JP5874645B2 - 化合物半導体薄膜太陽電池及びその製造方法 - Google Patents
化合物半導体薄膜太陽電池及びその製造方法 Download PDFInfo
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- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035209—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions comprising a quantum structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Description
本発明の第2の実施形態に係る太陽電池の製造方法は、電極上に光吸収層を形成する工程と、前記光吸収層上に少なくとも金属元素及び16族元素を含むナノ粒子を含むインクを塗布または印刷し、塗膜を形成する工程と、前記塗膜を熱処理してバッファー層を形成する工程とを具備することを特徴とする。
チオ尿素基を有するバインダは、有機溶媒に溶かし易く、調液しやすいというメリットがある。また、チオ尿素基は加熱分解し易く、結晶化した後の膜に残りにくいというメリットがある。
(インクの調製)
ピリジンに溶かしたInI3を、メタノールに溶かしたNa2S溶液と混合した。InI3とNa2Sのモル比は2:3なるように調液した。混合した後、不活性ガス雰囲気中で、0℃で反応させ、In2S3ナノ粒子を生成した。得られた液をろ過し、メタノールで洗浄した後、固形分5%になるようにピリジンに分散させ、インクを得た。
ソーダライムガラス(101)の上に、スパッタ法を用いて、0.6μmのMo層を形成した。
Mo基板の上に、Cu、In、Ga、Se元素を3段階蒸着法により蒸着し、膜厚2μmのCuIn0.8Ga0.2Se2層を形成した。
上述したインクをCuIn0.8Ga0.2Se2層上にスプレー法により塗布し、275℃で10分間加熱することにより、膜厚50nmのバッファー層104を形成した。
ジエチル亜鉛と水を原料として、バッファー層の上に、MOCVD法を用いて50nmのZnO層を堆積した。
ジエチル亜鉛、水とジボランを原料として、i層の上に、MOCVD法を用いて1μmのZnO:B層を形成した。
蒸着法を用いて、n層のZnO:B層の上に0.3μmのAl電極を形成した。以上により、CIGS太陽電池セルを得た。
実施例1と同様に、ソーダライムガラスの上に、スパッタ法を用いて、0.6μmのMo層を形成した後、蒸着法による2μmCIGS層を形成した。
実施例1と同様に、ソーダライムガラスの上に、スパッタ法を用いて、0.6μmのMo層を形成した後、蒸着法により2μmCIGS層を形成した。
(インクの調製)
ピリジンに溶かしたInI3を、メタノールに溶かしたNa2S溶液と混合した。InI3とNa2Sのモル比が2:3になるように調液した。混合した後、不活性ガス雰囲気中で、0℃で反応させ、In2S3ナノ粒子を生成した。得られた液をろ過し、メタノールで洗浄した後、固形分が5%になるようにピリジンに分散させ、インクを得た。
ソーダライムガラス(101)の上に、スパッタ法を用いて、0.6μmのMo層を形成した。
Mo基板の上に、SnS、Cu、及びZnSをスパッタした後、20%H2Sを含む窒素雰囲気で550℃で3時間アニールし、膜厚2μmのCu2ZnSnS4層を形成した。
上述したインクをCu2ZnSnS4層上にスプレー法により塗布し、275℃で10分間加熱することにより、膜厚50nmのバッファー層104を形成した。
ジエチル亜鉛と水を原料として、バッファー層の上に、MOCVD法を用いて50nmのZnO層を堆積した。
ジエチル亜鉛、水、及びジボランを原料として、i層の上に、MOCVD法を用いて1μmのZnO:B層を形成した。
蒸着法を用いて、n層のZnO:B層の上に0.3μmのAl電極を形成した。以上により、CZTS太陽電池セルを得た。
実施例2と同様に、ソーダライムガラスの上に、スパッタ法を用いて、0.6μmのMo層を形成した後、スパッタ法による2μmCZTS層を形成した。
実施例2と同様に、ソーダライムガラスの上に、スパッタ法を用いて、0.6μmのMo層を形成した後、スパッタ法により2μmCZTS層を形成した。
以下に、当初の特許請求の範囲に記載していた発明を付記する。
[1]
化合物半導体からなる光吸収層及びこの光吸収層上に形成されたバッファー層を具備する化合物半導体薄膜太陽電池であって、前記バッファー層を、少なくとも金属元素及び16族元素を含むナノ粒子を含むインクを用いて形成したことを特徴とする化合物半導体薄膜太陽電池。
[2]
前記化合物半導体の組成はCu x In y Ga 1−y Se z S 2−z (0≦x≦1、0≦y≦1、0≦z≦2)であることを特徴とする[1]に記載の化合物半導体薄膜太陽電池。
[3]
前記化合物半導体の組成はCu 2−x Sn y Zn 2−y Se z S 4−z (0≦x≦2、0≦y≦2、0≦z≦4)であることを特徴とする[1]に記載の化合物半導体薄膜太陽電池。
[4]
前記ナノ粒子はInとSを含むことを特徴とする[1]〜[3]のいずれかに記載の化合物半導体薄膜太陽電池。
[5]
前記ナノ粒子のIn/Sモル比は1/8〜2であることを特徴とする[4]に記載の化合物半導体薄膜太陽電池。
[6]
前記ナノ粒子はIn 2 S 3 であることを特徴とする[1]〜[3]のいずれかに記載の化合物半導体薄膜太陽電池。
[7]
前記ナノ粒子の平均粒径は1nm以上200nm以下であることを特徴とする[1]〜[3]のいずれかに記載の化合物半導体薄膜太陽電池。
[8]
前記インクはS原子を含むバインダを含むことを特徴とする[1]〜[3]のいずれかに記載の化合物半導体薄膜太陽電池。
[9]
前記S原子を含むバインダは下記化学式で表されることを特徴とする[8]に記載の化合物半導体薄膜太陽電池。
[10]
[1]〜[3]のいずれかに記載のインクを塗布または印刷し、熱処理してなるバッファー層を具備することを特徴とする化合物半導体薄膜太陽電池。
[11]
電極上に光吸収層を形成する工程と、
前記光吸収層上に少なくとも金属元素及び16族元素を含むナノ粒子を含むインクを塗布または印刷し、塗膜を形成する工程と、
前記塗膜を熱処理してバッファー層を形成する工程と
を具備することを特徴とする化合物半導体薄膜太陽電池の製造方法。
Claims (8)
- 化合物半導体からなる光吸収層及びこの光吸収層上に形成されたバッファー層を具備する化合物半導体薄膜太陽電池であって、前記バッファー層はインクから形成され、前記インクは、少なくとも金属元素及び16族元素を含むナノ粒子と、下記化学式で表されるバインダとを含むことを特徴とする化合物半導体薄膜太陽電池。
- 前記化合物半導体の組成はCuxInyGa1−ySezS2−z(0≦x≦1、0≦y≦1、0≦z≦2)であることを特徴とする請求項1に記載の化合物半導体薄膜太陽電池。
- 前記化合物半導体の組成はCu2−xSnyZn2−ySezS4−z(0≦x≦2、0≦y≦2、0≦z≦4)であることを特徴とする請求項1に記載の化合物半導体薄膜太陽電池。
- 前記ナノ粒子はInとSを含むことを特徴とする請求項1〜3のいずれかに記載の化合物半導体薄膜太陽電池。
- 前記ナノ粒子のIn/Sモル比は1/8〜2であることを特徴とする請求項4に記載の化合物半導体薄膜太陽電池。
- 前記ナノ粒子はIn2S3であることを特徴とする請求項1〜3のいずれかに記載の化合物半導体薄膜太陽電池。
- 前記ナノ粒子の平均粒径は1nm以上200nm以下であることを特徴とする請求項1〜6のいずれかに記載の化合物半導体薄膜太陽電池。
- 電極上に光吸収層を形成する工程と、
前記光吸収層上に、少なくとも金属元素及び16族元素を含むナノ粒子と、下記化学式で表されるバインダとを含むインクを塗布または印刷し、塗膜を形成する工程と、
前記塗膜を熱処理してバッファー層を形成する工程と
を具備することを特徴とする化合物半導体薄膜太陽電池の製造方法。
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