JP5946539B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container, and more particularly to a substrate storage container that stores a plurality of substrates such as semiconductor wafers in parallel.

  As a substrate storage container for storing a substrate such as a semiconductor wafer, a structure having a container main body and a lid is conventionally known.

The container body has a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates.
The container body includes a back side substrate support part on the back side of the substrate storage space.

The lid is detachable with respect to the container main body opening, and closes the container main body opening when being attached to the container main body opening.
The lid includes a front retainer on the inner side facing the substrate storage space of the container main body when the lid is attached to the container main body opening. The front retainer includes a substrate receiving portion and a leg portion that holds the substrate receiving portion at a position spaced apart from the inner surface of the lid by a predetermined distance. The leg can be elastically deformed.

  The front retainer supports a plurality of substrates in cooperation with the back side substrate support portion of the container body when the lid is attached to the container body opening. In the front retainer, the leg portion that holds the substrate receiving portion can be elastically deformed. Therefore, when the substrate receiving portion of the front retainer and the back substrate support portion of the container main body cooperate to support a plurality of substrates, the front retainer substrate is utilized by utilizing the elastic deformation function of the legs of the front retainer. A receiving part supports a board | substrate with the pressing force which presses a some board | substrate toward the back | inner side board | substrate support part of a container main body (refer patent document 1, 2).

JP 2012-004380 A Japanese Patent No. 0408172

A substrate storage container for storing a substrate such as a semiconductor wafer includes a substrate storage container for shipping (hereinafter also referred to as a shipping container (FOSB)) and a substrate storage container for in-process (hereinafter referred to as process details) depending on the application. (Also called FOUP).
The required specifications differ between the shipping container and the in-process container. The substrate retainer force of the front retainer required in the shipping container is larger than the substrate retainer force of the front retainer required in the in-process container. In contrast, the substrate retainer force of the front retainer required in the in-process container is smaller than the substrate retainer force of the front retainer required in the shipping container.

  Recently, there is an increasing need to use shipping containers as in-process containers. However, as described above, the substrate retainer force of the front retainer differs between the shipping container and the in-process container. For this reason, when trying to use the shipping container as an in-process container, the substrate retainer force of the front retainer is too strong, and the lid opening / closing device (opener or the like) in the process may not be able to open and close the lid well.

Therefore, when a shipping container is used as an in-process container, the lid of the in-process container is used in place of the lid for the shipping container in the process.
Thus, in order to use the shipping container as the in-process container, it is necessary to replace the lid including the retainer, which is very inconvenient.

  An object of this invention is to provide the board | substrate storage container which can utilize a shipping container as an in-process container, without replacing | exchanging a cover body.

  The present invention includes a container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and an opening peripheral edge portion formed at one end portion and communicating with the substrate storage space. A lid that is detachable from the container and capable of closing the container main body opening, and the substrate housing space when the container main body opening is closed by the lid, which is a part of the lid. A lid-side substrate support portion that is disposed on the inner side of the lid corresponding to the side facing the lid and is capable of supporting edges of the plurality of substrates when the container body opening is closed by the lid. The substrate housing space is disposed so as to be paired with the lid-side substrate support portion, can support the edges of the plurality of substrates, and the container body opening is closed by the lid body. Sometimes the lid side substrate A back side substrate support part that supports the plurality of substrates in cooperation with a holding part, and a restriction part disposed on the inside of the lid, wherein the lid side substrate support part is A lid-side substrate receiving portion disposed at a position spaced from the inner surface, and the lid-side substrate receiving portion at the position spaced from the inner surface of the lid. A lid side leg that supports the lid side leg when the lid side substrate receiving portion receives an external force in a direction in which the lid side substrate receiving portion approaches the inner surface of the lid. And having the elastic deformation part capable of displacing the lid side substrate receiving part by elastically deforming, and the restricting part is provided between the inner surface of the lid and the lid side substrate support part. An inoperative position arranged in the interval region and spaced from the elastically deforming portion of the lid-side leg portion; It is switchable between an actuated position in contact with the elastic deformation portion of the cover side legs, to restrict the elastic deformation of the elastic deformation portion at the operating position, about the substrate storage container.

  The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval, and the restricting portion is a parallel direction in which the plurality of substrates are parallel. It is preferable that the non-operation position and the operation position can be switched by moving along a direction crossing the parallel direction.

  The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval, and the restricting portion is a parallel direction in which the plurality of substrates are parallel. It is preferable that the non-operation position and the operation position can be switched by rotating around a shaft 83 extending in the parallel direction.

  Further, the lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval, and the lid-side leg portion of the lid-side substrate support portion is: The plurality of substrates have a plurality of legs and a plurality of gaps alternately by being divided into a plurality at predetermined intervals along a parallel direction in which the plurality of substrates are arranged in parallel. The restricting portion extends along a parallel direction in which the plurality of substrates are arranged in parallel, and moves along the parallel direction so that the inoperative position and the operating position are Is preferably switchable.

  The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval, and the lid-side substrate support portion of the lid-side substrate support portion is The plurality of substrates are divided into two at a central portion in a direction orthogonal to the parallel direction in which the plurality of substrates are arranged in parallel, and both divided portions are connected by a connecting portion having an elastic deformation portion, Are extended along a parallel direction in which the substrates are arranged in parallel, and moved along a direction intersecting the parallel direction, whereby the non-operating position and the operating position with respect to the elastically deforming portion of the connecting portion. And can be switched.

  The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval, and the restricting portion is a parallel direction in which the plurality of substrates are parallel. It is preferable that the operation position can be switched in at least two stages along a direction intersecting the parallel direction.

  Moreover, it is preferable that the said control part has an operation part which switches between the said non-operation position and the said operation position, and the said operation part can be operated in the said inner side of the said cover body.

  Moreover, the said control part has an operation part which switches the said non-operation position and the said operation position, and the said operation part can be operated in the outer side which has the relationship between the front and back of the said cover body. It is preferable.

  ADVANTAGE OF THE INVENTION According to this invention, the board | substrate storage container which can utilize a shipping container as an in-process container without replacing | exchanging a cover body can be provided.

It is a perspective view which shows the state which removed the cover body 3 from the container main body 2 in the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 1st Embodiment of this invention from the inner side. It is the perspective view which removed the retainer of the cover body 3 of the substrate storage container 1 which concerns on 1st Embodiment of this invention, and was seen from the inner side. It is a schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in a non-operation position in the substrate storage container 1 which concerns on 1st Embodiment of this invention. It is a schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in an operation position in the board | substrate storage container 1 which concerns on 1st Embodiment of this invention. It is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 2nd Embodiment of this invention from the inner side. It is the perspective view which removed the retainer from the cover body 3 of the substrate storage container 1 which concerns on 2nd Embodiment of this invention, and was seen from the inner side. It is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 2nd Embodiment of this invention from the outer side. It is a general | schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in a non-operation position in the substrate storage container 1 which concerns on 2nd Embodiment of this invention. It is a general | schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in an operation position in the board | substrate storage container 1 which concerns on 2nd Embodiment of this invention. It is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 3rd Embodiment of this invention from the inner side. It is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 3rd Embodiment of this invention from the inner side, removing a retainer. It is a schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in a non-operation position in the board | substrate storage container 1 which concerns on 3rd Embodiment of this invention. It is a general | schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in an operation position in the board | substrate storage container 1 which concerns on 3rd Embodiment of this invention. It is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 4th Embodiment of this invention from the inner side. It is the perspective view which removed the retainer from the cover body 3 of the substrate storage container 1 which concerns on 4th Embodiment of this invention, and was seen from the inner side. It is a general | schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in a non-operation position in the substrate storage container 1 which concerns on 4th Embodiment of this invention. It is a general | schematic expanded sectional view along the plane of the board | substrate which shows the state which has the control part 8 in an operation position in the board | substrate storage container 1 which concerns on 4th Embodiment of this invention. It is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 5th Embodiment of this invention from the inner side. It is the perspective view which removed the retainer and looked at the cover body 3 of the board | substrate storage container 1 which concerns on 5th Embodiment of this invention from the inner side. It is a schematic sectional drawing along the extension direction of regulation part 8 showing the state where regulation part 8 is in a non-operating position in substrate storage container 1 concerning a 5th embodiment of the present invention. FIG. 10 is a schematic cross-sectional view along the extending direction of the restricting portion 8 showing a state where the restricting portion 8 is in the operating position in the substrate storage container 1 according to the fifth embodiment of the present invention. It is a schematic sectional drawing along the plane of a substrate in the substrate storage container 1 concerning a 6th embodiment of the present invention showing the state where control part 8 is in a non-operating position. It is a schematic sectional drawing along the plane of a substrate in the substrate storage container 1 concerning a 6th embodiment of the present invention showing the state where control part 8 is in an operation position. It is a schematic sectional drawing which shows a mode that the retainer with a small spring constant is removed from the cover body 3 in the cover body 3 of the substrate storage container 1 which concerns on 7th Embodiment of this invention. It is a schematic sectional drawing which shows a mode that the retainer with a big spring constant is attached to the cover body 3 in the cover body 3 of the substrate storage container 1 which concerns on 7th Embodiment of this invention.

Hereinafter, a substrate storage container according to a first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is a perspective view showing a state in which a lid 3 is removed from a container body 2 in a substrate storage container 1 according to the first embodiment of the present invention. FIG. 2 is a perspective view of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention as viewed from the inside. FIG. 3 is a perspective view of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention as viewed from the inside with the retainer removed. FIG. 4 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the restricting portion 8 is in the inoperative position in the substrate storage container 1 according to the first embodiment of the present invention. FIG. 5 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the regulating portion 8 is in the operating position in the substrate storage container 1 according to the first embodiment of the present invention.

  Here, for convenience of explanation, a direction from the container body 2 described later to the lid 3 (direction from the upper right to the lower left in FIG. 1) is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are defined as the front-rear direction D1. Further, a direction (upward direction in FIG. 1) from the lower wall 24 to the upper wall 23, which will be described later, is defined as an upward direction D21, the opposite direction is defined as a downward direction D22, and these are defined as a vertical direction D2. . Further, a direction from the second side wall 26 to be described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, and the opposite direction is defined as the right direction D32. Is defined as the left-right direction D3. In each drawing, description will be given with arrows indicating these directions.

  The substrate W (see FIG. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, or the like, and is a thin one used in the industry. The substrate W in the present embodiment is a silicon wafer having a diameter of 300 mm.

  As shown in FIG. 1, the substrate storage container 1 includes a container body 2, a lid 3, a front retainer 7 (see FIG. 2) as a lid-side substrate support, and a back-side substrate support (not shown). And a regulating portion 8 (see FIG. 3).

  As shown in FIG. 1, the container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. A substrate support plate-shaped portion 201 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

  The wall portion 20 is provided with a substrate support plate portion 201 so as to form a pair in the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the substrate support plate-like portion 201 is arranged in such a manner that adjacent substrates W are separated from each other at a predetermined interval and are arranged in parallel. The part can be supported. A back side substrate support part (not shown) is provided on the back side of the substrate support plate-like part 201. The back substrate support (not shown) can support the rear portions of the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3.

  The lid 3 is detachable from the opening peripheral edge 28 that forms the container main body opening 21. The lid 3 can close the container main body opening 21 in a positional relationship surrounded by the opening peripheral edge 28, that is, in a state of being fitted into the container main body opening 21 formed by the opening peripheral edge 28. The front retainer 7 (see FIG. 2) is a part of the lid 3 and faces the substrate storage space 27 when the container body opening 21 is closed by the lid 3, that is, the inside of the lid 3. Is provided. The front retainer 7 (see FIG. 2) is disposed inside the substrate storage space 27 so as to be paired with a back substrate support portion (not shown).

The front retainer 7 (see FIG. 2) can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3. The front retainer 7 (see FIG. 2) supports a plurality of substrates W in cooperation with a back substrate support portion (not shown) when the container body opening 21 is closed by the lid 3. Thus, the plurality of substrates W are held in a state in which the adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel.
The restricting portion 8 (see FIG. 3) is a portion of the lid 3 and faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3, that is, the inside of the lid 3. Is provided. Hereinafter, the first configuration will be described in detail.

  As shown in FIG. 1, the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.

  The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.

  The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. A maximum of 21 substrates W can be stored in the substrate storage space 27.

  As shown in FIG. 1, a container body leg 243 is provided on the outer surface of the lower wall 24. The container main body legs 243 are integrally formed with the left and right end edges of the lower wall 24, and extend in the front-rear direction D <b> 1 along the left and right end edges of the lower wall 24. When the container main body 2 is placed on a horizontal flat surface with the lower wall 24 on the lower side (downward D22 side), the container main body leg 243 is brought into contact with the flat surface to stabilize the container main body 2. And support.

Hereinafter, the lid 3, the front retainer 7, and the restricting portion 8 will be described in detail with reference to FIGS.
As shown in FIGS. 2, 4, and 5, a front retainer 7 is fixed inside the lid 3. The front retainer 7 serving as a lid-side substrate support portion includes a vertical frame 71, a retainer leg portion 72 serving as a lid-side leg portion, and a retainer substrate receiving portion 73 serving as a lid-side substrate receiving portion. The vertical frame 71, the retainer leg 72, and the retainer substrate receiving portion 73 are integrally formed of resin and connected to each other.

The front retainer 7 has a shape as shown in FIG. 4 when viewed in the vertical direction D2. That is, the vertical frame 71 extends in parallel along the vertical direction D2 at the end on the left direction D31 side and the end on the right direction D32 side.
The vertical frame 71 on the left direction D31 side and the vertical frame 71 on the right direction D32 side of the front retainer 7 each have a frame body fixing portion 715.
The retainer leg 72 on the left direction D31 side extends slightly in the rear direction D12 from the vertical frame 71 on the left direction D31 side along the right direction D32. Subsequently, the retainer leg 72 on the left direction D31 side is curved in the middle and extends substantially along the rear direction D12. Subsequently, the retainer leg 72 on the left direction D31 side bends in the right direction D32 at the end on the rear direction D12 side. The retainer leg portion 72 on the left direction D31 side is connected to the end portion on the left direction D31 side of the retainer substrate receiving portion 73 at the tip portion.

  The retainer leg portion 72 on the left direction D31 side constitutes an elastic deformation portion 721, particularly in the middle curved portion. When the retainer substrate receiving portion 73 receives an external force in a direction in which the retainer substrate receiving portion 73 approaches the inner surface of the lid 3 (front direction D11), the elastic deformable portion 721 is elastically deformed according to the external force to thereby retain the retainer substrate. The receiving part 73 can be displaced.

  On the other hand, the retainer leg 72 on the right direction D32 side extends slightly in the rear direction D12 along the left direction D31 from the vertical frame 71 on the right direction D32 side. Subsequently, the retainer leg portion 72 on the right direction D32 side is curved in the middle and extends substantially along the rear direction D12. Subsequently, the retainer leg portion 72 on the right direction D32 side bends in the left direction D31 at the end portion on the rear direction D12 side. The retainer leg portion 72 on the right direction D32 side is connected to the end portion on the right direction D32 side of the retainer substrate receiving portion 73 at the tip portion.

The retainer leg portion 72 on the right direction D32 side constitutes an elastic deformation portion 721, particularly in the middle curved portion, similarly to the middle middle curved portion in the left direction D31 side retainer leg portion 72. When the retainer substrate receiving portion 73 receives an external force in a direction in which the retainer substrate receiving portion 73 approaches the inner surface of the lid 3 (front direction D11), the elastic deformable portion 721 is elastically deformed according to the external force to thereby retain the retainer substrate. The receiving part 73 can be displaced.
Therefore, the retainer substrate receiving portion 73 is disposed at a position spaced a predetermined distance from the inner surface of the lid 3 in the rear direction D12.

The retainer board receiving portion 73 is connected to the distal end portion of the retainer leg portion 72 on the right direction D32 side from the end portion on the left direction D31 side connected to the distal end portion of the retainer leg portion 72 on the left direction D31 side. You may comprise continuously to the edge part by the side of D32.
However, in the present embodiment, the retainer substrate receiving portion 73 is divided into two at the center portion between the end portion on the left direction D31 side and the end portion on the right direction D32 side. That is, the retainer substrate receiving portion 73 includes a retainer substrate receiving portion 73 on the left direction D31 side from the end on the left direction D31 side to the vicinity of the center, and a right side D32 side from the end portion on the right direction D32 side to the vicinity of the center. It is divided into a retainer substrate receiving portion 73.

An end portion on the right direction D32 side of the retainer substrate receiving portion 73 on the left direction D31 side and an end portion on the left direction D31 side of the retainer substrate receiving portion 73 on the right direction D32 side are connected to each other by a connecting portion 74. .
The connecting portion 74 is immediately bent in the front direction D11 from the end portion on the left direction D31 side connected to the end portion on the right direction D32 side of the retainer substrate receiving portion 73 on the left direction D31 side so as to be almost in the front direction D11. Extend along. Subsequently, the connecting portion 74 is bent at a position still spaced in the rear direction D12 from the inner surface of the lid 3 and extends substantially along the right direction D32. Subsequently, the connecting portion 74 is bent again and now extends substantially along the rear direction D12. The connecting portion 74 is bent substantially in the right direction D32 at the distal end thereof, and is connected to the end portion on the left direction D31 side of the retainer substrate receiving portion 73 on the right direction D32 side.
The connection part 74 constitutes an elastic deformation part 741. That is, when the retainer substrate receiving portion 73 receives an external force in a direction (front direction D11) in which the retainer substrate receiving portion 73 approaches the inner surface of the lid 3, the retainer substrate is elastically deformed according to the external force. The receiving part 73 can be displaced.

As shown in FIG. 3, a retainer fixing recess 341 that is recessed in the front direction D <b> 11 is formed inside the lid 3 when the lid 3 closes the container body opening 21. The retainer fixing recess 341 is disposed at the center position in the left-right direction D3 of the lid 3 and has a width of about one third of the width in the left-right direction D3 of the lid 3. The retainer fixing recess 341 is arranged from the vicinity of the upper end portion of the lid body 3 to the vicinity of the lower end portion thereof in the vertical direction D2.
Therefore, the surface of the retainer fixing recess 341 is an inner surface of the lid 3 when the lid 3 closes the container main body opening 21.

On the surface of the retainer fixing recess 341, the retainer locking portion 344 on the left direction D31 side that extends along the vertical direction D2 and is divided into a plurality (for example, three), and the vertical direction D2 extend. In addition, a retainer locking portion 344 on the right direction D32 side that is divided into a plurality (for example, three) is provided.
The retainer locking portion 344 on the left direction D31 side and the retainer locking portion 344 on the right direction D32 side pass through the center of the lid 3 in the left-right direction D3 and sandwich the center line imaginary along the up-down direction D2. Are located at equal distances from the virtual center line.

As shown in FIG. 4, the retainer locking portion 344 on the left direction D31 side has an L-angle cross-sectional shape that slightly extends in the rear direction D12 from the surface of the retainer fixing recess 341 and extends in the right direction D32 from the tip. . Therefore, the retainer locking portion 344 on the left direction D31 side has a long groove 345 opened in the right direction D32 on the surface of the retainer fixing recess 341.
The long groove 345 of the retainer locking portion 344 on the left direction D31 side can accommodate the vertical frame body 71 on the left direction D31 side of the front retainer 7.

The retainer locking portion 344 on the right direction D32 side has an L-angle cross-sectional shape that slightly extends in the rear direction D12 from the surface of the retainer fixing recess 341 and extends in the left direction D31 from the tip. Therefore, the retainer locking portion 344 on the right direction D32 side has a long groove 345 opened in the left direction D31 on the surface of the retainer fixing recess 341.
The long groove 345 of the retainer locking portion 344 on the right direction D32 side can accommodate the vertical frame body 71 on the right direction D32 side of the front retainer 7.

As shown in FIG. 3, on the surface of the retainer fixing recess 341, the retainer locking portion 344 is overlapped with the retainer locking portion 344 on the same line as the retainer locking portion 344 on the left direction D31 side divided into a plurality (for example, three). A plurality of (for example, four) retainer fixing portions 346 on the left direction D31 side are provided at positions that do not become necessary.
The frame fixing portion 715 of the vertical frame 71 on the left direction D31 side of the front retainer 7 is fixed to the retainer fixing portion 346 on the left direction D31 side.

On the surface of the retainer fixing recess 341, a plurality (for example, three) of the retainer locking portions 344 on the right direction D32 side divided into a plurality (for example, three) are located on the same line and at positions that do not overlap with the retainer locking portions 344. For example, four retainer fixing portions 346 on the right direction D32 side are formed.
The frame fixing portion 715 of the vertical frame 71 on the right direction D32 side of the front retainer 7 is fixed to the retainer fixing portion 346 on the right direction D32 side.

As shown in FIG. 3, a restricting portion arrangement portion 351 on the left direction D31 side is formed on the surface of the retainer fixing recess 341 on the right side D32 side with respect to the retainer locking portion 344 on the left direction D31 side. . The restricting portion arrangement portion 351 on the left direction D31 side is further slightly recessed in the front direction D11 from the surface of the retainer fixing recess 341. The restricting portion arrangement portion 351 on the left direction D31 side extends along the vertical direction D2 from the vicinity of the end portion on the upper direction D21 side of the retainer fixing recess portion 341 to the vicinity of the end portion on the lower direction D22 side of the retainer fixing recess portion 341, In addition, it has a predetermined width along the left-right direction D3.
The restriction portion 8 on the left direction D31 side is disposed on the restriction portion arrangement portion 351 on the left direction D31 side.

On the surface of the retainer fixing recess 341, a restricting portion arrangement portion 351 on the right direction D32 side is formed on the left side D31 side of the retainer locking portion 344 on the right direction D32 side. The restricting portion arrangement portion 351 on the right direction D32 side is further slightly recessed from the surface of the retainer fixing recess 341 in the front direction D11. The restricting portion arrangement portion 351 on the right direction D32 side extends along the vertical direction D2 from the vicinity of the end portion on the upper direction D21 side of the retainer fixing recess portion 341 to the vicinity of the end portion on the lower direction D22 side of the retainer fixing recess portion 341, In addition, it has a predetermined width along the left-right direction D3.
The restriction portion 8 on the right direction D32 side is disposed on the restriction portion arrangement portion 351 on the right direction D32 side.

As shown in FIG. 3, the restricting portion 8 includes a restricting portion 8 on the left direction D31 side and a restricting portion 8 on the right direction D32 side.
The restriction portion 8 on the left direction D31 side is disposed in the restriction portion arrangement portion 351 on the left direction D31 side. The restriction portion 8 on the left direction D31 side has a length corresponding to the length in the vertical direction D2 of the restriction portion arrangement portion 351 on the left direction D31 side. The restricting portion 8 on the left direction D31 side has a handle 81 protruding in the left direction D31 at the end portion in the upper direction D21 and the end portion in the lower direction D22.
The restriction part 8 on the right direction D32 side is arranged in the restriction part arrangement part 351 on the right direction D32 side. The restriction portion 8 on the right direction D32 side has a length corresponding to the length in the vertical direction D2 of the restriction portion arrangement portion 351 on the right direction D32 side. The restricting portion 8 on the right direction D32 side has a handle 81 protruding in the right direction D32 at the end portion in the upper direction D21 and the end portion in the lower direction D22.

  As shown in FIG. 4, the restricting portion 8 on the left direction D31 side is disposed in an interval region between the restricting portion disposing portion 351 on the left direction D31 side and the front retainer 7. The restricting portion 8 on the left direction D31 side includes an inoperative position (see FIG. 4) that is separated from the elastic deformation portion 721 of the retainer leg 72 by an attachment member (not shown), and an elastic deformation portion of the retainer leg 72. The operation position (see FIG. 5) in contact with 721 is attached to be switchable. The restriction portion 8 on the left direction D31 side restricts the elastic deformation of the elastic deformation portion 721 at the operating position.

  As shown in FIG. 4, the restricting portion 8 on the right direction D32 side is disposed in a space region between the restricting portion disposing portion 351 on the right direction D32 side and the front retainer 7. The restricting portion 8 on the right direction D32 side includes an inoperative position (see FIG. 4) separated from the elastic deformation portion 721 of the retainer leg 72 by an attachment member (not shown), and an elastic deformation portion of the retainer leg 72. The operation position (see FIG. 5) in contact with 721 is attached to be switchable. The restriction portion 8 on the right direction D32 side restricts elastic deformation of the elastic deformation portion 721 at the operating position.

The substrate storage container 1 configured as described above operates as follows and can provide the following effects.
When the restricting portion 8 is in the inoperative position shown in FIG. 4, it has no effect on the front retainer 7. For this reason, the front retainer 7 operates in exactly the same way as when the restricting portion 8 does not exist. That is, the front retainer 7 elastically holds the substrate W in accordance with an elastic coefficient within a predetermined range that the elastic deformation portion 721 of the retainer leg portion 72 originally has.
Specifically, when the retainer substrate receiving portion 73 of the front retainer 7 is in a free position where the substrate W is not held, the retainer substrate receiving portion 73 is positioned slightly in the rear direction D12 (upward in FIG. 4) from the position shown in FIG. Yes. The retainer substrate receiving portion 73 of the front retainer 7 receives the pressure from the substrate W when holding the substrate W, and the elastic deformation portion 721 of the retainer leg portion 72 is deformed, whereby the front direction D11 (downward in FIG. 4). Move a little. This moved position is the position shown in FIG. Thereby, the retainer substrate receiving part 73 can elastically hold the substrate W with a relatively weak force.

When the restricting portion 8 is in the operating position shown in FIG. 5, the retainer leg portion 72 of the front retainer 7 contacts the end side of the elastically deforming portion 721 of the retainer leg portion 72. In the operating position, the restricting portion 8 abuts on the end portion side of the elastic deforming portion 721 of the retainer leg portion 72 to restrict the deformation of the elastic deforming portion 721 of the retainer leg portion 72. That is, the restricting portion 8 restricts the elastic deformation portion 721 of the retainer leg portion 72 from increasing the deformation amount.
Therefore, it is practically difficult for the elastic deformation portion 721 of the retainer leg 72 to further increase the deformation from the position shown in FIG.
Thereby, the retainer substrate receiving part 73 can elastically hold the substrate W with a relatively strong force.
As a result, by switching the restricting portion 8 from the operating position shown in FIG. 5 to the inoperative position shown in FIG. 4, the substrate storage container 1 used as a shipping container can be used as an in-process container.
On the contrary, the substrate storage container 1 used as an in-process container can be used as a shipping container by switching the restricting portion 8 from the non-operating position shown in FIG. 4 to the operating position shown in FIG.

Next, a substrate storage container according to a second embodiment of the present invention will be described with reference to FIGS.
FIG. 6 is a perspective view of the lid 3 of the substrate storage container 1 according to the second embodiment of the present invention as viewed from the inside. FIG. 7 is a perspective view of the lid 3 of the substrate storage container 1 according to the second embodiment of the present invention as viewed from the inside with the retainer removed. FIG. 8 is a perspective view of the lid 3 of the substrate storage container 1 according to the second embodiment of the present invention as viewed from the outside. FIG. 9 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the restricting portion 8 is in the inoperative position in the substrate storage container 1 according to the second embodiment of the present invention. FIG. 10 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the regulating portion 8 is in the operating position in the substrate storage container 1 according to the second embodiment of the present invention.

The main difference between the substrate storage container according to the present embodiment and the substrate storage container according to the first embodiment is the direction in which the regulating portion 8 is operated.
That is, in the substrate storage container according to the first embodiment, the restricting portion 8 is configured to be operated inside the lid 3. On the other hand, in the substrate storage container according to the present embodiment, the restricting portion 8 is configured to be operated on the outer side which is in a front-back relationship with the inner side of the lid 3.
Since the configuration other than this is the same as the configuration of the first embodiment, the description thereof is omitted. About the same code | symbol, the same code | symbol is attached | subjected and demonstrated.

In the substrate storage container according to the present embodiment, the restricting portion 8 on the left direction D31 side is opposite to the restricting portion 8 in the protruding piece protruding in the left direction D31 at the end in the upper direction D21 and the end in the lower direction D22. A handle 81 is provided on the side.
The restricting portion 8 on the right direction D32 side has a handle 81 on the opposite side of the restricting portion 8 in the protruding piece protruding in the right direction D32 at the end portion in the upper direction D21 and the end portion in the lower direction D22.
A through hole 352 for operating the handle 81 outside the lid 3 is formed in the lid 3 at a position corresponding to the handle 81 of the restricting portion 8 on the left direction D31 side.
A through hole 352 for operating the handle 81 outside the lid 3 is formed in the lid 3 at a position corresponding to the handle 81 of the restricting portion 8 on the right direction D32 side.
A gasket 82 is attached to a portion where the handle 81 protrudes from the restricting portion 8 in order to ensure a sealing property between the inner side and the outer side of the lid 3.

The substrate storage container 1 configured as described above operates as follows and can provide the following effects.
The restricting portion 8 can be operated outside the lid 3. Therefore, without removing the lid 3 from the container body 2, the restricting portion 8 can be switched from the inoperative position (see FIG. 9) to the operating position (see FIG. 10) or from the operating position to the inoperative position. . The sealing performance between the inner side and the outer side of the lid 3 can be ensured in either the operating position or the non-operating position.
As a result, by switching the regulating portion 8 from the operating position shown in FIG. 10 to the inoperative position shown in FIG. 9, the substrate storage container 1 used as a shipping container can be used as an in-process container.
On the contrary, the substrate storage container 1 used as an in-process container can be used as a shipping container by switching the restricting portion 8 from the inoperative position shown in FIG. 9 to the operating position shown in FIG.

Next, a substrate storage container according to a third embodiment of the present invention will be described with reference to FIGS.
FIG. 11 is a perspective view of the lid 3 of the substrate storage container 1 according to the third embodiment of the present invention as viewed from the inside. FIG. 12 is a perspective view of the lid 3 of the substrate storage container 1 according to the third embodiment of the present invention as viewed from the inside with the retainer removed. FIG. 13 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the restricting portion 8 is in the inoperative position in the substrate storage container 1 according to the third embodiment of the present invention. FIG. 14 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the restricting portion 8 is in the operating position in the substrate storage container 1 according to the third embodiment of the present invention.

The main difference between the substrate storage container according to the present embodiment and the substrate storage container according to the first embodiment is a restriction target of the restriction unit 8.
That is, in the substrate storage container according to the first embodiment, the restricting portion 8 is configured to restrict the elastic deformation portion 721 of the retainer leg portion 72. In contrast, in the substrate storage container according to the present embodiment, the restricting portion 8 is configured to restrict the connecting portion 74 (elastically deforming portion 741) of the retainer substrate receiving portion 73.
Since the configuration other than this is the same as the configuration of the first embodiment, the description thereof is omitted. About the same code | symbol, the same code | symbol is attached | subjected and demonstrated.

  In the substrate storage container according to the present embodiment, there is one restricting portion 8. When the restricting portion 8 is in the operating position, the restricting portion 8 abuts on the connecting portion 74 of the retainer substrate receiving portion 73 to restrict the elastic deformation of the connecting portion 74 having the function of the elastic deforming portion 741.

The substrate storage container 1 configured as described above operates as follows and can provide the following effects.
The restricting portion 8 can restrict the elastic deformation of the connecting portion 74 (elastically deforming portion 741) by contacting the connecting portion 74 of the retainer substrate receiving portion 73.
As a result, the substrate storage container 1 used as a shipping container can be used as an in-process container by switching the restricting portion 8 from the operating position shown in FIG. 14 to the inoperative position shown in FIG.
On the contrary, the substrate storage container 1 used as an in-process container can be used as a shipping container by switching the regulating portion 8 from the inoperative position shown in FIG. 13 to the operating position shown in FIG.

Next, a substrate storage container according to a fourth embodiment of the present invention will be described with reference to FIGS.
FIG. 15: is the perspective view which looked at the cover body 3 of the substrate storage container 1 which concerns on 4th Embodiment of this invention from the inner side. FIG. 16 is a perspective view of the lid 3 of the substrate storage container 1 according to the fourth embodiment of the present invention as viewed from the inside with the retainer removed. FIG. 17 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the restricting portion 8 is in the inoperative position in the substrate storage container 1 according to the fourth embodiment of the present invention. FIG. 18 is a schematic enlarged cross-sectional view along the plane of the substrate showing a state in which the restricting portion 8 is in the operating position in the substrate storage container 1 according to the fourth embodiment of the present invention.

The main difference between the substrate storage container according to the present embodiment and the substrate storage container according to the first embodiment is the switching method of the regulating unit 8.
That is, in the substrate storage container according to the first embodiment, the restricting portion 8 is configured to be switched between the inoperative position and the operating position by moving on the restricting portion disposing portion 351. On the other hand, in the substrate storage container according to the present embodiment, the restricting portion 8 can be switched between the inoperative position and the operating position by rotating around the shaft 83 extending in the extending direction of the restricting portion 8. It is.
Since the configuration other than this is the same as the configuration of the first embodiment, the description thereof is omitted. About the same code | symbol, the same code | symbol is attached | subjected and demonstrated.

  In the substrate storage container according to the present embodiment, the restricting portion 8 can be switched between the inoperative position and the actuated position by rotating around the shaft 83 extending in the extending direction of the restricting portion 8.

The substrate storage container 1 configured as described above operates as follows and can provide the following effects.
The restricting portion 8 can be switched between an inoperative position and an operating position by rotating around a shaft 83 extending in the extending direction of the restricting portion 8.
As a result, the substrate storage container 1 used as a shipping container can be used as an in-process container by switching the regulating portion 8 from the operating position shown in FIG. 18 to the inoperative position shown in FIG.
On the contrary, the substrate storage container 1 used as an in-process container can be used as a shipping container by switching the restricting portion 8 from the inoperative position shown in FIG. 17 to the operating position shown in FIG.

Next, a substrate storage container according to a fifth embodiment of the present invention will be described with reference to FIGS.
FIG. 19 is a perspective view of the lid 3 of the substrate storage container 1 according to the fifth embodiment of the present invention as viewed from the inside. FIG. 20 is a perspective view of the lid 3 of the substrate storage container 1 according to the fifth embodiment of the present invention as viewed from the inside with the retainer removed. FIG. 21 is a schematic cross-sectional view along the extending direction of the restricting portion 8 showing a state where the restricting portion 8 is in the inoperative position in the substrate storage container 1 according to the fifth embodiment of the present invention. FIG. 22 is a schematic cross-sectional view along the extending direction of the restricting portion 8 showing a state where the restricting portion 8 is in the operating position in the substrate storage container 1 according to the fifth embodiment of the present invention.

The main difference between the substrate storage container according to the present embodiment and the substrate storage container according to the first embodiment is the movement direction of the restricting portion 8.
That is, in the substrate storage container according to the first embodiment, the restricting portion 8 moves along the direction intersecting the direction in which the restricting portion 8 extends on the restricting portion disposing portion 351, so that the inoperative position and the operation are performed. The position can be switched. On the other hand, in the substrate storage container according to the present embodiment, the restricting portions 8 do not extend, and the plurality of restricting portions 8 and the plurality of unrestricted portions 84 are alternately arranged in series. The restriction portion 8 and the plurality of restriction portions 84 are configured to be able to switch between the non-operation position and the operation position by moving in the series direction.
Since the configuration other than this is the same as the configuration of the first embodiment, the description thereof is omitted. About the same code | symbol, the same code | symbol is attached | subjected and demonstrated.

In the substrate storage container according to the present embodiment, the retainer legs 72 are divided into a plurality of retainer legs 72 corresponding to the plurality of substrates arranged in parallel at a predetermined interval.
The regulation part 8 does not extend. The restricting portion 8 is provided with a plurality of restricting portions 8 as convex portions on the single restricting member 80 at the same pitch as the retainer leg portions 72 divided into a plurality of portions. Between a plurality of adjacent restricting portions 8, a plurality of unrestricted portions 84 are provided as recesses at the same pitch as the retainer leg portions 72. The plurality of restriction portions 8 and the plurality of non-restriction portions 84 are arranged alternately and in series.

The substrate storage container 1 configured as described above operates as follows and can provide the following effects.
A plurality of restricting members 8 and a plurality of unrestricted portions 84 corresponding to the pitches of the plurality of retainer legs 72 are alternately and in series arranged so that a plurality of restricting members 80 are raised or lowered by a half pitch. The restricting portion 8 can be switched between a non-operation position (see FIG. 21) and an operation position (see FIG. 22).
As a result, the substrate storage container 1 used as a shipping container can be used as an in-process container by switching the restricting portion 8 from the operating position shown in FIG. 22 to the inoperative position shown in FIG.
On the contrary, the substrate storage container 1 used as an in-process container can be used as a shipping container by switching the regulating portion 8 from the inoperative position shown in FIG. 13 to the operating position shown in FIG.

Next, a substrate storage container according to a sixth embodiment of the present invention will be described with reference to FIGS.
FIG. 23 is a schematic cross-sectional view along the plane of the substrate showing a state in which the restricting portion 8 is in the inoperative position in the substrate storage container 1 according to the sixth embodiment of the present invention. FIG. 24 is a schematic cross-sectional view along the plane of the substrate showing a state in which the regulating portion 8 is in the operating position in the substrate storage container 1 according to the sixth embodiment of the present invention.

The main difference between the substrate storage container according to the present embodiment and the substrate storage container according to the first embodiment is the presence or absence of an adjustment function at the operating position of the restricting portion 8.
That is, in the substrate storage container according to the first embodiment, the restricting portion 8 moves along the direction intersecting the direction in which the restricting portion 8 extends on the restricting portion disposing portion 351, so that the inoperative position and the operation are performed. The position can be switched. On the other hand, in the substrate storage container according to the present embodiment, the restricting portion 8 is configured to be able to adjust the degree of restriction at the operating position.
Since the configuration other than this is the same as the configuration of the first embodiment, the description thereof is omitted. About the same code | symbol, the same code | symbol is attached | subjected and demonstrated.

In the substrate storage container according to the present embodiment, the restricting portion 8 extends along a parallel direction in which a plurality of substrates are arranged in parallel, and the operation position can be switched in at least two stages along a direction intersecting the parallel direction. It is.
Specifically, the restricting portion 8 has an uneven portion 85 on a surface in contact with the restricting portion arranging portion 351. The restricting portion arrangement portion 351 has a concavo-convex portion 353 on the surface in contact with the restricting portion 8. The uneven portion 85 of the restricting portion 8 and the uneven portion 353 of the restricting portion arranging portion 351 are engaged with each other.

The substrate storage container 1 configured as described above operates as follows and can provide the following effects.
The restricting unit 8 can switch the operation position in at least two stages.
When the restricting portion 8 is in the first operating position shown in FIG. 23, the inner surface of the lid 3 and the end portion of the retainer substrate receiving portion 73 are separated by a distance a. When the restricting portion 8 is in the second operating position shown in FIG. 24, the inner surface of the lid 3 and the end portion of the retainer substrate receiving portion 73 are separated by a distance b. a <b.
As a result, the substrate storage container 1 used as a shipping container can be used as an in-process container by switching the restricting portion 8 from the first operating position shown in FIG. 23 to a non-operating position (not shown).
The regulation unit 8 is switched from the first operation position shown in FIG. 23 to the second operation position shown in FIG. 24, thereby adjusting the substrate pressing force of the substrate storage container 1 used as a shipping container (in this case, the substrate The presser force can be increased.
The regulation unit 8 is switched from the second operating position shown in FIG. 24 to the first operating position shown in FIG. 23, thereby adjusting the substrate pressing force of the substrate storage container 1 used as a shipping container (in this case, the substrate The presser force can be made weaker).
Since the substrate pressing force of the retainer can be adjusted according to the operating position of the restricting portion 8, the substrate pressing force can be adjusted according to various packaging forms as a shipping container.

Next, a substrate storage container according to a seventh embodiment of the present invention will be described with reference to FIGS.
FIG. 25 is a schematic cross-sectional view showing a state in which a retainer having a small spring constant is removed from the lid 3 in the lid 3 of the substrate storage container 1 according to the seventh embodiment of the present invention. FIG. 26 is a schematic cross-sectional view showing a state in which a retainer having a large spring constant is attached to the lid 3 in the lid 3 of the substrate storage container 1 according to the seventh embodiment of the present invention.

The main difference between the substrate storage container according to the present embodiment and the substrate storage container according to the first embodiment is a spring constant switching method.
That is, in the substrate storage container according to the first embodiment, the restricting portion 8 is switched between the inoperative position and the operating position by moving on the restricting portion disposing portion 351, and the spring constant is switched accordingly. is there. On the other hand, in the substrate storage container according to the present embodiment, the restriction portion 8 does not exist, and the spring constant can be switched by directly exchanging the retainer 7A having a small spring constant and the retainer 7B having a large spring constant. is there.
Since the configuration other than this is the same as the configuration of the first embodiment, the description thereof is omitted. About the same code | symbol, the same code | symbol is attached | subjected and demonstrated.

  In the substrate storage container 1 according to the present embodiment, the retainer leg 72 and the connecting portion 74 of the retainer 7A are relatively thin, and therefore the spring constant of the retainer 7A is small. The retainer leg 72 and the connecting portion 74 of the retainer 7B are relatively thick, and therefore the spring constant of the retainer 7B is large.

The substrate storage container 1 configured as described above operates as follows and can provide the following effects.
By directly exchanging the retainer 7A having a small spring constant and the retainer 7B having a large spring constant, the spring constant of the retainer 7 can be switched.
As a result, by replacing the retainer 7B having a large spring constant with a retainer 7A having a small spring constant, the substrate storage container 1 used as a shipping container can be used as an in-process container.
Conversely, by replacing the retainer 7A having a small spring constant with a retainer 7B having a large spring constant, the substrate storage container 1 used as an in-process container can be used as a shipping container.

The present invention is not limited to the above-described embodiments, and various modifications can be made within the technical scope described in the claims.
For example, in the substrate storage container 1 according to the fifth embodiment shown in FIGS. 19 to 22, the retainer legs 72 are a plurality of retainer legs 72 corresponding to each of a plurality of substrates arranged in parallel at a predetermined interval. It is divided into
However, in the substrate storage container 1 according to another embodiment, the retainer legs 72 may not be divided.

Further, in each of the above embodiments, the front retainer 7 connects the two retainer substrate receiving portions 73 via the connecting portions 74, and the retainer leg portions 72 are formed at both ends thereof.
However, the front retainer 7 may be configured in a manner (so-called cantilever type) in which the connecting portion 74 is separated and the two retainer substrate receiving portions 73 are separated from each other. However, it goes without saying that the present invention can be implemented by applying each of the above embodiments.
Further, a plurality of (for example, two) independent front retainers may be formed by forming the retainer legs and the vertical frame body with respect to the individual retainer substrate receiving portions 73 thus separated. It goes without saying that the present invention can also be implemented by applying the above-described embodiments to the front retainer 7. In this case, it goes without saying that it is possible to cope with the problem by increasing the number of restricting portions as required.

  Further, the shape of the container main body and the lid, and the number or size of the substrates that can be stored in the container main body are not limited to the shape, the number of sheets, and the size of the container main body 2 and the lid 3 in the present embodiment.

DESCRIPTION OF SYMBOLS 1 Board | substrate storage container 2 Container body 3 Cover body 7 Front retainer (cover body side board | substrate support part)
72 Retainer leg (lid side leg)
721 Elastic deformation part 741 Elastic deformation part 73 Retainer substrate receiving part (lid body side substrate receiving part)
8 Regulatory part W substrate

Claims (8)

A container main body having an opening peripheral edge portion in which a substrate storage space capable of storing a plurality of substrates is formed, and a container main body opening portion communicating with the substrate storage space is formed at one end;
A lid that can be attached to and detached from the peripheral edge of the opening, and that can close the opening of the container body;
When the container main body opening is closed by the lid body, the lid body is disposed on the inner side of the lid body corresponding to the side facing the substrate storage space. When the main body opening is closed, a lid-side substrate support that can support the edges of the plurality of substrates;
When arranged inside the substrate storage space so as to be paired with the lid-side substrate support portion, can support the edges of the plurality of substrates, and the container body opening is closed by the lid In addition, the back side substrate support portion that supports the plurality of substrates in cooperation with the lid side substrate support portion,
A regulating portion disposed on the inner side of the lid,
The lid-side substrate support portion includes a lid-side substrate receiving portion disposed at a position spaced from the inner surface of the lid, and the lid-side substrate receiving portion is disposed on the inner side of the lid. A lid-side leg that supports the position spaced apart from the surface,
The lid-side leg portion is elastically deformed according to an external force when the lid-side substrate receiving portion receives an external force in a direction in which the lid-side substrate receiving portion approaches the inner surface of the lid. Having an elastically deformable part capable of displacing the part,
The restricting portion is disposed in a gap region between the inner surface of the lid and the lid-side substrate support portion, and is in an inoperative position separated from the elastic deformation portion of the lid-side leg portion; A substrate storage container capable of switching between an operating position of the lid-side leg portion in contact with the elastic deformation portion and restricting elastic deformation of the elastic deformation portion at the operation position. The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval,
The restricting portion extends along a parallel direction in which the plurality of substrates are arranged in parallel, and can move between the inoperative position and the operating position by moving along a direction intersecting the parallel direction. The substrate storage container according to claim 1, wherein: The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval,
The restricting portion extends along a parallel direction in which the plurality of substrates are arranged in parallel, and can be switched between the inoperative position and the operating position by rotating around an axis extending in the parallel direction. The substrate storage container according to claim 1. The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval,
The lid body side leg portion of the lid body side substrate support portion is divided into a plurality at predetermined intervals along a parallel direction in which the plurality of substrates are arranged in parallel, whereby a plurality of leg portions and a plurality of gaps are alternately arranged. And the plurality of leg portions have elastic deformation portions,
The restriction part extends along a parallel direction in which the plurality of substrates are arranged in parallel, and can move between the non-operation position and the operation position by moving along the parallel direction. 2. The substrate storage container according to 1. The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval,
The lid-side substrate receiving portion of the lid-side substrate support portion is divided into two at a central portion in a direction orthogonal to the parallel direction in which the plurality of substrates are arranged in parallel, and both the divided portions have elastic deformation portions. Connected by part,
The restricting portion extends along a parallel direction in which the plurality of substrates are arranged in parallel, and moves along a direction intersecting the parallel direction, thereby moving the restricting portion with respect to the elastic deformation portion of the connection portion. The substrate storage container according to claim 1, which is switchable between an inoperative position and the operating position. The lid-side substrate support portion and the back-side substrate support portion support the plurality of substrates in a state of being parallel to each other at a predetermined interval,
The restriction portion extends in a parallel direction in which the plurality of substrates are arranged in parallel, and the operation position can be switched in at least two stages along a direction intersecting the parallel direction. The substrate storage container as described. The restricting portion has an operation portion that switches between the inoperative position and the operating position,
The said operation part is a substrate storage container of any one of Claims 1-6 which can be operated in the said inner side of the said cover body. The restricting portion has an operation portion that switches between the inoperative position and the operating position,
The substrate storage container according to claim 1, wherein the operation unit can be operated on an outer side having a front-back relationship with the inner side of the lid.

Images