JP4707108B2 - Plasma torch - Google Patents

Description

  The present invention relates to a plasma torch, and more particularly to a cooling structure inside the torch.

A plasma torch in which a rod-shaped tungsten electrode is passed through a cylindrical nozzle table and a nozzle member is attached to the lower end of the nozzle table is a plasma gas supplied to the space of the nozzle table through which the tungsten electrode passes. Is ionized by an arc generated at the tip of the tungsten electrode to inject plasma from the nozzle (fountain port) of the nozzle member, and the shield gas supplied to the space between the outer peripheral surface of the nozzle base and the shield cap is removed from the nozzle member. Inject along the side to the front (material to be processed). Since the tungsten rod at the center of the plasma torch reaches a high temperature, cooling water is supplied to the flow path inside the nozzle base to cool the nozzle base and the nozzle member. In order to increase the cooling capability of the nozzle member, the plasma welding torch described in Patent Document 1 is provided with a partition wall that divides the nozzle member into two parts on the left and right sides in the cooling water flow path of the nozzle member, and turns the cooling water back at the tip of the nozzle member The structure is adopted.

  The nozzle member is fixed to the nozzle base by receiving the male screw at the lower end of the nozzle base in the female screw hole at the upper end thereof and rotating it in the circumferential direction. That is, screw connection. However, since the nozzle base has a water supply channel and a drainage channel extending in parallel with the tungsten electrode, the nozzle space is adjusted so that each of the divided spaces separated by the partition wall of the nozzle member is aligned with the water supply channel and the drainage channel. It is necessary to align the nozzle member in the screwing direction with respect to the base. As a result, when the screwing angle is appropriate for screw tightening, the divided space is displaced in the circumferential direction with respect to the water supply and drainage channels, or when the screwdriver angle is adjusted so that the divided space is correctly aligned with the water supply and drainage channels. Are prone to problems such as looseness. In addition, such problems are likely to occur as the use progresses. That is, it is difficult to achieve both proper screw tightening and proper alignment of the nozzle member with respect to the nozzle base.

  The first object of the present invention is to increase the tip cooling capacity of the nozzle member, and the second object is to make the above-described alignment of the nozzle member unnecessary.

(1) In a plasma torch in which a nozzle member (7) is attached to the tip of a nozzle base (5) and the nozzle member is cooled through a cooling medium:
The nozzle member (7) has a nozzle (16) at the position of the central axis of the cone and a cone-shaped umbrella having the tip of the nozzle as a vertex, and an electrode ( continuous to the nozzle and coaxial with the central axis ) there is a hole through the 11) and the plasma gas, and a handle that is continuous with the umbrella has a ring-shaped cooling medium channel part (22) between the inner and the handle outer peripheral surface of the umbrella ,
Said nozzle carriage (5), the outer tube having a distal end for coupling to the edge of the umbrella (51), and, on the inner surface of the elliptical or the outer tube outer surface in contact with the part on the inner surface of the outer cylinder (51) The outer surface other than the contacting portion is cut to have a space between the inner surface of the outer cylinder, and a cooling medium supply path (21) and a cooling medium discharge path (23) are defined in the inner space of the outer cylinder. , a hole through which the electrode (11) and the plasma gas in the center, has a hole (58) through the handle accept before Symbol pattern continuously bore in the tip portion,該柄through hole and the outer cylinder (51) The tip (56t) of the thick wall portion (56) between the nozzle member (7) and the tip (57t) of the thin wall portion (57) protrudes toward the cooling medium flow groove (22) side. A plasma torch comprising a tube (54).

  In addition, in order to make an understanding easy, the code | symbol of the corresponding element or the equivalent element of the Example which is shown in drawing and mentions later in parentheses is attached for reference by reference. The same applies to the following.

  According to this, the tip (56t) of the thick part (56) of the inner cylinder (54) protrudes toward the cooling medium flow groove (22) side than the tip (57t) of the thin part (57). Therefore, since the cooling medium that has entered the cooling medium flow groove (22) of the nozzle member (7) from the cooling medium supply path (21) exceeds the tip (56t) of the thick wall portion, the cooling medium flow groove ( 22) Proceed in the direction toward the bottom and remove the heat at the tip of the nozzle member 7. The tip of the thick member (56t) protrudes more toward the tip of the torch than the tip of the thin part (57t), and directs the coolant flow toward the bottom of the coolant passage (22) of the nozzle member. The cooling effect is high.

  The cooling medium flow groove (22) of the nozzle member (7) has no partition wall, and the tip (56t) of the thick part (56) of the inner cylinder (54) in the nozzle base (5) functions as the partition wall. Therefore, the positioning (positioning) of the nozzle member (7) with respect to the nozzle base (5) in the circumferential direction about the axis center is unnecessary, and assembly of the torch (mounting of the nozzle member to the nozzle base) is easy.

(2) Cathode table (2) mounted on torch base (1);
The cathode base (2) is insulated by an insulating bush (3) and mounted on the torch base (1), and a nozzle base accommodating space, a ring-shaped cooling medium supply groove (41) continuous therewith, and a cooling medium Anode base (4) with discharge groove (42);
Other than the outer cylinder (51) having a tip joined to the edge of the umbrella of the nozzle member (7), and the outer surface of the outer cylinder (51) partially in contact with the inner surface of the outer cylinder (51) or the portion in contact with the inner surface of the outer cylinder The outer surface of the outer cylinder is cut to have a space between the inner surface of the outer cylinder, and the cooling medium supply path (21) and the cooling medium discharge path (23) are partitioned in the inner space of the outer cylinder, Has a hole through which the electrode (11) and plasma gas pass, and has a handle through hole (58) that is continuous with the hole and receives the handle of the nozzle member (7) at the tip, and the handle through hole and the outer cylinder (51) The tip (56t) of the thick wall portion (56) between the nozzle member (7) and the tip (57t) of the thin wall portion (57) protrudes toward the cooling medium flow groove (22) side. The outer cylinder (51), the cooling medium supply path (21) and the cooling medium discharge path (23) are respectively provided in the cooling medium supply groove (4) of the anode base (4). 41) and coolant supply port (20) connected to the coolant discharge groove (42) A spare coolant discharge port (24), the rear end portion is inserted into the nozzle carriage housing space of the anode block (4), a nozzle block (5);
An electrode (11) penetrating the cathode base (2) and the nozzle base (5), and having a rear end fixed to the cathode base (2); and
A conical umbrella having a nozzle (16) at the position of the central axis of the cone and having the tip of the nozzle as an apex, and a hole that is continuous with the nozzle and coaxial with the central axis and through which an electrode and plasma gas pass ; and a handle that is continuous with the umbrella has a ring-shaped cooling medium channel part (22) between the inner and the handle outer peripheral surface of the umbrella, attached to the tip of the nozzle carriage (5) Nozzle member (7);
Plasma torch with

  (3) A conductive chuck (10) is inserted into the central space of the cathode base (2), and the conductive chuck (10) is screwed by a tightening chuck (12) screwed to the cathode base (2). The plasma torch according to (2) above, which is pressure-bonded to the cathode table (2) and the electrode (11).

  (4) The nozzle base (5) has a stone receiving hole (59) continuous between the electrode (11) and the hole through which the plasma gas passes and the handle through hole (58), A centering stone (15) having a central hole through which the electrode (11) passes and a plasma gas passage groove or hole is inserted; the plasma torch according to (2) or (3) above.

  (5) Furthermore, there is a nozzle base cap (6) through which the tip side of the nozzle base (5) penetrates, and the nozzle base cap (6) is screwed (61) to the anode base (4) at its rear end. The nozzle base (5) is fixed to the anode base (4); The plasma torch according to any one of (2) to (4) above.

  (6) Further, the umbrella of the nozzle member (7) is engaged with the umbrella of the nozzle member (7) and screwed to the tip of the nozzle base cap (6) and screwed to tighten the umbrella of the nozzle member (7) of the nozzle base (5). Nozzle cap (8) that is press-fixed to the tip, O-ring that seals between the outer surface of the handle of nozzle member (7) and the inner surface of the handle hole (58) of nozzle base (5), and nozzle member There is an O-ring that seals between the umbrella of (7) and the tip of the nozzle base (5); the plasma torch according to (5) above.

(7) Between the screw at the rear end of the nozzle base cap (6) and the screw at the front end , the nozzle cap (8) is provided to secure a shield gas flow space outside the nozzle cap (8). The nozzle base cap (6) has a through hole (18) for guiding the shield gas fed to the anode base (4) to the shield gas flow space, and the nozzle base cap (6) has a larger diameter. The shield cap (9) screwed to the large diameter portion of (6) defines the shield gas flow space; the plasma torch according to (6) above.

  Other objects and features of the present invention will become apparent from the following description of embodiments with reference to the drawings.

  FIG. 1 shows a longitudinal section of one embodiment of the present invention. A cathode base 2, an insulating bush 3 and an anode base 4 are inserted into the cylindrical inner space of the plasma torch base 1, and these are integrally fixed to the base 1. The nozzle base 5 is inserted into the anode base 4, and the nozzle base 5 is fixed to the anode base 4 by screwing the male screw 61 of the nozzle base cap 6 into the anode base 4. A nozzle member 7 is attached to the lower end (tip) of the nozzle base 5, and is fixed to the nozzle base cap 6 by a cap nut with a cap nut having a female thread that receives the male screw 63 of the nozzle base cap 6. A cap nut-shaped shield cap 9 with a female screw is screwed to the large-diameter male screw 62 of the nozzle base cap 6, and the shield cap 9 is turned in the screwing direction so that the end face of the shield cap 9 becomes the end face of the substrate 1. It is tightened to.

  A conductive chuck 10 is inserted into the cathode base 2, and a tungsten electrode 11 passes through the chuck 10. The conductive chuck 10 is squeezed and pressed against the cathode table 2 and the tungsten electrode 11 by turning the clamping chuck 12 having a female screw hole for receiving the male screw of the cathode table 2 in the screw tightening direction. Thereby, the tungsten electrode 11 is fixed to the cathode stand 2 and is also electrically connected.

  Plasma gas is supplied from the plasma gas pipe 14 on the arm 13 of the substrate 1 through the space between the insulating bush 3 and the anode base 4 to the center hole space of the nozzle base 5 (two-dot chain line arrow), and the centering stone The through hole 15 reaches the center hole space of the nozzle member 7, is ionized by an arc at the tip of the tungsten electrode 11, becomes plasma, and is ejected from the nozzle 16.

  The shield gas fed from the shield gas pipe 17 on the arm 13 to the ring-shaped groove space of the anode table 4 further passes through the vent hole 18 of the nozzle table cap 6 and reaches the inner space of the shield cap 9. , And ejected from the cap 9 forward of the torch (dotted line arrow).

  The anode pipe 19, which is a conductive water supply pipe, is connected to the anode base 4 through the arm 13, that is, is electrically connected, and the cooling water (solid arrow) supplied to the anode pipe 19 is supplied to the anode base 4. The water passes through the ring-shaped water supply groove 41, passes through the water supply port 20 of the nozzle base 5, passes through the water supply path 21 of the nozzle base 5, and enters the ring-shaped water flow space 22 of the nozzle member 7. Then, it flows in the circumferential direction through the water flow space 22, reaches the drainage channel 23 of the nozzle table 5, passes through the drainage channel 23, and enters the drainage groove 42 of the anode table 4 from the drainage port 24 of the nozzle table 5. 42 enters the insulating relay pipe 25, passes further through the insulating relay pipes 26, 27, enters the cathode base 2, and from the cathode base 2 to the cathode pipe 28 which is a conductive drain pipe. Get out. The cathode pipe 28 is connected to the cathode table 2 through the arm 13. That is, they are electrically connected.

  The nozzle stage 5 is shown in FIGS. The nozzle base 5 is roughly a unit that is integrally formed by press-fitting an inner cylinder 54 having an uneven thickness in the circumferential direction into a large-diameter thin-walled outer cylinder 51. 2A is a cross-sectional view taken along line AA in FIG. 2B, FIG. 2B is a vertical cross-sectional view taken along line BB in FIG. 2A, and FIG. FIG. 2D is an external perspective view showing the distal end portion (end portion on the nozzle member 7 mounting side) of the nozzle base 5, and FIG. 2D is an external view showing the rear end portion (end portion on the anode base 4 mounting side) of the nozzle base 5. FIG. 3 is a perspective view, and FIG. 3 is an enlarged view of FIG.

  As shown in FIG. 2A, the inner cylinder 54 has a cylindrical space through which the tungsten electrode 11 and the plasma gas pass at the center, and the centering stone 15 (FIG. 1) is received in the cylindrical space. The space 59 is continuous and the space 58 for receiving the nozzle member 7 (FIG. 1) is continuous. In addition, as shown in FIG. 2A, the inner cylinder 54 is thick with one diameter direction pressed against the outer cylinder 51, and the diameter direction perpendicular to the diameter direction is thin. The outer surface is separated from the inner wall surface (inner peripheral surface) of the outer cylinder 51. That is, a pair of opposing spaces, that is, the water supply channel 21 and the drainage channel 23 are partitioned (segmented) by the inner tube 54 in the outer tube 51. As shown in FIGS. 2B and 2C and FIG. 3, the tip 56t of the thick portion 56 of the inner cylinder 54 is connected to the tip 5t of the outer cylinder 51 (tip of the nozzle base 5) and the length direction ( The position in the direction in which the shaft extends is the same, but the tip 57t of the thin portion 57 of the inner cylinder 54 is inside the tip 5t of the outer cylinder 51 as shown in FIG. 2 (b) and FIG. The thick portion 56 has a tip 56t and a step (5t / 57t). The outer cylinder 51 has a water supply port 20 and a water discharge port 24 that are respectively aligned with the water supply groove 41 and the drainage groove 42 of the anode table 4. The inner cylinder 54 is press-fitted into the outer cylinder 51 such that the pair of thin portions 57 are opposed to the water supply port 20 and the drain port 24 of the outer cylinder 51, respectively, and the rear end of the outer cylinder 51 is the rear end of the inner cylinder 54. Then, the rear end of the outer cylinder 51 is welded to the flange 55.

  The flange 55 has a ring groove, and an O-ring (FIG. 1) inserted in the flange 55 is in close contact with the anode base 4 and hermetically seals between the rear end portion of the nozzle base 5 and the anode base 4. . That is, cooling water leakage is prevented. The outer cylinder 51 has flanges 52 and 53 for hermetic sealing, and a ring groove is formed between the flanges 52 and 53. The O-ring (FIG. 1) put in the flange 51 and 53 is in close contact with the anode base 4, and the nozzle An airtight seal is provided between the middle of the base 5 and the anode base 4. That is, cooling water leakage is prevented. By the pair of hermetic seal structures, the plasma gas flow path (two-dot chain arrow) and the shield gas flow inside the torch base 1 from the water supply groove 41 and the drainage groove 42 of the anode base 4, that is, from the inside of the anode base 4. Water leakage to the road (dotted arrow) is prevented.

  FIG. 2E shows the external appearance of the nozzle base cap 6. The nozzle base cap 6 has a medium-diameter male screw 61 screwed into the female screw hole of the anode base 4 at the rear end portion, and a large-diameter male screw 62 to which the female screw of the shield cap 9 is coupled in the middle. There is a small-diameter male screw 63 to which the female screw of the nozzle cap 8 is coupled. There are a plurality of vent holes 18 penetrating in the direction in which the shaft extends from the middle diameter portion of the male screw 61 to the small diameter portion of the male screw 63. The nozzle base 5 is pressed into the anode base 4 in the torch base 1 through the nozzle base 5 into the cylindrical space inside the nozzle base cap 6, and the male screw 61 of the nozzle base cap 6 is screwed into the female screw hole of the anode base 4. Thus, as shown in FIG. 1, the nozzle base 5 and the nozzle base cap 6 can be integrally fixed to the anode base 4.

  The nozzle member 7 is generally an umbrella shape that can be called a rotating top, mushroom, umbrella, or parasol shape without a lower mandrel and with an upper mandrel. There is a continuous nozzle 16. A space between the umbrella-shaped handle and the umbrella is a conical ring-shaped water passing space 22 that circulates around the handle. There is an outer flange at the edge of the umbrella, and the inner flange at the tip of the nozzle cap 8 is engaged with the outer flange. The nozzle cap 8 is a cap nut having a female screw hole, and the bottom of the female screw hole is an inner flange. The O-ring and centering stone 15 are attached to the end portion of the handle of the nozzle member 7 and the O-ring is inserted into the edge of the umbrella. 7 is engaged with the inner flange of the nozzle cap 8, the male screw 63 of the nozzle base cap 6 is received in the female screw hole of the nozzle member 7, and the nozzle cap 8 is screwed and coupled to the nozzle base cap 6. As shown in FIG. 1, the centering stone 15, the nozzle member 7, and the nozzle cap 8 can be integrally fixed to the nozzle base 5. With this integral fixing, all of these members are integrally fixed to the nozzle base cap 6.

  FIG. 4 shows a simplified nozzle member 7 and nozzle base 5 integrated as described above. The centering stone 15 is not shown. Cooling water that has entered the water supply groove 41 of the anode base 4 from the anode pipe 19 enters the water supply path 21 from the water supply port 20 of the nozzle base 5, enters the ring-shaped water passage space 22 of the nozzle member 7, and passes through the water. Enter the drainage channel 23 around the space 22 approximately half a circle. At this time, since the tip 56t of the thick portion 56 of the inner cylinder 54 protrudes in the direction toward the water flow space 22 rather than the tip 57t of the thin portion 57, the ring-shaped passage of the nozzle member 7 from the water supply path 21. Since the cooling water that has entered the water space 22 exceeds the tip 56t of the thick wall portion 56, it proceeds in the direction toward the bottom of the water flow space 22, that is, the ring-shaped groove, that is, the direction toward the tip of the nozzle member 7, and passes therethrough. It hits the bottom (groove bottom) of the water space 22 (ring-shaped groove) and removes heat from the tip of the nozzle member 7. That is, the tip of the nozzle member 7 is cooled. The tip 56t of the thick portion 56 protrudes more toward the tip of the torch than the tip 57t of the thin portion 57 and directs the cooling water flow toward the bottom of the ring-shaped groove 22 that is the water passage space of the nozzle member 7. The cooling effect is high.

  The water passage space 22 of the nozzle member 7 is a ring-shaped groove, and the nozzle member 7 has no partition wall, and the tip 56t of the thick portion 56 of the inner cylinder 54 in the nozzle base 5 has the function of a partition wall. Alignment (positioning) of the nozzle member 7 with respect to the nozzle base 5 in the circumferential direction about the axis center is unnecessary, and assembly of the torch (mounting of the nozzle member 7 with respect to the nozzle base 5) is easy.

It is a longitudinal cross-sectional view of one Example of this invention. (A) is a cross-sectional view taken along line AA of the nozzle base 5 shown in FIG. 1, (b) is a vertical cross-sectional view taken along line BB, (c) is a perspective view of the front end portion, and (d) is a rear end. It is the perspective view which looked at the part. (E) is a perspective view of the nozzle base cap 6 shown in FIG. It is an enlarged view of (c) of FIG. 1 is a cross-sectional view showing the nozzle member 7 and the nozzle base 5 in a simplified manner, with the centering stone 15 shown in FIG. 1 omitted, (a) a cross-sectional view taken along line AA, and (b) a vertical cross-section taken along line BB. (C) is a cross-sectional view taken along the line CC, (d) is a vertical cross-sectional view taken along the line DD, and (e) is a cross-sectional view taken along the line EE.

1: Substrate 2: Cathode base 3: Insulating bush 4: Anode base 41: Water supply groove 42: Drainage groove 5: Nozzle base 5t: Tip 51: Outer cylinder 52, 53: Flange 54: Inner cylinder 55: Flange 56: Thick wall Portion 56t: Tip 57: Thin portion 57t: Tip 58: Nozzle member receiving space 59: Stone receiving space 6: Nozzle base cap 61-63: Male screw 7: Nozzle member 8: Nozzle cap 9: Shield cap 10: Conductive chuck 11: Tungsten electrode 12: Tightening chuck 13: Arm 14: Plasma gas pipe 15: Centering stone 16: Nozzle 17: Shield gas pipe 18: Ventilation hole 19: Anode pipe 20: Water supply port 21: Water supply path 22: Water flow space 23: Drainage Road 24: Drain port 25, 26, 27: Relay pipe 28: Cathode pipe

Claims (7)

In a plasma torch that attaches a nozzle member to the tip of a nozzle base and cools the nozzle member through a cooling medium:
The nozzle member has a cone-shaped umbrella having a nozzle at the position of the central axis of the cone and having the tip of the nozzle as an apex, a hole that is continuous with the nozzle and coaxial with the central axis and through which the electrode and plasma gas pass. there, and a handle that is continuous with the umbrella has a ring-shaped cooling medium channel part between the inner and the handle outer peripheral surface of the umbrella,
The nozzle block, the outer tube, and the outer cutting the outer surface other than the portion outer surface is in contact with the inner surface of the elliptical or the outer cylinder contact with the part on the inner surface of the outer tube having a distal end for coupling to the edge of the umbrella A shape having a space between the inner surface of the cylinder, and a cooling medium supply path and a cooling medium discharge path are defined in the inner space of the outer cylinder, and a hole through which an electrode and plasma gas are passed in the center has a handle through holes accept before Symbol pattern continuously bore in, from the tip the tip of the thick portion of the thin portion between the該柄through hole said barrel, said cooling medium of said nozzle member A plasma torch comprising an inner cylinder protruding toward the flow groove side. A cathode base mounted on a torch substrate;
An anode base which is insulated from the cathode base by an insulating bush and mounted on the torch base, and which has a nozzle base accommodation space, a ring-shaped cooling medium supply groove and a cooling medium discharge groove continuous therewith;
An outer cylinder having a tip coupled to the edge of the umbrella of the nozzle member, and an outer surface other than an oval shape whose outer surface is in contact with the inner surface of the outer cylinder or a portion in contact with the inner surface of the outer cylinder, and an inner surface of the outer cylinder A cooling medium supply path and a cooling medium discharge path in the inner space of the outer cylinder, a hole through which an electrode and a plasma gas pass at the center, and a tip at the tip There is a handle passage hole that is continuous with the hole to receive the handle of the nozzle member, and the tip of the thick portion between the handle passage hole and the outer cylinder is more fluent than the tip of the thin portion. A cooling medium supply port that connects the cooling medium supply path and the cooling medium discharge path to the cooling medium supply groove and the cooling medium discharge groove of the anode base, respectively. And the cooling medium discharge port, the rear end is the nozzle base of the anode base Inserted between the nozzle base;
An electrode penetrating the cathode base and the nozzle base and having a rear end fixed to the cathode base; and
A cone-shaped umbrella having a nozzle at the position of the central axis of the cone and having the tip of the nozzle as an apex; and the umbrella having a hole that is continuous with the nozzle and is coaxial with the central axis and through which an electrode and plasma gas pass. and a continuous pattern, the nozzle member has a ring-shaped cooling medium channel part, which is attached to the tip of the nozzle carriage between the inner and the handle outer peripheral surface of the umbrella;
Plasma torch with   3. The plasma torch according to claim 2, wherein a conductive chuck is inserted into a central space of the cathode base, and the conductive chuck is pressure-bonded to the cathode base and the electrode by screw tightening of a tightening chuck screwed to the cathode base.   The nozzle base has a stone receiving hole continuous between the hole through which the electrode and plasma gas pass and the handle through hole, and has a central hole through which the electrode passes and a plasma gas passage groove or hole. The plasma torch according to claim 2 or 3, wherein a centering stone is inserted.   Furthermore, there is a nozzle base cap through which the tip side of the nozzle base penetrates, and the nozzle base cap is screwed to the anode base at the rear end thereof to fix the nozzle base to the anode base; The plasma torch according to one.   A nozzle cap that engages with the umbrella of the nozzle member and is screwed to the tip of the nozzle base cap and screwed to fix the umbrella of the nozzle member to the tip of the nozzle base; and an outer surface of the handle of the nozzle member The plasma torch according to claim 5, wherein there is an O-ring that seals between a nozzle and an inner surface of a handle through hole of the nozzle base, and an O-ring that seals between an umbrella of the nozzle member and a tip of the nozzle base. . The space between the screw at the rear end of the nozzle base cap and the screw at the front end is larger than the nozzle cap in order to secure a shield gas flow space outside the nozzle cap. A shield cap that guides the shield gas supplied to the anode base to the shield gas flow space, and a shield cap screwed to the large diameter portion of the nozzle base cap defines the shield gas flow space. A plasma torch according to claim 6;

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