JP5915301B2 - Laminated sheet manufacturing method and laminated sheet manufacturing apparatus - Google Patents

Description

  The present invention relates to a laminated sheet manufacturing method and a laminated sheet manufacturing apparatus.

In recent years, in order to reduce the size and thickness of electronic components and electronic devices, it has been required to reduce the size and thickness of circuit boards used therefor. In order to meet this requirement, a circuit board having a multilayer structure is used and each layer is thinned.

For a circuit board having a multilayer structure, for example, a sheet in which a resin composition sheet (resin layer) is disposed on both sides of a fiber base material and laminated is used (see, for example, Patent Document 1).
This sheet is manufactured by superimposing a B-stage resin composition sheet on both sides of a fiber base material and pressurizing this laminate.

Japanese Patent Laid-Open No. 2003-340952

However, in such a manufacturing method, there is a possibility that the pressure bonding of the resin layer to the fiber substrate may be insufficient, and as a result, the resin layer may be peeled from the fiber substrate.
Such a problem occurs not only when the fiber base material and the resin layer are laminated, but also when the resin layers are laminated, or when the prepregs including the fiber base material are laminated.

According to the present invention, in the method for producing a laminated sheet in which the resin layer of the sheet having a resin layer is joined to one or both sides of a long thin plate-like substrate to produce a laminated sheet, the substrate is communicates with the conveying direction, a fiber substrate hole is formed communicating with the front and back surfaces, a vacuum chamber whose pressure is reduced by pressure reducing means, and conveying said sheet and said substrate, at reduced pressure, of the seat A step of bringing a resin layer and a substrate into contact with each other to form a laminate, a step of feeding the laminate from the decompression chamber, a step of sandwiching the laminate with a pair of sheet materials, and the outside of the decompression chamber And a space inside the pair of sheet members sandwiched between the stacked members communicates with the decompression chamber, and the decompression means decompresses the space inside the pair of sheet materials. In the decompression chamber, the base material is continuous. In the step of decompressing the space inside the pair of sheet materials by the decompression means, the base material located in the decompression chamber is continuously fed out from the decompression chamber. By sucking the internal gas with the decompression means, the gas in the space inside the base material inside the pair of sheet materials is sucked, and the internal space of the pair of sheet materials is decompressed by the decompression means. In the step, a laminated sheet manufacturing method is provided in which the resin layer is impregnated inside the base material outside the decompression chamber .

Here, after the laminated body is fed out from the decompression chamber, the laminate may be sandwiched between a pair of sheet materials. In addition, the sheet material is provided in advance in the sheet, and the sheet with the sheet material is supplied to the decompression chamber and decompressed. You may send out the laminated body pinched | interposed with a pair of sheet material from a chamber.
Further, the space inside the pair of sheet materials means that when the laminate is sandwiched between the pair of sheet materials, if there is a gap between the laminate and the sheet material, or between the opposing sheet material inner surfaces, This gap may be sufficient. In addition, when a pair of sheet materials are in close contact with the laminate, and there is no gap between the laminate and the sheet material or between the inner surfaces of the opposing sheet materials, the space inside the laminate, for example, the substrate It may be a space in the formed hole. Since the base material communicates in the transport direction and has a hole communicating with the front and back surfaces, the space inside the base material of the laminated body located outside the decompression chamber passes through the space inside the base material inside the decompression chamber. , And communicate with the decompression chamber.

Between the laminate and the sheet material when the laminate is sandwiched between the pair of sheet materials, the gap between the opposing inner surfaces of the sheet material, and the holes inside the base material when the pair of sheet materials are in close contact with the laminate Among the voids such as the inside, any one of the voids is decompressed by the decompression means. Thereby, a laminated body will be pressed by the differential pressure | voltage difference between the inside of the said space | gap, and the exterior of a pair of sheet material. Therefore, in the laminate, the resin layer and the base material are firmly fixed.
Furthermore, in the present invention, since the base material and the sheet are laminated in a reduced pressure state, it is possible to prevent air from remaining between the base material and the sheet, and the adhesion between the resin layer and the base material. And can be firmly fixed.

Furthermore, according to this invention, the manufacturing apparatus used for the manufacturing method of the laminated sheet mentioned above can also be provided.
That is, according to the present invention, there is provided a laminated sheet manufacturing apparatus for manufacturing a laminated sheet by joining the resin layer of a sheet having a resin layer to one side or both sides of a thin plate-like base material, the sheet and the base A decompression chamber to which a material is supplied and decompressed by decompression means; a crimping means for crimping the sheet in the decompression chamber and the base material to form a laminate; and a laminate delivered from the decompression chamber. The sheet material is sandwiched between the two sheet materials outside the decompression chamber , and a space between the sheet materials communicates with the decompression chamber. By the operation of the means, the space is decompressed through the decompression chamber, and the space is decompressed, so that the laminate is crushed by the two sheet materials outside the decompression chamber , and the sheet and Crimping the substrate and laminating Laminated sheet manufacturing apparatus characterized by being configured to obtain over preparative also be provided.

  According to such a manufacturing apparatus, when the laminated sheet is produced, the pressure reducing means is operated to depressurize the space between the two sheet materials, and the laminated body in this space is pushed together with the two sheet materials. Can be crushed. Thereby, a laminated body is uniformly pressurized with each sheet material over the whole surface (whole), and a resin layer and a base material are reliably crimped | bonded and joined, and become a laminated sheet. Thereby, for example, a laminated sheet in which the resin layer is securely and firmly bonded to the base material can be manufactured regardless of the thickness and composition of the resin layer.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method and laminated sheet manufacturing apparatus of a lamination sheet with which the resin layer and the base material were fixed firmly are provided.

It is a schematic sectional side view which shows embodiment of the lamination sheet manufacturing apparatus of this invention. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. FIG. 2 is an enlarged view of a region [C] surrounded by an alternate long and short dash line in FIG. 1. It is the DD sectional view taken on the line in FIG. It is the DD sectional view taken on the line in FIG. It is sectional drawing which shows the lamination sheet of this invention. It is sectional drawing which shows the board | substrate manufactured using the lamination sheet shown in FIG. It is sectional drawing which shows the semiconductor device manufactured using the board | substrate shown in FIG. It is sectional drawing which shows the manufacturing apparatus concerning 2nd embodiment of this invention. It is sectional drawing of the direction orthogonal to the longitudinal direction of the laminated body of a resin layer and a fiber base material.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same components are denoted by the same reference numerals, and detailed description thereof is appropriately omitted so as not to overlap.
1 is a schematic sectional side view showing an embodiment of the laminated sheet manufacturing apparatus of the present invention, FIG. 2 is a sectional view taken along line AA in FIG. 1, and FIG. 3 is a sectional view taken along line BB in FIG. 4 is an enlarged view of a region [C] surrounded by a one-dot chain line in FIG. 1, FIGS. 5 and 6 are sectional views taken along the line DD in FIG. 1, and FIG. FIG. 8 is a sectional view showing a substrate manufactured using the laminated sheet shown in FIG. 7, and FIG. 9 is a sectional view showing a semiconductor device manufactured using the substrate shown in FIG. It is. In the following description, the upper side in FIGS. 1 to 9 is described as “upper” or “upper”, and the lower side is described as “lower” or “lower”. 7 to 9 are greatly exaggerated in the thickness direction (vertical direction in the figure).

  A laminated sheet manufacturing apparatus 30 shown in FIG. 1 is an apparatus that manufactures a laminated sheet 40 having the configuration shown in FIG.

<Laminated sheet>
First, the laminated sheet 40 will be described with reference to FIG. The prepreg 1 is obtained by cutting the laminated sheet 40 into a predetermined dimension in the middle of the longitudinal direction.

The laminated sheet 40 shown in FIG. 7 has a belt-like (long) overall shape, a thin plate-like (flat plate) fiber substrate (substrate) 2, and one surface (upper surface) side of the fiber substrate 2. Is located on the other surface (lower surface) side of the first base resin layer (resin layer) 3 and the fiber base 2 and is solid or semi-solid. And a second resin layer (resin layer) 4 composed of a solid second resin composition. The laminated sheet 40 is used after being cut to a predetermined size.
In addition, each resin layer 3 and 4 is a B stage state.

The fiber base material 2 has a function of improving the mechanical strength of the laminated sheet 40.
Examples of the fiber substrate 2 include glass fiber substrates such as glass woven fabric and glass nonwoven fabric, polyamide resin fibers such as polyamide resin fibers, aramid fibers including aromatic polyamide resin fibers and wholly aromatic polyamide resin fibers. Polyester resin fiber such as polyester resin fiber, aromatic polyester resin fiber, wholly aromatic polyester resin fiber, polyimide resin fiber, polyparaphenylene benzobisoxazole, woven fabric or non-woven fabric mainly composed of fluororesin fiber And fiber base materials such as organic fiber base materials such as paper fiber base materials mainly composed of synthetic fiber base materials, kraft paper, cotton linter paper, mixed paper of linter and kraft pulp, and the like.
In addition, the fiber base material may use any 1 type of the fiber mentioned above, and may use 2 or more types.

  Among these, it is preferable that the fiber base material 2 is a glass fiber base material. By using such a glass fiber substrate, the mechanical strength of the prepreg 1 obtained by cutting the laminated sheet 40 can be further improved. In addition, there is an effect that the thermal expansion coefficient of the prepreg 1 can be reduced.

  As glass which comprises such a glass fiber base material, E glass, C glass, A glass, S glass, D glass, NE glass, T glass, H glass, quartz glass etc. are mentioned, for example. Among these, the glass is preferably S glass, quartz glass, or T glass. Thereby, the thermal expansion coefficient of a glass fiber base material can be made comparatively small, Therefore For the laminated sheet 40, the thermal expansion coefficient can be made as small as possible.

  Although the average thickness T of the fiber base material 2 is not specifically limited, It is preferable that it is 150 micrometers or less, It is more preferable that it is 100 micrometers or less, It is further more preferable that it is about 10-25 micrometers. By using the fiber base 2 having such a thickness, the mechanical strength of the prepreg 1 (laminated sheet 40) can be ensured and the thickness thereof can be reduced. Furthermore, the workability of the prepreg 1 can be improved.

  A first resin layer 3 is provided on one surface side of the fiber base 2, and a second resin layer 4 is provided on the other surface side. Moreover, the 1st resin layer 3 is comprised with the 1st resin composition, On the other hand, the 2nd resin layer 4 is comprised with the 2nd resin composition. The first resin composition and the second resin composition may be the same composition or different. In this embodiment, the same composition is used.

As shown in FIG. 7, in this embodiment, a part of the fiber base 2 in the thickness direction is impregnated with the first resin composition (first resin layer 3) (hereinafter, this part is referred to as “first Impregnated portion 31 "), the remaining portion of the fiber base material 2 not impregnated with the first resin composition is impregnated with the second resin composition (second resin layer 4) (hereinafter referred to as this). This portion is referred to as “second impregnation portion 41”). Thereby, the first impregnation part 31 which is a part of the first resin layer 3 and the second impregnation part 41 which is a part of the second resin layer 4 are located in the fiber base material 2. And in the fiber base material 2, the 1st impregnation part 31 (lower surface of the 1st resin layer 3) and the 2nd impregnation part 41 (upper surface of the 2nd resin layer 4) are contacting. In other words, the first resin composition is impregnated into the fiber substrate 2 from the upper surface side of the fiber substrate 2, and the second resin composition is impregnated from the lower surface side of the fiber substrate 2. The voids in the fiber base material 2 are filled with these resin compositions.
In the present embodiment, the thickness of the first impregnation part 31 and the thickness of the second impregnation part 41 are equal.

  Further, the thickness of the first resin layer 3 excluding the first impregnation portion 31 (first non-impregnation portion 32) and the portion of the second resin layer 4 excluding the second impregnation portion 41 (second The thickness of the non-impregnated portion 42) is equal. The thickness of the 1st non-impregnation part 32 and the thickness of the 2nd non-impregnation part 42 are 2-20 micrometers, for example. The thickness of the first impregnation part 31 and the thickness of the second impregnation part 41 may be different, and the thickness of the first non-impregnation part 32 and the thickness of the second non-impregnation part 42 May be different. Reference numeral 20 schematically shows a boundary between the impregnating portions 31 and 32.

As shown in FIG. 1, the 1st resin layer 3 is supplied to the lamination sheet manufacturing apparatus 30 as a thin plate-shaped 1st support body (sheet | seat) 5a. The sheet 5 a includes a first resin layer 3, a support base (not shown) that supports the resin layer 3, and a protective sheet 51 that protects the first resin layer 3. The support base material is provided on the opposite side to the protective sheet 51 with the first resin layer 3 interposed therebetween. Accordingly, although not shown in FIG. 1, the first resin layer 3 is in contact with the second roller 72a via the support base material.
Similarly, the second resin layer 4 is supplied to the laminated sheet manufacturing apparatus 30 as a thin plate-like second support (sheet) 5b. The sheet 5 b includes a second resin layer 4, a support base (not shown) that supports the resin layer 4, and a protective sheet 51 that protects the second resin layer 4. The support base is provided on the side opposite to the protective sheet 51 with the second resin layer 4 interposed therebetween. Therefore, although not shown in FIG. 1, the second resin layer 4 is in contact with the second roller 72b via the support base material.

As the protective sheet 51, for example, a resin film is preferable. Examples of the resin material constituting the resin film include fluororesins, polyimides, polyesters such as polybutylene terephthalate and polyethylene terephthalate, and polyethylene. And as a resin material which comprises a resin film, since it is excellent in heat resistance and cheap, among these, a polyethylene terephthalate and polyethylene are preferable. Moreover, it is preferable that the process which can peel is performed to the surface at the side of the resin layer of the resin film. Thereby, as will be described later, the protective sheet 51 and the resin layer can be easily separated.
As the support substrate, the same material as the protective sheet 51 can be used.

  The average thickness of the protective sheet 51 and the support substrate is not particularly limited, but is preferably about 8 to 70 μm, and more preferably about 12 to 40 μm.

  It is preferable that the first resin composition and the second resin composition have the following composition.

  Each resin composition includes, for example, a curable resin, and includes at least one of a curing aid (for example, a curing agent and a curing accelerator) and an inorganic filler as necessary.

  Examples of the curable resin include urea (urea) resin, melamine resin, maleimide compound, polyurethane resin, unsaturated polyester resin, resin having a benzoxazine ring, bisallyl nadiimide compound, vinyl benzyl resin, vinyl benzyl ether resin, Examples thereof include thermosetting resins such as benzocyclobutene resins, cyanate resins, and epoxy resins, ultraviolet curable resins, and anaerobic curable resins. Among these, the curable resin is preferably a combination having a glass transition temperature of 200 ° C. or higher. For example, spiro ring-containing, heterocyclic, trimethylol type, biphenyl type, naphthalene type, anthracene type, novolak type bi- or trifunctional epoxy resin, cyanate resin (including cyanate resin prepolymer), maleimide compound, It is preferable to use a benzocyclobutene resin or a resin having a benzoxazine ring.

  Among the curable resins, by using a thermosetting resin, the cross-link density increases in the cured resin layers 3 and 4 after the substrate 10 described later (see FIG. 8) is manufactured. The heat resistance of the cured resin layers 3 and 4 (obtained substrate) can be improved.

  In particular, the thermal expansion coefficient of the prepreg 1 can be reduced (hereinafter also referred to as “low thermal expansion”) by using the thermosetting resin and the filler together. Furthermore, the electrical characteristics (low dielectric constant, low dielectric loss tangent) of the prepreg 1 can be improved.

  Examples of the epoxy resin include phenol novolac type epoxy resin, bisphenol type epoxy resin, naphthalene type epoxy resin, anthracene type epoxy resin, arylalkylene type epoxy resin and the like.

  Among these, the epoxy resin is preferably a naphthalene type or arylalkylene type epoxy resin. By using a naphthalene type or arylalkylene type epoxy resin, moisture-absorbing solder heat resistance (solder heat resistance after moisture absorption) and flame retardancy can be improved in the cured resin layers 3 and 4 (obtained substrate). . As naphthalene type epoxy, DIC Corporation's HP-4700, HP-4770, HP-4032D, HP-5000, HP-6000, Nippon Kayaku Co., Ltd. NC-7300L, Nippon Steel Chemical Co., Ltd. ESN-375 manufactured by Nippon Kayaku Co., Ltd., NC-3000, NC-3000L, NC-3000-FH manufactured by Nippon Kayaku Co., Ltd., NC manufactured by Nippon Kayaku Co., Ltd. -7300L, ESN-375 manufactured by Nippon Steel Chemical Co., Ltd. The arylalkylene type epoxy resin means an epoxy resin containing one or more combinations of an aromatic group and an alkylene group such as methylene in the repeating unit, and is excellent in heat resistance, flame retardancy, and mechanical strength. In order to deal with a halogen-free wiring board, it is preferable to use an epoxy resin containing substantially no halogen.

  The cyanate resin can be obtained, for example, by reacting a halogenated cyanide compound with phenols or naphthols, and prepolymerizing by a method such as heating as necessary. Moreover, the commercial item prepared in this way can also be used.

  Examples of the cyanate resin include novolak-type cyanate resin, bisphenol A-type cyanate resin, bisphenol E-type cyanate resin, bisphenol-type cyanate resin such as tetramethylbisphenol F-type cyanate resin, and naphthol aralkyl-type cyanate resin. .

  The cyanate resin preferably has two or more cyanate groups (—O—CN) in the molecule. For example, 2,2′-bis (4-cyanatophenyl) isopropylidene, 1,1′-bis (4-cyanatophenyl) ethane, bis (4-cyanato-3,5-dimethylphenyl) methane, 3-bis (4-cyanatophenyl-1- (1-methylethylidene)) benzene, bis (4-cyanatophenyl) thioether, bis (4-cyanatophenyl) ether, 1,1,1-tris (4 -Cyanatophenyl) ethane, tris (4-cyanatophenyl) phosphite, bis (4-cyanatophenyl) sulfone, 2,2-bis (4-cyanatophenyl) propane, 1,3-, 1,4 -, 1,6-, 1,8-, 2,6- or 2,7-dicyanatonaphthalene, 1,3,6-tricyanatonaphthalene, 4,4-dicyanatobiphenyl, and phenol novolac Type, cresol novolac type, dicyclopentadiene type and other polyhydric phenols and cyanate resin obtained by reaction with cyanogen halide, naphthol aralkyl type polyvalent naphthols and cyanate obtained by reaction with cyanogen halide Examples thereof include resins. Among these, phenol novolac type cyanate resin is excellent in flame retardancy and low thermal expansion, and 2,2-bis (4-cyanatophenyl) isopropylidene and dicyclopentadiene type cyanate resin are used for controlling the crosslinking density, Excellent moisture resistance reliability. In particular, a phenol novolac type cyanate resin is preferred from the viewpoint of low thermal expansion. Furthermore, other cyanate resins may be used alone or in combination of two or more, and are not particularly limited.

  The said cyanate resin may be used independently, can also use together cyanate resin from which a weight average molecular weight differs, or can also use together the said cyanate resin and its prepolymer.

  By using these cyanate resins, it is possible to effectively exhibit heat resistance and flame retardancy.

  Moreover, the said curable resin can also be used in combination of 2 or more types. For example, when the epoxy resin is used as a curable resin, the cyanate resin can be used in combination for improving flame retardancy, and the maleimide compound is used in combination for improving heat resistance. be able to. Furthermore, when the cyanate resin is used as the curable resin, the epoxy resin can be used in combination for further improving heat resistance and flame retardancy.

  Although content of curable resin is not specifically limited, It is preferable that it is 5-70 mass% of the whole resin composition, and it is more preferable that it is 10-50 mass%. When the content of the curable resin is less than the lower limit, depending on the type of the curable resin, the viscosity of the varnish of the resin composition may be too low, and it may be difficult to form the prepreg 1. On the other hand, when the content of the curable resin exceeds the upper limit, the amount of other components is too small, and the mechanical strength of the prepreg 1 may be reduced depending on the type of the curable resin.

  Moreover, it is preferable that a resin composition contains an inorganic filler. Thereby, even if the prepreg 1 is thinned (for example, a thickness of 35 μm or less), the substrate 10 having excellent mechanical strength can be obtained. Furthermore, the reduction in thermal expansion of the substrate 10 can be improved.

  Examples of the inorganic filler include talc, alumina, glass, silica such as fused silica, mica, aluminum hydroxide, magnesium hydroxide and the like. Further, depending on the purpose of use of the inorganic filler, a crushed or spherical one is appropriately selected. Among these, from the viewpoint of excellent low thermal expansion, the inorganic filler is preferably silica, and more preferably fused silica (particularly spherical fused silica).

  In addition to the components described above, the resin composition may contain other components as necessary within a range that does not impair the effects of the present invention. Other components include, for example, thickeners such as olben and benton, silicone, fluorine and polymer antifoaming agents or leveling agents, adhesion imparting agents such as coupling agents, flame retardants, phthalocyanine blue And colorants such as phthalocyanine green, iodine green, disazo yellow, carbon black, anthraquinones, and the like.

<First embodiment>
<Laminated sheet manufacturing equipment (Laminated sheet manufacturing method)>
Next, the lamination sheet manufacturing apparatus 30 used for manufacture of the lamination sheet 40 is demonstrated, referring FIGS.

First, the outline | summary of the lamination sheet manufacturing apparatus 30 of this embodiment is demonstrated.
The laminated sheet manufacturing apparatus 30
A decompression chamber (space) 70 that is supplied with the supports 5a and 5b and the fiber base 2 and is decompressed by the decompression means 8, and the supports 5a and 5b and the fiber base 2 in the decompression chamber 70 are provided. A pressure-bonding means (rollers 72a and 72b) that forms a laminated body 40 ′ by pressure bonding, and two sheet materials 91a and 91b that sandwich the laminated body 40 ′ fed from the decompression chamber 70 are provided.
In a state where the stacked body 40 ′ is sandwiched between the two sheet materials 91 a and 91 b, a space 913 (see FIG. 5) between the sheet materials 91 a and 91 b communicates with the decompression chamber 70. By the operation of the decompression means 8, the space 913 is decompressed via the decompression chamber 70, and the space 913 is decompressed, so that the laminate 40 'is crushed by the two sheet materials 91a and 91b. Then, the supports 5a and 5b and the fiber base material 2 are pressure-bonded to obtain the laminated sheet 40.
Here, the fiber base 2 and the supports 5a and 5b are long and are continuously conveyed along the longitudinal direction thereof.

Next, the laminated sheet manufacturing apparatus 30 will be described in detail.
As shown in FIG. 1, the laminated sheet manufacturing apparatus 30 includes a housing 6, first rollers (feed rollers) 71a and 71b, second rollers 72a and 72b, and a third roller 73a housed in the housing 6. 73b, driven rollers 77a and 77b driven by the second rollers 72a and 72b, a sheet material 91a wound around the second roller 72a and the driven rollers 77a, a second roller 72b and a driven roller 77b. The sheet material 91b laid around, a plurality of sets of auxiliary rollers 78a and 78b, a heating means 92 for heating the sheet materials 91a and 91b, a cooling means 93 for cooling the sheet materials 91a and 91b, and the housing 6 Pressure reducing means 8 for reducing pressure. Hereinafter, the configuration of each unit will be described.

As shown in FIG. 2, the housing 6 has, for example, a box shape having a pair of wall portions 61 arranged to face each other at an interval. Although it does not specifically limit as a constituent material of the wall part 61, For example, various metals, such as iron, stainless steel, and aluminum, or the alloy containing these is mentioned. In addition to such a metal material, for example, a resin material such as polyethylene, polytetrafluoroethylene, or the like can be used as a constituent material of the wall portion 61.
Here, the wall 61 is preferably a flat plate, but is not limited thereto. The first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b form a cylindrical body that is open at both end surfaces along the sheet conveying direction. The wall part 61 should just close the said opening of this cylindrical body. In addition, it is especially preferable that the pair of wall portions 61 spans the rollers 71a, 71b, 72a, 72b, 73a, 73b.

  Between the two wall portions 61 of the housing 6, first rollers 71a and 71b, second rollers 72a and 72b, third rollers 73a and 73b, and driven rollers 77a and 77b are respectively installed. Yes. These rollers have rotation axes parallel to each other. And these rollers are connected with the motor (not shown) via the gear mechanism (not shown) in which many gearwheels are arrange | positioned, for example. And when this motor operates, the motive power will be transmitted through a gear mechanism, and each roller will rotate, respectively. These rollers have the same configuration except that the thicknesses are different. Hereinafter, although the structure of the 1st roller 71a is demonstrated typically, another roller is also the same structure.

As shown in FIG. 2, the first roller 71 a has a columnar outer shape, and includes a main body portion 74 located in the middle portion in the longitudinal direction and shafts 75 located at both ends of the main body portion 74. It is configured. Each shaft 75 has an outer diameter smaller than the outer diameter of the main body 74.

In the first roller 71 a, each shaft 75 is inserted into a bearing (bearing) 76 installed on the wall portion 61, and is supported by the wall portion 61 so as to be rotatable by the bearing 76.

In addition, although the 1st roller 71a is a solid thing in the structure shown in FIG. 1, FIG. 2, it is not limited to this, For example, a hollow body may be sufficient.

Moreover, it does not specifically limit as a constituent material of the 1st roller 71a, For example, the material which was mentioned by the constituent material of the wall part 61 can be used. In this case, the outer peripheral surface 741 of the main body 74 of the first roller 71a may be subjected to a process for preventing the outer peripheral surface 741 from being worn. As this process, for example, a method of forming a DLC (Diamond Like Carbon) film on the outer peripheral surface 741 can be mentioned. Further, as the constituent material of the first roller 71a, various rubber materials such as, for example, nitrile rubber, butyl rubber, urethane rubber, silicone rubber, fluorine rubber, in addition to the materials mentioned in the constituent material of the wall portion 61, are used. Can also be used.

The first roller 71a and the first roller 71b are arranged in parallel to each other in the horizontal direction, and the outer peripheral surfaces 741 of the main body portion 74 are in contact (pressure contact) with each other via the fiber base material 2. (See FIG. 2). When the first roller 71a and the first roller 71b rotate, the fiber base material 2 is conveyed from the left side to the right side in FIG. 1 between them, that is, sent out between the sheet materials 91a and 91b. be able to. Thereby, the sheet-like fiber base material 2 will be conveyed in the space 70 mentioned later.

The second roller 72a and the second roller 72b are arranged at positions different from the first rollers 71a and 71b, that is, in front of the fiber base 2 in the conveying direction (downstream side) with respect to the first rollers 71a and 71b. Has been. The second roller 72a and the second roller 72b are arranged in parallel to each other in the horizontal direction, and the outer peripheral surfaces 741 of the main body 74 are the fiber base material 2, the first resin layer 3, and the second resin. They are in contact (pressure contact) with each other via the layer 4. And if the 2nd roller 72a and the 2nd roller 72b rotate, the 1st resin layer 3 and the 2nd resin layer 4 will overlap with the fiber base material 2 between these. The laminated body of the fiber base 2 and the resin layers 3 and 4 is pressed in the thickness direction by the second roller 72a and the second roller 72b. At this time, the resin layers 3 and 4 The fiber base material 2 is preferably impregnated. However, the inside of the fiber base 2 is not completely filled with the resin layers 3 and 4. From the second roller 72a and the second roller 72b, a laminated body (unbonded body) 40 ′ of the fiber base material 2, the first resin layer 3, and the second resin layer 4 is sent out.
In addition, by using the second rollers 72a and 72b as heating rollers, the fiber base material 2 can be easily impregnated with the first resin layer 3 and the second resin layer 4.
By the second rollers 72a and 72b, the stacked body 40 ′ is sent out of the space 70 described later.

The third rollers 73a and 73b are spaced apart from each other with the fiber base 2 interposed therebetween. The third roller 73a is on the downstream side in the transport direction of the fiber base 2 of the first roller 71a disposed on one side (front side) of the fiber base 2, and one side of the fiber base 2 The second roller 72a is disposed on the upstream side in the transport direction of the stacked body 40 ′ of the second roller 72a disposed on the side (surface side).
The third roller 73b is on the downstream side in the transport direction of the fiber substrate 2 of the first roller 71b disposed on the other surface side (back surface side) of the fiber substrate 2, and the other surface of the fiber substrate 2 It arrange | positions in the conveyance direction upstream of laminated body 40 'of the 2nd roller 72b arrange | positioned at the side (back surface side).
The third roller 73a and the third roller 73b are spaced apart from each other in the vertical direction (vertical direction), and are opposed to each other in parallel in the horizontal direction. And if the 3rd roller 73a rotates, the protective sheet 51 can be peeled off from the 1st resin layer 3 of the 1st support body 5a (refer FIG. 1). Similarly, when the third roller 73b rotates, the protective sheet 51 can be peeled from the second resin layer 4 of the second support 5b (see FIG. 1).

  Further, the outer peripheral surface 741 of the main body 74 of the third roller 73a is formed on the outer peripheral surface 741 of the main body 74 of the first roller 71a and the outer peripheral surface 741 of the main body 74 of the second roller 72a, respectively. It is in contact. On the other hand, as for the 3rd roller 73b, the outer peripheral surface 741 of the main-body part 74 is respectively on the outer peripheral surface 741 of the main-body part 74 of the 1st roller 71b, and the outer peripheral surface 741 of the main-body part 74 of the 2nd roller 72b. It is in contact. With such an arrangement, the laminated sheet manufacturing apparatus 30 is surrounded by each wall portion 61 of the housing 6, the first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b. A space (small space, decompression chamber) 70 is formed. The space 70 is decompressed by the operation of the decompression means 8 (see FIG. 3).

  As shown in FIG. 2, both ends of each main body 74 of the first rollers 71a and 71b (the same applies to the second rollers 72a and 72b and the third rollers 73a and 73b) and the wall portions 61 A sealing material 62 is interposed therebetween. Each sealing material 62 is formed of a ring-shaped elastic body, and is inserted into a ring-shaped recess 612 formed in the wall portion 61 in a compressed state. Thereby, the airtightness of the space 70 is reliably maintained. Therefore, when the space 70 is decompressed by the decompression means 8, the decompression is performed quickly and reliably.

  The constituent material of the sealing material 62 is not particularly limited. For example, natural rubber, isoprene rubber, butadiene rubber, styrene-butadiene rubber, nitrile rubber, chloroprene rubber, butyl rubber, acrylic rubber, ethylene-propylene rubber, hydrin rubber, urethane rubber. , Various rubber materials such as silicone rubber and fluoro rubber (especially those vulcanized), styrene, polyolefin, polyvinyl chloride, polyurethane, polyester, polyamide, polybutadiene, trans polyisoprene, Various thermoplastic elastomers such as fluororubber-based and chlorinated polyethylene are listed, and one or more of these can be used in combination.

  As shown in FIG. 1, the first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b have different outer diameters (sizes) of the main body 74. . In the present embodiment, the magnitude relationship is (third roller) <(first roller) <(second roller). Further, the size of each of the first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b is arbitrary, but for example, a sheet material having flexibility in the rollers It is preferable that the sheet material is as small as possible without causing wrinkles in the sheet material. Specifically, the diameter is preferably 75 to 300 mm, and more preferably 100 to 200 mm.

  Further, assuming a triangle formed by connecting the centers of the first roller 71a, the second roller 72a, and the third roller 73a, an angle with the center of the third roller 73a of the triangle as a vertex Is preferably greater than 60 ° and less than 180 °. The same applies to the triangle formed by connecting the centers of the first roller 71b, the second roller 72b, and the third roller 73b.

  As shown in FIG. 1, a driven roller 77a is disposed on the right side of the second roller 72a in the drawing (downstream in the transport direction of the stacked body 40 ′) so as to be separated from the second roller 72a. . Further, a driven roller 77b is disposed on the right side (downstream in the transport direction of the stacked body 40 ′) of the second roller 72b in a state of being separated from the second roller 72b. The driven rollers 77 a and 77 b are also bridged between the two wall portions 61 of the housing 6. And these driven rollers 77a and 77b are arrange | positioned so that a rotating shaft may become parallel with respect to the rotating shaft of 2nd roller 72a, 72b. The driven rollers 77a and 77b have the same outer diameter as that of the second rollers 72a and 72b, respectively.

  A flexible sheet material 91a is wound around the second roller 72a and the driven roller 77a in an endless state, that is, in a loop shape. Thus, when the second roller 72a rotates, the rotational force is transmitted to the driven roller 77a via the sheet material 91a, and the driven roller 77a also rotates. At that time, the sheet material 91a is conveyed along the roller rotation direction, that is, counterclockwise in FIG.

Similarly, a flexible sheet material 91b is wound around the second roller 72b and the driven roller 77b in an endless state. Accordingly, when the second roller 72b rotates, the rotational force is transmitted to the driven roller 77b via the sheet material 91b, and the driven roller 77b also rotates. At that time, the sheet material 91b is conveyed along the roller rotation direction, that is, clockwise in FIG.
The sheet material 91a and the sheet material 91b are arranged in an atmosphere at atmospheric pressure or higher (in this embodiment, under atmospheric pressure).

  As shown in FIGS. 1, 5, and 6, the sheet material 91 a and the sheet material 91 b are transported in the same direction, and have an overlapping portion 911 that overlaps with each other, and the stacked body 40 ′ is overlapped by the overlapping portion 911. Can be sandwiched. That is, the laminated body 40 ′ sent from between the second rollers 72a and 72b is inserted between the sheet material 91a and the sheet material 91b.

  The constituent material of the sheet materials 91a and 91b is not particularly limited, and examples thereof include a metal foil, a polymer film, and an elastic body. Examples of the metal foil include copper, copper alloy, aluminum, aluminum alloy, silver, silver alloy, gold, gold alloy, zinc, zinc alloy, nickel, nickel alloy, tin, tin alloy, iron And metal foils such as iron-based alloys. Examples of the polymer film and elastic material include polyolefins such as polyethylene, polypropylene, and ethylene-vinyl acetate copolymer, modified polyolefins, polyamides (eg, nylon 6, nylon 46, nylon 66, nylon 610, nylon 612, nylon 11, nylon) 12, Nylon 6-12, Nylon 6-66), Thermoplastic polyimide, Aromatic polyester and other liquid crystal polymers, Polyphenylene oxide, Polyphenylene sulfide, Polycarbonate, Polymethyl methacrylate, Polyether, Polyetheretherketone, Polyetherimide, Polyacetal , Styrene, polyolefin, polyvinyl chloride, polyurethane, polyester, polyamide, polybutadiene, trans polyisoprene, fluoro rubber, Examples include various types of thermoplastic elastomers such as ricone rubber and chlorinated polyethylene, and copolymers, blends, polymer alloys, etc. mainly composed of these, and one or more of these are used in combination. be able to. Among these, in particular, by using a polymer film such as polyethylene terephthalate, polyethylene naphthalate, thermoplastic polyimide, aromatic polyester, polyamide, polyetheretherketone, polyetherimide, and polyphenylene sulfide as a sheet material, laminating properties, flatness There exists an advantage that it is excellent in property, peelability, and the adhesiveness of sheet materials.

  Further, as shown in FIG. 1, a plurality of sets of auxiliary rollers 78 a and 78 b are installed between the two wall portions 61 of the housing 6. Each of the auxiliary rollers 78a and 78b is rotatably supported by the wall portion 61 via a bearing (not shown). The auxiliary rollers 78a and 78b have a function of assisting the conveyance of the sheet materials 91a and 91b by the rotation of the second rollers 72a and 72b and the driven rollers 77a and 77b.

  The plurality of auxiliary rollers 78a are respectively arranged in a line along the transport direction of the stacked body 40 ′ between the second roller 72a and the driven roller 77a. The plurality of auxiliary rollers 78b are also arranged in a line between the second roller 72b and the driven roller 77b along the conveying direction of the stacked body 40 ′.

  Each of the auxiliary rollers 78a and 78b has a cylindrical shape as an outer shape, and has enlarged diameter portions 781 whose outer diameters are enlarged at both ends in the longitudinal direction. The diameter-enlarged portion 781 of each auxiliary roller 78a is in contact with the edge portion 912 parallel to the conveying direction of the overlapping portion 911 from the inside of the sheet material 91a. The enlarged diameter portion 781 of each auxiliary roller 78b is in contact with the edge portion 912 parallel to the conveying direction of the overlapping portion 911 from the inside of the sheet material 91b. By such an enlarged diameter portion 781, the edge portions 912 of the sheet materials 91a and 91b are tightly adhered to each other (see FIGS. 5 and 6). More specifically, the enlarged diameter portion 781 of the auxiliary roller 78a and the enlarged diameter portion 781 of the auxiliary roller 78b sandwiching the one edge portion 912 of the sheet material 91a and the one edge portion 912 of the sheet material 91b. Face each other and bring the edges 912 into close contact with each other. Further, the enlarged diameter portion 781 of the auxiliary roller 78a and the enlarged diameter portion 781 of the auxiliary roller 78b face each other across the one edge portion 912 of the sheet material 91a and the one edge portion 912 of the sheet material 91b. The edges 912 are brought into close contact with each other. Thereby, a bag-like body is constituted by the sheet material 91a and the sheet material 91b, and a space 913 is formed inside thereof, that is, between the sheet material 91a and the sheet material 91b (see FIG. 5). . The stacked body 40 ′ is temporarily (temporarily) stored in the space 913. Note that the space 913 communicates with the space 70.

  The auxiliary rollers 78a and 78b are solid in the configurations shown in FIGS. 1, 5, and 6, but are not limited thereto, and may be hollow, for example.

  Moreover, it does not specifically limit as a constituent material of the auxiliary | assistant rollers 78a and 78b, For example, the material which was mentioned by the constituent material of the 1st roller 71a can be used.

As shown in FIG. 3, the decompression unit 8 includes a pump 81 and a connection pipe 82 that connects the pump 81 and an opening 611 formed in each wall 61.
The pump 81 is installed outside the housing 6, and for example, a vacuum pump is applied.
Driving the pressure reducing means 8 for reducing the pressure inside the space 70 surrounded by the rollers 71a, 71b, rollers 72a, 72b, and rollers 73a, 73b, the upstream side of the first roller 71a, 71b in the conveying direction of the fiber substrate 2 The atmospheric pressure in the space 70 becomes lower than that in the region, and becomes negative pressure. Furthermore, the air pressure in the space 70 is lower than the area on the downstream side in the conveyance direction of the stacked body 40 ′ from the second rollers 72 a and 72 b and outside the space between the sheet materials 91 a and 91 b.

Each connection pipe 82 is a hard pipe made of a metal material such as stainless steel.

  Each opening 611 opens toward the space 70 and communicates with the space 70. In the configuration illustrated in FIG. 3, the opening portions 611 are formed in both the wall portions 61, but the present invention is not limited thereto. For example, the opening portion 611 may be formed only in one wall portion 61. .

  Then, by operating the pump 81, the gas (air G) in the space 70 can be sucked from each opening 611, and thus the space 70 can be decompressed. Further, as a result, a force that causes the adjacent rollers to approach each other is generated and further pressed against each other, so that the airtightness of the space 70 is more reliably maintained.

  Further, when the space 70 is depressurized by the operation of the depressurizing means 8, the space (913) communicating with the space 70 is also depressurized by sucking the gas (air) therein. At this time, if the laminated body 40 ′ is stored in the space 913, that is, if the laminated body 40 ′ is sandwiched between the sheet materials 91a and 91b, the laminated body 40 together with the sheet materials 91a and 91b. Can be crushed (see FIG. 6). Thereby, the laminated body 40 ′ is pressed with a uniform force F3 by the sheet materials 91a and 91b over the entire surface (entirely), and the first resin layer 3 and the second resin layer 4 are applied to the fiber base 2. Are securely crimped and joined (see FIGS. 5 and 6). As a result, the first resin layer 3 and the second resin layer 4 are further impregnated into the fiber base 2. The laminated body 40 ′ becomes the laminated sheet 40.

As shown in FIG. 1, the heating means 92 is composed of a heating wire such as a nichrome wire, for example, and is installed in the immediate vicinity of the auxiliary rollers 78a and 78b. The heat is transmitted by the heating means 92 through each auxiliary roller 78a to heat the edge 912 of the sheet material 91a, and is transmitted through each auxiliary roller 78b to heat the edge 912 of the sheet material 91b. As a result, the edge portion 912 of the sheet material 91a and the edge portion 912 of the sheet material 91b are respectively softened, and the two edge portions 912 are securely adhered to each other. In this way, the sheet materials 91a and 91b in which the edge portions 912 are securely adhered to each other are prevented from being leaked from unintentional portions, that is, the edge portions 912, and thus are reliably decompressed by the operation of the decompression means 8. The
Furthermore, the heating unit 92 can heat the stacked body 40 ′ along the width direction via the auxiliary rollers 78a and 78b. By heating the laminated body 40 ′, the fiber base 2 is more easily impregnated with the first resin layer 3 and the second resin layer 4. That is, the impregnation means is constituted by the heating means 92 and the auxiliary rollers 78a and 78b.

  Moreover, the cooling means 93 is comprised by the Peltier element, for example, and is installed in the part vicinity on the opposite side to the overlap part 911 of the sheet | seat material 91a, and the part vicinity on the opposite side to the overlap part 911 of the sheet | seat material 91b. The edge 912 softened by the heating means 92 is conveyed and passes through the cooling means 93 while facing the cooling means 93. Thereby, the softened edge portion 912 after the contact can be once cooled, and thus it is possible to reliably prevent the edge portion 912 from being excessively heated by the heating means 92.

  Next, a state (process) in which the laminated sheet 40 is manufactured by the laminated sheet manufacturing apparatus 30 will be described with reference to FIGS. 1, 4, and 5.

In the laminated sheet manufacturing apparatus 30, before the first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b rotate, the decompression unit 8 is operated to The air is sucked to reduce the pressure in the space 70.
The atmospheric pressure in the space 70 is a negative pressure, and is, for example, 800 Pa or less and 100 Pa or more.

As shown in FIG. 1, when the first roller 71a and the first roller 71b rotate, the fiber base material 2 is sent out from between these rollers into the space 70 (continuously supplied).
The fiber base material 2 is wound around a supply roller (not shown), for example, and is supplied into the space S from the supply roller via the first roller 71a and the first roller 71b.

  Further, when the second roller 72a and the third roller 73a rotate, the first support 5a is sent out from between these rollers into the space 70 (continuously supplied). The protective sheet 51 of the first support body 5a is wound (pulled) along the outer peripheral surface of the third roller 73a, whereby the protective sheet 51 is removed from the first resin layer 3 with the supporting base material. It is peeled off. The first resin layer 3 with the supporting base material from which the protective sheet 51 has been peeled gradually approaches the fiber base material 2 along the second roller 72a. The peeled protective sheet 51 is sent out in a direction different from that of the second rollers 72a and 72b by the first roller 71a and the third roller 73a. Specifically, it is sent out from between the first roller 71a and the third roller 73a toward the outside (outside the space 70). The first resin layer 3 is in a B-stage state and is in a solid, semi-solid, or liquid state.

Further, when the second roller 72b and the third roller 73b rotate, the second support 5b is sent out from between these rollers into the space 70 (continuously supplied). The protective sheet 51 of the second support 5b is wound around the third roller 73b, whereby the protective sheet 51 is peeled from the second resin layer 4 with the support base. The second resin layer 4 with the supporting base material from which the protective sheet 51 has been peeled gradually approaches the fiber base material 2 along the second roller 72b. The peeled protective sheet 51 is sent out in a direction different from that of the second rollers 72a and 72b by the first roller 71b and the third roller 73b. Specifically, the sheet is fed outward from between the first roller 71b and the third roller 73b.
The second resin layer 4 is in a B-stage state and is in a solid, semi-solid, or liquid state.

As described above, the protective sheet 51 can be peeled off in the space 70 immediately before (before) the first resin layer 3 and the second resin layer 4 are pressure-bonded to the fiber base material 2, respectively. Can be prevented from interfering with the pressure bonding of each resin layer, and each resin layer can be protected with the protective sheet 51 until just before the pressure bonding.

And the fiber base material 2, the 1st resin layer 3 with a support base material, and the 2nd resin layer 4 with a support base material collectively between the 2nd roller 72a and the 2nd roller 72b. Will pass through.
At this time, the support base material provided on the first resin layer 3 contacts the second roller 72a, and the support base material provided on the first resin layer 3 contacts the second roller 72b. . The first resin layer 3 and the second resin layer 4 are in direct contact with the fiber substrate 2. As shown in FIG. 4, the first resin layer 3 is pressed against the fiber substrate 2 from above (pressing force) by the pressure contact force (contact force) F1 between the second roller 72a and the second roller 72b. And the second resin layer 4 is pressed against the fiber substrate 2 from below. Thereby, laminated body 40 'is obtained. The stacked body 40 ′ is continuously discharged from between the second roller 72a and the second roller 72b and supplied between the pair of sheet materials 91a and 91b.
Here, the fiber substrate 2 or the like is continuously supplied or discharged is intended to exclude a fiber substrate or the like that is intermittently supplied or discharged, such as a single wafer type. It is. For example, the purpose is to exclude a state in which the fiber base material 2 or the like is present in the space 70 and a state in which the fiber base material 2 is not present alternately in a short period. However, you may stop conveyance of the fiber base material 2 grade | etc., As needed.

  Further, as described above, the space 70 is decompressed by the operation of the decompression means 8. Thereby, as shown in FIG. 4, the decompression force F <b> 2 generated in the space 70 is pressed against the fiber substrate 2 of the first resin layer 3 and the fiber substrate 2 of the second resin layer 4. The pressing can be assisted.

The pressing by the pressure contact force F1 and the pressing by the pressure reduction force F2 can be combined to strongly press the resin layers 3 and 4 to the fiber substrate 2. Thereby, the resin layers 3 and 4 can be impregnated inside the fiber base material 2. In addition, by using the second roller 72a and the second roller 72b as heating rollers, the resin layers 3 and 4 can be easily impregnated into the fiber base 2.
Furthermore, by reducing the pressure in the space 70, the gas inside the fiber base 2 is sucked, and voids are less likely to occur in the resin layer impregnated inside the fiber base 2.
The second roller 72a and the second roller 72b impregnate part of the resin layers 3 and 4 into the fiber base 2 but do not impregnate completely. In this step, although the resin layers 3 and 4 impregnate the fiber base material 2, the fiber base material 2 inside the laminated body 40 ′ sent out from the second rollers 72 a and 72 b is a fiber located in the space 70. It communicates with the inside of the substrate 2.

And when passing between the 2nd roller 72a and the 2nd roller 72b, laminated body 40 'will be pinched | interposed with a pair of sheet material 91a, 91b. Thereafter, the laminated body 40 ′ is conveyed in a certain section while being sandwiched between the pair of sheet materials 91a and 91b.
Here, since the space 913 between the pair of sheet materials 91 a and 91 b communicates with the space 70, when the inside of the space 70 is decompressed by the decompression means 8, the gas inside the space 913 is passed through the space 70. The space 913 is also decompressed by being sucked by the decompression means 8. Thereby, a negative pressure is generated, a force is generated to bring the sheet materials 91a and 91b closer to each other, and the stacked body 40 ′ is pressed from the thickness direction by the pair of sheet materials 91a and 91b. . As a result, the impregnation of the resin layers 3 and 4 into the fiber base 2 further proceeds, and the resin layers 3 and 4 and the fiber base 2 are firmly fixed.

Moreover, the fiber base material 2 is a porous material in which holes communicating with the front and back surfaces are formed while communicating with the conveyance direction. The hole in the fiber base 2 located between the pair of sheet materials 91a and 91b communicates with the hole in the fiber base 2 located in the space 70 through another hole. Therefore, by reducing the pressure in the space 70, the inside of the fiber base material 2 positioned between the pair of sheet materials 91 a and 91 b is reduced in pressure via the fiber base material 2 positioned in the space 70. Thereby, in laminated body 40 'pinched by a pair of sheet material 91a, 91b, when resin layers 3 and 4 impregnate the fiber base material 2 inside, gas will remain inside the fiber base material 2 And the generation of voids in the fiber base 2 can be suppressed.
In addition, the end surface of the fiber base 2 on the conveyance direction side is not covered with the resin layers 3 and 4 and is exposed. Since the hole in the fiber base 2 communicates with the end surface on the transport direction side, the gas is sucked from the end surface on the transport direction side through the space 913 and further through the space 70, The inside of the material 2 is also decompressed. Also by this, when the resin layers 3 and 4 impregnate the inside of the fiber base material 2 between a pair of sheet material 91a, 91b, it can suppress that gas remains in the fiber base material 2 inside.

Furthermore, since the laminated body 40 ′ between the pair of sheet materials 91a and 91b is heated via the auxiliary rollers 78a and 78b, the resin layers 3 and 4 are easily impregnated into the fiber base 2.
Furthermore, since the inside of the fiber base material 2 located between the pair of sheet materials 91a and 91b is depressurized, the resin layers 3 and 4 are thereby pulled toward the inside of the fiber base material 2, and the resin layers 3 and 4 Impregnation into the fiber base 2 further proceeds.
The state in which the inside of the fiber base material 2 located between the pair of sheet materials 91a and 91b is depressurized continues until the resin layers 3 and 4 are almost completely impregnated into the inside of the fiber base material 2. Therefore, the impregnation of the resin layers 3 and 4 into the fiber base 2 proceeds while the laminate 40 ′ is being conveyed. While the laminate 40 ′ is being conveyed by the pair of sheet materials 91 a and 91 b, the impregnation of the resin layers 3 and 4 into the fiber base 2 may proceed, and during the conveyance, the resin layer The impregnation of the 3, 4 fiber base 2 may be completed.

The ends of the pair of sheet materials 91a and 91b sandwiching the stacked body 40 'are heated and pressed by the auxiliary rollers 78a and 78b to be in close contact with each other.
Moreover, although the inner area | region of the sheet | seat materials 91a and 91b which opposes is pressure-reduced, the area | region of the outer side of a pair of sheet | seat materials 91a and 91b is an atmosphere more than atmospheric pressure (under atmospheric pressure in this embodiment). Thereby, a force of atmospheric pressure or higher is applied to the pair of sheet materials 91a and 91b and the stacked body 40 ′ inside the pair of sheet materials 91a and 91b from the outside. Also by this, the impregnation of the resin layers 3 and 4 into the fiber base 2 can be promoted.

  As described above, for example, the laminated sheet 40 in which each resin layer is reliably and firmly bonded to the fiber base material 2 can be manufactured regardless of the thickness and composition of the first resin layer 3 and the second resin layer 4. it can.

  Thus, the obtained lamination sheet 40 is extruded to the left side in FIG. At that time, the sheet material 91 a is wound around the driven roller 77 a and peeled from the laminated sheet 40, and the sheet material 91 b is wound around the driven roller 77 b and peeled from the laminated sheet 40.

  Further, in the laminated sheet manufacturing apparatus 30, the time for crushing the laminated body 40 ′ between the sheet materials 91a and 91b can be secured longer than, for example, the time for simply crushing between the pair of rollers. Thereby, the 1st resin layer 3 and the 2nd resin layer 4 can be reliably and firmly joined to the fiber base material 2, ie, can be impregnated.

  Further, in the laminated sheet manufacturing apparatus 30, the space to be decompressed can be a space 70 surrounded by the first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b. As small as possible. Thereby, the lamination sheet manufacturing apparatus 30 becomes a small thing. Further, when the decompression means 8 is operated, the decompression can be performed quickly. Further, high vacuum can be achieved.

  Further, when the fiber base material 2 and the first resin layer 3 are joined, even if air is accumulated between them, the air can be pushed out by the pressure contact force F1, and thus the air is retained and the joining is performed. Can be reliably prevented (the same applies to the bonding of the fiber base 2 and the second resin layer 4).

<Board>
Next, the substrate 10 using the prepreg 1 will be described with reference to FIG. A substrate 10 shown in FIG. 8 includes a laminate 11 and metal layers 12 provided on both sides of the laminate 11.

  The laminate 11 includes two prepregs 1 arranged with the second resin layers 4 facing each other, and a fiber base material 13 sandwiched between the second resin layers 4.

  As the fiber base material 13, the same fiber base material 2 as described above can be used. In the present embodiment, since the second resin layer 4 has the characteristics (flexibility) as described above, at least a part of the fiber base material 13 is reliably embedded in the second resin layer 4. (Buried).

  The metal layer 12 is a part that is processed into a wiring part, for example, by bonding a metal foil such as a copper foil or an aluminum foil to the laminate 11, or plating copper or aluminum on the surface of the laminate 11. It is formed. In the present embodiment, since the first resin layer 3 has the characteristics as described above, the metal layer 12 can be held with high adhesion and the metal layer 12 can be used as a wiring portion with high processing accuracy. It can be formed.

  The peel strength between the metal layer 12 and the first resin layer 3 is preferably 0.5 kN / m or more, and more preferably 0.6 kN / m or more. Thereby, the connection reliability in the semiconductor device 100 (refer FIG. 9) obtained by processing the metal layer 12 into a wiring part can be improved more.

  For such a substrate 10, two prepregs 1 in which a metal layer 12 is formed on the first resin layer 3 are prepared, and a fiber base material 13 is sandwiched between these prepregs 1. Can be used.

  The substrate 10 may include a laminate in which the fiber base 13 is omitted, and the two prepregs 1 are formed by directly joining the second resin layers 4 together, and the metal layer 12 is omitted. It may be a thing.

<Semiconductor device>
Next, the semiconductor device 100 using the substrate 10 will be described with reference to FIG. In FIG. 9, the fiber base materials 2 and 13 are omitted, and the first resin layer 3 and the second resin layer 4 are shown as an integral unit.

  A semiconductor device 100 shown in FIG. 9 includes a multilayer substrate (multilayer printed wiring board (circuit board)) 200, a pad portion 300 provided on the upper surface of the multilayer substrate 200, and a wiring portion 400 provided on the lower surface of the multilayer substrate 200. And a semiconductor element 500 mounted on the multilayer substrate 200 by connecting bumps 501 to the pad portion 300.

  The multilayer substrate 200 includes a substrate 10 provided as a core substrate, three prepregs 1a, 1b, 1c provided on the upper side of the substrate 10, and three prepregs 1d, 1e provided on the lower side of the substrate 10. 1f. The fiber base material 2, the first resin layer 3, and the second resin layer 4 constituting the prepregs 1a to 1c, respectively, from the substrate 10, the fiber base material 2 constituting the prepregs 1d to 1f, the first The arrangement order of the resin layer 3 and the second resin layer 4 from the substrate 10 is the same. That is, the prepregs 1a to 1c and the prepregs 1d to 1f are inverted from each other.

  The multilayer substrate 200 includes a circuit unit 201a provided between the prepreg 1a and the prepreg 1b, a circuit unit 201b provided between the prepreg 1b and the prepreg 1c, and a prepreg 1d and the prepreg 1e. The circuit portion 201d is provided, and the circuit portion 201e is provided between the prepreg 1e and the prepreg 1f.

  Furthermore, the multilayer substrate 200 is provided through each of the prepregs 1a to 1f, and includes a conductor portion 202 that electrically connects adjacent circuit portions or between the circuit portion and the pad portion.

  Each metal layer 12 of the substrate 10 is processed into a predetermined pattern, and the processed metal layers 12 are electrically connected to each other by a conductor portion 203 provided through the substrate 10.

  In the semiconductor device 100 (multilayer substrate 200), four or more prepregs 1 may be provided on one side of the substrate 10. Furthermore, the semiconductor device 100 may include a prepreg other than the prepreg 1.

<Second embodiment>
Next, a second embodiment of the present invention will be described with reference to FIGS.
The manufacturing apparatus 30A of the present embodiment will be described in detail.
The manufacturing apparatus 30A deletes the pair of sheet materials 91a and 91b from the manufacturing apparatus 30 and replaces the auxiliary rollers 78a and 78b of the manufacturing apparatus 30 with auxiliary rollers 78c and 78d. Further, the driven rollers 77a and 77b of the manufacturing apparatus 30 are replaced with rollers 77c and 77d. Further, the manufacturing apparatus 30 </ b> A does not have the cooling means 93. Other points are the same as those of the manufacturing apparatus 30.
The auxiliary rollers 78c and 78d are cylindrical rollers, and do not have the enlarged-diameter portion 781 unlike the auxiliary rollers 78a and 78b of the above-described embodiment. As shown also in FIG. 11, the outer peripheral surfaces of the auxiliary rollers 78c and 78d abut over the entire width direction orthogonal to the transport direction of the stacked body 40A ′.
The auxiliary rollers 78c and 78d are heating rollers and are heated by the heating means 92. That is, the heating means 92 and the auxiliary rollers 78c and 78d constitute an impregnation means.
The rollers 77c and 77d are conveying rollers that convey the laminated sheet 40A, and are spanned between the pair of wall portions 61. The rotation axes of the rollers 77c and 77d are parallel to the rollers 72a and 72b.
The rollers 77c and 77d have a rotating shaft connected to the motor, and when the motor is operated, the power is transmitted through the gear mechanism and rotates.

A method for manufacturing the laminated sheet 40A using such a manufacturing apparatus 30A will be described.
First, the interior of the space 70 is depressurized in advance as in the above embodiment.
Next, the fiber base material 2 is continuously supplied into the space 70 as in the above embodiment.
Further, when the second roller 72a and the third roller 73a rotate, the sheet 5c is sent out from between these rollers into the space 70 (continuously supplied).
Here, the sheet 5c will be described. This sheet 5 c includes a protective sheet 51, a resin layer 3, and a sheet material 52. The protective sheet 51 and the sheet material 52 are disposed to face each other with the resin layer 3 interposed therebetween.
Although it does not specifically limit as the sheet | seat material 52, A polymer film is mention | raise | lifted and PET etc. are mention | raise | lifted.
As in the above-described embodiment, the protective sheet 51 is wound (pulled) along the outer peripheral surface of the third roller 73a, and the protective sheet 51 is peeled off from the first resin layer 3. .

On the other hand, when the second roller 72b and the third roller 73b rotate, the sheet 5d is fed into the space 70 from between these rollers (continuously supplied).
Here, the sheet 5d will be described. This sheet 5 d includes a protective sheet 51, a resin layer 4, and a sheet material 52. The protective sheet 51 and the sheet material 52 are disposed to face each other with the resin layer 4 interposed therebetween.
In this sheet 5 d, the protective sheet 51 is wound around the third roller 73 b, whereby the protective sheet 51 is peeled from the second resin layer 4.
The fiber substrate 2, the first resin layer 3 with the sheet material 52, and the second resin layer 4 with the sheet material 52 pass between the second roller 72 a and the second roller 72 b at a time. It becomes.
At this time, as in the above embodiment, the resin layers 3 and 4 are impregnated into the fiber base 2 to obtain a laminate 40A ′. And like the said embodiment, although a part of resin layers 3 and 4 impregnate the inside of the fiber base material 2 by the 2nd roller 72a and the 2nd roller 72b, it does not impregnate completely. In this step, although the resin layers 3 and 4 impregnate the fiber base material 2, the fiber base material 2 inside the laminated body 40 </ b> A ′ sent out from the second rollers 72 a and 72 b is a fiber located in the space 70. It communicates with the inside of the substrate 2.

Here, FIG. 11 shows a cross-sectional view of the fiber base 2 and the resin layers 3 and 4 in the EE direction of FIG. The width dimension in the direction orthogonal to the conveyance direction of the fiber base material 2 is smaller than the width dimension in the direction orthogonal to the conveyance direction of the first resin layer 3 and the second resin layer 4.
The fiber substrate 2, the first resin layer 3, and the second resin layer 4 are pressure-bonded by the pair of second rollers 72a and 72b. At this time, one end portion in the width direction of the first resin layer 3 (one end portion in the transport direction) and one end portion in the width direction of the second resin layer 4 (in the transport direction). One end portion) and the other end portion in the width direction of the first resin layer 3 and the other end portion in the width direction of the second resin layer 4 are pressed (thermocompression bonding). Thermocompression bonding). The end portions in the width direction of the resin layers 3 and 4 are melt-bonded to form a bonded portion, and the fiber base 2 is included in the first resin layer 3 and the second resin layer 4. . That is, both end portions in the width direction of the stacked body 40A ′ are in a sealed state. In addition, the dimension of the width direction of the sheet material 52 may be equal to the first resin layer 3 and the second resin layer 4, and from the width dimension of the first resin layer 3 and the second resin layer 4. May be longer.

The stacked body 40A ′ is continuously sent out from the space 70 by the second rollers 72a and 72b, and is conveyed by the auxiliary rollers 78c and 78d and the rollers 77c and 77d.
Here, the fiber base material 2 is a porous material in which a plurality of holes are formed. The holes formed in the fiber base 2 communicate with each other in the laminate transport direction via other holes, and further communicate with the front and back surfaces of the fiber base 2. Therefore, even if the fiber base material 2 is located outside the space 70, the inside communicates with the space 70. In other words, it can be said that the space inside the pair of sheet materials 52 communicates with the space 70.

The gas inside the fiber base 2 located outside the space 70 is sucked by the decompression means 8 through the holes inside the fiber base 2 and the space 70, and the inside of the fiber base 2 becomes negative pressure. In particular, since both end portions in the width direction of the stacked body 40A ′ are in a sealed state, the gas inside the fiber base 2 can be reliably sucked. The resin layers 3 and 4 are firmly adhered to the fiber substrate 2 by reducing the pressure inside the fiber substrate 2.
Since the laminated body 40A ′ is conveyed and heated by the auxiliary rollers 78c and 78d, the impregnation of the resin layers 3 and 4 into the fiber base material 2 also proceeds in the laminated body 40A ′ sent out from the space 70. To do. The impregnation of the resin layers 3 and 4 into the fiber base 2 proceeds while the laminate 40A ′ is being conveyed.

The gas inside the fiber base 2 located outside the space 70 is sucked by the decompression means 8 through the holes and the space 70 inside the fiber base 2, and this suction is performed by the resin layers 3 and 4. Will continue until the fiber base material 2 is impregnated to a certain extent. That is, while the gas inside the fiber base 2 is being sucked into the decompression means 8, the impregnation of the fiber base 2 with the resin layers 3 and 4 proceeds. Thereby, the resin layers 3 and 4 are easily impregnated with the fiber base material 2, and a void is prevented from being generated inside the fiber base material 2.
Further, since both ends of the laminated body 40A ′ in the width direction are formed with joint portions in which the end portions of the resin layers 3 and 4 are melt-bonded, while being conveyed by the auxiliary rollers 78c and 78d, It is possible to prevent gas from flowing into the inside of the fiber base 2 from the end face side of the fiber base 2. Therefore, the gas inside the fiber base material 2 of the laminated sheet 40 located outside the space 70 can be reliably sucked.
In addition, in the manufacturing apparatus 30A, the impregnation of the fiber base material 2 with the resin layers 3 and 4 proceeds while the laminated body 40A ′ delivered from the space 70 is being conveyed. During the conveyance, the impregnation of the resin layers 3 and 4 into the fiber base material 2 may be completed, and while the laminate 40A ′ is being conveyed, the fiber base material 2 of the resin layers 3 and 4 is transferred. The impregnation of may proceed.

  In the present embodiment, the downstream side in the transport direction of the stacked body 40A ′ with respect to the second roller 72a and the second roller 72b is an atmosphere (atmospheric pressure in the present embodiment) of atmospheric pressure or higher. Due to the second roller 72a and the second roller 72b, the stacked body 40A ′ is sent out in an atmosphere of atmospheric pressure or higher. Thereby, laminated body 40A 'will be pressurized from the outside with the force more than atmospheric pressure, and can promote the impregnation to the fiber base material 2 inside of the resin layers 3 and 4. FIG.

The laminated sheet 40A obtained as described above is pushed to the left in FIG. 10 by the rollers 77c and 77d.
According to such this embodiment, in addition to the effect mentioned above, there can exist an effect similar to 1st embodiment.

  As mentioned above, although the laminated sheet manufacturing apparatus and laminated sheet of this invention were demonstrated about embodiment of illustration, this invention is not limited to this, Each part which comprises a laminated sheet manufacturing apparatus and a laminated sheet is the same. It can be replaced with any structure that can perform its function. Moreover, arbitrary components may be added.

  In the configuration shown in FIG. 1, the pair of third rollers is installed in the laminated sheet manufacturing apparatus, but the present invention is not limited to this, and for example, an odd number of three or more sets may be installed.

In addition, each first roller, each second roller, and each third roller are different from each other in the outer diameter of the main body in the configuration shown in FIG. The outer diameters of the parts may be the same.

  Moreover, the laminated sheet manufacturing apparatus may be configured to dry a laminated sheet fed from between two sheets.

  Further, in the configuration shown in FIG. 7, the laminated sheet has a resin layer bonded to both sides of the fiber base material, but is not limited thereto, and the resin layer is bonded only to one side of the fiber base material. It may be. A laminated sheet having such a configuration can also be produced by a laminated sheet production apparatus.

In the configuration shown in FIG. 7, the laminated sheet is a fiber base material impregnated with the first resin composition and the second resin composition, respectively, but is not limited thereto. It may be. The first example is a laminated sheet in which the first resin composition is impregnated throughout the thickness direction of the fiber base material and the second resin composition is not impregnated. The second example is a laminated sheet in which the second resin composition is impregnated throughout the thickness direction of the fiber base material and not impregnated with the first resin composition. The third example is a laminated sheet in which the first resin composition is impregnated in a part of the fiber base in the thickness direction and the second resin composition is not impregnated. The fourth example is a laminated sheet in which the second resin composition is impregnated in a part of the fiber base in the thickness direction and the first resin composition is not impregnated. Even in the laminated sheets of the above four examples, the first resin composition and the second resin composition may have different compositions from each other, or may have the same composition. And the lamination sheet of such a structure can also be manufactured with a lamination sheet manufacturing apparatus.

Further, in the configuration shown in FIG. 7, the thickness of the impregnated portions 31 and 41 is equal and the thickness of the non-impregnated portions 32 and 42 is equal, but the thickness of the impregnated portions 31 and 41 may be different. The thickness of the non-impregnated portions 32 and 42 may be different. A laminated sheet having such a configuration can also be produced by a laminated sheet production apparatus.

  In addition, the laminated sheet has a fiber base material in the configuration shown in FIG. 7, but is not limited thereto. For example, the laminated sheet has a base material such as a printed wiring board instead of the fiber base material. Also good.

Moreover, in 1st embodiment, although the resin layer was arrange | positioned on the front and back of the fiber base material 2, you may provide a resin layer only in one surface of the fiber base material 2. FIG.
Further, in each of the above embodiments, the resin layers 3 and 4 are impregnated into the fiber base material 2 by the rollers 72a and 72b. However, the present invention is not limited to this, and the resin layers 3 and 4 are made of fibers by the rollers 72a and 72b. The base material 2 may not be impregnated. In such a case, for example, in the first embodiment, the distance in the longitudinal direction of the pair of sheet materials 91a and 91b is very long, so that the stacked body 40 ′ is conveyed by the pair of sheet materials 91a and 91b. The resin layers 3 and 4 can be completely impregnated into the fiber base 2.

The invention as described above is based on the following configuration.
(1) A laminated sheet manufacturing apparatus for manufacturing a laminated sheet by joining the resin layer of a support having a resin layer composed of a solid or semi-solid resin composition to one or both sides of a thin plate-like substrate. The resin layer and the base material are overlapped, and two sheet materials sandwiching an unjoined body that is not yet joined, and the unjoined body is sandwiched between the two sheet materials. Pressure reducing means for decompressing the space between the sheet materials in a state, and when the space is decompressed by the operation of the pressure reducing means, the unbonded body is crushed together with the sheet material, and the resin layer and the base A laminated sheet manufacturing apparatus configured to crimp a material to obtain the laminated sheet.
(2) The laminated sheet manufacturing apparatus according to (1), wherein after the pressure bonding between the resin layer and the base material, the two sheet materials are peeled off from the laminated sheet.
(3) The laminated sheet manufacturing apparatus according to (1) or (2), further including a pair of rollers in which the two sheet materials are wound in an endless state and transport the sheet material.
(4) The laminated sheet manufacturing apparatus according to any one of (1) to (3), wherein the space is decompressed while conveying the two sheet materials in the same direction.
(5) The above includes a plurality of auxiliary rollers between the pair of rollers for hermetically adhering edges parallel to the conveyance direction of the two sheet materials while conveying the two sheet materials. (3) Or the laminated sheet manufacturing apparatus as described in (4).
(6) The laminated sheet manufacturing apparatus according to (5), further including a heating unit that heats and softens the edges when the edges of the two sheets are brought into close contact with each other.
(7) The laminated sheet manufacturing apparatus according to (6), further including a cooling unit that cools the softened edge after the edges are in close contact with each other.
(8) a housing having a pair of wall portions arranged to face each other, wherein an opening is formed in at least one of the pair of wall portions, and the pair on the one roller side of the pair of rollers. A pair of feeding rollers that feed the base material between the two sheet members, and the space includes the one roller, the pair of wall portions, and the pair of walls. Surrounded by a feeding roller, communicates with a small space where the opening is opened, and the operation of the pressure reducing means reduces the pressure of the space by sucking air from the opening through the small space. The laminated sheet manufacturing apparatus according to any one of (3) to (7) above.
(9) The laminated sheet manufacturing apparatus according to (8), wherein the decompression unit includes a pump and a connection pipe connected to the pump and the opening.
(10) The laminated sheet manufacturing apparatus according to any one of (1) to (9), wherein each of the two sheet materials is made of a polymer film.
This application claims the priority on the basis of the JP Patent application 2011-076664 for which it applied on March 30, 2011, and takes in those the indications of all here.
Hereinafter, examples of the reference form will be added.
<Appendix>
(Appendix 1)
In the method for producing a laminated sheet in which the resin layer of the sheet having a resin layer is joined to one or both sides of a long thin plate-like substrate to produce a laminated sheet,
The base material is a fiber base material in which holes communicating with the front and back surfaces are formed while communicating in the transport direction,
A step of conveying the sheet and the base material in a decompression chamber decompressed by a decompression means, and contacting the resin layer of the sheet and the base material in a decompressed state to form a laminate;
Sending the laminate from the decompression chamber;
Sandwiching the laminate with a pair of sheet materials;
The space inside the pair of sheet materials, which is located outside the decompression chamber and sandwiches the laminate, communicates with the decompression chamber, and the space inside the pair of sheet materials is decompressed by the decompression means. The manufacturing method of a lamination sheet including the process to do.
(Appendix 2)
In the method for producing a laminated sheet according to appendix 1,
In the step of decompressing the space inside the pair of sheet materials, a method for manufacturing a laminated sheet in which the laminated body is heated.
(Appendix 3)
In the method for producing a laminated sheet according to appendix 1 or 2,
While the base material is continuously supplied to the decompression chamber, the base material is continuously sent out from the decompression chamber,
In the step of decompressing the space inside the pair of sheet materials by the decompression means,
The manufacturing method of the lamination sheet by which the gas of the space inside the said base material inside the said pair of sheet material is attracted | sucked by attracting | sucking the gas inside the said base material located in the said decompression chamber with the said pressure reduction means.
(Appendix 4)
In the method for producing a laminated sheet according to appendix 3,
In the step of decompressing the space inside the pair of sheet materials by the decompression means,
A method for producing a laminated sheet in which the resin layer is impregnated into the substrate.
(Appendix 5)
In the method for producing a laminated sheet according to appendix 4,
In the step of forming a laminate, the laminate and sheet are pressure-bonded, and the laminate sheet is impregnated with the resin layer of the sheet.
(Appendix 6)
In the method for producing a laminated sheet according to any one of appendices 3 to 5,
In the step of constructing the laminate,
Production of a laminated sheet in which the resin layers of the sheet are superposed on the front and back surfaces of the base material, and the end portions along the transport direction of the resin layers are pressure-bonded to each other so that the base material is included between the resin layers. Method.
(Appendix 7)
In the method for producing a laminated sheet according to appendix 6,
The sheet material is a support that is provided on a surface of the resin layer of the sheet that is opposite to a surface that contacts the base material and supports the resin layer;
Supplying the sheet with the sheet material to the decompression chamber, and bringing the resin layer of the sheet with the sheet material into contact with the base material, and forming the laminate; and the pair of sheets The manufacturing method of the lamination sheet which implements the said process of pinching | interposing the said laminated body with a material.
(Appendix 8)
In the method for producing a laminated sheet according to any one of appendices 1 to 5,
In the step of decompressing the space inside the pair of sheet materials,
The manufacturing method of the lamination sheet which pressurizes the said sheet | seat and the said base material with the said pair of sheet material by forming a space | gap between the internal surfaces which the said pair of sheet material opposes, and decompressing the inside of the said space | gap.
(Appendix 9)
In the method for producing a laminated sheet according to appendix 8,
The said manufacturing method of the lamination sheet by which the said pair of sheet material peels from the said laminated body after the said process of decompressing the space inside the said pair of sheet material.
(Appendix 10)
In the method for producing a laminated sheet according to any one of appendices 1 to 9,
In the step of decompressing the space inside the pair of sheet materials,
The manufacturing method of the lamination sheet which decompresses the space inside the pair of sheet material by the decompression means in a state where the pair of sheet material sandwiching the laminate is located in an atmosphere of atmospheric pressure or higher.
(Appendix 11)
In the method for producing a laminated sheet according to any one of appendices 1 to 10,
In the step of decompressing the space inside the pair of sheet materials,
A method for producing a laminated sheet, wherein the space inside the pair of sheet materials is decompressed while the laminated body is conveyed.
(Appendix 12)
A laminated sheet manufacturing apparatus for manufacturing a laminated sheet by joining the resin layer of a sheet having a resin layer to one or both sides of a thin plate-like substrate,
A decompression chamber in which the sheet and the substrate are supplied and decompressed by decompression means;
A pressure-bonding means for pressure-bonding the sheet and the base material in the decompression chamber to form a laminate;
Two sheets of material sandwiched between the laminate sent from the decompression chamber,
In a state where the laminate is sandwiched between the two sheet materials, a space between the sheet materials communicates with the decompression chamber,
The space is decompressed through the decompression chamber by the operation of the decompression means, and the space is decompressed, whereby the laminate is crushed by the two sheet materials, and the sheet and the base material And a laminated sheet manufacturing apparatus, wherein the laminated sheet is obtained.
(Appendix 13)
In the laminated sheet manufacturing apparatus according to appendix 12,
Each said sheet | seat material is a lamination sheet manufacturing apparatus currently wound in the endless state between a pair of rollers.
(Appendix 14)
In the laminated sheet manufacturing apparatus according to appendix 13,
A laminated sheet manufacturing apparatus comprising a plurality of auxiliary rollers disposed between the pair of rollers and closely contacting edges parallel to the conveying direction of the two sheet materials while conveying the sheet material.
(Appendix 15)
In the laminated sheet manufacturing apparatus according to appendix 14,
A laminated sheet manufacturing apparatus comprising heating means for heating and softening the edges when the edges of the two sheets are brought into close contact with each other.
(Appendix 16)
In the laminated sheet manufacturing apparatus according to appendix 15,
An apparatus for manufacturing a laminated sheet, comprising cooling means for cooling the softened edge after the edges are in close contact with each other.
(Appendix 17)
In the laminated sheet manufacturing apparatus according to any one of appendices 12 to 16,
A pair of first rollers for delivering the substrate;
A pair of second rollers to which the base material fed from the first roller is supplied;
The surface of the base material that is disposed on the downstream side of the first roller in the base material transport direction and that is disposed on the upstream side of the second roller in the base material transport direction and is sent out from the pair of first rollers. A third roller disposed on each of the side and the back side,
One of the pair of second rollers is one of the pair of rollers in which the sheet material is bridged in an endless state,
The other of the pair of second rollers is one of the other pair of rollers in which the sheet material is bridged in an endless state,
The decompression means includes
The pressure in the second space surrounded by the pair of first rollers, the pair of second rollers, and the third roller is reduced.
The pair of first rollers are rollers for feeding the base material into the second space,
On the front surface side or back surface side of the base material, the sheet is sent out from between one of the third rollers and one of the second rollers into the second space,
The second roller is a roller that pressure-bonds the base material and the resin layer of the sheet, and sends a laminate including the base material and the sheet between the two sheet materials,
The space between the sheet materials is a laminated sheet manufacturing apparatus in communication with the second space.
(Appendix 18)
In the laminated sheet manufacturing apparatus according to any one of appendices 12 to 17,
Each of the two sheet materials is a laminated sheet manufacturing apparatus configured with a polymer film.
(Appendix 19)
A porous base material in which holes communicating with the front and back surfaces in communication with the conveying direction and a decompression chamber to which a resin layer is continuously supplied;
Decompression means for decompressing the decompression chamber;
A pressure-bonding means for pressure-bonding the porous substrate and the resin layer supplied into the decompression chamber to form a laminate;
An apparatus for producing a laminated sheet, comprising: impregnation means for heating the laminated body continuously fed out from the decompression chamber and impregnating the porous base material with the resin layer.
(Appendix 20)
In the laminated sheet manufacturing apparatus according to appendix 19,
The pressure-bonding means is such that the holes inside the porous base material after the resin layer is pressure-bonded are in communication with the holes in the porous base material before the resin layer is pressure-bonded in the decompression chamber. The resin layer and the porous substrate are configured to be crimped,
The said manufacturing apparatus is a manufacturing apparatus of the lamination sheet comprised so that the said laminated body obtained by the said crimping | compression-bonding means might be heated with the said impregnation means, making the said decompression chamber into a pressure-reduced state with the said decompression means.
(Appendix 21)
In the laminated sheet manufacturing apparatus according to appendix 20,
In the decompression chamber, the porous substrate and a pair of resin layers are supplied,
The pressure-bonding means pressure-bonds the porous base material and the pair of resin layers arranged with the porous base material sandwiched therebetween,
The width dimension in the direction orthogonal to the transport direction of the porous substrate is smaller than the width dimension in the direction orthogonal to the transport direction of the resin layers,
The said crimping | compression-bonding means is a manufacturing apparatus of the lamination sheet which is a means which crimps | bonds the edge parts of the width direction of a pair of said resin layer, and encloses the said base material between the said resin layers.

1, 1a, 1b, 1c, 1d, 1e, 1f Prepreg 2 Fiber substrate (base material)
3 First resin layer (resin layer)
31 1st impregnation part 32 1st non-impregnation part 4 2nd resin layer (resin layer)
41 2nd impregnation part 42 2nd non-impregnation part 5a 1st support body (sheet | seat)
5b Second support (sheet)
51 Protective Sheet 52 Sheet Material 5c Sheet 5d Sheet 6 Housing 61 Wall 611 Opening 612 Recess 62 Sealing Materials 71a, 71b First Roller (Feeding Roller)
72a, 72b Second roller 73a, 73b Third roller 74 Body 741 Outer peripheral surface 75 Shaft 76 Bearing (bearing)
77a, 77b Driven roller 77c, 77d Roller 78a, 78b Auxiliary roller 781 Expanded portion 78c, 78d Auxiliary roller 8 Depressurization means 81 Pump 82 Connection pipe 91a, 91b Sheet material 911 Overlap portion 912 Edge 913 Space 92 Heating means 93 Cooling means DESCRIPTION OF SYMBOLS 10 Board | substrate 11 Laminated body 12 Metal layer 13 Fiber base material 20 Interface 30 Laminated sheet manufacturing apparatus 30A Laminated sheet manufacturing apparatus 40 Laminated sheet 40A Laminated sheet 40 'Laminated body 40A' Laminated body 70 Space (small space, decompression chamber)
DESCRIPTION OF SYMBOLS 100 Semiconductor device 200 Multilayer substrate 201a, 201b, 201d, 201e Circuit part 202, 203 Conductor part 300 Pad part 400 Wiring part 500 Semiconductor element 501 Bump F1 Pressure contact force (contact force)
F2 Depressurization force F3 Force G Air T Average thickness

Claims (18)

In the method for producing a laminated sheet in which the resin layer of the sheet having a resin layer is joined to one or both sides of a long thin plate-like substrate to produce a laminated sheet,
The base material is a fiber base material in which holes communicating with the front and back surfaces are formed while communicating in the transport direction,
A step of conveying the sheet and the base material in a decompression chamber decompressed by a decompression means, and contacting the resin layer of the sheet and the base material in a decompressed state to form a laminate;
Sending the laminate from the decompression chamber;
Sandwiching the laminate with a pair of sheet materials;
The space inside the pair of sheet materials, which is located outside the decompression chamber and sandwiches the laminate, communicates with the decompression chamber, and the space inside the pair of sheet materials is decompressed by the decompression means. and a step of viewing including,
While the base material is continuously supplied to the decompression chamber, the base material is continuously sent out from the decompression chamber,
In the step of decompressing the space inside the pair of sheet materials by the decompression means,
By sucking the gas inside the base material located in the decompression chamber with the pressure reducing means, the gas inside the base material inside the pair of sheet materials is sucked,
In the step of decompressing the space inside the pair of sheet materials by the decompression means,
A method for producing a laminated sheet in which the resin layer is impregnated inside the base material outside the decompression chamber . In the manufacturing method of the lamination sheet of Claim 1,
In the step of decompressing the space inside the pair of sheet materials, a method for manufacturing a laminated sheet in which the laminated body is heated. In the manufacturing method of the lamination sheet of Claim 1 or 2 ,
In the step of forming a laminate, the laminate and sheet are pressure-bonded, and the laminate sheet is impregnated with the resin layer of the sheet. In the manufacturing method of the lamination sheet in any one of Claims 1 thru | or 3 ,
In the step of constructing the laminate,
Production of a laminated sheet in which the resin layers of the sheet are superposed on the front and back surfaces of the base material, and the end portions along the transport direction of the resin layers are pressure-bonded to each other so that the base material is included between the resin layers. Method. In the manufacturing method of the lamination sheet of Claim 4 ,
The sheet material is a support that is provided on a surface of the resin layer of the sheet that is opposite to a surface that contacts the base material and supports the resin layer;
Supplying the sheet with the sheet material to the decompression chamber, and bringing the resin layer of the sheet with the sheet material into contact with the base material, and forming the laminate; and the pair of sheets The manufacturing method of the lamination sheet which implements the said process of pinching | interposing the said laminated body with a material. In the manufacturing method of the lamination sheet in any one of Claims 1 thru | or 3 ,
In the step of decompressing the space inside the pair of sheet materials,
The manufacturing method of the lamination sheet which pressurizes the said sheet | seat and the said base material with the said pair of sheet material by forming a space | gap between the internal surfaces which the said pair of sheet material opposes, and decompressing the inside of the said space | gap. In the manufacturing method of the lamination sheet of Claim 6 ,
The said manufacturing method of the lamination sheet by which the said pair of sheet material peels from the said laminated body after the said process of decompressing the space inside the said pair of sheet material. In the manufacturing method of the lamination sheet in any one of Claims 1 thru | or 7 ,
In the step of decompressing the space inside the pair of sheet materials,
The manufacturing method of the lamination sheet which decompresses the space inside the pair of sheet material by the decompression means in a state where the pair of sheet material sandwiching the laminate is located in an atmosphere of atmospheric pressure or higher. In the manufacturing method of the lamination sheet in any one of Claims 1 thru | or 8 ,
In the step of decompressing the space inside the pair of sheet materials,
A method for producing a laminated sheet, wherein the space inside the pair of sheet materials is decompressed while the laminated body is conveyed. A laminated sheet manufacturing apparatus for manufacturing a laminated sheet by joining the resin layer of a sheet having a resin layer to one or both sides of a thin plate-like substrate,
A decompression chamber in which the sheet and the substrate are supplied and decompressed by decompression means;
A pressure-bonding means for pressure-bonding the sheet and the base material in the decompression chamber to form a laminate;
Two sheets of material sandwiched between the laminate sent from the decompression chamber,
In a state where the laminate is sandwiched between the two sheet materials outside the decompression chamber, a space between the sheet materials communicates with the decompression chamber,
By the operation of the decompression means, the space is decompressed through the decompression chamber, and the space is decompressed, so that the laminate is crushed by the two sheet materials outside the decompression chamber , A laminated sheet manufacturing apparatus configured to press-bond a sheet and the substrate to obtain the laminated sheet. In the laminated sheet production apparatus of claim 1 0,
Each said sheet | seat material is a lamination sheet manufacturing apparatus currently wound in the endless state between a pair of rollers. In the laminated sheet production apparatus of claim 1 1,
A laminated sheet manufacturing apparatus comprising a plurality of auxiliary rollers disposed between the pair of rollers and closely contacting edges parallel to the conveying direction of the two sheet materials while conveying the sheet material. In the laminated sheet production apparatus of claim 1 2,
A laminated sheet manufacturing apparatus comprising heating means for heating and softening the edges when the edges of the two sheets are brought into close contact with each other. In the laminated sheet production apparatus of claim 1 3,
An apparatus for manufacturing a laminated sheet, comprising cooling means for cooling the softened edge after the edges are in close contact with each other. In the manufacturing apparatus of a laminated sheet according to any one of claims 1 0 to 1 4,
A pair of first rollers for delivering the substrate;
A pair of second rollers to which the base material fed from the first roller is supplied;
The surface of the base material that is disposed on the downstream side of the first roller in the base material transport direction and that is disposed on the upstream side of the second roller in the base material transport direction and is sent out from the pair of first rollers. A third roller disposed on each of the side and the back side,
One of the pair of second rollers is one of the pair of rollers in which the sheet material is bridged in an endless state,
The other of the pair of second rollers is one of the other pair of rollers in which the sheet material is bridged in an endless state,
The decompression means includes
The pressure in the second space surrounded by the pair of first rollers, the pair of second rollers, and the third roller is reduced.
The pair of first rollers are rollers for feeding the base material into the second space,
On the front surface side or back surface side of the base material, the sheet is sent out from between one of the third rollers and one of the second rollers into the second space,
The second roller is a roller that pressure-bonds the base material and the resin layer of the sheet, and sends a laminate including the base material and the sheet between the two sheet materials,
The space between the sheet materials is a laminated sheet manufacturing apparatus in communication with the second space. In the laminated sheet producing apparatus according to any one of claims 1 0 to 1 5,
Each of the two sheet materials is a laminated sheet manufacturing apparatus configured with a polymer film. A porous base material in which holes communicating with the front and back surfaces in communication with the conveying direction and a decompression chamber to which a resin layer is continuously supplied;
Decompression means for decompressing the decompression chamber;
A pressure-bonding means for pressure-bonding the porous substrate and the resin layer supplied into the decompression chamber to form a laminate;
The decompression chamber located outside said heating the laminate to be continuously fed from the decompression chamber, e Bei the impregnation means for impregnating the resin layer on the porous substrate,
The pressure-bonding means is such that the holes inside the porous base material after the resin layer is pressure-bonded are in communication with the holes in the porous base material before the resin layer is pressure-bonded in the decompression chamber. The resin layer and the porous substrate are configured to be crimped,
The said manufacturing apparatus is a manufacturing apparatus of the lamination sheet comprised so that the said laminated body obtained by the said crimping | compression-bonding means might be heated with the said impregnation means, making the said decompression chamber into a pressure-reduced state with the said decompression means . In the manufacturing apparatus of the lamination sheet of Claim 17 ,
In the decompression chamber, the porous substrate and a pair of resin layers are supplied,
The pressure-bonding means pressure-bonds the porous base material and the pair of resin layers arranged with the porous base material sandwiched therebetween,
The width dimension in the direction orthogonal to the transport direction of the porous substrate is smaller than the width dimension in the direction orthogonal to the transport direction of the resin layers,
The said crimping | compression-bonding means is a manufacturing apparatus of the lamination sheet which is a means which crimps | bonds the edge parts of the width direction of a pair of said resin layer, and encloses the said base material between the said resin layers.

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