JP5884583B2 - Gripping and moving apparatus, cylindrical member mounting apparatus, and gripping and moving method - Google Patents

Gripping and moving apparatus, cylindrical member mounting apparatus, and gripping and moving method Download PDF

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JP5884583B2
JP5884583B2 JP2012062710A JP2012062710A JP5884583B2 JP 5884583 B2 JP5884583 B2 JP 5884583B2 JP 2012062710 A JP2012062710 A JP 2012062710A JP 2012062710 A JP2012062710 A JP 2012062710A JP 5884583 B2 JP5884583 B2 JP 5884583B2
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cylindrical member
gripping
curved surface
pressing
guide portion
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JP2013193165A (en
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進直 野村
進直 野村
光生 竹内
光生 竹内
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Fujitsu Ltd
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Description

本発明は、把持移動装置及び円柱部材の取り付け装置並びに把持移動方法に関する。   The present invention relates to a gripping moving device, a cylindrical member mounting device, and a gripping moving method.

光通信デバイスには、レーザ光を集光するレンズのような光学部品が設けられている。光学部品は、レーザ光の光軸のずれを防止するために、光通信デバイスのパッケージに位置決めして固定されている。ここで、レンズは一般的に小型の部品であり、レンズの球面などを作業者が直接に触ることはできないので、レンズ単体での取り扱いが難しい。このために、レンズをパッケージに組み付ける工程では、予め細長の円柱形状を有する部材をレンズに接着剤で固定し、円柱部材を把持することで、レンズを移動させたり、レンズをパッケージに組み付けたりする。   An optical communication device is provided with an optical component such as a lens that collects laser light. The optical component is positioned and fixed to the package of the optical communication device in order to prevent deviation of the optical axis of the laser light. Here, the lens is generally a small component, and since the operator cannot directly touch the spherical surface of the lens, it is difficult to handle the lens alone. For this reason, in the process of assembling the lens to the package, a member having an elongated cylindrical shape is fixed to the lens with an adhesive in advance, and the lens is moved or the lens is assembled to the package by grasping the cylindrical member. .

円柱部材をレンズに固定するときには、接着剤を予め塗布した円柱部材を吸着保持して、レンズの所定位置に突き当てた後に、接着剤を硬化させる。レンズを光通信デバイスのパッケージに組み付けるときは、円柱部材を例えばロボットハンドを有するハンドリング装置で把持し、円柱部材ごとレンズを移動させる。ハンドリング装置は、円柱部材によって把持しているレンズをパッケージの所定位置に移動させた後、パッケージに接着剤で固定する。このとき、ハンドリング装置は、ロボットハンドの向きを制御して、パッケージに対してレンズの光軸を調整する。   When fixing the cylindrical member to the lens, the cylindrical member pre-applied with the adhesive is sucked and held and abutted against a predetermined position of the lens, and then the adhesive is cured. When the lens is assembled to the package of the optical communication device, the cylindrical member is held by, for example, a handling device having a robot hand, and the lens is moved together with the cylindrical member. The handling device moves the lens held by the cylindrical member to a predetermined position of the package, and then fixes the lens to the package with an adhesive. At this time, the handling device controls the direction of the robot hand to adjust the optical axis of the lens with respect to the package.

このために、ハンドリング装置は、円柱部材をレンズに正しく位置決めして固定する必要がある。円柱部材を位置決めして保持する従来の装置としては、円柱部材と嵌り合う半円筒溝を有し、半円筒溝の長手方向の中央付近に形成した1つの吸着孔で円柱部材を保持するものが知られている。ここで、半円筒溝は水平に形成されており、円柱部材を基板に接着剤などで固定する場合には、半円筒溝内に円柱部材を嵌め込んだ状態で真空吸着する。この後、円柱部材の上方から、接着剤を塗布した基板を位置決めして載せ、接着剤を硬化させる。   For this reason, the handling device needs to correctly position and fix the cylindrical member to the lens. As a conventional apparatus for positioning and holding a columnar member, there is a device having a semicylindrical groove that fits with the columnar member and holding the columnar member with one suction hole formed near the center in the longitudinal direction of the semicylindrical groove. Are known. Here, the semi-cylindrical groove is formed horizontally, and when the column member is fixed to the substrate with an adhesive or the like, vacuum adsorption is performed with the column member fitted in the semi-cylindrical groove. Then, the board | substrate which apply | coated the adhesive agent is positioned and mounted from the upper direction of a cylindrical member, and an adhesive agent is hardened.

特開平2−13912JP-A-2-13912

しかしながら、基板を接着した後で円柱部材を半円筒溝から取り外すためには、円柱部材と半円筒溝との嵌め合いを解消させる必要がある。従って、従来の方向では、円柱部材をハンドリング装置から取り外すときに、円柱部材と基板の接着部分にストレスがかかり易かった。接着部分にストレスがかかると、基板に対して円柱部材の位置がずれたり、円柱部材が基板から剥離したりし易くなる。   However, in order to remove the columnar member from the semi-cylindrical groove after bonding the substrates, it is necessary to eliminate the fit between the columnar member and the semi-cylindrical groove. Therefore, in the conventional direction, when the cylindrical member is removed from the handling device, stress is easily applied to the bonded portion of the cylindrical member and the substrate. When stress is applied to the bonded portion, the position of the columnar member is displaced with respect to the substrate, or the columnar member is easily peeled off from the substrate.

また、従来のハンドリング装置では、基板を円柱部材に向けて移動させる構成を有する。ところが、基板の代わりに小型の部品を円柱部材に接着させる場合には、小型の部品を把持しながら移動させ、半円筒溝に嵌合されている円柱部材に当接させることが必要になる。しかしながら、小型の部品を把持した状態で精度良く移動させることは困難であった。
この発明は、このような事情に鑑みてなされたものであり、円柱部材を把持した状態で位置ずれせずに移動させることを目的とする。
Moreover, in the conventional handling apparatus, it has the structure which moves a board | substrate toward a cylindrical member. However, in the case where a small component is bonded to the column member instead of the substrate, it is necessary to move the small component while gripping it and contact the column member fitted in the semi-cylindrical groove. However, it has been difficult to accurately move while holding a small component.
The present invention has been made in view of such circumstances, and an object of the present invention is to move a cylindrical member without being displaced in a gripped state.

実施形態の一観点によれば、円柱部材を挿入可能で、前記円柱部材の曲率より小さい曲率を有する曲面部を有し、前記曲面部には吸着孔が形成されており、前記吸着孔によって前記円柱部材の側部の曲面を吸着することによって前記曲面部に前記円柱部材を把持するガイド部と、前記曲面部に挿入された前記円柱部材を、前記円柱部材の軸線方向に押圧する押し付け部と、前記ガイド部に吸着保持したままで、前記押し付け部によって前記円柱部材を前記曲面部に沿って移動させ、前記ガイド部からの前記円柱部材の突出量を変化させる制御部と、を含み、前記曲面部には、前記円柱部材が前記押し付け部で押圧されて移動する方向に前記円柱部材の吸着孔が複数配列されていることを特徴とする把持移動装置が提供される。
According to one aspect of the embodiment, the cylindrical member can be inserted and has a curved surface portion having a curvature smaller than the curvature of the cylindrical member, and the suction surface is formed in the curved surface portion. A guide part for gripping the cylindrical member on the curved surface part by adsorbing a curved surface of a side part of the cylindrical member; and a pressing part for pressing the cylindrical member inserted in the curved surface part in an axial direction of the cylindrical member; , while sucking and holding the guide portion, the cylindrical member is moved along the curved surface portion, seen including a control unit for changing the amount of protrusion of the columnar member from the guide portion by the pressing portion, A gripping and moving device is provided in which a plurality of suction holes of the cylindrical member are arranged on the curved surface portion in a direction in which the cylindrical member moves while being pressed by the pressing portion .

また、実施形態の別の観点によれば、ガイド部に形成された曲面部に円柱部材を挿入し、前記曲面部に形成された吸着孔を用いて前記円柱部材の側部の曲面を吸着することによって前記円柱部材を吸着保持する工程と、前記円柱部材の一端に押し付け部材を当接させる工程と、前記押し付け部材で前記円柱部材を前記円柱部材の軸線方向に押圧し、前記軸線方向に複数配列された前記吸着孔で前記円柱部材を前記ガイド部に吸着保持させた状態で移動させる工程と、を含むことを特徴とする把持移動方法が提供される。 Moreover, according to another viewpoint of embodiment, a cylindrical member is inserted in the curved surface part formed in the guide part, and the curved surface of the side part of the said cylindrical member is adsorbed using the suction hole formed in the said curved surface part. multiple wherein the step of sucking and holding the columnar member, comprising the steps of abutting the pressing member at one end of the columnar member, to press the cylindrical member in the axial direction of the columnar member in the pressing member, in the axial direction by And a step of moving the columnar member in a state of being sucked and held by the guide portion through the arranged suction holes .

円柱部材は、曲率が円柱部材の曲率より小さい曲面部によって中心に位置決めされると共に、吸着孔によって確実に把持され、ガイド部への円柱部材の着脱が容易である。また、押し付け部で円柱部材を押圧することによって円柱部材をスムーズに移動でき、円柱部材のガイド部からの突出量を押し付け部材の移動量によって調整できるので、円柱部材の位置を精度良く制御できる。   The columnar member is positioned at the center by a curved surface portion whose curvature is smaller than that of the columnar member, and is securely held by the suction hole, so that the columnar member can be easily attached to and detached from the guide portion. In addition, the cylindrical member can be smoothly moved by pressing the cylindrical member with the pressing portion, and the protruding amount of the cylindrical member from the guide portion can be adjusted by the moving amount of the pressing member, so that the position of the cylindrical member can be controlled with high accuracy.

図1Aは、本発明の実施の形態に係る把持移動装置を含む取り付け装置の概略構成の一例を示す斜視図である。FIG. 1A is a perspective view illustrating an example of a schematic configuration of an attachment device including a gripping movement device according to an embodiment of the present invention. 図1Bは、本発明の実施の形態に係る把持移動装置を含む取り付け装置の概略構成の一例を一部拡大して示す図である。FIG. 1B is a partially enlarged view showing an example of a schematic configuration of an attachment device including a gripping movement device according to an embodiment of the present invention. 図2Aは、本発明の実施の形態に係る把持移動装置のガイド部の一例を示し、図1BのI−I線に沿った断面図である。FIG. 2A is a cross-sectional view taken along the line II of FIG. 1B, showing an example of the guide portion of the gripping and moving apparatus according to the embodiment of the present invention. 図2Bは、本発明の実施の形態に係る把持移動装置のガイド部の一例を示し、図1BのI−I線に沿った断面図であり、円柱部材を把持溝に吸着保持した状態を示す図である。FIG. 2B shows an example of the guide portion of the gripping movement device according to the embodiment of the present invention, and is a cross-sectional view taken along the line I-I of FIG. 1B, showing a state where the cylindrical member is sucked and held in the gripping groove. FIG. 図3は、本発明の実施の形態に係る把持移動装置のガイド部の一例を示す正面図である。FIG. 3 is a front view showing an example of a guide portion of the gripping and moving apparatus according to the embodiment of the present invention. 図4は、本発明の実施の形態に係る把持移動装置のガイド部の一例を示し、図1BのII−II線に沿った断面図である。FIG. 4 is a cross-sectional view taken along the line II-II in FIG. 1B, showing an example of the guide portion of the gripping and moving apparatus according to the embodiment of the present invention. 図5Aは、本発明の実施の形態に係る把持移動装置を含む取り付け装置のフローチャートの一例を示す図である。(その1)FIG. 5A is a diagram illustrating an example of a flowchart of an attachment device including a gripping movement device according to an embodiment of the present invention. (Part 1) 図5Bは、本発明の実施の形態に係る把持移動装置を含む取り付け装置のフローチャートの一例を示す図である。(その2)FIG. 5B is a diagram illustrating an example of a flowchart of an attachment device including the gripping movement device according to the embodiment of the present invention. (Part 2) 図6Aは、本発明の実施の形態に係る把持移動装置を含む取り付け装置の作用を説明する図である。(その1)FIG. 6A is a diagram for explaining the operation of the attachment device including the gripping movement device according to the embodiment of the present invention. (Part 1) 図6Bは、本発明の実施の形態に係る把持移動装置を含む取り付け装置の作用を説明する図である。(その2)FIG. 6B is a diagram for explaining the operation of the attachment device including the gripping movement device according to the embodiment of the present invention. (Part 2) 図6Cは、本発明の実施の形態に係る把持移動装置を含む取り付け装置の作用を説明する図である。(その3)FIG. 6C is a diagram illustrating the operation of the attachment device including the gripping movement device according to the embodiment of the present invention. (Part 3) 図6Dは、本発明の実施の形態に係る把持移動装置を含む取り付け装置の作用を説明する図である。(その4)FIG. 6D is a diagram for explaining the operation of the attachment device including the gripping movement device according to the embodiment of the present invention. (Part 4)

発明の目的及び利点は、請求の範囲に具体的に記載された構成要素及び組み合わせによって実現され達成される。
前述の一般的な説明及び以下の詳細な説明は、典型例及び説明のためのものであって、本発明を限定するためのものではない。
The objects and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the appended claims.
The foregoing general description and the following detailed description are exemplary and explanatory only and are not intended to limit the invention.

図1に把持移動装置を含む光学部品の調整軸の取り付け装置の概略構成を示す。光学部品の調整軸の取り付け装置(以下、取り付け装置という)1は、作業台の上などに載置されるL字型の筐体部2を有し、筐体部2上に部品固定部3が位置決めして吸着保持されている。さらに、部品固定部3の上方には、把持移動装置4が配置されており、把持移動装置4は筐体部2に支持されている。また、取り付け装置1には、吸着保持に用いる吸着ライン6,7,8と、真空ポンプ9と、接着装置である紫外線(UV)照射器10と、取り付け装置1の制御を司る制御装置11とを有する。   FIG. 1 shows a schematic configuration of an apparatus for attaching an adjustment shaft for an optical component including a gripping movement device. An optical component adjustment shaft mounting device (hereinafter referred to as a mounting device) 1 has an L-shaped housing portion 2 placed on a work table or the like, and a component fixing portion 3 on the housing portion 2. Is positioned and held by suction. Further, a gripping and moving device 4 is disposed above the component fixing unit 3, and the gripping and moving device 4 is supported by the housing unit 2. In addition, the attachment device 1 includes suction lines 6, 7, and 8 used for suction holding, a vacuum pump 9, an ultraviolet (UV) irradiator 10 that is an adhesive device, and a control device 11 that controls the attachment device 1. Have

筐体部2は、平板形のベース21を有し、ベース21の奥側の一端が鉛直上向きに延びてサイド部22を形成しており、全体としてL字形になっている。ベース21の上面には、部品固定部3を位置決めするための凹部23が形成されており、凹部23には部品固定部3を吸着する不図示の吸着孔が少なくとも1つ形成されている。吸着孔は、ベース21の側面に設けられたポート24を介して吸着ライン6に接続されている。吸着ライン6は、真空計6Aや電磁弁6Bが設けられた後、真空ポンプ9に接続されている。ここで、ベース21は、部品固定部3を位置決めする手段として、凹部23の代わりに凸部などを有しても良い。   The housing | casing part 2 has the flat-shaped base 21, the one end of the back | inner side of the base 21 is extended vertically upwards, and forms the side part 22, and is L-shaped as a whole. A concave portion 23 for positioning the component fixing portion 3 is formed on the upper surface of the base 21, and at least one suction hole (not shown) that sucks the component fixing portion 3 is formed in the concave portion 23. The suction hole is connected to the suction line 6 via a port 24 provided on the side surface of the base 21. The suction line 6 is connected to a vacuum pump 9 after a vacuum gauge 6A and an electromagnetic valve 6B are provided. Here, the base 21 may have a convex portion or the like instead of the concave portion 23 as means for positioning the component fixing portion 3.

部品固定部3は、上面に光学部品を収容するホルダ25を有し、ホルダ25には、5つの収容溝26,27,28,29,30が凹設されている。これら収容溝26〜30は、光学部品31,32,33,34,35を1つずつ位置決めして収容するために形成されている。このために、各収容溝26〜30は、それぞれが光学部品31〜35の形状に合わせた異なる形状を有する。   The component fixing part 3 has a holder 25 for accommodating optical components on the upper surface, and the holder 25 has five receiving grooves 26, 27, 28, 29, and 30 recessed. These housing grooves 26 to 30 are formed for positioning and housing the optical components 31, 32, 33, 34, and 35 one by one. For this reason, each accommodation groove 26-30 has a different shape according to the shape of the optical components 31-35, respectively.

各光学部品31〜35は、各収容溝26〜30に1つずつ収容され、各収容溝26〜30に形成された不図示の吸着孔に吸着される。ここで、光学部品31〜35には、レンズや、ミラーなどがある。また、収容溝26〜30に形成された吸着孔は、部品固定部3の側部に設けられたポート37を介して吸着ライン7に接続されている。吸着ライン7は、真空計7Aや電磁弁7Bが設けられた後、真空ポンプ9に接続されている。   Each of the optical components 31 to 35 is accommodated one by one in each of the accommodation grooves 26 to 30 and is adsorbed by suction holes (not shown) formed in the respective accommodation grooves 26 to 30. Here, the optical components 31 to 35 include a lens and a mirror. Further, the suction holes formed in the housing grooves 26 to 30 are connected to the suction line 7 via a port 37 provided on the side portion of the component fixing portion 3. The suction line 7 is connected to a vacuum pump 9 after a vacuum gauge 7A and a solenoid valve 7B are provided.

ここで、収容溝26〜30の数や、種類は、図示したものに限定されない。また、ホルダ25は、光学部品31〜35を吸着保持可能な構成であれば良く、収容溝26〜30を有しなくても良い。   Here, the number and type of the accommodation grooves 26 to 30 are not limited to those illustrated. Moreover, the holder 25 should just be the structure which can adsorb and hold the optical components 31-35, and does not need to have the accommodation grooves 26-30.

次に、把持移動装置4について説明する。
把持移動装置4は、筐体部2のサイド部22に固定されており、部品固定部3の上方に配置されるガイド部41と、ガイド部41の上方に昇降可能に配置された押し付け部42とを有する。
ガイド部41は、裏面側が筐体部2のサイド部22に固定されている。ガイド部41の前面41Aには、ガイド部41の上面から下端まで延びる把持溝51が5本形成されている。5つの把持溝51は、鉛直方向に平行に延びている。把持溝51の配置間隔は、下方に配置されている部品固定部3の収容溝26〜30の配置間隔に等しい。
Next, the gripping / moving device 4 will be described.
The gripping and moving device 4 is fixed to the side portion 22 of the housing portion 2, and includes a guide portion 41 disposed above the component fixing portion 3 and a pressing portion 42 disposed above the guide portion 41 so as to be movable up and down. And have.
The guide part 41 is fixed to the side part 22 of the housing part 2 on the back side. On the front surface 41 </ b> A of the guide portion 41, five gripping grooves 51 extending from the upper surface to the lower end of the guide portion 41 are formed. The five gripping grooves 51 extend parallel to the vertical direction. The arrangement interval of the gripping grooves 51 is equal to the arrangement interval of the receiving grooves 26 to 30 of the component fixing unit 3 arranged below.

図2Aに平面形状を示すように、把持溝51は、断面がU字形を有する。把持溝51は、ガイド部41の前面41A側が開放されており、把持溝51の底部に相当する曲面部51Bがガイド部41の背面側に配置されている。ここで、把持溝51の開放端の幅WD1、即ち一対の側壁51Aの間の距離は、把持対象物である円柱部材61の直径より大きい。従って、調整軸である円柱部材61は、ガイド部41の前面41Aから把持溝51内に挿入できる。把持溝51の曲面部51Bの曲率は、円柱部材61の側部の曲面61Aの曲率より僅かに小さい。例えば、円柱部材61の半径が2mmである場合、曲面部51Bは、半径2.05mm程度の半円に相当する形状になっている。このために、図2Bに示すように、把持溝51の奥まで円柱部材61を挿入すると、把持溝51の曲面部51Bの両側部と円柱部材61の曲面61Aとの間に僅かな隙間が形成される。   As shown in FIG. 2A, the grip groove 51 has a U-shaped cross section. The grip groove 51 is open on the front surface 41 </ b> A side of the guide portion 41, and a curved surface portion 51 </ b> B corresponding to the bottom portion of the grip groove 51 is disposed on the back surface side of the guide portion 41. Here, the width WD1 of the open end of the gripping groove 51, that is, the distance between the pair of side walls 51A is larger than the diameter of the columnar member 61 that is the gripping object. Accordingly, the columnar member 61 that is the adjustment shaft can be inserted into the gripping groove 51 from the front surface 41 </ b> A of the guide portion 41. The curvature of the curved surface portion 51 </ b> B of the gripping groove 51 is slightly smaller than the curvature of the curved surface 61 </ b> A on the side portion of the cylindrical member 61. For example, when the radius of the columnar member 61 is 2 mm, the curved surface portion 51B has a shape corresponding to a semicircle having a radius of about 2.05 mm. For this reason, as shown in FIG. 2B, when the cylindrical member 61 is inserted deep into the gripping groove 51, a slight gap is formed between both side portions of the curved surface portion 51 </ b> B of the gripping groove 51 and the curved surface 61 </ b> A of the cylindrical member 61. Is done.

さらに、図1と、図1を一部拡大した正面図である図3と、側部断面図である図4に示すように、ガイド部41の前面41Aには、把持溝51を上下に分割する凹部として、逃げ部53が形成されている。逃げ部53は、ガイド部41を前面41A側から凹ませることで形成されており、1つの把持溝51に対して1つずつ形成されている。逃げ部53は、ガイド部41の上下方向の中心に形成されており、ガイド部41の前面41Aにおける逃げ部53の形状は、楕円形になっている。逃げ部53の幅WD2は、把持溝51の開放端の幅WD1より大きい。また、図4に示すように、ガイド部41の前面41Aから背面に向かう方向において、逃げ部53の深さDT2は、把持溝51の深さDT1より大きい。   Further, as shown in FIG. 1, FIG. 3, which is a partially enlarged front view of FIG. 1, and FIG. 4, which is a side sectional view, a grip groove 51 is vertically divided in the front surface 41 </ b> A of the guide portion 41. An escape portion 53 is formed as a recessed portion. The escape portions 53 are formed by denting the guide portions 41 from the front surface 41 </ b> A side, and are formed one by one for each gripping groove 51. The escape portion 53 is formed at the center of the guide portion 41 in the vertical direction, and the shape of the escape portion 53 on the front surface 41A of the guide portion 41 is an ellipse. The width WD2 of the escape portion 53 is larger than the width WD1 of the open end of the grip groove 51. As shown in FIG. 4, the depth DT <b> 2 of the escape portion 53 is greater than the depth DT <b> 1 of the grip groove 51 in the direction from the front surface 41 </ b> A to the back surface of the guide portion 41.

図3に示すように、逃げ部53によって分割される把持溝51の上側部分51Uと、下側部分51Lのそれぞれには、吸着孔55が1つずつ形成されている。各吸着孔55は、各部分51U,51Lのそれぞれの高さ方向の略中央に形成されており、その直径は円柱部材61の直径より小さい。さらに、2つの吸着孔55の間の距離L1は、円柱部材61の長さから、後に詳細を説明する円柱部材61の移動量を引いた値より小さい。各吸着孔55は、図1に示すガイド部41の側面のポート56を介して吸着ライン8に接続されている。吸着ライン8は、真空計8Aや電磁弁8Bが設けられた後、真空ポンプ9に接続されている。   As shown in FIG. 3, one suction hole 55 is formed in each of the upper portion 51 </ b> U and the lower portion 51 </ b> L of the grip groove 51 divided by the escape portion 53. Each suction hole 55 is formed in the approximate center of each of the portions 51U and 51L in the height direction, and the diameter thereof is smaller than the diameter of the columnar member 61. Further, the distance L1 between the two suction holes 55 is smaller than the value obtained by subtracting the amount of movement of the columnar member 61, which will be described in detail later, from the length of the columnar member 61. Each suction hole 55 is connected to the suction line 8 via a port 56 on the side surface of the guide portion 41 shown in FIG. The suction line 8 is connected to a vacuum pump 9 after a vacuum gauge 8A and an electromagnetic valve 8B are provided.

ここで、逃げ部53が形成されることで、把持溝51は、上側部分51Uと、下側部分51Lのみで円柱部材61に接触するようになる。このために、把持溝51の全長で円柱部材61に接触する場合に比べて接触面が小さくなる。また、把持溝51の曲面部51Bの曲率は、円柱部材61の曲率より僅かに小さいので、把持溝51の曲面部51Bに円柱部材61を密着させると、両者の間には僅かな隙間が形成され、嵌め合い構造の場合に比べて接触面が小さくなる。さらに、円柱部材61は、吸着孔55で把持溝51の曲面部51Bに密着させられているので、把持溝51に対して位置決めして保持される。ここで、円柱部材61の曲率と、把持溝51の曲面部51Bの曲率の差は小さいので、両者の間の隙間は小さい。このために、円柱部材61の中心を吸着孔55の中心に導き易い。さらに、吸着孔55からリークを少なくできる。   Here, by forming the escape portion 53, the gripping groove 51 comes into contact with the cylindrical member 61 only by the upper portion 51U and the lower portion 51L. For this reason, a contact surface becomes small compared with the case where it contacts the cylindrical member 61 in the full length of the holding groove 51. Further, since the curvature of the curved surface portion 51B of the grip groove 51 is slightly smaller than the curvature of the cylindrical member 61, when the cylindrical member 61 is brought into close contact with the curved surface portion 51B of the grip groove 51, a slight gap is formed between them. Thus, the contact surface is smaller than that of the fitting structure. Further, since the columnar member 61 is in close contact with the curved surface portion 51 </ b> B of the gripping groove 51 through the suction hole 55, it is positioned and held with respect to the gripping groove 51. Here, since the difference between the curvature of the cylindrical member 61 and the curvature of the curved surface portion 51B of the gripping groove 51 is small, the gap between them is small. For this reason, it is easy to guide the center of the cylindrical member 61 to the center of the suction hole 55. Further, leakage from the suction hole 55 can be reduced.

逃げ部53は、各把持溝51に一つずつ形成されているが、全ての把持溝51を横断するように1つ形成しても良い。また、ガイド部41の前面41Aにおける逃げ部53の形状は、円形や四角形など、楕円以外の形状でも良い。   One escape portion 53 is formed in each gripping groove 51, but one escape portion 53 may be formed so as to cross all the gripping grooves 51. Further, the shape of the relief portion 53 on the front surface 41A of the guide portion 41 may be a shape other than an ellipse, such as a circle or a rectangle.

図1に示すように、押し付け部42は、直動ガイドによって筐体部2のサイド部22に沿って上下方向に、即ちガイド部41に近接又は離間するように移動可能である。さらに、押し付け部42の下面からは、複数のピン57が下向きに延びている。各ピン57は、押し付け部42内で、不図示のバネを用いたバッファ機構を介して支持された押し付け部材である。ピン57の数及び配置間隔は、ガイド部41の把持溝51の数及び配置に合わせてある。従って、各ピン57を把持溝51に吸着保持させた円柱部材61を一つずつに押し当てることができる。ピン57に下端(先端)は、球面に加工されており、ピン57の直径は、下方に配置されるガイド部41の把持溝51の最も狭い部分の幅より小さい。   As shown in FIG. 1, the pressing portion 42 is movable in the vertical direction along the side portion 22 of the housing portion 2 by the linear guide, that is, close to or away from the guide portion 41. Further, a plurality of pins 57 extend downward from the lower surface of the pressing portion 42. Each pin 57 is a pressing member supported in the pressing portion 42 via a buffer mechanism using a spring (not shown). The number and arrangement interval of the pins 57 are matched with the number and arrangement of the gripping grooves 51 of the guide portion 41. Accordingly, it is possible to press the cylindrical members 61 each holding the pins 57 in the gripping grooves 51 one by one. The lower end (tip) of the pin 57 is processed into a spherical surface, and the diameter of the pin 57 is smaller than the width of the narrowest portion of the grip groove 51 of the guide portion 41 disposed below.

また、制御装置11は、例えば、所定のプログラムを実行させることで、円柱部材61を把持移動する工程と、円柱部材61を光学部品31〜35に接着する工程とを実施するように構成されている。この実施の形態において、制御装置11は、吸着ライン6〜8及び真空ポンプ9を制御する空圧制御部15と、UV照射器10を制御する硬化制御部16と、押し付け部42などの動作を制御する装置制御部17とに機能分割される。   In addition, the control device 11 is configured to execute a step of gripping and moving the column member 61 and a step of bonding the column member 61 to the optical components 31 to 35 by executing a predetermined program, for example. Yes. In this embodiment, the control device 11 performs operations such as an air pressure control unit 15 that controls the suction lines 6 to 8 and the vacuum pump 9, a curing control unit 16 that controls the UV irradiator 10, and a pressing unit 42. The function is divided into a device control unit 17 to be controlled.

次に、把持移動装置4を含む取り付け装置1を用いて円柱部材61を把持移動する工程と、円柱部材61を光学部品31〜35に接着する工程について、図5A及び図5Bのフローチャートを主に参照しながら説明する。   Next, the process of gripping and moving the cylindrical member 61 using the attachment device 1 including the gripping moving apparatus 4 and the process of bonding the cylindrical member 61 to the optical components 31 to 35 are mainly shown in the flowcharts of FIGS. 5A and 5B. The description will be given with reference.

最初に、図5AのステップS101で空圧制御部15が、真空ポンプ9を運転させると共に、各吸着ライン6〜8の電磁弁6B〜8Bを開いて、筐体部2と、部品固定部3と、ガイド部41の真空引きを開始する。   First, in step S101 of FIG. 5A, the pneumatic control unit 15 operates the vacuum pump 9 and opens the electromagnetic valves 6B to 8B of the suction lines 6 to 8, and the casing unit 2 and the component fixing unit 3 are opened. Then, evacuation of the guide part 41 is started.

続くステップS102では、部品固定部3の収容溝26〜30に光学部品31〜35を設置する。光学部品31〜35は、ホルダ25の収容溝26〜30によって位置決めされ、吸着保持される。例えば、図6Aに示すように、部品固定部3の収容溝27には、光学部品32が収容され、吸着孔27Aによって吸着保持される。   In subsequent step S <b> 102, the optical components 31 to 35 are installed in the receiving grooves 26 to 30 of the component fixing unit 3. The optical components 31 to 35 are positioned and held by suction by the receiving grooves 26 to 30 of the holder 25. For example, as shown in FIG. 6A, the optical component 32 is accommodated in the accommodating groove 27 of the component fixing portion 3, and is adsorbed and held by the adsorbing hole 27A.

ここで、ステップS103で、空圧制御部15は、光学部品31〜35を吸着している吸着ライン7の真空圧を圧力センサ7Bによって調べる。吸着ライン7の真空圧が予め定められた規定値以上であれば(ステップS103でYes)、ステップS102に戻る。これは、吸着ライン7の圧力が高い場合は、光学部品31〜35が部品固定部3に正しく吸着保持されていない可能性があるため、光学部品31〜35が部品固定部3に正しく設置されているか確認する必要があるからである。   Here, in step S103, the air pressure control unit 15 checks the vacuum pressure of the suction line 7 that sucks the optical components 31 to 35 with the pressure sensor 7B. If the vacuum pressure in the suction line 7 is equal to or higher than a predetermined value (Yes in Step S103), the process returns to Step S102. This is because when the pressure of the suction line 7 is high, the optical components 31 to 35 may not be correctly sucked and held by the component fixing unit 3, so that the optical components 31 to 35 are correctly installed on the component fixing unit 3. It is because it is necessary to confirm whether it is.

これに対して、光学部品31〜35の吸着ライン7の真空圧が規定値より小さければ(ステップS103でNo)、空圧制御部15は光学部品31〜35が部品固定部3に正しく設置されていると判定し、ステップS104に進む。   On the other hand, if the vacuum pressure of the suction line 7 of the optical components 31 to 35 is smaller than the specified value (No in step S103), the pneumatic control unit 15 sets the optical components 31 to 35 correctly in the component fixing unit 3. And the process proceeds to step S104.

ステップS104では、筐体部2のベース21上の所定位置に部品固定部3を取り付け、吸着保持させる。ここで、空圧制御部15は、部品固定部3の吸着ライン6の真空圧を圧力センサ6Bによって調べる。吸着ライン6の真空圧が予め定められた規定値以上であれば(ステップS105でYes)、ステップS104に戻る。これは、吸着ライン6の真空圧が高い場合、部品固定部3がベース21に正しく吸着保持されていない可能性があるためであり、部品固定部3がベース21に正しく設置されていることを確認する必要があるからである。   In step S104, the component fixing unit 3 is attached to a predetermined position on the base 21 of the housing unit 2 and is sucked and held. Here, the air pressure control unit 15 checks the vacuum pressure of the suction line 6 of the component fixing unit 3 with the pressure sensor 6B. If the vacuum pressure in the suction line 6 is equal to or higher than a predetermined value (Yes in Step S105), the process returns to Step S104. This is because when the vacuum pressure of the suction line 6 is high, there is a possibility that the component fixing portion 3 is not correctly sucked and held by the base 21, and that the component fixing portion 3 is correctly installed on the base 21. This is because it is necessary to confirm.

これに対して、部品固定部3の吸着ライン6の真空圧が規定値より小さければ(ステップS105でNo)、空圧制御部15は部品固定部3がベース21上に正しく設置されていると判定し、ステップS106に進む。   On the other hand, if the vacuum pressure of the suction line 6 of the component fixing unit 3 is smaller than the specified value (No in step S105), the pneumatic control unit 15 indicates that the component fixing unit 3 is correctly installed on the base 21. Determine and proceed to step S106.

ステップS106では、円柱部材61に接着剤62を塗布する。続いて、ステップS107で、円柱部材61をガイド部41に装着する。図6Aに示すように、円柱部材61は、接着剤62を塗布した端部が下側に配置されるように、ガイド部41の前面41Aから把持溝51内に挿入され、2つの吸着孔55によって把持される。   In step S <b> 106, the adhesive 62 is applied to the cylindrical member 61. Subsequently, the cylindrical member 61 is attached to the guide portion 41 in step S107. As shown in FIG. 6A, the columnar member 61 is inserted into the holding groove 51 from the front surface 41 </ b> A of the guide portion 41 so that the end portion to which the adhesive 62 is applied is disposed on the lower side, and the two suction holes 55. Is gripped by.

ここで、円柱部材61の長さは、ガイド部41の長さ、即ち把持溝51の長さより大きい。このために、円柱部材61の上端部と下端部は、それぞれガイド部41の上面及び下面から突出する。ガイド部41には、逃げ部53が形成されているので、円柱部材61の上側の一部分と、下側の一部分のみがガイド部41に接触する。   Here, the length of the cylindrical member 61 is larger than the length of the guide portion 41, that is, the length of the gripping groove 51. Therefore, the upper end portion and the lower end portion of the columnar member 61 protrude from the upper surface and the lower surface of the guide portion 41, respectively. Since the guide portion 41 is formed with the escape portion 53, only the upper part and the lower part of the cylindrical member 61 are in contact with the guide part 41.

また、図6Bの平面図に示すように、把持溝51の奥の曲面部51Bの曲率が円柱部材61の曲率より僅かに小さいので、把持溝51の壁面と円柱部材61の曲面61Aとの接触面積は、小さい。さらに、円柱部材61の曲面61Aは、吸着孔55によって上側の一箇所と、下側の一箇所でガイド部41の把持溝51に吸着保持される。吸着孔55は上下に離間して配置されているので、円柱部材61を安定して吸着保持でき、吸着後の円柱部材61の位置ずれが生じ難い。吸着孔55の直径は、円柱部材61の直径より小さいので、空気の漏れは少なく、円柱部材61は確実に吸着保持される。   Further, as shown in the plan view of FIG. 6B, the curvature of the curved surface portion 51B at the back of the gripping groove 51 is slightly smaller than the curvature of the cylindrical member 61, so that the wall surface of the gripping groove 51 and the curved surface 61A of the cylindrical member 61 are in contact with each other. The area is small. Further, the curved surface 61 </ b> A of the cylindrical member 61 is sucked and held in the gripping groove 51 of the guide portion 41 at one place on the upper side and one place on the lower side by the suction holes 55. Since the suction holes 55 are spaced apart from each other in the vertical direction, the cylindrical member 61 can be stably suctioned and held, and the displacement of the cylindrical member 61 after suction is unlikely to occur. Since the diameter of the suction hole 55 is smaller than the diameter of the cylindrical member 61, there is little air leakage, and the cylindrical member 61 is securely held by suction.

次に、図5AのステップS108で、空圧制御部15が、円柱部材61の吸着ライン8の真空圧を圧力センサ8Bによって調べる。吸着ライン8の真空圧が予め定められた規定値以下であれば(ステップS108でYes)、ステップS107に戻る。これは、吸着ライン8の圧力が高い場合には、円柱部材61がガイド部41に正しく吸着保持されていない可能性があり、円柱部材61がガイド部41に正しく設置されていることを確認する必要があるからである。   Next, in step S108 of FIG. 5A, the pneumatic pressure control unit 15 checks the vacuum pressure of the suction line 8 of the cylindrical member 61 with the pressure sensor 8B. If the vacuum pressure of the suction line 8 is equal to or lower than a predetermined value (Yes in Step S108), the process returns to Step S107. This is because when the pressure of the suction line 8 is high, the columnar member 61 may not be correctly sucked and held by the guide portion 41, and it is confirmed that the columnar member 61 is correctly installed on the guide portion 41. It is necessary.

これに対して、円柱部材61の吸着ライン8の真空圧が規定値より小さければ(ステップS108でNo)、空圧制御部15は円柱部材61がガイド部41上に正しく設置されていると判定し、端子Aから進む図5BのステップS109を実行する。   On the other hand, if the vacuum pressure of the suction line 8 of the columnar member 61 is smaller than the specified value (No in step S108), the pneumatic pressure control unit 15 determines that the columnar member 61 is correctly installed on the guide unit 41. Then, step S109 of FIG.

図5BのステップS109では、装置制御部17が、押し付け部42を初期位置から方向に移動させる。このとき、ステップS110に示すように、装置制御部17は、予め定められた規定値に相当する距離まで押し付け部42を下降させる。これによって、押し付け部42から下方に延びるピン57の下端が円柱部材61に押し当てられる。さらに、押し付け部42を降下させると、ピン57に押されて円柱部材61が下方に移動させられ、ガイド部41の下端から突出量が変化する。円柱部材61は、2つの吸着孔55でガイド部41に保持されているだけなので、ピン57で押されることによって、把持溝51に沿って下方にスムーズに移動する。   In step S109 of FIG. 5B, the device control unit 17 moves the pressing unit 42 in the direction from the initial position. At this time, as shown in step S110, the device control unit 17 lowers the pressing unit 42 to a distance corresponding to a predetermined specified value. As a result, the lower end of the pin 57 extending downward from the pressing portion 42 is pressed against the cylindrical member 61. Further, when the pressing portion 42 is lowered, the cylindrical member 61 is moved downward by being pushed by the pin 57, and the protruding amount changes from the lower end of the guide portion 41. Since the cylindrical member 61 is only held by the guide portion 41 with the two suction holes 55, it is smoothly moved downward along the gripping groove 51 by being pushed by the pin 57.

ステップS110における規定値とは、ピン57によって押圧された全ての円柱部材61が、光学部品31〜35の上面に当接するような距離である。ここで、円柱部材61をガイド部41に吸着保持させるときに、円柱部材61の高さがばらつくことがある。しかしながら、ピン57はバッファ機構を介して押し付け部42に支持されているので、押し付け部42は、1つ1つの円柱部材61の高さのばらつきを吸収しながら、円柱部材61を所定距離だけ移動させ、光学部品31〜35に確実に押し付ける。   The specified value in step S110 is a distance such that all the cylindrical members 61 pressed by the pins 57 are in contact with the upper surfaces of the optical components 31 to 35. Here, when the cylindrical member 61 is attracted and held by the guide portion 41, the height of the cylindrical member 61 may vary. However, since the pin 57 is supported by the pressing portion 42 via the buffer mechanism, the pressing portion 42 moves the cylindrical member 61 by a predetermined distance while absorbing the variation in the height of each cylindrical member 61. And press firmly against the optical components 31-35.

押し付け部42の移動量が規定値に達したときの円柱部材61と光学部品32の配置の一例を図6Bに示す。
ピン57によって下方に押し下げられた円柱部材61は、ガイド部41の把持溝51に沿って下方にスライド移動し、突出量が変化することによって、光学部品32に上面に当接する。このとき、円柱部材61は、把持溝51に沿ってスムーズに移動する。これは、ガイド部41の把持溝51と円柱部材61との間の接触面積が小さいためである。さらに、把持溝51の上下方向の中央の逃げ部53によって、ガイド部41の把持溝51と円柱部材61との間の接触面積がさらに減少させられているためである。
An example of the arrangement of the cylindrical member 61 and the optical component 32 when the amount of movement of the pressing portion 42 reaches a specified value is shown in FIG. 6B.
The columnar member 61 pushed down by the pin 57 slides downward along the grip groove 51 of the guide portion 41, and comes into contact with the optical component 32 by changing the protruding amount. At this time, the columnar member 61 moves smoothly along the gripping groove 51. This is because the contact area between the grip groove 51 of the guide portion 41 and the cylindrical member 61 is small. Furthermore, this is because the contact area between the grip groove 51 of the guide portion 41 and the columnar member 61 is further reduced by the escape portion 53 at the center in the vertical direction of the grip groove 51.

また、ガイド部41の2つの吸着孔55の間の距離L1は、円柱部材61の長さから円柱部材61の移動量を引いた値L2より小さいので、円柱部材61は常に2つの吸着孔55によって吸着された状態を保つ。従って、円柱部材61は、姿勢を崩すことなく、垂直に光学部品32に突き当てられる。   Further, since the distance L1 between the two suction holes 55 of the guide portion 41 is smaller than the value L2 obtained by subtracting the movement amount of the cylindrical member 61 from the length of the cylindrical member 61, the cylindrical member 61 always has two suction holes 55. Keep the state adsorbed by. Therefore, the columnar member 61 is abutted against the optical component 32 vertically without breaking the posture.

さらに、図5BのステップS111で、空圧制御部15が円柱部材61の吸着ライン7の真空圧を圧力センサ7Bによって調べる。吸着ライン7の真空圧が予め定められた規定値以上であったならば(ステップS111でYes)、ステップS112で押し付け部42を上昇させてピン57を初期位置に戻してから、ステップS109に戻る。これは、吸着ライン7の圧力が高い場合には、円柱部材61を押し下げる過程や、円柱部材61を光学部品31〜35に押し当てたときに、円柱部材61の位置がずれてしまった可能性があるため、円柱部材61の姿勢を確かめる必要があるからである。   Further, in step S111 of FIG. 5B, the air pressure control unit 15 checks the vacuum pressure of the suction line 7 of the cylindrical member 61 by the pressure sensor 7B. If the vacuum pressure in the suction line 7 is equal to or higher than a predetermined value (Yes in Step S111), the pressing portion 42 is raised in Step S112 to return the pin 57 to the initial position, and the process returns to Step S109. . This is because there is a possibility that the position of the cylindrical member 61 has shifted when the pressure of the suction line 7 is high, when the cylindrical member 61 is pushed down, or when the cylindrical member 61 is pressed against the optical components 31 to 35. This is because the posture of the columnar member 61 needs to be confirmed.

一方、空圧制御部15で調べた吸着ライン7の真空圧が規定値より小さければ(ステップS111でNo)、ステップS113で押し付け部42を上昇させてピン57を初期位置まで戻す。これは、接着剤62の硬化時に円柱部材61にストレスがかからないようにするためである。これによって、図6Cに示すように、光学部品32上に円柱部材61が垂直に立てられ、ガイド部41には2つの吸着孔55で支持される。   On the other hand, if the vacuum pressure of the suction line 7 examined by the air pressure control unit 15 is smaller than the specified value (No in step S111), the pressing unit 42 is raised in step S113 to return the pin 57 to the initial position. This is to prevent the cylindrical member 61 from being stressed when the adhesive 62 is cured. As a result, as shown in FIG. 6C, the cylindrical member 61 stands vertically on the optical component 32, and is supported by the guide portion 41 through the two suction holes 55.

続いて、図5BのステップS114で接着剤62を硬化させる。接着剤62は、硬化制御部16がUV照射器10からUV光を照射させることで硬化させる。図1に示す状態でUV光を照射しても良いし、円柱部材61と光学部品31〜35の当接箇所が上に向くように取り付け装置1を傾斜させた後、上からUV光を照射しても良い。円柱部材61も光学部品31〜35も真空吸着によって位置決めして保持されているので、取り付け装置1を傾斜させても両者の位置がずれることはない。   Subsequently, the adhesive 62 is cured in step S114 of FIG. 5B. The adhesive 62 is cured by the curing control unit 16 irradiating the UV light from the UV irradiator 10. The UV light may be irradiated in the state shown in FIG. 1, or after the mounting apparatus 1 is inclined so that the contact portion between the cylindrical member 61 and the optical components 31 to 35 faces upward, the UV light is irradiated from above. You may do it. Since the columnar member 61 and the optical components 31 to 35 are both positioned and held by vacuum suction, the positions of the both do not shift even when the mounting device 1 is tilted.

ステップS115で、硬化制御部16は、UV光の照射開始からの経過時間を硬化時間としてカウントする。硬化時間が予め定められた規定値に達したら、ステップS116に進んで、空圧制御部15が部品固定部3、光学部品31〜35、円柱部材61の真空吸着を解除する。   In step S115, the curing control unit 16 counts the elapsed time from the start of UV light irradiation as the curing time. When the curing time reaches a predetermined specified value, the process proceeds to step S116, and the pneumatic control unit 15 releases the vacuum suction of the component fixing unit 3, the optical components 31 to 35, and the cylindrical member 61.

この後、ステップS117で、部品固定部3を筐体2のベース21から取り出す。さらに、ステップS118では、部品固定部3から、円柱部材61が接着された光学部品31〜35を回収する。図6Dに示すように、光学部品32の上面に接着剤62で円柱部材61が接着された光学部品ユニット65が得られる。光学部品ユニット65は、円柱部材61を不図示のハンドリング装置で把持され、位置決めや光軸調整されつつ、他の部品に取り付けられる。光学部品32を他の部品に取り付けた後は、外力を加えて、円柱部材61を光学部品32から取り外す。   Thereafter, the component fixing portion 3 is taken out from the base 21 of the housing 2 in step S117. Furthermore, in step S <b> 118, the optical components 31 to 35 to which the columnar member 61 is bonded are collected from the component fixing unit 3. As shown in FIG. 6D, an optical component unit 65 in which the cylindrical member 61 is bonded to the upper surface of the optical component 32 with an adhesive 62 is obtained. The optical component unit 65 is attached to other components while the cylindrical member 61 is gripped by a handling device (not shown), and positioning and optical axis adjustment are performed. After attaching the optical component 32 to another component, an external force is applied to remove the cylindrical member 61 from the optical component 32.

以上、説明したように、この実施の形態の把持移動装置4では、曲面部51Bによって円柱部材61が把持溝51の中心に位置決めされると共に、2つの吸着孔55によってガイド部41に確実に保持させることができる。また、円柱部材61を位置決めして吸着保持しながら、上方からピン57を押し当てるようにしたので、円柱部材61の位置ずれを防止しつつ、円柱部材61を所望の場所まで移動させることができる。円柱部材61のガイド部41からの突出量は、押し付け部42の移動量によって簡単に制御できる。   As described above, in the gripping and moving device 4 of this embodiment, the cylindrical member 61 is positioned at the center of the gripping groove 51 by the curved surface portion 51 </ b> B and securely held by the guide portion 41 by the two suction holes 55. Can be made. Further, since the pin 57 is pressed from above while positioning and holding the cylindrical member 61, the cylindrical member 61 can be moved to a desired place while preventing the positional displacement of the cylindrical member 61. . The amount of protrusion of the cylindrical member 61 from the guide portion 41 can be easily controlled by the amount of movement of the pressing portion 42.

また、把持溝51の曲面部51Bの曲率を円柱部材61の曲率に比べて僅かに小さくしたので、円柱部材61の把持溝51からの出し入れが容易になると共に、把持溝51と円柱部材61との接触面積を低下できる。さらに、円柱部材61を把持溝51の中心に配置し易い。円柱部材61は、上側の一部と下側の一部のみで把持溝51に接触するようにした。このことから、円柱部材61を下方に移動させる際の摩擦は小さくなるので、円柱部材61の移動時における位置ずれを防止できる。上下に離れた2箇所で円柱部材61を吸着するようにしたので、円柱部材61の移動時における位置ずれを防止できる。   In addition, since the curvature of the curved surface portion 51B of the grip groove 51 is slightly smaller than the curvature of the cylindrical member 61, the cylindrical member 61 can be easily inserted into and removed from the grip groove 51, and the grip groove 51 and the cylindrical member 61 The contact area can be reduced. Furthermore, it is easy to arrange the cylindrical member 61 at the center of the gripping groove 51. The cylindrical member 61 was made to contact the gripping groove 51 only at the upper part and the lower part. From this, the friction when moving the cylindrical member 61 downward is reduced, so that it is possible to prevent the displacement of the cylindrical member 61 during the movement. Since the cylindrical member 61 is adsorbed at two places that are separated from each other in the vertical direction, it is possible to prevent a positional shift when the cylindrical member 61 is moved.

さらに、この実施の形態の取り付け装置1では、把持移動装置4を備えることによって、円柱部材61を光学部品31〜35に位置決めして当接させることができる。光学部品31〜35を移動させる場合に比べて、円柱部材61と光学部品31〜35の相対的な位置を簡単に制御できる。また、接着剤62を塗布した円柱部材61を把持移動させて光学部品31〜35に突き当てた後、接着剤62を硬化させるようにしたので、光学部品31〜35に位置決め及び光軸調整用の軸を精度良く取り付けられる。   Furthermore, in the attachment device 1 of this embodiment, the cylindrical member 61 can be positioned and brought into contact with the optical components 31 to 35 by including the gripping and moving device 4. Compared with the case where the optical components 31 to 35 are moved, the relative positions of the cylindrical member 61 and the optical components 31 to 35 can be easily controlled. Further, since the cylindrical member 61 coated with the adhesive 62 is gripped and moved and abutted against the optical components 31 to 35, the adhesive 62 is cured, so that the optical components 31 to 35 are positioned and adjusted for the optical axis. Can be attached with high accuracy.

従来の取り付け装置では、円柱部材を接着した後で半円筒溝から円柱部材を取り外すためには、円柱部材と半円筒溝の嵌め合いを解除する必要がある。円柱部材と半円筒溝の嵌め合いを解除する際には、円柱部材に力が作用して基板に対する円柱部材の接着角度がずれ、接着強度が低下する可能性があった。これに対して、取り付け装置1は、円柱部材61を光学部品31〜35にセットした光学部品ユニット65は取り付け装置1に吸着保持されているだけなので、光学部品ユニット65の取り外し時の接着強度の低下や位置ずれを防止できる。   In the conventional attachment device, in order to remove the column member from the semi-cylindrical groove after the column member is bonded, it is necessary to release the fitting between the column member and the semi-cylindrical groove. When the fitting between the columnar member and the semi-cylindrical groove is released, a force is applied to the columnar member so that the bonding angle of the columnar member with respect to the substrate is shifted and the bonding strength may be reduced. On the other hand, the attachment device 1 has the adhesive strength at the time of removal of the optical component unit 65 because the optical component unit 65 in which the cylindrical member 61 is set on the optical components 31 to 35 is only sucked and held by the attachment device 1. Decline and misalignment can be prevented.

ここで、細長の円柱部材61は、光軸調整用の軸に限定されない。また、取り付け装置1は、光学部品31〜35の代わりの他の部品に円柱部材61を当接させても良い。
また、把持溝51の形状は、図2Aに限定されず、例えば半円形状や楕円形状でも良い。さらいに、把持溝51の側壁51Aは、ガイド部41の前面41Aに向かって開くように傾斜させても良い。
Here, the elongated cylindrical member 61 is not limited to the optical axis adjusting axis. Moreover, the attachment apparatus 1 may abut the cylindrical member 61 on another component instead of the optical components 31 to 35.
Moreover, the shape of the holding groove 51 is not limited to FIG. 2A, For example, a semicircle shape and an elliptical shape may be sufficient. In addition, the side wall 51A of the grip groove 51 may be inclined so as to open toward the front surface 41A of the guide portion 41.

ここで挙げた全ての例及び条件的表現は、発明者が技術促進に貢献した発明及び概念を読者が理解するのを助けるためのものであり、ここで具体的に挙げたそのような例及び条件に限定することなく解釈するものであり、また、明細書におけるそのような例の編成は本発明の優劣を示すこととは関係ない。本発明の実施形態を詳細に説明したが、本発明の精神及び範囲から逸脱することなく、それに対して種々の変更、置換及び変形を施すことができる。   All examples and conditional expressions given here are intended to help the reader understand the inventions and concepts that have contributed to the promotion of technology, and such examples and It is to be construed without being limited to the conditions, and the organization of such examples in the specification is not related to showing the superiority or inferiority of the present invention. While embodiments of the present invention have been described in detail, various changes, substitutions and variations can be made thereto without departing from the spirit and scope of the present invention.

以下に、前記の実施の形態の特徴を付記する。
(付記1)
円柱部材を挿入可能で、前記円柱部材の曲率より小さい曲率を有する曲面部を有し、前記曲面部には吸着孔が形成されており、前記吸着孔によって前記円柱部材の側部の曲面を吸着することによって前記曲面部に前記円柱部材を把持するガイド部と、前記曲面部に挿入された前記円柱部材を、前記円柱部材の軸線方向に押圧する押し付け部と、前記ガイド部に吸着保持したままで、前記押し付け部によって前記円柱部材を前記曲面部に沿って移動させ、前記ガイド部からの前記円柱部材の突出量を変化させる制御部と、を含むことを特徴とする把持移動装置。
(付記2)前記曲面部には、複数の吸着孔が形成されていることを特徴とする付記1に記載の把持移動装置。
(付記3)前記曲面部を2つ分割する凹部を有し、前記凹部によって2つに分割された前記曲面部のそれぞれの領域に前記吸着孔が1つずつ形成されていることを特徴とする付記1又は付記2に記載の把持移動装置。
(付記4)前記吸着孔の間の距離は、前記円柱部材の長さから前記円柱部材の移動量を引いた値より小さいことを特徴とする付記1乃至付記3のいずれか一項に記載の把持移動装置。
(付記5)前記曲面部は、前記ガイド部の前面に形成されたU字形の溝によって形成されていることを特徴とする付記1乃至付記4のいずれか一項に記載の把持移動装置。
(付記6)前記溝の長さは、前記円柱部材より短いことを特徴とする付記1乃至付記5のいずれか一項に記載の把持移動装置。
(付記7)前記ワークが光学部品であり、前記円柱部材が前記ワークの光軸調整用の軸部材であることを特徴とする付記1乃至付記6のいずれか一項に記載の把持移動装置。
(付記8)付記1乃至付記7のいずれか一項に記載の把持移動装置と、ワークを保持する固定部と、を含み、前記制御部は、前記円柱部材が前記ワークに当接するまで前記押し付け部を移動させることを特徴とする円柱部品の取り付け装置。
(付記9)前記円柱部材を前記ワークに接着させる接着装置を有することを特徴とする付記8に記載の円柱部材の取り付け装置。
(付記10)ガイド部に形成された曲面部に円柱部材を挿入し、前記曲面部に形成された吸着孔を用いて前記円柱部材の側部の曲面を吸着することによって前記円柱部材を吸着保持する工程と、前記円柱部材の一端に押し付け部材を当接させる工程と、前記押し付け部材で前記円柱部材を前記円柱部材の軸線方向に押圧し、前記円柱部材を前記ガイド部に吸着保持させた状態で移動させる工程と、を含むことを特徴とする把持移動方法。
(付記11)前記円柱部材を移動させる工程は、前記ガイド部から所定距離に配置されたワークに前記円柱部材を当接させる工程を含むことを特徴とする付記10に記載の把持移動方法。
(付記12)前記円柱部材を複数個所で前記ガイド部に吸着保持し、前記円柱部材を移動させる工程では、前記円柱部材を移動させる間、複数個所で前記円柱部材を吸着保持することを特徴とする付記10又は付記11に記載の把持移動方法。
(付記13)付記10乃至付記12のいずれか一項に記載の工程と、前記円柱部材と前記ワークとの間の供給した接着剤を硬化させる工程と、を含むことを特徴とする円柱部材の接着方法。
(付記14)接着剤の硬化前に前記円柱部材から前記押し付け部を離間させる工程を含むことを特徴とする付記14に記載の円柱部材の接着方法。
(付記15)ガイド部に形成された曲面部で、円柱部材の側面を吸着保持する工程と、前記円柱部材の軸線方向に前記円柱部材を押圧し、前記円柱部材の吸着を保持しながら前記円柱部材を移動させ、前記円柱部材の端部を他の部品に当接させる工程と、前記円柱部材と前記他の部品とを接合する工程と、を含む円柱部材の接合方法。)
The features of the above embodiment will be added below.
(Appendix 1)
A cylindrical member can be inserted and has a curved surface portion having a curvature smaller than the curvature of the cylindrical member, and an adsorption hole is formed in the curved surface portion, and the curved surface on the side of the cylindrical member is adsorbed by the adsorption hole. Thus, the guide portion that holds the cylindrical member on the curved surface portion, the pressing portion that presses the cylindrical member inserted in the curved surface portion in the axial direction of the cylindrical member, and the guide portion are held by suction. And a control unit that moves the columnar member along the curved surface by the pressing unit and changes a protruding amount of the columnar member from the guide unit.
(Additional remark 2) The holding | grip movement apparatus of Additional remark 1 characterized by the above-mentioned.
(Additional remark 3) It has the recessed part which divides the said curved-surface part into two, The said adsorption hole is formed in each area | region of the said curved-surface part divided | segmented into two by the said recessed part, It is characterized by the above-mentioned. The gripping and moving device according to Supplementary Note 1 or Supplementary Note 2.
(Supplementary note 4) The distance between the suction holes is smaller than a value obtained by subtracting the amount of movement of the cylindrical member from the length of the cylindrical member, according to any one of supplementary notes 1 to 3, Gripping and moving device.
(Additional remark 5) The said curved surface part is formed of the U-shaped groove | channel formed in the front surface of the said guide part, The holding | gripping movement apparatus as described in any one of Additional remark 1 thru | or Additional remark 4 characterized by the above-mentioned.
(Supplementary note 6) The gripping and moving device according to any one of supplementary notes 1 to 5, wherein a length of the groove is shorter than the cylindrical member.
(Supplementary note 7) The gripping and moving device according to any one of supplementary notes 1 to 6, wherein the workpiece is an optical component, and the cylindrical member is a shaft member for adjusting an optical axis of the workpiece.
(Additional remark 8) The holding | grip movement apparatus as described in any one of additional remark 1 thru | or appendix 7, and the fixing | fixed part holding a workpiece | work, The said control part presses until the said cylindrical member contact | abuts to the said workpiece | work. An apparatus for attaching a cylindrical part, wherein the part is moved.
(Additional remark 9) It has an adhesion | attachment apparatus which adheres the said cylindrical member to the said workpiece | work, The attachment apparatus of the cylindrical member of Additional remark 8 characterized by the above-mentioned.
(Additional remark 10) A cylindrical member is inserted in the curved surface part formed in the guide part, and the cylindrical member is adsorbed and held by adsorbing the curved surface of the side part of the cylindrical member using the adsorption holes formed in the curved surface part. And a step of bringing a pressing member into contact with one end of the cylindrical member; and a state in which the cylindrical member is pressed in the axial direction of the cylindrical member by the pressing member and the cylindrical member is sucked and held by the guide portion. A gripping movement method comprising the steps of:
(Supplementary note 11) The gripping and moving method according to supplementary note 10, wherein the step of moving the cylindrical member includes a step of bringing the cylindrical member into contact with a workpiece disposed at a predetermined distance from the guide portion.
(Supplementary Note 12) In the step of attracting and holding the cylindrical member to the guide portion at a plurality of locations and moving the cylindrical member, the cylindrical member is attracted and retained at a plurality of locations while the cylindrical member is moved. The holding and moving method according to Supplementary Note 10 or Supplementary Note 11.
(Additional remark 13) The process of any one of Additional remark 10 thru | or Additional remark 12, and the process of hardening the supplied adhesive agent between the said cylindrical member and the said workpiece | work, The cylindrical member characterized by the above-mentioned. Bonding method.
(Additional remark 14) The method of adhering the cylindrical member of Additional remark 14 characterized by including the process of separating the said press part from the said cylindrical member before hardening of an adhesive agent.
(Supplementary Note 15) A step of adsorbing and holding the side surface of the columnar member at the curved surface portion formed in the guide unit, and pressing the columnar member in the axial direction of the columnar member and holding the columnar member while adsorbing the columnar member A method for joining cylindrical members, comprising: a step of moving a member to bring an end of the cylindrical member into contact with another component; and a step of joining the cylindrical member and the other component. )

1 取り付け装置
3 部品固定部
4 把持移動装置
10 紫外線照射器(接着装置)
11 制御部
31,32,33,34,35 光学部品
41 ガイド部
42 押し付け部
51 把持溝
51B 曲面部
53 凹部
55 吸着孔
61 円柱部材
DESCRIPTION OF SYMBOLS 1 Attachment apparatus 3 Component fixing part 4 Grasp movement apparatus 10 Ultraviolet irradiation device (adhesion apparatus)
DESCRIPTION OF SYMBOLS 11 Control part 31,32,33,34,35 Optical component 41 Guide part 42 Pressing part 51 Holding groove 51B Curved part 53 Recessed part 55 Adsorption hole 61 Cylindrical member

Claims (5)

円柱部材を挿入可能で、前記円柱部材の曲率より小さい曲率を有する曲面部を有し、前記曲面部には吸着孔が形成されており、前記吸着孔によって前記円柱部材の側部の曲面を吸着することによって前記曲面部に前記円柱部材を把持するガイド部と、
前記曲面部に挿入された前記円柱部材を、前記円柱部材の軸線方向に押圧する押し付け部と、
前記ガイド部に吸着保持したままで、前記押し付け部によって前記円柱部材を前記曲面部に沿って移動させ、前記ガイド部からの前記円柱部材の突出量を変化させる制御部と、
を含み、
前記曲面部には、前記円柱部材が前記押し付け部で押圧されて移動する方向に前記円柱部材の吸着孔が複数配列されていることを特徴とする把持移動装置。
A cylindrical member can be inserted and has a curved surface portion having a curvature smaller than the curvature of the cylindrical member, and an adsorption hole is formed in the curved surface portion, and the curved surface on the side of the cylindrical member is adsorbed by the adsorption hole. A guide portion for gripping the cylindrical member on the curved surface portion,
A pressing portion that presses the cylindrical member inserted into the curved surface portion in the axial direction of the cylindrical member;
A control unit that moves the cylindrical member along the curved surface portion by the pressing portion while adsorbing and holding the guide portion, and changes a protruding amount of the cylindrical member from the guide portion;
Only including,
The gripping and moving device , wherein the cylindrical member has a plurality of suction holes arranged in the direction in which the cylindrical member is moved by being pressed by the pressing portion .
前記曲面部を2つ分割する凹部を有し、前記凹部によって2つに分割された前記曲面部のそれぞれの領域に前記吸着孔が1つずつ形成されていることを特徴とする請求項1に記載の把持移動装置。 It has a recess that two dividing said curved surface portion, to claim 1, wherein the suction holes in each of the regions of the curved surface portion which is divided into two by the recess, characterized in that it is formed one by one The holding | grip movement apparatus of description. 請求項1又は請求項2に記載の把持移動装置と、
ワークを保持する固定部と、
を含み、前記制御部は、前記円柱部材が前記ワークに当接するまで前記押し付け部を移動させることを特徴とする円柱部品の取り付け装置。
The gripping and moving device according to claim 1 or 2 ,
A fixed part for holding the workpiece;
The control part moves the pressing part until the cylindrical member abuts on the work.
ガイド部に形成された曲面部に円柱部材を挿入し、前記曲面部に形成された吸着孔を用いて前記円柱部材の側部の曲面を吸着することによって前記円柱部材を吸着保持する工程と、
前記円柱部材の一端に押し付け部材を当接させる工程と、
前記押し付け部材で前記円柱部材を前記円柱部材の軸線方向に押圧し、前記軸線方向に複数配列された前記吸着孔で前記円柱部材を前記ガイド部に吸着保持させた状態で移動させる工程と、
を含むことを特徴とする把持移動方法。
Inserting the cylindrical member into the curved surface portion formed in the guide portion, and sucking and holding the cylindrical member by sucking the curved surface of the side portion of the cylindrical member using the suction holes formed in the curved surface portion;
Contacting the pressing member with one end of the cylindrical member;
Pressing the cylindrical member in the axial direction of the cylindrical member with the pressing member, and moving the cylindrical member in a state where the cylindrical member is adsorbed and held by the suction holes arranged in the axial direction ; and
A gripping and moving method comprising:
前記円柱部材を移動させる工程は、前記ガイド部から所定距離に配置されたワークに前記円柱部材を当接させる工程を含むことを特徴とする請求項に記載の把持移動方法。
The gripping movement method according to claim 4 , wherein the step of moving the columnar member includes a step of bringing the columnar member into contact with a workpiece disposed at a predetermined distance from the guide portion.
JP2012062710A 2012-03-19 2012-03-19 Gripping and moving apparatus, cylindrical member mounting apparatus, and gripping and moving method Active JP5884583B2 (en)

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