明の別の実施形態に係る搬送アーム先端部の形状を示す図である。It is a figure which shows the shape of the conveyance arm front-end | tip part which concerns on another embodiment of this invention.

以下、本発明の実施形態について、平面視において円形状の被処理体Wを浸炭焼入れ処理する浸炭焼入れ設備1に基づいて説明する。なお、本明細書および図面において、実質的に同一の機能構成を有する要素においては、同一の符号を付することにより重複説明を省略する。   Hereinafter, an embodiment of the present invention will be described based on a carburizing and quenching facility 1 for carburizing and quenching a circular workpiece W in plan view. In the present specification and drawings, elements having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

図1に示すように、浸炭焼入れ設備1は、昇温室2、浸炭室3(第1浸炭室3a、第2浸炭室3b、第3浸炭室3c)及び焼入れ室4(以下、「各処理室」という場合もある)を備えており、各処理室は一列に並んで順に配置されている。また、浸炭焼入れ設備1は、各処理室への被処理体Wの搬入及び各処理室からの被処理体Wの搬出を行う搬送装置5を備えている。搬送装置5は、被処理体を支持して移動させる搬送アーム40を備えた搬送部6と、各処理室の配置列に並行して設けられた搬送路7から構成されている。搬送装置5は、搬送部6を搬送路7に沿って移動させる構成を有している。搬送部6は、搬送アーム40を各処理室に向かって水平方向に伸縮させる機構を有している。   As shown in FIG. 1, the carburizing and quenching equipment 1 includes a temperature raising chamber 2, a carburizing chamber 3 (first carburizing chamber 3 a, second carburizing chamber 3 b, third carburizing chamber 3 c) and quenching chamber 4 (hereinafter “each processing chamber”). The processing chambers are arranged in a line in order. Further, the carburizing and quenching facility 1 includes a transfer device 5 that carries the workpieces W into and out of the processing chambers. The transfer device 5 includes a transfer unit 6 including a transfer arm 40 that supports and moves an object to be processed, and a transfer path 7 provided in parallel with the arrangement rows of the processing chambers. The transport device 5 has a configuration for moving the transport unit 6 along the transport path 7. The transfer unit 6 has a mechanism for expanding and contracting the transfer arm 40 in the horizontal direction toward each processing chamber.

浸炭焼入れ設備1においては、1つの処理室内(例えば昇温室2)において所定の処理が施された被処理体Wを当該処理室の下流にある処理室(例えば第1浸炭室3a)に順々に搬送し、各処理室でそれぞれ所定の処理が施されることにより被処理体Wの浸炭焼入れ処理が終了する。なお、本実施形態における浸炭処理は、第1〜第3浸炭室3a〜3cにおいて順に浸炭処理されることにより、一連の浸炭処理が完了する。   In the carburizing and quenching facility 1, the workpiece W that has been subjected to a predetermined process in one processing chamber (for example, the temperature raising chamber 2) is sequentially placed in the processing chamber (for example, the first carburizing chamber 3 a) downstream of the processing chamber. The carburizing and quenching processing of the workpiece W is completed by performing predetermined processing in each processing chamber. In addition, the carburizing process in this embodiment completes a series of carburizing processes by sequentially carburizing in the first to third carburizing chambers 3a to 3c.

以下、第1浸炭室3aの構成に基づいて浸炭焼入れ設備1の説明を行う。図2は、第1浸炭室3aの内部を示す概略図である。なお、図2における搬送アーム40は、後述する載置台30との間で被処理体Wの受け渡しを行うことが可能な所定の位置まで伸びている状態にある。   Hereinafter, the carburizing and quenching equipment 1 will be described based on the configuration of the first carburizing chamber 3a. FIG. 2 is a schematic view showing the inside of the first carburizing chamber 3a. Note that the transfer arm 40 in FIG. 2 is in a state of extending to a predetermined position where the workpiece W can be delivered to and from the mounting table 30 described later.

第1浸炭室3aは、搬送アーム40で搬送された被処理体Wの受け渡しを行う受渡部20と、受渡部20の上部に隣接して設けられた熱処理部21とから成る2室構成となっている。熱処理部21には、被処理体Wを加熱する例えば誘導加熱コイル22が設けられている。   The first carburizing chamber 3 a has a two-chamber configuration including a delivery unit 20 that delivers the workpiece W transported by the transport arm 40 and a heat treatment unit 21 provided adjacent to the upper part of the delivery unit 20. ing. The heat treatment unit 21 is provided with, for example, an induction heating coil 22 that heats the workpiece W.

受渡部20と熱処理部21との間は開口しており、受渡部20の天井面に設けられた仕切扉27が開いている状態では、受渡部20の雰囲気と熱処理部21の雰囲気は連通している。仕切扉27は、引分けタイプのスライド扉であり、後述する載置台30の上昇時においても仕切扉27を閉じることが可能なように、各扉本体27a,27bの先端部には、それぞれ昇降装置23の昇降ロッド24の径と略同一な径の半円状の孔(不図示)が設けられている。   The delivery section 20 and the heat treatment section 21 are open. When the partition door 27 provided on the ceiling surface of the delivery section 20 is open, the atmosphere of the delivery section 20 and the atmosphere of the heat treatment section 21 communicate with each other. ing. The partition door 27 is a draw-type slide door, and is moved up and down at the tip of each door body 27a, 27b so that the partition door 27 can be closed even when the mounting table 30 described later is raised. A semicircular hole (not shown) having a diameter substantially the same as the diameter of the lifting rod 24 of the device 23 is provided.

熱処理部21の下方には、被処理体Wを載置する載置台30が設けられ、載置台30は、第1浸炭室3aの外部に設けられた昇降装置23の昇降ロッド24に接続されている。即ち、載置台30は、昇降装置23により昇降可能に構成されている。昇降ロッド24は、第1浸炭室3aの受渡部20の下面を貫通するように設けられており、昇降ロッド24と受渡部20との貫通部分における隙間は密閉されている。なお、昇降ロッド24の形状は特に限定されず、横断面が方形状のものであっても良い。即ち、載置台30に接続可能な部材(昇降部材)であれば良い。   Below the heat treatment part 21, a mounting table 30 for mounting the workpiece W is provided, and the mounting table 30 is connected to a lifting rod 24 of a lifting device 23 provided outside the first carburizing chamber 3a. Yes. That is, the mounting table 30 is configured to be movable up and down by the lifting device 23. The raising / lowering rod 24 is provided so that the lower surface of the delivery part 20 of the 1st carburizing chamber 3a may be penetrated, and the clearance gap in the penetration part of the raising / lowering rod 24 and the delivery part 20 is sealed. In addition, the shape of the raising / lowering rod 24 is not specifically limited, A cross section may be a square shape. That is, any member (elevating member) that can be connected to the mounting table 30 may be used.

受渡部20の搬送装置側の側壁には、搬送アーム40が通過可能な搬送口25が設けられている。また、受渡部20の搬送装置側の側壁外部には、搬送口25の開閉を行う搬送口扉26が設けられている。搬送口扉26は扉開閉機構(不図示)により昇降移動することができるよう設けられている。   A transfer port 25 through which the transfer arm 40 can pass is provided on the side wall of the transfer unit 20 on the transfer device side. A transfer port door 26 for opening and closing the transfer port 25 is provided outside the side wall of the delivery unit 20 on the transfer device side. The transfer port door 26 is provided so as to be moved up and down by a door opening / closing mechanism (not shown).

搬送アーム40の先端部41には、第1の被処理体Wを支持する第1の支持部42と、第2の被処理体Wを支持する第2の支持部43が設けられている。第1の支持部42は、第2の支持部43に対して搬送アーム40の先端側に設けられている。即ち、本実施形態では、1つの搬送アーム40の先端部41において、第1の支持部42と第2の支持部43とが搬送アーム40の伸縮方向に沿って設けられている。搬送アーム40から載置台30に被処理体Wを受け渡す際、及び、載置台30から搬送アーム40に被処理体Wを受け渡す際には、第1の支持部42あるいは第2の支持部43において被処理体Wの受け渡しを行う。なお、前述の受渡部20は、搬送アーム40が、第1の支持部42と載置台30との間で被処理体Wを受け渡すことが可能な位置にある状態で、第2の支持部43が第1浸炭室3a内に存在することが可能なサイズを有している。   A front end portion 41 of the transfer arm 40 is provided with a first support portion 42 that supports the first object to be processed W and a second support portion 43 that supports the second object to be processed W. The first support portion 42 is provided on the distal end side of the transfer arm 40 with respect to the second support portion 43. That is, in the present embodiment, the first support portion 42 and the second support portion 43 are provided along the extending and contracting direction of the transfer arm 40 at the distal end portion 41 of one transfer arm 40. When the workpiece W is transferred from the transfer arm 40 to the mounting table 30 and when the workpiece W is transferred from the mounting table 30 to the transfer arm 40, the first support portion 42 or the second support portion. In 43, the workpiece W is delivered. In addition, the above-described delivery unit 20 includes the second support unit in a state where the transfer arm 40 is in a position where the workpiece W can be delivered between the first support unit 42 and the mounting table 30. 43 has a size capable of existing in the first carburizing chamber 3a.

また、第1の支持部42と、第2の支持部43とが設けられる高さは略同一となっている。これにより、搬送口扉26の開量を小さくしても搬送アーム40を進退させることができる。このため、搬送口扉26の1回あたりの開閉に費やす時間を短縮することができ、結果として、浸炭焼入れ処理時間を短縮することができる。なお、各支持部の「高さ」とは、支持部の底面(本実施形態においては搬送アーム40の底面)から支持部と被処理体との当接位置(本実施形態においては後述の補助ピン70の先端)までの鉛直方向距離をいう。   Further, the height at which the first support portion 42 and the second support portion 43 are provided is substantially the same. Thereby, even if the opening amount of the conveyance port door 26 is made small, the conveyance arm 40 can be advanced and retracted. For this reason, the time spent for opening and closing the transfer port door 26 per time can be shortened, and as a result, the carburizing and quenching processing time can be shortened. The “height” of each support portion refers to a contact position between the support portion and the object to be processed from the bottom surface of the support portion (in this embodiment, the bottom surface of the transfer arm 40) (in this embodiment, an auxiliary described later). The vertical distance to the tip of the pin 70.

図3は、図2中のA−A断面図(A−A断面における平面視)である。なお、図3においては、被処理体Wの外形を破線で示すと共に、搬送アーム40の第1の支持部42に載置台30が位置する場合及び第1の支持部42と第2の支持部43との間に設けられた空間部49に載置台30が位置する場合の載置台30の外形を破線で示している。   3 is a cross-sectional view taken along the line AA in FIG. 2 (plan view in the AA cross-section). In FIG. 3, the outer shape of the workpiece W is indicated by a broken line, and the case where the mounting table 30 is located on the first support portion 42 of the transfer arm 40 and the first support portion 42 and the second support portion. The outline of the mounting table 30 in the case where the mounting table 30 is located in the space 49 provided between them is indicated by a broken line.

図3に示すように、載置台30は、平面視において中央の円板31と、円板31から放射状に突出した3つの突出部(以下、「支持羽根32」という)が一体になって形成されている。これらの各支持羽根同士のなす角度は互いに等しくなっており(本実施形態では120°)、各支持羽根32の先端には、被処理体Wを支持する載置台支持ピン33が設けられている。即ち、被処理体Wは載置台支持ピン33により3点支持される。なお、各支持羽根32及び載置台支持ピン33の材質は、耐熱用ステンレス等が適用される。   As shown in FIG. 3, the mounting table 30 is formed by integrating a central disc 31 and three projecting portions (hereinafter referred to as “support blades 32”) projecting radially from the disc 31 in plan view. Has been. The angles formed by these support blades are equal to each other (120 ° in the present embodiment), and a mounting table support pin 33 that supports the workpiece W is provided at the tip of each support blade 32. . That is, the workpiece W is supported at three points by the mounting table support pins 33. In addition, the heat-resistant stainless steel etc. are applied to the material of each support blade | wing 32 and the mounting base support pin 33. FIG.

また、搬送アーム40の第1の支持部42は、平面視において三叉形状を有しており、その三叉形状部は、搬送アーム40が第1の支持部42において被処理体Wの受け渡しを行うための所定位置にある際に、載置台30の円板31の中心に向かうようにして搬送アーム本体45から突出している(突出部44)。また、第1の支持部42のアーム先端側の端部には、搬送アーム本体45の両側部から突出する側部突出部46の先端同士の間に隙間が形成されている。即ち、第1の支持部42の前部には、開口(以下、「第1の開口47」という)が設けられている。第1の開口47のサイズは、搬送アーム40の伸縮移動時において側部突出部46が載置台30に接続する昇降ロッド24に接触しないサイズ、例えば側部突出部46の先端同士の距離が昇降ロッド24の外径より大きくなるようなサイズである。   Further, the first support portion 42 of the transfer arm 40 has a three-pronged shape in a plan view, and the three-forked shape portion transfers the workpiece W by the transfer arm 40 in the first support portion 42. When it is in the predetermined position, it protrudes from the transfer arm main body 45 so as to go to the center of the disk 31 of the mounting table 30 (protruding portion 44). In addition, a gap is formed at the end of the first support portion 42 on the arm tip side between the tips of the side protrusions 46 protruding from both sides of the transfer arm main body 45. That is, an opening (hereinafter referred to as “first opening 47”) is provided in the front portion of the first support portion 42. The size of the first opening 47 is such that the side protrusion 46 does not contact the lifting rod 24 connected to the mounting table 30 when the transfer arm 40 is extended or contracted, for example, the distance between the tips of the side protrusions 46 is raised or lowered. The size is larger than the outer diameter of the rod 24.

搬送アーム40の第2の支持部43も第1の支持部42と同様に平面視において三叉形状を有しており、その三叉形状部は、搬送アーム40が第2の支持部43において被処理体Wの受け渡しを行うための所定位置にある際に、載置台30の円板31の中心に向かうように搬送アーム本体45から突出している(突出部44)。また、第2の支持部43のアーム先端側の端部には、搬送アーム本体45の両側部から突出する側部突出部46の先端同士の間に隙間が形成されている。即ち、第2の支持部43の前部には、開口(以下、「第2の開口48」という)が設けられている。第2の開口48のサイズは、第1の開口47のサイズと同様、搬送アーム40の伸縮移動時において側部突出部46が載置台30に接続する昇降ロッド24に接触しないサイズである。   The second support portion 43 of the transfer arm 40 also has a tridentate shape in a plan view like the first support portion 42, and the trident portion is processed by the transfer arm 40 in the second support portion 43. When the body W is in a predetermined position for delivering the body W, it protrudes from the transfer arm body 45 so as to go to the center of the disk 31 of the mounting table 30 (protruding portion 44). Further, a gap is formed between the ends of the side protrusions 46 protruding from both side portions of the transfer arm main body 45 at the end of the second support portion 43 on the arm tip side. That is, an opening (hereinafter referred to as “second opening 48”) is provided in the front portion of the second support portion 43. Similar to the size of the first opening 47, the size of the second opening 48 is a size in which the side protrusion 46 does not contact the lifting rod 24 connected to the mounting table 30 when the transfer arm 40 is extended or contracted.

また、第1の支持部42と第2の支持部43との間には、昇降移動する載置台30が通過可能な空間部49が設けられている。即ち、空間部49は、載置台30の平面視における外形よりも大きく形成されている。   Further, a space 49 through which the mounting table 30 that moves up and down can pass is provided between the first support portion 42 and the second support portion 43. That is, the space 49 is formed larger than the outer shape of the mounting table 30 in plan view.

第1の支持部42及び第2の支持部43の各突出部44は、平面視において載置台30の各支持羽根間で被処理体Wを支持できるように設けられ、各突出部同士のなす角度は互いに等しくなっている(本実施形態では120°)。各突出部44の先端付近には、被処理体Wの搬送時に被処理体Wを支持する搬送用支持ピン50が設けられており、被処理体Wは搬送用支持ピン50により3点支持される。   The protrusions 44 of the first support part 42 and the second support part 43 are provided so as to support the workpiece W between the support blades of the mounting table 30 in plan view, and are formed by the protrusions. The angles are equal to each other (120 ° in this embodiment). Near the tip of each protrusion 44 is provided a transport support pin 50 that supports the workpiece W when the workpiece W is transported, and the workpiece W is supported at three points by the transport support pins 50. The

また、図2〜図4に示すように、搬送用支持ピン50で支持された被処理体Wの側面と対向する位置には、被処理体Wが搬送用支持ピン50の適正位置に載置されるように誘導する補助ピン70が設けられている。適正位置とは、例えば被処理体Wの中心と載置台30(円板31)の中心が一致する位置である。また、各補助ピン70は、被処理体Wの落下を防止する役割も有している。また、各補助ピン70の被処理体Wの側面に対向する側の一部は、ピン上端に向かって細くなっていくようなテーパー状に形成されている(テーパー部70a)。   As shown in FIGS. 2 to 4, the object to be processed W is placed at an appropriate position of the support pin 50 for conveyance at a position facing the side surface of the object W to be processed supported by the conveyance support pin 50. Auxiliary pins 70 are provided to guide the operation. The appropriate position is, for example, a position where the center of the workpiece W coincides with the center of the mounting table 30 (disk 31). Each auxiliary pin 70 also has a role of preventing the workpiece W from falling. Further, a part of each auxiliary pin 70 on the side facing the side surface of the object to be processed W is formed in a tapered shape (tapered portion 70a) so as to become thinner toward the upper end of the pin.

図4に示すように、例えば、被処理体Wを搬送用支持ピン50に載置する際に被処理体Wが適正な載置位置からずれていた場合には、被処理体Wが各補助ピン70のテーパー部70aに沿って移動することにより正しい位置に誘導される。これにより、載置台30と搬送アーム40との間で被処理体Wの受け渡しを行う際に、搬送用支持ピン50に対する被処理体Wの載置位置が被処理体ごとに異ならずに常に同一となる。さらに、搬送用支持ピン50に被処理体Wを載置した時点では、被処理体Wの側面に対向して(または接して)いる各補助ピン70により被処理体Wの位置ずれや落下が規制される。このため、被処理体Wの搬送中に搬送用支持ピン50に対する被処理体Wの載置位置のずれや落下が規制される。なお、搬送用支持ピン50及び補助ピン70の材質は、耐熱用ステンレス等が適用される。   As shown in FIG. 4, for example, when the object to be processed W is shifted from an appropriate placement position when the object to be processed W is placed on the support pins 50 for conveyance, The pin 70 is guided to the correct position by moving along the tapered portion 70a. Thus, when the workpiece W is transferred between the mounting table 30 and the transfer arm 40, the placement position of the workpiece W with respect to the transfer support pin 50 is always the same without being different for each workpiece. It becomes. Further, when the object to be processed W is placed on the conveyance support pin 50, the position shift or drop of the object to be processed W is caused by the auxiliary pins 70 facing (or in contact with) the side surface of the object to be processed W. Be regulated. For this reason, during the transfer of the object to be processed W, the displacement or drop of the placement position of the object to be processed W with respect to the transfer support pin 50 is restricted. Note that heat-resistant stainless steel or the like is used as the material for the conveyance support pins 50 and the auxiliary pins 70.

また、各載置台支持ピン33と各搬送用支持ピン50は、被処理体Wを受け渡す際に、平面視において同一円周上に配置されるように設けられていることが好ましい。これにより、搬送アーム40と載置台30との間で被処理体Wを受け渡す際に被処理体Wの傾き等を軽減させることができ、被処理体Wが適正な載置位置からずれることを抑制することができる。   Further, it is preferable that the mounting table support pins 33 and the transport support pins 50 are provided so as to be arranged on the same circumference in plan view when the workpiece W is transferred. Thereby, when delivering the to-be-processed object W between the conveyance arm 40 and the mounting base 30, the inclination etc. of the to-be-processed object W can be reduced, and the to-be-processed object W shift | deviates from an appropriate mounting position. Can be suppressed.

浸炭焼入れ設備1は、以上のように構成されている。なお、図示はしていないが、浸炭焼入れ設備1は、排気機構や浸炭ガス導入機構等の一般的な真空浸炭処理を行う上で必要な構成を備えている。また、以上の説明では、図1に示す昇温室2、第2浸炭室3b、第3浸炭室3c、焼入れ室4の構成については説明していないが、各処理室の基本的構成は第1浸炭室3aと同様である。例えば、焼入れ室4においては、上記誘導加熱コイル22に代えて、熱処理部21に冷却ガスを導入する機構を設けることによりガス焼入れを行っている。   The carburizing and quenching equipment 1 is configured as described above. Although not shown, the carburizing and quenching equipment 1 has a configuration necessary for performing a general vacuum carburizing process such as an exhaust mechanism and a carburizing gas introduction mechanism. In the above description, the configuration of the temperature raising chamber 2, the second carburizing chamber 3b, the third carburizing chamber 3c, and the quenching chamber 4 shown in FIG. 1 is not described, but the basic configuration of each processing chamber is the first. The same as the carburizing chamber 3a. For example, in the quenching chamber 4, gas quenching is performed by providing a mechanism for introducing a cooling gas into the heat treatment section 21 instead of the induction heating coil 22.

次に、浸炭焼入れ設備1を用いて行う浸炭処理工程における被処理体W1,W2の搬送方法の一例について、図5(a)〜(c)、図6(a)〜(c)及び図7(a)〜(c)を参照しながら説明する。なお、図5(a)〜(c)、図6(a)〜(c)及び図7(a)〜(c)においては、被処理体Wの支持ピンや誘導加熱コイル等の一部の構成部品の図示を省略している。   Next, FIGS. 5A to 5C, FIGS. 6A to 6C, and FIG. 7 illustrate an example of a method for transporting the workpieces W1 and W2 in the carburizing process performed using the carburizing and quenching facility 1. This will be described with reference to (a) to (c). 5A to 5C, FIGS. 6A to 7C, and FIGS. 7A to 7C, some of the support pins of the object to be processed W, induction heating coils, etc. Illustration of the components is omitted.

まず、図5(a)に示すように、被処理体W1に対して第1浸炭室3aの熱処理部21で浸炭処理を行う。次に、図5(b)に示すように、仕切扉27及び搬送口扉26を開け、被処理体W1が載置された載置台30を下降させる。   First, as shown to Fig.5 (a), the to-be-processed object W1 is carburized in the heat processing part 21 of the 1st carburizing chamber 3a. Next, as shown in FIG. 5B, the partition door 27 and the transfer port door 26 are opened, and the mounting table 30 on which the workpiece W1 is mounted is lowered.

続いて、図5(c)に示すように、被処理体W2が第1の支持部42に支持された搬送アーム40を前進させて、第1浸炭室3aの受渡部20に被処理体W2を搬入する。このとき、載置台30の上方に搬送アーム40の空間部49が位置するまで搬送アーム40を前進させる。なお、被処理体W2は、第1浸炭室3aの上流にある昇温室2において浸炭処理に適した温度まで昇温した状態にある。   Subsequently, as shown in FIG. 5C, the workpiece W2 advances the transfer arm 40 supported by the first support portion 42, and the workpiece W2 is transferred to the delivery portion 20 of the first carburizing chamber 3a. Carry in. At this time, the transport arm 40 is advanced until the space 49 of the transport arm 40 is positioned above the mounting table 30. In addition, the to-be-processed object W2 exists in the state heated up to the temperature suitable for a carburizing process in the temperature rising chamber 2 upstream of the 1st carburizing chamber 3a.

次に、図6(a)に示すように、載置台30を搬送アーム40の上方まで上昇させる。このとき、載置台30は搬送アーム40の空間部49を通過する。その後、図6(b)に示すように、載置台30の下方に搬送アーム40の第2の支持部43が位置するまで搬送アーム40を前進させる。このとき、空間部49にある昇降ロッド24が搬送アーム40の第2の開口48を通り抜けるようにして搬送アーム40が移動するため、第2の支持部43の各突出部44と昇降ロッド24は接触しない。   Next, as shown in FIG. 6A, the mounting table 30 is raised above the transfer arm 40. At this time, the mounting table 30 passes through the space 49 of the transfer arm 40. Thereafter, as illustrated in FIG. 6B, the transport arm 40 is advanced until the second support portion 43 of the transport arm 40 is positioned below the mounting table 30. At this time, since the transport arm 40 moves so that the lifting rod 24 in the space 49 passes through the second opening 48 of the transport arm 40, each protrusion 44 of the second support portion 43 and the lifting rod 24 are Do not touch.

続いて、図6(c)に示すように、載置台30を下降させる。これにより、被処理体W1は、載置台30から搬送アーム40の第2の支持部43に受け渡される。このとき、第1の支持部42と第2の支持部43との間に空間部が設けられていることにより、被処理体W1と被処理体W2との間に距離がある状態で各被処理体が支持されることになる。このため、熱処理直後の被処理体W1に対して比較的温度の低い被処理体W2による被処理体W1の温度低下が防止される。   Subsequently, as shown in FIG. 6C, the mounting table 30 is lowered. As a result, the workpiece W1 is transferred from the mounting table 30 to the second support portion 43 of the transfer arm 40. At this time, since a space is provided between the first support part 42 and the second support part 43, each object to be processed is in a state where there is a distance between the object W1 and the object W2. The treatment body is supported. For this reason, the temperature reduction of the to-be-processed object W1 by the to-be-processed object W2 with a comparatively low temperature with respect to the to-be-processed object W1 immediately after heat processing is prevented.

その後、図7(a)に示すように、載置台30の上方に第1の支持部42が位置するまで搬送アーム40を後退させる。このとき、搬送アーム40の第2の支持部43は、第1浸炭室3aの外部に出ないようになっている。即ち、第2の支持部43に支持された被処理体W1は、搬送口25から所定の距離離れた位置に存在している状態となる。これにより、第1浸炭室3aの外部雰囲気の影響による被処理体W1の温度低下を防ぐことができる。その結果、第1浸炭室3aにおける浸炭処理の終了後、第1浸炭室3aから第2浸炭室3bに被処理体W1が搬送された段階で、被処理体W1の温度が浸炭処理に適した温度に概ね近い温度となっており、第2浸炭室3bにおける被処理体W1の昇温時間を短縮することができる。   Thereafter, as shown in FIG. 7A, the transport arm 40 is moved backward until the first support portion 42 is positioned above the mounting table 30. At this time, the 2nd support part 43 of the conveyance arm 40 does not come out of the 1st carburizing chamber 3a. In other words, the object to be processed W1 supported by the second support portion 43 is in a state of being separated from the transport port 25 by a predetermined distance. Thereby, the temperature fall of the to-be-processed object W1 by the influence of the external atmosphere of the 1st carburizing chamber 3a can be prevented. As a result, after completion of the carburizing process in the first carburizing chamber 3a, the temperature of the workpiece W1 is suitable for the carburizing process when the workpiece W1 is transferred from the first carburizing chamber 3a to the second carburizing chamber 3b. The temperature is substantially close to the temperature, and the temperature raising time of the workpiece W1 in the second carburizing chamber 3b can be shortened.

続いて、図7(b)に示すように、被処理体W2が載置された載置台30を熱処理部21まで上昇させる。このとき、搬送アーム40の第1の支持部42から載置台30に被処理体W2が受け渡される。   Subsequently, as illustrated in FIG. 7B, the mounting table 30 on which the workpiece W <b> 2 is mounted is raised to the heat treatment unit 21. At this time, the workpiece W <b> 2 is delivered from the first support portion 42 of the transfer arm 40 to the mounting table 30.

そして、図7(c)に示すように、搬送アーム40を後退させて、受渡部20から浸炭処理を終えた被処理体W1を搬出する。このとき、第1の支持部42にある昇降ロッド24が搬送アーム40の第1の開口47を通り抜けるようにして搬送アーム40が移動するため、第1の支持部42の各突出部44と昇降ロッド24は接触しない。その後、仕切扉27及び搬送口扉26を閉じ、真空排気を行った後に被処理体W2に対して浸炭処理が行われる。   And as shown in FIG.7 (c), the conveyance arm 40 is retracted and the to-be-processed body W1 which finished the carburizing process from the delivery part 20 is carried out. At this time, since the transport arm 40 moves so that the lifting rod 24 in the first support part 42 passes through the first opening 47 of the transport arm 40, the lifting and lowering of each protrusion 44 of the first support part 42 The rod 24 does not contact. Thereafter, the partition door 27 and the transfer port door 26 are closed, and after evacuation, the carburizing process is performed on the workpiece W2.

以上、本実施形態によれば、第1浸炭室3aからの被処理体W1の搬出及び第1浸炭室3aへの被処理体W2の搬入を搬送口扉26の開扉時に同時に行うことができる。これにより、被処理体W1の搬出と被処理体W2の搬入を別々のタイミングで行っていた従来の浸炭方法よりも搬送口扉26の開閉頻度を少なくすることができる。その結果、被処理体W1,W2の搬入出にかかる時間を短縮することができ、第1浸炭室3aにおける処理時間を短縮することが可能となる。   As mentioned above, according to this embodiment, carrying out of the to-be-processed object W1 from the 1st carburizing chamber 3a and carrying in of the to-be-processed object W2 to the 1st carburizing chamber 3a can be performed simultaneously at the time of opening of the conveyance port door 26. . Thereby, the opening-and-closing frequency of the conveyance port door 26 can be decreased rather than the conventional carburizing method which carried out the to-be-processed object W1 and the to-be-processed object W2 at the separate timing. As a result, it is possible to reduce the time required for loading and unloading the workpieces W1 and W2, and it is possible to reduce the processing time in the first carburizing chamber 3a.

また、第1浸炭室3aに対する被処理体の搬入出を同じタイミングで行うことができるため、熱処理部21から受渡部20への被処理体W1の搬出と、受渡部20から熱処理部21への被処理体W2の搬入も仕切扉27の1度の開扉で行うことができる。即ち、仕切扉27の開閉頻度も少なくすることができる。これにより、熱処理部21は、熱処理部21よりも温度が低い受渡部20の雰囲気の影響を受ける頻度が少なくなり、熱処理部21内の温度低下を抑制することができる。このため、熱処理部21内が浸炭に適した温度に達するまでの時間を短縮することができ、結果として、第1浸炭室3aにおける処理時間を短縮することができる。   Moreover, since the to-be-processed object can be carried in / out with respect to the 1st carburizing chamber 3a at the same timing, the to-be-processed object W1 is carried out from the heat treatment part 21 to the delivery part 20, and from the delivery part 20 to the heat treatment part 21 The workpiece W <b> 2 can be carried in by opening the partition door 27 once. That is, the frequency of opening and closing the partition door 27 can be reduced. Thereby, the heat treatment part 21 is less frequently affected by the atmosphere of the delivery part 20 having a lower temperature than the heat treatment part 21, and can suppress a temperature drop in the heat treatment part 21. For this reason, the time until the inside of the heat treatment part 21 reaches a temperature suitable for carburizing can be shortened, and as a result, the processing time in the first carburizing chamber 3a can be shortened.

また、被処理体W1の搬出及び被処理体W2の搬入は、第1浸炭室3aのみならず、図1に示す昇温室2、第2浸炭室3b、第3浸炭室3c、焼入れ室4においても同様に行われる。このため、各処理室における処理時間もそれぞれ短縮することができるため、浸炭焼入れ処理全体にかかる時間を大幅に短縮することが可能となる。   Further, the unloading of the workpiece W1 and the loading of the workpiece W2 are performed not only in the first carburizing chamber 3a but also in the temperature raising chamber 2, the second carburizing chamber 3b, the third carburizing chamber 3c, and the quenching chamber 4 shown in FIG. Is done in the same way. For this reason, since the processing time in each processing chamber can be shortened, the time required for the entire carburizing and quenching process can be greatly shortened.

さらに、本実施形態のように、被処理体Wを1個ずつ処理する浸炭焼入れ設備1においては、被処理体Wの搬入出を行う頻度が多くなるため、被処理体Wの搬入出を同じタイミングで行うことによる処理時間短縮の効果が特に大きくなる。   Furthermore, in the carburizing and quenching equipment 1 that processes the objects to be processed W one by one as in the present embodiment, the frequency of loading and unloading the objects to be processed W is increased. The effect of shortening the processing time by performing at the timing becomes particularly large.

以上、本発明の好適な実施形態について説明したが、本発明はかかる例に限定されない。当業者であれば、特許請求の範囲に記載された技術的思想の範疇内において、各種の変更例または修正例に想到しうることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   As mentioned above, although preferred embodiment of this invention was described, this invention is not limited to this example. It is obvious for those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea described in the claims. It is understood that it belongs to.

例えば、上記実施形態では、被処理体Wを第1〜第3浸炭室3a〜3cで順に浸炭処理することにより、一連の浸炭処理が完了することとしたが、第1浸炭室3a、第2浸炭室3b、第3浸炭室3cのそれぞれの浸炭室3a〜3cにおいて1つの被処理体Wに対する浸炭処理を完了させても良い。この場合、昇温室2から搬出された被処理体W2は、第1〜第3浸炭室3a〜3cのうち、被処理体W1が搬入されていない浸炭室3a〜3cに搬入される。   For example, in the above-described embodiment, the carburizing process is sequentially performed in the first to third carburizing chambers 3a to 3c to complete the series of carburizing processes. You may complete the carburizing process with respect to one to-be-processed body W in each carburizing chamber 3a-3c of the carburizing chamber 3b and the 3rd carburizing chamber 3c. In this case, the to-be-processed body W2 carried out from the temperature raising chamber 2 is carried into the carburizing chambers 3a to 3c in which the to-be-processed body W1 is not carried out among the first to third carburizing chambers 3a to 3c.

また、各処理室の配置や数は、上記実施形態で説明したものに限定されることはない。例えば、浸炭室3を1つとする構成にした場合、あるいは上記実施形態で説明していない処理室(例えば焼き戻し室)に上記実施形態で説明した被処理体Wの搬送方法を適用した場合であっても、被処理体Wの搬入出時間を短縮することができる。即ち、本発明は、処理室の用途に限定されることなく、被処理体に浸炭焼入れ処理に係る少なくとも1つの処理を施す処理室に適用することにより、上記実施形態で説明した作用効果を享受することができる。なお、浸炭焼入れ処理に係る処理とは、予熱、浸炭、拡散、冷却、焼入れ(ガス焼入れを含む)等の一般的な浸炭焼入れ処理において必要とされる処理である。また、上記実施形態においては、浸炭焼入れ設備1において真空浸炭処理を行うこととしたが、浸炭方法はこれに限定されるものではない。   Further, the arrangement and number of processing chambers are not limited to those described in the above embodiment. For example, when the carburizing chamber 3 is configured as one, or when the method for transporting the workpiece W described in the above embodiment is applied to a processing chamber (for example, a tempering chamber) not described in the above embodiment. Even if it exists, the carrying in / out time of the to-be-processed object W can be shortened. That is, the present invention is not limited to the use of the processing chamber, and can be applied to a processing chamber in which at least one processing related to the carburizing and quenching processing is performed on the object to be processed, thereby enjoying the effects described in the above embodiment. can do. The process related to the carburizing and quenching process is a process required in a general carburizing and quenching process such as preheating, carburizing, diffusion, cooling, quenching (including gas quenching). Moreover, in the said embodiment, although it decided to perform the vacuum carburizing process in the carburizing and quenching equipment 1, the carburizing method is not limited to this.

また、上記実施形態では、仕切扉27が引分けタイプのスライド扉であるとしたが、例えば観音開きタイプの扉であっても良い。また、仕切扉27が設けられる箇所も特に限定されず、受渡部20と熱処理部21の連通する雰囲気が遮断されるように仕切扉27が設けられていれば良い。また、被処理体Wの処理を行う処理室は、上記実施形態のように受渡部20と熱処理部21から成る2室構成でなくても良い。例えば、被処理体Wの受け渡しと熱処理を1室で行う構成としても良い。この場合であっても、搬送口扉の1度の開扉で被処理体の搬入出を行うことができるため、被処理体の搬入出にかかる時間を短縮することができる。また、搬送口扉の開閉頻度が少ないために、処理室内よりも温度が低い処理室の外部雰囲気に接触する頻度も少なくなり、処理室内の温度低下を防ぐことができる。   In the above embodiment, the partition door 27 is a draw type sliding door, but may be a double door type door, for example. Moreover, the location where the partition door 27 is provided is not particularly limited as long as the partition door 27 is provided so that the atmosphere in which the delivery unit 20 and the heat treatment unit 21 communicate with each other is blocked. Further, the processing chamber for processing the workpiece W may not have a two-chamber configuration including the delivery unit 20 and the heat treatment unit 21 as in the above embodiment. For example, it is good also as a structure which performs delivery of the to-be-processed object W, and heat processing in one chamber. Even in this case, since the object to be processed can be carried in / out with one opening of the conveyance port door, the time required for loading / unloading the object to be processed can be shortened. In addition, since the frequency of opening and closing the transfer port door is low, the frequency of contact with the external atmosphere of the processing chamber whose temperature is lower than that of the processing chamber is reduced, and a temperature drop in the processing chamber can be prevented.

また、載置台30の支持羽根32の数や各支持羽根同士のなす角度、及び、搬送アーム40の突出部44の数や各突出部同士のなす角度は、上記実施形態で説明したものに限定されることはない。さらに、載置台30の形状や搬送アーム40の形状も上記実施形態で説明したものに限定されることはない。   Further, the number of support blades 32 of the mounting table 30 and the angle formed between the support blades, and the number of protrusions 44 of the transfer arm 40 and the angle formed between the protrusions are limited to those described in the above embodiment. It will never be done. Furthermore, the shape of the mounting table 30 and the shape of the transfer arm 40 are not limited to those described in the above embodiment.

また、載置台支持ピン33、搬送用支持ピン50の数や配置は、被処理体Wの形状やサイズに応じて適宜変更されるものである。即ち、各支持ピンに被処理体Wを載置した際に、被処理体Wが傾かない状態で支持できる数(少なくとも3つ)及び配置であれば良い。また、上記実施形態では、補助ピン70の被処理体Wの側面に対向する側の一部をテーパー状に形成することとしたが、全部をテーパー状に形成しても良い。   Further, the number and arrangement of the mounting table support pins 33 and the transport support pins 50 are appropriately changed according to the shape and size of the workpiece W. That is, the number (at least three) and the arrangement may be sufficient if the object to be processed W can be supported without being inclined when the object to be processed W is placed on each support pin. Further, in the above embodiment, a part of the side of the auxiliary pin 70 facing the side surface of the object W is formed in a tapered shape, but the whole may be formed in a tapered shape.

また、各支持ピンを設けなくても、上記実施形態で説明した被処理体の搬送動作を行うことは可能である。ただし、各支持ピンで被処理体を支持することで被処理体との接触面積を小さくすることができるため、被処理体の加熱時や冷却時における被処理体内部の温度変化を均一にすることができる。これにより、被処理体の熱処理歪の発生を抑制することができる。また、各支持ピンと被処理体との接触面積が小さいことにより、被処理体の下面における浸炭と被処理体の他の部分における浸炭を均一に進行させることができる。これにより、被処理体の浸炭処理品質を向上させることができる。   Further, it is possible to perform the operation of transporting the object to be processed described in the above embodiment without providing each support pin. However, since the contact area with the object to be processed can be reduced by supporting the object to be processed with each support pin, the temperature change inside the object to be processed is uniform when the object is heated or cooled. be able to. Thereby, generation | occurrence | production of the heat processing distortion of a to-be-processed object can be suppressed. In addition, since the contact area between each support pin and the object to be processed is small, carburizing on the lower surface of the object to be processed and carburizing in other parts of the object to be processed can be progressed uniformly. Thereby, the carburizing process quality of a to-be-processed object can be improved.

また、上記実施形態においては、被処理体Wを1個ずつ処理することとしたが、搬送アーム40や載置台30で支持することが可能な治具を用い、その治具で2個以上の被処理体Wを固定することで2個以上の被処理体を同時に処理しても良い。なお、被処理体Wを1個ずつ処理する浸炭焼入れ設備においては、被処理体Wの搬入出を行う頻度が多くなるため、上記実施形態で説明した処理時間短縮の効果が特に大きくなる。   Moreover, in the said embodiment, although the to-be-processed object W was processed one by one, the jig | tool which can be supported with the conveyance arm 40 or the mounting base 30 is used, and two or more are used with the jig | tool. Two or more objects to be processed may be processed simultaneously by fixing the object to be processed W. Note that, in the carburizing and quenching equipment that processes the objects to be processed W one by one, the frequency of carrying in / out the objects to be processed W increases, and thus the effect of reducing the processing time described in the above embodiment is particularly large.

また、上記実施形態で説明した「円形状の被処理体」には、円柱形状や円環形状をなす被処理体に加えて、例えば、図8,図9に示すような円形状の上面部Wtと円筒状の側面部Wsから成る被処理体も含まれる。円形状の被処理体の具体例は機械部品のギア等である。 The “circular object to be processed” described in the above embodiment includes, for example, a circular upper surface portion as shown in FIGS. 8 and 9 in addition to the object to be processed having a cylindrical shape or an annular shape. An object to be processed including W t and a cylindrical side surface portion W s is also included. A specific example of the circular object is a gear of a machine part or the like.

図8,図9に示すように、被処理体Wが円形状の上面部Wtと円筒状の側面部 Wsから成る形状のもの、即ち円形状のお盆を伏せたような下向き凹形状の被処理体Wの場合、搬送アーム40の3つの搬送用支持ピン50を下向き凹部の内側において上面部Wt及び側面部Wsに接する(または非常に近い状態とする)ように搬送アーム40上に配置することで、被処理体Wを3点支持する。このように被処理体Wの側面部Wsの内径と略同一直径の円周上に搬送用支持ピン50を配置しておけば、搬送用支持ピン50が被処理体Wの側面部Wsに接するような状態で被処理体Wを支持することができるため、被処理体Wの位置規制を行うことができる。 As shown in FIGS. 8 and 9, the workpiece W has a shape composed of a circular upper surface portion Wt and a cylindrical side surface portion W s , that is, a downwardly concave shape like a circular tray laid down. for workpiece W, (a or very close state) in contact with the upper surface portion W t and a side portion W s inside the downwardly concave three carrying support pins 50 of the transfer arm 40 as the transfer arm 40 on By arranging the two, the workpiece W is supported at three points. In this way, if the transport support pins 50 are arranged on the circumference having substantially the same diameter as the inner diameter of the side surface portion W s of the object to be processed W, the transport support pins 50 become the side surface portions W s of the object to be processed W. Since the object to be processed W can be supported in a state where the object is in contact with the substrate, the position of the object to be processed W can be regulated.

また、被処理体Wが円形状の上面部Wtと円筒状の側面部Wsから成る形状を有している場合、載置台支持ピン33の配置も搬送用支持ピン50と同様に配置することが好ましい。即ち、被処理体Wの下向き凹部の内側において上面部Wt及び側面部Wsに接する(または非常に近い状態とする)ように少なくとも3つの載置台支持ピン33を配置すれば良い。これにより、被処理体Wの載置台30上に支持すると共に被処理体Wの位置規制を行うこともできる。 Further, when the workpiece W has a shape composed of a circular upper surface portion W t and a cylindrical side surface portion W s , the placement table support pins 33 are also disposed in the same manner as the transport support pins 50. It is preferable. That is, it is only necessary to arrange at least three mounting table support pins 33 so as to be in contact with (or very close to) the upper surface portion W t and the side surface portion W s inside the downward recess of the workpiece W. Thereby, while supporting on the mounting base 30 of the to-be-processed object W, the position control of the to-be-processed object W can also be performed.

また、被処理体Wの形状は、円形に限定されるものでもない。その他の形状であっても、被処理体Wを支持する第1の支持部42と第2の支持部43を備え、支持された被処理体Wを載置台30に受け渡すことが可能な構成となっていれば、上記実施形態で説明した効果を享受することができる。例えば、図8,図9に示すような「円形状の上面部Wt」と「円筒状の側面部Ws」ではなく、「上面部」と「側面部」から成る、縦断面形状が下向き凹形状となる被処理体Wであっても良い。 Further, the shape of the workpiece W is not limited to a circle. Even if it is other shape, it is provided with the 1st support part 42 and the 2nd support part 43 which support the to-be-processed object W, and the structure which can deliver the supported to-be-processed object W to the mounting base 30 If it becomes, it can enjoy the effect demonstrated in the said embodiment. For example, instead of “circular upper surface portion W t ” and “cylindrical side surface portion W s ” as shown in FIGS. 8 and 9, the vertical cross-sectional shape composed of “upper surface portion” and “side surface portion” is downward. The to-be-processed object W used as a concave shape may be sufficient.

この場合、被処理体を搬送アーム40で支持した際に被処理体の側面部の内壁に接して又は近接して前記被処理体の位置規制を行うように搬送用支持ピン50が配置されていれば、搬送用支持ピン50により被処理体Wの位置規制を行うことができる。例えば、横断面が四角形の角筒状の被処理体であれば、搬送用支持ピン50を4本設け、「側面部」の1つの内側面に対して1本の搬送用支持ピン50が接するようにしておけば、被処理体の位置規制を行うことができる。また、被処理体を載置台30で支持した際に被処理体の側面部の内壁に接して又は近接して前記被処理体の位置規制を行うように載置台支持ピン33が配置されていれば、載置台支持ピン33により被処理体Wの位置規制を行うことができる。   In this case, when the object to be processed is supported by the conveyance arm 40, the conveyance support pins 50 are arranged so as to regulate the position of the object to be processed in contact with or close to the inner wall of the side surface of the object to be processed. Then, the position of the object to be processed W can be regulated by the conveyance support pins 50. For example, in the case of a rectangular tube-shaped workpiece having a square cross section, four transport support pins 50 are provided, and one transport support pin 50 is in contact with one inner side surface of the “side surface”. By doing so, the position of the object to be processed can be regulated. Further, when the object to be processed is supported by the mounting table 30, the mounting table support pins 33 are arranged so as to regulate the position of the object to be processed in contact with or close to the inner wall of the side surface of the object to be processed. For example, the position of the workpiece W can be regulated by the mounting table support pins 33.

また、被処理体Wの第1浸炭室3aに対する搬送手順は、上記実施形態で説明した例(図5〜図7)に限定されることはなく、例えば、図10(a)〜(c)、図11(a)〜(c)、及び図12(a)〜(c)に示す搬送手順であっても良い。また、上記実施形態では、載置台30を昇降させることにより、載置台30と搬送アーム40との間で被処理体Wを受け渡すこととしたが、例えば、載置台30に昇降機構を設けずに搬送アーム40に昇降機構を設け、搬送アーム40を昇降させることにより、載置台30と搬送アーム40との間で被処理体Wを受け渡しても良い。当然のことながら、載置台30と搬送アーム40の双方に昇降機構を設けても良い。   Moreover, the conveyance procedure with respect to the 1st carburizing chamber 3a of the to-be-processed object W is not limited to the example (FIGS. 5-7) demonstrated in the said embodiment, For example, FIG. 10 (a)-(c). 11 (a) to 11 (c) and FIGS. 12 (a) to 12 (c) may be used. Moreover, in the said embodiment, although the to-be-processed object W was delivered between the mounting base 30 and the conveyance arm 40 by raising / lowering the mounting base 30, for example, the raising / lowering mechanism is not provided in the mounting base 30. The transport arm 40 may be provided with an elevating mechanism and the transport arm 40 may be moved up and down to deliver the workpiece W between the mounting table 30 and the transport arm 40. As a matter of course, an elevating mechanism may be provided on both the mounting table 30 and the transfer arm 40.

即ち、載置台30と搬送アーム40との間において被処理体Wを受け渡す方法は、各処理室の形状や被処理体Wの加熱手段等に応じて適宜変更されるものであり、搬送アーム40で搬送される被処理体Wを載置台30に載置するために、鉛直方向に沿って載置台30と搬送アーム40とを相対的に移動させる相対移動機構が設けられていれば被処理体Wを受け渡すことは可能である。なお、被処理体Wの搬送手順についても上記実施形態で説明したものに限定されない。   That is, the method for delivering the workpiece W between the mounting table 30 and the transfer arm 40 is appropriately changed according to the shape of each processing chamber, the heating means for the workpiece W, and the like. In order to mount the workpiece W transported by 40 on the mounting table 30, a relative movement mechanism for moving the mounting table 30 and the transport arm 40 relatively along the vertical direction is provided. It is possible to deliver the body W. In addition, the conveyance procedure of the to-be-processed object W is not limited to what was demonstrated in the said embodiment.

また、上記実施形態では、搬送アーム40の被処理体Wの支持部として、第1の支持部42と第2の支持部43を設けたが、支持部は3つ以上設けても良い。また、搬送アーム40は、図13に示すように、当該搬送アーム40の先端に第1の支持部42を設け、第1の支持部42の後方に第2の支持部43を隣接させるように設け、第2の支持部43の更に後方に空間部49を設けるようにしても良い。この場合、第2の支持部43の第2の開口48は、当該第2の支持部の後部に設けられる。このような形状の搬送アーム40を用いても、被処理体W1,W2を搬送口扉26の開扉時に同時に搬入出することができる。なお、図13に示す突出部44及び支持羽根32の形状の場合、第1の支持部42で被処理体Wを受け渡す場合と第2の支持部43で被処理体Wを受け渡す場合で、載置台30の向きが異なっている。即ち、図13の場合には、載置台30を回転させる回転機構を設ける必要がある。ただし、当然のことながら、搬送アーム40の形状や載置台30の形状によっては、回転機構を設けなくても良い場合もある。   Moreover, in the said embodiment, although the 1st support part 42 and the 2nd support part 43 were provided as a support part of the to-be-processed object W of the conveyance arm 40, you may provide three or more support parts. Further, as shown in FIG. 13, the transfer arm 40 is provided with a first support portion 42 at the tip of the transfer arm 40 and a second support portion 43 adjacent to the rear of the first support portion 42. The space 49 may be provided further behind the second support 43. In this case, the second opening 48 of the second support portion 43 is provided at the rear portion of the second support portion. Even when the transport arm 40 having such a shape is used, the workpieces W1 and W2 can be simultaneously loaded and unloaded when the transport port door 26 is opened. In the case of the shape of the protrusion 44 and the support blade 32 shown in FIG. 13, the case where the workpiece W is delivered by the first support portion 42 and the case where the workpiece W is delivered by the second support portion 43. The orientation of the mounting table 30 is different. That is, in the case of FIG. 13, it is necessary to provide a rotation mechanism that rotates the mounting table 30. However, as a matter of course, depending on the shape of the transfer arm 40 and the shape of the mounting table 30, there is a case where the rotation mechanism is not necessarily provided.

また、搬送アーム40の第1の支持部42及び第2の支持部43の形状は、例えば、図14に示すように、第1の開口47及び第2の開口48が搬送アーム本体45の側部に設けられた構成であっても良い。この場合、第1の支持部42と第2の支持部43との間に設けられる空間部49は設けなくても良い。   Moreover, the shape of the 1st support part 42 and the 2nd support part 43 of the conveyance arm 40 is the side of the conveyance arm main body 45, for example, as shown in FIG. The structure provided in the part may be sufficient. In this case, the space 49 provided between the first support part 42 and the second support part 43 may not be provided.

このような形態における被処理体Wの搬送手順としては、例えば、まず、受渡部20に前進させた搬送アーム40を側方(図1に示す搬送路7の長手方向)に移動させて載置台30の下方に第1の支持部42を位置させる。次に、載置台30を下降させて被処理体W1を第1の支持部42に受け渡す。その後、搬送アーム40を前進させて、載置台30の上方に被処理体W2が支持された第2の支持部43を位置させる。そして、載置台30を上昇させて、被処理体W2を受け渡す。最後に、搬送アーム40を側方(搬送路長手方向)に移動させた後、搬送アーム40を後退させる。   As a procedure for transporting the workpiece W in such a form, for example, first, the transport arm 40 advanced to the delivery unit 20 is moved to the side (longitudinal direction of the transport path 7 shown in FIG. 1) to place the mounting table. The first support portion 42 is positioned below 30. Next, the mounting table 30 is lowered and the workpiece W1 is transferred to the first support portion 42. Thereafter, the transfer arm 40 is moved forward to position the second support portion 43 on which the workpiece W2 is supported above the mounting table 30. And the mounting base 30 is raised and the to-be-processed object W2 is delivered. Finally, after the transfer arm 40 is moved sideways (in the longitudinal direction of the transfer path), the transfer arm 40 is retracted.

このようにして被処理体W1,W2の搬入出を行えば、搬送口扉26の開扉時に被処理体W1,W2の搬入出を同時に行うことができ、搬入出時間を短縮することができる。ただし、図14に示す構成では、搬送アーム40の前進後退移動に加えて、側方移動(横移動)も行うことになるため、被処理体Wを受け渡す際の位置ずれが、上記実施形態で説明したアーム形状(図3)の場合に比べて大きくなる恐れがある。また、前進後退移動に加えて、側方移動(横移動)も行うことになるため、図3に示す搬送アーム40を用いる場合に比べて、処理時間が長くなってしまう。したがって、搬送アーム40の前進後退移動のみで被処理体W1,W2を同時に搬入出することができる上記実施形態で説明したアーム形状とすることがより好ましい。   If the workpieces W1 and W2 are loaded and unloaded in this manner, the workpieces W1 and W2 can be loaded and unloaded at the same time when the transfer port door 26 is opened, and the loading and unloading time can be shortened. . However, in the configuration shown in FIG. 14, in addition to the forward and backward movement of the transfer arm 40, side movement (lateral movement) is also performed. There is a fear that the arm shape (FIG. 3) described in the above item becomes larger. Further, in addition to forward and backward movement, side movement (lateral movement) is also performed, so that the processing time becomes longer than when the transfer arm 40 shown in FIG. 3 is used. Therefore, it is more preferable to use the arm shape described in the above-described embodiment that allows the workpieces W1 and W2 to be simultaneously loaded and unloaded by only the forward and backward movement of the transfer arm 40.

また、図15に示すように、第1の開口47を搬送アーム本体45の前部に設けたようなアーム形状であれば、図14に示す搬送アーム40で被処理体Wの受け渡しを行う際に必要であった第1の支持部42の側方移動(横移動)を省略することができる。これにより、図14に示す搬送アーム40を用いる場合に比べて処理時間を短縮することができる。ただし、この場合であっても、第2の支持部43で被処理体Wの受け渡しを行う際には、側方移動(横移動)が必要となるため、図3に示す搬送アーム40を用いる場合に比べて処理時間が長くなってしまう。   Further, as shown in FIG. 15, if the arm shape is such that the first opening 47 is provided in the front portion of the transfer arm body 45, the workpiece W is transferred by the transfer arm 40 shown in FIG. The side movement (lateral movement) of the first support portion 42 which is necessary for the above can be omitted. Thereby, processing time can be shortened compared with the case where the conveyance arm 40 shown in FIG. 14 is used. However, even in this case, when the workpiece W is transferred by the second support portion 43, side movement (lateral movement) is required, and therefore the transfer arm 40 shown in FIG. 3 is used. Compared to the case, the processing time becomes longer.

なお、当然のことながら、第1の開口47及び第2の開口48の位置は、図14,図15に示す例に限定されず、開口がその他の位置に設けられても良い。また、開口の数も特に限定されない。ただし、第1の支持部42と第2の支持部43との間に空間部49が設けられていない場合には、第1の支持部42の後部にのみ第1の開口47が設けられている場合や第2の支持部43の前部にのみ第2の開口48が設けられている場合は、上記実施形態で説明したような搬送動作を行うことができないため、そのような場合については本発明の権利範囲から除外することとする。   As a matter of course, the positions of the first opening 47 and the second opening 48 are not limited to the examples shown in FIGS. 14 and 15, and the openings may be provided at other positions. Further, the number of openings is not particularly limited. However, when the space 49 is not provided between the first support part 42 and the second support part 43, the first opening 47 is provided only at the rear part of the first support part 42. If the second opening 48 is provided only at the front portion of the second support portion 43, the transport operation as described in the above embodiment cannot be performed. Excluded from the scope of rights of the present invention.

本発明は、被処理体の浸炭焼入れ処理に適用することができる。   The present invention can be applied to a carburizing and quenching process of an object to be processed.

1 浸炭焼入れ設備
2 昇温室
3 浸炭室
3a 第1浸炭室
3b 第2浸炭室
3c 第3浸炭室
4 焼入れ室
5 搬送装置
6 搬送部
7 搬送路
20 受渡部
21 熱処理部
22 誘導加熱コイル
23 昇降装置
24 昇降ロッド(昇降部材)
25 搬送口
26 搬送口扉
27 仕切扉
27a 扉本体
27b 扉本体
30 載置台
31 円板
32 支持羽根
33 載置台支持ピン
40 搬送アーム
41 搬送アーム先端部
42 第1の支持部
43 第2の支持部
44 突出部
45 搬送アーム本体
46 側部突出部
47 第1の開口
48 第2の開口
49 空間部
50 搬送用支持ピン
70 補助ピン
70a テーパー部
W(W1,W2) 被処理体
t 上面部
s 側面部
DESCRIPTION OF SYMBOLS 1 Carburizing and quenching equipment 2 Temperature raising chamber 3 Carburizing chamber 3a First carburizing chamber 3b Second carburizing chamber 3c Third carburizing chamber 4 Quenching chamber 5 Transfer device 6 Transfer portion 7 Transfer path 20 Delivery portion 21 Heat treatment portion 22 Induction heating coil 23 Lifting device 24 Lifting rod (lifting member)
25 Conveying port 26 Conveying port door 27 Partition door 27a Door main body 27b Door main body 30 Mounting base 31 Disc 32 Supporting blade 33 Mounting base support pin 40 Transport arm 41 Transport arm tip end portion 42 First support portion 43 Second support portion 44 Protruding portion 45 Conveying arm main body 46 Side protruding portion 47 First opening 48 Second opening 49 Space portion 50 Supporting pin 70 for conveyance Auxiliary pin 70a Tapered portion W (W1, W2) Workpiece W t Upper surface portion W s Side

Claims (10)

被処理体に浸炭焼入れ処理に係る少なくとも1つの処理を施す処理室と、被処理体を搬送する搬送装置と、前記処理室内に設けられ、前記処理室内に搬送された被処理体が載置される載置台とを備え、前記搬送装置に被処理体を前記処理室内及び前記処理室外に搬送する搬送アームが設けられた、被処理体の浸炭焼入れ処理を行う浸炭焼入れ設備であって、
前記搬送アームには、既に処理が施された被処理体を支持する第1の支持部と、次に処理が施される被処理体を支持する第2の支持部とが設けられ
前記搬送アームに、前記載置台の平面視における外形よりも大きな空間部が設けられている、浸炭焼入れ設備。
A processing chamber that performs at least one process related to carburizing and quenching on the object to be processed, a transfer device that transfers the object to be processed, and the object to be processed that is provided in the processing chamber and transferred to the processing chamber are placed. A carburizing and quenching facility for carburizing and quenching the object to be processed, wherein the transfer device is provided with a transfer arm for transferring the object to be processed to the outside of the processing chamber and the processing chamber.
The transfer arm is provided with a first support part that supports a target object that has already been processed, and a second support part that supports a target object that is to be processed next ,
Carburizing and quenching equipment, wherein the transfer arm is provided with a larger space than the outer shape of the mounting table in plan view .
前記第1の支持部と前記第2の支持部とが前記搬送アームの伸縮方向に沿って設けられている、請求項1に記載の浸炭焼入れ設備。   The carburizing and quenching equipment according to claim 1, wherein the first support part and the second support part are provided along an extension / contraction direction of the transfer arm. 前記空間部が前記第1の支持部と前記第2の支持部との間に設けられている、請求項1または2に記載の浸炭焼入れ設備。 The carburizing and quenching equipment according to claim 1 or 2 , wherein the space portion is provided between the first support portion and the second support portion. 前記第1の支持部の前部に、前記搬送アームの移動時において当該第1の支持部と前記載置台が接触しないように設けられた第1の開口が形成され、
前記第2の支持部の前部に、前記搬送アームの移動時において当該第2の支持部と前記載置台が接触しないように設けられた第2の開口が形成されている、請求項1〜3のいずれか一項に記載の浸炭焼入れ設備。
A first opening provided so that the first support portion and the mounting table do not come into contact with each other when the transport arm is moved is formed in the front portion of the first support portion,
The 1st opening provided so that the said 2nd support part and the above-mentioned mounting table may not contact at the time of the movement of the said conveyance arm is formed in the front part of the said 2nd support part . The carburizing and quenching equipment according to any one of 3 above.
前記第1の支持部と前記第2の支持部の高さが同一である、請求項1〜のいずれか一項に記載の浸炭焼入れ設備。 The carburizing and quenching equipment according to any one of claims 1 to 4 , wherein the first support portion and the second support portion have the same height. 前記載置台を昇降させる昇降装置を備える、請求項1〜のいずれか一項に記載の浸炭焼入れ設備。 The carburizing and quenching equipment according to any one of claims 1 to 5 , further comprising a lifting device that lifts and lowers the mounting table. 前記第1の支持部及び前記第2の支持部の少なくともいずれかには、被処理体を支持する少なくとも3つの搬送用支持ピンが設けられている、請求項1〜のいずれか一項に記載の浸炭焼入れ設備。 Wherein the first at least one of the support portion and the second supporting portion, at least three carrying support pin for supporting the object to be processed is provided, in any one of claims 1 to 6 Carburizing and quenching equipment as described. 被処理体は、上面部と側面部から成る形状であって、前記搬送アームで前記被処理体を支持した際に前記被処理体の側面部の内壁に接して又は近接して前記被処理体の位置規制を行うように前記搬送用支持ピンが設けられている、請求項に記載の浸炭焼入れ設備。 The object to be processed has a shape including an upper surface part and a side part, and the object to be processed is in contact with or close to an inner wall of the side part of the object to be processed when the object to be processed is supported by the transfer arm. The carburizing and quenching equipment according to claim 7 , wherein the transfer support pins are provided so as to perform position control. 前記載置台には、被処理体を支持する少なくとも3つの載置台支持ピンが設けられている、請求項1〜のいずれか一項に記載の浸炭焼入れ設備。 The carburizing and quenching equipment according to any one of claims 1 to 8 , wherein the mounting table is provided with at least three mounting table support pins for supporting an object to be processed. 被処理体は、上面部と側面部から成る形状であって、前記載置台で前記被処理体を支持した際に前記被処理体の側面部の内壁に接して又は近接して前記被処理体の位置規制を行うように前記載置台支持ピンが設けられている、請求項に記載の浸炭焼入れ設備。 The object to be processed has a shape including an upper surface part and a side part, and the object to be processed is in contact with or close to the inner wall of the side part of the object to be processed when the object to be processed is supported by the mounting table. The carburizing and quenching equipment according to claim 9 , wherein the mounting table support pin is provided so as to perform position control.
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