JP5924879B2 - 振動型アクチュエータ - Google Patents

振動型アクチュエータ Download PDF

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Publication number
JP5924879B2
JP5924879B2 JP2011151735A JP2011151735A JP5924879B2 JP 5924879 B2 JP5924879 B2 JP 5924879B2 JP 2011151735 A JP2011151735 A JP 2011151735A JP 2011151735 A JP2011151735 A JP 2011151735A JP 5924879 B2 JP5924879 B2 JP 5924879B2
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Japan
Prior art keywords
contact
moving body
type actuator
vibrating body
vibration
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Active
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JP2011151735A
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English (en)
Japanese (ja)
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JP2013021777A5 (enExample
JP2013021777A (ja
Inventor
森 敬夫
敬夫 森
聡司 土屋
聡司 土屋
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011151735A priority Critical patent/JP5924879B2/ja
Publication of JP2013021777A publication Critical patent/JP2013021777A/ja
Publication of JP2013021777A5 publication Critical patent/JP2013021777A5/ja
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Publication of JP5924879B2 publication Critical patent/JP5924879B2/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2011151735A 2011-07-08 2011-07-08 振動型アクチュエータ Active JP5924879B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011151735A JP5924879B2 (ja) 2011-07-08 2011-07-08 振動型アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011151735A JP5924879B2 (ja) 2011-07-08 2011-07-08 振動型アクチュエータ

Publications (3)

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JP2013021777A JP2013021777A (ja) 2013-01-31
JP2013021777A5 JP2013021777A5 (enExample) 2014-08-21
JP5924879B2 true JP5924879B2 (ja) 2016-05-25

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ID=47692682

Family Applications (1)

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JP2011151735A Active JP5924879B2 (ja) 2011-07-08 2011-07-08 振動型アクチュエータ

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JP (1) JP5924879B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6448239B2 (ja) * 2014-07-16 2019-01-09 キヤノン株式会社 回転駆動装置及び関節形ロボット
JP6501487B2 (ja) 2014-10-27 2019-04-17 キヤノン株式会社 超音波モータ及び超音波モータを用いた駆動装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0515174A (ja) * 1991-06-28 1993-01-22 Hitachi Ltd 超音波モータ
JP3826137B2 (ja) * 2004-01-21 2006-09-27 オリンパス株式会社 圧電アクチュエータ
KR101636909B1 (ko) * 2009-02-03 2016-07-06 삼성전자주식회사 압전 초음파 모터 및 이의 제조방법
JP5631018B2 (ja) * 2009-04-07 2014-11-26 キヤノン株式会社 回転型振動波駆動装置

Also Published As

Publication number Publication date
JP2013021777A (ja) 2013-01-31

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