JP5933570B2 - 接触式プローブ及び関連する検査方法 - Google Patents
接触式プローブ及び関連する検査方法 Download PDFInfo
- Publication number
- JP5933570B2 JP5933570B2 JP2013535405A JP2013535405A JP5933570B2 JP 5933570 B2 JP5933570 B2 JP 5933570B2 JP 2013535405 A JP2013535405 A JP 2013535405A JP 2013535405 A JP2013535405 A JP 2013535405A JP 5933570 B2 JP5933570 B2 JP 5933570B2
- Authority
- JP
- Japan
- Prior art keywords
- contact
- signal
- support frame
- movable arm
- arm set
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
- G01B7/016—Constructional details of contacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
- G01B5/012—Contact-making feeler heads therefor
- G01B5/016—Constructional details of contacts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Electrotherapy Devices (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ITBO2010A000654A IT1403845B1 (it) | 2010-10-29 | 2010-10-29 | Sonda di tastaggio e relativo metodo di controllo |
| ITBO2010A000654 | 2010-10-29 | ||
| PCT/EP2011/068661 WO2012055868A2 (en) | 2010-10-29 | 2011-10-25 | Touch probe and related checking method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013545093A JP2013545093A (ja) | 2013-12-19 |
| JP2013545093A5 JP2013545093A5 (enExample) | 2014-12-18 |
| JP5933570B2 true JP5933570B2 (ja) | 2016-06-15 |
Family
ID=43737869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013535405A Active JP5933570B2 (ja) | 2010-10-29 | 2011-10-25 | 接触式プローブ及び関連する検査方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9015953B2 (enExample) |
| EP (1) | EP2633266B1 (enExample) |
| JP (1) | JP5933570B2 (enExample) |
| KR (1) | KR101914175B1 (enExample) |
| CN (1) | CN103403491B (enExample) |
| ES (1) | ES2545116T3 (enExample) |
| IT (1) | IT1403845B1 (enExample) |
| WO (1) | WO2012055868A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6409148B1 (ja) * | 2018-08-28 | 2018-10-17 | シチズンファインデバイス株式会社 | 圧力検出装置、処理回路 |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5827343B2 (ja) | 2010-12-22 | 2015-12-02 | サウディ ベーシック インダストリーズ コーポレイション | フィッシャー・トロプシュ合成に有用な触媒 |
| EP2679568A1 (en) | 2012-06-25 | 2014-01-01 | Saudi Basic Industries Corporation | Process for production ethylene and propylene from syngas |
| DE102013001457A1 (de) * | 2013-01-28 | 2014-07-31 | Blum-Novotest Gmbh | In einer Werkstückbearbeitungsmaschine aufzunehmender temperaturkompensierter Messtaster und Verfahren zur Temperaturkompensation eines Messtasters |
| JP2014209017A (ja) * | 2013-03-25 | 2014-11-06 | 株式会社ジェイテクト | 駆動力伝達装置、及び駆動力伝達装置の制御装置 |
| ITBO20130426A1 (it) * | 2013-08-01 | 2015-02-02 | Marposs Spa | Sonda di tastaggio e relativi circuiti e metodi di elaborazione dei segnali |
| CN106247959B (zh) * | 2016-09-30 | 2018-08-07 | 国网山东省电力公司商河县供电公司 | 一种线缆架设高度的自动检测系统与自动检测方法 |
| WO2019067755A1 (en) * | 2017-09-29 | 2019-04-04 | Mitutoyo Corporation | CONFIGURATION OF COMPACT MEASURING DEVICE FOR INTEGRATING COMPLEX CIRCUITS |
| CN111272319B (zh) * | 2018-12-05 | 2022-06-24 | 上海东培企业有限公司 | 接触式测量头的张力测量装置 |
| KR20210016991A (ko) | 2019-08-06 | 2021-02-17 | 이민열 | 터치 프로브 |
| KR102855212B1 (ko) | 2024-04-08 | 2025-09-05 | 이민열 | 터치 프로브 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2356030C3 (de) | 1973-11-09 | 1978-05-11 | Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar | Taster zur Werkstückantastung |
| DE2712181C3 (de) | 1977-03-19 | 1981-01-22 | Fa. Carl Zeiss, 7920 Heidenheim | Tastsystem |
| GB2049198B (en) | 1979-05-01 | 1983-03-30 | Renishaw Electrical Ltd | Probe for use in measuring apparatus |
| US4406068A (en) * | 1980-06-25 | 1983-09-27 | Mitutoyo Mfg. Co., Ltd. | Probe tracing method and means for coordinate measuring machine |
| EP0068899B1 (en) | 1981-06-30 | 1988-11-30 | Renishaw plc | Probe for measuring workpieces |
| JPH0422630Y2 (enExample) | 1985-09-20 | 1992-05-25 | ||
| JPH0682497B2 (ja) | 1985-10-22 | 1994-10-19 | 富士通株式会社 | ヘツドクラツシユ検出方式 |
| EP0242710B1 (en) * | 1986-04-17 | 1990-07-25 | Renishaw plc | Contact-sensing probe |
| JPS63193027A (ja) | 1987-02-06 | 1988-08-10 | Toyota Motor Corp | 圧電型圧力検出装置 |
| DE3831975A1 (de) * | 1988-04-12 | 1989-10-26 | Wegu Messtechnik | Piezogesteuerter dynamischer tastkopf |
| IT1238266B (it) | 1990-03-06 | 1993-07-12 | Marposs Spa | Testa per il controllo di dimensioni lineari di pezzi. |
| FR2673468A1 (fr) * | 1991-02-28 | 1992-09-04 | Renishaw Plc | Circuit de conditionnement de signaux pour sonde a declenchement. |
| IT1309248B1 (it) * | 1999-05-13 | 2002-01-16 | Marposs Spa | Sistema per rilevare dimensioni lineari di pezzi meccanici, con unita' di ricetrasmissione di segnali via etere |
| DE19929557B4 (de) * | 1999-06-18 | 2006-01-19 | Dr. Johannes Heidenhain Gmbh | Verfahren und Schaltkreis zur Einstellung einer Schaltschwelle eines Tastschalters |
| GB0002375D0 (en) * | 2000-02-03 | 2000-03-22 | Renishaw Plc | Reactionless rotary drive mechanism |
| ITBO20020628A1 (it) * | 2002-10-07 | 2004-04-08 | Marposs Spa | Sonda di tastaggio |
| ITBO20030694A1 (it) * | 2003-11-20 | 2005-05-21 | Marposs Spa | Tasta per il controllo di dimensioni lineari di pezzi meccanici. |
| GB0506158D0 (en) * | 2005-03-24 | 2005-05-04 | Renishaw Plc | Measurement probe |
| ITBO20060628A1 (it) * | 2006-09-12 | 2008-03-13 | Marposs Spa | Testa per il controllo di dimensioni lineari di pezzi meccanici |
| EP2028439A1 (en) * | 2007-07-26 | 2009-02-25 | Renishaw plc | Deactivatable measurement apparatus |
| EP2018934A1 (en) * | 2007-07-26 | 2009-01-28 | Renishaw plc | Measurement device having authentication module |
| GB0804467D0 (en) * | 2008-03-11 | 2008-04-16 | Renishaw Plc | Touch trigger measurement probe |
-
2010
- 2010-10-29 IT ITBO2010A000654A patent/IT1403845B1/it active
-
2011
- 2011-10-25 WO PCT/EP2011/068661 patent/WO2012055868A2/en not_active Ceased
- 2011-10-25 KR KR1020137013651A patent/KR101914175B1/ko active Active
- 2011-10-25 ES ES11835655.9T patent/ES2545116T3/es active Active
- 2011-10-25 EP EP11835655.9A patent/EP2633266B1/en active Active
- 2011-10-25 US US13/880,335 patent/US9015953B2/en active Active
- 2011-10-25 CN CN201180052620.4A patent/CN103403491B/zh active Active
- 2011-10-25 JP JP2013535405A patent/JP5933570B2/ja active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6409148B1 (ja) * | 2018-08-28 | 2018-10-17 | シチズンファインデバイス株式会社 | 圧力検出装置、処理回路 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103403491B (zh) | 2015-12-02 |
| WO2012055868A3 (en) | 2013-08-22 |
| KR101914175B1 (ko) | 2018-11-01 |
| US20130205609A1 (en) | 2013-08-15 |
| ES2545116T3 (es) | 2015-09-08 |
| WO2012055868A2 (en) | 2012-05-03 |
| JP2013545093A (ja) | 2013-12-19 |
| US9015953B2 (en) | 2015-04-28 |
| EP2633266A2 (en) | 2013-09-04 |
| KR20140081756A (ko) | 2014-07-01 |
| CN103403491A (zh) | 2013-11-20 |
| IT1403845B1 (it) | 2013-11-08 |
| EP2633266B1 (en) | 2015-07-08 |
| ITBO20100654A1 (it) | 2012-04-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5933570B2 (ja) | 接触式プローブ及び関連する検査方法 | |
| JP5996546B2 (ja) | 圧電センサ及び断熱部を備えた接触式プローブ | |
| CN105408724B (zh) | 接触式探针和相关电路,以及用于信号处理的方法 | |
| JP2007147616A (ja) | 流体の圧力および温度を測定するセンサ装置 | |
| JP2008157921A (ja) | 振動検出プローブ | |
| EP2778633B1 (en) | Vibration sensor in a portable vibration meter | |
| US20200355548A1 (en) | Piezoelectric acceleration sensor for vibration condition monitoring | |
| JP2011516810A (ja) | 圧力測定用グロープラグ | |
| WO2011104860A1 (ja) | 圧力センサモジュールおよび圧力検出装置 | |
| CN110383023A (zh) | 力传感器 | |
| KR102215343B1 (ko) | 역각 센서 | |
| CN104685314A (zh) | 应变变送器 | |
| KR100878545B1 (ko) | 베어링의 하중 감지 및 베어링의 상태 감시를 조합한 센서어셈블리 및 센서 시스템 | |
| CN108291848A (zh) | 压力传感器装置以及用于利用这种压力传感器装置进行过程工具化的测量转换器 | |
| JP6526271B1 (ja) | 分離式センサ装置 | |
| US3884085A (en) | Accelerometer assembly | |
| EP2419695B1 (en) | Displacement sensor | |
| CN110383024A (zh) | 力传感器 | |
| JP2018105748A (ja) | 圧力センサ | |
| KR19980045576U (ko) | 진동 및 온도 온라인 측정시스템 | |
| JP2010216966A (ja) | 音響センサ装置 | |
| JP7561909B2 (ja) | 抵抗溶接装置の溶接プロセス中の溶接力の測定および溶接電圧の検出を行う装置 | |
| JP2016161320A (ja) | 圧力センサ | |
| JPH10111120A (ja) | 自動定寸ヘッドの破損防止装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20141027 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20141027 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150821 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150901 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151113 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160408 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160502 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5933570 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |