TW200818999A - Laminating apparatus and lamination method using same - Google Patents

Laminating apparatus and lamination method using same Download PDF

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Publication number
TW200818999A
TW200818999A TW096120598A TW96120598A TW200818999A TW 200818999 A TW200818999 A TW 200818999A TW 096120598 A TW096120598 A TW 096120598A TW 96120598 A TW96120598 A TW 96120598A TW 200818999 A TW200818999 A TW 200818999A
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Taiwan
Prior art keywords
film
strip
shaped
substrate
resin material
Prior art date
Application number
TW096120598A
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Chinese (zh)
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TWI395520B (en
Inventor
Ryoichi Yasumoto
Kazutoshi Iwata
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Nichigo Morton Co Ltd
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
    • B29C43/183—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles the preformed layer being a lining, e.g. shaped in the mould before compression moulding, or a preformed shell adapted to the shape of the mould
    • B29C43/184—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles the preformed layer being a lining, e.g. shaped in the mould before compression moulding, or a preformed shell adapted to the shape of the mould shaped by the compression of the material during moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/06—Platens or press rams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/20—Making multilayered or multicoloured articles
    • B29C43/203—Making multilayered articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0047—Preventing air-inclusions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
    • B32B37/16—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating
    • B32B37/22—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with all layers existing as coherent layers before laminating involving the assembly of both discrete and continuous layers
    • B32B37/223—One or more of the layers being plastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B39/00—Layout of apparatus or plants, e.g. modular laminating systems
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
    • B29C2043/3652—Elastic moulds or mould parts, e.g. cores or inserts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/56—Compression moulding under special conditions, e.g. vacuum
    • B29C2043/561—Compression moulding under special conditions, e.g. vacuum under vacuum conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/60—In a particular environment
    • B32B2309/68—Vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/08—PCBs, i.e. printed circuit boards
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/0007—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality
    • B32B37/003—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding involving treatment or provisions in order to avoid deformation or air inclusion, e.g. to improve surface quality to avoid air inclusion
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings
    • H05K3/281—Applying non-metallic protective coatings by means of a preformed insulating foil

Abstract

This invention provides a laminating apparatus and lamination method that enable a film-like resin layer to closely conform to the profile of a substrate, leaving no residual air bubbles between the substrate and the film-like resin layer, even if the spacing among irregularities on the substrate surface is very minute. Provided is a vacuum laminating apparatus 2 that includes a pair of heat platens 23 and 26 opposing each other, wherein at least one of these heat platens 23 and 26 is able to be moved toward or away from the other heat platen. This vacuum laminating apparatus 2 constitutes a laminating apparatus that laminates a film-like resin material onto an irregular surface of a substrate 8a that exhibits such irregularities on at least one of its upper and lower surfaces, thereby forming a laminate 9, wherein an elastic pressing plate 24(27) that is brought into contact with, and used to apply pressure to, the surface of the film-like resin material 8b is provided on the surface of the heat platen 23(26) that opposes the film-like resin material.

Description

200818999 九、發明說明： 【發明所屬之技術領域】 本，”-種印刷電路基材等製造時使用 使用此專之®層方法，更詳言之，係關於—種疊射置】^及 ，疊層方法，藉由使膜狀樹脂層密接服貼在 基材，而使得基材與膜狀樹脂層之間不殘存氣j材二 【先前技術】 $來，伴隨著電子裝置小型化、高性能化，印刷 之咼岔度化、多層化愈形進展，以電路基材 口 基材 ，裝縣板·_途者也增加。像賴;；^^為夕= 2化型樹脂組合物或感光性樹脂組合物作绫 層使用，在預先形成之内層電路之上，涂卞為电'、、巴緣 合物或感光性樹脂組合物，或將上述熱“月::且旨組 性樹脂組合物所構成之膜狀樹脂層予以疊層之方』逸Γ-或感光 用光阻膜，以卉推耔岡垒，、-人μ知鐘鋼後，再度使 被有效地使用τ_化响成祕之方法，即所謂建成法， 地疊iiiSi:的在ίΐ:Γ基材上，將膜狀樹脂層平坦 非隔膜式之真置像爾術，有_式_層裝置或 ^隔膜式真空疊層裝置’有 由製置::真空室-由:固定於支持塊心】構 工瑕i缸同74a而升降自如之下侧殼體構件75,所槿& 上逑上側殼_㈣曝婦魏76體 200818999 構件75内，配置有藉由缸筒裝置74b而升降自如之下側加壓塊 77。又，上述上側加壓塊76内，收納有加熱板78，同時，此加熱 板78之加壓面側，以隔膜79被覆，藉此，上述上侧加壓塊76之 内部=間（以隔膜79被覆之空間)成為密閉構造。能成為真空狀態 3 或加壓狀態。又，同樣地，上述下侧加壓塊77内亦收納有加熱板 j 80，同時，此加熱板80之加壓面側以隔膜81被覆，藉此，上述 • 下侧加壓塊77之内部空間（以隔膜81被覆之空間）亦成為密閉構 造，能成為真空狀態或加壓狀態。 並且’於將基板82予以加熱加壓時，將基板定位於真空 至71内之中央部，使空氣缸筒1上升，於在上侧殼體構件73 鲁 使下侧殼體構件75密接所形成之真空室71内於減壓狀態，以加 ，板78、80對保持在基板82表面之膜狀材料進行加熱，於此狀 態，將缸筒裝置74b伸長並使下侧加壓塊77上升，將基板82夾 ，在上下兩加壓塊76、77之間並加壓，在此加壓時，使上下兩加 壓塊76、77之内部空間其中之一或兩者成為加壓狀態，能以隔膜 79、81其中之一或兩者，將基板82表面之膜狀材料 如，參照專利文獻1)。 ^又，就非為隔膜式之真空疊層裝置(非隔膜式真空疊層裝置) 而言:有人提出如圖32之疊層成形裝置。此疊層成形裝置，具有 _ 真空=層機91及平坦化壓製機(presser)92，在真空疊層機91及平 土_化壓‘機92兩者，設有上下一對熱盤93a、93b、94a、94b。並 、 且，於真空疊層機91，於真空狀態將疊層材95、被疊層材96以 兩熱盤93a、93b予以加熱加壓，而將被疊層材疊層在疊層材 ▲ %，於平坦化壓製機92，在兩熱盤94a、94b彼此相對的面缓 衝材層設置可彈性變形之鏡面板(皆未圖示），將疊層材95、被疊 層材96以兩鏡面板予以加熱加壓，而使疊層材95之表面平坦化。 又，於上述，空疊層機91之中亦為，在兩熱盤93a、93b彼此相 =之，，^著緩衝材層設置可彈性變形之鏡面板(皆未圖示），於真 空氣態將疊層材95、被疊層材96以兩鏡面板予以加熱加壓，而另字 200818999 被疊層材96疊層於疊層材％ (例如，來昭 [專利文獻1]日本特開2003_18_號、=文獻2)。 [專利文獻2]日本特開2〇〇2·12〇1〇〇 報 【發明内容】 (發明欲解決之問題） 然而，於隔膜式真空疊層裝置，由於 〜3腿左右)，故於基板82之凹凸間.隔微細〇 ==度厚(2 (40"nm上)之情形，難以使膜狀材(m或凹凸深 板82與膜狀材料之間會殘存氣泡。另—方m反^’在田基 裝置，於能輕易地以強壓力對厚度薄之基材至尸^美车豐， 之觀點’較隔膜式真空疊層裝置更為有利，但加壓 裝置’由於係以上下一對熱盤93a、93b或鏡面柄蔣成形 疊層材96予以加壓，故與隔膜式真疊95、被 96之凹凸間隔微細(20師左右)戍凹&^置间樣，於被疊層材 以使叠層㈣雜』』 層材95之間會有氣泡殘存。 ^在被1層材96與豐 像這種事情而生，目的在於提供—種疊層裝置 3 :乃法，即使於基材之凹凸間隔微細或凹凸深之 脂層之間残存氣泡。紐冰基材並且於基材與膜狀樹 (解決問題之方式） 為了達成上述目的，本發明提供一種疊層裝 少η—對相對向之附設加熱機構之熱盤，二等《 對於表ί兩面1中由此真空絲裝置’ 胺此科hua/、甲至 ，、有凹凸之基材之上述凹凸面，疊層 巧树月日材料而形成疊層體’第1要旨為-種疊層裝置.斑上述膜 向之熱盤’在上述膜狀樹脂材料侧之面:設有將 膜狀树崎料予以加壓之雜加壓板，第2要旨為—種疊層方法， 200818999 係使用上述疊層裝置，在矣 :::疊層膜狀樹脂材料:形=體昇有凹凸之基材 另一者前進後退，藉由此直处厭勒:…皿，、甲至乂其可相對於 其一具有凹凸之美製裝置，對於表背兩面其中至少 此方式，本發料扣加叙雜加紐。以 材料之表面層二用上述彈性加壓板對於膜狀樹脂 於膜狀樹㈣办ΐ，耻’能藉由上述雜加壓板以強壓力對 「表面加壓，腾加麟，祕上棘性加壓板 :之=材與_脂二 ί s t於使用上述疊層裝置，故能發揮上述優異效果。 氟橡膠所^^上娜性加驗由耐熱性細橡膠或耐熱性 =巧構成之情形’上述彈性加壓板雜性優異，再者，藉由 錄4ϋΓΪΓ加壓板設置纖維層或將上述彈性加壓板加硫黏接於不 ίίϋ板體ί使用，能在上述彈性加壓板受壓製時，抑制上述 古士二歧在壓製之加财向及相對於此加壓方向成垂直之垂 ίϊ向Ϊ長’能對於基材之凹面上之膜狀樹脂材料與凸面上之膜 3月曰材料’解地傳達加壓力，改細狀翻旨材觸於基材之 ，、接服貼性，同時強度亦為優異’即使在高溫下反複加壓，亦能 抑制上述彈性加壓板之伸張變形。 ，者本發明中，於上述彈性加壓板具有纖維層之情形，即 使於咼溫下反複施行加壓，亦能抑制上述彈性加壓板之伸張變 开> ’膜狀樹脂材料對於基材之服貼性或密接性優異，能提高上述 200818999 彈性加壓板之耐久性。 又’本發明中，上述彈性加壓板之ShoreA 4 彈性力*猶之表面，施以屢印加工或化學性離層體接觸之 之表面i舨ίΓ: Γ於上述彈性加壓板在與膜狀樹脂材料接觸 之，面為粗糙化之情形，於以上述彈性加I板加， 力月中，於與述膜狀樹脂材料相對向之敎盤盘彈性 板狀體，於將此板狀體與彈性加壓板^接= 性優異，缺上述加紐之職性或密接 之』者上中板ίέ^ϊίΐΐ板狀體之間設有緩衝材 籍衡作田扳狀體製作寸之尺寸誤差等能藉著緩衝材之 loading)等。’能齡上述熱盤與板狀體之不均勻接觸(Partial 第2膜揉1於具備：第1膜捲繞親’捲繞有第1帶狀膜； 狀膜；第與此^膜捲繞輥相對向而設置之第2帶’ 第i、及第2 * 取輥，將捲繞在上述第1及第2膜捲繞輥之 % 之兩執般門===目對向狀g拉出並使通過上述真缝製裝置 狀給娜，對於從上述兩膜捲她拉出之兩帶 空堡I ’可藉由上述兩帶狀膜將暫時疊層體對真 200818999 ^Mus.ies 供給。 LD_2400)等製作，並對於本發明之疊層裝置 樹脂材料成為1樹脂材料捲繞輥，捲繞有使膜狀 上述基材在其間之第！ 構;真空顯裝置，將夾持… 盤間，並藉由此動作，在笑材之^H樹脂材料導入於上述兩熱 帶狀膜狀樹脂材料^以’形成將上述第1及第2 體之機構(捲取上述帶狀述帶狀疊層 ‘麵心 帶狀疊層體。本發連續或地)相連的 單面，也不需要為了形成在在基材之 =暫時疊層體π的上述自動片材裁切以;有= 料拉牽，第，只要能同樣地使帶狀4 發明之構成不限定於引導輥。 引¥輥也同樣地，本 述前S膜料於狀基板之情形，上 地供ί形成—連串相連的ΐίΐίΡ歇地或連續 f ^f25 f 1 几嘴②z ▼狀膜;引導該等之第1及第2引 10 200818999 導機構;捲取上述第1及帛2帶狀膜 . ^ 材料捲繞輥拉出並將基材夾持在其之將1 1 2樹脂 成帶狀疊層體，於第1及第2 ▼狀减持之狀悲’形 % 取之情形，於帶狀料卿㈣狀f與上速帶狀疊層體係分別捲 真空屋製裝置之兩G等。"、’此防止軟化的膜狀樹脂附著在 敎般又且ίί=祭ΐϊΐί面壓製裝置，其具有相對向之-對 g面董tr目對於另一者前進後退。“ „ . 、 兩”、、k對於由上述直空壓赞#詈所报#今田 層體之表背兩面予以加壓使平滑一 置斤形成之$ 疊層體之表背兩面平滑化使之_，能糾平面壓製裝置使 【實施方式】 [據以實施發明之最佳形態] 其次，將本發明之實施形態，依摅 不限於此等實施形態。 ㈤砰^兄明。惟本發明 上过、發明之疊層裝置之—實施形態。此實施形離中， 基板(圖2及圖3參照)流向(參照圖i之係從 上述運送膜釋出部1，如圖4擴大圈^之^游朝向下游。 捲繞輥(第1膜捲繞輥)11，捲繞有上側備；送膜 ί)Ϊ膜(第3捲_2、，捲繞有下側運送ΐ第2^ 空登層，置以=之相對向的上下一對熱盤 捲取部4(參照圖捲取在運送膜 …领清取輥(弟1膜捲取輥)14，且 200818999 從下側運送繼魏12 _之下_魏 疊層裝置2及平面纖置3之相對向的上下―=過真广 47、51之間後，捲取在運送膜捲取部4之下于輥^ : 本㈣巾，減係指具有 具體:ΐ上;:=二 層衣置2及千面堡製裝置3之目的，暫時疊層 體9之寬度寬10〜40mm左右。如果滲真二 置3之膜狀樹脂附著，則附著 以以 «品之支持舰。滲出之樹脂_著之部 === 厚度，會使·著概之厚度變厚該厚度，使b 上内下兩運送膜5、6之運送速度，通常 用么ϋ 所示’運入輸送帶(供給機構)13，如上所述，作 ^接又暫層體7，並將此暫時疊層體7對於 運 、6之間供給。暫時疊紐7，可藉由將與該暫時疊層 二邊，視需要，藉由使能以空氣缸筒说升 層體止…在上輕直之邊全體或械、中央部 ίίίί陳抵接而停止，以使得供給予上下兩運送心、6間之前， ίίϊ=。暫時疊層體7，係將具有凹凸之基材8a(以下，簡稱 2材㈣’與以重疊在此基材凹凸面之狀態(例如， «月曰材料8b之角或外側邊之中央部，以點狀或將周緣部之丄邊以 12 200818999 線狀加巧加壓或加壓等而黏接固定)暫時固定之膜狀樹脂材料8b =斤構成(,麥照圖2)。具有凹凸之基材8&，例如可使用施用銅、焊锡 等圖案等之印刷基板’又’也可使用建成法等使用之多疊層基板。 基材8a之厚度或縱橫尺寸，不特別限定，厚度以〇1〜1〇_之範 圍内為气、赌尺相15。〜_nm之範圍啸佳。離樹脂材料 8b(_真空豐層後成為膜狀樹脂層8c)，只要是具有黏著性或黏接性、 熱，性，或⑽__溫度以上軟化之樹雜為域分之樹脂 irt則不特別限制’尤以帶有電絕緣性者為有用。像這種樹 二i5物/要有環氧樹脂、環氧概所構成之触化性樹脂细 ^私^性不飽和化合物及光聚合起始綱構狀絲性樹脂 貫施形態之中’上述暫時疊層體7，由表背兩面具有 Ξΐΐ L以及預先暫時_於此基材8a之表背兩面之凹凸 浐材料mu脂材料8b(將捲繞在捲繞心軸之帶狀膜狀樹 材肋疊層龄，裁切成為短則材狀者) 所構成’於基材8a之表背兩面之中僅有—者 = 可僅將膜狀樹脂材料8b暫時目定在具有凹凸'之面。^ ^ ，Λ 暫日士ί:ΐ雜Ϊ空疊層裝置2 ’將以上下兩運送膜5、6運送過來的 料月:ί ^ a，以真空狀態加熱加壓，在基材8a疊層有膜狀 ί 二油二或籍= 能上ϊί;同之作動（伴隨絲塞桿1之上升及下降） 22 ^ 23 材料8b(參照圖2)之^^將暫層體7之上側膜狀樹脂 於下部L自====側彈性加⑽， U疋·千板狀之下侧絕熱材料％、下侧 13 200818999 Γ，26、真空疊層時將暫時疊層體7之下側膜狀樹脂材料8b(圖2 芩照)之表面予以加壓之橡膠製下侧彈性加壓板27(參照圖乃。 '又，上述兩彈性加壓板24、27固定在兩熱盤23、26之固定 方法、，不特別限定，可使用框體、螺栓、轴環等固定機構(未圖示 之方^，或於將兩彈性加壓板24、27與兩熱盤23、26之間密封 之狀心使其内部減壓，而將兩彈性加壓板％、27吸附固定為雨 熱盤23、26之方法等各種方法。 Λ ^ ’就其他的歡方法而言，在上述兩彈性加壓板24、^盘 ί ί ΐΛ、26之間’各設置金屬板24a、27a(參照圖8)，將兩彈 πϊί板27加硫黏接在該等兩金屬板24a、之-侧面， 同=兩熱盤23、26以螺栓、軸環等固 ： 將彈性域板24、27加硫雜之侧狀J。g另 封3適ίΪ用於將兩熱盤23、26與兩嫩24a、27a 定内部減壓，而將兩金屬板2如、2%吸附固 疋在?熱盤23、26之方法等。又，如圖8所示辦 f兩彈性加壓板24、27與兩熱盤23、 屬土板; 與兩熱盤23、26之間，各咬詈呈右舰^^兩金屬板24a、27a’ 將獅★段m 谷置具有橡轉性專之緩衝材24b、27b， ，性加聽24、27加雜胁❺ 並且可將彈性_板24、27之一側T : 2，兩側面， 如上所述，如果將彈性加壓板24加炉'、' 泰b使用。 祝之兩侧面，則於彈性加驗24或^^24a ' 時’可將蝴接有損傷的彈性加壓)反 到表面 式表月反向文裝而繼續生產，於裝 f材^用之方 上部板20之下表面。上側熱盤23，示)固定在 圖示)固定在上側絕熱材料.22，上;^=螺;冒等固定機齡 定在上側缝23下表面。又，下24 ’直接地黏接固 固定機構(未圖示)固定於下部板21 = 25，以螺栓、螺帽等 上表面。下側熱盤26，以螺 14 200818999 栓、螺帽等固定機構(未圖示)固定於下侧絕熱材料25，下侧彈性 加壓板27，直接地黏接固定於下侧熱盤26之上表面。又，如果將 上，(下部)板20(21)與上侧(下侧)熱盤23(26)，直接地以螺栓、螺 帽等固定麟目定，則上侧(下侧)鐘23(26)之熱 螺帽等而傳導到上部(下部)板2〇(21)，故不佳。匆、、系桎 於上下兩熱盤23、26，其内部適當地配置用以將彈性加壓板 =、27加熱之可控溫之加熱機構。財施形财，就上述加^ ，。上^熱f23、26之内部平行配置著多條鞍(she剛狀加 …為23a、26a。後述上下兩熱盤47、51，亦為同樣構造。 如s ί ΐ 2 ’具備可動真空框3G。此可動真空框30，200818999 IX. Description of the invention: [Technical field to which the invention pertains] This, "the use of this special layer method is used in the manufacture of a printed circuit substrate, etc., more specifically, regarding a kind of superposition" ^ and In the lamination method, the film-like resin layer is closely attached to the substrate, so that no gas is left between the substrate and the film-like resin layer, and the electronic device is miniaturized and high. Performance, printing, and multi-layered progress, the circuit substrate base material, the county board, _ way also increased. Like Lai; ^ ^ Eve = 2 chemical resin composition or The photosensitive resin composition is used as a ruthenium layer, and is coated on the previously formed inner layer circuit as an electric ray, a bastard or a photosensitive resin composition, or the above-mentioned heat "month:: The film-like resin layer composed of the composition is laminated on the side of the 』-- or the photosensitive photoresist film, and the 垒 垒 , , , , , , , , , , , , , , , , , , , , 人 人 人 人 人 人 人 人 人 人 人 人The method of ringing the secret, the so-called built-in method, the stack of iiiSi: on the ΐ: Γ substrate, the film-like resin layer is flat Tanfei diaphragm type true image, there is _ type _ layer device or ^ diaphragm type vacuum lamination device 'has been made:: vacuum chamber - by: fixed in the support block heart" structure 瑕i cylinder with 74a Further, the side case member 75 is lifted and lowered, and the upper side case _(4) of the upper side of the upper case _(4) is placed in the member 75, and the lower side pressing block 77 is lifted and lowered by the cylinder device 74b. Further, the upper side pressing block 76 houses the heating plate 78, and the pressing surface side of the heating plate 78 is covered with the diaphragm 79, whereby the inside of the upper pressing block 76 is interposed (with a diaphragm). The space covered by 79) is a closed structure. Can be vacuumed 3 or pressurized. Further, similarly, the lower pressing block 77 also houses the heating plate j 80, and the pressing surface side of the heating plate 80 is covered by the diaphragm 81, whereby the inside of the lower pressing block 77 is provided. The space (the space covered by the diaphragm 81) also has a hermetic structure and can be in a vacuum state or a pressurized state. Further, when the substrate 82 is heated and pressurized, the substrate is positioned at a central portion in the vacuum to 71, and the air cylinder tube 1 is raised to form a lower side case member 75 in close contact with the upper case member 73. In the vacuum chamber 71, the film material held on the surface of the substrate 82 is heated by the plates 78 and 80 in a reduced pressure state. In this state, the cylinder device 74b is extended and the lower pressurizing block 77 is raised. The substrate 82 is sandwiched between the upper and lower pressing blocks 76 and 77, and when pressurized, one or both of the internal spaces of the upper and lower pressing blocks 76 and 77 are pressurized. The film material of the surface of the substrate 82, either one or both of the separators 79 and 81, is referred to, for example, Patent Document 1). Further, in the case of a diaphragm type vacuum lamination device (non-diaphragm vacuum lamination device), a lamination forming device as shown in Fig. 32 has been proposed. The laminate forming apparatus has a vacuum laminator 91 and a flattening presser 92. In the vacuum laminator 91 and the flattening pressurizing machine 92, a pair of upper and lower hot plates 93a are provided. 93b, 94a, 94b. Further, in the vacuum laminator 91, the laminated material 95 and the laminated material 96 are heated and pressurized by the hot plates 93a and 93b in a vacuum state, and the laminated material is laminated on the laminated material ▲ %, in the flattening press 92, an elastically deformable mirror panel (none of which is shown) is provided on the surface cushioning material layers facing the hot plates 94a and 94b, and the laminated material 95 and the laminated material 96 are The two mirror panels are heated and pressurized to planarize the surface of the laminate 95. Further, in the above-described empty laminator 91, the hot plates 93a and 93b are mutually coupled, and the cushion layer is provided with an elastically deformable mirror panel (all not shown) in a vacuum gas state. The laminated material 95 and the laminated material 96 are heated and pressurized by the two mirror panels, and the other layer 200818999 is laminated on the laminated material % by the laminated material 96 (for example, Japanese Patent Laid-Open Publication No. 2003-18) _ number, = document 2). [Patent Document 2] Japanese Patent Application Publication No. 2〇〇2·12〇1〇〇 [Summary of the Invention] (The problem to be solved by the invention) However, in the diaphragm type vacuum lamination device, since it is about 3 legs, it is on the substrate. Between the unevenness of 82. When the fine 〇 == degree is thick (2 (40 " nm)), it is difficult to make the film material (m or the concave-convex deep plate 82 and the film-like material will remain bubbles. ^' In the field-based installation, it is more advantageous to use a diaphragm-type vacuum laminating device than a diaphragm-type vacuum laminating device, which can easily press a thin substrate to a corpse. The pair of hot plates 93a and 93b or the mirror-handle-shaped laminated material 96 is pressurized, so that it is spaced apart from the diaphragm-type true stack 95, and is finely spaced by the unevenness of 96 (about 20 divisions). The laminated material is such that bubbles are left between the laminated (four) mixed sheets 95. ^ It is produced by the one-layer material 96 and the abundance of the image, and the object is to provide a laminating apparatus 3: Even if there are bubbles remaining between the uneven layer of the substrate and the fine layer of the unevenness, the ice substrate is on the substrate and the film-like tree (the way to solve the problem) In order to achieve the above object, the present invention provides a hot plate with a heating device attached to the η-pair, and a second-order "for the vacuum wire device of the two sides of the surface", the amine hua/, A to The above-mentioned uneven surface of the base material having the unevenness, and the laminated body is formed by laminating the sapphire material. The first principle is a type of laminating device. The smear of the film is applied to the hot plate of the film-like resin material side. The surface is provided with a mixed pressurizing plate for pressurizing the membranous tree material, and the second is a lamination method, 200818999, using the above-mentioned laminating apparatus, in the 矣::: laminated film-like resin material: shape = The body of the body has a bump and the other side advances and retreats, whereby the straight line is distracted: ..., the dish, the nail to the 乂 can be compared with one of the US-made devices having the concave and convex, for at least one of the two sides of the front and back, The hairpin of the present invention is added to the surface of the material. The surface layer of the material is used for the film-like resin in the film-like tree (4), and the shame can be pressed against the surface by the above-mentioned hybrid pressure plate. Pressurized, Teng Jialin, secretly ratcheting pressure plate: the = material and _ fat two ί st in the use of the above laminate The above-mentioned excellent effect can be exerted. The fluororubber is excellent in the heat-resistant fine rubber or the heat resistance = the above-mentioned elastic pressure plate is excellent in the above-mentioned elastic pressure plate, and further, by recording The pressure plate is provided with a fiber layer or the above-mentioned elastic pressure plate is sulphur-bonded to the slab, and the above-mentioned elastic pressure plate can be suppressed when the above-mentioned elastic pressure plate is pressed, thereby suppressing the increase of the above-mentioned Gu Shi diqi in the suppression and relative to The direction of the press is perpendicular to the ϊ ϊ Ϊ ' 能 能 对于 对于 对于 对于 对于 对于 对于 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜 膜The material is excellent in strength and excellent in strength. Even if it is repeatedly pressurized at a high temperature, the elastic deformation of the elastic pressure plate can be suppressed. In the present invention, in the case where the elastic pressure plate has a fiber layer, it is possible to suppress the stretching of the elastic pressure plate even if pressure is repeatedly applied at a temperature of &; 'membranous resin material for the substrate Excellent conformability or adhesion, which can improve the durability of the above-mentioned 200818999 elastic pressure plate. Further, in the present invention, the surface of the above-mentioned elastic pressure plate ShoreA 4 elastic force* is applied to the surface of the printing process or the chemical separation layer, i 舨 Γ 上述 上述 上述 上述 上述 上述 上述 上述In the case where the resin material is in contact with the surface, the surface is roughened, and the elastic plate-like body is opposed to the film-like resin material in the above-mentioned elastic and I-plate, and the plate-shaped body is formed on the disk. It is excellent in the performance of the elastic pressing plate, and it lacks the position or closeness of the above-mentioned Knauf. The middle plate έ έ ϊ ΐΐ ΐΐ ΐΐ 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 设有 籍 籍 之间 之间 尺寸 尺寸 尺寸 尺寸 尺寸 尺寸 尺寸It can be loaded by cushioning material, etc. The uneven contact between the hot plate and the plate-shaped body of the energy age (Partial second film 揉1 is provided with: the first film winding member is wound with the first tape film; the film; the film winding The second belt 'the i-th and the second-side take-up rolls, which are disposed opposite to each other, are wound around the first and second film winding rolls, and the two doors are oppositely oriented. And letting through the above-mentioned true sewing device to give Na, for the two belts that are pulled out from the above two films, I can supply the temporary laminate to the real 200818999 ^Mus.ies by the above two strip films. LD_2400), etc., and the resin material of the lamination device of the present invention is a resin material winding roller, and the film-like substrate is wound therebetween! a vacuum display device that holds the ... between the disks and, by this action, introduces the material of the laughing material into the two tropical film-like resin materials to form the first and second bodies The mechanism (rolling up the strip-shaped laminate of the above-mentioned belt-shaped laminated layer) is a single-sided continuous or continuous connection, and is not required to be formed on the substrate = temporary laminate π The above-mentioned automatic sheet is cut, and the material is pulled, and the configuration of the belt-shaped invention is not limited to the guide roller. Similarly, when the front S film is used in the case of a substrate, the upper layer is formed by a — ΐ ΐ 相连 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 或 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; 1st and 2nd cited 10 200818999 Guide mechanism; winding the above 1st and 2nd strip film. ^ Material winding roller pulls out and holds the substrate between them 1 1 2 resin into a ribbon laminate In the case of the 1st and 2nd ▼-like reductions, the shape of the sorrow's shape is taken in the case of the strip-shaped material (four) shape f and the upper-speed belt-like laminated system, respectively, and the two Gs of the vacuum house system are wound. ",' This prevents the softened film-like resin from adhering to the 敎 且 ί ΐϊΐ ΐϊΐ ΐϊΐ 面 面 , , , , , , 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 " „ . , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , _, the correctable plane pressing device [Embodiment] [The best mode for carrying out the invention] Next, the embodiment of the present invention is not limited to these embodiments. (5) 砰 ^ brother Ming. Only in the invention In the embodiment, the substrate (refer to FIG. 2 and FIG. 3) flows (refer to FIG. i from the transport film releasing portion 1, as shown in FIG. ^Swim the downstream. Winding roller (first film winding roller) 11, winding the upper side; feeding film ί) Ϊ film (3rd volume _2, winding the lower side ΐ 2nd empty The upper and lower pair of hot coil winding portions 4 are placed in the opposite direction of the opposite direction (refer to the drawing in the transport film... the take-up take-up roll (the younger 1 film take-up roll) 14 and the 200818999 is transported from the lower side. _Under _Wei stacking device 2 and the flat upper and lower sides of the flat fiber splicing 3 -= between the true and wide 47, 51, and then wound under the transport film winding portion 4 under the roller ^: (4) towel, Reduction system It has the purpose of: ΐ上;:= two-layer clothing 2 and the thousand-faced device 3, the width of the temporary laminate 9 is about 10 to 40 mm. If the film-like resin of the osmosis two is attached, the adhesion is adhered. In order to support the ship, the thickness of the resin, the thickness of the resin, the thickening of the thickness of the resin, and the thickness of the inner and lower transport films 5 and 6 on b, are usually used? ' The 'transported conveyor belt (supply mechanism) 13 is shown as being connected to the temporary layer body 7 as described above, and the temporary laminated body 7 is supplied between the transport and the sixth. The temporary stack 7 can be borrowed. By arranging the two sides of the temporary stack, if necessary, by enabling the air cylinder to lift the layer... stop at the top of the light or the center, or the central part ίίίί Before the two transport hearts, six, ίίϊ =. The temporary laminate 7 is a substrate 8a having irregularities (hereinafter, simply referred to as 2 materials) and overlapped with the uneven surface of the substrate (for example, «月曰The center of the corner of the material 8b or the outer side of the material is bonded in a point shape or by the edge of the peripheral edge portion by 12 200818999 linearly pressurizing or pressurizing. The film-form resin material 8b which is temporarily fixed is composed of a jin (Fig. 2). For the substrate 8& which has irregularities, for example, a printed substrate to which a pattern such as copper or solder is applied can be used. The multilayer substrate is used. The thickness or the aspect ratio of the substrate 8a is not particularly limited, and the thickness is in the range of 〇1 to 1 〇_, and the gambling phase is 15. The range of 〜_nm is good. The resin material 8b is removed. (The film-like resin layer 8c is formed after the vacuum layer is formed), and it is not particularly limited as long as it is adhesive or adhesive, heat, or resin which is softened by the temperature of (10)__temperature. It is useful for those with electrical insulation. Such a tree II i5 material / epoxy resin, epoxy, a tactile resin, a finely unsaturated compound, and a photopolymerization initial structure of a silk resin The temporary laminate 7 has Ξΐΐ L on both sides of the front and back, and a temporary _ 浐 material mu grease material 8b on both sides of the back surface of the substrate 8a (a strip-shaped film-like tree material to be wound around the winding mandrel) In the case where the rib laminated length is cut into a short material, the composition is 'only one of the front and back sides of the base material 8a'. Only the film-shaped resin material 8b can be temporarily visualized on the surface having the unevenness. ^ ^ , 暂 日 日 ί : ΐ Ϊ 叠层 叠层 ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ΐ ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' There is a film ί 二油二 or ji = can be ϊ ί; the same action (with the rise and fall of the wire plug 1) 22 ^ 23 material 8b (refer to Figure 2) ^ ^ will be the upper layer of the temporary layer 7 film The resin is elastically added to the lower portion L from the ==== side, (10), U疋·thousand plate-shaped lower side heat insulating material%, lower side 13 200818999 Γ, 26, vacuum lamination will temporarily laminate the lower side of the laminate 7 The lower side elastic pressing plate 27 of the rubber which is pressed against the surface of the resin material 8b (Fig. 2) (see Fig. 2), the two elastic pressing plates 24, 27 are fixed to the two hot plates 23, 26 The fixing method is not particularly limited, and a fixing mechanism such as a frame body, a bolt, a collar, or the like (not shown) or a sealing between the two elastic pressing plates 24 and 27 and the two hot plates 23 and 26 can be used. Various methods such as a method of adsorbing and fixing the two elastic pressure plates % and 27 to the rain heat trays 23 and 26, etc. Λ ^ 'In other joys, the above two elastic pressures 24, ^ ί ί ί, between the 26 'each set metal plate 24a, 27a (refer to Figure 8), two π ϊ 板 plate 27 sulfur added to the two metal plates 24a, the side, the same = two The hot plates 23, 26 are solidified by bolts, collars, etc.: the elastic domain plates 24, 27 are sulphur-like side J. g are additionally sealed for the two hot plates 23, 26 and the two tenders 24a, 27a The internal pressure is reduced, and the two metal plates 2 are, for example, 2% adsorbed in the hot plate 23, 26, etc. Further, as shown in Fig. 8, two elastic pressure plates 24, 27 and two hot plates 23 are provided. Between the two hot plates 23, 26, each bite is a right ship ^^ two metal plates 24a, 27a' will be placed in the lion ★ segment m valley with rubber-specific cushioning materials 24b, 27b, Sexually add 24, 27 plus miscellaneous ❺ and can be used on one side of the elastic plate 24, 27 T: 2, both sides, as described above, if the elastic compression plate 24 is added to the furnace ', ' Thai b. On both sides, when the elastic test 24 or ^^24a 'can be used, the elastic pressure of the butterfly can be damaged, and the surface can be reversely loaded to continue the production. The lower surface of the upper plate 20. The upper hot plate 23, shown) is fixed in the figure) Set on the upper side of the insulation material .22, on; ^ = snail; take the fixed machine age set on the lower surface of the upper side seam 23. Further, the lower 24' direct adhesive fixing mechanism (not shown) is fixed to the lower plate 21 = 25, and the upper surface such as a bolt or a nut is used. The lower hot plate 26 is fixed to the lower side heat insulating material 25 by a fixing mechanism (not shown) such as a screw 14 200818999 bolt or a nut, and the lower side elastic pressing plate 27 is directly bonded and fixed to the lower side hot plate 26 . Upper surface. Further, if the upper (lower) plate 20 (21) and the upper (lower) hot plate 23 (26) are directly fixed by bolts, nuts, etc., the upper side (lower side) clock 23 The hot nut of (26) is transmitted to the upper (lower) plate 2 (21), which is not preferable. It is hurriedly attached to the upper and lower hot plates 23 and 26, and the inside thereof is appropriately arranged with a heating mechanism for heating the elastic pressing plates = 27 to control the temperature. For the wealth of wealth, add the above. A plurality of saddles are arranged in parallel with each other in the upper heats f23 and 26 (she is just like 23a and 26a. The upper and lower hot plates 47 and 51 described later have the same structure. For example, s ί ΐ 2 ' has a movable vacuum frame 3G This movable vacuum frame 30,

26 示上下兩絕熱材料仏25、上下兩熱盤I L 圖 、27、嫩⑽ 扩邱^巧亦同)所示’具有：大致四角形棒狀之上侧固定 框部31，以氣密狀固定在該上部 、，Ώ 疋 =3+2，以氣密狀固定在下部板21。於上側、固定:部二表】 ，赁嘴33固定在穿設於該上側固定框部之周二 真空抽吸用喷嘴33，在上下兩板20、21密土封契貝人時， _ 動框32之間之_3‘照圖 厭士 古而、t 了凋正此工間部34之壓力（亦即，虚為潠定 於多數部位，壓力再者’如果設置 可動框部36轉37,將此 之上部，苴全周突中你々u t '支持者。上述下侧固定框部35 所形成之凹溝35a，嵌合此突出形成部之外周面全周 形狀，以唇形襯塾較;圭疋有嫌密封構件38。密封構件38之 迟可動框# 36 ’以上下滑動自如地外嵌於下側固定框部％ 200818999 之突出开》成部，於此狀態，藉由彈菩 亦即，彈簧37之上部插入在上述，^持 框部35。 多個(圖9〜圖u中，僅圖示2個部 y表面所形成之 於下侧固定框部35之下端突出部说上。夢===，載置 藉由彈簧37，以上·ρ移動自如± ^精此，上述可動框部36 上述可動框部36之定框部…又， 定框部35之密封構件38。、 ⑺自如地抵接於下側固 溝36Ϊ嵌士'之上表面之全周形成有凹溝36b，此凹 :用此密封構㈣ 持氣密狀。又，此密封構件39妒口 '二吏上逑空間部34内保 圖η之^，4Ga、4Qb 她錄佳。圖9〜 <、種可動真空框3G，藉由越缸筒或空氣純29陕日刀同 :為密封空間(亦;， 端突出部35===2祕__賴部35之下 送膜面壓製裝置3 ’係將從真空疊層裝置2藉由上下兩運 圖1、2)二過來的疊層體9,定位在上下兩縣塊41、42(表昭 声體9之i ^猶等上下兩屢製塊41、42進行加熱加屢，使得疊 “制平滑化者(參照圖13)，如圖12所示，具有:立設 以螺^ m (圖12中僅顯示2根)支柱祝；上壓製塊μ， Γ Ϊ可機構43b固定於該等各支柱啊下屋製塊 動地安裝於上述各支柱43轉。此下顯塊42， 氣缸筒55連結’藉由此油私筒 ^同55之作動(活塞桿55a之上升及下降），能上下移動。 關於上述上下兩壓製塊41、42，此實施形態中，上壓製塊41 16 200818999 ί上！44，自上侧起依序地固平板狀之上侧絕熱材料 6、上侧”、、赢47、平板狀之上側缓衝材48及上侧可撓性全屬板 49 ’下壓f塊42在下部基底層.自下侧起依序ϋ ==50、下侧熱盤51、平板狀之下側緩衝材= 側可撓性金屬板53 〇 邱其熱材料46以螺栓、螺帽等固定機構(未圖示)固定於上 在2表面。上側熱盤47以螺栓、螺帽等固定機構(未 =材熱材料46 ’上侧可挽性金屬板49隔著上侧緩 衝材48 Μ螺枚、軸環等固定機構(未圖示)固定在上侧埶盤47。又， 螺栓、螺帽軸定機構(未圖稍定於下部基 = 下側錢51㈣栓、螺巾W_定機構(未圖示） 52^75G。下側可離金屬板53隔打側緩衝材 累权軸玉辰等固定機構(未圖不）固定在下側熱盤51。又，如 栓將下固 | 44(45)與上侧(下側)熱盤47(51)直接以螺 wi!!4 口（機構扣固定’壯側(下侧)鍾4职)之熱容易 ^47栓ίΓΐ等，導到上部(下部)基底層44(45)，故不佳。圖 器。a a為平行配置在上下兩熱盤47、51之内部之鞘狀加熱 取_^欠^送膜捲取部4，如® 5之擴賴所示，具備：上側捲 被上側運送膜5;〒侧捲取輥15，配置在下側運送膜6 門夕姐山ί側捲取輥14更為下側;配置於上下兩捲取輥14、15之 帶(未圖示）。又，不配置此排出輸送帶亦可。又，於 滑之疊藉Λ冷^扇卻機構，將表背兩面經平 硬化，祐^ ΐ 使豐層體表面之經軟化膜狀樹脂層8c 樹表面不錢形’啊雜容驗滲出之膜狀 树月曰層8c與運送膜5、6予以剝離。 詈？ t?明之魏裝置，如上所述，最大特徵在於:在真空疊層裝 置右_ L上下兩熱盤23、26位在靠暫時疊層體7侧之面，各設 直有將批疊層體7之膜狀樹脂㈣Sb之表面予以加壓之彈性加 17 200818999 壓板24、27。 膠il兩彈性加塵板24、27之構成材料，可使用耐熱性石夕酮橡 請:ΐϊίΐΐΐ膠材料或具有彈性之各種樹脂材料，使用 佳。藉由設置此纖維層，能提高上下兩 制上之耐久性，即使於高溫下反複施行加壓亦能抑 8b、推⑽㈣H/4、27之伸張變形’能發揮膜狀樹脂材料 一#狀麻層e對於基材8a之服雜或密接性優異效果。另 Z1性力趣24、27未設有纖維層之情形，藉由 = 硫黏接於金屬板24a、W，與設有 而酽沾^ P使於鬲溫下反複施行加壓，亦能抑制上下 樹脂芦之伸張變形’能發揮膜狀樹脂材料8b、膜狀 f、!· ί歸8a之服雜絲接性《躲。 访織為ί狀ί層^ί別限^ ’較佳為使用將化學纖維或玻璃纖維 ===；!於橡膠製板狀本體61之内部，設置1或 橡取二為布狀之纖維層62而一體化者(參照圖14)， k哉車層62而一體化者(參照圖15)。 為較特別限定’以不鎮鋼板在防銹之觀點’ 撕’以G.1〜·之範圍内為佳、更佳為 乙烯tii系3如:偏a乙稀系橡膠、含氣石夕酉同橡膠、四I 輯系橡^含橡膠、含氟填腈系橡膠、含氟丙稀酸 膠等，市販品‘橡膠、含氟聚酯橡膠、含氟三哄橡 elaSt_ 公 5Ί ^T2 司製「Kiny〇board」系列、Kurehae 「Daueru」系列、枉=以材FB」系列、Daikin卫業公司製 拉司得克(音譯)」U\=衣Vit〇n」糸列、道康寧公司製「喜 列、规公司製rti、M〇ntedis〇n公司製「TECNOFL〇N」系 又，上述纖維^心雷魯(音譯)」系列、「卡努_F」系列等。 織維層之纖維材料，以玻璃纖維或聚酯或其他極性 200818999 質材斜轉姉硬㈣料、聚§旨纽域轉極性軟 之觀點為卓糸極性軟質材料等，於與橡膠材料之黏接容易 尤佳旨或尼龍在紐及耐紐優異之觀點，為較佳。 f布(將吏用耐熱性膠，並於内部設置耐熱性尼龍 以「F-200>^ 列麵公司製Kiny〇b〇ard」系列，其中 定為彳f加歡24、27之硬度’⑽A硬度設 » !- ^ 軏佺。亦即，對於上下兩彈性加壓板24、27要求 離高剝離性，上述硬度對於抗斷裂強度與剝 重大。上述ShoreA硬度如果為40度以上，則上下雨猩 良好地伸張而不易斷裂’同時能獲得耐加壓疊 彈性：ίΞ H 下兩彈性加魏24、27剝離。該等上下兩 板24、27之杈佳硬度為5〇度以上，更佳為 又，本發明中，Sh〇reA硬度係依照ns Ζ2246(200_定^ 。 為佳27之厚度以“之範圍内 之紋採1 之乾圍内。上述厚度如果太薄，則纖維声 紋理滿在上下兩彈性加壓板24、27之表面，會有纖維層二 ^稷衣彳膜狀樹脂層8C之表面的傾向，而如果 从:办 ，下侧熱盤26對膜狀樹脂層8c之熱傳導=， ㈣盤26之溫度分佈會有變得不均勻之傾向。又，上 〜之 1^肉再者;^〜4〇〇/Zm之範圍内為佳，又更佳為2〇 下祕卜“ ^圍内。上述表面粗糙度^愈大，則加敎加壓後，上 下兩淨性加壓板24、27容易從膜狀樹脂層以或 & 上下兩彈性加壓板24、27之表:4下二運複= ，月曰層8e之表面而有損及疊層體9之表面鏡面 果太小，則與膜狀樹脂層8c或上下兩運送膜5、6之密接性會變 19 200818999 加熱加壓後，上下兩彈性加壓板24、27不級膜狀樹脂 ^定C剝離。又，本發明中，表面粗糙度k，係依照瓜腦〇1 (蓮） 〇。Λ發日1之+中，使用M1之疊層裝置，以如下方式製作疊層體 ° f先’事先準備將膜狀樹脂材料8b暫時固定於基材8a之凹凸 =而成之暫時疊層體7。接著，將暫時疊層體7供給予運入輸送帶 ，並且從此運入輸送帶13供給到上下兩運送用膜5、6之間。 給之暫時疊層體7被夾持在上下兩運送賊5、6，並運入 真空疊層裝置2。 ^26 shows the upper and lower two heat insulating materials 仏25, the upper and lower heat plates IL, 27, and the tender (10) expansion and the same as the above. 'There are: a substantially square-shaped upper-side fixed frame portion 31, which is fixed in an airtight manner. The upper portion, Ώ 疋 = 3 + 2, is fixed to the lower plate 21 in an airtight manner. On the upper side, fixed: part two table], the spigot 33 is fixed to the vacuum suction nozzle 33 that is inserted through the upper fixed frame portion, and when the upper and lower plates 20, 21 are densely sealed with the baibei, the _ moving frame Between the 32s, the _3' picture is tired of the ancients, and the pressure of the work part 34 is the same (that is, the virtual position is fixed in most parts, and the pressure is again 'if the movable frame part is turned 36, 37, This upper part, the whole circumference of the 突 ut 'supporter. The groove 35a formed by the lower fixing frame portion 35 is fitted to the outer peripheral shape of the outer peripheral surface of the protruding forming portion, and the lip-shaped lining is more The seal member 38 is suspected. The sealing member 38 can be moved to the lower side of the lower frame by the lower movable frame #36'. In other words, the upper portion of the spring 37 is inserted into the above-mentioned holding frame portion 35. A plurality of (in Fig. 9 to Fig. u, only the surface of the lower portion of the lower fixing frame portion 35 formed by the surface of the two portions y is shown. Dream ===, the mounting is performed by the spring 37, and the above-mentioned ρ is freely movable. The movable frame portion 36 is fixed to the frame portion 36 of the movable frame portion 36. The sealing member 38 of the frame portion 35. (7) is freely abutted on the lower surface of the lower solid groove 36. The upper surface of the upper surface is formed with a groove 36b, which is sealed by the sealing structure (4). The sealing member 39 is in the mouth of the second floor space portion 34, and the 4Ga, 4Qb is recorded. Figure 9~<, the movable vacuum frame 3G, by the cylinder or air pure 29 Shaanxi Ridao Tongtong: for the sealed space (also;, the end projection 35 ===2 secret __Lai 35 under the film surface pressing device 3 ' will be from the vacuum lamination device 2 by the upper and lower two 2) The two-layered laminate 9 is positioned in the upper and lower two blocks 41 and 42 (the table shows the sound of the sound body 9 and the upper and lower two blocks 41 and 42 are heated and repeated, so that the stack is smoothed. As shown in Fig. 12, as shown in Fig. 12, there are: erected with two screws (only two are shown in Fig. 12), and the upper pressing block μ, the Ϊ Ϊ mechanism 43b is fixed to the pillars. The lower house block is movably mounted on each of the above-mentioned struts 43. The lower block 42 and the cylinder barrel 55 are connected to each other by the operation of the oil sump (the rise and fall of the piston rod 55a), and can be moved up and down. About the above two pressures Blocks 41 and 42. In this embodiment, the upper pressing block 41 16 200818999 ί上! 44, sequentially fixing the flat upper insulating material 6 from the upper side, the upper side, the win 47, the flat upper side The cushioning material 48 and the upper flexible full-plate 49' are pressed down to the lower base layer. From the lower side, the order is ϋ == 50, the lower side hot plate 51, and the flat-shaped lower side cushioning material = The side flexible metal plate 53 is fixed to the upper surface by a fixing mechanism (not shown) such as a bolt or a nut. The upper hot plate 47 is fixed by a bolt or a nut (not = heat) The material 46' upper upper pullable metal plate 49 is fixed to the upper side disk 47 via a fixing mechanism (not shown) such as a top cushioning material 48, a screw, or a collar. In addition, the bolt and nut shaft fixing mechanism (not shown in the lower base = lower side money 51 (four) bolt, screw W_ fixed mechanism (not shown) 52 ^ 75G. The lower side can be separated from the metal plate 53 side buffer The fixing mechanism such as the material weighting axis Yuchen (not shown) is fixed to the lower hot plate 51. Also, if the bolt is to be lowered | 44 (45) and the upper (lower) hot plate 47 (51) is directly screwed !! 4 port (mechanism buckle fixed 'strong side (lower side) clock 4 position) heat easy ^47 bolt Γΐ Γΐ, etc., leading to the upper (lower) base layer 44 (45), it is not good. Figure. aa is The sheath-like heat-receiving film take-up portion 4 disposed in parallel with the upper and lower hot plates 47 and 51, as shown in the extension of the ® 5, has an upper side roll-up upper transport film 5; The take-up roller 15 is disposed on the lower side transport film 6 and the lower side of the take-up roll 14 is disposed on the lower side, and is disposed on the upper and lower take-up rolls 14 and 15 (not shown). It can also be used. In addition, in the sliding stack, the cold and the fan are mechanically fixed, and the back sides of the watch are hardened by the flat, and the surface of the surface of the layer is softened. The surface of the tree is not soft. Membrane exuded membranous tree sap layer 8c and transport film 5, 6 stripped. 魏? t? Ming Wei device, as described above, the biggest feature is: in the vacuum stacking device right _ L upper and lower hot plate 23, 26 on the side of the temporary laminate 7 side, each The elastic addition of the surface of the film-like resin (4) Sb of the batch laminate 7 is carried out. 17 200818999 pressure plate 24, 27. The constituent materials of the rubber il-elastic dust-removing plates 24 and 27 can be used as heat-resistant itylate. Rubber: ΐϊίΐΐΐ glue material or various resin materials with elasticity, it is good to use. By providing this fiber layer, the durability of the upper and lower systems can be improved, and even if the pressure is repeatedly applied at high temperature, it can suppress 8b, push (10) (4) H/ 4, 27 stretch deformation 'can play the film-like resin material - #麻层 e excellent effect on the substrate 8a of the service or adhesion. Another Z1 sex 24, 27 without the fiber layer, by = sulphur adheres to the metal plates 24a and W, and is provided with 酽 ^ P 使 使 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复 反复,!· ί 8 8a 服 丝 《 《 《 《 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In order to use the chemical fiber or glass fiber ===; in the inside of the rubber plate-like body 61, the fiber layer 62 of 1 or the rubber cloth is provided and integrated (refer to FIG. 14), k哉 car layer 62 and the integration (refer to Figure 15). To be more specifically defined 'to the town of steel plate in the view of rust prevention 'Tear' in the range of G.1 ~ · is better, more preferably ethylene tii 3 such as: partial a Ethylene rubber, gas-bearing stone Xixitong rubber, four I series rubber, rubber, fluorine-containing nitrile rubber, fluorine-containing acrylic acid rubber, etc., the marketer's rubber, fluorine-containing polyester rubber, containing Fluorine triamide oak elaSt_ public 5Ί ^T2 system "Kiny〇board" series, Kurehae "Daueru" series, 枉 = FB" series, Daikin Weiye company Rasdike (transliteration) U\= clothing Vit 〇n" 糸 、 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Series and so on. The fiber material of the weaving layer is made of glass fiber or polyester or other polar 200818999 material, which is inclined to be hard (four) material, and the viewpoint of the softness of softness of the core is soft. It is better to pick the point that it is easy to use or to be excellent in Nylon and Nike. F cloth (heat-resistant adhesive will be used, and heat-resistant nylon will be placed inside the series "F-200>^Kiny〇b〇ard made by the company", which is defined as the hardness of 彳f plus 24,27 '(10)A The hardness is set to » !- ^ 軏佺. That is, the upper and lower elastic pressure plates 24 and 27 are required to have high peeling property, and the above hardness is important for breaking strength and peeling. If the ShoreA hardness is 40 degrees or more, it is raining. The gorilla stretches well and is not easy to break. At the same time, it can obtain the pressure-resistant stacking elasticity: Ξ Ξ 下 下 下 下 下 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 24 Further, in the present invention, the Sh〇reA hardness is in accordance with ns Ζ 2246 (200_定^. The thickness of the thickness of 27 is within the dry circumference of the pattern within the range of 1). If the thickness is too thin, the fiber sound texture is full. On the surface of the upper and lower elastic pressure plates 24, 27, there is a tendency of the surface of the fiber layer to coat the surface of the film-like resin layer 8C, and if it is from the lower side, the lower heat plate 26 is opposed to the film-like resin layer 8c. Heat conduction =, (4) The temperature distribution of the disk 26 may become uneven. Also, the upper ~ 1 ^ meat again; ^~4〇〇/Zm is better in the range, and more preferably it is 2〇 under the secret “^. The above surface roughness ^ is larger, then after pressing and pressing, the upper and lower net pressure plate 24 27, easily from the film-like resin layer or & upper and lower two elastic pressure plates 24, 27 of the table: 4 under the second movement complex =, the surface of the moon layer 8e is damaged and the surface of the laminate 9 mirror too When it is small, the adhesion to the film-like resin layer 8c or the upper and lower transport films 5 and 6 is changed. 19 200818999 After heating and pressurizing, the upper and lower elastic pressure plates 24 and 27 are inferior to the film-like resin. In the present invention, the surface roughness k is in accordance with the melon cerebral palsy 1 (Lian) 〇. In the Λ 日 1 1 , , , , , , M M M M M M M M M M M M M M M M M M M M M M The resin material 8b is temporarily fixed to the temporary laminate 7 in which the unevenness of the base material 8a is formed. Then, the temporary laminate 7 is supplied to the conveyance belt, and is transported from the conveyance belt 13 to the upper and lower conveyance. Between the films 5 and 6. The temporary laminate 7 is held by the upper and lower transport thieves 5, 6 and transported to the vacuum lamination device 2.

2匕真二$層裝置2，以如下方式進行真空疊層步驟。首先，將 上述暫時疊層體7以上下兩運送賴5、6，運送職空疊H ;θ ㈤_定位置)(參關i及圖16，此圖 你背上I兩運运用膜5、6未圖示。圖17及圖18亦同）。接著， 使油壓缸筒或空氣缸筒29作動，使下部板2 20 T2f 21 接將上下兩板20、21予以密封契合(參照圖10及圖17)。 此密封契合之後，使空間部34成為減壓狀態。具體而古 /、空抽吸时嘴33(參闕9)，將空間部34以直空泵制^ Ϊί it照圖17)。將上述空間部34 M力減壓至2_a ^下、、 其次，將油壓缸筒或空氣缸筒29作動'，使下 以上下兩彈性加壓板24、27夾壓暫時疊層體7祐— 升二 (參照圖1δ)，將膜狀樹脂材㈣貼合於基材面加f 作成疊層體9。上趣力之調整，具體⑽材=/-= j 麗之狀態，調整下·性加隸27之壓力即可;^ 齡4、27將暫時疊層體7之上下兩膜狀樹月旨材祕予 20 200818999 =真 ==的服貼於細之凹凸，但^ 上，加熱加壓時，上側熱盤23及下側熱盤％之、 向。另-方面，^果^^太服^丨^ ’有赫微小空隙之傾 u说之鞘狀加熱态23a、26a等來調整。— 較佳中，加壓條件設定在。.一之範圍内， 間部自f ΤΪ5 ’以真空抽噴嘴33釋放上述空 並運入於妙歡平賴置ϋ鱗於上下岐送賊5、6， 將上⑵上運以下方式進行平面壓製步驟。首先， 並定位在選定位置㈣=^用^、6^送到平面壓製裝置3内， ^之方式進仃加熱加壓，使疊層體9之膜狀樹_e 後，將疊層氣缸筒55 ’使下壓製塊42下降。之 5、6剝離，以排出輪送帶$出扇％冷部之後’從上下兩運送用膜 7〇-mv^f^ 30^°c ^ ^ 、叹疋為0·1〜2MPa，較佳為設定在〇·5〜 21 200818999 1.5MPa° 詈在施形態中，將彈性加壓板24、27各固定於設 ，板24、27，以強壓力對於膜狀樹脂材料Sb之表面進行加壓，於 此加壓時，藉由上述兩彈性加壓板24、27之彈性，能使加壓將 料8b之表面予以加壓之面)沿著基材8&之凹凸面 =性㈣。因此，即使基材8a之凹凸間隔微細或凹賊之情形， 亦此使上述加壓義狀概㈣8b _舰於紐8a 如與膜狀樹脂材料％之間不殘存氣泡。而且此實施形離中，由= 面壓製裝置3,，，藉由此平面壓製裝置3，能將以上述 -工$層裝置=形成之疊層體9之表背兩面扣加壓並使平滑化。 圖19，不本發明之疊層裝置之其他實施形態。此實施形態 ，，如上述實施形態，並非將暫時疊層體7藉由運入輸送帶13， 逐一Ϊ運入上下兩運送膜5、6之間而供給真空疊層裝置2。而是， 改用帶狀基板10c，並伴隨於此，'使用上侧帶狀膜狀樹脂材料1〇&、 下側帶狀膜狀樹脂材料1Gb，同時設有··各捲繞輥lla〜叫參照圖 20) ’將上，帶狀膜狀樹脂材料1〇a、下側帶狀膜狀樹脂材料1㈨ 捲繞;以及疊層體捲取輥14a，將從麟各捲繞輥lla〜…拉出之 上下兩帶狀膜狀樹脂材料l〇a、1〇b及帶狀基板1〇c導入於真空疊 ^裝置2而得到之帶狀疊層體9a(在雜基板1〇c之表面疊g上侧 帶狀膜狀樹，材料l〇a，在背面疊層下侧帶狀膜狀樹脂材料廳） 予以捲取。藉此，能將上下兩帶狀膜狀樹脂材料1〇a、1〇b及帶狀 基板10=對於真空疊層裝置2、平面壓製裝置3，連續地供給。 、，貫施形態之疊層裝置，由膜等釋出部ia、真空疊層裝置2， 平面壓製裝置3及膜等捲取部知所構成，真空疊層裝置2、平面 ，製^置3與上述實施形態為相同構造，且功能相同。又，此實 施形態中，由於未使用暫時疊層體7，故不使用自動片材裁切疊層 機及運入輸送帶13。 22 200818999 择上f膜轉出部,la，與上述實施職(之運送鶴繞部1)同 二僅具備上側運达膜捲繞輕11及下侧運送膜捲繞輥12，而且 下兩運送膜捲繞輕U、12以外，尚包含：上側樹脂材料 结H a ’捲繞有上侧帶狀膜狀樹脂材料1〇a;下側樹脂材 二輕lib，配置在較捲繞有下侧帶狀膜狀樹脂材料廳之上侧樹脂 材料捲繞輕11a更為下侧(與上侧雛材料捲、繞輥lla相對 狀基板10c捲繞之帶狀基板捲繞輥llc。又，此疊層裝置，具第 1引導輥12a，將從上側樹脂材料捲繞輥lla拉出之上侧帶' 膜 樹脂材料10a引導到上述真空壓製裝置2之兩熱盤23、26之、篦 2引導輥12b，將從(在較第1引導輕12a更為下侧，與此第i引 輥12a相對向而配置)下側樹脂材料捲繞輥llb拉出之下側膜 狀樹脂材料i〇b以與上側帶狀膜狀樹脂材料1〇a相對向之 、 引導至上述兩熱盤23、26之間。又，此疊層裝置，且備 & 導輥12c，將從帶狀基板纖輕llc拉出之帶狀基板⑽定位上 述上下兩帶狀膜狀樹脂材料10a、1〇b之間，❿引導至上教般 23、26之間。並且，此疊層裝置，具備疊層體捲取輥14& 上下兩帶狀膜狀樹脂材料l〇a、l〇b及帶狀基板1〇c導入至上 熱盤23、26之間，並使上述兩熱盤23、26作動 疊廣體9a予以捲取。 在此，如圖19所示，從各捲繞輥n、12、na〜Uc拉出之上 下兩運送膜5、6、上下兩帶狀膜狀樹脂材料1〇a.、1%及帶狀· l〇c，從上述膜等釋出部la起，自上侧朝向下侧，以上側運送 士侧帶狀膜狀樹脂材料跑、帶狀基板1Ge、下侧帶狀膜狀樹脂材 料鳩、下侧運达膜6之順序依序地送出。因此，能將上下兩脂 材料捲繞輥lla、lib配置於較上下運送膜捲繞輥n、12在基 流向(參照圖19之箭頭)之更上游侧(圖19之右側），將上下ς =狀樹脂材料10a、l〇b定位在上下兩運送膜5、6之間，並且將 帶狀基板捲繞輥11c配置於較上下兩樹脂材料捲繞輥lu、ub在 流向之更上流側(圖19之右側），而將帶狀基板1〇c定位在上下兩 23 200818999 帶狀膜狀樹脂材料10a、10b之間。又，上下表面樹脂材料捲繞輥 11a、11b亦可配置在較上下運送膜捲繞輥u、12在基板流向(參 照圖19之箭頭)之更下游侧。2 匕 $ 2 layer device 2, the vacuum lamination step is carried out as follows. First, the above-mentioned temporary laminate 7 is transported by the upper and lower layers 5, 6 and transported to the service space stack H; θ (five) _ fixed position) (refer to the reference i and Fig. 16, this figure on the back of the I transport film 5, 6 is not shown. Fig. 17 and Fig. 18 are also the same). Next, the hydraulic cylinder or the air cylinder 29 is actuated, and the lower plates 2 20 T2f 21 are connected to seal the upper and lower plates 20 and 21 (see Figs. 10 and 17). After the seal is engaged, the space portion 34 is brought into a reduced pressure state. Specifically, the ancient /, air suction mouth 33 (see 9), the space portion 34 is pumped by direct air ^ it ί ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ ̄ The space portion 34 M is pressure-reduced to 2_a ^, and then, the hydraulic cylinder or the air cylinder 29 is actuated, so that the lower and lower elastic pressing plates 24 and 27 are pressed to temporarily laminate the body. — As shown in Fig. 1 δ, the film-like resin material (4) is bonded to the surface of the substrate to form a laminate 9. The adjustment of the fun, the specific (10) material = / - = j state of the Li, adjust the pressure of the next plus the 27 can be; ^ age 4, 27 will temporarily laminate the upper and lower two layers of the film Secret 20 200818999 = True == The service is attached to the fine bump, but ^, when heated and pressurized, the upper hot plate 23 and the lower hot plate%. On the other hand, ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ — Preferably, the pressurization condition is set. In the range of one, the middle part is released from the f ΤΪ5' by the vacuum pumping nozzle 33 and is transported into the squadron 5,6, and the upper part (2) is transported in the following manner for plane pressing. step. First, and positioned at the selected position (4) = ^ with ^, 6 ^ sent to the plane pressing device 3, ^ way to heat and press, so that the film-like tree _e of the laminate 9 will be laminated cylinder 55 ' lowers the lower pressing block 42. 5, 6 peeling, to discharge the belt to send out the fan% of the cold part, 'from the upper and lower two transport film 7〇-mv^f^ 30^°c ^ ^, sigh is 0·1~2MPa, preferably In the embodiment, the elastic pressure plates 24 and 27 are fixed to the plates 24 and 27, and the surface of the film-like resin material Sb is pressurized with a strong pressure. At the time of pressurization, the surface of the pressurizing material 8b can be pressed by the elasticity of the two elastic pressing plates 24, 27) along the uneven surface of the substrate 8& Therefore, even if the unevenness of the unevenness of the substrate 8a is fine or the thief is placed, the above-mentioned pressurization expression is such that no bubble remains between the button 8 and the film-like resin material. Further, in this embodiment, the surface pressing device 3 can be used to press and smooth the front and back sides of the laminated body 9 formed by the above-mentioned laminated device 3 by the flat pressing device 3. Chemical. Fig. 19 is a view showing another embodiment of the laminating apparatus of the present invention. In the above-described embodiment, the temporary laminate 7 is not transported into the conveyor belt 13 and transported between the upper and lower conveyance films 5 and 6 one by one to be supplied to the vacuum lamination device 2. In the meantime, the strip-shaped substrate 10c is used instead, and the upper strip-shaped film-like resin material 1〇& and the lower strip-shaped film-shaped resin material 1Gb are used, and each winding roller 11a is provided. Referring to Fig. 20) 'When the strip-shaped film-like resin material 1〇a and the lower strip-shaped film-like resin material 1 (9) are wound, and the laminated body take-up roll 14a, the winding rolls 11a to 148 ...to pull out the strip-shaped laminate 9a obtained by introducing the upper and lower strip-shaped film-like resin materials 10a, 1〇b and the strip substrate 1〇c into the vacuum stacking device 2 (on the miscellaneous substrate 1〇c) The surface of the surface is covered with a strip-shaped film-like tree, and the material l〇a is laminated on the back side of the strip-shaped film-like resin material. Thereby, the upper and lower strip-shaped film-like resin materials 1a, 1b, and the strip substrate 10 can be continuously supplied to the vacuum lamination device 2 and the flat pressing device 3. The laminating device of the continuous configuration is constituted by a winding portion such as a film releasing portion ia, a vacuum laminating device 2, a flat pressing device 3, and a film, and the vacuum laminating device 2, a flat surface, and a manufacturing device 3 It has the same structure as the above embodiment, and has the same function. Further, in this embodiment, since the temporary laminate 7 is not used, the automatic sheet cutting laminator and the conveyance belt 13 are not used. 22 200818999 The f-film transfer-out part is selected, and the upper-side conveyance film winding light 11 and the lower-side conveyance film winding roller 12 are provided only in the same manner as the above-mentioned implementation (the transport crane winding part 1), and the next two conveyances are carried out. In addition to the film winding light U and 12, the upper resin material layer H a 'wraps the upper side strip-shaped film-like resin material 1〇a; the lower side resin material 2 is light lib, and is disposed on the lower side of the winding The resin material on the upper side of the strip-shaped film-shaped resin material is wound on the lower side of the light 11a (the strip-shaped substrate winding roll llc which is wound with the upper substrate roll and the roll-to-roll 11a opposite substrate 10c. Again, this stack The layer device has a first guide roller 12a, and the upper side of the resin material winding material 11a is pulled out from the upper resin material winding roller 11a to the two hot plates 23, 26 of the vacuum pressing device 2, and the 引导2 guide roller 12b, the lower side resin material winding roller 11b pulls out the lower side film-like resin material i〇b from (the lower side than the first guiding light 12a, and is disposed opposite to the i-th feeding roller 12a) The upper strip-shaped film-like resin material 1A is opposed to the two hot plates 23 and 26. Further, the laminating apparatus and the guide roller 12c are provided. The strip-shaped substrate (10) pulled out from the strip substrate fiber strips is positioned between the upper and lower strip-shaped film-like resin materials 10a and 1b, and is guided between the upper layers 23 and 26. Further, the stacking device The laminated body winding roller 14 & the upper and lower strip-shaped film-like resin materials 10a, lb and the strip substrate 1〇c are introduced between the upper hot plates 23 and 26, and the two hot plates 23, 26, the stacking body 9a is wound up. Here, as shown in Fig. 19, the upper and lower conveying films 5, 6 and the upper and lower strip-shaped film-like resin materials are pulled out from the respective winding rolls n, 12, na to Uc. 1〇a., 1%, and band-shaped l〇c, from the upper side toward the lower side from the upper side to the lower side, the upper side transports the strip-shaped film-like resin material, the strip substrate 1Ge, The lower strip-shaped resinous material 鸠 and the lower side transporting film 6 are sequentially sent out. Therefore, the upper and lower grease material winding rolls 11a and 11b can be disposed on the upper and lower transport film winding rolls n and 12. The upstream side of the base flow direction (refer to the arrow of FIG. 19) (the right side of FIG. 19), the upper and lower ς-shaped resin materials 10a, 10b are positioned between the upper and lower transport films 5, 6, and the belt The substrate winding roller 11c is disposed on the upper flow side (the right side of FIG. 19) of the upper and lower resin material winding rolls lu and ub, and the strip substrate 1〇c is positioned on the upper and lower sides 23 200818999 Ribbon-like resin Further, the upper and lower surface resin material winding rolls 11a and 11b may be disposed on the downstream side of the upper and lower transport film winding rolls u and 12 in the substrate flow direction (see an arrow in Fig. 19).

又’上下兩帶狀膜狀樹脂材料1〇a、1〇b之樹脂面(與帶狀基板 l^c相對向之面)以被覆膜(未圖示)保護，使用時需要剝離被覆膜之 情形’在上下兩樹脂材料捲繞輥lla、llb附近，設置用以捲取被 覆膜之捲取輥(未圖示）。此捲取輥之驅動機構不特別限定，可設置 專用馬達等驅動機構，亦可使捲取輥外周與上下兩樹脂材料捲繞 報11a、lib之外周接觸，而將上下兩樹脂材料捲繞輥化、仙 之旋轉傳達給捲取輥而能捲取。 /处处上飞兩贡狀膜狀樹脂材料l〇a、，可使用與上述實施 形悲中所用膜狀樹脂材料8b完全相同之物(上述實施形態中，形 短狀’但此實施賴巾’軸長尺狀）’可使職繞在捲繞 圖示)之帶狀膜狀樹脂材料8b。又，上述帶狀基板恤，可 在帶狀基板捲繞輕lle，且可使用具有能捲取在疊 t ^具有可撓性之多數基 膜多胸彳膜雜者’或在具#可雛之長尺狀基底 ^ 8a)。帶狀基板/〇c之厚度号 、手产^特別、、:' .、成為: 及上下峨^ 使前t2—= 不僅具備JL娜取取部，樣， 體9相賴者mx捲取。此疊層 24 200818999 19^ 呈接晶爲触/* 构連达腰5、6之間。又，此膜等捲取部4a， 機構14c(參照圖21)，將疊層體捲取輕14a與上述 驅動。又，此實施形態中， 晶厚運达膜捲繞輥11釋出之上側運送膜5，通過直空 ====被捲取到膜等一 樣，通過直空釋出之下侧運送膜6亦同 接你卸^! 層置及千面壓製裝置3之後，被捲取在膜等 .帶狀膜狀。10口:=輥广1 lc釋出之上下兩 狀疊層體9a，並捲取在疊層體捲置3成為—體的' 狀二私Ϊΐη空疊層裝置2 ’上下兩運送膜5、6、上下兩帶狀膜 Γ Γ及帶狀基板10c於真空狀態被加熱加壓，在 =ίΪ:5二 3:從真空疊層裝置2 4過體二二平二 JC^MOa、10b及帶狀基板1〇c被加熱加 ;運 賴5 :6之間，上述帶狀钱體％之表背兩面被平滑化刊運 亡c中’得到之帶嶋體9a，】個基材 地被切斷。為了有效率地得至川固製品，製品 此實施形態中，由於在真空疊層裝置2與^面圭。 ，離，在相當於此距離量之帶狀疊層體9a之有 為解決此現象，如圖22所示，在上述兩爹 ，、、、法瓜成衣口口。 輥15b藉此調整輥15b使相當域裝置 ' =巧周整 25 200818999 短。藉此’能消除由於真空疊層裝置2與平面屢 衣衣置3之間的距離造成之浪費。又，亦 处聶 泡 龄奴咖(姆赴频㈣ ll^ u 〜、甲而要卬貝的自動片材裁切疊層 =1=貫施形態中，具有不需要昂貴_設備之‘。 ，基材8a之絕緣層(基底膜)之厚度為1〇〇#m以下之_， ^果2,緣層裁切成短冊片材狀，會_而捲曲，或強产^， 之形成我變得困難，但是在此實施， 於施以張力之狀態來操作帶狀基板咖，即使於 I1叫"以下之情形，亦能疊層上下兩=膜 狀树知材枓1如、勘及帶狀基板1〇e並使平滑化。 不且^在，之*層裝置之又另—實施形態。此實施形態 ‘Ϊί Ϊ ^所不貫_態中之上下兩運送膜捲繞輕1卜12、上 來能相η、15及兩驅動機構。其餘部分’與圖19所示實施 19^ 、 /、圖19所示貫施形態相同，同樣之部分標以相 =的付说。，實施形態亦與圖19職實施形紐揮同樣作用、效 讲^又1此貫施形態之中，從本發明之疊層裝置拉出之帶狀聶戶 命们ΐ"2，係在長邊方向連續形成，且帶狀疊層體9a夢由 i 層裝置鄰接配置之切斷裝置(未圖示)逐個製品地:刀 機構η:=發:r疊裝層r置可内配置在帶狀疊層體"之驅動 26 200818999 圖25顯示本發明之疊層裝置之又另一實施形態。此實施形態 不具備圖19所示實施形態中之捲取帶狀疊層體9a之疊層 ^、取輥14a。又，帶狀疊層體9a之驅動機構14c定位在圖25所 =位置’且不具備上下兩運送膜捲繞輥^、12、上下兩捲取輥〗4、 邻兩驅動^構。其餘部分，與圖19所示實施形態相同，同樣 2標，相同符號。此實施形態亦與圖19所示實施形態發揮同樣 〇册、、Ϊ果:此實施形態，可使用於當藉由本發明疊層裝置將上 貝二f狀樹脂材料1〇a、下侧帶狀膜狀樹脂材料1〇b加熱、加壓 該等兩帶狀膜狀樹脂材料10a、1%之端部溶解並滲 胺膜本發明疊層裝置之情形。具體而言，對感光性聚醯亞 中，^Ifr4?明之疊層裝置之又另—實施形態。此實施形態 :、f 貫施職中之帶狀基板10c改為使用基材(單片基 Ϊ L’ 裝置2供給。伴隨於此，藉由將圖19所示捲繞 送帶n ί入輸送帶13，能將基材(單片基板)8a以運入輸 供仏予直人上下兩帶狀膜狀樹脂材料伽、⑽之間，而 樣ild。其餘部分與圖19所示實施形態相同，同 揮同符號°此實施形態亦與圖19所示實施形態發Further, the resin surface of the upper and lower strip-shaped film-like resin materials 1〇a and 1〇b (the surface facing the strip substrate l^c) is protected by a coating film (not shown), and needs to be peeled off during use. In the case of a film, a take-up roll (not shown) for winding up a coating film is provided in the vicinity of the upper and lower resin material winding rolls 11a and 11b. The driving mechanism of the winding roller is not particularly limited, and a driving mechanism such as a dedicated motor may be provided, or the outer circumference of the winding roller may be in contact with the outer circumference of the upper and lower resin material winding reports 11a and 11b, and the upper and lower resin materials may be wound around the roller. The rotation of the fairy and the fairy is conveyed to the take-up roll and can be taken up. / The membranous resin material l〇a is used in the above-mentioned manner, and the same thing as the film-like resin material 8b used in the above-described embodiment can be used (in the above embodiment, the shape is short 'but this is implemented as a towel' The strip-shaped film-like resin material 8b of the axial length of the shaft can be wound around the winding drawing. Moreover, the above-mentioned strip-shaped substrate shirt can be wound in a strip-shaped substrate, and can be used in a multi-thoracic film with a plurality of base films capable of being wound up in a stack. Long-length base ^ 8a). The thickness of the strip substrate / 〇c, the hand-made ^ special,,: '., become: and the upper and lower 峨 ^ make the front t2 - = not only has the JL Na take part, the sample, the body 9 depends on the mx take. This laminate 24 200818999 19^ is connected to the crystal / touch the waist between 5 and 6. Further, the winding portion 4a such as the film and the mechanism 14c (see Fig. 21) wind up the laminated body 14a and the above-described driving. Further, in this embodiment, the film thickness traveling film winding roller 11 releases the upper side transport film 5, and the lower side transport film 6 is released by straight air by the straight space ==== being wound up to the film or the like. Also pick up your unloading!! After the layering and the thousand-face pressing device 3, it is taken up in a film or the like. 10 ports: = roll wide 1 lc releases the upper two-layer laminated body 9a, and winds up the laminated body 3 to form a 'shaped two private Ϊΐ empty stacking device 2' upper and lower two transport film 5, 6. The upper and lower strip films Γ and the strip substrate 10c are heated and pressurized in a vacuum state, at =ίΪ:5 2:3 from the vacuum lamination device 2 4 through the second two flat two JC^MOa, 10b and The substrate 1〇c is heated and added; between 5:6, the front and back sides of the above-mentioned ribbon-shaped body% are smoothed and published, and the obtained tape body 9a is cut. Broken. In order to efficiently obtain the solid product of the product, the product is in the vacuum lamination apparatus 2 and the surface of the product. In addition, in the case of the strip-shaped laminate 9a corresponding to the distance, in order to solve this phenomenon, as shown in Fig. 22, the above two 爹, , , , and melon dressing mouths. The roller 15b thereby adjusts the roller 15b so that the equivalent domain device is short. Thereby, the waste due to the distance between the vacuum lamination device 2 and the flat garment 3 can be eliminated. Also, in the Nie bubble age slaves (m to frequency (four) ll ^ u ~, A and the mussels of the automatic sheet cutting stack = 1 = consistent form, with no need for expensive equipment. The thickness of the insulating layer (base film) of the substrate 8a is 1 〇〇#m or less, and the fruit layer 2 is cut into a short sheet shape, which may be curled or strongly produced. It is difficult, but in this case, the ribbon substrate is operated in a state of tension, and even if I1 is called "the following", it is possible to laminate the upper and lower two = film-like tree materials, such as, and The substrate 1〇e is smoothed and is not in the form of another layer device. This embodiment is in the form of 'Ϊί Ϊ ^ 所 _ 之上 运送 运送 运送 运送 运送 运送 运送 运送 运送 运送 运送 运送 运送 运送The upper part can be η, 15 and two driving mechanisms. The rest of the parts are the same as the embodiment shown in Fig. 19, 19^, /, and Fig. 19, and the same part is marked with the phase =. In the same manner as in the embodiment of Fig. 19, the effect is the same as that of the embodiment, and the band-shaped Niehu life ΐ"2 pulled out from the laminating device of the present invention is in the longitudinal direction. Continuously formed, and the strip-shaped laminate 9a dreams of a cutting device (not shown) disposed adjacent to the i-layer device one by one: the knife mechanism η:= hair: r stacked layer r can be disposed inside the strip stack Driving of the layer body" 26 200818999 Fig. 25 shows still another embodiment of the laminating apparatus of the present invention. This embodiment does not have the lamination of the winding strip-like laminated body 9a in the embodiment shown in Fig. 19; The roller 14a is taken. Further, the driving mechanism 14c of the strip-shaped laminated body 9a is positioned at the position '=' in FIG. 25 and does not have the upper and lower transport film winding rollers ^, 12, the upper and lower winding rollers 4, and the adjacent two drivers ^ The rest of the configuration is the same as that of the embodiment shown in Fig. 19, and the same reference numerals are given to the same reference numerals. This embodiment also exhibits the same registration as the embodiment shown in Fig. 19, and the effect can be used for this embodiment. In the laminating apparatus of the present invention, the upper shell-shaped f-shaped resin material 1〇a and the lower strip-shaped film-like resin material 1〇b are heated and pressurized, and the ends of the two strip-shaped film-like resin materials 10a and 1% are dissolved. The case of the osmotic membrane of the present invention, in particular, for the photosensitive polyimide, Further, in the embodiment, the strip substrate 10c in the application is replaced by a substrate (a single substrate L' device 2 is supplied. Accordingly, the winding is shown in Fig. 19 With the n 入 into the conveyor belt 13, the substrate (single substrate) 8a can be transported into the supply and supply of the upper and lower strips of film-like resin material gamma, (10), and the other is the same as Figure 19 The embodiment is the same, and the same symbol is used. This embodiment is also related to the embodiment shown in FIG.

Hi °μ而且，此實施形態中，對於基材(單片基板)8a 材裁切叠層機等附帶設備，能將上下兩帶狀 胲狀樹爿曰材料l〇a、l〇b予以疊層。 中;星傷^^9本^^月^登層裝置之另—實施形態。此實施形態 捲取貫施雜巾之捲取帶狀疊層體9a之疊層體 仂罟\ a又，▼狀璺層體9a之驅動機構14cS位在圖27所干 ;將帶狀基板10c改為使用基材(單片基她對於 共、給。伴隨於此，將圖19所示捲繞報llc改為^備^ 13，能將基材8a以運入輸送帶 ^ 10b之間’而供給予真=入置上二 、圖19所不實施形態相同’相同之部分標以相同的符號: 27 200818999 此實施形態亦细19所示實施縣發揮同樣 施，中，對於基材8a不使用昂貴的自動片材裁^ ^等= 設備’而能將上下兩帶狀膜狀樹脂材料施、1%予以最曰機 從本發明之疊層裝置拉出之帶狀疊層體9a，-係】^ = ‘ 疊層於其上之上下兩帶狀膜狀樹脂材制a、I；b 基 • 之層體如藉由與本發明之4層裳置 但切斷裝置亦雖未圖示’ 明疊層裝置内。 轉機構…下游之本發 圖28顯示本發明之疊層裝f lt L丄 仏給件奴於此，藉由使圖19所千挫- „ ^:為具備運人輸送帶13， 輪送帶13遂一祕運入I» π工他， 刊、平乃丞芽反以運入 而徂μ吉^也運上下兩▼狀膜狀樹腊材料1〇a、鄕之間， 而供給予真空疊層裝置2。再者， 送膜捲繞輥11、12、上下兩接1yI , 口 不具備上下兩運 分，與圖19所亍無施开14、15及兩驅動機構。其餘部 每㈣ΞΛΙ 相同’相同之部分標以相同的符號。此 ，形恶亦與圖19所示實施形態發揮同樣 匕 了施形態中’不對於基材(單片基板)吏昂^典此 再者，此杏且曰上下兩贡狀膜狀樹脂材料l〇a、10b。 10a, 10b ^ , ϊί4；ίϊίι； 之情形。具體而言，著ί本發明疊層裝置 中，不具備胃19所示實施形離中 此貫施形態 位置，再者Λ驅動機構14C定位在圖29所示 疊層裝置2供I;隨於二基材(單片基板)8a ’對於真空 、 猎由將圖19所示捲繞輥llci改為具 28 200818999 能將基材(單片基板)8a以運人輸送帶13逐一地 ΐΐί 雛材料衞、廳之間，而供給予真空疊層 ί Γ糊19，不賊上下兩㈣難她11、12、 施开場加' ΡΠ、15及兩機構。其餘部分’姻19所示實 部分標以相同的符號。此實施形態亦與圖19 作Λ、效果。而且此實施形態中，對於 $，而处將土卜吏用Φ貴的自動片材裁切疊層機等附帶設 備而此將上下兩帶狀膜狀樹脂材料1〇a、1%予以疊層 從本發明^疊層裝置拉出之帶狀疊層體9a，係由丨個基 宜層於其上之上下兩帶狀膜狀樹脂材料10a、10b所構成土， 在長故方向間歇地形成之帶狀疊層體9a，藉由與本發明之最 置鄰接配置之切斷裝置(未圖示)而切成逐個製品。又，雖未衣 切斷裝置亦可配置在帶狀疊層體9a之驅動機構14c下游之本於明 疊層裝置内。再者，此實施賴，可㈣在藉由本發明 將上下兩f狀膜狀樹脂材料l〇a、1〇b加熱加壓時，樹脂不從上下 ，帶狀膜狀樹脂材料上l〇a、10b之端部溶解滲出並附著在^發 S層裝置之情形。具體而言，對感光性聚酸亞胺膜尊 又，圖1之中，係併設有真空疊層裝置2及平面壓製f 之連續疊層裝置，但不限於此，真空疊層裝置2及平面壓:二罟 可以獨立使用。又，圖i之中，為了運送暫時疊層體7 或避免從膜狀樹脂材料8b、膜狀樹脂層8c之滲出，併用上^兩運 送膜5、6，但是，為了控制調節像這種上下兩運送膜5、6之張力 及運送速度’連送膜釋出部la配置在真空疊層裝置2之暫萨最声 體7之運入口谢近，運送膜捲取部4配置在平面壓製裝置^ 層體9之運出口附近。又圖19、圖24、圖26及圖27 了為 樹脂從帶狀疊層體9a滲出，併用上下兩運送膜5、6，但是為了 $ 制調節像這種上下兩運送膜5、6之張力及運送速度，等: 部la配置在真空疊層裝置2之膜入口附近，膜等捲取/要 在平面壓製裝置3之膜出口附近。 ·配置 29 200818999 又’在上述真空疊層裝置2及平面壓製裝置3之中，可使用 上，板20、^L壓製塊41可上下移動，下部板21、下壓製塊42可 囱定者，f是’上部板2〇，由上壓製塊41之升降機構所產生之異 物塵埃之觀點，以圖1、圖19及圖24〜圖29之構成較佳。 又，圖1、圖19、圖24、圖26及圖27之中，顯示以真空疊 '襄置=及平面壓製裝置3處理時都使用上下兩運送膜5、6之情 ，，但是亦可僅將料上下兩運賴5、6用在以直㈣層裝置2 .處理時，或僅用在以平面壓製裝置3處理時。又/也可在真空疊 層裝置2，平面壓製裝置3各自地設置上下兩運送膜5、6。 圖30 ,、、、員示使用在上述各實施形態中之真空疊層裝置2之變形 3。中’在上述真空疊層裝置2未設置可動真空框30，大 ίγΞ ^ 狀之上侧固定框部63以氣密狀地固定在上部板20之 7 f四角形棒狀之下侧固定框部64固定於下部板21。 下邻』1 之」-真空抽吸用嘴嘴33未固定在上侧11 部63，在 、二卜者下側固定框部64設置真空抽吸用貫通孔65，通 ^此真工抽·貫通孔65，能將空間部34内之空氣進行真空抽 以弁Ρ夂白^^之中’设置:油壓缸筒或空氣缸筒66，將下部板21 升Ρ牛自如地方式支持及油壓 26通過下側絕埶妯祖％ ^冋次工虱缸同68,將在下侧熱盤 持;以油壓紅筒二寺板67以升降自如地方式支 述下侧固定框部64之上夕動。圖中，69為固定在上 時保持郎部34=狀减構件，作用在於真空疊層 之真空疊層裝n 上f各實施形態中所使用 同作用、效果。 ^上述各貫施形態之疊層裝置發揮相 又亦可在使用前述兩疊層梦罟途士政扣® 配置微黏著輥啖#立咕、主如ί:直貝他本發明豎層方法之前， 者戰赵曰波清潔斋等清潔褒置，以該等來清潔基板如 30 200818999 之表面或上下兩運送膜5、6之表面。 又係在真空豐層裝置2前或平面壓製 1 輪送帶13、排出輸送帶(未圖示），藉由運入^置上灸，配置運入 體7提供給上下兩運送膜5、6，並藉由排出將暫時疊層 運送膜5、6剝離之疊層體9排出，但可=:，將從上下兩 改為使用旋轉輥群或環狀(endless)輸送帶。5 : 兩输送帶13 以不易辦汙’不易起塵埃者為較好。又 輪送帶,I3材料 尺寸，長度以0.3〜3m之範圍内，較佳為〇 / ^兩輸送帶13之 運送速度通常為1〜25m/min之範_ f .〜.5m即可，又，其 疊層體9從平面壓製裝置3排出時 脹得到之冷空氣的冷卻冷 持於上下兩運製，3運送之疊層體9以夾 輸送帶。^膜6之狀‘懸冷部’並於冷卻後排出至後側排出 剝離裝置，ί如運送膜5、6剝離之剝離輥等 允m方弹I衣置（禾圖不）。於平面壓製裝置3後， 7古、田0己置用以儲存經加壓固定之疊層體9的貯藏部，或為提 之表面平滑性，亦可尚適當配置加壓裝置^。ίϊ 又靜在ΐ下兩運送膜5、6之膜線或各處紅除電棒等。 μ _ ^ 之，可將上下兩帶狀膜狀樹脂材料l〇a、l〇b及 ίί=ΐΐ„lla、llb，改為將帶狀基板捲繞親山配 動片材裁切疊層機上游，將從帶狀基板捲繞輥llc拉出之 祿基板10c插通於自動片材裁切疊層機，並將裁切成短冊片材 31 200818999 狀之膜狀樹脂材料8b暫時固定在帶狀基板收，而 晶 ，裝置2 ’亦可將帶狀絲10c及帶狀基板捲魏…、改于為如^ 26、圖27所不’將基材8a藉由運人輸送帶13逐__地乂上下而 =膜，脂材料術、勤之間，而供給予真空疊層裝置^兩 圖30之中，可將帶狀基板10c及帶狀基板捲繞輕nc 圖 圖29所册示，將基材(單片基板)8a藉由運入輸送帶13逐二地 下兩帶狀膜狀樹赌材料1()a、騰之間，並供給予真空疊層裝置 層二製t表’能使以本發明真空壓製裝置所疊 二irr步平賴製裝置平滑化之賤中，為了使膜狀樹 “狀:化之補製時間縮短’同時抑制樹脂 均勻ί材周圍渗出’能改翻狀樹脂材·邊部之樹脂厚 [貫施例] 要/===綱’嫩㈣睛明 [貫施例1] 疊層戶f不之真空疊層裝置2及平面屢製裝置3。藉由真空 調整^ 11〇。「i兩板20、21之熱盤23、26，將空間部34預先 (破璃轅P I，’將由環氧樹賴構成之熱硬化性樹脂組合物 月旨材料/C)fb聚對苯二甲酸乙二醋支持膜所構成膜狀樹 自動n+f在表月兩面具有凹凸之基板8a之表背兩面，藉由 刀$層機暫時固定，以使兩膜狀樹脂材料(樹脂層之 32 200818999 厚度38 // m)之樹脂面接觸上述基板8a之凹凸面(凹凸之厚度Μ以 m、凹凸間隔20/zm)，準備暫時疊層體7。 予又 其次，以聚對苯二曱酸乙二酯膜所構成之上下兩運送膜5、 6(厚度38 am、表面粗糙度0.5 /zm)，將上述暫時疊層體7運送到 真空疊層裝置2内之加壓固定位置後，使下部板21上升，盥上部 板20密封契合之後，進入減壓操作。 〃 將空氣從真空抽吸用喷嘴33以真空泵浦(未圖示)抽吸，使抽 吸開始30秒後之空間部34設定為i〇OPa，以厚度2mm、尺寸 X橫)63cmx63cm之上下兩彈性加壓板24、27，將暫時最芦 以 IMPa壓力加壓2G秒。就上下兩彈性域板24、27而^金 公司製「kiny〇b〇ardF200」直接固定在上下兩熱盤/%使用， 並在亡下兩熱盤23、26之内部，各内建9根鞘加熱器仏、施。 其次’使空間部34回到大氣壓，使下部板2 ，固定之暫時疊層體7(亦即，疊層體9)脑上下^ 足 真空疊層裝置2排出，而運送到平面壓製裝置3。、联0攸 其次，藉由平硫製裝置3進行疊層體9之壓製 可撓性金屬板49、53而言，使用壓製面平面度為3衣^= 板(SUS630H，厚度3_，就上下巧二之不鎊鋼 偏氟乙烯系橡膠(偏氟乙烯、六氟化材編二Further, in this embodiment, the substrate (single substrate) 8a is cut with a device such as a laminator, and the upper and lower strip-shaped sapphire materials l〇a and l〇b can be stacked. Floor. Medium; star injury ^^9 this ^^ month ^ another layer of the device - implementation. In this embodiment, the laminated body of the strip-shaped laminated body 9a is wound up, and the driving mechanism 14cS of the layered layer 9a is placed in FIG. 27; the strip substrate 10c is taken. Instead of using a substrate (single-chip basis for the common, given. With this, the winding report shown in Figure 19 is changed to ^^^, and the substrate 8a can be transported between the conveyor belts ^ 10b' For the purpose of giving true=input two, the same as in Fig. 19, the same parts are denoted by the same symbols: 27 200818999 This embodiment is also shown in detail 19, the implementation of the same applies to the county, in the case of the substrate 8a The upper and lower strip-shaped film-like resin materials can be applied to the strip-shaped laminate 9a which is pulled out from the laminating apparatus of the present invention by using the expensive automatic sheet cutting device and the like. 】 ^ = ' layered on the upper and lower two strip-shaped film-like resin materials a, I; b base layer layer, if it is placed with the four layers of the present invention, but the cutting device is not shown The inside of the flat laminating device. The rotating mechanism...the downstream of the present invention is shown in Fig. 28, which shows that the laminated device f lt L丄仏 of the present invention is slaved here, by making the Fig. 19 a setback - „ ^: for carrying Conveyor belt 13, the belt 13 遂 遂 运 I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I I In addition, the vacuum lamination device 2 is provided. Further, the film winding rollers 11, 12 are connected to the upper and lower sides, and the port does not have the upper and lower movements, and the opening and the opening of the fuselage are not shown in Fig. 19. In the rest of the section, the same part is marked with the same symbol. This form of disgusting is also the same as the embodiment shown in Fig. 19, which is not the same as the substrate (single substrate). In addition, the apricot and the enamel-like film-like resin materials l〇a, 10b. 10a, 10b ^ , ϊί4; ϊ 4 ι 。 。 。 。 。 。 。 。 。 。 本 本 本 本 本 本 本 本 本The embodiment shown in FIG. 19 is in the form of the embodiment, and the Λ drive mechanism 14C is positioned in the lamination device 2 shown in FIG. 29 for I; with the two substrates (single substrate) 8a' for vacuum, hunting The winding roller 11ci shown in Fig. 19 is changed to have 28 200818999. The base material (single substrate) 8a can be transported one by one by the conveyor belt 13 Between, but for the vacuum stack ί paste 19, not thieves up and down two (four) difficult her 11, 12, the opening of the field plus 'ΡΠ, 15 and two institutions. The rest of the 'marriage 19 shown in the real part marked with the same symbol This embodiment also has an effect on the effect of Fig. 19. Further, in this embodiment, for the $, the 土 吏 裁 Φ 贵 贵 的 的 自动 自动 自动 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁 裁The film-like resin material 1〇a, 1% is laminated, and the tape-like laminated body 9a which is pulled out from the lamination device of the present invention is composed of a plurality of upper and lower strip-shaped film-like resin materials 10a. The strip-shaped laminate 9a which is formed intermittently in the direction of the long-term direction is cut into individual products by means of a cutting device (not shown) disposed adjacent to the present invention. Further, the undressing device may be disposed in the present laminate device downstream of the drive mechanism 14c of the strip-shaped laminate 9a. In addition, in the case of heating and pressurizing the upper and lower f-shaped film-like resin materials 10a, 1〇b by the present invention, the resin is not applied from the upper and lower sides, and the strip-shaped film-like resin material is l〇a, The end portion of 10b dissolves and oozes and adheres to the S-layer device. Specifically, in the case of the photosensitive polyimide film, in FIG. 1, a vacuum lamination device 2 and a continuous lamination device for planar pressing f are provided, but the invention is not limited thereto, and the vacuum lamination device 2 and the plane are Pressure: Two can be used independently. Further, in Fig. i, in order to transport the temporary laminate 7 or to avoid oozing out of the film-like resin material 8b and the film-like resin layer 8c, the film 5 and the film are transported by the upper and lower layers. The tension and the transport speed of the two transport films 5 and 6 are disposed in the transport inlet of the vacuum stacking device 2, and the transport film take-up portion 4 is disposed in the flat press device. ^ Near the outlet of the layer 9 transport. Further, Fig. 19, Fig. 24, Fig. 26 and Fig. 27 show that the resin is oozing out from the belt-like laminated body 9a, and the films 5 and 6 are transported by the upper and lower sides. However, in order to adjust the tension of the upper and lower transporting films 5, 6, And the conveyance speed, etc.: The portion la is disposed near the film inlet of the vacuum lamination device 2, and the film or the like is taken up/before the film exit of the flat pressing device 3. · Configuration 29 200818999 In addition, in the vacuum laminating device 2 and the flat pressing device 3 described above, the plate 20, the pressing block 41 can be moved up and down, and the lower plate 21 and the lower pressing block 42 can be cooled. f is the 'upper plate 2', and is preferably constituted by the structure of FIG. 1, FIG. 19 and FIG. 24 to FIG. 29 from the viewpoint of foreign matter dust generated by the elevating mechanism of the upper pressing block 41. In addition, in FIGS. 1, 19, 24, 26, and 27, it is shown that both the upper and lower transport films 5 and 6 are used in the vacuum stacking and the flat pressing device 3, but they may be used. Only the upper and lower materials 5, 6 are used for processing in the case of the straight (four) layer device 2, or only when processed by the planar pressing device 3. Further, the upper and lower transporting films 5, 6 may be provided in the vacuum laminating apparatus 2 and the flat pressing apparatus 3, respectively. Fig. 30, and Fig. 30 show the deformation 3 of the vacuum lamination device 2 used in each of the above embodiments. In the vacuum lamination device 2, the movable vacuum frame 30 is not provided, and the upper side fixing frame portion 63 is fixed to the upper plate 20 in a gas-tight manner. It is fixed to the lower plate 21. The vacuum suction nozzle 33 is not fixed to the upper side portion 63, and the vacuum suction through hole 65 is provided in the lower side fixing frame portion 64, and the vacuum suction through hole 65 is provided. The through hole 65 can vacuum-pump the air in the space portion 34 to provide a hydraulic cylinder or an air cylinder 66, and raise the lower plate 21 to the yak freely. The pressure 26 passes through the lower side of the 埶妯 埶妯 % 冋 冋 冋 , 同 同 , , , , , , , , 68 68 68 68 68 68 68 68 68 68 68 68 68 68 68 68 68 68 68 油 油 油 油 油 油 油 油 油 油Eve. In the figure, reference numeral 69 denotes a galvanic portion 34 which is held in the upper direction, and which functions as a function of the same function and effect in each of the vacuum laminations n of the vacuum lamination. ^ The lamination device of the above-mentioned various embodiments can also be used in the phase before the use of the above-mentioned two-layered 罟 罟 士 士 士 士 配置 配置 配置 配置 配置 配置 咕 咕 咕 咕 咕 咕 咕 咕 咕 之前 之前 之前 之前 之前 之前 之前 之前In the case of Zhao Zhaobo, cleaning the cleaning device, etc., to clean the surface of the substrate such as 30 200818999 or the surface of the upper and lower transport films 5, 6. Further, in front of the vacuum layering device 2, or in a plane pressing, 1 round belt 13 and a discharge conveyor belt (not shown), the transporting body 7 is arranged to be supplied to the upper and lower conveying films 5 and 6 by transporting the moxibustion. Further, by discharging the laminate 9 from which the temporary laminated conveyance films 5 and 6 are peeled off, it is possible to change from the upper and lower sides to the use of a rotating roller group or an endless conveyor belt. 5: The two conveyor belts 13 are not easy to handle. Further, the belt has a size of I3 material and the length is in the range of 0.3 to 3 m, preferably 〇/^. The conveying speed of the two conveyor belts 13 is usually 1 to 25 m/min, _f.~.5 m, and The laminated body 9 is cooled and cooled by the cooling air obtained when it is discharged from the flat pressing device 3, and is transported by the upper and lower sides. ^ The shape of the film 6 is "suspended portion" and is discharged to the rear side to discharge the peeling device after cooling, such as a peeling roller for peeling the film 5, 6 or the like, and is allowed to be placed. After the flat pressing device 3, 7 Gu, Tian 0 has been placed to store the storage portion of the pressure-fixed laminated body 9, or to improve the surface smoothness, or a pressurizing device can be appropriately disposed. ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ ϊ μ _ ^, the upper and lower strip-shaped film-like resin materials l〇a, l〇b and ίί=ΐΐ„lla, llb can be changed to the strip substrate winding pro-mountain sheet cutting and laminating machine In the upstream, the slab substrate 10c pulled out from the strip substrate winding roller llc is inserted into the automatic sheet cutting laminator, and the film-like resin material 8b cut into a short sheet 31 200818999 is temporarily fixed in the belt. The substrate is received, and the device 2' can also change the strip-shaped wire 10c and the strip-shaped substrate to the surface of the substrate 8a by means of the conveyor belt 13 _ 乂 乂 而 = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = = The substrate (single substrate) 8a is transported into the conveyor belt 13 by two layers of film-like tree gambling material 1 () a, between the enthalpy, and is given to the vacuum lamination device layer two t-sheet ' It is possible to smooth the irr-stepping device of the vacuum pressing device of the present invention, in order to make the membranous tree "like: shortening the filling time" while suppressing the uniformity of the resin. 'Can change the resin material and the thickness of the resin at the side [General Example] To /===纲'Nen (4) Eyes [Case 1] Laminated stacking device 2 and flat-panel device 3. Adjust by vacuum to ^11〇. "i hot plates 23 and 26 of two plates 20 and 21, the space portion 34 is preliminarily (glass 辕 PI, 'the thermosetting resin composition composed of epoxy resin lamella / C) fb poly-p-phenylene The film-like tree formed by the formic acid ethane vinegar support film is automatically n+f on both sides of the front and back sides of the substrate 8a having irregularities on both sides of the surface, and is temporarily fixed by a knife-layer machine to make two film-like resin materials (32 of the resin layer) 200818999 The resin surface of the thickness 38 // m) is in contact with the uneven surface of the substrate 8a (thickness of the unevenness Μ at m, uneven pitch 20/zm), and the temporary laminate 7 is prepared. Next, poly-terephthalic acid is used. The upper and lower transport films 5 and 6 (thickness 38 am, surface roughness: 0.5 /zm) are formed by the ethylene glycol film, and the temporary laminate 7 is transported to the press-fixed position in the vacuum lamination device 2, and then The lower plate 21 is raised, and the upper plate 20 is sealed and fitted, and then the pressure is reduced. 〃 The air is sucked from the vacuum suction nozzle 33 by vacuum pumping (not shown) to make the space portion 34 after the suction starts for 30 seconds. Set to i〇OPa, with a thickness of 2mm, size X horizontal) 63cmx63cm above and below two elastic pressure plates 24, 27, will temporarily IMPa pressure is pressurized for 2G seconds. The "kiny〇b〇ardF200" made by the company is directly fixed to the upper and lower hot plates/% for the upper and lower elastic domain plates 24 and 27, and the two hot plates 23 and 26 are dead. Inside, there are 9 sheath heaters built in each. Next, the space portion 34 is returned to the atmospheric pressure, and the lower plate 2 and the fixed temporary laminate 7 (i.e., the laminate 9) are discharged from the upper surface of the vacuum lamination device 2, and are transported to the flat pressing device 3. Next, the flat metal body is pressed by the flat sulfur device 3, and the flexible metal plates 49 and 53 are used, and the flatness of the press surface is 3 coats (SUS630H, thickness 3_, and the upper and lower sides are used. Qiao Erzhi's non-pound steel vinylidene fluoride rubber (vinylidene fluoride, hexafluoride material

^15轉’ Sh〇reA硬度70度者。又，於上 S 9 , 47a . 51a , 45 - ^ 將疊層f以1篇之壓力進行50秒加熱Μί。金屬板49、53 運送ίί平疊層體9以上下兩運送媒5、6 評價服貼性、排於得到之疊層體9，依以下基準 联/子叼g性、表面鏡面性，皺紋產生性。 33 200818999 [服貼性] 觀祭璺層體9之表面’並以50倍顯微鏡觀察膜狀樹脂層纪 是否沿著基板8a之凹凸疊層。 Ο…膜狀樹脂層8c沿者凹凸而充填，沒有微小空隙地服貼。 X…膜狀樹脂層8c未沿著凹凸而充填，或有微小空隙。、 [膜厚均勻性] ""μ 將疊層體9以橫切法切開’以電子顯微鏡觀察垂直切斷面， 測定疊層在基板8a凸面上之樹脂層厚度，將各厚度之差以如下方 式評價^15 turns 'Sh〇reA hardness of 70 degrees. Further, on the upper S 9 , 47a . 51a , 45 - ^, the laminate f is heated at a pressure of one piece for 50 seconds. The metal plates 49 and 53 are transported, and the two transport media 5 and 6 are evaluated, and the laminated body 9 is evaluated for conformability and is obtained by the following reference, and the wrinkles are generated by the following reference. Sex. 33 200818999 [Applicability] The surface of the enamel layer 9 was observed and the film-like resin layer was observed under a microscope of 50 times to be laminated along the unevenness of the substrate 8a. Ο... The film-like resin layer 8c is filled along the irregularities, and is applied without any small gaps. X... The film-like resin layer 8c is not filled along the unevenness, or has minute voids. [Film thickness uniformity] ""μ The laminate 9 is cut by a cross-cut method. The vertical cut surface is observed by an electron microscope, and the thickness of the resin layer laminated on the convex surface of the substrate 8a is measured, and the difference between the thicknesses is measured. Evaluated as follows

〇…不滿0.5 //m。 X··.超過 0.5 /zm。 [表面鏡面性] 將疊層體9之膜狀樹脂層8c面以斜45度之角度照射到基板 8a後之日光燈反射光以目視觀察，並依如下方式評土 〇···接近鏡面之狀態。 、 X...不成鏡面。 [皺紋產生性] 觀察疊唐體9之表面，並觀察在膜狀樹脂層％之 產生皺紋。 另 〇..·沒有產生跋紋。 X...產生皺紋。 [實施例2] 以貝加例1之條件將基材放置在真空疊層裝置2敎挪 23、26中央部’運轉3〇萬次之後，與實施例i條件得到之^ 9:同樣地評價服貼性、膜厚均一性、表面鏡面性、毅紋產: [實施例3] ' ί件，並就真空疊層裝置2之上下兩彈性加壓: 24、27而二^將Sh0reA硬度60度、厚度4mm、表面粗糙度r /zm之3亂矽_橡膠加硫黏接在平面度3//m之不銹鋼 34 200818999 =S680H、厚度2mm)單面，並於未將含氟石夕g同橡膠加硫黏接之 ’以金陽公司製「KinyGbGa福作為緩衝材〔尺寸(縱X ^3cmx63Cm〕’固定在上下兩熱盤23、26，除了以外，以相同 如件形成疊層體9 ’同樣地評價服貼性、膜厚均勻性、表面鏡面性、 敲紋產生性。 [實施例4] 使用圖19所示之真空疊層裝置2及平面壓製裝置3，將連續 帶狀之環祕騎構成之熱硬錄樹驗合物(料轉移溫度8〇 對苯—愤?二§旨支賊所構成之連續帶細狀樹脂材料 〇a、10b，如圖20所示插通於表背兩面具有凹凸之帶狀基板衞(帶 狀基板10c之絕緣層為70//m之聚醯亞胺膜、凹凸之厚度 =間隔2G_ ’除此以外，以實施例2之條件形成連續帶狀疊 f體9a ’同樣地評價服雌、膜厚均句性、表面鏡面性、傲紋產 生性。 [實施例5] 除了實施例2之條件使用之兩膜狀樹脂材料肋之樹脂層厚产 ，m、基材8a之凹凸之厚度5〇//m、凹凸間隔5〇_以外二 貫施例2以相同條件形成疊層體9，並同樣地評價服貼性、膜^ 勻性、表面鏡面性、皺紋產生性。 [實施例6] 以實施例3之條件，並使用兩膜狀樹脂材料北之樹脂層厚度 68 =、基材8a之凹凸厚度5〇"m、凹凸間隔5〇轉，除此以^ 與貫施例3以相同條件形成疊層體9，並同樣地評貼性、膜厚 均勻性、表面鏡面性、皺紋產生性。 [實施例7] 以貫施例4之條件，並使用之連續帶狀兩膜狀樹脂材料ι〇&、 l〇b之^度抑/zm、帶狀基板1〇c(帶狀基板1〇c之絕緣層為7〇_ 之承fe亞胺膜、凹凸厚度5〇^m、凹凸間隔5〇^道)以外，與實施 例4以相同仏件开》成連續帶狀疊層體％，並同樣地評價服貼性、 35 200818999 膜厚均勻性、表面鏡面性、皺紋產生性。 [比較例1] 將圖1所示真空疊層裝置2、平面壓製裝置3，改為使用1台 平面壓製裝置3形成疊層體9，並同樣地評價服貼性、膜厚均勻 性、表面鏡面性、敵紋產生性。 [比較例2] - 就真空疊層裝置2之上下兩彈性加壓板24、27而言，使用不含 纖維層之ShoreA硬度60度、厚度4mm，表面粗糙度Rz3 //m之 含氟矽酮橡膠，除此以外與實施例2以相同條件形成疊層體9，並 同樣地評價服貼性、膜厚均勻性、表面鏡面性、皺紋產生性。 實施例1〜7及比較例1、2之評價結果如下表1所示。 [表 1] _ 服貼性 膜厚均勻性 表面鏡面性 皺紋發生性 實施例1 〇· 〇 〇 〇 實施例2 〇 〇 〇 〇 實施例3 〇 〇 〇 〇 實施例4 〇 ， 〇 〇 〇 實施例5 〇 〇 〇 〇 實施例6 〇 〇 〇 .〇 實施例7 ‘〇 〇 〇 .〇 比較例8 X X X X 比較例2 X X X 〇 由上表1可判斷，關於服貼性、膜厚均勻性、表面鏡面性、 皺紋產生性，實施例1〜7較比較例1更為優異。 【圖式簡單說明】 圖1顯示本發明疊層裝置之一實施形態構成。 圖2顯示暫時疊層體之剖面圖。 36 200818999 圖3顯示疊層體之剖面圖。 圖4顯示運送膜捲繞部之構成。 圖5顯示運送膜捲取部之構成。 圖6顯示真空疊層裝置之構成。 圖7顯示上述真空疊層裝置之要部構成。 圖8顯示上述真空疊層裝置之其他例之構成。 圖9顯示上述真空疊層裝置之可動真空框之作用剖面圖。 圖10顯示上述真空疊層裝置之可動真空框之作用剖面圖。 圖11顯示上述真空疊層裝置之可動真空框之作用剖面圖。 圖12顯示平面壓製裝置構成。 圖13顯示疊層體之剖面圖。 圖14顯示彈性加壓板之一剖面圖例。 圖15顯示彈性加壓板之其他剖面圖例。 圖16顯示上述真空疊層裝置作用之構成。 圖17顯示上述真空疊層裝置作用之構成。 圖18顯示上述真空疊層裝置作用之構成。 圖19顯示本發明之疊層裝置之其他實施形態構成。 圖20顯示膜等釋出部構成。 圖21顯示膜等捲取部構成。 圖22顯示調整輥説明圖。 圖23顯示本發明之疊層裝置之又另一實施形態構成。 圖24顯示本發明之疊層裝置之又另一實施形態構成。 圖25顯示本發明之疊層裝置又另一實施形態之構成/ 圖26顯示本發明之疊層裝置又另一實施形態之構成。 圖27顯示本發明之疊層裝置又另一實施形態之構成。 圖28顯示本發明之疊層裝置又另一實施形態之構成。 圖29顯示本發明之疊層裝置又另一實施形態之構成。 圖30顯示上述疊層裝置之變形構成圖例。 圖31顯示習知例之侧面圖。 37 200818999 圖32顯示另一習知例之構成。 【主要元件符號說明】 1運送膜釋出部 la釋出部 2真空疊層裝置(真空壓製裝置） 3平面壓製裝置 4運送膜捲取部 4a捲取部 5上侧運送膜(第1帶狀膜） 6下侧運送膜(第2帶狀膜） .7暫時疊層體 8a基材 8b 膜狀樹脂材料 8c膜狀樹脂層 9疊層體 9a帶狀疊層體 10a上侧帶狀膜狀樹脂材料 10b下侧帶狀膜狀樹脂材料 10c 帶狀基板 11a〜11c捲繞輥 12 下侧運送膜捲繞輥(第2膜捲繞輥) 12a第1引導輥 12b第2引導輥 12c第3引導輥 13 運入輸送帶(供給機構）. 13a暫時疊層體止動器 13 b 空氣缸筒 14 捲取輥 38 200818999 14a捲取輥 14b第1驅動機構(第1膜驅動機構) 14c疊層體驅動機構 15 下侧捲取輥(第2膜捲取親） 15a第2驅動機構(第2膜驅動機構) 15b調整輥 17 壓製台 18 支柱 19 固定機構 20 上部板 21 下部板 22 上側絕熱材料 23、26、47、51 熱盤 23a、26a加熱器 24 彈性加壓板 24a、 27a金屬板 25 下側絕熱材料 27 彈性加壓板 28 接頭 29 油壓缸筒或空氣缸筒 29a 活塞桿 30 可動真空框 31 上側固定框部 31a 貫通孔 32 可動框 33 真空抽吸用噴嘴 34 空間部 35 下侧固定框部 35a 凹溝 39 200818999 35b下端突出部 36 可動框部 36a 凹部 36b凹溝 37 彈簧 38 環狀密封構件 39 密封構件 40a、40b 密封構件 41、42壓製塊 _ 43 壓製台 43a 支柱 43b 固定機構 44 上部基底層 45 下部基底層 46 上侧絕熱材料 47a、51a 加熱器 48 上侧缓衝材 49 上侧可撓性金屬板 50 下側絕熱材料 • 52下侧缓衝材 53 下侧可撓性金屬板 ^ 54 接頭 55 油壓缸筒或空氣缸筒 • 55a活塞桿 61 板狀本體 62 纖維層 63 上側固定框部 64 .下侧固定框部 真空抽吸用貫通孔 65 200818999Oh... less than 0.5 //m. X··. More than 0.5 /zm. [Surface Specularity] The surface of the film-like resin layer 8c of the laminate 9 is irradiated onto the substrate 8a at an angle of 45 degrees to reflect the light reflected by the fluorescent lamp, and the state of the mirror is evaluated as follows. . , X... is not a mirror. [Wrinkle-producing property] The surface of the stacked body 9 was observed, and wrinkles were observed in the film-like resin layer. Another 〇..·has no crepe. X... produces wrinkles. [Example 2] The substrate was placed in the center of the vacuum lamination apparatus 2, and the central portion of the vacuum lamination apparatus 2 was operated for 3 million times, and evaluated in the same manner as in the example i: Applicability, film thickness uniformity, surface specularity, and embossing production: [Example 3] ' ί, and the upper and lower elastic pressurization of the vacuum lamination device 2: 24, 27 and 2 ^ Sh0reA hardness 60 Degree, thickness 4mm, surface roughness r /zm 3 chaos _ rubber and sulfur bonding in the flatness 3 / / m of stainless steel 34 200818999 = S680H, thickness 2mm) single-sided, and not the fluorine-containing stone It is bonded to rubber and vulcanized with 'Kiny GbGa Fu as a cushioning material made by Jinyang Co., Ltd. (size (length X ^3cmx63Cm)' is fixed to the upper and lower hot plates 23, 26, except for the same, forming a laminate 9 'Apparability, film thickness uniformity, surface mirror property, and crepe generation property were evaluated in the same manner. [Example 4] Using the vacuum lamination device 2 and the flat pressing device 3 shown in Fig. 19, a continuous band-shaped ring was used. The secret hard-cured tree composition consisting of secret riding (material transfer temperature 8 〇 benzene - anger? 2 § thief consists of continuous strip of fine resin material 〇 a, 1 0b, as shown in Fig. 20, inserted into the strip-shaped substrate having irregularities on both sides of the front and back sides (the thickness of the polyimine film of the insulating layer of the strip substrate 10c of 70/m, the thickness of the unevenness = the interval 2G_') The continuous strip-shaped stacked body 9a was formed under the conditions of Example 2, and the female, the film thickness uniformity, the surface specularity, and the striated origin were evaluated in the same manner. [Example 5] The conditions of Example 2 were used. The resin layer of the two film-shaped resin material ribs is thick, m, the thickness of the unevenness of the base material 8a is 5 〇//m, and the unevenness interval is 5 〇. The second embodiment 2 forms the laminate 9 under the same conditions, and similarly The conformability, the film uniformity, the surface specularity, and the wrinkle-producing property were evaluated. [Example 6] The conditions of Example 3 were used, and the thickness of the resin layer in the north of the two film-like resin materials was 68 = the unevenness of the substrate 8a. The thickness 5 〇"m, the unevenness interval is 5 turns, and the laminate 9 is formed under the same conditions as in Example 3, and the evaluation property, the film thickness uniformity, the surface mirror property, and the wrinkle generation property are similarly evaluated. [Example 7] According to the conditions of Example 4, and using the continuous strip-shaped two-film resin material ι〇&, l〇b^度/z m, the strip substrate 1 〇 c (the insulating layer of the strip substrate 1 〇 c is 7 〇 之 亚 亚 imine film, uneven thickness 5 〇 ^ m, uneven pitch 5 〇 ^ dao), and Example 4 The same article was opened to form a continuous ribbon-like laminate %, and the conformability, 35 200818999 film thickness uniformity, surface mirror property, and wrinkle generation property were evaluated in the same manner. [Comparative Example 1] The vacuum laminate shown in Fig. 1 was used. In the apparatus 2 and the flat pressing apparatus 3, the laminated body 9 was formed using one flat pressing apparatus 3, and the conformability, film thickness uniformity, surface mirror property, and enemies generation property were evaluated similarly. [Comparative Example 2] - For the upper and lower elastic pressure plates 24, 27 of the vacuum lamination device 2, a fluorine-containing ruthenium having a Shore A hardness of 60 degrees, a thickness of 4 mm, and a surface roughness of Rz3 //m was used. The laminate 9 was formed under the same conditions as in Example 2 except for the ketone rubber, and the conformability, film thickness uniformity, surface mirror property, and wrinkle generation property were evaluated in the same manner. The evaluation results of Examples 1 to 7 and Comparative Examples 1 and 2 are shown in Table 1 below. [Table 1] _ compliant film thickness uniformity surface specular wrinkle generation Example 1 〇 · 〇〇〇 Example 2 〇〇〇〇 Example 3 〇〇〇〇 Example 4 〇, 〇〇〇 Example 5 〇〇〇〇Example 6 〇〇〇.〇Example 7 '〇〇〇.〇Comparative Example 8 XXXX Comparative Example 2 XXX 〇 can be judged from the above Table 1, regarding conformability, film thickness uniformity, surface mirror The properties and wrinkles were produced, and Examples 1 to 7 were superior to Comparative Example 1. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows an embodiment of an embodiment of a lamination device of the present invention. Figure 2 shows a cross-sectional view of a temporary laminate. 36 200818999 Figure 3 shows a cross-sectional view of the laminate. Fig. 4 shows the configuration of the transport film winding portion. Fig. 5 shows the configuration of the transport film take-up portion. Figure 6 shows the construction of a vacuum lamination device. Fig. 7 shows the configuration of the main part of the vacuum lamination apparatus described above. Fig. 8 shows the configuration of another example of the above vacuum lamination apparatus. Figure 9 is a cross-sectional view showing the action of the movable vacuum frame of the vacuum lamination apparatus. Figure 10 is a cross-sectional view showing the action of the movable vacuum frame of the vacuum lamination apparatus. Figure 11 is a cross-sectional view showing the action of the movable vacuum frame of the vacuum lamination apparatus. Figure 12 shows the construction of a planar pressing device. Figure 13 shows a cross-sectional view of the laminate. Figure 14 shows a cross-sectional view of one of the elastic compression plates. Figure 15 shows another cross-sectional illustration of the elastic compression plate. Fig. 16 shows the constitution of the above-described vacuum lamination device. Fig. 17 shows the constitution of the above-described vacuum lamination device. Fig. 18 shows the constitution of the above-described vacuum lamination device. Fig. 19 shows another embodiment of the laminating apparatus of the present invention. Fig. 20 shows the configuration of a release portion such as a film. Fig. 21 shows a configuration of a winding portion such as a film. Figure 22 shows an explanatory diagram of the adjustment roller. Fig. 23 shows still another embodiment of the laminating apparatus of the present invention. Fig. 24 is a view showing still another embodiment of the laminating apparatus of the present invention. Fig. 25 is a view showing the configuration of still another embodiment of the laminating apparatus of the present invention. Fig. 26 is a view showing the configuration of still another embodiment of the laminating apparatus of the present invention. Fig. 27 is a view showing the configuration of still another embodiment of the laminating apparatus of the present invention. Fig. 28 is a view showing the configuration of still another embodiment of the laminating apparatus of the present invention. Fig. 29 is a view showing the configuration of still another embodiment of the laminating apparatus of the present invention. Fig. 30 is a view showing a modification of the above-described lamination device. Figure 31 shows a side view of a conventional example. 37 200818999 Figure 32 shows the construction of another conventional example. [Description of main component symbols] 1 transport film releasing portion la releasing portion 2 vacuum laminating device (vacuum pressing device) 3 flat pressing device 4 transporting film winding portion 4a winding portion 5 upper conveying film (first band shape) Film) 6 lower conveyance film (second tape film). 7 temporary laminate 8a base material 8b film-like resin material 8c film-like resin layer 9 laminate 9a tape-like laminate 10a upper tape-like film Resin material 10b lower side strip-shaped film-like resin material 10c strip-shaped board|substrate 11a-11c winding roll 12 lower side conveyance film winding roll (2nd film winding roll) 12a 1st guide roll 12b 2nd guide roll 12c 3rd The guide roller 13 is carried into a conveyor belt (supply mechanism). 13a Temporary laminate stopper 13 b Empty cylinder cylinder 14 Winding roller 38 200818999 14a Winding roller 14b First drive mechanism (first membrane drive mechanism) 14c laminate Body drive mechanism 15 lower winding roller (second film winding master) 15a second driving mechanism (second film driving mechanism) 15b adjusting roller 17 pressing table 18 pillar 19 fixing mechanism 20 upper plate 21 lower plate 22 upper side heat insulating material 23, 26, 47, 51 hot plate 23a, 26a heater 24 elastic pressure plate 24a, 27a metal plate 25 lower side heat insulating material 27 Pressure plate 28 joint 29 hydraulic cylinder or air cylinder 29a piston rod 30 movable vacuum frame 31 upper fixed frame portion 31a through hole 32 movable frame 33 vacuum suction nozzle 34 space portion 35 lower fixed frame portion 35a concave Groove 39 200818999 35b lower end projection 36 movable frame portion 36a recess 36b recessed groove 37 spring 38 annular sealing member 39 sealing member 40a, 40b sealing member 41, 42 pressing block _ 43 pressing table 43a post 43b fixing mechanism 44 upper base layer 45 Lower base layer 46 Upper side heat insulating material 47a, 51a Heater 48 Upper side cushioning material 49 Upper side flexible metal plate 50 Lower side heat insulating material • 52 Lower side cushioning material 53 Lower side flexible metal plate ^ 54 Joint 55 Hydraulic cylinder or air cylinder • 55a piston rod 61 Plate body 62 Fiber layer 63 Upper side fixing frame part 64. Lower side fixing frame part Vacuum suction through hole 65 200818999

66 油壓缸筒或空氣缸筒 67 支持板 68 油壓缸筒或空氣缸筒 69 環狀密封構件 71 真空室 72 支持塊 73 上侧殼體構件 74a 空氣缸筒 74b 缸筒裝置’ 75 下側殼體構件 76 上側加壓塊 77 下侧加藶塊 78 加熱板 79 隔膜 80 加熱板 81 隔膜 82 基板 91 真空疊層機 92 平坦化壓製機 93a 、93b、94、94b熱盤 95 疊層材 96 被疊層材66 Hydraulic cylinder or air cylinder 67 Support plate 68 Hydraulic cylinder or air cylinder 69 Annular sealing member 71 Vacuum chamber 72 Support block 73 Upper housing member 74a Empty cylinder tube 74b Cylinder unit '75 Lower side Housing member 76 upper side pressure block 77 lower side twisting block 78 heating plate 79 diaphragm 80 heating plate 81 diaphragm 82 substrate 91 vacuum laminator 92 flattening press 93a, 93b, 94, 94b hot plate 95 laminated material 96 Laminated material

Claims (1)

200818999 十、申請專利範圍： 1·-種疊層裝置，毅有真空賴裝置，其具有麵向之 加熱機構的熱盤，且該一對熱盤中至少其一可相對於去义ς 後退；藉由該真空壓製裝置，將膜狀樹脂材料疊層於在表背= •中至面上具有凹凸的基材之該凹凸面，而形成疊層體， 其特徵在於： ~ 與該膜狀樹脂材料相對向之該熱盤的膜狀樹脂材料侧之 設有用以將膜狀樹脂材料加壓之彈性加壓板。 2·如申請專利範圍第1項之疊層裝置，其中，該彈性加壓板 • 耐熱性矽酮橡膠或耐熱性氟橡膠所構成。 ’、 3·如申請專利範圍第丨或2項之疊層裝置，其中，該彈性加壓板 具有纖維層。 、4.如申請專利範圍第丨或2項之疊層裝置，其中，該彈性加壓 之Shore Α硬度為40度以上。 5.如申請專利範圍第！或2項之疊層裝置，其中，該彈性加壓板 之與膜狀樹脂材料接觸的表面經過粗糙化。 6·如申請專利範圍第1或2項之疊層裝置’其中，在與該膜狀樹 月曰材料相對向之熱盤與彈性加壓板之間，設有板狀體，此板狀體 φ 與該彈性加壓板係黏接固定。 7.如申請專利範圍第6項之疊層裝置，其中，該熱盤與該板狀體 之間設有緩衝材。 ‘ 8·如申請專利範圍第1或2項之疊層裝置，其中，包含： . 弟1膜捲繞概，捲繞有第1帶狀膜; 弟2膜捲繞輕，與此弟1膜捲繞親相對向設置，捲繞有第2 帶狀膜； 第1及第2膜捲取輥，將捲繞在該第1及第2膜捲繞輥之第1 及第2帶狀膜以相對向狀態拉出並使通過該真空壓製裝置之兩熱 盤之間而捲取之； 、 供給機構，以在基材之至少單面暫時固定有膜狀樹脂材料之 42 200818999 暫時疊層體，供給至從該兩膜捲繞輥拉出之兩帶狀膜之間所形成 之間隙。 9·如申凊專利範圍第8項之豐層裝置，其中，具備捲取輥驅動機 構，其配合兩熱盤每一次之作動而間歇驅動該第丨及第2膜捲取 輥。 10·如申請專利範圍第1或2項之疊層裝置，其中， 具備： "” 第1樹脂材料捲繞輥，捲繞有使膜狀樹脂材料成為帶 之第1帶狀膜狀樹脂材料； 第2_㈣捲輪’捲財將_第丨_材料捲繞輕相 十向没置之膜狀樹脂材料成為帶狀而成之第2帶狀膜狀樹脂材料； 之*i將基材供給至形成於從該兩樹脂材料捲繞輕拉出 之兩帶狀膜狀樹脂材料之間之間隙； 並具備： 5 第1及第2引導機構，將從該第i及第 狀樹脂材·相對向狀態引導到該= 面疊層該第1及第2帶狀膜狀樹脂材料以5 =，月兩 拉伸機構，用以拉伸該帶狀疊=场成讀璺層體;及 如申請專利範圍第10項之疊層裝置，复 板或帶狀基板。 甲該基材為早片基 U·如申請專利範圍第1〇項之疊 13·申請專利範圍第10項之疊層裝置，其中句人： 弟1膜捲繞輥，捲繞有第1帶狀膜； 第2膜捲繞輥，捲繞有第2帶狀膜； 43 200818999 第1及第2引導機構，引導該第1及第2帶狀膜； 捲取輥，捲取該第1及第2帶狀膜； 將從第1及第2樹脂材料捲繞輥拉出，且其中間夾著基材之 第1及第2帶狀膜狀樹脂材料’在以從該兩膜捲繞輥拉出之兩帶 狀膜夾持之狀態，形成帶狀疊層體，並將第1及第2帶狀膜，與 該帶狀疊層體分別地捲取。200818999 X. Patent application scope: 1·- a kind of laminating device, which has a vacuum-laid device, which has a hot plate facing the heating mechanism, and at least one of the pair of hot plates can be retracted relative to the deiner; By the vacuum pressing device, the film-like resin material is laminated on the uneven surface of the substrate having irregularities on the front and back sides of the front surface to form a laminate, which is characterized by: ~ and the film-like resin The material is provided with an elastic pressure plate for pressurizing the film-like resin material on the side of the film-like resin material of the hot plate. 2. The laminating apparatus of claim 1, wherein the elastic pressing plate comprises a heat-resistant fluorenone rubber or a heat-resistant fluororubber. The laminating device of claim 2, wherein the elastic pressing plate has a fiber layer. 4. The laminating apparatus of claim 2 or 2, wherein the elastic pressurization Shore hardness is 40 degrees or more. 5. If you apply for a patent range! Or a laminated device according to the item 2, wherein the surface of the elastic pressing plate which is in contact with the film-like resin material is roughened. 6. The laminating device according to claim 1 or 2, wherein a plate-like body is provided between the hot plate and the elastic pressing plate opposed to the film-like tree-like material, the plate-shaped body φ is bonded and fixed to the elastic pressure plate. 7. The laminating apparatus of claim 6, wherein a cushioning material is disposed between the hot plate and the plate-like body. 8. The laminating device according to claim 1 or 2, wherein: the younger one is wound around the film, and the first strip film is wound; the second film is lightly wound, and the first film is The winding members are disposed opposite to each other, and the second belt-shaped film is wound; the first and second film winding rolls are wound around the first and second belt-shaped films of the first and second film winding rolls And the supply mechanism is a temporary laminate in which a film-like resin material is temporarily fixed on at least one side of the substrate, 200818999 temporary laminate, The gap formed between the two strip films pulled out from the two film winding rolls is supplied. 9. The layering device of claim 8, wherein the winding device is provided with a take-up roller driving mechanism that intermittently drives the second and second film take-up rolls in conjunction with each of the two hot plates. 10. The laminating apparatus according to claim 1 or 2, further comprising: "" the first resin material winding roller, and the first strip-shaped film-like resin material that causes the film-shaped resin material to be a tape ; 2nd (4) reel's volume _ _ _ _ material winding light phase ten-way film material is a strip-shaped second strip-shaped film-like resin material; *i supply substrate to a gap formed between the two strip-shaped film-like resin materials which are drawn from the two resin materials, and includes: 5 first and second guiding means for opposing the i-th and the first resin materials State-directed to the = surface stacking of the first and second strip-shaped film-like resin materials with a 5 =, two-month stretching mechanism for stretching the strip-shaped stack = field into a read layer; and as claimed The laminating device of the ninth aspect, the multi-layered substrate or the strip-shaped substrate. The substrate is the laminating device of the early film base U. Sentence: The first film winding roller is wound with a first belt film; the second film winding roller is wound with a second belt film; 43 200818999 1 and the second guiding means guide the first and second belt-shaped films; the winding roller winds up the first and second belt-shaped films; and pulls the first and second resin material winding rolls, and The first and second strip-shaped film-like resin materials ' between the two sheets are sandwiched between the two strip-shaped films pulled out from the two film winding rolls, and a strip-shaped laminate is formed. 1 and the second strip film are wound up separately from the strip-shaped laminate. 14·如申請專利範圍第1或2項之疊層裝置，其中，具有平面壓製 裝置，其設有相對向之兩熱盤，且該兩熱盤中之至少一者可相對 於另一者如進後退，以該平面壓製裝置之兩熱盤，將藉由該真空 壓製裝置所形成之疊層體之表背兩面予以加壓使其平滑化。 15· —種疊層方法，其特徵在於： 使用申請專利範圍第1至14項中任-項之疊層裝置，在表背g ΐΐ中之一具有凹凸之基材之該凹凸面，將膜狀樹脂材料予Ϊ 豐層而形成疊層體。 ' 十一、圖式： 44The laminating device of claim 1 or 2, wherein there is a flat pressing device provided with two hot plates opposite thereto, and at least one of the two hot plates is opposite to the other In the back and forth, the front and back sides of the laminate formed by the vacuum pressing device are pressurized by the two hot plates of the flat pressing device to be smoothed. A lamination method according to any one of claims 1 to 14, wherein the film has a concave-convex surface of a substrate having a concavity and convexity in one of the front and back surfaces The resin material is lumped to form a laminate. '11. Schema: 44
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