TW201247411A - Process and apparatus for producing laminated sheet - Google Patents

Abstract

The apparatus (30) for producing laminated sheet according to the present invention is used to produce a laminated sheet (40) by bonding a first resin layer (3) and a second resin layer (4) to both sides of a fiber substrate (2). The apparatus (30) for producing laminated sheet comprises: sheet materials (91a), (91b) for holding a laminated body (40') in which the first resin layer (3), the fiber substrate (2) and the second resin layer (4) are laminated in order; and a pressure-reducing means (8) for reducing the pressure inside a space between the sheet materials (91a), (91b) in a condition that the laminated body (40') is held between the sheet materials (91a), (91b); wherein the laminated sheet (40) is obtained by bonding the first resin layer (3) and the second resin layer (4) to the fiber substrate (2) by pressing the laminated body (40') through the sheet materials (91a), (91b) when the pressure inside the space is reduced by the actuation of the pressure-reducing means (8).

Description

201247411 VI. Description of the Invention: [Technical Field of the Invention] The present invention relates to a method for producing a laminated sheet and a device for manufacturing a laminated sheet. [Prior Art] In recent years, in order to reduce the size and thickness of electronic components/electronic devices, it is required to reduce the size and thickness of the circuit board used. In response to this requirement, a multi-layered circuit substrate is used and the layers thereof are thinned. In the circuit board of the multilayer structure, for example, a sheet in which a resin composition sheet (resin layer) is laminated on both sides of a fiber base material is used (for example, see Patent Document 1). This sheet is produced by superposing a B-stage resin composition sheet on both sides of a fibrous base material and pressurizing the laminated body. However, in such a manufacturing method, there is a possibility that the pressure of the fiber base material of the resin layer is insufficient, and as a result, the resin layer is made of a fiber base material. The problem of peeling off occurs. Further, the above-mentioned problem is not limited to the case where the fiber base material and the resin layer are laminated. This occurs even when the resin layers are laminated to each other and the prepreg containing the fiber base material is laminated to each other. According to the present invention, there is provided a method for producing a laminated sheet, wherein the resin layer of a sheet having a resin layer is bonded to one side or both sides of a long-shaped thin plate-shaped substrate to produce a laminated sheet; Forming a fibrous base material that communicates with the opening in the transport direction 101111297 4 201247411 and communicates with the back surface of the watch; and has: a vacuum decompression chamber decompressed by a decompression means, and transporting the sheet and the substrate a step of causing a resin layer of the sheet to abut against a substrate to form a laminate, a step of feeding the laminate by the decompression chamber, and a step of holding the laminate by a pair of sheet materials; a space located inside the decompression chamber and holding the inner side of the sheet material of the laminated body, and communicating with the decompression chamber, and the space inside the pair of sheet materials by the decompression means The step of decompressing. Here, 'after the laminate can be sent out from the decompression chamber', it can be held by a pair of sheet materials; or the sheet material can be provided on the sheet in advance, and the sheet having the sheet material can be supplied to the reduced pressure. The chamber 'delivers the laminated body held by the sheet material from the decompression chamber. In addition, the space inside the sheet material of the pair is defined as a space between the laminate and the sheet material or between the inner surfaces of the sheet material when the laminate is held by a pair of sheet materials. In the case of _, this gap can be used. Further, when the sheet material is adhered to the laminate, and there is no gap between the laminate and the sheet material or between the inner surfaces of the sheet material, the space inside the laminate may be, for example, A hole_space formed in the substrate. Since the stinky material has a hole that communicates in the transport direction and has a light back surface, the inside of the substrate (4) of the laminated body located outside the decompression chamber passes through the space inside the substrate in the decompression chamber, and the decompression chamber. Connected. The gap between the laminate and the sheet material when the laminate is held by the sheet material is 101111297 201247411 $ The gap between the sheet material and the inner layer of the substrate when the sheet material is adhered to the Z layer In (4), any of the voids is decompressed by means of the means. Thereby, the laminated body is pressed by the difference of 1 part in the gap between the inside of the gap and the outside of the sheet. Therefore, in the laminate, the resin layer and the substrate are firmly fixed. Further, in the present invention, since the substrate and the sheet are laminated under reduced pressure, the work gas remains between the substrate and the sheet, and the adhesion between the resin layer and the substrate is improved. Wait firmly. According to the present invention, it is also possible to provide a manufacturing apparatus used in the production method of the above laminated sheet. According to the present invention, there is provided a manufacturing apparatus for a laminated sheet, wherein the resin layer of the sheet of the known layer is joined to one or both sides of a thin plate-shaped substrate to produce a laminated sheet; The present invention is characterized in that: the apparatus for supplying the sheet and the returning substrate, and reducing the M portion by the reduced section; and bonding the sheet in the decompression chamber to the base (4) to form a laminate, which is sent out by the decompression chamber The layered body is held so that the laminated body is held between the two sheets of material = the material to the decompression chamber, and the above-mentioned "" is passed through the chamber by the above two:: The above laminated body is crushed by the above two sheets of material, and the above-mentioned base material is pressure-bonded to obtain the laminated sheet. 101111297 According to such a manufacturing apparatus, the decompression means is actuated by the manufacture of the laminated sheet. Ιιη〇7 201247411 The decompression of the space between two sheets of material allows the laminate in the space to be crushed by two sheets of material. Thereby, the laminated system encompasses its comprehensive (all) Uniformly pressurized by each sheet material, The resin layer and the substrate are reliably pressure-bonded and joined to form a laminated sheet. Thereby, for example, regardless of the thickness or composition of the resin layer, a laminate in which the resin layer is reliably and firmly bonded to the substrate can be manufactured according to the present invention. A manufacturing method of a laminated sheet in which a resin layer and a substrate are firmly fixed, and a manufacturing apparatus of a laminated sheet. [Embodiment] Hereinafter, an embodiment of the present invention will be described based on the drawings, and all the drawings have the same constitution. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic cross-sectional side view showing an embodiment of a manufacturing apparatus for a laminated sheet according to the present invention, and FIG. 2 is a side view of the A_A line in FIG. 3 is a sectional view of the BB line in the figure i, and FIG. 4 is an enlarged view of the area [c] enclosed by a little chain line in the figure ,, and FIG. 5 and FIG. 6 are respectively a sectional view of the DD line in FIG. 7 is a cross-sectional view showing a laminated sheet of the present invention, FIG. 8 is a cross-sectional view showing a substrate manufactured using the laminated sheet of FIG. 7, and FIG. 9 is a cross-sectional view showing a semiconductor device manufactured using the substrate shown in FIG. Again, in the following description In the upper side of FIGS. 1 to 9 as "upper" or "upper", the lower side as "lower" or "downward" will be described. 7 to 9 are exaggerated and enlarged in the thickness direction (upper and lower directions in the drawing). 101111297 201247411 The apparatus for manufacturing a laminated sheet shown in Fig. 1 is a device for manufacturing a laminated sheet 40 having the configuration shown in Fig. 7. <Laminated sheet> First, the laminated sheet 40 will be described with reference to Fig. 7 . Further, when the laminated sheet 40 is cut to a predetermined size in the longitudinal direction thereof, the prepreg 1 is obtained. The laminated sheet 40' shown in Fig. 7 has a strip shape (long scale shape) as a whole, and has a thin plate-like (flat-plate) fibrous base material (base material) 2; one surface (upper surface) of the fibrous base material 2 a first resin layer (resin layer) 3 composed of a solid or semi-solid i-th resin composition; a second resin composition which is solid or semi-solid on the other side (lower side) side of the fiber substrate 2 The second resin layer (resin layer) 4 is formed. The laminated sheet 4 is cut into a predetermined size and used. Further, each of the resin layers 3 and 4 is in a B-stage state. The fibrous base material 2 has a function of enhancing the mechanical strength of the laminated sheet 4〇. The fiber base material 2 may, for example, be a glass fiber base material such as a glass woven fabric or a glass non-woven fabric, and may include a scorpion scorpion fiber, an aromatic polyamide resin fiber, or a wholly aromatic polyamide resin fiber. A polyamine-based eucalyptus fiber such as an amine fiber, a polyg resin fiber, an aromatic polyester resin fiber, a polyester resin fiber of a wholly aromatic polyphenol tree, a polyimine resin fiber, a poly pair Stretching benzene and double ah, gas tree Laiwei, etc. as a woven fabric of the domain or a synthetic fiber substrate composed of my cloth, paper with kraft paper, cotton velvet paper, cotton velvet and kraft paper mixed paper as the main component Fiber substrate such as fiber substrate or the like, such as organic fiber 101111297 201247411. In addition, as for the fiber base material, any of the above-mentioned fibers may be used, or two or more types may be used. Among these, the fibrous base material 2 is preferably a glass fiber base material. By using such a glass fiber substrate, the mechanical strength of the prepreg ι obtained by cutting the laminated sheet 4 can be further enhanced. Further, there is also an effect of reducing the coefficient of thermal expansion of the prepreg. Examples of the glass constituting the glass fiber substrate include E glass, c glass, A glass, S glass, D glass, NE glass, τ glass, η glass, and quartz glass. Among these, the glass is preferably S glass, quartz glass or τ glass. Thereby, the coefficient of thermal expansion of the glass fiber substrate can be relatively reduced, so that the coefficient of thermal expansion of the laminated sheet 40 can be reduced as much as possible. The average thickness Τ of the fibrous base material 2 is not limited, but is preferably 15 or less, more preferably 10 〇 μηη or less, still more preferably 10 to 25 qing. By using the fiber base material 2 having such a thickness, the mechanical strength of the prepreg 1 (the laminated sheet 4) can be ensured and the thickness thereof can be reduced. Further, the workability of the prepreg i can be improved. On the side of the fiber substrate 2, the first is set! The resin is 3, and the second resin layer 4 is provided on the other side. Further, the first resin layer 3 is composed of the first composition, and the second resin layer 4 is composed of the second resin composition. The first resin composition and the second resin composition may be the same composition' or may be different. In the present embodiment, the same composition is used. As shown in Fig. 7, in the present embodiment, part of 101111297 201247411 in the thickness direction of the fiber base material 2 is partially impregnated with the first resin composition (first resin layer 3) (hereinafter, this portion is referred to as "first impregnation portion 31". The second resin composition (second resin layer 4) is impregnated into the remaining portion of the fibrous base material 2 which is not impregnated with the first resin composition (hereinafter referred to as "second impregnation portion 41"). Thereby, the first impregnation portion 31 of a part of the first resin layer 3 and the second impregnation portion 41 of a part of the second resin layer 4 are placed in the fiber base material 2. In the fiber base material 2, the first impregnation portion 31 (the lower surface of the first resin layer 3) is brought into contact with the second impregnation portion 41 (the upper surface of the second resin layer 4). In other words, the second resin composition is impregnated into the fibrous base material 2 from the upper surface side of the fibrous base material 2, and the second resin composition is impregnated into the fibrous base material 2 from the lower surface side of the fibrous base material 2, thereby forming a resin composition. The material fills the voids in the fibrous substrate 2. In the towel of the present embodiment, the thickness of the first impregnation portion 31 is equal to the thickness of the second impregnation portion 41. In addition, the thickness of the portion (the Jth non-impregnated portion 32) excluding the first impregnation portion 31 of the first resin layer 3 and the portion excluding the second impregnation portion 41 of the second resin layer 4 (the second non-impregnation portion 42) ) the thickness is equal. The thickness of the first non-impregnated portion 32 and the thickness of the second non-impregnated portion 42 are, for example, 2 to 20 μm. Further, the thickness of the first inclusion portion 31 and the thickness of the second impregnation portion 41 may be different, and the thickness of the first non-modified portion 32 and the thickness of the second non-impregnation portion 42 may be different. Further, reference numeral 20 schematically shows the boundary between the impregnation portions 3%. As shown in Fig. 1, the first resin layer 3 is a thin plate-shaped i-th branch body (sheet material is supplied to the manufacturing apparatus 3 of the laminated sheet. The sheet material 1 has the first 101111297 201247411 resin layer 3, and supports A support substrate (not shown) of the resin layer 3 and a protective sheet 51 for protecting the first resin layer 3. The support substrate is provided on the opposite side of the protective sheet 51 while sandwiching the second resin layer 3. In the second roller 72a, the second resin layer 3 is in contact with the second resin layer 3 via the support substrate. Similarly, the second resin layer 4 serves as a second support (sheet) 5b in the form of a thin plate. The sheet 5b is provided with a second tree layer 4, a supporting base material (not shown) that supports the resin layer 4, and a protective sheet 51 that protects the second resin layer 4. The support substrate is placed on the opposite side of the protective sheet 51 while holding the second resin layer 4. Therefore, although not shown in Fig. 1, the second parent 72b is in contact with the second resin layer via the support substrate. 4. The protective sheet 51 is preferably a resin film, for example, and examples of the resin material constituting the resin sheet include a fluorine resin, a polyimide, and a poly pair. A polyester such as butadiene dicarboxylate or polyethylene terephthalate, a polyethylene, etc. Further, among the resin materials constituting the resin film, among them, heat resistance is excellent and inexpensive. Further, it is polyethylene terephthalate or polyethylene, and the resin film is preferably subjected to a peelable treatment on the side of the resin layer side of the resin film. Thereby, the protective sheet 51 can be made as will be described later. The resin layer can be easily separated. As the support substrate, the same material as the protective sheet 51 can be used. The average thickness of the protective sheet 51 or the support substrate is not particularly limited, but is preferably about 8 to 70 μmη, more preferably 12~ The first resin composition and the second resin composition are preferably composed of the following composition: 101111297 201247411 Each resin composition contains, for example, a curable resin, and if necessary, a hardening aid (for example, a hardener or a hardening accelerator). The curable resin may be, for example, a urea (urea) resin, a trimeric amine resin, a maleimide compound, a polyamine phthalic acid, or a resin. Saturated poly vinegar -fat, resin with benzo ring, bis-propyl succinimide compound, · ethylene base resin, (10) ke group _ lipid, benzo ring resin, vinegar resin, oxime A thermosetting resin such as a resin, an ultraviolet curable resin, an anaerobic resin, etc. Among these, the curable resin preferably has a glass transition degree of 200 C or more. For example, it is preferable to use a spiro ring. , heterocyclic, trimethylol, biphenyl, naphthyl, anthracene, novolac type 2 or more functional epoxy resins, cyanate resins (including prepolymers of cyanate resins) , a maleic acid imide compound, a stupid cyclobutene resin, and a resin having a benzo ring. In the above curable resin, a substrate 10 to be described later is produced by using a thermosetting resin (see FIG. After 8), the crosslinking density is increased in the resin layers 3 and 4 after hardening to improve the heat resistance of the cured resin layers 3 and 4 (the obtained substrate) - in particular, by using the above-described thermosetting property Resin and filler to reduce the thermal expansion coefficient of prepreg-1 (hereinafter also referred to as Low thermal expansion "). Furthermore, the electrical characteristics (low dielectric constant, low dielectric loss tangent) of the prepreg 1 can also be improved. 101111297 12 201247411 Examples of the epoxy resin include a phenol phenol varnish type epoxy resin, a phenol type % oxy resin, a naphthalene type epoxy resin, a fluorene type epoxy resin, and an aryl alkylene type epoxy resin. Among these, the epoxy resin is preferably a naphthalene type 'aryl-stretch type epoxy resin'. By using a naphthalene type or arylalkylene type epoxy resin, the heat resistance of the moisture absorption solder (heat resistance of solder after moisture absorption) can be improved and hardened in the hardened tree/fat layer 3, 4 (the obtained substrate). Flammability. As a naphthalene type epoxy resin, Dic (share) is mentioned, for example.

HP-4700, HP-4770, HP-4032D, HP-5000, HP_6〇〇〇T NCNakamoto Chemical Co., Ltd., NC_73〇〇L, Xinyi Iron Chemical Co., Ltd., esn_375, etc. Examples of the arylalkylene-based epoxy resin include NC-3_, NC_3_l, NC_3000_FH, Nippon Chemical Co., Ltd., NC-7300L, and Nippon Chemical Co., Ltd., ESN_375, manufactured by Nippon Chemical Co., Ltd. Wait. The term "aryl-based extended-type epoxy resin" refers to an epoxy resin having a combination of a repeating monomer and a stretch of one or more aromatic groups and a methylene group, and has excellent properties, flame retardancy and mechanical strength. . Further, in terms of the wiring board corresponding to the unmatched wiring board, it is preferable to use an epoxy resin which does not substantially contain dentate. The cyanate resin can be obtained, for example, by reacting a toothed cyanide compound with a phenol or a naphthalene-phenol, and if necessary, prepolymerizing by heating or the like. Further, a commercially available product thus prepared can also be used. The cyanate resin may, for example, be a bisphenol type cyanate ester such as a novolak type cyanate resin, a bisphenol A type cyanate resin, a double-type E-type cyanate resin, or a tetramethyl double F-type atmosphere. Resin and naphthol aralkyl type cyanate tree 101111297 201247411 grease and the like. Further, the above cyanate resin preferably has two or more nitroester groups (-0-CN) in the molecule. For example, 2,2,_bis(4-cyanophenyl)isopropylidene, U'-bis(4-cyanooxyphenyl)ethane, bis(4-cyanooxy-3,5) Dimethylphenyl) A, 1,3-bis(4-cyanooxyphenyl small (1) methylethylidene) benzene bis(4) azoxyphenyl) sulfide, bis(4-cyanooxy) Phenyl)ether, ^, Bushen (4-cyanooxyphenyl) Ethylene, ginseng (4-cyanooxyphenyl), bis (4-aminooxyphenyl), 2,2·double (4-cyanooxyphenyl)propane, n, anthracene, 4_, mustard, samarium, 8...2, or 2,7-dicyanatophthalene, 1,3,6-tricyanooxynaphthalene, Cyanate resin obtained by reacting 4,4_dicyanoxybiphenyl, and phenol novolac type, nonylphenol novolak type, dicyclopentadiene type polyphenols and tanning cyanide, naphthol A cyanate resin obtained by a reaction between an aralkyl type polyheptanol and a toothed cyanide, etc. Among these, the phenol novolak type cyanate resin is excellent in flame retardancy and low thermal expansion property, 2, 2 - Bis(4-cyanooxyphenyl) isopropylidene and dicyclopentadienyl cyanate resin are excellent in crosslinking density control and moisture resistance reliability, especially varnish type cyanate resin Low Further, it is preferable that one or two or more kinds of other cyanate resins may be used in combination, and the cyanate resin may be used singly or in combination with a weight average molecular weight. The cyanate resin may be used in combination with the above cyanate resin and its prepolymer. The use of such cyanate resins can effectively exhibit heat resistance and flame retardancy. In addition, the above curable resins may be used in combination. For example, when the above-mentioned epoxy resin is used as the curable resin, the above-mentioned cyanate resin can be used in combination for further improving the flame retardancy, 101111297 201247411, and the above-mentioned Malay can be used in combination for further improving the heat resistance. Further, when the cyanate resin is used as the curable resin, the above epoxy resin can be used in combination for further improving heat resistance, flame retardancy, etc. The content of the curable resin is not specified. The amount of the curable resin is 5 to 70% by mass, and more preferably 10 to 5% by mass. When the content of the curable resin is less than the above lower limit, depending on the type of the curable resin, When the varnish viscosity of the resin composition is too low and it is difficult to form a prepreg. On the other hand, if the content of the curable resin exceeds the above upper limit, the amount of other components is too small, depending on the curable resin. The case where the mechanical strength of the pre-relatives is lowered. The outer resin composition preferably contains an inorganic filler. The mechanical strength can be obtained even if the pre-π body 1 is formed (for example, the thickness is bp or less). In addition, it is also possible to improve the low thermal expansion of the substrate iq. _ As an inorganic filler, for example, talc, alumina, glass, molten sulphur dioxide, etc., dioxotomy, mica, hydrogen Oxidizing Shao, oxidizing town, etc. In addition, with the purpose of inorganic filling sisters, it is appropriate to talk about broken and spherical. Therefore, from the viewpoint of superior low heat sensitivity, the inorganic filler is preferably - oxidized granules, more preferably oxidized 7 (especially spheroidal molten cerium oxide). Further, in the range of the effects of the present invention, in addition to the components described above, the resin composition can be adjusted to other components as needed. Other examples of 101111297 15 201247411 include tackifiers such as 〇RBEN and BENTONE, and polyviscosity imparting agents such as polyfluorene-based, fluorine-based, polymer-based antifoaming agents or leveling agents, and coupling agents. , flame retardant, phthalocyanine / blue, S too green / green, moth / green, Disazo Yellow, carbon black, enamel and other coloring agents. <First Embodiment><Manufacturing Apparatus of Laminated Sheet (Manufacturing Method of Laminate Sheet)> Next, the apparatus 30 for manufacturing a laminated sheet used for the production of the laminated sheet 40 is described with reference to Figs. 1 to 6 Description. First, an outline of a manufacturing apparatus 30 for a laminated sheet according to the present embodiment will be described. The manufacturing apparatus 30 of the laminated sheet is provided with a decompression chamber (space) 70 for supplying the support bodies 5a and 5b belonging to the sheet and the fibrous base material 2, and decompressing by the decompression means 8; and supporting the inside of the decompression chamber 70 The pressure-adhesive means (rollers 72a, 72b) for forming the laminated body 40' by the body 5a, 5b and the fibrous base material 2; and the two sheets of material 91a of the laminated body 40' which is fed by the decompression chamber 70, 91b. The space 913 (see Fig. 5) between the sheet materials 91a and 91b is connected to the decompression chamber 70 in a state in which the laminated body 40' is sandwiched between the two sheet materials 91a and 91b. By the operation of the decompressing means 8, the space 913 is decompressed via the decompression chamber 70, and the space 913 is depressurized, and the laminated body 40 is crushed by the two sheet materials 91a and 91b. ', the support bodies 5a, 5b are pressure-bonded to the fiber base material 2, and the laminated sheet 40 is obtained. Here, the fiber tomb material 2 and the support bodies 5a and 5b have a long shape and are continuously conveyed along the longitudinal direction thereof. 101111297 16 201247411 Next, the manufacturing apparatus 30 of the layer sheet will be described in detail. As shown in FIG. 1, the manufacturing apparatus 30 of the y" sheet is provided with a casing 6, and the first + xiaokun (feeding rolls) 71a and 71b and the second rolls 72a and 72b housed in the casing 6 and The third light 73a, 73b; + the driven rollers 77a and 77b are driven by the second rollers 72a and 72b; the sheet material 91a is wound around the second 铋π t 2 pro 72a and the driven roller 77a; The lunar material 91b of the pressing roller 77b; the auxiliary rollers 78a and 78b of the multi-array; and the heating hand k 92' for heating the mu _4 奵 sheet materials 91a and 91b to cool the sheet materials 9la and 9lb The cooling means is illusory; and the casing 6 is subjected to a material reduction and decompression means 8. In the following, the configuration of each of the parts is as shown in Fig. 2. The body 6 is formed such that a pair of J46 is disposed in a box shape so as to face each other with a space therebetween. As a constituent material of the wall portion μ, there is no special ship, for example, various metals such as iron, non-recording steel, and materials, or a gold X' containing such a metal material, for example, polyethylene baking, poly A resin material such as a four-air woman or the like can also be used as a constituent material of the wall portion 61. Here, the wall portion 61 is preferably a flat plate, but is not limited thereto. The first pros 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b constitute a cylindrical body that is open along both end faces of the sheet conveying direction. The wall portion 即可 is only required to close the above-mentioned opening σ of the cylindrical body. Further, the wall portion 61 is particularly preferably spanned over the respective rollers 7la, 71b, 72a, 72b, 73a, 73b. The first parent 71a and 71b and the second parent 72a and 72b and the third parent 73a and 73b and the driven rollers 77a and 77b are respectively disposed between the two wall portions 61 of the casing 6. 101111297 17 201247411 These parental axes of rotation are parallel to each other. Further, these rollers are coupled to a motor (not shown) via, for example, a gear mechanism (not shown) in which a large number of gears are disposed. Further, if the motor is actuated, the power is transmitted via the gear mechanism, and each of the kun Kun is rotated. Moreover, these rolls have the same composition except for the difference in size. Hereinafter, the configuration of the first roller 71a will be representatively described, and the other structures are the same. As shown in Fig. 2, the first roller 71a has a cylindrical outer shape, and is composed of a main body portion 74 located at an intermediate portion in the longitudinal direction thereof and a shaft 75 located at both end sides of the main body portion 74. The outer diameter of each of the shafts 75 is reduced in diameter from the outer diameter of the body portion 74, respectively. In the first parent 71a, each of the shafts .75 is inserted into a bearing 76 provided in the wall portion 61, and the bearing 76 is rotatably supported by the wall portion 61. Further, the first roller 71a is a solid body after the configuration shown in Figs. 1 and 2, but is not limited thereto, and may be, for example, a hollow body. Further, it is exemplified as the material listed in the constituent material of the wall portion 61 as the first item of the book. The outer peripheral surface 74 of the main body portion 74 of the first roller can also be subjected to a treatment for preventing the outer peripheral surface. As such a treatment, for example, a method of forming a film of DLC (Diamond Like Carbon) on the outer peripheral surface 741 is exemplified. In addition, as a constituent material of the first roller 7U, in addition to the material of the wall portion 61 = the materials listed, various rubbers such as nitrile rubber, base rubber ester rubber, polyoxymethylene rubber, and fluororubber may be used. material. Soil 101111297 201247411 The first roller 71a and the first roller 71b are arranged to be horizontally parallel to each other. The outer peripheral surface 741 of the main body portion 74 is abutted against each other via the fiber base material 2 (pressure-bonding) (see Fig. 2). Further, when the first roller 71a and the first roller 71b are rotated, the fiber base material 2 can be conveyed to the right side between the left side of Fig. 1 or the like, and can be fed between the sheet materials 91a and 91b. Thereby, the sheet-like fibrous base material 2 is conveyed to the inside of the space % to be described later. The second roller 72a and the second roller 72b are disposed at positions different from the first rollers 71a and 71b, that is, in the transport direction (downstream side) of the fiber base material 2 with respect to the first rollers 71a and 71b. Further, the second roller 72a and the second roller 72b are disposed to be parallel to each other in the horizontal direction, and the outer peripheral surface 741 of the main body portion 74 is mutually opposed via the fiber base material 2, the first resin layer 3, and the second resin layer 4 Connect (crimp). Further, when the second roller 72a and the second roller 72b are rotated, the first resin layer 3 and the second resin layer 4 can be superposed on the fiber base material 2 therebetween. The laminated body of the fiber base material 2 and the resin layers 3 and 4 is pressed in the thickness direction by the second roll 72a and the second roll 72b. At this time, the resin layers 3 and 4 are impregnated into the fiber base material 2. Among them, the inside of the fiber base material 2 is not completely covered by the resin layers 3 and 4. The second substrate 72a and the second roller 72b feed the laminated body (unbound body) 40' of the fiber base material 2, the first resin layer 3, and the second resin layer 4. In addition, the first resin layer 3 and the second resin layer 4 can be easily impregnated into the fibrous base material 2 by using the second rolls 72a and 72b as heating rolls. The laminated body 40' is sent out to the outside of the space 70 101111297 19 201247411 by the second rolls 72a and 72b. First, a, the holding fiber base material 2 is disposed on the downstream side in the transport direction of the fiber base material 2 of the "old 13 rolls 73a &" of the top wire 2, and is placed on the one side (surface side) of the first Li Kun 2 The second roller 72a disposed is recorded on the upstream side in the fiber base material direction. The transporting third parent 73b is disposed on the transport surface side (back side) of the fibrous substrate 2 of the first parent 71b disposed on the other side of the fibrous base material 2, and is disposed in the fiber tree 2 (Backing off, and arranging the upstream side of the transport direction of the laminated body 40'. 第2 The third lucky Kun 73a and the third report are on top of each other, and are horizontally oriented (vertical direction) away from the Millennium (four) It is arranged in the water to pay upwards. In order to rotate, the first support body 5a can be replaced by the first support body 5a. The protective sheet is called the reference. Similarly, if the transfer = away (winding) can be guaranteed by the second turn In the case of the Μ 73 73b, the second resin layer 4 of the e) #b_protective sheet 51 (see also the third roller 73a, the outer peripheral surface 74 of the main body portion 74 is abutted against the first pro 71a) The outer peripheral surface 74 of the main body portion 74 and the outer peripheral surface 74 of the second parent 72a, on the other hand, the third outer peripheral surface of the main body portion 74 is in contact with the outer peripheral portion % of the i-th (four)b The surface 741 and the outer peripheral surface 741 of the main portion 74 of the second roller 72b. With this arrangement, 61, the first rollers 71 and 7 of the casing 6 101111297 20 201247411 are formed in the manufacturing apparatus % of the laminated sheet. 1b, the second rollers 72a and 72b, and the third rollers 73a and 73b are surrounded by *ar <foot (small space, decompression chamber) 70. The space 70 is operated by the decompression means 8 Decompression and decompression (refer to Fig. 3). As shown in Fig. 2, in the first 耝.±日, 视7la and 71b (the second rollers 72a and 72b, the third soaps 73a and 73b are also in phase, let J A sealing material is interposed between the two ends of the main body portion 74 and each of the wall portions 61. Each of the members and the sealing member 62 is formed of an annular elastic body, and is inserted into the wall portion in a compressed state. By the annular recessed portion 612, the airtightness of the space 7〇 is surely maintained, and when the space 7G is decompressed by the decompression means 8, the decompression can be quickly and surely performed. The material is not particularly limited, and examples thereof include natural rubber, isoprene rubber, dibutyl rubber, styrene-butadiene rubber, nitrile rubber, chloroprene rubber, butyl rubber, decenoic rubber, and ethylene. _Acrylic rubber, epichlorohydrin rubber, urethane rubber, polyoxynized rubber, fluororubber-like rubber materials (especially sulfurized) Or styrene-based, polyolefin-based, polyvinyl chloride-based, polyurethane-based, polyester-based, polyamidiamine-based, polybutadiene-based, trans-polyisoprene-based, fluororubber For the various types of hot-melt plastic elastomers, such as a vaporized polyethylene, one or a mixture of two or more of them may be used. As shown in Fig. 1, the first rolls 71a and 71b and the second rolls 72a and 72b are used. The outer diameters (sizes) of the third rolls 73a and 73b of the main body portion 74 are different from each other. In the present embodiment, the size relationship is (third roll) < (first roll) < (second roll). Further, the sizes of the rolls of the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b 101111297 21 201247411 are arbitrary 'but preferably as small as possible, for example, to be flexible. The sheet material is adhered to the roller to such an extent that no entrapment occurs in the sheet material. Specifically, the diameter is preferably 75 to 3 mm, more preferably 100 to 200 mm. Further, when a triangle formed by connecting the centers of the first roller 71a and the second roller 72a and the third parent 73a to each other is assumed, the angle of the apex of the center of the third ridge 73a of the triangle is preferably more than 60°. Not full ι8〇. . The triangle formed by connecting the center of the first roller 71b and the second roller 72b and the third roller 73b is also the same. As shown in Fig. 1, on the right side in the drawing of the second 辋j 72a (the downstream side in the conveying direction of the laminated body), the driven roller 77a is disposed to be spaced apart from the second roller 72a. Further, in the right side of the second roller 72b (the downstream side in the conveying direction of the laminated body 40'), the driven roller 77b is disposed to be spaced apart from the second roller 72b. The follower views 77a, 77b are also spanned between the two wall portions 61 of the casing 6. Further, the rotation axes of the follower views 77a and 77b are arranged in parallel with respect to the rotation axes of the second rolls 72a and 72b. The outer diameters of the main body portions 74 of the driven rollers 77a and 77b are the same as those of the second rollers 72a and 72b, respectively. Further, the flexible sheet material 91a is looped in an endless state, that is, in a ring shape, in the second roller 72a and the driven roller 77a'. Thereby, when the second view 72a is rotated, the rotational force is transmitted to the driven roller 77a via the sheet material 91a, and the driven roller 77a also rotates. Further, at this time, the sheet material 91a is conveyed in the direction of rotation of the turn, that is, in the counterclockwise direction in Fig. 1 . 101111297 22 201247411

Similarly, the sheet material 9 lb having a width of 1 A is priced at a speed of 7 and a driven light, so that the flexibility is small and the rotatory force is thinned by the endless state. Thereby, when the second roller 72b rotates, the claws also rotate. The material is sent to the follower, and the slave _^PDSt 1 ' at this time' the sheet material 91b is transported in the clockwise direction in the green furnace side & ,. The twisting direction, the sheet material 9la, and the sheet material are in the form of a pressure (in the present embodiment, at atmospheric pressure). : Environment above atmospheric pressure Borrowing _ part ‘:=:^间#穿屮少拉 s The layered body 4〇 sent by the second parent 72a, 72b is inserted between 91b. The material 枓91a and the sheet material are not limited to the structure of the sheet materials 9la and 91b, for example, metal ^^', and may be "m-molecular film, elastomer such as steel, steel alloy, Ming, Shao The alloy is a metal such as an alloy, a zinc, a zinc alloy, a nickel or a nickel alloy, and a metal alloy such as a high tin alloy, iron, or the like, and an elastomer: =::T, B (tetra) acid B - copolymer and other poly-branched amine ': nylon 6, nylon 46, nylon 610 nylon 612, nylon U, nylon 12 埶 can be mixed with 匕 匕 6 6~12, nylon 6-66), ... ϋ聚聚醯iimide, 芳(四)聚自旨# of liquid polyphenylene sulfide scale, polycarbonate, polymethyl (10) ^ polyether ether, hydrazine, poly-ether g, 101111297 23 201247411 polyether 醯Amine, polyketal, styrene, polyolefin, polystyrene, polyurethane, polyester, polyamine, polybutadiene, trans-polyisoprene And various thermoplastic elastomers such as fluororubber, polyoxyxene rubber, and chlorinated polyethylene, or copolymers, blends, and polymers based thereon. In this case, one type or a mixture of two or more types may be used. Among them, in particular, polyethylene terephthalate, polyethylene naphthalate, and thermoplastic polycondensation are used. A polymer film such as an imine, an aromatic polyester, a polyamidamine, a polyetheretherketone, a polyether quinone, or a polyphenylene sulfide is used for a sheet material, and has lamination property, flatness, peelability, and The sheet materials are superior in adhesion to each other. Further, as shown in Fig. 1, a plurality of auxiliary rolls 78a and 78b are placed between the two wall portions 61 of the casing 6. The auxiliary taps 78a and 78b are respectively passed via The bearing (not shown) is rotatably supported by the wall portion 61. The auxiliary rollers 78a and 78b are conveyed by the rotation of the sheet materials 91a and 91b, the second rollers 72a and 72b, and the followers 77a and 77b. The auxiliary roller 78a is disposed in a row along the conveying direction of the laminated body 40' between the second roller 72a and the driven roller 77a. The plurality of auxiliary rollers 7 are also respectively The second roller 72b and the driven roller 77b are arranged in a row along the layered body 4, and the conveyance direction is arranged in a row. The auxiliary rollers 78a and 78b are arranged. The shape has a circular shape, and each of the both ends in the longitudinal direction has an enlarged diameter portion 781 whose outer diameter is expanded. The enlarged diameter portion 781 of each auxiliary sheet 78a is abutted to the inner side of the sheet material 91a. The weight is 101111297 24 201247411 The transportation direction of β 911 is flat (4) The state is separated by 9 lb ^ ^ of the sheet material, and the parallel direction of the expansion direction is connected to the overlapping portion 91i. The enlarged diameter portions 781, # > the edges 91a of the material 91a and 9b are described in more detail, and the sheet is held in more detail (see Fig. 5 and Fig. 6). The material-assisted Xuanxuan 1 auxiliary diameter-enhanced portion 781 and the Π------------------------------------------------------------------------ One of the flange portions 912 causes the enlarged diameter portion 78 of the auxiliary member 78a to face the enlarged diameter portion 781 of the auxiliary stick, and the edge portions 912 are closely adhered to each other. Thereby, the sheet material 91a and the sheet material 91b constitute a bag-like body, and a space 913 is formed inside the sheet material 91a and the sheet material 91b (see Fig. 5). The laminated body 4 is temporarily accommodated in the space 913, and the space 913 is connected to the space 70. Further, the auxiliary rollers 78a and 78b are solid bodies in the configuration shown in Figs. 1, 5, and 6, but are not limited thereto, and may be, for example, hollow bodies. In addition, the constituent materials of the auxiliary rolls 78a and 78b are not particularly limited. For example, the materials listed in the constituent materials of the first roll 71a can be used. As shown in Fig. 3, the decompression means 8 includes a pump 81 and a connecting pipe 82 that connects the pump 81 to the opening 611 formed in each of the wall portions 61. The pump 81 is disposed outside the casing 6, and may be applied, for example, to a vacuum system. The pressure in the space 70 is made smaller than that of the first roller 71a by driving the pressure reducing means 8 for decompressing the inside of the space 70 surrounded by the rollers 71a, 71b, the rollers 72a, 72b, and the rollers 73a, 73b 101111297 25 201247411. In the fiber substrate 2 of 71b, the region on the upstream side in the transport direction is lower and becomes a negative pressure. Further, the air pressure in the space 70 is also lower than the area on the downstream side in the transport direction of the laminated body 40' of the second rolls 72a and 72b, and the outer side area of the space surrounded by the sheet materials 91a and 91b. Each of the connecting pipes 82 is a rigid pipe made of, for example, a metal material such as stainless steel. Each of the openings 611 opens into the space 70 and communicates with the space 70. Further, in the configuration shown in Fig. 3, the opening portion 611 is formed in each of the double-walled portions 61. However, the opening portion 611 is not limited thereto. For example, the opening portion 611 may be formed only on one of the wall portions 61. Then, by operating the pump 81, the gas (air G) in the space 70 can be sucked by the openings 611, whereby the space 70 can be depressurized. Further, by this, a force for bringing the adjacent rollers to each other is further pressed and joined, whereby the airtightness of the space 70 can be more surely maintained. Further, when the space 70 is depressurized by the operation of the decompression means 8, the internal gas (air) in the space 913 communicating with the space 70 is also sucked and depressurized. At this time, if the laminated body 40' is housed in the space 913, that is, the laminated body 40' is held between the sheet materials 91a and 91b, the laminated body 40' can be crushed by the sheet materials 91a and 91b. (Refer to Figure 6). Thereby, the laminated body 40' is pressurized by the uniform force F3 caused by the entire (all) sheet materials 91a and 91b, and the first resin layer 3 and the second resin layer 4 are reliably pressed and bonded to 101111297. 26 201247411 Wear miscellaneous material 2 (see Figure 5, item 6). Thereby, the first resin layer 3 and the second resin are further impregnated into the inside of the fiber base material 2 at 4 s and 9 . Then, the laminated body 4〇' becomes a laminated sheet 4〇. In the case of Fig. 1, the heating means 92 is constituted by a heating wire such as a nickel-chromium wire, and is provided in the vicinity of the auxiliary report 78a. The heat is transmitted to the auxiliary light 78a by the heating means %, and the edge portion 912 of the sheet material 9U is heated and transmitted to the auxiliary rollers 78b to heat the edge portion 912 of the sheet material 91b. Thereby, the edge portion 912 of the sheet material 91a and the edge 912 of the sheet material 91b are softened, respectively, and the edge portions 912 of the both are surely adhered to each other. Thus, the sheet materials 91a and 91b which are surely adhered to each other at the edge portions 912 can prevent the air from leaking out of the unintentional portion, i.e., the edge portion 912. Therefore, the decompression means 8 is operated to perform more reliable decompression. Further, the heating means 92 can heat the laminated body 40 along the width direction thereof via the auxiliary rolls 78a, 78b. When the laminated body 4 is heated and heated, the first resin layer 3 and the second resin layer 4 are more easily impregnated into the fibrous base material 2. That is, the impregnation means is constituted by the heating means 92 and the auxiliary rolls 78a, 78b. Further, the cooling means 93 is composed of, for example, a Peltier element, and is provided in the vicinity of a portion on the opposite side to the overlapping portion 911 of the sheet material 91a and a portion on the opposite side to the overlapping portion 911 of the sheet material 91b. The edge portion 912' softened by the heating means 92 is conveyed and passes through the cooling means 93 under the cooling means 93. Thereby, the softened edge portion 912 after the adhesion can be temporarily cooled, so that the edge portion 912 can be surely prevented from being heated by the heating means 92 excessively 101111297 27 201247411. Next, a state (process) in which the laminated sheet 4 is manufactured by the manufacturing apparatus 30 of the laminated sheet will be described with reference to Figs. 1, 4, and 5. In the manufacturing apparatus 30 of the laminated sheet, before the first rolls 71a and 71b and the second rolls 72a and 72b and the third rolls 73a and 73b are rotated, the pressure reducing means 8 is actuated to suck the gas in the space 70 to make a space. Decompression first within 70. The air pressure in the space 70 becomes a negative pressure, for example, 80 〇pa or less and 1 〇〇Pa or more. As shown in Fig. 1, when the first roller 71a and the first roller 71b are rotated, the fiber base material 2 is fed into the space 70 between the rolls (continuously supplied). The fiber base material 2 is wound, for example, on a supply roller (not shown), and is supplied to the space S by the first roller 71a and the first roller 71b. When the second roller 72a and the third roller 73a are rotated, the first support 5a is sent out into the space 70 between the rollers (continuously supplying the first support body 5a so that the protective sheet 51 is along The outer peripheral surface of the third newspaper 73a is taken up (pushed out). Thereby, the protective sheet material 1 is peeled off from the first resin layer 3 having the branch base material. The first protective substrate 51 is peeled off. The resin layer 3 gradually approaches the fiber base material 2 along the second roll 72a. Further, the peeled protective sheet 51 is sent to the second light 72a by the first roll 71a and the third roll 73a. 72b is different direction. Specifically, 'the first parent 71a and the third parent 73a are sent outward (outside the space 70). The first resin layer 3 is in the b-stage state and is solid, semi-solid or liquid. 101111297 28 201247411 In addition, when the second parent 72b and the third parent 73b rotate, the second baffle 5b is sent out to the space 7〇 (continuously supplied). In the body 5b, the protective sheet 51 is wound up on the third roller 73b, whereby the protective sheet 51 is peeled off from the second resin layer 4 having the supporting substrate. The protective sheet 51 is peeled off. The second resin layer 4 supporting the substrate is gradually brought closer to the fiber base material 2 along the second roll 72b. Further, the peeled protective sheet 51 is fed out by the first roll 71b and the third roll 73b. In the direction different from the second rolls 72a and 72b, specifically, the first roll 71b and the third roll 73b are fed outward. Further, the second resin layer 4 is in a B-stage state and is solid, semi-solid or In the state of the liquid, the protective sheet 51 can be prevented from being peeled off in the space 70 immediately before the first resin layer 3 and the second resin layer 4 are pressed against the fibrous base material 2, respectively. The resin layer is prevented from being pressed, and the resin layer can be protected by the protective sheet 51 before the pressure bonding. Further, the fiber substrate 2 and the first resin layer 3 having the support substrate and the support substrate are provided. The resin layer 4 is passed between the second roller 72a and the second roller 72b at a time. At this time, the support substrate provided in the first resin layer 3 is in contact with the second roller 72a, and is provided in the first resin layer 3. The support substrate is in contact with the second roller 72b. The first resin layer 3 and the second resin layer 4 are in direct contact with the fiber substrate 2. As shown in Fig. 4, the second parent 72a and the second parent 72 are provided. The crimping force (abutting force) ρ between b is 101111297 29 201247411 The first resin layer 3 is pressed (embossed) from the upper side to the fiber base material 2, and the second resin layer 4 is pressed by the lower side of the fiber base The material 2 is obtained. The laminated body 40' is continuously discharged between the second roller 72a and the second roller 72b, and is supplied between the pair of sheet materials 91a and 91b. Here, the continuous supply or discharge of the fiber base material 2 or the like means a meaning other than intermittently supplying or discharging the fiber base material or the like as in the form of a sheet. For example, it means that the state in which the fibrous base material 2 or the like exists in the space 70 and the state in which it does not exist are alternately switched in a short period of time. Among them, the conveyance of the fiber base material 2 or the like can be stopped as needed. Further, as described above, the space 70 is decompressed by the operation of the decompression means 8. As a result, as shown in FIG. 4, the depressurization F2 generated in the space 70 can assist the pressing of the first resin layer 3 on the fiber base material 2 and the pressing of the second resin layer 4 on the fiber base material 2. The pressing by the crimping force F1 cooperates with the pressing by the depressurizing force F2, and the resin layers 3, 4 can be strongly pressed to the fibrous base material 2. Thereby, the resin layers 3 and 4 can be impregnated into the inside of the fiber base material 2. Further, by heating the second apex 72a and the second keel 72b as heating 轺i, the resin layers 3 and 4 can be easily impregnated into the inside of the fibrous base material 2. Further, by decompressing the inside of the space 70 and sucking the gas inside the fiber base material 2, it is difficult to cause voids in the resin layer impregnated inside the fiber base material 2. Further, the second roller 72a and the second roller 72b are partially impregnated into the inside of the fibrous base material 2 by the resin layer 3, 4 101111297 30 201247411, but are not completely impregnated. In this step, the resin layers 3 and 4 are impregnated into the fibrous base material 2, but inside the fibrous base material 2 of the laminated body 40' fed from the second rolls 72a and 72b, the fiber base located in the space 70 The material 2 is internally connected. Then, when passing between the second roller 72a and the second roller 72b, the laminated body 40' is held by a pair of sheet materials 91a and 91b. Then, the laminated body 4 is transported in a predetermined section in a state of being held by the pair of sheet materials 91a and 91b. Here, since the space 913 between the pair of sheet materials 91a and 91b communicates with the space 70, when the inside of the space 70 is depressurized by the decompression means 8, the gas inside the space 913 is decompressed via the space 70. The means 8 is sucked and the space 913 is also decompressed. Thereby, a negative pressure is generated, and a force for bringing the sheet materials 91 to 91a close to each other is generated, and the laminated body 40' is pressed in the thickness direction by a pair of sheet materials. Therefore, the impregnation of the inside of the fibrous base material 2 with the resin layers 3 and 4 is further performed, and the resin layers 3 and 4 and the fibrous base material 2 are firmly fixed. Further, the fibrous base material 2 is a porous material formed with a hole that communicates in the conveyance direction and communicates with the front and back sides. The holes L located inside the pair of sheet materials 91a, 91b, and the inside of the wire 2 are otherwise connected to the holes in the inside of the fibrous base material 2 in the space 70. Therefore, by decompressing the inside of the space 70, the inside of the fiber base material 2 between the pair of sheet materials 91a and 91b is decompressed via the fiber base material 2 located in the space 7G. Thereby, 101111297 31 201247411 In the laminated body 40 held by the pair of sheet materials 91a, 9ib, the resin layers 3, 4 contain & to the filament material 2, which can suppress the gas remaining on the fiber substrate 2 is internal and can suppress the occurrence of voids in the fibrous base material 2. Further, the end faces of the fiber base material 2 on the conveying direction side are exposed without being broken by the resin layers 3 and 4. Since the hole in the fiber base material 2 is also communicated to the end surface on the transport direction side, the end surface on the transport direction side is further sucked into the space 913 via the space 7, and the inside of the fiber base material 2 is also decompressed. Therefore, when the resin layers 3 and 4 are impregnated into the inside of the fiber base material 2 between the pair of sheet materials 91a and 9ib, the gas can be prevented from remaining inside the fiber base material 2. Further, since the laminated body 40 between the pair of sheet materials 91a and 91b is heated by the auxiliary rolls 78a and 78b, the resin layers 3 and 4 are easily impregnated into the inside of the fiber base material 2. Further, since the inside of the fiber base material 2 between the pair of sheet materials 9a, 91b is decompressed, the resin layers 3, 4 are drawn to the inner side of the fiber base material 2, and the resin layers 3, 4 are paired. The impregnation inside the fibrous base material 2 proceeds more. The inside of the fiber base material 2 located between the pair of sheet materials 9a and 91b is depressurized until the resin layers 3 and 4 are almost completely impregnated into the inside of the fiber base material 2. Therefore, the resin layers 3 and 4 are impregnated into the inside of the fiber base material 2 in a state where the laminated body 4 is conveyed. While the laminated material 40' is transported by the pair of sheet materials and 91b, the resin layers 3 and 4 may be impregnated into the interior of the fibrous base material 2, and the resin layers 3 and 4 may be terminated during the transport. Impregnation inside the substrate 2. 101111297 32 201247411 The end portion of the sheet material 9la ^ lb of one of the laminated body 40' is heated and pressurized by the auxiliary rollers 78a, 78b to be densely occluded, and the sheet materials 91a, 91b are opposed to each other. In the case where the one side region is depressurized, the outer region of the pair of sheet materials 91a and 91b is in an environment of a pressure greater than or equal to the atmospheric pressure of the rabbit (in the present embodiment, at atmospheric pressure). Thereby, the laminated body 40 of the slanting sheet material 91a, 91b and the pair of sheet materials 91a, 91b is subjected to a force of at least atmospheric pressure from the outer portions 3, 4 to the fiber base. This also promotes the impregnation of the interior of the tree wax exhibit 2. As described above, for example, regardless of the thickness or composition of the first resin layer 3, the second resin layer 4, the laminated sheet 40 in which the respective resin layers are firmly bonded to the fiber substrate 2 can be produced. The laminated sheet 40 as obtained above was extruded to the left side of the figure i + 丫. At this time, the sheet material 91a is taken up by the driven roller 77a and peeled off by the borrowing film 40, and the sheet material 91b is taken up by the driven roller 77b and peeled off by the 穑Mw. Further, in the manufacturing apparatus 30 of the laminated sheet, the entanglement between the sheet materials 91a and 91b is suppressed, and it is ensured that the sheet is crushed between, for example, only one pair of rolls. Long time. Thereby, the first resin layer 3 or the second resin layer 4 can be more reliably and firmly joined, that is, impregnated into the fibrous base material 2. Further, in the manufacturing apparatus 30 of the laminated sheet, the space to be decompressed is reduced by the space 70 surrounded by the first rolls 71a and 71b, the second parents 72a and 72b, the third rolls... and the like. Decompression space. Thereby, the manufacturing apparatus 30 of the laminated sheet can be miniaturized. Further, when the decompression means 8 is actuated, 101111297 33 201247411 can be quickly decompressed. In addition, the fiber substrate 2 is vacuumed. Residual air between the two, even if the geese layer 3 is joined, even if it is prevented from remaining in the air: the relay F1 squeezes the air, so that the second resin layer 4 can be joined when it is joined ( In the fiber substrate 2 and <Substrate> Next, prepreg was used. The substrate 1 () 敎 = substrate 1G' shown in Fig. 8 is referred to as the metal layer 12 on both sides of Fig. 8. The laminated body U is provided in the laminated body layer 11 and is provided with the second prepreg 1 and the 2 iron-dimensional base material 13 disposed inside the second wax layer 4 2 so as to be green. = Fiber substrate supported by the room! 3. In the present embodiment, the second resin layer 4 has at least a portion of the fibrous base material 13 having the above-mentioned specific thickness, and is in the layer 4. y, the second resin j layer U is a portion processed into a wiring portion, and is bonded to the laminate by a metal foil such as aluminum or >4, steel, a layer body u, and copper or aluminum is plated to the surface of the SiC And formed. Further, in the present embodiment, since the second layer Zhao has the above characteristics, the metal layer 12 can be held with high adhesion, and the metal layer 12 can be formed into a wiring portion with the processing accuracy of the two layers. The adhesion strength between the metal layer 12 and the i-th resin layer 3 is preferably at least the above, more preferably above her. Thereby, the connection reliability in the semiconductor device 1 (see Fig. 9) obtained by processing the metal layer 12 force % 101111297 A2 into the line portion of the cloth 34 201247411 is further improved. In the substrate 10, the two prepregs 1' in which the metal sound is formed on the first resin layer 3 are prepared in a state in which the prepreg 1 holds the fiber base material 13, and can be manufactured by, for example, vacuum lamination. . Further, the substrate 10 may be omitted from the fibrous base material 13 and may include a laminate in which the second resin layers 4 of the two prepregs 1 are directly joined to each other, or the metal layer 12 may be omitted. <Semiconductor device> Next, a semiconductor device 1 using a substrate will be described with reference to Fig. 9 . In Fig. 9, the fiber base materials 2 and 13 are omitted, and the first resin layer 3 and the second resin layer 4 are integrally shown. The semiconductor device 100 shown in FIG. 9 has a multilayer substrate (multilayer printed wiring board (circuit substrate)) 200, an entire portion 300 provided on the upper surface of the multilayer substrate 200, and a wiring portion 400 provided under the multilayer substrate 200. The semiconductor element 500 mounted on the multilayer substrate 200 is connected to the pad portion 300 by the bumps 501. The multilayer substrate 200 includes a substrate 10 provided as a core substrate, three prepregs 1a, 1b, and 1c provided on the upper side of the substrate 10, and three prepregs Id and le provided on the lower side of the substrate 1 If. The fiber base material 2, the first resin layer 3, and the second resin layer 4 which constitute the prepreg la1 to lc are arranged in the order of the substrate 1 and the fiber base material 2 which constitutes the prepreg Id to If, respectively. 1 Resin layer 101111297 35 201247411 3. The arrangement order of the second resin layer 4 from the substrate 10 is the same. That is, the prepreg la to lc and the prepreg Id to If are inverted from each other. Further, the multilayer substrate 200 includes a circuit portion 201a provided between the prepreg 1& and the prepreg 1b, a circuit portion 201b provided between the prepreg 1b and the prepreg 1c, and a prepreg. a circuit portion 201d between Id and the prepreg 1e; and a circuit portion 201e provided between the prepreg le and the prepreg If. Further, the multilayer substrate 200 is provided with a conductor portion 202 that is provided to penetrate the respective prepregs 1a to 1f, and electrically connect the adjacent circuit portions or the circuit portion and the pad portion. Each of the metal layers 12 of the substrate 10 is processed into a predetermined pattern, and the processed metal layers 12 are electrically connected to each other by the conductor portions 2〇3 provided through the substrate 10. Further, in the semiconductor device 100 (multilayer substrate 200), four or more prepregs 1 may be provided on one side of the substrate 10. Further, the semiconductor device ι can also contain a prepreg other than the prepreg 1. <Second Embodiment> Next, a second embodiment of the present invention will be described with reference to Figs. 10 and 11 . The manufacturing apparatus 30A of this embodiment will be described in detail. The manufacturing apparatus 30A removes a pair of sheet materials 91a and 91b by the manufacturing apparatus 30, and replaces the auxiliary rolls 78a and 78b of the manufacturing apparatus 30 with the auxiliary rolls 78c and 78d. Further, the driven device 3 is driven to be light, and wb is replaced by driven rollers 77c and 77d. Further, the manufacturing apparatus 3A does not have a cooling means 101111297 36 201247411 93. The other points are the same in the manufacturing device. The auxiliary rollers 78c and 78d are rollers having a cylindrical shape and a small t shape. Unlike the auxiliary roller 78a of the above-described embodiment, the auxiliary rollers 78c and 78d do not have the enlarged diameter portion 781. As shown in Fig. n, the outer surface of the auxiliary Germans 78e and 78d is covered by the entire width direction orthogonal to the conveyance direction. The auxiliary pros 78c and 78d are heated rolls and are heated by the heating means %. That is, the heating means 92 and the auxiliary rolls 78A and 78 (1 constitute an impregnation means. The transfer of the 77a and 77d conveyance laminated sheets 40A is performed between the pair of wall portions 61. Pro 77c, 77d The rotating shaft system is parallel to the reports 72a and 72b. The rotating shafts of the rollers 77c and 77d are connected to the motor, and when the motor is actuated, the power is transmitted and rotated via the gear mechanism. The laminated sheet 4A using the manufacturing apparatus 30A is used. First, in the same manner as the above-described embodiment, the inside of the space 7 is depressurized in advance. Then, similarly to the above-described embodiment, the fiber base material 2 is continuously supplied into the space 7〇. When the second roller 72a and the third roller 73a are rotated, the sheet material 5c is sent out into the space 70 (continuously supplied) between the rollers. Here, the sheet 5c will be described. The sheet 5e is protected. The sheet member 51, the resin layer 3, and the sheet material 52. The protective sheet 51 and the sheet material 52 are disposed to face each other while sandwiching the resin layer 3. 101111297 37 201247411 The sheet material 52 is not particularly limited, and examples thereof include a polymer. Film, PET, etc. Sheet 5c In the same manner as in the above-described embodiment, the protective sheet 51 is taken up (pulled) along the outer peripheral surface of the third roller 73a, whereby the protective sheet 51 is peeled off from the first resin layer 3. On the other hand, the second roller 72b and When the third roller 73b rotates, the sheet 5d is sent out into the space 70 (continuously supplied). Here, the sheet 5d is described. The sheet 5d is provided with a protective sheet 51 and a tree The layer 4 and the sheet material 52. The protective sheet 51 and the sheet material 52 are disposed to face each other while sandwiching the resin layer 4. The sheet 5d is such that the protective sheet 51 is taken up by the third roller 73b. The resin layer 4 peels off the protective sheet 51. The fiber base material 2 and the first resin layer 3 having the sheet material 52 and the second resin layer 4' having the sheet material 52 pass through the second roller 72a and the second time once. In the same manner as in the above-described embodiment, the resin layers 3 and 4 are impregnated into the fiber base material 2 to obtain a laminated body 40A. Then, similarly to the above-described embodiment, the second roller 72a is used. The second roller 72b is partially impregnated into one portion of the resin substrate 3, 4, but is not completely impregnated. In this step, the resin layer 3, 4 is impregnated into the fibrous base material 2, but the inside of the fibrous base material 2 in the laminated body 40A fed from the second grain 72b communicates with the inside of the fibrous base material 2 located in the space 70. 10ΠΙ1297 38 201247411 Here, Fig. 11 is a cross-sectional view showing the fiber base material 2 and the resin layers 3 and 4 in the EE direction of Fig. 10. The width dimension in the direction orthogonal to the direction in which the fiber base material 2 is conveyed is compared with the first resin layer 3 and the first 2 The transport direction of the resin layer 4 is small in the width direction of the orthogonal direction. The fiber base material 2, the first resin layer 3, and the second resin layer 4 are pressure-bonded by the pair of second rolls 72a and 72b'. In this case, one end portion (one end portion on the transport direction side) in the width direction of the first resin layer 3 and one end portion (one end portion on the transport direction side) in the width direction of the second resin layer 4 are pressed (hot pressed) The other end portion in the width direction of the first resin layer 3 and the other end portion in the width direction of the second resin layer 4 are pressure-bonded (thermally bonded). The end portions in the width direction of the resin layers 3 and 4 are fused to each other to form a joint portion, and the fiber base material 2 is wrapped in the first resin layer 3 and the second resin layer 4. That is, both end portions in the width direction of the laminated body 40A' are sealed. Further, the dimension of the sheet material 52 in the width direction may be equal to that of the second resin layer 3 and the second resin layer 4, or may be longer than the width dimension of the first resin layer 3 and the second resin layer 4 by the layered body 40. The second rolls 72a and 72b are continuously fed out from the space 70, and are conveyed by the auxiliary rolls 78c and 78d and the rolls 77c and 77d. Here, the fibrous base material 2 is a porous material in which a plurality of pores are formed. The pores formed in the fibrous base material 2 communicate with each other through the other holes in the direction in which the laminated body is conveyed, and are then communicated to the front and back surfaces of the fibrous base material 2. Therefore, even the fibrous base material 2 located outside the space 7 is connected to the space 70. In other words, it can be said that the inner space of a pair of sheet materials 52 communicates with the space 70. 101111297 39 201247411 The gas inside the fiber base material 2 outside the space 70 is sucked by the decompression means 8 through the holes and spaces 7 inside the fiber base material 2, and the inside of the fiber base material 2 becomes negative dust. In particular, since the both end portions in the width direction of the laminated body 4 are sealed, the gas inside the fiber base material 2 can be surely attracted. The resin layers 3 and 4 are firmly adhered to the fiber base material 2 by decompressing the inside of the fiber base material 2. By the auxiliary rollers 78c and 78d, the laminated body 40 is smashed and heated while being conveyed, so that the resin layers 3 and 4 are impregnated into the fibrous base material 2 in the laminated body 4A obtained from the space 70. . The resin layers 3 and 4 are subjected to the underlying structure of the fibrous base material 2 under the transport layered body 40A. The gas inside the fiber base material 2 outside the space 70 is sucked by the decompression means 8 through the holes and spaces 7 inside the fiber base material 2, and the suction system continues until the resin layers 3, 4 are to a certain extent Soaked into the interior of the fibrous substrate 2. That is, during the period in which the gas inside the fiber base material 2 is sucked by the pressure reducing means 8, the impregnation of the resin layers 3, 4 with the fiber base material 2 is performed. Thereby, the resin layers 3 and 4 are impregnated into the fibrous base material 2, and voids can be prevented from occurring inside the fibrous base material 2. In addition, since the joint portions for joining the end portions (10) of the resin layers 3 and 4 are formed at both end portions in the width direction of the laminated body 40, it is prevented during the conveyance by the auxiliary rollers 78c and 78d. When the gas flows from the fiber substrate & side to the inside of the fiber substrate 2, the fiber substrate 2 of the laminated sheet 4 which is located outside the space 70 can be surely sucked. 101111297 40 201247411 Further, the manufacturing apparatus 3〇 In the case of A, the mountain layer τ I is sent from the space 70, and the layer 40A which is sent out by the space 70 is still impregnated into the fiber substrate 2, but in the layered body 40Α In the middle of being transported and/or reversing, the resin layers 3 and 4 may be impregnated into the fibrous base material 2, and the laminated body 4〇A may be transported, and the resin layer 3 and the pair of the fibrous base material may be subjected to 2 impregnation. In the eighth embodiment, the laminated body 4〇A of the middle 2 light 72a and the second roll 72b, and the environment downstream of the transport direction are atmospheric pressure or more (in the present embodiment, the atmosphere I), the second roll 72a and the second lucky bed. 72b, the layered body 4〇A is sent out at the atmosphere [the above materials. Thereby, the laminated body is pressurized by the outside by a force of at least atmospheric pressure, and the impregnation of the resin layers 3 and 4 with the inner portion of the lining base material 2 can be promoted. The above-mentioned obtained screen compensation sheet 40A is extruded to the left side in Fig. 1 by the rollers 77c and 77d. According to this embodiment, the same effects as those of the first embodiment can be exerted in addition to the above effects. Although the apparatus for manufacturing a laminated sheet of the present invention and the laminated sheet of the present invention have been described above with reference to the embodiments shown in the drawings, the present invention is not limited thereto, and the manufacturing apparatus of the laminated sheet and the components constituting the laminated sheet can be used in the same manner. Any component of the function is replaced. Also, any constituents may be attached. Further, the manufacturing of the laminated sheets is performed by arranging one set of the third rolls ‘ in the configuration shown in Fig. 1. However, the present invention is not limited thereto, and for example, three or more sets of odd arrays may be provided. 101111297 201247411 In addition, each of the first roller and each of the second and third members has a different outer diameter of the main body portion, but the outer diameter of the main body is different from each other. For example, the outer diameter of the main body portion may be Same to each other. Further, the manufacturing apparatus of the laminated sheet may be configured to dry the laminated sheet fed between the two sheet materials. Further, in the configuration shown in Fig. 7, in the configuration shown in Fig. 7, the rhyme layer is bonded to both surfaces of the fiber base material. However, the present invention is not limited thereto, and the resin layer may be joined only to one side of the fiber base material. The laminated sheet of such a configuration can also be manufactured by a manufacturing apparatus of a laminated sheet. Further, in the configuration shown in Fig. 7, the first resin composition and the second resin composition are immersed in the fiber base material, but the present invention is not limited thereto, and may be, for example, the following. The third layer of the sub-system consists of the thickness of the fibrous substrate. The whole of the first tree is impregnated and the second composition is not impregnated. The second example is a laminate in which the entire resin composition is impregnated in the thickness direction of the fiber substrate, and the i-th resin composition is not impregnated. The third example is a layered sheet in which the thickness of the fibrous base material is partially impregnated with the second resin composition and impregnated with the second resin composition. The fourth example is a layered sheet in which the second resin composition is impregnated in the thickness direction I of the fibrous base material, and the i-th resin is not impregnated. The laminated sheet I of the above four examples. The resin composition and the second resin subtractive material may be different from each other or may be identical to each other. Further, the laminated sheet of such a configuration may be produced by a manufacturing apparatus of the laminated sheet. 101111297 42 201247411 In addition, in the configuration shown in Fig. 7, the thickness of the impregnation portions 31, 41 is equal. The thickness of the non-impregnated portions 32, 42 is also equal, but the thickness of the diffusing portions 31, 41 may be different. The thickness of the non-impregnated portions 32, 42 may also vary. The laminated sheet of such a configuration can also be manufactured by a manufacturing apparatus of a laminated sheet. In addition, the laminated sheet has a fibrous base material in the configuration shown in Fig. 7, but the present invention is not limited thereto. For example, it may be a base material such as a printed wiring board instead of the fibrous base material. Further, in the first embodiment, the resin layer is disposed on the front and back surfaces of the fiber base material 2, and the resin layer may be provided only on one surface of the fiber base material 2. Further, in each of the above embodiments, the resin layers 3 and 4 are impregnated into the inside of the fiber base material 2 by the rolls 72a and 72b. However, the present invention is not limited thereto, and the resin layer 3 may not be formed by the rolls 72a and 72b. 4 is impregnated into the interior of the fibrous substrate 2. In this case, for example, in the first embodiment, since the distance in the longitudinal direction of the sheet material a 91b is extremely long, the laminated body 40 can be conveyed by the pair of sheet materials 91a and 91b. The resin layers 3, 4 are completely impregnated into the inside of the fibrous base material 2. The above invention is based on the following constituents. A manufacturing apparatus for a laminated sheet, which is obtained by bonding a resin layer having a resin layer composed of a solid or semi-solid resin composition to one side or both sides of a thin plate-shaped substrate to produce a laminated sheet. And characterized in that: 2 the resin layer is overlapped with the base material, and two sheet materials of the unbonded state are still held, and the unbonded body is held by the above-mentioned 2 101111297 43 201247411 a state in which the sheet material is decompressed by decompressing a space between the sheet materials; and when the space is depressurized by the operation of the decompression means, the sheet material (four) is unbonded The pressure-sensitive adhesive layer is bonded to the substrate to obtain the laminated sheet. (7) The apparatus for producing a laminated sheet according to (1), wherein the two sheets of the sheet material are peeled off from the laminated sheet after the resin layer and the substrate are bonded to each other. (3) The apparatus for manufacturing a laminated sheet according to (1) or (2), wherein the sheet material of the above-mentioned sheet material is hung in an endless state, and includes a pair of rolls for conveying the sheet material. (4) The apparatus for manufacturing a laminated sheet according to any one of (1) to (7), wherein the two sheets of the sheet material are conveyed in the same direction, and the space is depressurized. (7) The manufacturing of the laminated sheet of (3) or (4), wherein the pair of sticks are provided with the sheet material of the two sheets, and the sheet materials of the two sheets are made The plurality of auxiliary rollers that are airtight and tightly bonded to each other in parallel with the conveying direction. (6) The apparatus for manufacturing a laminated sheet according to (7), wherein the edge portion is heated and softened when the edge portions of the two sheet materials are danced with each other. (7) The apparatus for manufacturing a laminated sheet according to (6), wherein a cooling means for cooling the softened edge portion after the edge portions are adhered to each other is provided. The manufacturing apparatus of the laminated sheet according to any one of (3) to (7), wherein the one side wall portion is disposed opposite to each other, and is in the pair of wall portions a case in which an opening is formed on one side, and a pair of the substrate is fed between the two sheets of material between the pair of rolls and the pair of wall portions a feeding roller; the space is surrounded by the one of the wheels and the pair of wall portions and the pair of feeding rollers, and communicates with a small space of the door opening of the opening, and is operated by the decompression means The opening Qiu sucks the air in the space through the small space to decompress the space. (9) The apparatus for manufacturing a laminated sheet according to (8), wherein the pressure reducing means has a pump and a connecting pipe connecting the pump and the opening. (10) The apparatus for producing a laminated sheet according to any one of (1) to (9) wherein the two sheet materials are each composed of a molecular film. The present application claims priority based on Japanese Patent Application No. 2011-〇76664, filed on March 30, 2011, and Japanese Patent Application No. 2〇12-〇65〇21, filed on March 22, 2012 , all of its disclosures are used for this. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional side view showing an embodiment of a manufacturing apparatus for a laminated sheet of the present invention. Figure 2 is a cross-sectional view taken along line A-A of Figure 1. Figure 3 is a cross-sectional view taken along line B-B of Figure 1. Fig. 4 is an enlarged view of a region surrounded by a point chain line in Fig. 1. 101111297 45 201247411 FIG. 5 is a cross-sectional view taken along line D-D of FIG. 1. Figure 6 is a cross-sectional view taken along line D_D of Figure 1. Figure 7 is a cross-sectional view showing a laminated sheet of the present invention. Fig. 8 is a cross-sectional view showing a substrate produced by laminating sheets of (4) 7. Fig. 9 is a cross-sectional view showing a semiconductor device manufactured using the substrate shown in Fig. 8. Fig. 10 is a view showing the manufacturing apparatus of the second embodiment of the present invention. Fig. 11 is a cross-sectional view showing the direction of the longitudinal direction of the laminated body of the resin layer and the fibrous base material. [Description of main component symbols] br, lb, lc, id, le ' if prepreg 2 fiber substrate (substrate) 3 first resin layer 4 second resin layer 5a, 5b, 5c, 5d support 6 shell Body 8 Decompression means 10 11 Substrate laminate 12 Metal layer 13 Fibrous substrate 101111297 46 201247411 20 Boundary 30, 30A Multilayer sheet manufacturing apparatus 31 First impregnation part 32 First non-impregnation part 40, 40A Laminated sheet 40', 40A 'Laminate body 41 Second impregnation part 42 Second non-impregnation part 51 Protective sheet 52 Sheet material 61 Wall part 62 Sealing material 70 Decompression chamber (space) 71a, 71b First roll 72a, 72b Second roll 73a '73b Third roller 74 Main body portion 75 Shaft 76 Bearings 77a, 77b, 77c, 77d Drive rollers 78a, 78b, 78c, 78d Auxiliary roller 81 Pump 101111297 47 201247411 82 Connecting tubes 91a, 91b Sheet material 92 Heating means 93 Cooling means 100 Semiconductor device 200 Multi-layer substrate 201a, 201b, 201d, 201e Circuit portion 202, 203 Conductor portion 300 Pad portion 400 Wiring portion 500 Semiconductor element 501 Bump 611 Opening portion 612 Concavity portion 741 Outer peripheral surface 781 Expanding portion 911 Overlap 912 Edge 913 Space FI Crimping force F2 Decompression F3 Uniform force 101111297 48 201247411

G air 101111297 49

Claims (1)

201247411 VII. Shen Sing's patent scope: 1. A method for manufacturing a laminated sheet by bonding the above-mentioned resin layer of a sheet having a hetero-layer to a long-shaped thin plate-shaped base (four) on one or both sides to manufacture a laminated sheet. The base material is reinforced by a fiber base material that communicates in a pure direction and communicates with a hole in the back surface of the front and back surfaces, and has: a sheet that is decompressed by a decompression means, and conveys the sheet and the substrate, a step of forming a laminated body by bringing a resin layer of the sheet into contact with the substrate in a reduced pressure state; a step of feeding the laminated body by the decompression chamber; and holding the laminated body by a pair of sheet materials a step of arranging the inside of the pair of sheet materials of the laminated body outside the decompression chamber, and communicating with the decompression chamber, and by the decompression means, the pair of sheet materials are The step of decompressing the inner space. 2. The method for producing a laminated sheet according to the above aspect of the invention, wherein the laminated body is heated in the step of decompressing a space inside the pair of sheet materials. 3. The method for producing a laminated sheet according to the above aspect of the invention, wherein the substrate is continuously supplied to the decompression chamber, and the substrate is continuously fed out by the decompression chamber; The pressure means 'in the above-described step of decompressing the space between 101111297 201247411 on the inner side of the pair of sheet materials" is to suck the gas inside the substrate in the decompression chamber by the decompression means The gas in the space inside the substrate inside the pair of sheet materials is attracted. (4) The method for producing a laminated sheet according to the third aspect of the invention, wherein the step of compressing the space inside the pair of sheet materials by the pressure reducing means is performed in the above step The resin layer is impregnated inside the above substrate. 5. The method for producing a laminated sheet according to claim 4, wherein in the step of constituting the laminated body, the base material and the sheet are pressure-bonded, and the resin layer of the sheet is impregnated into the base. material. 6. The method for producing a laminated sheet according to the third aspect of the invention, wherein in the step of constituting the laminated body, the resin layer of the sheet is superposed on the front and back surfaces of the substrate, and the respective resins are The ends of the layers in the transport direction are pressed against each other such that the substrate is encased between the resin layers. 7. The method for producing a laminated sheet according to the sixth aspect of the invention, wherein the sheet material is provided on a surface of the resin layer of the sheet opposite to a surface on which the substrate abuts, supporting the resin a support of the layer; and the sheet material having the sheet material is supplied to the decompression chamber, and the resin layer of the sheet material having the sheet material is brought into contact with the base material to thereby form a laminate And the step of holding the laminated body by the sheet material of the pair of sheets. 8. The method for producing a laminated sheet according to the first aspect of the invention, wherein in the step 101111297 201247411 for decompressing a space inside the pair of sheet materials, the sheet material of the pair is The reduction is performed in the gap, whereby the sheet is pressed against the substrate by the pair of gaps. The material of the above-mentioned 9. The laminated sheet of the above-mentioned pair of the riding material is the empty (four), the middle of the above-mentioned pair of materials, and the above-mentioned pair of sheet materials are composed of the above laminated body. By _ above steps Π). If you apply for patent scope! In the space of the inner side of the pair of sheet materials, the layered sheet of the item is in the state of the step-one environment of the above-mentioned laminated body, and the sheet material by the decompression means The space inside is depressurized. " ' 11. In the manufacturing method of the laminated sheet of the item i of the patent application, in the step of decompressing the space inside the above-mentioned sheet material, the above-mentioned laminated body is conveyed while The space inside the sheet material is decompressed as described above. 12. The apparatus for producing a laminated sheet is obtained by bonding the resin layer of the sheet having the resin layer to one side of the sheet-like substrate or a laminated sheet for producing a laminated sheet; the method comprising: a: a decompression chamber for supplying the sheet and the substrate, and decompressing by a decompression means; and pressing the sheet in the decompression chamber with the substrate a pressure-adhesive means for adhering to a laminated body; and 101111297 52 201247411 holding a sheet material of two sheets of a laminated body which is sent out from the decompression chamber, and is configured to: hold the laminated body on the two sheets a state between the materials, a space between the two materials is connected to the decompression chamber; β is actuated by the fading means, and the space is decremented by the anechoic chamber by decompressing the space 2 tablets The sheet material is crushed by the above-mentioned laminated body, and the above-mentioned sheet material is bonded to the above-mentioned substrate to obtain the above-mentioned laminated sheet. The apparatus for manufacturing a laminated sheet according to claim 12, wherein each of the above-mentioned sheet materials is 14. The manufacturing apparatus of the laminated sheet according to the thirteenth aspect of the invention, wherein the sheet material is disposed between the pair of rolls, and the sheet material is conveyed A plurality of auxiliary rolls of the sheet material of the W material which are in close contact with the conveying direction. 15. The laminated sheet of claim 14 is provided with the above-mentioned edge of the sheet material of the two sheets. a heating means for heating and softening the edge portion. The cooling means for cooling the edge portion of the portion is provided in the manufacture of the laminated sheet of the fifteenth aspect of the application. After the close adhesion, the above-mentioned slow-moving dreams are set, in which, π·, for example, the manufacturing of the laminated sheet of 12 patents (4), has: * ' The first light of the pair of substrates to be sent out; 101111297 53 201247411 The second roller that is disposed on the substrate of the ith roller is placed on the downstream side of the substrate transport direction and the second roller, and is disposed on the first roller. And a third roller which is disposed on the second surface of the pair of the above-mentioned pair, and the third roller on the J surface side and the back surface side, respectively, is one of the above-mentioned 1" which is surrounded by the sheet material in an endless state. The other one of the pair of the fourth pair of the pair of rollers is the other one of the pair of rollers that is hung by the sheet material in an endless state; Decompressing in a first space surrounded by the first light, the second pair, and the third newspaper; and the first roller is a roller that feeds the substrate into the second space; On the front side or the back side of the substrate, the sheet is fed into the second space by one of the third rolls and one of the second rolls; and the second roll is used to form the substrate and the sheet. The resin is laminated and adhered, and the laminate containing the substrate and the sheet is sent to the above 2 a roll between the sheet materials of the sheet; the space between the sheet materials being in communication with the second space. 18. The apparatus for manufacturing a laminated sheet according to claim 12, wherein the two sheet materials are each composed of a polymer film. 19. A manufacturing apparatus for a laminated sheet, comprising: continuously supplying a porous substrate having a pore formed in a transport direction and communicating to a back surface of 101111297 54 201247411; and a decompression chamber having a resin layer; a decompression means for decompressing in a room; a pressure-adhesive means for laminating a porous substrate which is supplied to the decompression chamber and laminating the resin; and a continuous feeding by the decompression chamber The layered body is heated to impregnate the resin layer with the impregnation means in the porous substrate. 20. The apparatus for manufacturing a laminated sheet according to claim 19, wherein the pressure-adhesive means is configured to be a hole inside the porous substrate after the resin layer is pressure-bonded, and is located in the decompression chamber, The resin layer and the porous substrate are pressure-bonded to such an extent that the pores of the porous substrate before the pressure-bonding layer are bonded to each other; and the manufacturing apparatus is configured to reduce the pressure by the pressure reducing means. The room is in a decompressed state, and the above-mentioned laminated body 'obtained by the above-mentioned pressure-adhesive means is heated by the above-described impregnation means. [21] The apparatus for manufacturing a laminated sheet according to the second aspect of the invention, wherein the porous substrate and the pair of resin layers are supplied in the decompression chamber, and the diffusing means is the porous substrate. And the pair of resin layers disposed to hold the porous substrate are pressure-bonded; • the width of the base material in the direction orthogonal to the transport direction: the inch is smaller than the above resin layers The transport direction is a width dimension in a direction orthogonal to each other; X The pressure-adhesive means is a means for adhering the end portions of the pair of the resin layers in the width direction to each other to cause the base material to be enclosed between the resin layers. 101111297 55