JP5904541B2 - Insert tip, plasma torch and plasma processing equipment - Google Patents

Description

  The present invention relates to an insert tip of a plasma torch, a plasma torch using the insert tip, and a plasma processing apparatus using the plasma torch.

  There are various types of plasma torches depending on the type of high heat processing such as welding, overlaying and cutting. The plasma processing apparatus described in Patent Document 1 has a filler metal (welding wire, powder), keyhole gas, cutting at the center of the insert tip in order to increase the plasma energy of the high heat processing and increase the processing efficiency. Open a central hole (through hole) through which processing means such as gas is passed, and provide a plurality of electrode arrangement spaces at equiangular pitches on the circumference centered on the central axis of the central hole. With each nozzle in communication, a plasma arc ejected from each nozzle exits from the central hole and strikes the workpiece.

Japanese Unexamined Patent Publication No. 2011-3152

  However, since two or more plasma arcs are injected by one insert tip, the thermal load of the insert tip increases. Therefore, although the cooling capacity of the insert tip is improved, the nozzle portion of the insert tip is easily deformed or melted by high heat. When the nozzle portion is deformed or melted, the insert tip is replaced, which increases the maintenance cost.

  An object of the present invention is to reduce the maintenance cost of an insert chip, that is, to suppress an increase in plasma processing cost.

(1) A central hole (5) which is a hole through which the processing means to be supplied to the material to be processed passes, a plurality of nozzle member insertion holes (18a, 18b) distributed around the central hole (5), and each nozzle A chip base (1) having a plurality of refrigerant flow paths (1f, 1g) through which a refrigerant for cooling the outer periphery of each nozzle member inserted in the member insertion holes (18a, 18b) flows;
An electrode arrangement space (1a, 1b), a nozzle (4a, 4b) communicating with the electrode arrangement space (1a, 1b), a cap portion (21a, 21b) in which the nozzle (4a, 4b) is opened, and the cap portion There are continuous stems (22a, 22b), and the electrode arrangement space (2a, 2b) is inside, each of the stems is inserted into each nozzle member insertion hole (18a, 18b), and the cap is the nozzle A plurality of nozzle members (20a, 20b) which are separate from the chip base (1) and block the lower opening of the member insertion hole ;
A male screw (24a, 24b) at a rear end portion of the trunk portion (22a, 22b) opposite to a tip portion having the cap portion (21a, 21b), and the nozzle member insertion hole (18a, 18b) The nut (25a, 24a, 24b) of the nozzle member inserted through the nut (25a, 24b) is fixed to the tip base (1) integrally by tightening the tip base by clamping the tip base in cooperation with the nozzle member. 25b), a coupling means comprising (24a, 25a, 24b, 25b); and
Engaging means (26a, 26b, 1c) for preventing the nozzle member (20a, 20b) from rotating about the central axis with respect to the chip base (1);
Insert chip comprising (FIG. 2) .

  In addition, in order to facilitate understanding, in parentheses, the correspondence of the examples shown in the drawings and described later, or the symbols or corresponding matters of corresponding elements are added for reference. The same applies to the following.

Since there are a plurality of coolant channels (1f, 1g) through which the coolant that cools the outer periphery of each nozzle member flows, the cooling capacity of each nozzle member (20a, 20b) as well as the chip base (1) is high. When the nozzle portion of the nozzle member is deformed or melted due to high heat, the nuts (25a, 25b) are loosened and removed from the male screws (24a, 24b), and the nozzle members (20a, 20b) are inserted into the nozzle member insertion holes ( 18a and 18b), and a new nozzle member is inserted into the nozzle member insertion hole from the male screw portion, and a nut is screwed onto the male screw portion and tightened. As a result, the damaged nozzle member can be replaced. The chip base can be used as it is, and the maintenance cost can be reduced.

When this nozzle member is replaced, the nut is loosened and tightened with respect to the nozzle member, but the engaging means (26a, 26b, 1c) prevent the nozzle member from rotating with respect to the chip base, so that the loosening and tightening are not performed. The nozzle member can be easily exchanged. Further, for example, when a plurality of nozzle members having different nozzle forms are provided as shown in FIG. 2, it is possible to regulate which nozzle member is disposed at which position of the chip base.

It is a block diagram of the plasma processing apparatus of 1st Example of this invention, and a plasma torch shows a longitudinal cross-sectional view. 1 is an enlarged view of the insert tip of the plasma torch shown in FIG. 1, which is a first embodiment of the insert tip of the present invention, wherein (a) is a longitudinal sectional view, and (b) is the upper end (lower surface) of the insert tip. (C) is a cross-sectional view taken along line IIc-IIc in (a). 2 is a longitudinal sectional view of only the chip base of the insert chip shown in FIG. 2, (b) is a bottom view, (c) is a longitudinal sectional view of the nozzle member, and (d) is a bottom view of the nozzle member. The 2nd Example of the insert chip | tip of this invention is shown, (a) is a bottom view, (b) is a bottom view of the chip | tip base | substrate which removed the nozzle members 20a and 20b. FIG. 4 is a longitudinal sectional view of the nozzle members 20a and 20b shown in FIG. 4, and FIG. It is a block diagram of the plasma processing apparatus of 2nd Example of this invention, and a plasma torch shows a longitudinal cross-sectional view. It is a block diagram of the plasma processing apparatus of 3rd Example of this invention, and a plasma torch shows a longitudinal cross-sectional view. It is a block diagram of the plasma processing apparatus of 4th Example of this invention, and a plasma torch shows a longitudinal cross-sectional view. It is a block diagram of the plasma processing apparatus of 5th Example of this invention, and a plasma torch shows a longitudinal cross-sectional view. It is a block diagram of the plasma processing apparatus of 6th Example of this invention, and a plasma torch shows a longitudinal cross-sectional view. It is a block diagram of the plasma processing apparatus of 7th Example of this invention, and a plasma torch shows a longitudinal cross-sectional view.

( 2 ) The engaging means includes notch surfaces (26a, 26b) in which side surfaces of the cap portions (21a, 21b) of the nozzle member (20a, 20b) are partially deleted, and the tip base (1). The tip insert (1c) between the adjacent nozzle member insertion holes (18a, 18b) and having a locking surface with which the notch surfaces (26a, 26b) come into contact; the insert tip according to ( 1 ) above 3 and 4).

( 3 ) Each nozzle member (20a, 20b) has an additional cut-out surface (27a, 27b) partially cut away from the side surface of the cap portion (21a, 21b) separate from the cut-out surface (26a, 26b). The chip base has an additional opposing protrusion (1m, 1n) against which the additional cut surface (27a, 27b) abuts; the insert chip according to ( 2 ) above (FIGS. 4 and 5) ).

( 4 ) The distribution of the notched surfaces (26a, 26b) and the additional notched surfaces (27a, 27b) in the circumferential direction of the cap portion is determined between the nozzle members in order to prevent an error in the mounting position of the nozzle members on the chip base. The insert chip according to ( 3 ) above (FIGS. 4 and 5).

( 5 ) The lower end of the coolant channel (1f, 1g) is closed by the cap portion coming into contact with the tip flat surface (1d, 1e) of the chip base, and the chip base has a coolant receiving hole (1h), Refrigerant outlet hole (1i), refrigerant recirculation path (1j) connecting the plurality of refrigerant flow paths (1f, 1g), refrigerant through hole (1k) connecting one of the refrigerant flow paths (1f) to the refrigerant receiving hole And a refrigerant through hole (1l) that connects the other one (1g) of the refrigerant flow path to the refrigerant outlet hole; the insert chip according to ( 1 ) above (FIG. 2).

  According to this, refrigerant (cooling water) flows around the outer peripheral surface of the trunk portion (22a, 22b) of each nozzle member (20a, 20b) in the refrigerant flow path (1f, 1g) of the chip base (1). The cooling capacity of each nozzle member (20a, 20b) is high. In addition, in the chip base (1), a refrigerant receiving hole (1h), a refrigerant through hole (1k) connecting one of the refrigerant flow paths (1f), a refrigerant through hole (1j) connecting adjacent refrigerant flow paths, etc. Since the refrigerant flows through the refrigerant passage hole (1l) connecting the refrigerant flow path (1g) to the refrigerant outlet hole (1i), the cooling capacity of the chip substrate (1) is also high. Therefore, welding can be performed at higher speed by increasing the welding power. If the nozzle portion at the lower end of the nozzle member is deformed or damaged due to high heat, the nozzle member can be replaced with a new one, and the chip base can be used as it is, thereby reducing the maintenance cost.

( 6 ) The insert tip (1) described in (1) above, the wire guide (13, 6) for guiding the wire (15) to the central hole (5) of the insert tip (1), and the insert tip A plasma torch (FIG. 1) comprising a plurality of electrodes (2a, 2b) having tip portions inserted into the electrode arrangement spaces (1a, 1b) of (1).

( 7 ) A power source for passing a plasma arc current between the plasma torch described in ( 6 ) above and the plurality of electrodes (2a, 2b) and the workpiece (16) with a negative electrode side and a positive workpiece arc side. (17, 18) and a plasma welding apparatus (FIG. 1).

(8) Further, between the wire (15) and the processing target member (16) comprises a hot wire power wire side processing target material side is negative shed a positive current (21), according to the above (7) The plasma welding apparatus of a hot wire form (FIG. 6).

( 9 ) A power source for passing a plasma arc current between the plasma torch described in ( 6 ) above and the plurality of electrodes (2a, 2b) and the workpiece (16) with a positive electrode side and a negative workpiece arc side. A plasma MIG welding apparatus comprising a MIG welding power source (22) between the wires (17, 18) and the wire (15) and the material to be processed (16) for flowing a positive current on the wire side and a negative current on the material to be processed side (FIG. 7).

( 10 ) A power source for supplying a plasma arc current between the plasma torch according to ( 6 ) above and the plurality of electrodes (2a, 2b) and the workpiece (16) with a negative electrode side and a positive workpiece arc side. (17, 18), and a hot wire power source (28, 29) between the wire (15) and each electrode (2a, 2b), and a hot wire power source (28, 29) for passing a positive current on the wire side and a negative current on the electrode side. Assembling device (FIG. 8).

( 11 ) The insert tip (1) described in (1) above, the powder guide (6) for guiding the powder (23) to the central hole (5) of the insert tip (1), and the insert tip A plasma powder build-up torch comprising a plurality of electrodes (2a, 2b) having tip portions inserted into the electrode arrangement spaces (1a, 1b) of (1) (FIG. 9).

( 12 ) Between the plasma powder build-up torch according to ( 11 ) above and the plurality of electrodes (2a, 2b) and the workpiece (16), a plasma arc in which the electrode side is negative and the workpiece side is positive A plasma powder overlaying apparatus (FIG. 9) comprising a power source (17, 18) for supplying an electric current and means (24, 25) for feeding powder to the powder guide (6).

( 13 ) The insert tip (1) according to (1), a gas guide (6) for guiding a keyhole gas (26) to the central hole (5) of the insert tip (1), and the insert tip A plasma keyhole welding torch comprising a plurality of electrodes (2a, 2b) having tip portions inserted into the electrode arrangement spaces (1a, 1b) of (1) (FIG. 10).

( 14 ) Between the plasma keyhole welding torch according to the above ( 13 ) and the plurality of electrodes (2a, 2b) and the workpiece (16), the plasma arc current is negative on the electrode side and positive on the workpiece side And a plasma keyhole welding device (FIG. 10).

( 15 ) The insert tip (1) according to the above (1), a gas guide (6) for guiding a cutting gas (27) to the central hole (5) of the insert tip (1), and the insert tip ( A plasma cutting torch (FIG. 11) comprising a plurality of electrodes (2a, 2b) having tips inserted into the electrode arrangement spaces (1a, 1b) of 1).

( 16 ) Between the plasma cutting torch described in ( 15 ) above and the plurality of electrodes (2a, 2b) and the workpiece material (16), a negative plasma arc current and a positive plasma arc current flow on the workpiece side And a plasma cutting device (FIG. 11).

In any of the above aspects (2) to ( 16 ), the effect (1), that is, the “effect of the invention” can be obtained.

  Other objects and features of the present invention will become apparent from the following description of embodiments with reference to the drawings.

-1st Example-
FIG. 1 shows a plasma welding apparatus according to the first embodiment, FIG. 2 shows a plasma welding torch according to the first embodiment and an insert tip of the plasma torch shown in FIG. 1, and FIG. Only the chip base constituting the chip is shown. The plasma welding torch according to the first embodiment is configured to perform plasma welding. The insert chip 1 is fixed to the insulating base 9 by screwing the insert cap 7 to the insulating base 9. The shield cap 8 is fixed to the insulating table 9 by screwing. The first electrode table 11 and the second electrode table 12 separated in the x direction by being divided into two are inside an outer case 30 made of an insulator. The space between the first electrode base 11 and the second electrode base 12 is passed through the hollow cylindrical stem of the insulating body 14, and the male screw (not shown) at the tip of the stem is the center of the insulating base 9. The electrode bases 11 and 12 are tightened so as to be compressed in the vertical direction, and the insulating base 9, the electrode bases 11 and 12 and the insulating main body 14 are integrally coupled. doing.

  There is a central hole 5 in the axial center of the insert chip 1, and there are guide holes (wire guide holes in this embodiment) coaxial with the central hole 5 in the axial centers of the insulating base 9 and the insulating body 14. A wire guide 6 is inserted into the central hole 5 of the insert chip 1, and a wire guide 13 is also inserted into a guide hole in the axial center of the insulating body 14. The welding wire 15 inserted into the head of the insulating body 14 is fed into the insert tip 1 through the wire guides 13 and 6.

  The insert chip 1 has two nozzle members 20a and 20b (FIG. 2) distributed at an equal angular pitch of 180 degrees on the circumference centered on the central axis of the central hole 5 and positioned parallel to the central hole 5. The tip portions of the first electrode 2a and the second electrode 2b that pass through the insulating base 9 and are fixed to the electrode bases 11 and 12 with screws 10a and 10b are inserted into the nozzle members 20a and 20b, respectively. The centering stone 3 is positioned at the axial center position of the electrode arrangement space (FIG. 1). The nozzles 4a and 4b of the nozzle members 20a and 20b are open on the tip surface of the insert tip 1 facing the material 16 to be welded (FIG. 2).

  Each nozzle member 20a, 20b has a cap portion 21a, 21b in which the nozzles 4a, 4b are opened at the center, trunk portions 22a, 22b continuing to the cap portion, and male screw portions 24a, 24b continuing to the trunk portion. There are O-rings 23a and 23b, which are sealing materials, between the trunk and the male screw, and there are electrode arrangement spaces 1a and 1b communicating with the nozzles 4a and 4b (FIGS. 2 and 3). In this embodiment, as shown in FIG. 2A, the nut members 25a and 25b are screwed to the male screw portions 24a and 24b of the nozzle members 20a and 20b and fastened to the chip base 1 to thereby fix the nozzle members 20a and 20b. Are bonded to the chip substrate 1.

  In the chip base 1, the nozzle member insertion holes 18a and 18b through which the male threaded portion to the trunk portion of the nozzle members are inserted, and the cap portions of the nozzle members inserted through the nozzle member insertion holes contact the tip planes 1d and 1e. Refrigerant flow paths 1f, 1g, refrigerant receiving holes 1h, refrigerant outlet holes 1i, refrigerant flow paths 1f, 1g forming part of the nozzle member insertion holes that are closed by contact and forming a refrigerant flow space with the trunk. A refrigerant return path 1j for connecting the refrigerant, a refrigerant through hole 1k for connecting one of the refrigerant flow paths to the refrigerant receiving hole 1h, and a refrigerant through hole for connecting the other one 1g of the refrigerant flow path to the refrigerant outlet hole. 1l (Fig. 2).

  Referring to FIG. 2A, the nozzle members 20a and 20b are distributed on the same diameter line (y) orthogonal to the central axis (z) of the central hole 5, and are equidistant from the central axis and are centered. It extends parallel to (z). In this embodiment, the nozzles 4a and 4b of the nozzle members 20a and 20b, which are continuous with the electrode arrangement spaces 1a and 1b, are connected to the central axis of the central hole 5 (welding in FIG. 1) with respect to the central axis of the electrode arrangement spaces 2a and 2b. Inclined in the direction toward the wire 15), the central axes of the nozzles 4 a and 4 b intersect at the same point (same z position) on the central axis of the central hole 5. In the present embodiment, these nozzles 4a and 4b are also distributed on the same diameter line (y) orthogonal to the central axis (z) of the central hole 5, and are equidistant from the central axis.

  A tip projection 1c extending in the y direction is provided at the center of the tip of the chip base 1, and a center hole 5 penetrates the tip center position of the tip projection 1c in the z direction. On both sides of the tip projection 1c, there are tip planes 1d and 1e that receive the back surfaces of the caps 21a and 21b of the nozzle members 20a and 20b. The front end planes 1d and 1e are interrupted in front of the outer periphery of the chip base 1 in the x direction (FIG. 2B), whereby the opposing protrusions 1m and 1n protrude downward from the chip base 1 (FIG. a)).

  The notch surface 26a ((d) in FIG. 3) of the cap portion 21a of the nozzle member 20a inserted into the nozzle member insertion hole 18a, in which a part of the arc is linearly deleted, is the right side surface of the tip protrusion 1c. It closely engages with the stop surface, and the circumferential surface of the cap portion 21a closely engages with the blocking surface that is the left side surface of the opposing protrusion 1m. Thereby, the rotation of the preceding nozzle member 20a with respect to the chip base 1 around the central axis is prevented. These engagements are achieved by preventing the nozzle member 20a from rotating when the preceding nozzle member 20a is inserted into the chip base 1 and screwed and fixed by the nut 25a, and a nut for removing the nozzle member 20a from the chip base 1. It functions as a stop for the nozzle member 20a when the 25a is loosened. These engagements also have a function of fixing (setting) the inclination direction of the nozzle axis of the nozzle member 20a in which the nozzle axis is inclined with respect to the chip base center axis (z) in the x direction.

  When the nozzle member 20a is inserted into the chip base 1 and fixed by screwing with the nut 25a, a swinging force that attempts to rotate one end of the notch surface 26a with respect to the chip base 1 to a fulcrum (center) is the nozzle member. Although acting on 20a, the opposing protrusion 1m prevents this rotation. In this way, the nozzle member 20a is prevented from rotating by the notch surface 26a and the tip protrusion 1c as the engaging means, and the axial protrusion of the nozzle member 20a is prevented by the opposing protrusion 1m as the shaft shake preventing means. The direction of the direction of the plasma arc coming out of the camera will not shift.

  In this embodiment, the nozzle member 20b has the same specifications as the nozzle member 20a, and is mounted on the chip base in the same coupling manner as the nozzle member 20a (FIG. 2).

  In the chip base 1 shown in FIG. 2C, the refrigerant receiving hole 1h communicates with the refrigerant supply pipe (not shown) of the torch body, and the refrigerant outlet hole 1i communicates with the refrigerant discharge pipe (not shown) of the torch body. . The cooling water injected into the refrigerant supply pipe passes through the refrigerant passages of the electrode base 11 and the insulating base 9, enters the refrigerant receiving hole 1h of the chip base 1, reaches the hole bottom, and then passes through the refrigerant through hole 1k. , Enters the refrigerant flow path 1f, passes through the refrigerant return hole 1j, enters the refrigerant flow path 1g, then passes through the refrigerant through hole 11 and enters the refrigerant outlet hole 1i, and enters the refrigerant discharge pipe (not shown) of the torch body. Flows and flows out of the torch.

  While the coolant flows through the flow path from the refrigerant receiving hole 1h to the refrigerant outlet hole 1i and the receiving hole ih and outlet hole 1i, the chip base 1 is cooled and the trunk portion 22a of the nozzle members 20a and 20b. , 22b is effectively cooled by the cooling water flowing in the refrigerant flow paths 1f, 1g, so that the insert chip has a high cooling capacity. The nozzle members 20a and 20b are most heated during welding, but the outer peripheral surfaces of the nozzle members 20a and 20b are cooled by direct contact with cooling water, so that the service life of the nozzle members 20a and 20b is long.

  Referring to FIG. 1 again, the pilot gas passes through the pilot gas pipe (not shown) and the electrode insertion space (not shown) of the torch body and enters the electrode arrangement spaces 1a and 1b of the nozzle members 20a and 20b. Plasma is generated at the tip of 2b and is ejected from the tip of the torch through nozzles 4a and 4b. The shield gas passes through a shield gas pipe (not shown) of the torch main body, enters a cylindrical space between the insert cap 7 and the shield cap 8, and is ejected from the tip of the torch toward the welding target material 16. .

  An arc is generated between the electrodes 2a and 2b (electrode bases 11 and 12) and the material to be welded 16 by plasma power sources 17 and 18 that cause a plasma arc current to flow negative on the electrode side and positive on the material to be welded side. Then, a plasma arc current flows between each electrode 2a, 2b and the welding target material 16. Since the wire 15 is fed to the plasma arc 19 and the electrodes 2a and 2b and the nozzles 4 (4a and 4b) are positioned symmetrically with respect to the wire 15, the plasma is stabilized with respect to the wire 15. That is, the magnetic fluxes Ma and Mb induced by the respective arc currents flowing through the nozzles 4a and 4b between the electrodes 2a and 2b inserted in the electrode arrangement spaces 1a and 1b and the welding target material 16 respectively. The upward (or downward: z) force expressed by Fleming's left-hand rule acts in the same direction and is a circle centering on the central axis of the central hole 5 of the nozzles 4a and 4b. Due to the distribution of equiangular pitches on the circumference, each force is also distributed at equiangular pitches on the circumference centered on the central axis of the central hole 5, so that magnetic balance is achieved and plasma stability is high. That is, no arc wobbling due to magnetic blowing occurs. In the vicinity of the material to be welded 16, each arc current is added in the same direction to induce the composite magnetic flux Mc, so that the magnetic pinch force for constricting the arc is strong, and the heat convergence effect (energy density) on the material to be welded 16 is high, Moreover, the operating position does not fluctuate. In addition, the wire 15 receives heat from the arc until it enters from the upper end of the plasma arc 19 and reaches the molten pool 20, which acts as an effective preheating effect, increases the welding efficiency of the wire, and high-speed welding. And high-efficiency welding. In the case of the conventional wire feeding from the side, since the wire enters almost at right angles to the plasma arc, it must be melted into the molten pool at a short distance from the plasma arc. There is no preheating effect. For this reason, the welding efficiency is low and the welding speed is also slow.

  Further, according to the first embodiment, since the wire 15 is inserted from the center, there is no insertion direction of the wire, and control for rotating the torch is not necessary even in curve welding. Conventionally, since the wire is inserted from the direction of travel of the torch, a device for controlling the rotation of the torch or the wire relative to the curve is necessary during curve welding.

  The plasma torch shown in FIGS. 6 to 11 also uses the insert tip of the first embodiment shown in FIGS. 1 to 3 as described above, but the insert of the second embodiment that can be used instead. The chip is shown in FIGS.

  4A is a bottom view of the tip of the insert chip of the second embodiment as viewed from below, FIG. 4B is a bottom view of only the chip base as viewed from below, and FIG. 5A. FIG. 5B is a bottom view of the cap members 21a and 21b of the nozzle members 20a and 20b as viewed from below. In the insert tip of the second embodiment, the cap portions 21a and 21b of the nozzle members 20a and 20b have additional cutout surfaces 27a and 27b (FIG. 5B) in addition to the cutout surfaces 26a and 26b. The additional cutout surface 27a of the preceding nozzle member 20a is divided into a right-half region when the cap portion 21a is divided into left and right sections in a cross section parallel to the cutout surface 26a even at the center axis position of the nozzle member 20a. There is (notch surface 26a is in the left half region). However, another additional cut-out surface 27b is in the left half region. That is, the distribution pattern in the cap portion 21a of the cutout surface 26a and the additional cutout surface 27a of the nozzle member 20a is different from the distribution pattern in the cap portion 21b of the cutout surface 26b and the additional cutout surface 27b of the nozzle member 20b. ing. For example, in FIG. 5B, when the nozzle member 20b is rotated 180 degrees around its central axis and the nozzle 4b is superimposed on the nozzle 4a of the nozzle member 20a, the notch surface 26b overlaps the notch surface 26a. The notch surface 27a does not overlap with the additional notch surface 27a but is positioned symmetrically with the additional notch surface 27a with respect to the x axis, and the lower surface of the circumferential portion of the additional notch surface 27a hits the corner 1mp of the opposing protrusion 1m. Therefore, the nozzle member 20b cannot be mounted at the position where the nozzle member 20a is mounted, and a mounting position error is prevented.

  Referring to FIG. 4B, the left end face of the opposing protrusion 1m has a corner 1mp that abuts against the additional cutout surface 27a of the cap portion 21a and an arcuate surface 1ma that receives the circumferential portion. In addition, the left end surface of the opposing protrusion 1n has a corner 1np that abuts the additional cutout surface 27b of the cap portion 21b and an arcuate surface 1na that accepts the circumferential portion. It is complicated. These engravings prevent the nozzle member 20a from being erroneously mounted at the planned mounting position of the nozzle member 20b, and prevent the nozzle member 20b from being erroneously mounted at the planned mounting position of the nozzle member 20a. Furthermore, in order to prevent the axial displacement and the axial blurring of the nozzle members 20a and 20b, the right and left end surfaces of the central projection 1c are flat and circumferential portions that are in contact with the notched surfaces 26a and 26b of the cap portions 21a and 21b. There are generally U-shaped engravings 1ca and 1cb with an arcuate surface for accepting.

  When the nozzle members 20a and 20b are inserted into the chip base 1 and fixed by screwing with the nuts 25a and 25b, one end of the notch surfaces 26a and 26b is rotated with respect to the chip base 1 to a fulcrum (center). The swinging force acting on the nozzle members 20a and 20b acts on the nozzle members 20a and 20b, but the corners 1mp and 1np of the opposing protrusions 1m and 1n prevent the rotation of the additional cutout surfaces 27a and 27b. That is, the axial runout of the nozzle members 20a and 20b is prevented. Other structures and functions of the insert tip of the second embodiment are the same as those of the first embodiment, and the insert tip of the second embodiment is the same as that of the plasma torch shown in FIG. 1 and FIGS. It can be equipped by replacing the insert tip of one embodiment.

-Second Example-
FIG. 6 shows a plasma welding apparatus in the form of a hot wire, which is the plasma processing apparatus of the second embodiment. The plasma torch on FIG. 6 is a hot wire type plasma welding torch having the same structure as that of the first embodiment (FIG. 1), and the insert tip 1 is the first embodiment shown in FIGS. It is the same composition as the one. In the present embodiment, as shown in FIG. 6, plasma power sources 17 and 18 are provided between the electrodes 2 a and 2 b and the welding target material 16 to flow a plasma arc current that is negative on the electrode side and positive on the welding target material side. This point is the same as that of the first embodiment (FIG. 1), but further, a hot wire power source 21 is provided between the wire 15 and the welding target material 16 so that the wire side is negative and the welding target material side supplies a positive current. Prepare. The electric current from the hot wire power source 21 passes through the guide 13 in the torch, energizes the wire from the vicinity of the tip of the guide 13, heats the wire with Joule heat in the insulating guide 6, and plasma 19 generates the current from the electrodes 2 a and 2 b. It merges with the plasma arc and flows into the welding object material 16. At this time, since the Joule heat of the hot wire current is maximized (concentrated) in the plasma region, the welding heat input is large, the welding amount is high, the efficiency is high, and high-speed welding is possible. In addition, since the hot wire current and the plasma arc current from the electrodes 2a and 2b are symmetrical and coaxial, the magnetic balance is achieved and no arc wobbling due to magnetic blowing occurs. Other functions and operational effects are the same as in the first embodiment.

-Third Example-
FIG. 7 shows a plasma MIG welding apparatus which is the plasma processing apparatus of the third embodiment. The plasma torch is a plasma MIG welding torch having the same structure as that of the first embodiment, and the insert tip 1 has the same configuration as that of the first embodiment shown in FIGS. In this embodiment, as shown in FIG. 7, a plasma arc current is passed between the electrodes 2 a and 2 b and the welding target material 16, contrary to the case of the first embodiment, the electrode side is positive and the welding target material side is negative. Plasma power sources 17 and 18 are provided. Furthermore, a MIG welding power source (constant voltage welding power source) 22 is provided between the wire 15 and the welding target material 16 to flow a welding current positive on the wire side and negative on the welding target material side. The shielding gas is Ar or Ar + CO ₂ or CO ₂ or Ar + H ₂ . This plasma MIG welding apparatus has the characteristics of high efficiency and deep penetration that are the characteristics of MIG, and is capable of welding without sputtering. Furthermore, welding is possible in an Ar atmosphere, and the generation of oxides in the weld metal is extremely small, making it suitable for high weight and high tension materials. In addition, it is possible to prevent a welding failure at the start portion in aluminum welding or repair a welding failure. Other functions and operational effects are the same as in the first embodiment.

-Fourth embodiment-
FIG. 8 shows a plasma wire overlaying apparatus that is the plasma processing apparatus of the fourth embodiment. The plasma torch is a plasma wire build-up torch having the same structure as that of the first embodiment, and the insert tip 1 has the same configuration as that of the first embodiment shown in FIGS. In this embodiment, as shown in FIG. 8, between the electrodes 2a and 2b and the welding target material 16, plasma power sources 17 and 18 for passing a plasma arc current that is negative on the electrode side and positive on the welding target material side, the wire 15, Hot wire power supplies 28 and 29 are provided between the electrodes 2a and 2b to allow a current to flow positive on the wire side and negative on the electrode side. Although the wire 15 is heated by the Joule heat of the current from the hot wire power supplies 28 and 29, since the wire current does not flow through the welding target material 16, the amount of the welding target material 16 is small and low dilution overlay welding is performed. Can do. Since the wire 15 is fed perpendicularly to the material 16 to be welded, the build-up amount is stabilized without directivity even in the build-up welding while oscillating. Further, overlay welding on a vertical surface or an inclined surface is also possible. High welding using a thick wire can be performed with a stable build-up amount. Since the hot wire current flows from the electrodes 2a and 2b through the nozzles 4a and 4b and flows into the wire 15, the hot wire current is symmetrical with respect to the torch axis and is magnetically balanced in the same way as the plasma current. Stable build-up welding without magnetic blowing phenomenon can be achieved. Other functions and operational effects are the same as in the first embodiment.

-Fifth embodiment-
FIG. 9 shows a plasma powder overlaying apparatus that is the plasma processing apparatus of the fifth embodiment. The plasma torch is a plasma powder build-up torch equipped with a powder guide 6 instead of a wire guide. The other structure is the same as that of the first embodiment, and the insert tip 1 has the same configuration as that of the first embodiment shown in FIGS. A powder feeder 25 feeds the powder in the powder tank 24 to the powder guide 6 at a constant speed. The plasma power sources 17 and 18 cause a plasma arc current to flow between the electrodes 2a and 2b and the welding target material 16 with a negative electrode side and a positive welding target material side. Since the powder flow is fed vertically to the material to be welded, the yield of the powder is better than the conventional example in which the powder is fed to the plasma arc from the side, and the powder is less likely to adhere to the nozzle. In addition, since the powder passage in the torch can be thickened and straight, cutting powder with poor feedability can be used. Since the symmetrical plasma arcs join and collide with each other directly above the welding target material 16, the downward plasma flow to the welding target material 16 becomes weak, so that low-dilution powder overlaying is possible. Other functions and operational effects are the same as in the first embodiment.

-Sixth Example-
FIG. 10 shows a plasma keyhole welding apparatus which is the plasma processing apparatus of the sixth embodiment. The plasma torch is a plasma keyhole welding torch equipped with a keyhole gas guide 6 instead of a wire guide. The other structure is the same as that of the first embodiment, and the insert tip 1 has the same configuration as that of the first embodiment shown in FIGS. As in the case of the first embodiment, the plasma power sources 17 and 18 cause a plasma arc current to flow between the electrodes 2a and 2b and the welding target material 16 with a negative electrode side and a positive welding target material side. The keyhole gas is Ar or He or Ar + H ₂ or Ar + O ₂ or Ar + He. By injecting a small-diameter high-speed gas flow for the keyhole by the keyhole gas guide 6, it is possible to perform keyhole welding of a thick plate or low heat input deep penetration welding. Since the keyhole gas is a different route from the pilot gas (plasma gas) passing through the electrodes 2a and 2b, the electrode is not oxidized and consumed, so that an oxidizing gas can be used as the keyhole gas. Further, since the gas injection hole for the keyhole can be made small regardless of the magnitude of the plasma current, the keyhole hole can be made small and thick plate welding can be performed. Other functions and operational effects are the same as in the first embodiment.

-Seventh Example-
FIG. 11 shows a plasma cutting apparatus which is a plasma processing apparatus according to the seventh embodiment. The plasma torch is a plasma cutting torch equipped with a cutting gas guide 6 instead of the wire guide. The other structure is the same as that of the first embodiment, and the insert tip 1 has the same configuration as that of the first embodiment shown in FIGS. As in the case of the first embodiment, the plasma power sources 17 and 18 cause a plasma arc current to flow between the electrodes 2a and 2b and the welding target material 16 with a negative electrode side and a positive welding target material side. The cutting gas is Ar or O ₂ or N ₂ or Ar + H ₂ . A narrow cut can be made by injecting a cutting small-diameter high-speed gas flow with the cutting gas guide 6. If the electrodes 2a and 2b are tungsten electrodes, powerful plasma cutting using O ₂ as a cutting gas can be performed without using an expensive hafnium electrode. Other functions and operational effects are the same as in the first embodiment.

1: Insert tip 1a, 1b: Electrode arrangement space 1c: Center protrusion 1d, 1e: Tip plane 1m, 1n: Opposing protrusion 1mp, 1np: Corner 1ma, 1na: Arc-shaped surface 1ca, 1cb: Engraving 2 (2a, 2b) : Electrode 2a: 1st electrode 2b: 2nd electrode 3: Centering stone 4 (4a, 4b): Nozzle 5: Center hole 6: Guide 7: Insert cap 8: Shield cap 9: Insulation base 10 (10a, 10b): Electrode fixing screw 11: First electrode base 12: Second electrode base 13: Guide 14: Insulation body 15: Wire 16: Material to be welded 17, 18: Power source 19: Plasma 20: Pool 21: Hot wire power source 22: MIG welding Power supply 24: Powder tank 25: Powder feeder 26: Keyhole gas 27: Cutting gas 28, 29: Hot wire power supply 30: Outer case

Claims (16)

Cools the outer periphery of each nozzle member inserted into each nozzle member insertion hole and a central hole that is a hole through which the processing means to be supplied to the workpiece is passed, a plurality of nozzle member insertion holes distributed around the central hole A chip substrate having a plurality of refrigerant flow paths through which refrigerant to flow;
There are an electrode arrangement space, a nozzle communicating with the electrode arrangement space, a cap portion where the nozzle is open, and a trunk portion continuous to the cap portion, and the electrode arrangement space is inside, and each of the stem portions is inserted into each nozzle member A plurality of nozzle members separate from the chip base, wherein the cap portion is inserted into a hole and closes a lower opening of the nozzle member insertion hole ;
In cooperation with the nozzle member by screwing into the male screw at the rear end portion of the trunk portion opposite to the tip portion where the cap portion is located, and the male screw of the nozzle member inserted through the nozzle member insertion hole A coupling means comprising: a nut that clamps and clamps the tip base to integrally fix the nozzle member to the tip base ;
Engagement means for preventing rotation of the nozzle member around the central axis with respect to the chip base;
Insert chip comprising. The engaging means includes a notch surface in which a side surface of the cap portion of the nozzle member is partially deleted, and a locking surface between the adjacent nozzle member insertion holes of the chip base and in contact with the notch surface. projecting end, consisting of; insert chip of claim 1. Each nozzle member has an additional notch surface that is different from the notch surface and is partially cut away from the side surface of the cap portion; the tip base has an additional opposing protrusion with which the additional notch surface abuts. The insert tip according to claim 2 . The cap portion of the circumferential distribution of cut-away surface of the Add the cut surface, in order to prevent the mounting position error of the nozzle member to the chip substrate, is different patterns between the nozzle member; of claim 3 Insert tip. The lower end of the refrigerant flow path is closed by the cap portion coming into contact with the tip flat surface of the chip base, and the chip base has a refrigerant receiving hole, a refrigerant outlet hole, a refrigerant return path connecting the plurality of refrigerant flow paths, refrigerant through hole connecting one of said coolant flow path to said refrigerant receiving hole, and a refrigerant through hole connecting the other one of the refrigerant flow path in the refrigerant Deana, there; insert according to claim 1 Chip.   A plasma torch comprising: the insert tip according to claim 1; a wire guide that guides a wire into the central hole of the insert tip; and a plurality of electrodes having tip portions inserted into respective electrode arrangement spaces of the insert tip. A plasma welding apparatus comprising: the plasma torch according to claim 6; and a power source for passing a plasma arc current that is negative on the electrode side and positive on the workpiece side between the plurality of electrodes and the workpiece. Furthermore, the hot-wire type plasma welding apparatus of Claim 7 provided with the hot wire power supply which sends a positive electric current between the said wire and a material to be processed in which the wire side is negative and the material to be processed is positive. The plasma torch according to claim 6 , a power source for passing a plasma arc current that is positive on the electrode side and negative on the workpiece side between the plurality of electrodes and the workpiece material, and between the wire and the workpiece material A plasma MIG welding apparatus comprising a MIG welding power source for passing a positive current on the wire side and a negative current on the workpiece side. Between the plasma torch according to claim 6 , between the plurality of electrodes and the workpiece material, a power source for passing a plasma arc current that is negative on the electrode side and positive on the workpiece side, and between the wire and each electrode, A plasma wire build-up device comprising a hot wire power source for flowing a positive current on the wire side and a negative current on the electrode side.   A plasma comprising: the insert tip according to claim 1; a powder guide for guiding powder to the central hole of the insert tip; and a plurality of electrodes having tip portions inserted into respective electrode arrangement spaces of the insert tip. Powder overlay torch. 12. A plasma powder build-up torch according to claim 11 , a power source for passing a plasma arc current that is negative on the electrode side and positive on the workpiece side, between the plurality of electrodes and the workpiece material; And a means for feeding the body.   A plasma comprising: the insert tip according to claim 1; a gas guide for guiding a keyhole gas into the central hole of the insert tip; and a plurality of electrodes having tips inserted into the electrode arrangement spaces of the insert tip. Keyhole welding torch. A plasma keyhole welding apparatus comprising: the plasma keyhole welding torch according to claim 13; and a power source for passing a plasma arc current that is negative on the electrode side and positive on the workpiece side between the plurality of electrodes and the workpiece material. .   A plasma cutting comprising: the insert tip according to claim 1; a gas guide that guides a cutting gas into the central hole of the insert tip; and a plurality of electrodes having tip portions inserted into respective electrode arrangement spaces of the insert tip. torch. 16. A plasma cutting device comprising: the plasma cutting torch according to claim 15; and a power source for passing a plasma arc current that is negative on the electrode side and positive on the workpiece side between the plurality of electrodes and the workpiece.

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