JP5942657B2 - 研磨部材固定用両面粘着テープ - Google Patents

研磨部材固定用両面粘着テープ Download PDF

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Publication number
JP5942657B2
JP5942657B2 JP2012160267A JP2012160267A JP5942657B2 JP 5942657 B2 JP5942657 B2 JP 5942657B2 JP 2012160267 A JP2012160267 A JP 2012160267A JP 2012160267 A JP2012160267 A JP 2012160267A JP 5942657 B2 JP5942657 B2 JP 5942657B2
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Japan
Prior art keywords
sensitive adhesive
pressure
parts
double
adhesive layer
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JP2012160267A
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English (en)
Japanese (ja)
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JP2014019801A5 (enExample
JP2014019801A (ja
Inventor
朋之 青谷
朋之 青谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyochem Co Ltd
Artience Co Ltd
Original Assignee
Toyo Ink SC Holdings Co Ltd
Toyochem Co Ltd
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Priority to JP2012160267A priority Critical patent/JP5942657B2/ja
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Publication of JP2014019801A5 publication Critical patent/JP2014019801A5/ja
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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2012160267A 2012-07-19 2012-07-19 研磨部材固定用両面粘着テープ Active JP5942657B2 (ja)

Priority Applications (1)

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JP2012160267A JP5942657B2 (ja) 2012-07-19 2012-07-19 研磨部材固定用両面粘着テープ

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JP2012160267A JP5942657B2 (ja) 2012-07-19 2012-07-19 研磨部材固定用両面粘着テープ

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JP2014019801A JP2014019801A (ja) 2014-02-03
JP2014019801A5 JP2014019801A5 (enExample) 2015-06-18
JP5942657B2 true JP5942657B2 (ja) 2016-06-29

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106992112A (zh) * 2016-01-21 2017-07-28 苏州新美光纳米科技有限公司 超薄晶片的抛光方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6390376B2 (ja) * 2014-11-25 2018-09-19 東洋インキＳｃホールディングス株式会社 粘着剤および粘着シート
JP6976048B2 (ja) * 2015-11-30 2021-12-01 日東電工株式会社 研磨パッド固定用粘着シート
JP2020164786A (ja) * 2019-03-29 2020-10-08 住友ベークライト株式会社 粘着テープ
JP7287270B2 (ja) * 2019-12-26 2023-06-06 東洋インキＳｃホールディングス株式会社 研磨部材固定用粘着剤、および粘着シート
JP6977855B1 (ja) * 2020-12-18 2021-12-08 東洋インキＳｃホールディングス株式会社 両面粘着シート、研磨用部材、および研磨パッド付き定盤

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002285114A (ja) * 2001-03-26 2002-10-03 Sekisui Chem Co Ltd 研磨材固定用テープ
JP5389315B2 (ja) * 2005-02-14 2014-01-15 日東電工株式会社 粘着テープ及び粘着剤組成物
JP5346227B2 (ja) * 2009-02-27 2013-11-20 積水化学工業株式会社 研磨材固定用両面粘着テープ及び研磨材付き粘着テープ
JP5346226B2 (ja) * 2009-02-27 2013-11-20 積水化学工業株式会社 研磨材固定用両面粘着テープ及び研磨材付き粘着テープ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106992112A (zh) * 2016-01-21 2017-07-28 苏州新美光纳米科技有限公司 超薄晶片的抛光方法

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