JP5915212B2 - Transport device - Google Patents

Description

  The present invention relates to a transport device that transports a relatively thin plate glass or the like.

  Conventionally, for example, a conveyor has been used to convey a thin plate-like workpiece such as a plate glass. In order to cope with long-distance conveyance and changes in the conveyance distance, a plurality of conveyors may be arranged in series in the conveyance direction. In this case, since the rotating body (pulley) is located at the end of the conveyor, the conveyor conveyance surface cannot be maintained, and a portion where contact between the workpiece and the conveyor is interrupted occurs in the continuous portion. When the workpiece being transported passes over the interrupted portion and passes between the conveyors, the downstream end (tip portion) of the workpiece in the transport direction is curved downward and droops.

  In order to suppress such drooping of the front end portion of the workpiece, there has been proposed a conveying device in which the ejection portion ejects gas at the continuous portion to float the workpiece (for example, Patent Document 1). In addition, there has also been proposed a conveyance device in which a roller that supports the workpiece from below vertically is arranged at a height position when the tip portion of the workpiece hanging down in the connection reaches the conveyance device on the downstream side (for example, Patent Document 2). ).

Patent No. 4501713 JP 2009-292643 A

  If the tip of the workpiece hangs down as described above in the connection between the devices, the tip of the workpiece may collide with the conveyance device on the downstream side in the conveyance direction, and the workpiece may be damaged. . In addition, it is not possible to deny the possibility that not only the tip portion of the workpiece but also the upstream end portion in the conveyance direction of the workpiece will collide by drooping.

  When providing a mechanism for supporting the end portion of the workpiece from the vertically lower position in the above-described continuous portion as in the conveyance devices described in Patent Documents 1 and 2, depending on the manner of the droop, this mechanism itself may be the end portion of the workpiece. Can become a collision obstacle.

  An object of the present invention is to provide a transport device that can avoid a collision with a workpiece in a connection between devices and can perform stable transport.

In order to solve the above-described problems, in the transport apparatus according to the present invention, a plurality of transport units including a transport unit that transports a flexible work are provided in a row apart from each other in the work transport direction. the joint portion, above the height of the conveying time of the workpiece, multiple and different in position in the transport direction, is distributing suction unit for sucking the workpiece, the suction surface attraction force to the workpiece in a plurality of suction portion occurs The suction unit disposed on the downstream side in the transport direction is higher in the vertical direction than the suction unit disposed on the upstream side in the transport direction .

In order to solve the above-described problems, according to another transfer apparatus of the present invention, a plurality of transfer units including a transfer unit that transfers a work having flexibility are provided in a plurality of positions apart from each other in the transfer direction of the work. A plurality of suction portions for sucking the workpieces at different positions in the opposite direction of the transport portion are arranged above the height of the workpiece at the time of transport in the continuous portion of the unit, and suction force for the workpiece in the suction portion is generated. The suction surface is characterized in that the height on the center side is low and the height on the outside is high in a direction that is horizontal and perpendicular to the transport direction .
In order to solve the above-described problems, according to another transfer apparatus of the present invention, a plurality of transfer units including a transfer unit that transfers a work having flexibility are provided in a plurality of positions apart from each other in the transfer direction of the work. The unit is provided with a suction part for sucking the workpiece above the height of the workpiece during conveyance, and in the vicinity of the suction unit, and at least a downstream end portion of the workpiece during conveyance in the conveyance direction. A position detection unit that detects the height of the direction, and a suction control that controls the suction unit to increase the suction force to the workpiece as the height in the vertical direction is lower according to the height in the vertical direction detected by the position detection unit And a section .
In order to solve the above-described problems, another conveying device of the present invention includes a conveying unit that conveys a flexible workpiece, and a workpiece at the time of conveying at least one of a plurality of conveying units in front or rear in the conveying direction. A plurality of suction portions that are arranged at different positions in the transport direction and suck the work, and a suction surface that generates a suction force for the work in the plurality of suction portions is located downstream of the transport direction. The arranged suction part is higher in the vertical direction than the suction part arranged on the upstream side in the transport direction .
In order to solve the above-described problems, another conveying device of the present invention includes a conveying unit that conveys a flexible workpiece, and a workpiece at the time of conveying at least one of a plurality of conveying units in front or rear in the conveying direction. A plurality of suction sections that are arranged at different positions in the opposite direction of the transport section and suck the work, and the suction surface that generates the suction force for the work in the suction section is horizontal and in the transport direction. In the vertical direction, the center side is low and the outside height is high .
In order to solve the above-described problems, another conveying device of the present invention includes a conveying unit that conveys a flexible workpiece, and a workpiece at the time of conveying at least one of a plurality of conveying units in front or rear in the conveying direction. A suction part that is disposed above the height of the workpiece, and a position detection unit that is disposed in the vicinity of the suction part and detects the height in the vertical direction at least at the downstream end of the workpiece in the conveyance direction during conveyance. And a suction control unit that controls the suction unit to increase the suction force to the workpiece as the vertical height is lower in accordance with the vertical height detected by the position detection unit. To do.

  The suction part may be configured by a Bernoulli chuck mechanism that generates a negative pressure on the work surface by injecting gas onto the work surface.

  The suction surface on which the suction force to the workpiece in the suction part is generated may be inclined so that the downstream side in the transport direction is higher in the vertical direction than the upstream side.

  According to the passage detection unit for detecting the passage of the workpiece and the workpiece passage timing detected by the passage detection unit, the suction unit is operated while the workpiece passes near the suction unit, and the workpiece does not pass near the suction unit. And a suction control unit that controls the suction unit so as to pause the suction unit.

  According to the present invention, it is possible to avoid a collision with a workpiece in a connection between apparatuses and perform stable conveyance.

It is explanatory drawing for demonstrating the structure of the conveying apparatus in 1st Embodiment. It is explanatory drawing for demonstrating the transfer of the conventional workpiece | work. It is explanatory drawing for demonstrating the transfer of the workpiece | work in the conveying apparatus of 1st Embodiment. It is a block diagram for demonstrating control of a position detection part and a passage detection part. It is explanatory drawing for demonstrating a 1st modification and a 2nd modification. It is explanatory drawing for demonstrating a 3rd modification. It is explanatory drawing for demonstrating the structure of the conveying apparatus in 2nd Embodiment.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

  The conveying apparatus of this embodiment conveys a thin plate-like workpiece, and here, a conveying apparatus that conveys a flexible glass plate having a plate thickness of about 0.1 mm to 0.3 mm as a workpiece will be described. .

  FIG. 1 is an explanatory diagram for explaining the structure of the transport apparatus according to the first embodiment. In particular, FIG. 1A shows a top view of the transport apparatus 100, FIG. 1B shows a front view of the transport apparatus 100, and FIG. 1C shows a side view of the transport apparatus 100.

  As shown in FIGS. 1A to 1C, a conveying apparatus 100 includes a plurality of (two in this embodiment) conveying units 100a spaced apart in a workpiece conveying direction (indicated by an arrow X) and connected in a plurality. Configured. Here, first, the transport unit 100a will be described in detail.

  The transport unit 100 a includes a rotating body 110, a transport unit 112, a protrusion 114, and a floating part 116.

  The rotating body 110 is an annular member having a through hole in the center, and a plurality (two in this embodiment) are arranged in the transport direction. In addition, a plurality of (two in the present embodiment) rotating bodies 110 are arranged facing each other in the horizontal direction and perpendicular to the conveying direction, and rotate together with the shaft 110a. Therefore, the rotating shaft of the rotating body 110 is horizontal and perpendicular to the transport direction.

  The base 102 is a base of the transport unit 100a. The support leg 104 is fixed upright on the base 102. A through hole 104 a is provided in the upper part of the support leg 104. The shaft 110a is rotatably supported via a bearing provided on the inner peripheral surface of the through hole 104a.

  A pulley 110b is attached to the other end of the two shafts 110a arranged on the upstream side in the transport direction. The pulley 110b rotates integrally with the shaft 110a. A through-hole 104b is also provided in the lower portion of the support leg 104, and the shaft 110c is inserted into both of the opposing through-holes 104b, and is rotatably rotatable via a bearing provided on the inner peripheral surface of the through-hole 104b. Be supported.

  A pulley 110d is also attached to the shaft 110c, and the pulley 110d rotates integrally with the shaft 110c. The belt 110e is stretched endlessly by a pulley 110b positioned vertically above and a pulley 110d positioned vertically below, and transmits the rotational force of the pulley 110d to the pulley 110b.

  A shaft coupling 110f is provided at one end of the shaft 110c. One end of the shaft of the driving device 110g such as a motor is fitted into the shaft coupling 110f on the opposite side of the shaft 110c. The rotational force of the driving device 110g is transmitted to the shaft 110c by the shaft coupling 110f.

  The rotating body 110 is rotated by the rotational force of the driving device 110g transmitted by such a mechanism. Here, the configuration in which one driving device 110g rotates the rotating body 110 has been described as an example. However, for example, a plurality of driving devices 110g may rotate the rotating body 110 in synchronization. In addition, here, the pulleys 110b and 110d are described as an example in which the pulleys 110b and 110d are arranged on the inner side in the facing direction of the rotating body 110, but may be arranged on the outer side in the facing direction of the rotating body 110.

  The conveyance unit 112 is formed of, for example, a belt, is stretched endlessly by a plurality of rotating bodies 110, and moves in the direction of arrow Y shown in FIG. As shown in FIG. 1 (a), a plurality (two in the present embodiment) of the conveying units 112 are arranged to face each other in parallel with the conveying direction.

  The protrusions 114 are made of, for example, resin, and a plurality of protrusions 114 are arranged on the surface of the conveyance unit 112 to support and support the workpiece. The transport unit 112 moves in the direction of the arrow Y, so that the workpiece contacted and supported by the protrusion 114 is transported in the direction of the arrow X.

  The floating part 116 is composed of, for example, an ejection device that ejects compressed air, and is placed on the base 102 between the plurality of conveyance units 112 arranged in parallel with the conveyance direction. The floating portion 116 causes a gas flow upward in the vertical direction, and part of the work is levitated.

  Specifically, when the floating portion 116 ejects gas (compressed air) in a state in which the workpiece is in contact with and supported by the protrusion 114 to generate a gas flow vertically upward, the gap between the floating portion 116 and the workpiece is set. Air pressure increases. During the conveyance, the workpiece is supported by a vertically upward force due to the pressure of the air and a reaction force from the projection 114 against the weight of the workpiece.

  At this time, the floating portion 116 is not the dynamic pressure in the jet direction of the compressed air as the pressure of the air that supports the work, but is generated as a result of the movement of the air that tends to be dispersed in all directions in a narrow space below the work. Since static pressure is used, the work can be supported with less power.

  FIG. 2 is an explanatory diagram for explaining a conventional transfer of the workpiece W. FIG. 2A shows a top view of the conventional transfer apparatus 1, FIG. 2B shows a side view of the transfer apparatus 1, and FIG. 2C shows another transfer apparatus 4 of the related art. The side view of is shown.

  As shown in FIG. 2B, the conveyance units 1 a constituting the conveyance device 1 are separated from each other so that the protrusions 3 of the conveyance unit 2 do not interfere with each other. That is, in the continuous portion of the transport unit 1a, a portion where the contact between the protrusion 3 and the work W is interrupted occurs. When the workpiece W is transferred between the transfer units 1a, if the thickness of the workpiece W is thin, the end portion Wa of the workpiece W hangs vertically downward as shown in FIGS. 2 (a) and 2 (b).

  In the other transfer device 4 shown in FIG. 2C, the protrusion is not provided on the transfer unit 5, so the transfer unit 5 transfers the workpiece while contacting the workpiece W. Even in the transport device 4 having such a configuration, the transport unit 5 follows the outer shape of the rotary body 6 due to the structure in which the rotary body 6 is arranged in the continuous portion of the two transport units 4 a constituting the transport device 4. Therefore, the height in the vertical direction is lowered. Therefore, as with the transfer device 1, when the workpiece W is transferred between the transfer units 4a, the end portion Wa of the workpiece W hangs vertically downward.

  Therefore, the transport apparatus 100 of this embodiment includes a suction unit 120, a position detection unit 122, and a passage detection unit 124, as shown in FIGS. 1A to 1C, in addition to the transport unit 100a. .

  The suction unit 120 includes, for example, a Bernoulli chuck mechanism that generates a negative pressure on the work surface by injecting a gas onto the work surface. The suction unit 120 is a continuous portion of the plurality of transport units 100a. It is arranged above the height and sucks the workpiece W.

  For example, two support legs 120a are provided on the continuous portion of the transport unit 100a so as to face each other perpendicular to the transport direction. A bridge member 120b is fixed to the upper portion of the support leg 120a. In the suction part 120, a plurality of suction members 120b in the opposite direction of the conveying part 112 are provided on the bridge member 120b, three in the present embodiment. It is fixed toward.

  FIG. 3 is an explanatory diagram for explaining the transfer of the workpiece W in the transport apparatus 100 according to the first embodiment. 3A shows a top view of the transport apparatus 100, FIG. 3B shows a side view of the transport apparatus 100, and FIG. 3C shows a front view of the transport apparatus 100. However, for ease of understanding, illustration of the support leg 120a is omitted in FIG.

  In the transfer between the transfer units 100a of the workpieces W, the suction unit 120 keeps the end portions Wa of the workpieces W in a non-contact manner between the transfer units 112 of the transfer units 100a as shown in FIG. , Sucking vertically upward.

  As described above, in the transport apparatus 100 according to the present embodiment, the suction portion 120 sucks the end portion Wa of the workpiece W in the continuous portion of the transport unit 100a, so that the end portion Wa of the workpiece W is unlikely to hang vertically downward. . Even if the end portion Wa of the workpiece W hangs vertically downward, the suction unit 120 does not collide with the workpiece W because it is positioned vertically above the workpiece W instead of vertically below. . Therefore, the transfer device 100 can avoid collision of the end portion Wa of the workpiece W during the connection between the devices.

  In particular, the Bernoulli chuck mechanism can maintain the position of the workpiece W in a direction perpendicular to the suction surface by a strong suction force, but does not have a maintenance force in a direction horizontal to the suction surface. When the workpiece W is chucked at a predetermined position, the latter characteristic may be disadvantageous, but in the present embodiment, such a characteristic is used rather positively. That is, the workpiece W sucked by the suction unit 120 is in a state of being freely movable in a substantially horizontal conveyance direction while maintaining a position in the vertical direction approximately perpendicular to the suction surface. Therefore, the transport apparatus 100 can transport the end portion Wa of the workpiece W in the horizontal direction while stably maintaining the end portion Wa at a high position in the vertical direction.

  The position detection unit 122 is configured by, for example, an infrared sensor or the like. In the present embodiment, the position detection unit 122 is disposed on the bridge member 120b, and at least the end Wa on the downstream side in the conveyance direction of the workpiece W during conveyance is high in the vertical direction. Detect. Although the number of the position detection unit 122 may be one, the conveyance device 100 of the present embodiment includes two position detection units 122, and therefore it is possible to suppress measurement errors by using the average value.

  The passage detection unit 124 is configured by, for example, an infrared sensor. The passage detection unit 124 is fixed to the other end of the support rod 124a whose one end is fixed to the bridge member 120b, and detects the passage of the workpiece W at a position upstream of the suction unit 120.

  FIG. 4 is a block diagram for explaining the control of the position detection unit 122 and the passage detection unit 124. As shown in FIG. 4, the detection results by the position detector 122 and the passage detector 124 are output to the suction controller 126.

  The suction control unit 126 controls the suction unit 120 to increase the suction force with respect to the workpiece W as the height in the vertical direction is lower according to the height in the vertical direction detected by the position detection unit 122.

  As described above, the suction control unit 126 controls the suction force of the suction unit 120, so that the suction force is strong for the workpiece W whose end portion Wa is likely to hang vertically downward, and the suction force is difficult for the workpiece W that is difficult to hang down. By weakening, the suction part 120 can stably maintain the vertical position of the end part Wa of the workpiece W at a high level. Such a suction force control process by the position detection unit 122 and the suction control unit 126 may be performed at any time during the transfer of the workpiece W. For example, when the type of the workpiece W is changed, the suction force control processing is performed according to a user operation input. It may be done.

  The suction control unit 126 operates the suction unit 120 while the workpiece W passes through the vicinity of the suction unit 120 according to the passage timing of the workpiece W detected by the passage detection unit 124, and the workpiece W moves near the suction unit 120. While not passing, the suction unit 120 is controlled so as to pause the suction unit 120.

  With the configuration in which the suction unit 120 is suspended by the suction control unit 126, the transport device 100 can suppress useless energy consumption by the suction unit 120 and reduce the operation cost.

(First modification)
FIG. 5 is an explanatory diagram for explaining the first modification and the second modification, and is a side view corresponding to FIG. In particular, FIG. 5A shows a first modification, and FIG. 5B shows a second modification.

  As shown in FIG. 5A, the suction surface of the suction unit 120 in the first modification is inclined so that the downstream side in the transport direction is higher in the vertical direction than the upstream side.

  Thus, the conveyance apparatus 100 can raise the edge part Wa of the workpiece | work W higher to a perpendicular direction by the structure which inclines a suction surface. Further, since the vertical lower surface of the end portion Wa rises so as to face the downstream side in the conveyance direction while being inclined, the workpiece W smoothly transfers from the vertical lower surface side to the protrusion 114 of the conveyance device 100 on the downstream side. Is possible.

(Second modification)
As shown in FIG. 5B, a plurality of suction units 120 in the second modification example are arranged at different positions in the transport direction, and suction surfaces of the plurality of suction units 120 are disposed on the downstream side in the transport direction. The suction unit 120 is higher in the vertical direction than the suction unit 120 disposed on the upstream side in the transport direction.

  With this configuration, the transport apparatus 100 can pull up the end portion Wa of the workpiece W in a vertically upward direction to a position higher than the one suction unit 120, even if the distance between the transport units 100 a is long. The end Wa of the workpiece W can be lifted to a sufficient height so as not to collide with the transport unit 100a on the downstream side.

(Third Modification)
FIG. 6 is an explanatory diagram for explaining the third modification, and is a front view corresponding to FIG. The bridge member 120b of the third modified example has a low height in the vertical direction on the center side in the opposing direction of the support leg 120a. The support leg 120a is provided with three suction portions 120, and the suction surfaces of the support legs 120a have a low height on the center side and a high height on the outside in a direction that is horizontal and perpendicular to the transport direction. That is, the posture of the suction unit 120 is maintained so as to follow a bent shape that is recessed downward in the vertical direction of the workpiece W during conveyance.

  With such a configuration, for example, the transport apparatus 100 intentionally weakens the floating force by the floating portion 116 and actively dents the central portion of the workpiece W vertically downward to increase the rigidity of the workpiece W. It is also possible to suppress drooping of the end portion Wa of the workpiece W during the transfer between the apparatuses while transporting.

(Second Embodiment)
Next, the suction part 220, the support leg 220a, and the bridge member 220b in the transport apparatus 200 of the second embodiment will be described. The second embodiment differs from the first embodiment only in the suction part 220, the support leg 220a, and the bridge member 220b. Therefore, the description of the same configuration as the first embodiment is omitted here, and only the suction part 220, the support leg 220a, and the bridge member 220b having different configurations will be described.

  FIG. 7 is an explanatory diagram for explaining the structure of the transport apparatus 200 according to the second embodiment. 7A shows a top view of the transfer device 200, FIG. 7B shows a front view of the transfer device 200, and FIG. 7C shows a side view of the transfer device 200.

  In the first embodiment, the suction unit 120 is disposed between the plurality of transport units 100a. In the present embodiment, as shown in FIGS. 7A to 7C, the transport device 200 includes only one transport unit 200 a, and the suction unit 220, the support leg 220 a, and the bridge member 220 b include the transport unit. 112 is arranged at least one of the front and rear in the conveyance direction. The suction part 220 is positioned above the height of the workpiece during conveyance. The suction part 220, the support leg 220a, and the bridge member 220b have the same configuration as the suction part 120, the support leg 120a, and the bridge member 120b except for the arrangement thereof. Then, another device is disposed on the opposite side of the transport unit 200a with respect to the suction unit 220, the support leg 220a, and the bridge member 220b.

  Since the suction unit 220 sucks the end portion Wa of the workpiece W when connecting from another device to the transport device 200 or connecting from the transport device 200 to another device, the transport device 200 is difficult to hang vertically downward. . Even if the end portion Wa of the workpiece W hangs vertically downward, the suction portion 220 collides with the workpiece W because it is positioned vertically above the workpiece W instead of vertically below. There is nothing. Therefore, the transfer device 200 can avoid collision of the end portion Wa of the workpiece W in the connection between the devices.

  In the above-described embodiment, the transport apparatuses 100 and 200 have exemplified the configuration in which the workpiece W is lifted and transported. For example, the transport device 100 and 200 is configured to transport the workpiece W placed on a plurality of rollers arranged in the transport direction. It may be.

  In the above-described embodiment, the suction units 120 and 220 are Bernoulli chuck mechanisms, but may be vacuum pumps, ejectors, blowers, or the like.

  In the above-described embodiment, the configuration including both the position detection unit 122 and the passage detection unit 124 is described as an example, but the configuration including only one of the position detection unit 122 and the passage detection unit 124 may be used.

  Further, as in the second modification, a plurality of suction units 120 are arranged at different positions in the transport direction, and the suction surfaces of the plurality of suction units 120 are closer to the suction unit 120 disposed on the downstream side in the transport direction. Is a configuration that is higher in the vertical direction than the suction unit 120 arranged on the upstream side in the transport direction, and with respect to each suction unit 120, as in the first modification, with respect to the suction surface of the suction unit 120, The structure may be inclined such that the downstream side in the transport direction is higher in the vertical direction than the upstream side.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  INDUSTRIAL APPLICABILITY The present invention can be used for a transport device that transports a relatively thin plate glass or the like.

DESCRIPTION OF SYMBOLS 100 ... Conveyance apparatus 100a ... Conveyance unit 112 ... Conveyance part 120 ... Suction part 122 ... Position detection part 124 ... Passing detection part 126 ... Suction control part W ... Workpiece

Claims (9)

A plurality of conveyance units including a conveyance unit that conveys a workpiece having flexibility are provided apart from each other in the conveyance direction of the workpiece,
The plurality of conveying units the joint portion of, above the height of the workpiece during conveyance, a plurality and different from the position in the transport direction, the suction unit for sucking the workpiece is high,
The suction surface on which the suction force for the workpiece in the plurality of suction units is generated is higher in the vertical direction in the suction unit disposed on the downstream side in the transport direction than in the suction unit disposed on the upstream side in the transport direction. A conveying device characterized by the above. A plurality of conveyance units including a conveyance unit that conveys a workpiece having flexibility are provided apart from each other in the conveyance direction of the workpiece,
A plurality of suction units for sucking the workpieces are arranged above the height of the workpieces at the time of conveyance, and the plurality of conveyance units are arranged at different positions in the opposite direction of the conveyance unit, in the continuous portions of the plurality of conveyance units .
The conveyance device according to claim 1, wherein a suction surface that generates a suction force with respect to the workpiece in the suction unit has a low height on the center side and a high height on the outer side in a direction that is horizontal and perpendicular to the transfer direction . A plurality of conveyance units including a conveyance unit that conveys a workpiece having flexibility are provided apart from each other in the conveyance direction of the workpiece,
A suction portion that sucks the workpiece above the height of the workpiece at the time of conveyance at the continuous portion of the plurality of conveyance units ;
A position detection unit that is arranged in the vicinity of the suction unit and detects the height in the vertical direction of at least the downstream end of the workpiece in the conveyance direction during conveyance,
In accordance with the vertical height detected by the position detection unit, a suction control unit that controls the suction unit to increase the suction force to the workpiece as the vertical height is lower;
Conveying apparatus, characterized in that it comprises a. A transport unit for transporting a workpiece having flexibility;
In at least one of the front or rear in the transport direction of the plurality of transport units, a plurality of suction units that are arranged at different positions in the transport direction above the height of the work at the time of transport, and suck the work,
Equipped with a,
The suction surface on which the suction force for the workpiece in the plurality of suction units is generated is higher in the vertical direction in the suction unit disposed on the downstream side in the transport direction than in the suction unit disposed on the upstream side in the transport direction. A conveying device characterized by the above. A transport unit for transporting a workpiece having flexibility;
At least one of the front and rear in the transport direction of the plurality of transport units, a plurality of suction units that are arranged above the height of the work at the time of transport, with different positions in the facing direction of the transport unit, and suck the work And
Equipped with a,
The conveyance device according to claim 1, wherein a suction surface that generates a suction force with respect to the workpiece in the suction unit has a low height on the center side and a high height on the outer side in a direction that is horizontal and perpendicular to the transfer direction . A transport unit for transporting a workpiece having flexibility;
At least one of the front and rear in the transport direction of the plurality of transport units, the suction unit is disposed above the height of the work during transport, and sucks the work;
A position detection unit that is arranged in the vicinity of the suction unit and detects the height in the vertical direction of at least the downstream end of the workpiece in the conveyance direction during conveyance,
In accordance with the vertical height detected by the position detection unit, a suction control unit that controls the suction unit to increase the suction force to the workpiece as the vertical height is lower;
A conveying apparatus comprising: The conveying device according to any one of claims 1 to 6, wherein the suction unit includes a Bernoulli chuck mechanism that sprays gas on the work surface to generate a negative pressure on the work surface. . Suction surface attraction force to the workpiece in the suction unit occurs, one of claims 1, characterized in that towards the downstream side in the transport direction is inclined to be higher in the vertical direction than the upstream side 7 of the The conveying apparatus of Claim 1. A passage detector for detecting passage of the workpiece;
In accordance with the passage timing of the workpiece detected by the passage detection unit, the suction unit is operated while the workpiece passes near the suction unit, and the suction is performed while the workpiece does not pass near the suction unit. A suction control unit that controls the suction unit so as to pause the unit;
Conveying apparatus according to any one of claims 1 8, characterized in that it comprises a.

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