JPH11235782A - Manufacture of metal foil-clad laminate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a metal foil-clad laminate by the steps of forming the laminate by holding a material to be press bonded by stacking pluralities of prepregs and metal foils between flat plates, then conveying the laminate by using a conveyor, supplying it between pressurizing boards of a molding press, then heating and pressuring it so that a streak-like recess is scarcely formed on the foil of the surface of the laminate. SOLUTION: In the method for manufacturing a metal foil-clad laminate comprising the steps of conveying the laminate by using a conveyor, supplying it between pressurizing boards, then heating and pressuring it; a method for conveying the laminate 10 by using the conveyor 30 has the steps of linearly or curvedly providing the conveyor 30, conveying the laminate 10 along the conveyor 30, or providing two rows of conveyors crossing perpendicularly, conveying the laminate along the one conveyor on the conveyor, disposing it on a crossed part, then pushing up the other conveyor to dispose the laminate on the other conveyor, and then conveying the laminate along the other conveyor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a metal foil-clad laminate used for producing a printed wiring board.

[0002]

2. Description of the Related Art A metal foil-clad laminate used in the manufacture of a printed wiring board is prepared by impregnating a base material such as a glass cloth with a thermosetting resin composition such as an epoxy resin and then drying and semi-curing. As shown in FIG. 5, a required number of prepregs 12 are stacked, and a metal foil 13 such as a copper foil is arranged on the outside of the prepreg 12 and laminated to form a pressed body 14 as shown in FIG. It is manufactured by sandwiching the pressurized body 14 between the pressurizing plates 22 of the forming press 20 and applying heat and pressure. In order to improve the productivity, the plurality of pressure-bonded members 14 are stacked with a metal plate or the like interposed therebetween, and the stacked body 10 is stacked on the pressure plates 22 of the forming press 20. Generally, a method of obtaining a large number of metal foil-clad laminates at a time by heating and pressurizing with sandwiching between them is generally performed.

[0003] In some cases, streak-shaped concave portions generally called "wrinkles" are formed in the metal foil on the surface of the metal foil-clad laminate thus obtained. This is because the unevenness due to the variation of the amount of the thermosetting resin composition formed on the surface of the prepreg is considered to be uneven on the metal foil superimposed on the prepreg. It is considered that a streak-shaped concave portion is formed when the unevenness of the metal foil does not sufficiently expand when heated and pressed between the pressure plates.

When a conductive circuit is formed by etching the metal foil on the surface using the metal foil-clad laminate having the stripe-shaped recesses formed thereon, the portion where the stripe-shaped recesses are formed is liable to be disconnected. There is a problem that the yield of printed wiring boards is low.

[0005] The above-mentioned step of stacking prepregs, metal foils, flat plates and the like is generally performed in a clean room at a position away from the molding press so as to prevent foreign matter and the like from being mixed when the layers are stacked. The formed laminate is transported using a conveyor to a forming press provided outside a clean room, and is supplied between pressurizing plates.

[0006] However, when the laminate is transported to produce a metal-foil-clad laminate, there is a problem that a streak-shaped recess is easily formed in the metal foil on the surface of the obtained metal-foil-clad laminate. Therefore, even when the laminated body is transported to produce a metal foil-clad laminate, the production of a metal foil-clad laminate in which streak-shaped concave portions are not easily formed in the metal foil on the surface of the obtained metal foil-clad laminate A method is needed.

[0007]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a prepreg comprising a thermosetting resin composition and a substrate, and a metal foil. And a plurality of pressed bodies stacked so that the metal foil is arranged on at least one of the outer sides thereof, and a plurality of stacked bodies are sandwiched between flat plates to form a laminated body, and then the laminated body is transported using a conveyor to be added. A method for producing a metal foil-clad laminate that is supplied between platens and then heated and pressed, wherein a metal foil on the surface of the resulting metal foil-clad laminate is less likely to have streak-shaped recesses. An object of the present invention is to provide a method for manufacturing a laminated laminate.

[0008]

According to a first aspect of the present invention, there is provided a method for producing a metal foil-clad laminate, comprising: a prepreg comprising a thermosetting resin composition and a substrate; and a metal foil. After the press-bonded members stacked so that the metal foil is arranged on the outside, a plurality of stacked members are sandwiched between flat plates to form a stacked body, and the stacked body is transported using a conveyor and supplied between the pressure plates, and then. In the method of manufacturing a metal foil-clad laminate manufactured by heating and pressing, the method of transporting the laminate using a conveyor is such that the conveyor is provided in a linear or curved shape, and the laminate is transported along the conveyor. The method is characterized in that

According to a second aspect of the present invention, there is provided a method for manufacturing a metal foil-clad laminate, wherein a prepreg comprising a thermosetting resin composition and a base material and a metal foil are disposed on at least one of the outside of the metal foil. After a plurality of objects to be pressed are stacked so as to be sandwiched between flat plates to form a laminated body, the laminated body is transported using a conveyor and supplied between the pressure plates, and then heated and pressed to manufacture. In the method of manufacturing a metal foil-clad laminate, a method of transporting a laminate using a conveyor is to provide two rows of conveyors in a crossing manner, and to transport the laminate on one conveyor along one conveyor and intersect. After that, the other conveyor rises to arrange the laminate on the other conveyor, and then transports the laminate along the other conveyor.

According to a third aspect of the present invention, there is provided a method of manufacturing a metal foil-clad laminate according to the first or second aspect, wherein the laminate is stacked when the laminate is conveyed by a conveyor. The vibration generated in the body is characterized by an acceleration of 40 m / S ² or less.

According to a fourth aspect of the present invention, there is provided a method for manufacturing a metal foil-clad laminate according to any one of the first to third aspects, wherein the thickness of the metal foil is The thickness is 5 to 18 μm.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for manufacturing a metal foil-clad laminate according to the present invention will be described with reference to the drawings. FIG. 1 is a front view illustrating an embodiment of a method for manufacturing a metal foil-clad laminate according to claim 1 of the present invention, and FIG. 2 is a plan view of FIG. 3A and 3B are diagrams for explaining a main part of an embodiment of a method for manufacturing a metal foil-clad laminate according to the present invention, wherein FIG. 3A is a front view before transport, and FIG. 3B is a front view after transport. (C) is a perspective view after conveyance. FIG. 4 is a front view illustrating a modification of FIG.

FIG. 5 is an exploded cross-sectional view for explaining a method of manufacturing a metal foil-clad laminate according to the present invention. FIG.
Fig. 3 is a view for explaining an embodiment of a method for manufacturing a metal foil-clad laminate according to claim 2 of the present invention, (a) is a front view,
(B) is a plan view.

[Method of Manufacturing Metal Foil Laminated Plate According to Claim 1 of the Present Invention] One embodiment of a method of manufacturing a metal foil clad laminate according to claim 1 of the present invention is as shown in FIG. A plurality of prepregs 12 and metal foils 13 are stacked on a carrier plate 18 by sandwiching a plurality of pressure-bonded members 14 such that the metal foils 13 are disposed on both outer sides of the prepregs 12 and the metal foils 13. After formation, the laminate 10 and the carrier plate 18
Is sandwiched between the pressurizing plates 22 of the forming press 20, and is heated and pressed to manufacture.

The laminate 10 and the carrier plate 1 as described above
1 and 2, the laminated body 10 is formed in a laminated body forming chamber 35 remote from the molding press 20, and then the laminated body 8 is laminated. The body 10 is conveyed using the conveyor 30 and the pressure plate 2
Supply between 2,22. In addition, the laminated body 10
It is important that the method of transporting by using 0 is a method in which the conveyor 30 is provided in a linear or curved shape, and the stacked body 10 is transported along the conveyor 30.

When the laminate 10 is transported using the conveyor 30, an impact is generally applied to the laminate 10. When the impact force is large, the protrusions 12a formed on the surface of the prepreg 12 due to the variation in the amount of the thermosetting resin composition attached as shown in FIG.
As shown in FIGS. 3 (b) and 3 (c), there is a case where a concave portion 13b is formed in a portion of the metal foil 13 around the convex portion 12a. This recess 1
The portion of the metal foil 13 where 3b occurs is hardly stretched when heated and pressed by being sandwiched between pressure plates, and a streak-shaped concave portion is easily formed in the metal foil 13 on the surface of the obtained metal foil-clad laminate. Become.

However, when the laminated body 10 is transported along the conveyor 30 provided in a straight or curved shape, the impact applied to the laminated body 10 is smaller as compared with a case where the conveyor has a step. Therefore, the protrusions 12a formed on the surface of the prepreg 12 are less likely to be crushed, the recesses 13b are less likely to be formed on the metal foil 13, and the stripe-shaped recesses are formed on the metal foil 13 on the surface of the obtained metal foil-clad laminate. It is difficult to form.

When the laminate 10 is conveyed by the impact applied to the laminate 10 when being conveyed by the conveyor 30 so as to have an acceleration of 40 m / S ² or less, it is formed on the surface of the prepreg 12. Since the convex portion 12a is particularly hard to be crushed, a stripe-shaped concave portion is less likely to be formed on the metal foil on the surface of the obtained metal foil-clad laminate, which is preferable. In addition, since the impact applied to the laminated body 10 tends to increase when the laminated body 10 is stopped, when the laminated body 10 is stopped by gradually decelerating the conveyor 30, the surface of the resulting metal foil-clad laminate is This is preferable because a stripe-shaped concave portion is not easily formed in the metal foil.

The conveyor 30 is not particularly limited as long as it is provided in a straight line or a curved line. The conveyor 30 may be provided at an angle or may be provided horizontally.
As shown in FIG. 4, a plurality of conveyors 30 may be provided separately. In addition, the laminated body 1 along the conveyor 30
As a method of transporting 0, it may be transported along the conveyor 30 over the conveyor 30, or may be transported along the conveyor 30 under the conveyor 30, but along the conveyor 30 along the conveyor 30. It is preferable that the transfer device is conveyed by miniaturizing the transfer device.

The prepreg 12 used in the present invention comprises a thermosetting resin composition and a base material. For example, after adding a solvent to the thermosetting resin composition to adjust the viscosity,
The base material is immersed in the liquid to be impregnated, and then heated to dry the solvent to obtain a semi-cured thermosetting resin composition, or to heat a solid thermosetting resin composition at room temperature. It is obtained by applying and impregnating a substrate in a molten state. In addition, the thermosetting resin composition in the prepreg 12 is limited to a semi-cured (B stage) state.

As the base material, woven fabric, non-woven fabric, paper and the like of inorganic fibers such as glass, organic fibers such as polyester, polyamide, polyacryl, and polyimide, and natural fibers such as cotton can be used. It is preferable to use a woven fabric (glass cloth) made of glass fiber because a metal foil-clad laminate excellent in heat resistance and moisture resistance can be obtained. In addition, the thing of the thickness of 0.04-0.30 mm of a base material is generally used.

Further, the thermosetting resin composition includes:
The entire thermosetting resin composition can be used, such as an epoxy resin-based, phenolic resin-based, polyimide resin-based, unsaturated polyester resin-based, polyphenylene ether resin-based alone, modified product, or mixture. In addition, when a thermosetting resin composition is an epoxy resin type | system | group, the balance of an electrical property and adhesiveness is favorable and it is preferable.

The thermosetting resin composition contains a thermosetting resin as an essential component and, if necessary, a curing agent, a curing accelerator, an inorganic filler, a solvent and the like for the thermosetting resin. be able to. A thermosetting resin composition having a low self-curing property, such as an epoxy resin, needs to contain a curing agent for curing the resin.

The amount of the thermosetting resin composition in the prepreg 12 is preferably 40 to 70 parts by weight based on 100 parts by weight of the total weight of the thermosetting resin composition and the base material. 40
If the amount is less than 10 parts by weight, air bubbles may remain inside the obtained metal foil-clad laminate and electrical characteristics may be reduced.
If the amount exceeds 0 parts by weight, the thickness of the obtained metal foil-clad laminate may vary greatly.

The metal foil 13 used in the present invention is not particularly limited as long as it is a metal foil.
A single, alloy, or composite foil of copper, aluminum, brass, nickel, or the like can be used. The thickness of the metal foil 13 is generally 5 to 70 μm. In addition, metal foil 1
When the thickness of No. 3 is 5 to 18 μm, the effect of the present invention in which streak-shaped concave portions are not easily formed on the metal foil on the surface of the obtained metal foil-clad laminate is particularly large.

It is sufficient that the metal foil 13 is disposed outside at least one of the pressed members 14. When it is arranged only on one outer side, a release sheet such as a fluororesin film is generally arranged on the other outer side. When such a press-bonded body 14 is heated and pressed, a single-sided metal foil-clad laminate is obtained. be able to.

As the flat plate 16 used in the present invention, a metal plate such as iron or stainless steel, or a plate obtained by insulating the surface of such a metal plate can be used.

It is to be noted that an inner layer substrate on which a conductor circuit is formed may be sandwiched inside the object to be pressed 14. By heating and pressurizing the object to be crimped 14, a metal foil-clad laminate with an inner layer circuit can be obtained. The substrate for the inner layer is not particularly limited as long as it is a plate on which a conductive circuit is formed.For example, a thermosetting resin such as an epoxy resin, a phenol resin, a polyimide resin, an unsaturated polyester resin, and a polyphenylene ether resin is used. Of thermoplastic resin and these thermosetting resins mixed with an inorganic filler, etc., and a substrate of inorganic fibers such as glass, cloth of organic fibers such as polyester, polyamide, cotton, paper, etc. One in which a conductor circuit is formed on a plate adhered with a resin or the like may be used.

As a method of heating and pressurizing the laminated body 10 sandwiched between the pressurizing plates 22, 22, a method of heating the pressurizing plate 22 and heating by heat transfer from the pressurizing plate 22, And heating by resistance heating. Note that resistance heating is a method in which power is supplied to a conductor having electric resistance and heating is performed using heat generated by the Joule effect. The heating conditions may be appropriately adjusted so that the thermosetting resin composition in the prepreg 12 is cured.

When the laminated body 10 is sandwiched between the pressurizing plates 22 and 22, if necessary, heating and heating are performed with a cushioning material such as cellulose paper or aramid fiber paper or a heat conduction adjusting material interposed therebetween. Pressure may be applied. Pressing plate 2
There is no particular limitation on the number of the press-bonded members 14 sandwiched between the two and the 22 as long as it is two or more.
May be stacked with the flat plate 16 interposed therebetween to form the laminate 10.

In the above embodiment, the carrier plate 1
After the stack 10 is formed on the stack 8, the stack 10 and the carrier plate 18 are conveyed using the conveyor 30 and the
Although the embodiment in which the carrier is supplied between 2 and 22 has been described, the present invention is not limited to the use of the carrier plate 18 and only the laminate 10 may be transported. Since it is easy to sandwich the heat conduction adjusting material and the like, it is possible to improve the moldability and the like of the obtained metal foil-clad laminate.

[Method of Manufacturing Metal Foil-Laminated Sheet According to Claim 2 of the Present Invention] One embodiment of a method of manufacturing a metal foil-coated laminate according to claim 2 of the present invention is as shown in FIG. A plurality of prepregs 12 and metal foils 13 are stacked on a carrier plate 18 by sandwiching a plurality of pressure-bonded members 14 such that the metal foils 13 are disposed on both outer sides of the prepregs 12 and the metal foils 13. After formation, the laminate 10 and the carrier plate 18
Is sandwiched between the pressurizing plates 22 of the forming press 20, and is heated and pressed to manufacture.

The laminate 10 and the carrier plate 1 as described above
In the case where the laminate 8 is sandwiched between the pressurizing plates 22 of the forming press 20, as shown in FIG.
0 is conveyed using the conveyors 30a and 30b and the pressure plate 2
Supply between 2,22. In addition, the laminated body 10
0a, 30b, the conveyor 30
a and 30b are provided in two rows so as to cross each other, and after the stacked body 10 is transported on the conveyor 30a along one conveyor 30a and arranged at the crossed portion, the other conveyor 30b rises and the other Laminate 10 on conveyor 30b
Is disposed, and then the laminated body 10 is placed on the other conveyor 3
0b along the conveyor 30b (hereinafter referred to as
Is important.

Using the conveyors 30a and 30b, the laminate 1
In general, when transferring 0, an impact is applied to the laminated body 10, and when the impact force is large, a streak-shaped recess is easily formed in the metal foil 13 on the surface of the obtained metal foil-clad laminate. . However, the impact applied in the case of the upward conveying method is such that the stacked body 10 is conveyed by one of the conveyors 30a and arranged at the crossing portion, and then the one of the conveyers 3
0a is reduced and becomes smaller as compared with the method of arranging the laminate 10 on the other conveyor 30b, and so on, as in the case of the method of manufacturing a metal foil-clad laminate according to claim 1 of the present invention. The protrusions formed on the surface of the prepreg 12 are less likely to be crushed due to variations in the amount of the thermosetting resin composition adhered thereto, and the recesses are less likely to be formed in the metal foil 13. It becomes difficult to form streak-shaped concave portions in the metal foil 13.

It is to be noted that the laminate 10 is transferred to the conveyors 30a and 30a.
b, when the vibration caused by the impact applied to the laminate 10 during the conveyance is set so that the acceleration is 40 m / S ² or less, the metal foil on the surface of the obtained metal foil-clad laminate is particularly streaked. It is preferable because a concave portion is not easily formed. Further, the conveyors 30a, 30b,... May be provided in at least two rows so as to intersect, and may be provided in three or more rows.

As a specific method of the upward conveying method, each of the conveyors 30a and 30b is divided in a direction perpendicular to the conveying direction so that when the other conveyor 30b is raised, one of the conveyors 30a and 30b is raised. 30a
Is formed so as not to contact with one conveyor 30
a, the stack 10 is placed on one conveyor 30 with the upper surface of one conveyor 30a higher than the upper surface of the other conveyor 30b.
is transported along the conveyor 30a along the line a. Next, by extending the cylinder 32b connected to the other conveyor 30b, the other conveyor 3b is extended.
The stacked body 10 is placed on the other conveyor 30b with the upper surface of Ob being higher than the upper surface of one conveyor 30a. Next, a method of transporting the stacked body 10 on the conveyor 30b along the other conveyor 30b, and the like can be given.

The prepreg 12 and the metal foil 1 used in the method for producing a metal foil-clad laminate according to claim 2 of the present invention.
3, the flat plate 16 and the like, the method of heating and pressurizing, and the like are the same as those in the embodiment of the method for manufacturing a metal foil-clad laminate according to claim 1 of the present invention.

[0038]

(Example 1) A prepreg having a thickness of 0.18 mm (product name: R1661 manufactured by Matsushita Electric Works, Ltd.) in which an epoxy resin-based resin composition was impregnated into a glass cloth (base material) as a prepreg, and having a thickness of 12 μm as a metal foil. 18 μm
Copper foil [manufactured by Nikko Gould Foil Co., Ltd.], and a stainless steel plate having a thickness of 2 mm as a flat plate. Then, on a carrier plate, one set of these prepregs and two copper foils are stacked so that the copper foils are arranged on both outer sides thereof, and fifteen to-be-pressed bodies are stacked on a flat plate to form a laminate. Formed. Note that a laminate was formed for each thickness of the copper foil.

Next, using a linearly provided conveyor, the laminate was conveyed on the conveyor along the conveyor, and was fed between pressurizing plates of a forming press. When the stack was stopped, the conveyor was gradually decelerated to stop the stack. The acceleration of vibration generated in the laminate when the laminate was conveyed by the conveyor was measured using a galvibro (trade name, manufactured by IMV Co., Ltd.), and the results were as shown in Table 1.

Next, the laminate was sandwiched between pressure plates,
Heating and pressing were performed at 70 ° C. and a pressure of 3.0 MPa for 90 minutes to obtain a metal foil-clad laminate.

Example 2 When stopping the laminate,
A metal foil-clad laminate was obtained in the same manner as in Example 1 except that the laminate was stopped by colliding the carrier plate with a rubber stopper.

Example 3 As a method of transporting a laminate using a conveyor, a lifting transport method (two rows of conveyors are provided so as to cross each other, and the laminate is transported on a conveyor along one of the conveyors. After placing the stack on the crossed part, the other conveyor is raised and the laminate is placed on the other conveyor, and then the stack is transported along the other conveyor). Example 1
In the same manner as in the above, a metal foil-clad laminate was obtained.

(Comparative Example 1) A metal foil-clad laminate was obtained in the same manner as in Example 1 except that the conveyer was transported using a conveyor having a step of 3 cm in the middle.

(Comparative Example 2) Except that the stacked body was conveyed by one conveyor and arranged at the crossing portion, and then one of the conveyors was lowered and conveyed by a method of arranging the stacked body on the other conveyor. In the same manner as in Example 3, a metal foil-clad laminate was obtained.

(Evaluation and Results) The number of streak-shaped concave portions generated in the copper foil on the surface of the metal foil-clad laminate obtained in each of the examples and comparative examples was visually observed and evaluated. . In addition,
Fifteen sheets were inspected to determine the average value per sheet. As a result, as shown in Table 1, Examples 1 and 2 provided without crossing the conveyor were compared with Comparative Example 1 having the same structure. It was confirmed that a streak-shaped concave portion was less likely to be formed in the metal foil on the surface of the obtained metal foil-clad laminate as compared with. Further, when the laminate is conveyed by the conveyor, the vibration generated in the laminate is caused by acceleration 40
Claims 1 and 3 claim m / S ² or less.
It was confirmed that a streak-shaped concave portion was less likely to be formed in the metal foil on the surface of the obtained metal foil-clad laminate as compared with.

[0046]

[Table 1]

[0047]

According to the method for manufacturing a metal foil-clad laminate according to the first aspect of the present invention, a conveyor is provided in a straight line or a curved line, and the laminate is conveyed along the conveyor. Streak-shaped concave portions are less likely to be formed in the metal foil on the surface of the foil-clad laminate.

In the method for producing a metal foil-clad laminate according to the second aspect of the present invention, since the metal foil-clad laminate is conveyed by the above-described lifting conveyance method, a streak-like concave portion is formed in the metal foil on the surface of the obtained metal foil-clad laminate. It is hard to be done.

[Brief description of the drawings]

FIG. 1 is a front view illustrating an embodiment of a method for manufacturing a metal foil-clad laminate according to claim 1 of the present invention.

FIG. 2 is a plan view of FIG.

3A and 3B are diagrams illustrating a main part of an embodiment of a method for manufacturing a metal foil-clad laminate according to the present invention, wherein FIG. 3A is a front view before conveyance, and FIG. 3B is a front view after conveyance. (C) is a perspective view after conveyance.

FIG. 4 is a front view illustrating a modification of FIG.

FIG. 5 is an exploded cross-sectional view illustrating a method for manufacturing a metal foil-clad laminate according to the present invention.

6A and 6B are diagrams illustrating an embodiment of a method for manufacturing a metal foil-clad laminate according to claim 2 of the present invention, wherein FIG. 6A is a front view and FIG. 6B is a plan view.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Laminated body 12 Prepreg 12a Convex part formed on the surface of prepreg 13 Metal foil 13b Concave part formed in metal foil 14 Body to be crimped 16 Flat plate 18 Carrier plate 20 Molding press 22 Pressing board 30 Conveyor 32a, 32b Cylinder 35 Laminated body Forming room

Claims (4)

[Claims] A prepreg made of a thermosetting resin composition and a base material, and a metal foil, which are stacked so that the metal foil is arranged on at least one of the outsides thereof, a plurality of pressure-bonded members sandwiched between flat plates. After forming the laminate by stacking, the laminate is conveyed using a conveyor and supplied between the pressure plates, and then heated and pressed to produce a metal foil-clad laminate. A method for producing a metal-foil-clad laminate, wherein a method of transporting using the method is a method in which a conveyor is provided in a straight line or a curved shape, and a laminate is transported along the conveyor. 2. A press-bonded body in which a prepreg composed of a thermosetting resin composition and a base material and a metal foil are stacked so that the metal foil is disposed on at least one of the outside sides thereof, and a plurality of press-bonded bodies are sandwiched between flat plates. After forming the laminate by stacking, the laminate is conveyed using a conveyor and supplied between the pressure plates, and then heated and pressed to produce a metal foil-clad laminate. In the method of transporting using a conveyor, two rows are provided crossing the conveyor, the stacked body is transported on the conveyor along one conveyor and arranged at the crossed part, and then the other conveyor rises and the other A method for producing a metal-foil-clad laminate, comprising: placing a laminate on the conveyor of (1), and then transporting the laminate along the other conveyor. 3. The metal foil-clad laminate according to claim 1, wherein the vibration generated in the laminate when the laminate is conveyed by a conveyor has an acceleration of 40 m / S ² or less. Method. 4. The method for producing a metal foil-clad laminate according to claim 1, wherein the thickness of the metal foil is 5 to 18 μm.