JP5919662B2 - 電子デバイスおよび電子機器 - Google Patents

電子デバイスおよび電子機器 Download PDF

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Publication number
JP5919662B2
JP5919662B2 JP2011152732A JP2011152732A JP5919662B2 JP 5919662 B2 JP5919662 B2 JP 5919662B2 JP 2011152732 A JP2011152732 A JP 2011152732A JP 2011152732 A JP2011152732 A JP 2011152732A JP 5919662 B2 JP5919662 B2 JP 5919662B2
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Japan
Prior art keywords
substrate
electronic device
rigid substrate
rigid
angular velocity
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Expired - Fee Related
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JP2011152732A
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English (en)
Japanese (ja)
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JP2013019746A (ja
JP2013019746A5 (enExample
Inventor
正泰 佐久間
正泰 佐久間
祥宏 小林
祥宏 小林
北村 昇二郎
昇二郎 北村
岳人 茅野
岳人 茅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2011152732A priority Critical patent/JP5919662B2/ja
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JP2011152732A 2011-07-11 2011-07-11 電子デバイスおよび電子機器 Expired - Fee Related JP5919662B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011152732A JP5919662B2 (ja) 2011-07-11 2011-07-11 電子デバイスおよび電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011152732A JP5919662B2 (ja) 2011-07-11 2011-07-11 電子デバイスおよび電子機器

Publications (3)

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JP2013019746A JP2013019746A (ja) 2013-01-31
JP2013019746A5 JP2013019746A5 (enExample) 2014-08-21
JP5919662B2 true JP5919662B2 (ja) 2016-05-18

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JP2011152732A Expired - Fee Related JP5919662B2 (ja) 2011-07-11 2011-07-11 電子デバイスおよび電子機器

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JP (1) JP5919662B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6136402B2 (ja) * 2013-03-15 2017-05-31 セイコーエプソン株式会社 センサーユニット、電子機器、および移動体
EP3171131A4 (en) 2014-07-16 2018-03-07 Seiko Epson Corporation Sensor unit, electronic apparatus, and mobile body

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2582856Y2 (ja) * 1992-04-09 1998-10-15 株式会社ユニシアジェックス 加速度センサ
JPH07306047A (ja) * 1994-05-10 1995-11-21 Murata Mfg Co Ltd 多軸検出型振動ジャイロ
JP3605877B2 (ja) * 1995-03-30 2004-12-22 アイシン精機株式会社 角速度センサユニット
JP2000258450A (ja) * 1999-03-09 2000-09-22 Matsushita Electric Ind Co Ltd 加速度センサ
JP3896787B2 (ja) * 2000-11-10 2007-03-22 松下電工株式会社 照明制御装置
JP2003028892A (ja) * 2001-07-16 2003-01-29 Matsushita Electric Works Ltd 加速度センサ
JP4033058B2 (ja) * 2003-06-30 2008-01-16 松下電工株式会社 加速度センサ
JP2008082812A (ja) * 2006-09-27 2008-04-10 Denso Corp センサ装置およびその製造方法
US8100010B2 (en) * 2008-04-14 2012-01-24 Honeywell International Inc. Method and system for forming an electronic assembly having inertial sensors mounted thereto
JP2010220791A (ja) * 2009-03-24 2010-10-07 Fujifilm Corp 超音波プローブ及び超音波診断装置
US8703543B2 (en) * 2009-07-14 2014-04-22 Honeywell International Inc. Vertical sensor assembly method

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JP2013019746A (ja) 2013-01-31

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